JP2013145784A - Resin adhering method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To house a plate-like workpiece set in a cassette and easily peel a sheet and resin from a plate-like workpiece, in the plate-like workpiece set in which the sheet is adhered to the plate-like workpiece via the resin.SOLUTION: A sheet is suction-held on a holding table, and liquid resin is supplied from above the sheet. A pressing part suction-holding a plate-like workpiece is lowered toward the holding table, so as to pressurize the liquid resin and enlarge it on the sheet. The liquid resin is radiated with light to harden the liquid resin. A sheet S and resin R1 are cut along an outer periphery of a plate-like workpiece W, and one part of the sheet S and the resin R1 is cut to protrude toward an outer peripheral side than the outer periphery of the plate-like workpiece W, so as to make a plate-like workpiece set WS on which a grip part 100 is formed. The grip part 100 is gripped, so as to easily peel the sheet S and the resin R1 from the plate-like workpiece.

Description

  The present invention relates to a method for attaching a resin and a sheet to a plate-like workpiece.

  For plate-like workpieces having waviness and warpage, such as a wafer cut out from an ingot, processing for flattening the plate-like workpiece by grinding is performed. When grinding a plate-like workpiece, a resin is applied to one surface and the resin is cured to make the one surface side a flat surface, and then the flat surface side is held, and the other surface is a grinding wheel The wafer is ground and pressed to remove waviness and warpage of the wafer (see, for example, Patent Document 1).

  In Patent Document 1, as a method of fixing the resin to one surface of the plate-like workpiece, the resin is applied to one surface of the plate-like workpiece, and the wafer coated with the resin is placed on a stage having a substantially horizontal holding surface. A method is proposed in which one side of the wafer is exposed on the holding surface, the wafer held on the stage holding surface is pressed from the side of the wafer toward the stage by pressing means, and then the resin is cured. Has been.

  In addition, when the sheet is fixed to the plate-shaped workpiece together with the resin, the liquid resin supplied to the upper surface of the sheet held on the holding table is pressed by the plate-shaped workpiece held on the holding surface of the stage, and the liquid resin is pressed. The sheet is spread and pasted on the plate-like workpiece, and then the sheet and the resin are cut along the outer peripheral edge of the plate-like workpiece.

  When cutting the sheet and resin, cut the position as close as possible to the outer periphery of the plate-shaped workpiece, and reduce the protruding portion of the sheet and resin from the plate-shaped workpiece so that the sheet and resin adhere to the plate-shaped workpiece. A plate-like work set constituted by being attached can be stored in a cassette.

  Then, the cassette in which a plurality of plate-like work sets are stored is conveyed to a grinding apparatus, and the plate-like work sets are taken out one by one from the cassette and are ground.

JP 2009-148866 A

  However, for each plate-shaped workpiece set stored in the cassette, it is necessary to peel off the resin after grinding the plate-shaped workpiece. However, if there are few protruding portions of the sheet and resin from the outer peripheral edge of the plate-shaped workpiece, There is a problem that it is difficult to peel the sheet and the resin from the workpiece.

  The present invention has been considered in view of such problems, and in a plate-like work set in which a sheet is attached to a plate-like workpiece via a liquid resin, the plate-like work set can be stored in a cassette, It is an object of the present invention to make it possible to easily peel a sheet and a resin from a workpiece.

  The present invention holds a sheet on a holding table, supplies a liquid resin to the upper surface of the sheet, presses the liquid resin with a pressing portion that holds the plate-like workpiece, and then cures the liquid resin and attaches it to the plate-like workpiece. It relates to a pasting method, a sheet supplying step for supplying a sheet to a holding table, a resin supplying step for sucking and holding the sheet to the holding table and supplying a liquid resin from above the sheet, and a plate-like workpiece above the holding table. The suction part that is held by suction is lowered toward the holding table, presses the liquid resin supplied in the resin supply process, and presses the liquid resin on the sheet on the holding table and the resin spreading process. The workpiece liquid is formed by irradiating light to the spread liquid resin to cure the liquid resin, and bonding the sheet and the plate-shaped workpiece together with the resin to form a plate-shaped workpiece set. And cutting the sheet and the resin along the outer periphery of the plate-like work constituting the plate-like work set, and cutting so that a part of the sheet and the resin protrudes from the outer periphery of the plate-like work. And a cutting step for forming the part.

