JP2013148448A - Method for inspecting optical film - Google Patents

Method for inspecting optical film Download PDF

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JP2013148448A
JP2013148448A JP2012008771A JP2012008771A JP2013148448A JP 2013148448 A JP2013148448 A JP 2013148448A JP 2012008771 A JP2012008771 A JP 2012008771A JP 2012008771 A JP2012008771 A JP 2012008771A JP 2013148448 A JP2013148448 A JP 2013148448A
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film
stage member
optical film
layer
inspection method
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Nobuyasu Suzuki
伸康 鈴木
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Toppan Inc
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Toppan Printing Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide an inspection method which can accurately detect a defect, such as a foreign material on an optical film and a defect due to a small change in film thickness around the foreign matter, can handle an inspected optical film as a product and is performed by efficient visual observation.SOLUTION: An inspection method determines the existence/absence of abnormality of reflected light by irradiating a light source with light from one surface side of an optical film having a transparent optical function layer on the one surface of the film while the other surface of the optical film is brought into close contact with a metal stage member through a transparent liquid layer.

Description

本発明は、表示デバイスなどに用いられる透明な光学フィルムを、目視により簡便で正確に検査する方法に関する。   The present invention relates to a method for inspecting a transparent optical film used for a display device or the like simply and accurately by visual observation.

近年CRTや液晶などの表示デバイスでは、表示デバイスそのものの品質や機能の向上、またはそれが使用される環境に作用されない画質を提供するために様々な機能を有する透明な光学フィルムの要求が高まっている。   In recent years, for display devices such as CRT and liquid crystal, there has been an increasing demand for transparent optical films having various functions in order to improve the quality and function of the display device itself or to provide image quality that is not affected by the environment in which the display device is used. Yes.

一般に光学フィルムとは、光線を透過または反射吸収することにより、様々な効果を与えることを目的としたフィルムである。例えば、反射防止、配向、偏光、位相差、輝度向上、遮光などの機能を有するものである。   In general, an optical film is a film intended to give various effects by transmitting or reflecting and absorbing light. For example, it has functions such as antireflection, orientation, polarization, phase difference, brightness enhancement, and light shielding.

上述のような光学フィルムは、その光学特性を効率よく発揮するために、光学特性に影響を与える厚み、寸法精度、異物混入の排除などに対して厳しい品質が要求され、それに伴い製造環境や方法及び検査機器や手法などについて高い精度が要求されている。   The optical film as described above is required to have strict quality with respect to the thickness, dimensional accuracy, exclusion of foreign matters, etc. affecting the optical characteristics in order to efficiently exhibit the optical characteristics, and accordingly the manufacturing environment and method In addition, high accuracy is required for inspection equipment and methods.

このような光学フィルムの品質を保証するために、特に光学フィルムの最終形態(製品)に対する検査方法については様々な試みがなされている。以下、周辺外光の影響により生じる映り込み現象を軽減する反射防止フィルムを光学フィルムの一例として説明する。   In order to guarantee the quality of such an optical film, various attempts have been made especially for the inspection method for the final form (product) of the optical film. Hereinafter, an antireflection film that reduces the reflection phenomenon caused by the influence of ambient light will be described as an example of an optical film.

反射防止フィルムは様々な構成からなるが、一般には透明プラスチック基材の一方の面上に、金属酸化物などの高屈折率層と、有機樹脂からなる低屈折率層とを交互に積層した光学機能層を形成してなる(特許文献1)。   An antireflection film has various configurations, but in general, an optical film in which a high refractive index layer such as a metal oxide and a low refractive index layer made of an organic resin are alternately laminated on one surface of a transparent plastic substrate. A functional layer is formed (Patent Document 1).

このような構成からなる反射防止フィルムの最終形態での品質検査においては、最表面の反射防止層に発生した欠陥(異物、厚みムラなど)を精度よく検出するために、表面反射光のノイズの基となる透明プラスチック基材の他方の面(空気層と接する面側)の界面からの反射光を抑止する方法として、様々な工夫がされている。   In the quality inspection in the final form of the antireflection film having such a structure, in order to accurately detect defects (foreign matter, thickness unevenness, etc.) occurring in the outermost antireflection layer, the noise of the surface reflection light is detected. Various devices have been devised as a method for suppressing reflected light from the interface of the other surface (surface side in contact with the air layer) of the transparent plastic substrate as a base.

