JP2013130417A - Warpage measuring method for glass pane and manufacturing method of glass pane - Google Patents
Warpage measuring method for glass pane and manufacturing method of glass pane Download PDFInfo
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Description
本発明は、ガラス板の反りの大きさを測定する技術の改良に関する。 The present invention relates to an improvement in a technique for measuring the magnitude of warpage of a glass plate.
周知のように、近年の表示デバイスの多様化に伴って、液晶ディスプレイ、プラズマディスプレイ、フィールドエミッションディスプレイなどのフラットパネルディスプレイが普及されるに至っている。 As is well known, with the diversification of display devices in recent years, flat panel displays such as liquid crystal displays, plasma displays, and field emission displays have become widespread.
フラットパネルディスプレイは、通常、２枚のガラス基板（以下、ガラス板という。）の表面にディスプレイの種類に応じて必要な塗布材料を塗布した後、それらの２枚のガラス板を組み付けることにより製造される。このとき、ガラス板の反りが大きければ、塗布材料の塗布厚みが不均一になることから、露光を施した場合に露光ムラが生じ、絶縁不良や発光不良、画質劣化など、フラットパネルディスプレイにとって致命的な欠陥を招くことになる。このため、使用されるガラス板の反りの大きさ（以下、反り量という。）を予め正確に把握することが重要となる。特に、ガラス板が薄板化及び大型化されるに連れて、反りの態様が複雑化し易いため、その反り量の正確な把握の重要性が増すことになる。 A flat panel display is usually manufactured by applying the necessary coating material according to the type of display on the surface of two glass substrates (hereinafter referred to as glass plates) and then assembling the two glass plates. Is done. At this time, if the warp of the glass plate is large, the coating thickness of the coating material becomes non-uniform, so that exposure unevenness occurs when exposure is performed, which is fatal for flat panel displays such as insulation failure, light emission failure, image quality degradation, etc. Will result in flaws. For this reason, it is important to accurately grasp in advance the magnitude of warpage (hereinafter referred to as warpage amount) of the glass plate to be used. In particular, as the glass plate is made thinner and larger, the warp mode is likely to be complicated, and the importance of accurately grasping the warp amount increases.
ガラス板の反り量は、平らな定盤の上にガラス板を載置した状態で、ガラス板と定盤との間に隙間ゲージを挿入して測定するのが一般的である（例えば、特許文献１参照）。ここで、上記の塗布材料の塗布や露光などの工程は、ガラス板を定盤の上に載置して実施することから、ガラス板の反りも同様に定盤の上で評価されるのが通例である。 The amount of warpage of a glass plate is generally measured by inserting a gap gauge between the glass plate and the surface plate with the glass plate placed on a flat surface plate (for example, patents). Reference 1). Here, since the steps such as application of the coating material and exposure are performed by placing the glass plate on the surface plate, the warpage of the glass plate is similarly evaluated on the surface plate. It is customary.
しかしながら、ガラス板の反り量を隙間ゲージで測定する場合、ガラス板の外周部の反り量を測定することはできるものの、ガラス板の中央部の反り量を測定することは極めて困難である。このため、ガラス板全体の反り量を把握できないという問題がある。 However, when the amount of warpage of the glass plate is measured with a gap gauge, the amount of warpage of the outer peripheral portion of the glass plate can be measured, but it is extremely difficult to measure the amount of warpage of the central portion of the glass plate. For this reason, there exists a problem that the curvature amount of the whole glass plate cannot be grasped | ascertained.
また、特許文献１に開示されているように、ガラス板を小片に切断して、ガラス板の中央部等に対応する反り量を測定することも考えられるが、ガラス板を小片に切断するという破壊を必然的に伴ってしまう。 Further, as disclosed in Patent Document 1, it is conceivable to cut the glass plate into small pieces and measure the amount of warpage corresponding to the central portion of the glass plate, but the glass plate is cut into small pieces. Inevitable destruction.
本発明は、上記実情に鑑み、ガラス板の反り量を非破壊で緻密に測定することを技術的課題とする。 In view of the above circumstances, an object of the present invention is to precisely measure the amount of warpage of a glass plate in a non-destructive manner.
