JP2013178361A5 - 構造体及びx線遮蔽格子の製造方法 - Google Patents

構造体及びx線遮蔽格子の製造方法 Download PDF

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JP2013178361A5
JP2013178361A5 JP2012041786A JP2012041786A JP2013178361A5 JP 2013178361 A5 JP2013178361 A5 JP 2013178361A5 JP 2012041786 A JP2012041786 A JP 2012041786A JP 2012041786 A JP2012041786 A JP 2012041786A JP 2013178361 A5 JP2013178361 A5 JP 2013178361A5
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manufacturing
ray shielding
shielding grating
grating
ray
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JP2013178361A (ja
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本発明は構造体及びX線遮蔽格子の製造方法に関する。
JP2012041786A 2012-02-28 2012-02-28 構造体の製造方法 Pending JP2013178361A (ja)

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JP2012041786A JP2013178361A (ja) 2012-02-28 2012-02-28 構造体の製造方法

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JP2012041786A JP2013178361A (ja) 2012-02-28 2012-02-28 構造体の製造方法

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JP2013178361A JP2013178361A (ja) 2013-09-09
JP2013178361A5 true JP2013178361A5 (ja) 2015-04-02

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JP2012041786A Pending JP2013178361A (ja) 2012-02-28 2012-02-28 構造体の製造方法

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6667215B2 (ja) 2014-07-24 2020-03-18 キヤノン株式会社 X線遮蔽格子、構造体、トールボット干渉計、x線遮蔽格子の製造方法
JP2017116475A (ja) * 2015-12-25 2017-06-29 キヤノン株式会社 X線遮蔽格子、該x線遮蔽格子の製造方法及び該x線遮蔽格子を備えるx線トールボット干渉計
JP2018106048A (ja) * 2016-12-27 2018-07-05 大日本印刷株式会社 構造体および構造体を用いた回折格子
CN111522086B (zh) * 2020-05-12 2021-07-20 深圳大学 热复合的光栅制作工艺

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004342750A (ja) * 2003-05-14 2004-12-02 Toshiba Corp 電子デバイスの製造方法
JP2006339483A (ja) * 2005-06-03 2006-12-14 Toppan Printing Co Ltd 配線基板の製造方法及び配線基板
JP2007070709A (ja) * 2005-09-09 2007-03-22 Seiko Instruments Inc 電鋳型、電鋳型の製造方法及び電鋳部品の製造方法
JP5773624B2 (ja) * 2010-01-08 2015-09-02 キヤノン株式会社 微細構造体の製造方法

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