例えば、図2(a)に示すような、透明基材3の一方の面の上にハードコート層4および反射防止層5が順次積層されてなる反射防止フィルム10の他方の面(空気層と接する透明基材3の他方の面側)に、黒色塗料を塗布して黒色塗料層6を設けることで、透明基材3と黒色塗料層6との界面からの反射光を抑止している。   For example, as shown in FIG. 2 (a), the other surface of the antireflection film 10 (the air layer and the antireflection film 10 in which the hard coat layer 4 and the antireflection layer 5 are sequentially laminated on one surface of the transparent substrate 3). By applying a black paint and providing the black paint layer 6 on the other surface side of the transparent base 3 in contact, reflected light from the interface between the transparent base 3 and the black paint layer 6 is suppressed.

また、図2(b)に示すような、透明基材3の一方の面の上にハードコート層4および反射防止層5が順次積層されてなる反射防止フィルム10の他方の面(空気層と接する透明基材3の他方の面側)に、接着剤層7を介して黒色フィルム8を積層することで、透明基材3と黒色塗料層6との界面からの反射光を抑止している(特許文献2)。   Further, as shown in FIG. 2B, the other surface (an air layer and the other surface) of the antireflection film 10 in which the hard coat layer 4 and the antireflection layer 5 are sequentially laminated on one surface of the transparent substrate 3. By laminating the black film 8 on the other surface side of the transparent substrate 3 in contact with the adhesive layer 7, the reflected light from the interface between the transparent substrate 3 and the black paint layer 6 is suppressed. (Patent Document 2).

しかしながら、図2(a)に示す検査方法は、反射防止フィルムの最終形態に直接黒色塗料を塗布するため、塗布工程や乾燥工程によるダメージが大きく、検査後にその用いた反射防止フィルムが製品として活かすことができない問題がある。また、図2(b)に示す検査方法も、接着剤層を介するために図2(a)の検査方法と同様に検査後にその用いた反射防止フィルムが製品として活かすことができない問題がある。   However, in the inspection method shown in FIG. 2A, the black paint is directly applied to the final form of the antireflection film, so that the damage caused by the application process and the drying process is large, and the antireflection film used after the inspection is utilized as a product. There is a problem that can not be. Further, the inspection method shown in FIG. 2 (b) also has a problem that the antireflection film used after the inspection cannot be used as a product after the inspection in the same manner as the inspection method of FIG. 2 (a) due to the adhesive layer.

特開2002−341104号公報JP 2002-341104 A 特開2006−71633号公報JP 2006-71633 A

本発明は、異物などの欠陥とその周辺の膜厚の微小な変化による欠陥を正確に検出でき、且つ検査後も製品として扱うことができる、ムダのない目視による検査方法を提供するものである。   The present invention provides a visual inspection method with no waste, which can accurately detect defects such as foreign matters and defects due to minute changes in the film thickness around the defect, and can be handled as a product even after inspection. .

上記の課題を解決するための手段として、請求項1に記載の発明は、フィルムの一方の面に透明な光学機能層を有する光学フィルムの他方の面と、金属製のステージ部材とを、透明な液体層を介して密着させた状態で、前記光学フィルムの一方の面側から光源を照射し、その反射光の異常有無を目視で判定することを特徴とする検査方法である。   As means for solving the above problems, the invention according to claim 1 is characterized in that the other surface of the optical film having a transparent optical functional layer on one surface of the film and the metal stage member are transparent. In an inspection method, a light source is irradiated from one surface side of the optical film in a state of being in close contact with each other through a liquid layer, and the presence or absence of abnormality of the reflected light is visually determined.

また、請求項2に記載の発明は、前記金属製のステージ部材が、反射率40%以下であることを特徴とする請求項1に記載の検査方法である。   The invention according to claim 2 is the inspection method according to claim 1, wherein the metal stage member has a reflectance of 40% or less.

また、請求項3に記載の発明は、前記金属製のステージ部材が、下記数1の式で表される色度差d、0.005〜0.010であることを特徴とする請求項1又は2に記載の検査方法である。   The invention according to claim 3 is characterized in that the metal stage member has a chromaticity difference d, 0.005 to 0.010 expressed by the following equation (1). Or it is the inspection method of 2.

