JP2013193422A - Method for manufacturing plate-like member, and liquid drop ejection head and image forming apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To attain the cost reduction of plate-like members.SOLUTION: Respective plate-like members 301 are assembled face to face in an overlap state of one side forming a notch 305 in each of the adjacent plate-like members 301. A common cutting line 303 for cutting and dividing the respective plate-like members 301 is formed on one side forming the notches 305. An opening line 303, which is a frame for machining an opening 302 formed into the respective notches 305 of the respective plate-like members 301 when the respective plate-like members 301 are cut and divided, is formed at a portion that includes the common cutting line 304 for cutting and dividing the respective plate-like members 301. Machining is performed along the opening line of the opening 302, and the respective plate-like members 301 are cut out along the common cutting line 304 to cut and divide each plate-like member 301 having the notch 305 at one side.

Description

  The present invention relates to a manufacturing method for manufacturing a pressure chamber, a common liquid chamber and a plate-like member constituting a liquid supply path, a nozzle plate-like member manufactured by the manufacturing method, an individual liquid chamber forming plate-like member, and a common liquid chamber formation. The present invention relates to a droplet discharge head configured by laminating plate-like members and the like, and an image forming apparatus including the droplet discharge head.

  In general, a printer, a fax machine, a copier, a plotter, or an image forming apparatus that combines a plurality of these functions includes, for example, a liquid ejection head that ejects ink droplets, and ejects ink droplets while conveying a medium. 2. Related Art There is an ink jet recording apparatus that forms an image by adhering to a sheet. The medium here is also referred to as “paper”, but the material is not limited, and a recording medium, a recording medium, a transfer material, a recording paper, and the like are also used synonymously. The image forming apparatus means an apparatus for forming an image by discharging a liquid onto a medium such as paper, thread, fiber, fabric, leather, metal, plastic, glass, wood, ceramics. The image formation is not only giving an image having a meaning such as a character or a figure to the medium but also giving an image having no meaning such as a pattern to the medium (simply ejecting a droplet). Also means. The ink is not limited to so-called ink, and is not particularly limited as long as it becomes liquid when ejected. For example, the ink is a generic term for liquids including DNA samples, resists, pattern materials, and the like. Use.

  The droplet discharge head is configured by laminating a plurality of plate members such as a nozzle plate member, an individual liquid chamber forming plate member, and a common liquid chamber forming plate member. And a diaphragm is provided in a part of wall part which comprises the individual liquid chamber formed by laminating | stacking these plate-shaped members, and the piezoelectric element which carries out deformation displacement of this diaphragm is provided. The piezoelectric element is formed by laminating a common electrode, a piezoelectric body, and individual electrodes. The common electrode and the individual electrode in this piezoelectric element are electrically connected to the internal wiring for electrode connection formed on the individual liquid chamber forming plate member. Each internal wiring is electrically connected to an external wiring through a connection terminal. This external wiring is drawn out through a notch provided in a part of the common liquid chamber forming plate member. The external wiring drawn out is electrically connected to driving voltage supply means for supplying a driving voltage to be applied to the individual electrodes.

  As a method of manufacturing these plate-like members, a method of manufacturing a large number of plate-like members by imposing a number of plate-like members on a substrate and cutting them along a cutting line is common. And in order to cut out many plate-shaped members which have a notch on one side from a board | substrate, many plate-shaped members are surfaced to a board | substrate, and the opening part corresponding to a notch is processed for every plate-shaped member. Thereafter, the outer shape of the plate-like member is cut along a cutting line and cut into individual pieces. As a method for producing such a plate-like member having a notch on one side, the one described in Patent Document 1 is known.