上記課題を解決するために創案された本発明は、基準面上に位置するガラス板の反り量を測定するガラス板の反り量測定方法において、前記ガラス板の表面側から光を照射し、分光干渉法を用いて、前記ガラス板の裏面で反射した干渉光と前記基準面で反射した干渉光との光路差を求め、前記ガラス板の裏面と前記基準面との間の空気層の厚みを測定することに特徴づけられる。 In order to solve the above problems, the present invention provides a method for measuring the amount of warpage of a glass plate that measures the amount of warpage of a glass plate located on a reference plane. Using an interference method, the optical path difference between the interference light reflected on the back surface of the glass plate and the interference light reflected on the reference surface is obtained, and the thickness of the air layer between the back surface of the glass plate and the reference surface is determined. Characterized by measuring.
すなわち、ガラス板の表面側から光を照射させると、その照射光によって、ガラス板の表面、ガラス板の裏面、および基準面でそれぞれ反射した干渉光が生じる。そして、ガラス板に反りが生じている場合には、ガラス板の裏面が、基準面から浮いた状態でガラス板と基準面との間の空気層が形成されていることから、ガラス板の裏面で反射した干渉光と、基準面で反射した干渉光との光路差が生じる。そして、分光干渉法を用いれば、この光路差を正確に測定し、反り量に対応した空気層の厚みを精度よく測定できる。したがって、ガラス板の反り量を緻密に把握することができる。また、このような光を利用した測定方法の場合、ガラス板の反り量を非接触且つ非破壊で測定することも可能となる。なお、このようなガラス板の反り量測定方法は、ガラス板の製造ラインなどのオンラインで実行してもよいし、オフラインで実行してもよい。 That is, when light is irradiated from the surface side of the glass plate, interference light reflected by the surface of the glass plate, the back surface of the glass plate, and the reference surface is generated by the irradiated light. And when the glass plate is warped, an air layer is formed between the glass plate and the reference surface with the back surface of the glass plate floating from the reference surface. An optical path difference occurs between the interference light reflected by the interference light and the interference light reflected by the reference surface. If the spectral interference method is used, the optical path difference can be accurately measured, and the thickness of the air layer corresponding to the warp amount can be accurately measured. Therefore, the amount of warpage of the glass plate can be grasped precisely. Moreover, in the case of the measuring method using such light, it becomes possible to measure the curvature amount of the glass plate in a non-contact and non-destructive manner. Such a method for measuring the amount of warpage of a glass plate may be executed online such as a glass plate production line, or may be executed offline.
上記の方法において、分光干渉法を用いて、前記ガラス板の表面で反射した干渉光と前記ガラス板の裏面で反射した干渉光との光路差を求め、前記ガラス板の厚みを更に測定するようにしてもよい。 In the above method, using spectral interferometry, an optical path difference between the interference light reflected on the surface of the glass plate and the interference light reflected on the back surface of the glass plate is obtained, and the thickness of the glass plate is further measured. It may be.
このようにすれば、ガラス板の反り量と同時に、ガラス板の厚みも正確に把握することができる。 If it does in this way, the thickness of a glass plate can be correctly grasped | ascertained simultaneously with the curvature amount of a glass plate.
上記の方法において、前記光を前記ガラス板の平面内で走査し、前記ガラス板の平面内の反り量を測定することが好ましい。 Said method WHEREIN: It is preferable to scan the said light in the plane of the said glass plate, and to measure the curvature amount in the plane of the said glass plate.
このようにすれば、ガラス板の反り量の分布を把握することができる。 If it does in this way, distribution of the amount of curvature of a glass plate can be grasped.
上記の方法において、前記ガラス板の厚みが、６００μｍ以下であることが好ましい。更には、前記ガラス板の一辺の大きさが、４００ｍｍ以上であることが好ましい。 In said method, it is preferable that the thickness of the said glass plate is 600 micrometers or less. Furthermore, it is preferable that the size of one side of the glass plate is 400 mm or more.