Figure 2013148448
d:色度差、x:黒塗りフィルムの色度座標x、y:黒塗りフィルムの色度座標y
:ステージ部材の色度座標x、 y:ステージ部材の色度座標y
但し、x=0.403、y=0.387
Figure 2013148448
d: chromaticity difference, x 0 : chromaticity coordinate x of black coating film, y 0 : chromaticity coordinate y of black coating film
x i : Stage member chromaticity coordinate x, y i : Stage member chromaticity coordinate y
However, x 0 = 0.403, y 0 = 0.387

本発明は、請求項1に記載のフィルムの一方の面に透明な光学機能層を有する光学フィルムの他方の面と、金属製のステージ部材とを、透明な液体層を介して密着させた状態で表面反射光を目視で検査することにより、検査後も容易に液体層を取り除くことができ、検査に用いた光学フィルムにダメージを与えることがない。また、請求項2に記載のステージ部材の反射率が40%以下であること、及び請求項3に記載のステージ部材の色度差d、0.005〜0.010であることにより、目視による検査が容易に行なえる。
従って、本発明の検査方法により、光学フィルムを目視で精度よく欠陥の検査を行うことができ、且つ、検査後も製品として扱うことができるムダのない品質管理を効率よく実行することができる。
The present invention is a state in which the other surface of the optical film having a transparent optical functional layer on one surface of the film according to claim 1 is in close contact with the metal stage member via a transparent liquid layer. By visually inspecting the surface reflected light, the liquid layer can be easily removed even after the inspection, and the optical film used for the inspection is not damaged. Further, the reflectance of the stage member according to claim 2 is 40% or less, and the chromaticity difference d of the stage member according to claim 3 is 0.005 to 0.010. Inspection can be performed easily.
Therefore, according to the inspection method of the present invention, the optical film can be visually inspected for defects with good accuracy, and wasteless quality control that can be handled as a product even after the inspection can be efficiently executed.

本発明の光学フィルムの検査方法の一実施形態を示す概略断面図である。It is a schematic sectional drawing which shows one Embodiment of the inspection method of the optical film of this invention. 従来の光学フィルムの検査方法の一実施形態を示す概略断面図である。It is a schematic sectional drawing which shows one Embodiment of the inspection method of the conventional optical film. 光学フィルムの基材裏面での反射光の概略断面図である。It is a schematic sectional drawing of the reflected light in the base material back surface of an optical film.

本発明の光学フィルムの検査方法を、反射防止フィルムを例として、図1により以下に詳細に説明する。   The method for inspecting an optical film of the present invention will be described below in detail with reference to FIG. 1, taking an antireflection film as an example.

図1は本発明の光学フィルムの検査方法の一実施形態を示す概略断面図である。本発明の検査方法は、透明基材3の一方の面上にハードコート層4、反射防止層5を順次積層し
て反射防止機能を設けた反射防止フィルム10の他方の面(空気層と接する透明基材3の他方の面側)に、液層2を介してステージ部材1を密着させた状態で、前記反射防止層5面にその上方の光源20から光線を照射し、その反射光の変化を目視にて検知する方法である。
FIG. 1 is a schematic cross-sectional view showing an embodiment of the optical film inspection method of the present invention. In the inspection method of the present invention, the other surface of the antireflection film 10 provided with an antireflection function by sequentially laminating the hard coat layer 4 and the antireflection layer 5 on one surface of the transparent substrate 3 (in contact with the air layer). In a state where the stage member 1 is in close contact with the other surface side of the transparent base material 3 via the liquid layer 2, the surface of the antireflection layer 5 is irradiated with light from the light source 20 thereabove, and the reflected light This is a method for visually detecting a change.

一般的に反射防止フィルム10に用いられる透明基材3としてTAC(トリアセチルセルロース)フィルムであり、その屈折率は約1.51である。従って、ここで用いられる液層2とは、前記TACフィルムと後述するステージ部材との間に空気が介在することを防ぐ役割を担うものである(下記数2参照)。   Generally, the transparent substrate 3 used for the antireflection film 10 is a TAC (triacetylcellulose) film, and its refractive index is about 1.51. Therefore, the liquid layer 2 used here plays a role of preventing air from intervening between the TAC film and a stage member described later (see the following formula 2).