  In the manufacturing method of the plate-like member disclosed in Patent Document 1, a plurality of plate-like members having notches on one side are applied in a matrix on the substrate. FIG. 7 is a plan view showing a state of imposition of a plate-like member having a notch on one side in Patent Document 1. FIG. FIG. 8 is a plan view showing a plate-like member cut out by the imposition of FIG. The imposition of the plate-like member in Patent Document 1 will be described below with reference to FIGS. After imposing a plurality of plate-like members on the substrate in a matrix, an opening 302 whose opening shape corresponding to the notch of the plate-like member 301 is substantially rectangular is processed as shown in FIG. One side of the opening line 303, which is a frame, is imposed so as to coincide with a cutting line 304 indicated by a broken line in FIG. The opening line 303 and the cutting line 304 include a line that is actually drawn on the substrate or the processing member, or a virtual line that is not actually drawn. Then, when each plate-like member 301 is cut into individual pieces from the substrate along the cutting line 304, a plate-like member 301 having a notch 305 on one side as shown in FIG. 8A is obtained. However, for example, if one side of the opening line 303 shifts to a position away from the cutting line 304 as shown in FIG. 7B, the beam remains and the notch is closed as shown in FIG. 8B. That is, the opening 306 is formed. Alternatively, when the opening line 303 is shifted to a position including the cutting line 304 as shown in FIG. 7C, an originally required notch 305 is formed on one side as shown in FIG. A notch 307 is also formed on the other side. In the manufacturing method of the plate-shaped member of the above-mentioned Patent Document 1, as shown in FIG. 9 (a), the two plate-shaped members 301 each having a notch on one side face each other to form the notches. It is attached. And the cutting line 304 of each adjacent plate-shaped member 301 is attached | subjected to the position which mutually separates in the part which the one side which forms each notch faces. An opening line 308 that includes the opening 302 that becomes each notch and that is larger than the opening 302 that becomes each notch is faced. Then, as shown in FIG. 9B, processing is performed along a large opening line 308. After that, as shown in FIGS. 9C and 9D, the cutting lines 304 and the plate-like members are attached around the portions where the sides forming the notches face each other. Each plate-like member 301 is cut out along the cutting line. In this way, a plurality of plate-like members having notches on one side are manufactured.

  However, in the manufacturing method of the plate-like member of Patent Document 1, an opening line indicating a frame for processing an opening larger than the opening serving as each notch is attached to a portion where the sides forming each notch face each other. Has been. Then, when the cutting along the two cutting lines 304 shown in FIG. 9A and the processing along the opening line 308 of the large opening are performed, it is shown in FIGS. 9C to 9D. Thus, a useless cutting member 309 and the like are generated in addition to the opening cutting member. Or in the case of the process which melt | dissolves an opening part and a cutting member by an etching, or it grinds by sandblasting, the useless space for the said process has arisen. For these reasons, there is a problem that the number of plate-like members that can be cut out from one substrate is reduced and the cost of the plate-like members is increased.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a plate-like member that can reduce the cost of the plate-like member by reducing useless portions when cutting the plate-like member from the substrate. It is to provide a manufacturing method.

  In order to achieve the above object, the invention according to claim 1 is a method of manufacturing a plate-like member in which a plurality of plate-like members having cutouts on at least one side are arranged on a substrate and cut into individual pieces. The plate-like members are faced and faced so that one side to be formed overlaps, a cutting line for cutting the plate-like member is attached on one side forming the notch, and a portion including the cutting line is attached to the portion including the cutting line. An opening line indicating a frame for processing an opening for forming the notch of each plate-like member is attached.

  In order to achieve the above-mentioned object, the invention according to claim 2 is a method of manufacturing a plate-like member in which a plurality of plate-like members having notches on at least one side are arranged on a substrate and cut into individual pieces. The members are arranged in a matrix on the substrate, face each plate-like member so that one side forming the cutout overlaps, and cut into the plate-like member on one side forming the cutout A frame for processing the opening is provided so that an opening for forming the notch of each plate-like member is formed alternately along the cutting line at a portion including the cutting line. The opening line shown is attached.

  In the first aspect of the present invention, one side of each plate-like member forming the notch is overlaid. A cutting line common to the separation of each plate-like member is attached to the overlapping side, and an opening line for machining the opening is attached to a portion including the common cutting line and extending to each plate-like member. The Then, when the cutting of each plate-like member along the common cutting line and the processing of the opening along the opening line are performed, a cutting member is generated. This cutting member is an originally unnecessary cutting member produced by processing the opening along the opening line. Since each plate-like member is faced by overlapping one side of each plate-like member, there is no space between each plate-like member, and each plate-like member is cut by cutting performed along a common cutting line. Only useless cutting members are produced. For this reason, the increase in a cutting member can be suppressed and the part which can face a plate-shaped member on a board | substrate increases. Thereby, many plate-shaped members can be cut out from one board | substrate. Therefore, the cost of the plate member can be reduced.