  In the present invention, in the process of forming the plate-shaped workpiece set, a part of the sheet and the resin is cut so as to protrude from the outer periphery of the plate-shaped workpiece to form a knob portion. After that, the sheet and the resin can be easily peeled from the plate-like workpiece by gripping the knob portion. Moreover, since the part which the knob part has protruded from the plate-shaped workpiece | work is a part and is very few, a plate-shaped workpiece set can be smoothly accommodated in a cassette.

It is a perspective view which shows an example of a resin coating apparatus. It is a front view which shows an example of a plate-shaped work set. It is a top view which shows the 1st example of the holding table with which the sheet sticking part of the resin coating apparatus was equipped. It is a front view which shows the structure of a sheet sticking part. It is sectional drawing which shows schematically the procedure which sticks a plate-shaped workpiece | work to a sheet | seat via resin. It is a top view which shows the 1st example of the plate-shaped work set before a cutting | disconnection. It is a top view which shows the 1st example of the plate-shaped work set formed by the cutting | disconnection of a sheet | seat and resin. It is a top view which shows the 2nd example of the holding table with which the sheet sticking part of the resin coating apparatus was equipped. It is a top view which shows the 2nd example of the plate-shaped work set before a cutting | disconnection. It is a top view which shows the 2nd example of the plate-shaped work set formed by the cutting | disconnection of a sheet | seat and resin.

  As shown in FIG. 2, the resin coating apparatus 1 shown in FIG. 1 applies a liquid resin R to a plate-like workpiece W and attaches a sheet S to the liquid resin R to cure the liquid resin R. It is an apparatus for forming a plate-like work set WS in which a work W, a resin R, and a sheet S are integrated.

  When the depth direction of the resin coating apparatus 1 shown in FIG. 1 is the X-axis direction, the width direction is the Y-axis direction, and the height direction is the Z-axis direction, a rack-like shape is formed at the rear end of the resin coating apparatus 1 in the X-axis direction. A cassette housing portion 2 is provided. The cassette housing portion 2 accommodates a cassette 2a in which a plate-like workpiece W before application of resin is accommodated, and a plate-like workpiece set configured by applying a resin to the plate-like workpiece W and adhering a sheet. Cassette 2b.

  A loading / unloading robot 3 for unloading the plate-like workpiece W from the cassette 2a and loading the plate-like workpiece set into the cassette 2b is disposed in front of the cassette housing portion 2 in the X-axis direction. The carry-in / out robot 3 includes a holding unit 30 that holds the plate-like workpiece W or the plate-like workpiece set WS, an arm unit 31 that moves the holding unit 30 to a desired position, and a drive unit 32 that drives the arm unit 31. The drive unit 32 provided is supported by a base 33. The base 33 has a nut provided therein screwed into a ball screw 34 extending in the Y-axis direction, and a lower part extending in the Y-axis direction. It is in sliding contact with the guide rail 35. The ball screw 34 is connected to a motor 36. When the ball screw 34 is driven and rotated, the ball screw 34 is guided by the guide rail 35 and the base 33 moves in the Y-axis direction. .

  In the movable range of the holding unit 30 of the carry-in / out robot 3, a workpiece detection unit 4 for imaging the plate-like workpiece W and acquiring information such as the center position, size, and shape of the plate-like workpiece W is disposed. ing. The workpiece detection unit 4 includes a temporary placement table 40 on which the workpiece W is temporarily placed, and an imaging unit 41 that images a plate-like workpiece on the temporary placement table 40. The imaging unit 41 outputs image information acquired by imaging to the control unit 10, and the control unit 10 calculates the center position and the horizontal direction of the workpiece W by analyzing the image.

  Below the workpiece detection unit 4, a cut unit 5 for cutting a sheet attached to a plate-like workpiece via a resin is disposed. The cut unit 5 includes a table 50 on which the plate-like work set WS illustrated in FIG. 2 is held, and a cutter 51 that is movable in the horizontal direction and the Z-axis direction. The holding table 50 includes a circular suction region 50a at the center. Further, a clearance groove 50b for receiving the cutting edge of the cutter 51 is formed on the outer peripheral side of the suction region 50a. The escape groove 50b is formed such that a part of the circular shape protrudes to the outer peripheral side.