Figure 2013148448
Figure 2013148448

以下に図3を用いて、反射防止フィィルム10の反射光について説明する。図3は一般的な反射防止フィィルム10の概要断面図を示し、その構造は透明基材3の上に、透明基材と略同一の屈折率を有するハードコート層4と反射防止層5が順次積層されて構成されている。ここで反射防止層5では、入射された光が反射防止層5とハードコート層4界面での反射光50となり、その光が表面反射光40と干渉することで反射防止効果が得られている。このとき、反射防止層5の膜厚変化を伴う局所的な欠陥があると、干渉による反射防止効果に差異が生じて外観不良となる。   The reflected light of the antireflection film 10 will be described below with reference to FIG. FIG. 3 is a schematic cross-sectional view of a general antireflection film 10, which has a structure in which a hard coat layer 4 and an antireflection layer 5 having substantially the same refractive index as that of the transparent substrate are sequentially formed on the transparent substrate 3. It is configured by stacking. Here, in the antireflection layer 5, incident light becomes reflected light 50 at the interface between the antireflection layer 5 and the hard coat layer 4, and the light interferes with the surface reflected light 40, thereby obtaining an antireflection effect. . At this time, if there is a local defect accompanied by a change in the thickness of the antireflection layer 5, a difference occurs in the antireflection effect due to interference, resulting in poor appearance.

一方、前記反射防止フィィルム10の他方の面である透明基材3と空気層との界面では、透明基材3の屈折率n、隣接する物質(この場合は空気)の屈折率nとすると、前記数2に示す式により、透明基材3と空気層との屈折率の比が大きくなるために反射率Rが高くなり、反射防止層の不良の検出を困難にする要因となる。 Meanwhile, in the interface between the other transparent substrate 3 which is the surface of the air layer of the antireflection Fiirumu 10, the refractive index n 0 of the transparent substrate 3, the refractive index n 1 of the adjacent material (in this case air) As a result, the ratio of the refractive index between the transparent base material 3 and the air layer is increased according to the formula shown in Equation 2, so that the reflectance R is increased, which makes it difficult to detect a defect in the antireflection layer.

本発明はこのような反射防止層の不良検出の妨げとなる要因を解消するために、前記透明基材3の他方の面に透明基材の屈折率と略同等の屈折率を有する液層を介して、金属製のステージ部材を密着する欠陥検査である。   In the present invention, in order to eliminate such a factor that hinders the detection of defects in the antireflection layer, a liquid layer having a refractive index substantially equal to the refractive index of the transparent base material is provided on the other surface of the transparent base material 3. This is a defect inspection in which a metal stage member is closely attached.

本発明に係る前記液層2としては、TACフィルムの屈折率1.51近傍の屈折率を有するものであれば特に限定するものではない。特に屈折率1.49〜1.54を有する液体で、前記TACフィルムやステージ部材にダメージを与えない活性の低いものや毒性の低いものがより好ましい。   The liquid layer 2 according to the present invention is not particularly limited as long as it has a refractive index near the refractive index of 1.51 of the TAC film. In particular, a liquid having a refractive index of 1.49 to 1.54, more preferably a liquid having low activity and low toxicity that does not damage the TAC film or the stage member.

また、本発明に係るステージ部材1は、入射光を吸収し、TACフィルムとの界面の反射光を抑止する作用を担うものであり、反射率が40%以下の金属部材が好ましい。反射率が40%を超えると反射防止層の欠陥検出が難しく、品質管理面に問題が生じる。   Further, the stage member 1 according to the present invention has a function of absorbing incident light and suppressing reflected light at the interface with the TAC film, and a metal member having a reflectance of 40% or less is preferable. If the reflectance exceeds 40%, it is difficult to detect defects in the antireflection layer, which causes a problem in quality control.

このときの反射率とは、ハロゲン光源を有する反射率測定器を用いて、投光器と受光器を45度の角度で設置し、金属部材表面にて正反射させた波長380nm〜780nmの範囲での、反射率の最大値を測定した値である。また、反射率の比較対照は白板を用いたものであり、反射防止フィルム10とステージ部材1との間に液層(伸交産業社製:「ペトロセーフゾルAK−EO2」屈折率1.40)を介して測定し、反射率0〜40%のステージ部材を選定する。   The reflectance at this time is a range of wavelengths of 380 nm to 780 nm in which a projector and a light receiver are installed at an angle of 45 degrees using a reflectance measuring device having a halogen light source and regularly reflected on the metal member surface. This is a value obtained by measuring the maximum value of reflectance. In addition, as a comparative control of reflectance, a white plate was used, and a liquid layer (manufactured by Shinko Sangyo Co., Ltd .: “Petrosafesol AK-EO2” refractive index 1.40 was used between the antireflection film 10 and the stage member 1. ) To select a stage member having a reflectance of 0 to 40%.