  In the invention of claim 2, one side of each plate-like member forming the notch is overlaid. A cutting line common to the separation of each plate-like member is attached to the overlapping side, and an opening line for machining the opening is attached to a portion including the common cutting line and extending to each plate-like member. The Openings that form notches in each plate-like member are alternately formed along the cutting line. Then, when the cutting of each plate-like member along the common cutting line and the processing of the opening along the opening line are performed, a cutting member is generated. This cutting member is an originally unnecessary cutting member produced by processing the opening along the opening line. Since each plate-like member is faced by overlapping one side of each plate-like member, there is no space between each plate-like member, and each plate-like member is cut by cutting performed along a common cutting line. Only useless cutting members are produced. For this reason, the increase in a cutting member can be suppressed and the part which can face a plate-shaped member on a board | substrate increases. Thereby, many plate-shaped members can be cut out from one board | substrate. Further, the opening and the opening in the adjacent row are not adjacent to each other. Thereby, the board | substrate in a row direction becomes difficult to break. Therefore, the cost of the plate member can be reduced.

  According to the present invention, it is possible to obtain a specific effect that the cost of the plate-like member can be reduced.

It is a schematic perspective view which shows the structural example of this inkjet recording device. It is a disassembled perspective view which shows the laminated structure of the inkjet head of this inkjet recording device. It is a top view which shows imposition of the common liquid chamber formation plate-shaped member in this embodiment, and the cut-out common liquid chamber formation plate-shaped member. It is a top view which shows an example of the method of imposing the common liquid chamber formation plate-shaped member in this embodiment on a board | substrate. It is a top view which shows another modification of the method of imposing the common liquid chamber formation plate-shaped member in this embodiment on a board | substrate. It is a top view which shows another modification of the method of imposing the common liquid chamber formation plate-shaped member in this embodiment on a board | substrate. It is a top view which shows the mode of imposition of the plate-shaped member which has a notch in one side in patent document 1. FIG. It is a top view which shows the plate-shaped member cut out by the imposition of FIG. It is a top view which shows the state of another imposition of the plate-shaped member which has a notch in one side in patent document 1, and the cut-out plate-shaped member.

Hereinafter, a configuration example of an ink jet recording apparatus as an example of an image forming apparatus including a liquid ejection head according to an embodiment of the present invention will be described.
FIG. 1 is a schematic perspective view showing a configuration example of the ink jet recording apparatus. A carriage 101 is provided inside the inkjet recording apparatus 100, and the carriage 101 is configured to be movable left and right along the guide rod 102. The carriage 101 is connected to a belt 103, and the belt 103 is connected to a motor 104. As the motor 104 rotates, the belt 103 moves left and right, and simultaneously the carriage 101 moves left and right. The carriage 101 is provided with an inkjet head 105 provided with a large number of nozzles (not shown) and arranged in a plurality of rows. The present embodiment is applied to the inkjet head 105 to reduce the size and cost. . The inkjet head 105 moves to the left and right as the carriage 101 moves. Further, the inkjet recording apparatus 100 is provided with a platen 107 that supports the recording medium 106 and a paper feed roller 108. While the recording medium 106 is supported by the platen 107, the recording medium 106 is conveyed in the conveying direction by moving the paper feed roller 108 by the motor 109. While moving the carriage 101 to the left, ink droplets are ejected from the inkjet head 105 to the recording medium 106 in accordance with image data sent from a control device (not shown). After moving the recording medium 106 forward by a desired distance, the carriage 101 is now moved to the right. Then, ink droplets are ejected from the inkjet head 105 to the recording medium 106 in accordance with image data sent from a control device (not shown). By repeating these operations, a desired image can be formed on one surface of the recording medium. The carriage 101 stands by on the maintenance device 110 when image formation is not performed. Here, the nozzle that sucks ink from the ink jet head 105 is recovered and the nozzles that are no longer discharged are recovered, or the ink jet head 105 is capped to seal the nozzles to prevent the ink from drying and from being discharged from the nozzles. Is possible. As described above, since the ink jet recording apparatus according to the present embodiment includes the low cost ink jet head according to the present embodiment, which will be described later, an inexpensive ink jet recording apparatus can be provided.

