JP2013195658A - Uv irradiation device and method for measuring intensity of uv ray - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a UV irradiation device and a method for measuring the intensity of UV rays, in which the intensity of UV rays can be easily measured without installing a moving mechanism of a UV monitor that may complicate the UV irradiation device.SOLUTION: A UV irradiation device includes UV emitting means for emitting UV rays, measuring means for measuring the intensity of UV rays emitting from the UV emitting means, and light guide means for guiding UV rays from the UV emitting means to the measuring means. A method for measuring the intensity of UV rays comprises measuring the intensity of UV rays emitting from the UV emitting means, and includes: a first measuring step of measuring the intensity of UV rays emitting from a plurality of UV emitting means under the condition that the plurality of UV ray emitting means are lit; and a second measuring step of, under the condition that one UV emitting means is extinct while others in the plurality of UV ray emitting means are lit, measuring the intensity of UV rays emitting from the UV emitting means that maintain lighting.

Description

  The present invention relates to an ultraviolet irradiation device and a method for measuring ultraviolet intensity.

  2. Description of the Related Art Conventionally, there is known an ultraviolet irradiation apparatus that irradiates a member to be processed with ultraviolet light emitted from a light source and processes the member to be processed. The treatment is, for example, modification of the surface of the member to be treated or cleaning. In order to carry out a suitable treatment, it is necessary to appropriately maintain the intensity of the ultraviolet rays to be irradiated. However, the intensity of the ultraviolet rays that can be irradiated may change due to changes in the light source over time. In order to appropriately maintain the intensity of the irradiated ultraviolet light, an ultraviolet irradiation apparatus including a measuring device that measures the intensity of the ultraviolet light emitted from the light source is used.

  Patent Document 1 includes an ultraviolet monitor for detecting the intensity of ultraviolet light emitted from an irradiation window of a lamp house, and a moving mechanism that moves the ultraviolet monitor in a direction approaching the light irradiation window, and is emitted from the irradiation window. An ultraviolet irradiation apparatus that can easily measure the intensity of ultraviolet rays is disclosed.

JP 2003-275576 A

  However, the apparatus disclosed in Patent Document 1 has a problem that the ultraviolet irradiation apparatus becomes complicated by providing the moving mechanism. That is, there is a problem that the ultraviolet irradiation device becomes large and the manufacturing cost increases. Further, since the ultraviolet monitor is moved by the moving mechanism, there is a problem that the moving mechanism or the ultraviolet monitor may collide with an object to be processed due to a malfunction of the moving mechanism.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 An ultraviolet irradiation apparatus according to this application example includes an ultraviolet emission unit that emits ultraviolet rays, a measurement unit that measures the intensity of ultraviolet rays emitted from the ultraviolet emission unit, and ultraviolet rays from the ultraviolet emission unit. And a light guiding means for guiding to the measuring means.

  According to the ultraviolet irradiation apparatus according to this application example, the ultraviolet light is guided from the ultraviolet emission means to the measurement means by the light guide means. By guiding the ultraviolet rays using the light guiding means, it is possible to suppress a decrease in the amount of ultraviolet rays reaching the measuring means due to scattering in the middle of the path from the ultraviolet emitting means to the measuring means. . As a result, a sufficient amount of ultraviolet rays can be guided to the measuring means disposed at a position away from the ultraviolet emitting means. Even if the measuring means has a narrow light receiving range, the intensity of the ultraviolet light in a wide range can be measured by guiding a wide range of ultraviolet light to the light receiving range of the measuring means by the light guiding means.

  Application Example 2 In the ultraviolet irradiation apparatus according to the application example described above, the light guide unit has a columnar shape, and extends in a direction substantially parallel to the longitudinal direction of the ultraviolet emission unit having the columnar shape. It is preferable to be provided.

  According to this ultraviolet irradiation device, the light guide means having the columnar shape and the ultraviolet emission means are arranged side by side. Since the portion of the ultraviolet ray emitting means facing the light guide means can be widened, a sufficient amount of light can be easily received.

  Application Example 3 In the ultraviolet irradiation apparatus according to the application example described above, the light guide unit has a columnar shape, and extends in a direction intersecting with a longitudinal direction of the ultraviolet emission unit having the columnar shape. It is preferable that

  According to this ultraviolet irradiation device, the light guide means having a columnar shape is disposed so as to extend in a direction intersecting the longitudinal direction of the ultraviolet emission means. Thereby, one light guide means can be made to oppose many ultraviolet-ray emission means. As a result, the light guiding means can be arranged at substantially the same distance with respect to a large number of ultraviolet emitting means.

  Application Example 4 In the ultraviolet irradiation apparatus according to the application example, it is preferable that the light guide unit is formed using an acrylic resin.

  According to this ultraviolet irradiation device, the light guiding means is formed using acrylic resin. Since acrylic resin is excellent in light transmittance, it can efficiently guide ultraviolet rays.

  Application Example 5 In the ultraviolet irradiation apparatus according to the application example described above, it is preferable that the light guide unit includes a reflection unit that reflects ultraviolet light incident on the light guide unit.

  According to this ultraviolet irradiation device, it is possible to prevent the incident ultraviolet light from being emitted from the light guiding means by the reflecting means that reflects the ultraviolet light incident on the light guiding means. Thereby, the incident ultraviolet rays can be efficiently guided to the measuring means.