なお、参考までに金属製のステージ部材としてレイデント処理(レイデント工業社製:特殊電気メッキ処理)を施したステンレス部材と、TACフィルムに黒色塗料(アサヒペン社製:「CREATIVE COLOR ツヤ消し、屈折率1.51」)を塗布したものを用いて測定したところ、前者の反射率は12%、後者は25%であり、いずれも反射率40%以下であるが、本発明に係る前者のステージ部材の方が従来の黒色塗料よりも反
射率を低くすることができる。
For reference, a stainless steel member subjected to a rayent treatment (made by Raydent Kogyo Co., Ltd .: special electroplating treatment) as a metal stage member and a black paint (made by Asahi Pen Co., Ltd .: “CREATIVE COLOR matt, refractive index 1) .51 "), the former has a reflectance of 12% and the latter has a reflectance of 25%, both of which have a reflectance of 40% or less. The reflectance can be made lower than that of the conventional black paint.

また、本発明に係る前記ステージ部材は、反射率に加えて色度差を限定することで色味の変化が確認でき、目視による反射防止フィルムの欠陥をより精度よく検出できる。すなわち、ステージ部材を用いた時の反射防止フィルムの色度差を、視認性が高いとされている従来の方法(黒色塗料を反射防止フィルムの裏面側に塗布したときの反射防止フィルムの色度差)に近づけることにより、欠陥による色味の変化を目視で確認できる。   Moreover, the stage member according to the present invention can confirm the change in color by limiting the chromaticity difference in addition to the reflectance, and can detect the defect of the antireflection film visually with higher accuracy. That is, the chromaticity difference of the antireflection film when the stage member is used, the conventional method that is considered to have high visibility (the chromaticity of the antireflection film when the black paint is applied to the back side of the antireflection film) By making it close to (difference), it is possible to visually confirm a change in color due to a defect.

上記の色度差のような色を定量的に表す体系として、XYZ表色系(国際証明委員会CIEの表色系の一つ)が用いられるが、このXYZ表色系では数値と色の関係が分かり難い。そこでXYZ表色系から絶対的な色合いを表現するxyY表色系を用いて前記ステージ部材の色味を限定すると、下記数3の式で表される色度差d、0.005〜0.010を満たすことが好ましい。   An XYZ color system (one of the color systems of the International Certification Committee CIE) is used as a system for quantitatively expressing colors such as the above chromaticity difference. In this XYZ color system, numerical values and colors are used. The relationship is difficult to understand. Therefore, when the color tone of the stage member is limited using an xyY color system that expresses an absolute hue from the XYZ color system, the chromaticity difference d expressed by the following equation (3), 0.005 to 0. It is preferable to satisfy 010.

Figure 2013148448
d:色度差、x:黒塗りフィルムの色度座標x、y:黒塗りフィルムの色度座標y
:ステージ部材の色度座標x、 y:ステージ部材の色度座標y
Figure 2013148448
d: chromaticity difference, x 0 : chromaticity coordinate x of black coating film, y 0 : chromaticity coordinate y of black coating film
x i : Stage member chromaticity coordinate x, y i : Stage member chromaticity coordinate y

なお、XYZ表色系からxyY表色系への変換は、下記数4の式より得られる。   The conversion from the XYZ color system to the xyY color system is obtained from the following equation (4).

Figure 2013148448
Figure 2013148448

反射防止フィルムの欠陥を色味の変化により目視で確認できるためのステージ部材の色度差d、すなわちステージ部材の具体的な選定について以下に説明する。   The stage member chromaticity difference d, that is, the specific selection of the stage member, for allowing the defect of the antireflection film to be visually confirmed by the change in color, will be described below.

上記で説明した視認性の高い黒色塗料(アサヒペン社製:「CREATIVE COLOR ツヤ消し、屈折率1.51」)をTACフィルムに塗布し、分光測定器により黒塗りフィルムの色度座標(x,y)を求める。また、同様にして各種のステージ部材の色度座標(x,y)を求める。これらの値を上記数3の式に代入して色度差dを算出して適正なステージ部材を選定する。 The high-visibility black paint described above (manufactured by Asahi Pen Co., Ltd .: “CREATIVE COLOR matt, refractive index 1.51”) is applied to the TAC film, and the chromaticity coordinates (x 0 , seek y 0). Similarly, the chromaticity coordinates (x i , y i ) of various stage members are obtained. By substituting these values into the above equation 3, the chromaticity difference d is calculated, and an appropriate stage member is selected.