  In front of the workpiece detection unit 4 and the cut unit 5 in the X-axis direction, a sheet adhering unit 6 for supplying a resin to the plate-like workpiece and adhering a sheet via the resin is disposed. Further, a sheet supply unit 7 that sends out the sheet S toward the sheet bonding unit 6 is disposed in front of the sheet bonding unit 6.

  The sheet sticking part 6 is formed in a shape having a recess 60a with a transparent or translucent material such as glass, and holds a sheet S. A resin dropping part 61 drops a liquid resin on the upper surface of the sheet S. A resin dispenser 62 for supplying a liquid resin to the resin dropping unit 61, a pressing unit 63 provided above the holding table 60, an elevating mechanism 64 for raising and lowering the pressing unit 63, and a position below the holding table 60. And a light emitting unit 65 that performs. In the illustrated example, the light emitting unit 65 is located below the holding table 60, but may be located on the side outer peripheral side of the holding table 60.

  As shown in FIG. 3, the recessed part 60a formed in the holding table 60 is formed larger than the plate-like workpiece W, and includes an extended area 60b having a shape in which a part of the arc is extended to the outer peripheral side.

  1 includes a ball screw 640 extending in the Z-axis direction, a pair of guide rails 641 arranged in parallel to the ball screw 640, a motor 642 for rotating the ball screw 640, and a ball screw 640. And an elevating plate 643 whose side part is in sliding contact with the guide rail 641. When the motor 642 rotates the ball screw 640, the elevating plate 643 is guided by the guide rail 641 and moves up and down. It has a configuration. Further, a support member 644 that supports the pressing portion 63 is connected to the lifting plate 643, and the pressing portion 63 also moves up and down as the lifting plate 643 moves up and down. The pressing portion 63 plays a role of pressing and holding the resin dropped on the holding table 60 by the resin dropping portion 61 to spread it horizontally and sucking and holding the plate-like workpiece W.

  The sheet supply unit 7 includes a roll sheet support unit 70 that supports the roll sheet RS on which the sheet S is wound, and a drawer unit 71 that pulls out the sheet S from the roll sheet RS.

  The sheet S is conveyed to the sheet sticking unit 6 by the sheet conveying unit 8. The sheet conveying unit 8 includes a holding unit 80 that holds a sheet, an arm unit 81 connected to the holding unit 80, and a drive mechanism 82 that moves the arm unit 81 in the X-axis direction.

  In front of the carry-in / out robot 3, a transport unit 9 transports the plate-like work W from the work detection unit 4 to the sheet sticking unit 6, and transports the plate-like work set WS from the sheet sticking unit 6 to the cutting unit 5. Is provided. The transport unit 9 includes a holding unit 90 that holds the plate-like workpiece W or the plate-like workpiece set WS, an arm unit 91 that moves the holding unit 90 to a desired position, and a drive unit 92 that drives the arm unit 91. The drive unit 92 is supported by a base 93. The base 93 is a guide in which a nut provided therein is screwed into a ball screw 94 extending in the Y-axis direction and a lower part extends in the X-axis direction. It is in sliding contact with the rail 95. The ball screw 94 is connected to a motor (not shown). When the ball screw 94 is driven and rotated, the ball screw 94 is guided by the guide rail 95 and the base 93 moves in the Y-axis direction. .

  As shown in FIG. 4, a pressing sensor 66 a is connected to the pressing unit 63, and the pressing sensor 66 a determines whether or not the pressed resin has spread sufficiently and notifies the control unit 10 of the determination result. be able to. And in the control part 10, the process according to the content of notification can be performed.

  The pressing portion 63 includes a holding portion 63a that sucks and holds the plate-like workpiece W. The holding portion 63a supplies air to the suction portion 67a or the holding portion 63a that applies a suction force to the holding portion 63a. It is selectively connected to the supply unit 67b. A pressure sensor 66b that detects whether or not the plate-like workpiece W is sucked and held based on the pressure value is connected to the holding unit 63a, and the detected content can be notified to the control unit 10.

  In the following, the plate-like workpiece W accommodated in the cassette accommodating portion 2 shown in FIG. 1 is coated with a resin and a sheet to form the plate-like workpiece set WS shown in FIG. 2, and the plate-like workpiece set WS is illustrated. The process until it is accommodated in the cassette 2b shown in FIG.