  FIG. 2 is an exploded perspective view showing the laminated structure of the inkjet head of the inkjet recording apparatus. In the nozzle plate-like member 201, a plurality of nozzle holes 202 are formed. In the individual liquid chamber forming plate member 203, the member is stacked on the nozzle plate member 201, and a common liquid chamber forming plate member 204 described later is stacked on the upper portion, so that the individual liquid chamber forming plate member 203 is communicated with the nozzle hole 202. A liquid chamber 205 and an ink supply port 206 communicating with the individual liquid chamber 205 are formed. The individual liquid chamber forming plate member 203 is mounted with a drive IC 207 for selecting an electromechanical conversion element such as a piezoelectric element that is driven according to print data sent from a host device (not shown). Further, a connection terminal 208 is provided at one end in the longitudinal direction that is electrically connected to the output terminal of the drive IC 207. In the common liquid chamber forming plate member 204, a common liquid chamber 209 communicating with the ink supply port 206 is formed by laminating a frame member 210 described later from above. The frame member 210 is provided with an ink supply port 211 that supplies ink from an ink tank (not shown) to the common liquid chamber 209. The nozzle plate member 201, the individual liquid chamber forming plate member 203, and the common liquid chamber forming plate member 204 are stacked in this order, and the frame member 210 is joined onto the common liquid chamber forming plate member 204. Thereby, an ink flow path from the ink supply port 211 to the nozzle hole 202 is formed.

  Further, an internal wiring 212 from the I / O of the driving IC 207, the power source, the driving power source input, etc. to the connection terminal 208 is arranged. The connection terminal 208 is electrically connected to an external wiring 213 such as FPC (Flexible printed circuits) or FFC (Flexible flat cable), and is connected to a host device (not shown). The external wiring 213 is pulled out in the longitudinal direction of the individual liquid chamber forming plate member 203 after being electrically connected to the connection terminal 208 and is gently bent. Then, it extends in a direction perpendicular to the longitudinal direction, passes through an opening 214 provided in the common liquid chamber forming plate member 204, and is drawn out from a drawing port 215 provided in the frame member 210. Alternatively, the external wiring 213 is drawn straight out from the connection terminal 208 in the longitudinal direction of the individual liquid chamber forming plate member 203. The internal wiring 212 of the inkjet head is planarly arranged on one surface of the individual liquid chamber forming plate member 203, and the connection terminal 208 is planarly arranged at one end portion in the longitudinal direction of the individual liquid chamber forming plate member 203. ing. When the common liquid chamber forming plate member 204 is laminated on the individual liquid chamber forming plate member 203, the common liquid chamber forming plate member is arranged so that the connection terminal 208 at one end of the individual liquid chamber forming plate member 203 is not hidden. A notch 214 is provided at one end in the longitudinal direction of 204. Then, the drive power is supplied from the external wiring 213 to the drive IC 207, and the drive voltage is applied to the selected electromechanical conversion element from the drive IC 207 to drive the electromechanical conversion element. Then, the driven electromechanical transducer generates a pressure change in the individual liquid chamber 205, whereby ink droplets are ejected from the nozzle hole 202. The material of the individual liquid chamber forming plate member 203 is made of silicon, and the structure such as the individual liquid chamber can be processed by a method such as dry etching or anisotropic wet etching, so that highly accurate processing can be performed. . With the configuration as described above, the notch 214 provided in the common liquid chamber forming plate member 204 has a minimum necessary size even when the strength is weak due to the thin thickness of the common liquid chamber forming plate member 204 or the like. Notched shape. For this reason, when the individual liquid chamber forming plate member 203 and the common liquid chamber forming plate member 204 are stacked, the strength of the connection terminal 208 of the individual liquid chamber forming plate member 203 is increased by the common liquid chamber forming plate member 204. Can keep.

  FIG. 3 is a plan view showing a state in which the common liquid chamber forming plate member in this embodiment is cut out. The opening 302 is opened by making the cutting line 303 between the adjacent common liquid chamber forming plate-like members 301 coincide with the center position of the opening 302. Specifically, as shown in FIG. 3A, a common liquid chamber forming plate member 301 is cut out on the substrate, and a common liquid chamber forming plate shape adjacent to the common liquid chamber forming plate member. Imposition is made so that the notch of the member 301 faces. Thereafter, the opening 302 corresponding to each notch is processed on the substrate, and the common liquid chamber forming plate member 301 is cut out by cutting along a cutting line 303 indicated by a broken line in FIG. As shown in FIG. 3B, the common liquid chamber forming plate member 301 cut out in this way has a notch 304 formed only at one end of the common liquid chamber forming plate member. At this time, the adjacent common liquid chamber forming plate-like members that are impositioned are impositioned with only a gap of about a dicing line between the notches, and are aligned with the cutting line at the approximate center of the opening. It is only necessary to cut with a dicing blade once. Instead of a cutting method in which dicing is performed using a dicing blade, a processing method using laser or etching may be employed.