このような薄板ガラス、特に大型の薄板ガラスの場合、さまざまな反りが複雑な態様で顕在化し得るため、本願発明の反り量の測定方法の利点を最大限発揮することができる。 In the case of such a thin glass, particularly a large-sized thin glass, various warpages can be manifested in a complicated manner, so that the advantages of the method for measuring the warpage amount of the present invention can be maximized.
上記の方法において、前記光は、近赤外線領域の波長を有することが好ましい。 In the above method, the light preferably has a wavelength in the near infrared region.
また、上記のガラス板の反り量測定方法は、ガラス板の製造工程の中の一工程として実行してもよい。 Moreover, you may perform the curvature amount measuring method of said glass plate as 1 process in the manufacturing process of a glass plate.
以上のように本発明によれば、ガラス板の反り量を、非破壊で緻密に測定することができる。 As described above, according to the present invention, the amount of warpage of a glass plate can be accurately measured nondestructively.
以下、本発明の実施形態を添付図面を参照して説明する。 Embodiments of the present invention will be described below with reference to the accompanying drawings.
図１は、本発明の一実施形態に係るガラス板の反り量測定方法を説明するための図である。なお、図中において、ガラス板１の反りは誇張されている。 FIG. 1 is a view for explaining a method for measuring the amount of warpage of a glass plate according to an embodiment of the present invention. In the figure, the warp of the glass plate 1 is exaggerated.
この反り量測定方法には、ガラス板１を平置き姿勢で載置する定盤２と、多層膜厚測定装置３とが用いられる。測定対象のガラス板１としては、例えば、一辺が４００ｍｍ以上で、厚みが６００μｍ以下（好ましくは３０〜３００μｍ、より好ましくは５０〜２００μｍ）のフラットパネルディスプレイ用のガラス基板が挙げられる。ガラス板１は、例えば、オーバーフローダウンドロー法、スロットダウンドロー法、リドロー法などのダウンドロー法や、フロート法によって成形される。特に、オーバーフローダウンドロー法でガラス板を成形すると、板厚が小さいガラス板を作製しやすくなる。そして、ガラス板の板厚が小さいほど、反りの態様が複雑化することから、隙間ゲージを用いるなどの従来型の反り量の測定は困難となり、本発明の効果が大きくなる。 In this warpage amount measuring method, a surface plate 2 on which the glass plate 1 is placed in a flat position and a multilayer film thickness measuring device 3 are used. Examples of the glass plate 1 to be measured include a glass substrate for flat panel display having a side of 400 mm or more and a thickness of 600 μm or less (preferably 30 to 300 μm, more preferably 50 to 200 μm). The glass plate 1 is formed by, for example, a down draw method such as an overflow down draw method, a slot down draw method, a redraw method, or a float method. In particular, when a glass plate is formed by the overflow downdraw method, it becomes easy to produce a glass plate having a small plate thickness. And as the plate thickness of the glass plate is smaller, the aspect of warpage becomes more complicated, so that it is difficult to measure the amount of warpage of the conventional type such as using a gap gauge, and the effect of the present invention is increased.
定盤２は、例えば金属製であって、反り量の基準面となるガラス載置面（上面）２ａが水平をなす。 The surface plate 2 is made of, for example, metal, and a glass placing surface (upper surface) 2a serving as a reference surface for the amount of warpage is horizontal.
多層膜厚測定装置３は、光の分光干渉を利用して膜厚を測定するものであって、例えば、近赤外線の波長領域の光が使用される。このような分光干渉式の多層膜厚測定装置３としては、例えば、Ｌｕｍｅｔｒｉｃｓ社製のＯｐｔｉＧａｕｇｅ ＤＩ−３４０を改良したものを用いることができる。 The multilayer film thickness measuring apparatus 3 measures the film thickness using light spectral interference, and for example, light in the near infrared wavelength region is used. As such a spectral interference type multilayer film thickness measuring apparatus 3, for example, an improved version of OptiGauge DI-340 manufactured by Lumetrics can be used.