  Application Example 6 In the ultraviolet irradiation apparatus according to the application example described above, the reflection unit has a reflection point formed by applying a liquid material containing a component having a high reflectance to the light guide unit in a dot shape. It is preferable.

  According to this ultraviolet irradiation device, the reflecting means can be easily formed by a simple process of simply applying the liquid material to the light guiding means in the form of dots.

  Application Example 7 In the ultraviolet irradiation apparatus according to the application example described above, it is preferable that the reflection points are arranged at a higher density as the position is farther from the measurement unit.

  According to this ultraviolet irradiation device, the reflection points are arranged at a higher density at a position farther from the measuring means. The ultraviolet light incident on the position far from the measuring means has a long possibility of lowering the intensity than the ultraviolet light incident on the close position because the light guide path passing through the light guiding means is long before reaching the measuring means. For this reason, a difference in detection sensitivity may occur due to the distance of the incident position from the measuring means. By disposing the reflection point at a higher density at a position farther from the measuring means, the incident ultraviolet light is less likely to be emitted from the light guiding means at a position farther from the measuring means, and the ultraviolet light is emitted from the light guiding means. The resulting decrease in strength can be suppressed. Thereby, the difference in the detection sensitivity resulting from the difference in the length of the light guide path can be reduced.

  Application Example 8 An ultraviolet intensity measurement method according to this application example is an ultraviolet intensity measurement method for measuring the intensity of ultraviolet rays emitted from ultraviolet emission means, and the ultraviolet rays emitted from a plurality of ultraviolet emission means. Is guided to the measuring means for measuring the intensity of the ultraviolet rays through the light guiding means provided in the apparatus having the ultraviolet emitting means.

  According to the ultraviolet intensity measurement method according to this application example, the ultraviolet light is guided from the ultraviolet emission means to the measurement means by the light guide means provided in the apparatus provided with the ultraviolet emission means. By guiding the ultraviolet rays using the light guiding means, it is possible to suppress a decrease in the amount of ultraviolet rays reaching the measuring means due to scattering in the middle of the path from the ultraviolet emitting means to the measuring means. . As a result, a sufficient amount of ultraviolet rays can be guided to the measuring means disposed at a position away from the ultraviolet emitting means. Even if the measuring means has a narrow light receiving range, the intensity of the ultraviolet light in a wide range can be measured by guiding a wide range of ultraviolet light to the light receiving range of the measuring means by the light guiding means.

  Application Example 9 The ultraviolet intensity measurement method according to the application example is a first measurement step of measuring the intensity of ultraviolet rays emitted from the plurality of ultraviolet emission means in a state where the plurality of ultraviolet emission means are turned on. And measuring the intensity of the ultraviolet rays emitted from the ultraviolet ray emitting means maintained in the lighting state in a state where one ultraviolet ray emitting means is extinguished from a state where the plurality of ultraviolet ray emitting means are turned on. It is preferable to have two measurement steps.

  According to this ultraviolet intensity measurement method, the intensity of ultraviolet rays of the ultraviolet emission means that has been extinguished is turned off and then turned off. Many of the ultraviolet ray emitting means are time-consuming until they are turned on from the extinguished state and are in a state of emitting normal intensity ultraviolet rays. When the light is extinguished, the intensity of the ultraviolet light emitted at the moment when the light is substantially extinguished becomes zero. By turning off the light from the lighted state and measuring the intensity of the ultraviolet light emitted from the ultraviolet light emitting means, the ultraviolet light emitting means is efficiently removed without waiting for the normal intensity ultraviolet light to be emitted. It is possible to measure the intensity of ultraviolet rays emitted from the.

  [Application Example 10] In the ultraviolet intensity measuring method according to the application example, the first measurement step is performed in a state where all the ultraviolet emission means included in the ultraviolet irradiation apparatus including the plurality of ultraviolet emission means are turned on. It is preferable to include a full lighting measurement step of measuring the intensity of ultraviolet rays emitted from the ultraviolet emission means.

  According to this ultraviolet intensity measurement method, the intensity of the ultraviolet rays emitted from the ultraviolet emission means that are sequentially turned off is obtained, starting from a state in which all ultraviolet emission means included in the ultraviolet irradiation device are turned on. Thereby, the intensity of the ultraviolet rays emitted from all the ultraviolet emission means provided in the ultraviolet irradiation device can be measured more efficiently than when sequentially turning on the ultraviolet emission means to be measured.

Explanatory drawing which shows the structure of a drawing apparatus unit. Explanatory drawing which shows schematic structure of the principal part of a pre-processing apparatus. (A) is explanatory drawing which shows a light intensity measurement unit and an ultraviolet lamp in the cross section substantially orthogonal to the extending direction of an ultraviolet lamp. (B) is explanatory drawing which shows the positional relationship of a light intensity measurement unit and an ultraviolet lamp in the direction substantially parallel to the extension direction of an ultraviolet lamp. The flowchart which shows the measurement process of the ultraviolet intensity which an ultraviolet lamp inject | emits. (A) is a perspective view which shows the arrangement position of a light intensity measurement unit. (B) is explanatory drawing which shows a light intensity measurement unit and an ultraviolet lamp in the cross section substantially orthogonal to the extending direction of an ultraviolet lamp. (C) is explanatory drawing which shows the positional relationship of a light intensity measurement unit and an ultraviolet lamp in the direction substantially parallel to the extension direction of an ultraviolet lamp.