  Next, as a method for imposing such a common liquid chamber forming plate member on the substrate, a plurality of common liquid chamber forming plate members 402 are imposing on the substrate 401 in a matrix as shown in FIG. . An opening 404 is provided by aligning a cutting line 403 indicated by a broken line of the common liquid chamber forming plate-like member 402 adjacent to the common liquid chamber forming plate-like member 402 in the row direction with the center position of the opening 404. Yes. That is, the notches of the common liquid chamber forming plate-like members 402 arranged in a matrix on the substrate 401 and the notches of the common liquid chamber forming plate-like members 402 adjacent in the column direction face each other. As a result, the opening 404 is processed at a location corresponding to the notch of the substrate on which the common liquid chamber forming plate-like member 402 is imposed. In FIG. 4, the plurality of openings 404 are aligned in a row in the row direction. In the case where the openings are provided in this way, the substrate is easily broken at the portion where the openings are aligned in the column direction, the handling is difficult, the yield is poor, and the cost is increased. The common liquid chamber forming plate-like members between the rows are separated so that the openings do not continue to face each other. Since the number of forming plate-like members is reduced, the cost is increased.

  Therefore, in another modification of the method for imposing the common liquid chamber forming plate-like member on the substrate in this embodiment, as shown in FIG. 5, the common liquid chamber forming plate-like member is equivalent to one common liquid chamber forming plate-like member between adjacent rows. The imposition is shifted only in the column direction. By doing in this way, the opening part 404 and the opening part 404 of the adjacent row | line | column become not adjacent. Therefore, compared with the imposition method of FIG. Since ceramic and glass, which are easily broken, are difficult to break and easy to handle, an inexpensive droplet discharge head can be provided.

  When the common liquid chamber forming plate member is manufactured using the plate member manufacturing method of the present embodiment as described above, even if imposition is performed at a high density, the cutouts are just facing each other. Compared to the above, the substrate on which the common liquid chamber forming plate-like member is impositioned is hard to break and is easy to handle. Therefore, an inexpensive droplet discharge head can be provided. Further, since the cutting points are arranged in a straight line, cutting with a cutting device using a disk-shaped dicing blade can be easily performed with one setting, and the man-hour can be reduced.

  FIG. 6 is a diagram for explaining another modification of the method for imposing the common liquid chamber forming plate member on the substrate in the present embodiment. The notches of the common liquid chamber forming plate-like members 402 arranged in a matrix on the substrate 401 and the notches of the common liquid chamber forming plate-like members 402 adjacent in the column direction face each other. Then, an opening is formed at a location corresponding to the notch of the substrate 401 on which the common liquid chamber forming plate-like member 402 is abutted. The common liquid chamber forming plate-like member 402 adjacent to the opposite side where the common liquid chamber forming plate-like member 402 and the common liquid chamber forming plate-like member 402 adjacent to each other in the row direction are in contact with each other is opposite to the side having the notch. Imposition so that the sides with no notch face each other. The other common liquid chamber forming plate-like member 402 is similarly impregnated, and after a single row of imposition, a predetermined distance D that can maintain the strength between the opening 404 and the opening 404 between adjacent rows. Just imposition by shifting in the column direction. That is, the opening 404 and the opening 404 in the adjacent row are not adjacent to each other. Finally, a dicing blade is put along the broken cutting line 403 in FIG. 8, and the common liquid chamber forming plate member is cut into individual pieces. By manufacturing a common liquid chamber forming plate member using such a plate member manufacturing method, the common liquid chamber forming plate member is common compared to the case where the notch is just faced even if imposition is performed at high density. The substrate on which the liquid chamber forming plate member is imbedded is hard to break and easy to handle. Therefore, an inexpensive droplet discharge head can be provided.

  In the above embodiment, the member that forms the notch at one end in the longitudinal direction of the common liquid chamber forming plate member by cutting the substrate after processing the through hole (opening) in the substrate has been described. Then, it is also applicable to a plate-like member that forms a recess in the outer shape by cutting out.