そして、ガラス板１に反りが生じている場合に、ガラス板１の裏面１ｂと定盤２のガラス載置面２ａとの間に形成される空気層４を１つの膜とみなし、多層膜厚測定装置３によって、この空気層４の厚みを測定する。ガラス板１の反り量は、一般に定盤２からの垂直離間距離で定義されるので、測定された空気層４の厚みが反り量に対応することになる。 And when the curvature has arisen in the glass plate 1, the air layer 4 formed between the back surface 1b of the glass plate 1 and the glass mounting surface 2a of the surface plate 2 is regarded as one film | membrane, and multilayer film thickness The thickness of the air layer 4 is measured by the measuring device 3. Since the warpage amount of the glass plate 1 is generally defined by the vertical separation distance from the surface plate 2, the measured thickness of the air layer 4 corresponds to the warpage amount.
詳細には、図２に示すように、多層膜厚測定装置３からの光の照射位置に反りが生じている場合には、３つの干渉光Ｌ１〜Ｌ３が生じる。すなわち、ガラス板１の表面１ａで反射した第１の干渉光Ｌ１と、ガラス板１の裏面１ｂで反射した第２の干渉光Ｌ２と、定盤２のガラス載置面２ａで反射した第３の干渉光Ｌ３が生じる。このうち、第２の干渉光Ｌ２と、第３の干渉光Ｌ３との光路差（空気層４の屈折率をｎ1，空気層４の厚みをｄ1とすれば、２ｎ1ｄ1）は、空気層４の厚みに対応していることから、この光路差を分光干渉法により求めれば、ガラス板１の反り量を測定することができる。 Specifically, as shown in FIG. 2, when the light irradiation position from the multilayer film thickness measuring device 3 is warped, three interference lights L1 to L3 are generated. That is, the first interference light L1 reflected by the front surface 1a of the glass plate 1, the second interference light L2 reflected by the back surface 1b of the glass plate 1, and the third reflection reflected by the glass placement surface 2a of the surface plate 2. Interference light L3 is generated. Among them, a second interference light L2, the optical path difference between the third interference light L3 (n 1 the refractive index of the air layer 4, if the thickness of the air layer 4 and d 1, 2n 1 d 1) is Since this corresponds to the thickness of the air layer 4, the amount of warpage of the glass plate 1 can be measured if this optical path difference is obtained by spectral interference.
また、第１の干渉光Ｌ１と、第２の干渉光Ｌ２との光路差（ガラス板１の屈折率ｎ2，ガラス板１の厚みをｄ2とすれば、２ｎ2ｄ2）は、前記反り量を測定した位置におけるガラス板１の厚みに対応していることから、この光路差を分光干渉法により求めれば、ガラス板１の反り量と同時に厚みを測定することも可能となる。 Further, the first interference light L1, the optical path difference between the second interference light L2 (refractive index n 2 of the glass plate 1, if the thickness of the glass plate 1 and d 2, 2n 2 d 2), the Since it corresponds to the thickness of the glass plate 1 at the position where the amount of warpage is measured, the thickness can be measured simultaneously with the amount of warpage of the glass plate 1 if this optical path difference is obtained by spectral interference method.
なお、このような一連の測定に際し、空気層４の屈折率ｎ1と、ガラス板１の屈折率ｎ2は、多層膜厚測定装置３に予め付与するものとする。 Incidentally, when such a series of measurements, the refractive index n 1 of the air layer 4, the refractive index n 2 of the glass plate 1 is assumed to be previously assigned to the multilayer film thickness measuring device 3.