(1) Plate-shaped work preparation process The plate-shaped work W accommodated in the cassette accommodating part 2a is a thing before being cut out from an ingot and a device being formed, and was formed in the plate-shaped work W at the time of a cutting | disconnection. There are undulations and warping.

  The holding part 30 of the carry-in / out robot 3 holds the plate-like workpiece W and removes it from the cassette housing part 2a. Then, the removed plate-like workpiece W is placed on the temporary placement table 40 of the workpiece detection unit 4. Here, the plate-shaped workpiece W is imaged by the imaging unit 41, and the size and the center position of the plate-shaped workpiece W are recognized and stored in the control unit 10.

  Thereafter, the plate-like workpiece W is held by the holding unit 90 of the conveying unit 9 and conveyed to the sheet sticking unit 6, and is held by the holding table 60 of the pressing unit.

(2) Sheet Supply Process In the sheet supply unit 7, the sheet S is pulled out from the roll sheet RS wound around the roll sheet support unit 70 by the drawer unit 71, and the sheet S is placed on the holding table 60 of the sheet sticking unit 6. Supplied and adsorbed. At this time, as shown in FIG. 5A, the sheet S is sucked and held following the recess 60 a of the holding table 60.

(3) Resin Supplying Process Next, the resin dropping unit 61 is positioned above the sheet S, and the liquid resin R having viscosity from the resin dropping unit 61 onto the sheet S is held in the holding table 60. Is dripped. Then, as shown in FIG. 5B, a liquid reservoir is formed on the sheet S by the liquid resin R. The dripping amount of the liquid resin R is set to an amount equivalent to the volume of the recess 60 a of the holding table 60.

(4) Resin spreading step Next, as shown in FIG. 5C, the holding part 63 a holds the pressing part 63 holding the plate-like workpiece W above the sheet S held by the holding table 60. By gradually descending toward the table 60, the liquid resin R supplied onto the sheet S in the resin supply step is pressed. Then, when the value of the pressure sensor 66b shown in FIG. 4 confirms that the liquid resin R has been sufficiently spread and is notified to the control unit 10, the pressure is controlled under the control of the control unit 10. The descending of the part 63 is stopped. As a result, the liquid resin R is spread in the horizontal direction on the sheet S and has a substantially uniform thickness. At this time, as shown in FIG. 5D, the liquid resin R is filled in the recess 60a of the holding table 60 and does not protrude outside the recess 60a. Further, as shown in FIG. 3, since the extended area 60b is formed in the holding table 60, the liquid resin R also enters the extended area 60b, and the extended portion RE is formed by the resin that has entered the extended area 60b. The

(5) Workset forming step Next, as shown in FIG. 5 (e), the light emitting portion 65 is caused to emit light, the liquid resin R that has been spread out is irradiated with light, and the liquid resin R including the expansion portion RE is applied. Cured to make resin R1. Since the resin R1 formed by curing the liquid resin R bonds the sheet S and the plate-like workpiece W, a plate-like workpiece set WS0 including the sheet S, the plate-like workpiece W, and the resin R1 is formed. Here, a portion of the resin R1 where the extension portion RE is cured is referred to as an extension portion RE1.

(6) Cutting process Immediately after the work set forming process, as shown in FIG. 6, the sheet S is larger than the resin R <b> 1, so the plate-shaped work set WS <b> 0 is conveyed to the cutting unit 5, An unnecessary portion of the sheet S is removed. The plate-like workpiece set WS0 is conveyed to the cutting unit 5 by the conveyance means 9.

  In the cut part 5, the plate-like work set WS0 is held on the table 50 shown in FIG. Then, by cutting the cutter 51 along the outer periphery of the plate-like workpiece W, the sheet S and the resin R1 are cut. The cutter 51 is moved along the escape groove 50b, leaving the extended portion RE1 as it is, and cutting around the extended portion RE1. Then, as shown in FIG. 7, the plate-like work set WS in which the sheet S and the extended portion RE1 which is a part of the resin R1 protrude from the outer periphery of the plate-like work W to the outer peripheral side is formed. It becomes.

  The plate-like workpiece set WS in which the knob portion 100 is formed in this way is subjected to processing such as grinding later, and then grips the knob portion 100 to easily remove the sheet S and the resin R1 from the plate-like workpiece W. Can be peeled off.