  Hereinafter, an embodiment of an ultraviolet irradiation device and an ultraviolet intensity measurement method according to the present invention will be described with reference to the drawings. In the present embodiment, a preprocessing apparatus in a drawing apparatus unit that forms a marking image on a marking object will be described as an example. The pretreatment device is a device that irradiates the marking object with ultraviolet rays and modifies the surface of the marking object on which an image is formed. In the drawings referred to in the following description, the vertical and horizontal scales of members or portions may be shown differently from actual ones for convenience of illustration.

<Drawer unit>
First, a drawing apparatus unit that draws an image on a drawing object will be described with reference to FIG. The drawing object is, for example, a chip drawing body in which semiconductor chips are aligned and temporarily fixed on a holding substrate. FIG. 1 is an explanatory diagram showing the configuration of the drawing apparatus unit.

As shown in FIG. 1, the drawing apparatus unit 100 includes a droplet discharge device 101, a transfer robot 102, a pretreatment device 103, a temperature adjustment device 104a, a temperature adjustment device 104b, a load device 105, an unloading device 105, and an unloading device 105. A load device 106, a drawing unit control device 107, an input / output device 108, and a display device 109 are provided.
The drawing object is attached to a predetermined magazine. The drawing object is supplied to the drawing apparatus unit 100 by loading the magazine loaded with the drawing object into the load device 105.
The drawing object that has been processed in the drawing apparatus unit 100 is moved onto the standby table of the unloading device 106 and mounted on a magazine loaded in the unloading device 106. By taking out the magazine from the unloading device 106, the processed drawing object is removed from the drawing device unit 100.

  The transfer robot 102 places the drawing object taken out from the magazine loaded in the load device 105 and placed on the standby table at a predetermined position in the droplet discharge device 101, the pretreatment device 103, or the like. The transfer robot 102 also removes the drawing object processed by the droplet discharge device 101, the pretreatment device 103, and the like from the droplet discharge device 101, the pretreatment device 103, etc., and performs the next process. Supply to the device. Further, the transfer robot 102 moves the drawing object that has been processed by the drawing apparatus unit 100 onto the standby table of the unload apparatus 106.

  The droplet discharge device 101 draws an image on a drawing target. The droplet discharge device 101 sucks and holds the drawing object supplied onto the medium mounting table 31 by the transport robot 102 and draws an image on the sucked and held drawing object.

  The preprocessing device 103 performs preprocessing for making the drawing object suitable for drawing by the droplet discharge device 101. Further, the pre-processing device 103 may be used as a curing device that emits curing light for curing the functional liquid constituting the image. The preprocessing device 103 sucks and holds the drawing object supplied on the preprocessing table 71 by the transfer robot 102 and performs preprocessing and the like.

  The temperature adjusting device 104 a and the temperature adjusting device 104 b adjust the temperature of the drawing object to a temperature suitable for performing processing by the pre-processing device 103 and drawing by the droplet discharge device 101. Further, it may be used for post-processing such as heating for curing the functional liquid constituting the image.

The drawing unit control device 107 controls each of the devices described above according to the image data to draw an image on the drawing target.
The input / output device 108 is connected to the drawing unit control device 107. The input / output device 108 functions as input means for inputting a program or data to be stored in the storage device of the drawing unit control device 107. The drawing unit control device 107 controls each device described above in accordance with a program or data stored in the storage device. In addition, the input / output device 108 also functions as an output unit for data acquired as each device operates.
The display device 109 functions as means for displaying the operating status of each device.

<Pretreatment device>
Next, the pre-processing device 103 will be described with reference to FIG. FIG. 2 is an explanatory diagram illustrating a schematic configuration of a main part of the preprocessing apparatus.

As shown in FIG. 2, the pretreatment device 103 includes a pretreatment table 71, an ultraviolet lamp 74, a lamp support frame 75, a table transport device 73, a device base 77, a light intensity measurement unit 61, It has.
The lamp support frame 75 includes a support frame 75a and a support frame 75b. The support frame 75 a and the support frame 75 b are erected on the device base 77. The support frame 75a and the support frame 75b are provided with sockets (not shown) and are erected in a state where the respective sockets face each other. The ultraviolet lamp 74 is supported in a state where electrode pins (not shown) are fitted in sockets formed on the support frame 75a and the support frame 75b and are passed between the support frame 75a and the support frame 75b. Has been. The pretreatment device 103 of this embodiment includes six ultraviolet lamps 74. The six ultraviolet lamps 74 are arranged in a substantially vertical direction and are like walls.
The pretreatment device 103 corresponds to an ultraviolet irradiation device. The ultraviolet lamp 74 corresponds to ultraviolet irradiation means.

  The table transport device 73 extends substantially parallel to the extending direction of the ultraviolet lamp 74. The pretreatment table 71 is supported by the table transfer device 73 so as to be movable in the extending direction of the table transfer device 73 indicated by arrows a and b in FIG. The pre-processing device 103 includes two pre-processing tables 71 and two table transport devices 73, and the set of the pre-processing table 71 and the table transport device 73 is provided on both sides of the wall composed of six ultraviolet lamps 74. It is arranged.