What has been described above is merely an example, and the present invention has a specific effect for each of the following modes.
(Aspect A)
Each plate-like member is faced and faced so that one side forming the notch overlaps, and a cutting line for dividing each plate-like member is attached on one side forming the notch, and each portion including the cutting line is attached to each portion including the cutting line. The opening line which shows the frame which processes the opening part which forms the notch of a plate-shaped member is attached | subjected. According to this, as described in the above embodiment, one side of each plate-like member 301 forming the notch 305 is overlaid and faced. Further, a cutting line 304 common to the separation of each plate-like member 301 is attached to the overlapping one side, and an opening line for processing the opening 302 is attached to a portion including the common cutting line 304. The imposition of each plate-like member 301, the addition of the cutting line 304 and the opening line 303 are performed, the separation of each plate-like member 301 along the common cutting line 304, and the opening along the opening line 303 When the processing of 302 is performed, a cutting member is generated. This cutting member is only an originally unnecessary cutting member produced by processing the opening along the opening line. Since one side of each plate-like member overlaps, there is no space between each plate-like member 301, and in cutting performed along a common cutting line 304, the cutting members Does not occur. For this reason, the increase in a cutting member can be suppressed and the part which can face a plate-shaped member on a board | substrate increases. Thereby, many plate-shaped members can be cut out from one board | substrate. Therefore, the cost of the plate member can be reduced.
(Aspect B)
A cutting line in which each plate-like member is arranged in a matrix on the substrate, faces each plate-like member so that one side forming the cutout overlaps, and cuts into each plate-like member on one side forming the cutout And an opening line indicating a frame for processing the opening is attached so that the opening for forming the notch of each plate-like member is alternately formed along the cutting line in the portion including the cutting line. To do. According to this, as described in the modification of the above embodiment, one side of each plate-like member 301 forming the notch 305 is overlapped and imposed. Further, a cutting line 304 common to the separation of each plate-like member 301 is attached to the overlapping one side, and an opening line for processing the opening 302 is attached to a portion including the common cutting line 304. Openings that form the notches 305 of the plate-like members 301 are alternately formed along the cutting lines 304. The imposition of each plate-like member 301, the addition of the cutting line 304 and the opening line 303 are performed, the separation of each plate-like member 301 along the common cutting line 304, and the opening along the opening line 303 When the processing of 302 is performed, a cutting member is generated. This cutting member is only an originally unnecessary cutting member produced by processing the opening along the opening line. Since one side of each plate-like member overlaps, there is no space between each plate-like member 301, and in cutting performed along a common cutting line 304, the cutting members Does not occur. For this reason, the increase in a cutting member can be suppressed and the part which can face a plate-shaped member on a board | substrate increases. Thereby, many plate-shaped members can be cut out from one board | substrate. Further, the opening 404 and the opening 404 in the adjacent row are not adjacent to each other. Thereby, the board | substrate in a row direction becomes difficult to break. Therefore, the cost of the plate member can be reduced.
(Aspect C)
In (Aspect A) or (Aspect B), the plate-like members are arranged in the row direction, and each plate-like member in each row direction is shifted by a predetermined amount in the row direction and imposed on the substrate. According to this, as described in another modification of the above embodiment, the opening 404 and the opening 404 in the adjacent row are not adjacent to each other. Compared to the case where the notch is just faced even if imposition is performed at a high density, the substrate on which the common liquid chamber forming plate-like member is impositioned is hard to crack and is easy to handle, thus increasing the yield. Manufacturing cost is reduced.
(Aspect D)
In (Aspect A) to (Aspect C), the substrate is a silicon wafer. According to this, as described in the above embodiment, by using silicon as the individual liquid chamber forming plate member, it is possible to perform highly accurate processing by a method such as dry etching or anisotropic wet etching. .
(Aspect E)
In (Aspect A) to (Aspect C), the substrate is ceramic. According to this, as described in the above embodiment, since it is difficult to break even with a fragile ceramic and it is easy to handle, an inexpensive droplet discharge head can be provided.
(Aspect F)
In (Aspect A) to (Aspect C), the substrate is glass. According to this, as described in the above embodiment, since it is difficult to break even glass that is easily broken, it is easy to handle, so that an inexpensive droplet discharge head can be provided.
(Aspect G)
In any one of (Aspect A) to (Aspect F), the droplet discharge head is configured by laminating a plurality of plate-like members manufactured by a plate-like member manufacturing method. According to this, as described in the above embodiment, various plate-like members constituting the droplet discharge head from one substrate, for example, the nozzle plate-like member 201, the individual liquid chamber forming plate-like member 203, the common liquid By manufacturing the chamber forming plate member 204 at a low cost, the cost of the droplet discharge head can be reduced.
(Aspect H)
In (Aspect G), a connection terminal for connecting the internal wiring and the external wiring arranged on the individual liquid chamber forming plate member of the plate member is provided on the individual liquid chamber forming plate member and connected to the connection terminal. The external wiring thus formed is drawn out from a notch provided at one end of the common liquid chamber forming plate member of another plate member laminated on the individual liquid chamber forming plate member. According to this, as described in the above embodiment, the common liquid chamber forming plate member 204 having a notch formed at one end can be manufactured at low cost, so that the droplet discharge head can be manufactured at low cost. .
(Aspect I)
An image is formed on the recording medium by including the droplet discharge head of (Aspect G) or (Aspect H) and discharging the recording liquid onto the recording medium from the nozzle of the droplet discharge head. According to this, as described in the above embodiment, an inkjet recording apparatus which is an inexpensive image forming apparatus can be provided by mounting an inexpensive droplet discharge head.