  Finally, the plate-like work set WS formed in the cut unit 5 is held and conveyed by the carry-in / out robot 3 and is accommodated in the cassette 2b. At this time, the plate-like workpiece set WS is formed with the knob portion 100, but the knob portion 100 protrudes from the plate-like workpiece W, and the portion thereof is a part of the plate-like workpiece set WS. It can be smoothly accommodated in the cassette 2b.

  In the above embodiment, as shown in FIG. 3, an extended area 60 b having a shape corresponding to the protruding portion 100 is formed in advance on the holding table 60 of the sheet adhering portion 6. Although the portion 100 is formed, the protruding portion 100 can be formed even if the extended area 60 b is not formed on the holding table 60.

  Specifically, as shown in FIG. 8, a recess 600 a larger than the plate-like workpiece W is formed in the holding table 600. Then, as shown in FIG. 9, the resin R2 is pressed by the plate-like workpiece W so that the resin R2 protrudes in a circular shape from the plate-like workpiece W to fill the recess 600a, and the sheet S is more than the resin R2. A plate-like work set WS2 which is in a large state and is attached is formed.

  And about this plate-shaped workpiece set WS2, the sheet | seat S and resin R2 are cut | disconnected by making the cutter 51 cut along the outer periphery of the plate-shaped workpiece W. FIG. Further, the outside of the extension part RE2 is cut so that the extension part RE2 is formed. In order to cut the extension portion RE2, the cut portion guide groove 52, which is a groove for guiding the cutter 51, is formed on the table 50 of the cut portion 5 along the outer shape of the extension portion RE2. desirable.

  When the sheet S and the resin R2 are cut in this way, as shown in FIG. 10, the extended portion RE2 that is a part of the sheet S and the resin R2 protrudes beyond the outer periphery of the plate-like workpiece W. A plate-like work set WS ′ in which the tab portion 101 is formed is obtained.

  The plate-like workpiece set WS ′ shown in FIG. 10 has the same shape as that of the plate-like workpiece set WS shown in FIG. 7, and therefore the sheet S and the resin R2 can be easily removed from the plate-like workpiece W by gripping the knob portion 100. Can be peeled off and can be smoothly accommodated in the cassette 2b.

1: Resin coating apparatus W: Plate-shaped workpiece WS, WS ′: Plate-shaped workpiece set S: Sheet R: Liquid resin R1, R2: Resin 100, 101: Knob portion 2: Cassette housing portion 2a: Cassette 2b: Cassette 3: Carry-in / out robot 30: Holding unit 31: Arm unit 32: Drive unit 33: Base 34: Ball screw 35: Guide rail 36: Motor 4: Work detection unit 40: Temporary placement table 41: Imaging unit 5: Cut unit 50: Table 50a: Suction area 50b: Escape groove 51: Cutter 6: Sheet sticking part 60: Holding table 60a: Recessed part 60b: Expansion area 61: Resin dripping part 62: Resin dispenser 63: Pressing part 63a: Holding part 64: Lifting mechanism 640: Ball screw 641: Guide rail 642: Motor 643: Elevating plate 644: Support member 65: Light emitting part 7: Seed G feeding section 70: roll sheet supporting section 71: drawer section 8: sheet conveying section 80: holding section 81: arm section 82: driving mechanism 9: conveying means 90: holding section 91: arm section 92: driving section 93: base 94: Ball screw 95: Guide rail 10: Control unit

Claims (1)

Resin pasting method for holding a sheet on a holding table, supplying a liquid resin to the upper surface of the sheet, pressing the liquid resin with a pressing portion holding the plate-like workpiece, and then curing the liquid resin and sticking it to the plate-like workpiece Because
A sheet supply step of supplying a sheet to the holding table;
A resin supply step of sucking and holding the sheet to the holding table and supplying liquid resin from above the sheet;
A pressing portion that sucks and holds the plate-like workpiece above the holding table is lowered toward the holding table to press the liquid resin supplied in the resin supply step, and the liquid resin is supplied to the sheet on the holding table. Resin spreading process to spread,
A work set forming step of forming a plate work set by irradiating light to the liquid resin spread in the resin spreading step, curing the liquid resin, and bonding the sheet and the plate work with resin. When,
Cut the sheet and the resin along the outer periphery of the plate-like work constituting the plate-like work set, and cut the sheet and a part of the resin so that they protrude beyond the outer periphery of the plate-like work. A cutting step for forming a knob portion;
A resin pasting method comprising:

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