  The pretreatment table 71 is provided with a suction pad 72 on the mounting surface. The suction hole formed in the center of the suction pad 72 communicates with a suction device (not shown). When the drawing object 15 or the like is placed on the placement surface of the pretreatment table 71, the drawing object 15 is supported in contact with the suction pad 72. By being sucked by the suction device, the drawing object 15 and the like are sucked by the suction pad 72 and held by the pretreatment table 71.

The table transport device 73 holds the preprocessing table 71 at the supply / discharge material position or the preprocessing position, and moves between the supply / discharge material position and the preprocessing position. The material supply / removal position is a position at which the drawing robot 15 or the like is removed from the pretreatment table 71 by the conveyance robot 102 or removed from the pretreatment table 71. The pre-processing table 71 shown in FIG. 2 is located at the supply / discharge material position. The preprocessing position is a position at which the drawing object 15 and the like held on the preprocessing table 71 are irradiated with ultraviolet rays by facing the ultraviolet lamp 74. At the preprocessing position, the table transport device 73 rotates the preprocessing table 71 in the direction indicated by the arrow c1 or the arrow c2 by a rotating device (not shown) to move the mounting surface of the preprocessing table 71 to 6. It faces the wall of the ultraviolet lamps 74 of the book. The preprocessing table 71A indicated by the two-dot chain line in FIG. 2 indicates the rotated preprocessing table 71. After the irradiation with ultraviolet rays, the pretreatment table 71A is rotated in the direction indicated by the arrow d1 or the arrow d2 to return to the horizontal state.
In FIG. 2, the pretreatment table 71 and the ultraviolet lamp 74 are illustrated separately to make the drawing easy to understand. In the actual pre-processing device 103, the pre-processing table 71 and the table transport device 73 are arranged at a position where the drawing object 15 and the like are exposed to the ultraviolet lamp 74 most recently.

The light intensity measurement unit 61 includes an ultraviolet sensor 62 and a light guide 64. The ultraviolet sensor 62 is fixed to the light guide 64 with the light receiving surface 62a (see FIG. 3) abutting on the emission surface 64e (see FIG. 3) of the light guide 64. The light intensity measurement unit 61 is fixed to the support frame 75a by fixing the light guide 64 to the support frame 75a via an attachment member (not shown). The light guide body 64 is fixed to the support frame 75 a, and extends in a direction substantially orthogonal to the extending direction of the ultraviolet lamps 74 and in a direction substantially parallel to the wall of the six ultraviolet lamps 74. ing. The incident surface 64 a (see FIG. 3) of the light guide 64 faces the six ultraviolet lamps 74.
The ultraviolet sensor 62 corresponds to a measuring unit. The light guide 64 corresponds to the light guide means.

<Light intensity measurement unit>
Next, the configuration and arrangement position of the light intensity measurement unit 61 will be described with reference to FIG. FIG. 3 is an explanatory diagram showing a schematic configuration and an arrangement position of the light intensity measurement unit. FIG. 3A is an explanatory view showing the light intensity measuring unit and the ultraviolet lamp in a cross section substantially orthogonal to the extending direction of the ultraviolet lamp, and FIG. 3B is substantially parallel to the extending direction of the ultraviolet lamp. It is explanatory drawing which shows the positional relationship of the light intensity measurement unit and an ultraviolet lamp in an arbitrary direction. In order to simplify the drawing, the ultraviolet lamp 74 in FIG. 3A shows only the outer shape of the glass tube. The X-axis direction, Y-axis direction, and Z-axis direction shown in FIG. 3 are the same directions as the X-axis direction, Y-axis direction, or Z-axis direction shown in FIG.

As described above, the light intensity measurement unit 61 includes the ultraviolet sensor 62 and the light guide 64.
The light guide body 64 is formed using an acrylic resin. The light guide 64 has a rectangular parallelepiped shape. One of the four long rectangular parallelepipeds is referred to as an incident surface 64a. A surface opposite to the incident surface 64a is referred to as a back surface 64b. The remaining two surfaces of the four long rectangular parallelepipeds are referred to as side surfaces 64d. One of the end faces of the rectangular parallelepiped is denoted as an exit face 64e, and the other face is denoted as a reflective end face 64c.

A reflection point layer 66A is formed on the back surface 64b. The reflection point layer 66A is formed by arranging a large number of reflection points 66 side by side.
The reflection point 66 is formed by arranging (printing) liquid droplets on the back surface 64b by, for example, an inkjet method. The liquid material is, for example, a reflective ink containing a mixture of an acrylic binder and a pigment that has no optical absorption and high reflectivity, such as titanium white (TiO 2) and precipitated barium sulfate (BaSO 4).
In the reflection point layer 66A, the reflection points 66 are arranged at different densities depending on the positions arranged from the exit surface 64e to the reflection end surface 64c. The reflection points 66 are arranged at a higher density at a position closer to the reflection end face 64c than at a position closer to the exit surface 64e.
A reflection point layer 66B is formed on the reflection end face 64c. The reflection point layer 66B also has a large number of reflection points 66 arranged. In the reflection point layer 66B, the reflection points 66 are arranged at the same density as the portion of the reflection point layer 66A where the density of the reflection points 66 is highest.
It should be noted that the reflection point layer 66A and the reflection point layer 66B in FIG. 3 are shown thick to clearly indicate their existence.
The reflection point layer 66A corresponds to the reflection means. The reflection point layer 66B corresponds to the reflection means.