実施の一例として、ステージ部材としてレイデント処理されたステンレス材を用いたところ、以下の結果が得られた。
(x,y)=(0.403,0.387)
(x,y)=(0.409,0.384)
d=0.0068
As an example of implementation, the following results were obtained when a stainless material subjected to a radiant treatment was used as the stage member.
(X 0 , y 0 ) = (0.403, 0.387)
(X i , y i ) = (0.409, 0.384)
d = 0.068

上記の結果から、ステージ部材の色度差dとしては、0.005〜0.010が好ましく、従来より視認性の高い黒色塗料と同等の色度差にすることにより色味の変化を目視で確認することができる。
すなわち、反射率:40%以下、色度差d:0.005〜0.010のステージ部材を選定することにより、反射防止フィルムなどの光学フィルムの欠陥検査を精度よく、かつ目視により行なうことができる。
From the above results, the chromaticity difference d of the stage member is preferably 0.005 to 0.010, and the change in color is visually observed by making the chromaticity difference equivalent to that of a black paint having higher visibility than conventional. Can be confirmed.
That is, by selecting a stage member having a reflectance of 40% or less and a chromaticity difference d of 0.005 to 0.010, a defect inspection of an optical film such as an antireflection film can be accurately and visually performed. it can.

1 ステージ部材
2 液層
3 透明基材
4 ハードコート層
5 反射防止層
6 黒色塗料層
7 接着剤層
8 黒色フィルム
10 反射防止フィルム
20 光源
30 入射光
40 表面反射光
50 反射防止層5とハードコート層4界面での反射光
60 透明基材3と空気層との界面での反射光
DESCRIPTION OF SYMBOLS 1 Stage member 2 Liquid layer 3 Transparent base material 4 Hard coat layer 5 Antireflection layer 6 Black paint layer 7 Adhesive layer 8 Black film 10 Antireflection film 20 Light source 30 Incident light 40 Surface reflection light 50 Antireflection layer 5 and hard coat Reflected light 60 at the interface of the layer 4 Reflected light at the interface between the transparent substrate 3 and the air layer

Claims (3)

フィルムの一方の面に透明な光学機能層を有する光学フィルムの他方の面と、金属製のステージ部材とを、透明な液体層を介して密着させた状態で、前記光学フィルムの一方の面側から光源を照射し、その反射光の異常有無を目視で判定することを特徴とする検査方法。   One surface side of the optical film in a state in which the other surface of the optical film having a transparent optical functional layer on one surface of the film is in close contact with the metal stage member via the transparent liquid layer An inspection method characterized by irradiating a light source from a light source and visually determining whether there is an abnormality in the reflected light. 前記金属製のステージ部材が、反射率40%以下であることを特徴とする請求項1に記載の検査方法。   The inspection method according to claim 1, wherein the metal stage member has a reflectance of 40% or less. 前記金属製のステージ部材が、下記数5の式で表される色度差d、0.005〜0.010であることを特徴とする請求項1又は2に記載の検査方法。
Figure 2013148448
d:色度差、x:黒塗りフィルムの色度座標x、y:黒塗りフィルムの色度座標y
:ステージ部材の色度座標x、 y:ステージ部材の色度座標y
但し、x=0.403、y=0.387
The inspection method according to claim 1 or 2, wherein the metal stage member has a chromaticity difference d expressed by the following formula (5), 0.005 to 0.010.
Figure 2013148448
d: chromaticity difference, x 0 : chromaticity coordinate x of black coating film, y 0 : chromaticity coordinate y of black coating film
x i : Stage member chromaticity coordinate x, y i : Stage member chromaticity coordinate y
However, x 0 = 0.403, y 0 = 0.387
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020101460A (en) * 2018-12-21 2020-07-02 株式会社Sumco Film thickness measuring apparatus and film thickness measuring method of silicon epitaxial layer in epitaxial silicon wafer with embedded diffusion layer, and manufacturing method of epitaxial silicon wafer with embedded diffusion layer using film thickness measuring apparatus or film thickness measuring method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020101460A (en) * 2018-12-21 2020-07-02 株式会社Sumco Film thickness measuring apparatus and film thickness measuring method of silicon epitaxial layer in epitaxial silicon wafer with embedded diffusion layer, and manufacturing method of epitaxial silicon wafer with embedded diffusion layer using film thickness measuring apparatus or film thickness measuring method
JP7028154B2 (en) 2018-12-21 2022-03-02 株式会社Sumco A film thickness measuring device and a film thickness measuring method for a silicon epitaxial layer in an epitaxial silicon wafer with an embedded diffusion layer, and a method for manufacturing an epitaxial silicon wafer with an embedded diffusion layer using the film thickness measuring device or the film thickness measuring method.

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