DESCRIPTION OF SYMBOLS 100 Inkjet recording apparatus 101 Carriage 102 Guide rod 103 Belt 104 Motor 105 Inkjet head 106 Recording medium 107 Platen 108 Paper feed roller 109 Motor 110 Maintenance apparatus 201 Nozzle plate member 202 Nozzle hole 203 Individual liquid chamber forming plate member 204 Common liquid chamber Forming plate member 205 Individual liquid chamber 206 Ink supply port 207 Drive IC
208 Connection terminal 209 Common liquid chamber 210 Frame member 211 Ink supply port 212 Internal wiring 213 External wiring 214 Notch 215 Drawer port 301 Common liquid chamber forming plate member 302 Opening 303 Opening line 304 Cutting line 305 Notch 306 Opening 307 Notch 308 Opening 309 Cutting member 401 Substrate 402 Common liquid chamber forming plate member 403 Cutting line 404 Opening

Japanese Patent No. 3579464

Claims (9)

In the manufacturing method of the plate-shaped member which cuts the plate-shaped member having a notch on at least one side on the substrate, and divides it into pieces,
Facing each plate-like member so that one side forming the notch overlaps,
A cutting line for cutting each plate-like member is attached on one side forming the notch,
A manufacturing method of a plate-like member, wherein an opening line indicating a frame for processing an opening for forming the notch of each plate-like member is attached to a portion including the cutting line. In the manufacturing method of the plate-shaped member which cuts the plate-shaped member having a notch on at least one side on the substrate, and divides it into pieces,
The plate-like members are arranged in a matrix on the substrate,
Face each plate-like member so that one side forming the notch overlaps, and attach a cutting line to cut the plate-like member on one side forming the notch,
An opening line indicating a frame for processing the opening is attached to a portion including the cutting line so that an opening for forming the notch of each plate-like member is alternately formed along the cutting line. The manufacturing method of the plate-shaped member characterized by the above-mentioned. In the manufacturing method of the plate-shaped member according to claim 1 or 2,
A method of manufacturing a plate-like member, comprising: arranging the plate-like members in a row direction, and imposing each plate-like member in each row direction by a predetermined amount in the row direction on the substrate. In the manufacturing method of the plate-shaped member in any one of Claims 1-3,
A method for producing a plate-like member, wherein the substrate is a silicon wafer. In the manufacturing method of the plate-shaped member in any one of Claims 1-3,
A method for producing a plate-like member, wherein the substrate is ceramic. In the manufacturing method of the plate-shaped member in any one of Claims 1-3,
The method for producing a plate-like member, wherein the substrate is glass.   A droplet discharge head comprising a plurality of plate members manufactured by the method for manufacturing a plate member according to claim 1. The droplet discharge head according to claim 7,
A connection terminal for connecting an internal wiring and an external wiring arranged in the individual liquid chamber forming plate member of the plate member is provided in the individual liquid chamber forming plate member, and the connection terminal is connected to the connection terminal. The external wiring is drawn out from a notch provided at one end of the common liquid chamber forming plate member of another plate member laminated on the individual liquid chamber forming plate member. Discharge head.   An image forming apparatus comprising the droplet discharge head according to claim 7 or 8, wherein an image is formed on the recording medium by discharging a recording liquid from a nozzle of the droplet discharge head onto the recording medium. .

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