As described above, the light intensity measurement unit 61 is fixed to the support frame 75a by fixing the light guide 64 to the support frame 75a via an attachment member (not shown). The light guide body 64 is fixed to the support frame 75 a, and extends in a direction substantially orthogonal to the extending direction of the ultraviolet lamps 74 and in a direction substantially parallel to the wall of the six ultraviolet lamps 74. ing. The incident surface 64 a of the light guide 64 faces the six ultraviolet lamps 74. The distance between the incident surface 64 a and the ultraviolet lamps 74 is substantially the same for the six ultraviolet lamps 74.
The ultraviolet rays emitted from the six ultraviolet lamps 74 are incident on the light guide 64 from the incident surface 64a. The ultraviolet light incident on the light guide 64 is internally reflected at the back surface 64b, the reflection end surface 64c, the incident surface 64a, and the side surface 64d, is guided to the exit surface 64e, and is emitted from the exit surface 64e.

The ultraviolet sensor 62 includes a light receiving surface 62a, detects the ultraviolet light incident from the light receiving surface 62a, and outputs the intensity of the ultraviolet light. The ultraviolet sensor 62 is electrically connected to the drawing unit controller 107 via a cable (not shown), and outputs the intensity of ultraviolet rays by transmitting intensity information to the drawing unit controller 107.
The ultraviolet sensor 62 is fixed to the light guide 64 with the light receiving surface 62a in contact with the light emitting surface 64e of the light guide 64, and the ultraviolet light emitted from the light emitting surface 64e is transmitted from the light receiving surface 62a to the ultraviolet sensor 62. Is incident on.

<Measurement of UV intensity>
Next, the process of measuring the intensity of the ultraviolet rays emitted from the ultraviolet lamp 74 provided in the pretreatment device 103 will be described with reference to FIG. FIG. 4 is a flowchart showing a process of measuring the intensity of ultraviolet rays emitted from the ultraviolet lamp.
First, in step S1 of FIG. 4, all the six ultraviolet lamps 74 included in the pretreatment device 103 are turned on.
Next, in step S2, the ultraviolet lamp 74 is warmed up and waits during the warm-up. When the ultraviolet lamp 74 is turned on, it cannot emit ultraviolet rays with normal intensity. A warm-up time is required from when the lamp is lit until it reaches a state in which ultraviolet rays are emitted at a normal intensity. Step S2 is a process of waiting until the warm-up is completed.

  Next, in step S3, the intensity of the ultraviolet light emitted from the ultraviolet lamp 74 is measured. The light intensity measurement unit 61 measures the intensity of ultraviolet rays emitted from the six ultraviolet lamps 74 that have been warmed up, and stores the measurement results.

Next, in step S4, one of the lit ultraviolet lamps 74 is turned off.
Next, in step S5, the intensity of the ultraviolet light emitted from the ultraviolet lamp 74 is measured. In step S4, after turning off one of the lit ultraviolet lamps 74, the intensity of ultraviolet rays emitted from the lit ultraviolet lamp 74 is measured, and the measurement result is stored.

  Next, in step S6, the intensity of the ultraviolet rays emitted from one ultraviolet lamp 74 is calculated. By subtracting the intensity of the ultraviolet ray measured and stored in step S5 from the intensity of the ultraviolet ray measured and stored in step S3, the intensity of the ultraviolet ray emitted from the ultraviolet lamp 74 turned off in step S4 is calculated.

Next, in step S7, it is determined whether or not there is an ultraviolet lamp 74 that has not obtained the intensity of the emitted ultraviolet light. The presence / absence of the ultraviolet lamp 74 whose intensity is not determined is determined by, for example, inputting the number of the ultraviolet lamps 74 to be measured in advance and comparing it with the number of the ultraviolet lamps 74 turned off in step S4. Can do.
If there is an ultraviolet lamp 74 that does not require the intensity of the emitted ultraviolet light (YES in step S7), the process returns to step S4, and the processes from step S4 to step S7 are repeated. If there is no ultraviolet lamp 74 that does not require the intensity of the emitted ultraviolet light (NO in step S7), the process proceeds to step S8.

Following step S7, in step S8, the acquired ultraviolet intensity data emitted by the ultraviolet lamp 74 is output. Data output is performed using the input / output device 108, for example. Alternatively, it is output by displaying on the display device 109.
Step S8 is performed, and the step of measuring the intensity of the ultraviolet rays emitted from the ultraviolet lamp 74 included in the pretreatment device 103 is completed.

<Other light intensity measurement unit examples>
Next, the configuration and arrangement position of the light intensity measurement unit 67 which are different from the configuration and arrangement position of the light intensity measurement unit 61 and part of the configuration and arrangement position will be described with reference to FIG. FIG. 5 is an explanatory diagram showing a schematic configuration and an arrangement position of the light intensity measurement unit. FIG. 5A is a perspective view showing the arrangement position of the light intensity measurement unit, and FIG. 5B shows the light intensity measurement unit and the ultraviolet lamp in a cross section substantially orthogonal to the extending direction of the ultraviolet lamp. FIG. 5C is an explanatory diagram illustrating a positional relationship between the light intensity measurement unit and the ultraviolet lamp in a direction substantially parallel to the extending direction of the ultraviolet lamp. In order to simplify the drawing, the ultraviolet lamp 74 in FIG. 5B shows only the outer shape of the glass tube.

Similar to the light intensity measurement unit 61, the light intensity measurement unit 67 includes an ultraviolet sensor 69 and a light guide 68.
The ultraviolet sensor 69 corresponds to a measuring unit. The light guide 68 corresponds to the light guide means.
The light guide 68 is formed using an acrylic resin. The light guide 68 has a rectangular parallelepiped shape. One of the four long rectangular parallelepipeds is referred to as an incident surface 68a. A surface opposite to the incident surface 68a is referred to as a back surface 68b. The remaining two surfaces of the four long rectangular parallelepipeds are referred to as side surfaces 68d. One of the end faces of the rectangular parallelepiped is denoted as an exit face 68e, and the other face is denoted as a reflective end face 68c.

A reflection point layer 66C is formed on the back surface 68b. The reflection point layer 66C is formed by arranging a large number of reflection points 66 side by side. The reflection point 66 is the same as the reflection point 66 constituting the reflection point layer 66A and the reflection point layer 66B described above.
In the reflection point layer 66C, like the reflection point layer 66A, the reflection points 66 are arranged at different densities depending on the positions arranged from the exit surface 68e to the reflection end surface 68c. The reflection points 66 are arranged at a higher density at a position closer to the reflection end face 68c than at a position closer to the exit surface 68e.
A reflection point layer 66D is formed on the reflection end face 68c. The reflection point layer 66D also has a large number of reflection points 66 arranged. In the reflection point layer 66D, the reflection points 66 are arranged at a density equivalent to the portion of the reflection point layer 66C where the density of the reflection points 66 is highest.
The reflection point layer 66C corresponds to the reflection means. The reflection point layer 66D corresponds to the reflection means.

The light intensity measurement unit 67 is fixed to the device base 77 by fixing the light guide 68 to the device base 77 via an attachment member (not shown). The light guide 68 extends in a direction substantially parallel to the direction in which the ultraviolet lamp 74 extends by being fixed to the device base 77. The incident surface 68 a of the light guide 68 faces the six ultraviolet lamps 74. The incident surface 68a faces the range including the entire length of the ultraviolet lamp 74. The length of the incident surface 68a of the light guide 68 in the short side direction is the length of the incident surface 64a of the light guide 64 in the short side direction so that ultraviolet rays from the six ultraviolet lamps 74 arranged in parallel are easily incident. It is set longer than this.
The ultraviolet rays emitted from the six ultraviolet lamps 74 enter the light guide 68 from the incident surface 68a. The ultraviolet light incident on the light guide 68 is internally reflected at the back surface 68b, the reflection end surface 68c, the incident surface 68a, and the side surface 68d, is guided to the exit surface 68e, and is emitted from the exit surface 68e.

The ultraviolet sensor 69 includes a light receiving surface 69a, detects the ultraviolet light incident from the light receiving surface 69a, and outputs the intensity of the ultraviolet light. The ultraviolet sensor 69 is electrically connected to the drawing unit control device 107 via a cable (not shown), and outputs the intensity of ultraviolet light by transmitting intensity information to the drawing unit control device 107.
The ultraviolet sensor 69 is fixed to the light guide 68 with the light receiving surface 69a in contact with the light emitting surface 68e of the light guide 68, and the ultraviolet light emitted from the light emitting surface 68e is transmitted from the light receiving surface 69a to the ultraviolet sensor 69. Is incident on.

Hereinafter, the effect by embodiment is described. According to the present embodiment, the following effects can be obtained.
(1) The light intensity measurement unit 61 includes an ultraviolet sensor 62 and a light guide 64. The light intensity measurement unit 67 includes an ultraviolet sensor 69 and a light guide 68. The ultraviolet rays emitted from the ultraviolet lamp 74 and incident on the light guide body 64 or the light guide body 68 are guided to the ultraviolet sensor 62 or the ultraviolet sensor 69, so that the path from the ultraviolet lamp 74 to the ultraviolet sensor 62 or the ultraviolet sensor 69 is on the way. It is possible to suppress the scattering of ultraviolet rays. As a result, a sufficient amount of ultraviolet light can be guided to the ultraviolet sensor 62 and the ultraviolet sensor 69 disposed at a position away from the ultraviolet lamp 74.

  (2) The light guide 64 extends in a direction substantially orthogonal to the extending direction of the ultraviolet lamps 74 and in a direction substantially parallel to the wall formed by the six ultraviolet lamps 74. Thereby, the distance between the incident surface 64 a and the ultraviolet lamps 74 can be made substantially the same in the six ultraviolet lamps 74. Therefore, the ultraviolet rays emitted from the ultraviolet lamp 74 and incident on the incident surface 64 a of the light guide 64 can be made substantially uniform in the six ultraviolet lamps 74.

  (3) The light guide 68 extends in a direction substantially parallel to the extending direction of the ultraviolet lamp 74 by being fixed to the device base 77, and the incident surface 68 a is the length of the ultraviolet lamp 74. It faces the range including the whole direction. For this reason, the ultraviolet rays emitted from the ultraviolet lamp 74 over the entire length of the ultraviolet lamp 74 can be incident on the incident surface 68a and guided to the ultraviolet sensor 69 for measurement. Thereby, the intensity of the ultraviolet rays emitted from the ultraviolet lamp 74 can be measured more accurately than when measuring the ultraviolet rays emitted from a part of the ultraviolet lamp 74 in the length direction.

  (4) In the light guide body 64 and the light guide body 68, the reflection point layer 66A, the reflection point layer 66B, the reflection point layer 66C, or the reflection point layer is provided on the back surface 64b, the reflection end surface 64c, the back surface 68b, and the reflection end surface 68c. 66D is formed. Ultraviolet light incident on the light guide 64 or the light guide 68 by the reflection point layer 66A, the reflection point layer 66B, the reflection point layer 66C, or the reflection point layer 66D is the back surface 64b, the reflection end surface 64c, the back surface 68b, or the reflection end surface. From 68c, emission outside the light guide 64 or the light guide 68 can be suppressed.

  (5) The reflection point layer 66A, the reflection point layer 66B, the reflection point layer 66C, and the reflection point layer 66D are composed of a large number of reflection points 66. The reflection point 66 is formed by arranging (printing) droplets of reflection ink by, for example, an inkjet method. As a result, it is possible to easily eject the droplets and land on the back surface 64b, the reflection end surface 64c, the back surface 68b, or the reflection end surface 68c, and the reflection point layer 66A, the reflection point layer 66B, the reflection point layer 66C, and the reflection point can be easily performed. Layer 66D can be formed.

  (6) In the reflection point layer 66A and the reflection point layer 66C, the reflection points 66 are arranged at a higher density at positions closer to the reflection end face 64c or the reflection end face 68c than positions closer to the emission face 64e or the emission face 68e. ing. For this reason, it is possible to emit light from the light guide body 64 or the light guide body 68 because it is incident on a position far from the light emission surface 64e or the light emission surface 68e and the light guide path passing through the light guide body 64 or the light guide body 68 is long. It is possible to make it difficult to emit ultraviolet rays that increase the properties. Thereby, the difference in the detection sensitivity resulting from the difference in the length of the light guide path reaching the exit surface 64e or the exit surface 68e can be reduced.

  (7) The light guide body 64 and the light guide body 68 are formed using an acrylic resin. Since the acrylic resin is excellent in light transmissivity, it is possible to efficiently guide the ultraviolet rays by suppressing the loss when the ultraviolet rays pass through the light guide 64 or the light guide 68. In addition, since acrylic resin has a smaller specific gravity than glass or the like, the weight of the light guide 64 and the light guide 68 can be reduced.

  (8) All six ultraviolet lamps 74 included in the pretreatment device 103 are turned on in step S1, and the intensity of ultraviolet rays emitted from the ultraviolet lamp 74 is measured in step S3. In step S4, one ultraviolet lamp 74 in the lit ultraviolet lamp 74 is turned off, and in step S5, one ultraviolet lamp 74 in the lit ultraviolet lamp 74 is turned off. Measure the intensity of ultraviolet light. In step S6, the intensity of the ultraviolet light emitted from one ultraviolet lamp 74 is calculated from the measurement result in step S3 and the measurement result in step S5. The process for warming up the ultraviolet lamp 74 is only step S2. This shortens the time required for warm-up when measuring the UV intensity in the pre-processing device 103, compared to when the UV lamps 74 to be measured for UV intensity are turned on and warmed up. it can.

  As mentioned above, although preferred embodiment was described referring an accompanying drawing, suitable embodiment is not restricted to the said embodiment. The embodiment can of course be modified in various ways without departing from the scope, and can also be implemented as follows.

  (Modification 1) In the embodiment, in the light guide 64 and the light guide 68, the back surface 64b, the reflection end surface 64c, the back surface 68b, and the reflection end surface 68c are provided with the reflection point layer 66A, the reflection point layer 66B, and the reflection. The point layer 66C or the reflective point layer 66D was formed. However, it is not essential to provide the light guide means with the reflection means. As long as the ultraviolet rays incident on the light guide can be sufficiently guided to the exit surface, a configuration in which no reflecting means is provided may be used.

  (Modification 2) In the embodiment described above, the reflection point layer 66A, the reflection point layer 66B, the reflection point layer 66C, and the reflection point layer 66D are configured by a large number of reflection points 66. However, it is not essential that the reflection means has a reflection point. The reflection means may have a configuration in which members having high reflectivity are arranged almost uniformly without gaps.

  (Modification 3) In the embodiment, in the reflection point layer 66A and the reflection point layer 66C formed on the light guide 64 or the light guide 68, the reflection point 66 is a position close to the emission surface 64e or the emission surface 68e. Instead, the positions closer to the reflection end face 64c or the reflection end face 68c are arranged with higher density. However, in the reflecting means, it is not essential to change the arrangement density of the reflection points depending on the position. The arrangement density of the reflection points in the reflection means may be uniform in all portions in the surface direction.

  (Modification 4) In the above-described embodiment, in the light guide 64 and the light guide 68, the back surface 64b, the reflection end surface 64c, the back surface 68b, and the reflection end surface 68c include the reflection point layer 66A, the reflection point layer 66B, and the reflection. The point layer 66C or the reflective point layer 66D was formed. The reflection point layer was not formed on the side surface 64d and the side surface 68d. The light guide may have a configuration in which reflecting means is also formed on a surface corresponding to the side surface 64d or the side surface 68d.

  (Modification 5) In the said embodiment, the light guide 64 and the light guide 68 were formed using the acrylic resin. However, the light guiding means may be formed using other materials. The material for forming the light guide means may be other materials as long as the material has excellent light transmittance.

  (Modification 6) In the above-described embodiment, the pretreatment device 103 includes six ultraviolet lamps 74. However, the number of ultraviolet emission means provided in the ultraviolet irradiation device is not limited to six. Any number of ultraviolet emission means may be provided in the ultraviolet irradiation device.

  (Modification 7) In the above-described embodiment, the ultraviolet lamp 74 has a straight tube shape, but the outer shape of the ultraviolet emitting means is not limited to a straight tube shape. The outer shape of the ultraviolet ray emitting means may be, for example, a U-shaped shape in which the center of the straight pipe is bent by 180 degrees.

  (Modification 8) In the above-described embodiment, the pre-processing device 103 is an ultraviolet irradiation device for performing pre-processing and post-processing on a drawing target in the drawing device unit 100 that draws an image on the drawing target. there were. However, the target that can be suitably irradiated with ultraviolet rays by the ultraviolet irradiation device as described in the embodiment is not limited to the drawing target. The ultraviolet irradiation device may be an ultraviolet irradiation device as a surface modification device or a surface cleaning device for a substrate of a semiconductor substrate or a liquid crystal display device in a semiconductor manufacturing device or a liquid crystal device manufacturing device.

  DESCRIPTION OF SYMBOLS 61 ... Light intensity measurement unit, 62 ... Ultraviolet sensor, 62a ... Light-receiving surface, 64 ... Light guide, 64a ... Incident surface, 64b ... Back surface, 64c ... Reflective end surface, 64d ... Side surface, 64e ... Ejection surface, 66 ... Reflection point , 66A, 66B, 66C, 66D ... reflecting point layer, 67 ... light intensity measuring unit, 68 ... light guide, 68a ... incident surface, 68b ... back surface, 68c ... reflecting end face, 68d ... side surface, 68e ... exiting surface, 69 DESCRIPTION OF SYMBOLS ... UV sensor 69a ... Light-receiving surface, 74 ... UV lamp, 75 ... Lamp support frame, 77 ... Apparatus base, 100 ... Drawing apparatus unit, 101 ... Droplet discharge apparatus, 102 ... Conveying robot, 103 ... Pre-processing apparatus, 105... Loading device, 106... Unloading device, 107... Drawing unit control device, 108.

Claims (10)

Ultraviolet emission means for emitting ultraviolet rays;
Measuring means for measuring the intensity of the ultraviolet light emitted from the ultraviolet light emitting means;
A light guide means for guiding ultraviolet rays from the ultraviolet emission means to the measurement means,
An ultraviolet irradiation device characterized by that.   The said light guide means has columnar shape, and is extended and arrange | positioned in the direction substantially parallel to the longitudinal direction of the said ultraviolet-ray emission means which has columnar shape, It is characterized by the above-mentioned. UV irradiation equipment.   The said light guide means has columnar shape, and it is extended and arrange | positioned in the direction which cross | intersects the longitudinal direction of the said ultraviolet-ray emission means which has columnar shape, It is characterized by the above-mentioned. UV irradiation device.   The ultraviolet light irradiation apparatus according to claim 1, wherein the light guide unit is formed using an acrylic resin.   5. The ultraviolet irradiation apparatus according to claim 1, wherein the light guide unit includes a reflection unit that reflects ultraviolet light incident on the light guide unit. 6.   6. The ultraviolet irradiation apparatus according to claim 5, wherein the reflection means has a reflection point formed by applying a liquid material containing a component having a high reflectance to the light guide means in a dot shape. .   The ultraviolet irradiation apparatus according to claim 6, wherein the reflection points are arranged at a higher density at a position farther from the measurement unit. An ultraviolet intensity measuring method for measuring the intensity of ultraviolet rays emitted from the ultraviolet emitting means,
The ultraviolet rays emitted from the plurality of ultraviolet emission means are guided to the measurement means for measuring the intensity of the ultraviolet rays through the light guide means provided in the apparatus including the ultraviolet emission means.
A method for measuring the intensity of ultraviolet light. A first measurement step of measuring the intensity of ultraviolet rays emitted from the plurality of ultraviolet emission means in a state where the plurality of ultraviolet emission means are turned on;
A second measurement for measuring the intensity of the ultraviolet rays emitted from the ultraviolet ray emitting means in which the lighting state is maintained in a state where one ultraviolet ray emitting means is extinguished from a state where the plural ultraviolet ray emitting means are turned on. And having a process
The method for measuring ultraviolet intensity according to claim 8, wherein:   The first measurement step is a full lighting measurement for measuring the intensity of ultraviolet rays emitted from the ultraviolet emission means in a state where all the ultraviolet emission means included in the ultraviolet irradiation device including the plurality of ultraviolet emission means are turned on. The method for measuring ultraviolet intensity according to claim 9, further comprising a step.

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