また、この実施形態では、多層膜厚測定装置３は、図示しないリニアガイドに支持されており、図３に示すように、ガラス板１の直交する二辺に沿うＸ軸方向と、Ｙ軸方向にそれぞれ移動可能になっている。そして、定盤２上にガラス板１を静止させた状態で、多層膜厚測定装置３から照射される光をガラス板１に対して走査し、ガラス板１の平面内の反り量を測定するようになっている。なお、図例のように、Ｙ軸方向に延びる複数の平行線に沿って光を走査する場合には、走査線ＬのＸ方向の間隔Ｄは、５０ｍｍ以下に設定することが好ましい。また、測定分解能は、１μｍ程度とすることが好ましい。 Moreover, in this embodiment, the multilayer film thickness measuring apparatus 3 is supported by a linear guide (not shown), and as shown in FIG. 3, the X-axis direction and the Y-axis direction along two orthogonal sides of the glass plate 1. Each can be moved. And in the state which made the glass plate 1 stationary on the surface plate 2, the light irradiated from the multilayer film thickness measuring apparatus 3 is scanned with respect to the glass plate 1, and the curvature amount in the plane of the glass plate 1 is measured. It is like that. As shown in the figure, when scanning light along a plurality of parallel lines extending in the Y-axis direction, the interval D in the X direction of the scanning lines L is preferably set to 50 mm or less. The measurement resolution is preferably about 1 μm.
そして、このようにガラス板１の平面内の反り量を測定し、その測定データをマッピングすれば、図４に示すように、ガラス板１の反り量を３次元的に把握することも可能となる。この際、３次元データは、最小二乗法や、スプライン関数などの補完処理を施したデータを用いてもよい。 If the amount of warpage in the plane of the glass plate 1 is measured and the measurement data is mapped in this way, the amount of warpage of the glass plate 1 can be grasped three-dimensionally as shown in FIG. Become. At this time, the three-dimensional data may be data that has been subjected to a complementary process such as a least square method or a spline function.
また、以上の反り量測定方法を、ガラス板１の製造工程に組み込んでガラス板を製造する場合には、製造ラインのオンライン上で実行してもよいし、オフライン上で実行してもよい。そして、例えば、反り量測定工程でガラス板１の反り量が適正範囲内にあると判断された場合には、そのまま製造を継続し、適正範囲外であると判断された場合には、ガラス板１の製造条件を変更する。ここで、製造条件の変更としては、オーバーフローダウンドロー法などによりガラス板１を成形する場合には、成形ゾーンや徐冷ゾーンにおけるガラスリボンの幅方向及び表裏面の温度分布や、ガラスリボンの流下速度の変更などが挙げられる。より具体的には、例えば、測定結果により、反り量が不適切な箇所に対応したガラスリボンの温度勾配が小さくなるように、徐冷ゾーン内の温度分布を微調整する。 Moreover, when manufacturing the glass plate by incorporating the above-described warpage amount measuring method into the manufacturing process of the glass plate 1, it may be executed on-line on the production line or off-line. And, for example, if it is determined that the warpage amount of the glass plate 1 is within the appropriate range in the warpage amount measurement step, the production is continued as it is, and if it is determined that it is outside the appropriate range, the glass plate 1 1. Change manufacturing conditions. Here, as a change of manufacturing conditions, when the glass plate 1 is formed by an overflow down draw method or the like, the temperature distribution of the glass ribbon in the forming zone or the slow cooling zone, the temperature distribution of the front and back surfaces, and the flow down of the glass ribbon For example, speed change. More specifically, for example, the temperature distribution in the slow cooling zone is finely adjusted based on the measurement result so that the temperature gradient of the glass ribbon corresponding to the location where the warp amount is inappropriate is small.
なお、本発明は、上記の実施形態に限定されるものではなく、種々の形態で実施することができる。例えば、上記の実施形態では、ガラス板１を定盤２上に静止させた状態で、多層膜厚測定装置３をガラス板１に対して移動させて光を走査する場合を説明したが、多層膜厚測定装置３を静止させた状態で、ガラス板１をコンベアベルトなどの移動台上に載せて移動させてもよいし、ガラス板１と多層膜厚測定装置３の双方を移動させてもよい。すなわち、ガラス板１と多層膜厚測定装置３との間に相対的に移動があればよい。 In addition, this invention is not limited to said embodiment, It can implement with a various form. For example, in the above embodiment, the case where the multi-layer film thickness measuring device 3 is moved with respect to the glass plate 1 and light is scanned while the glass plate 1 is stationary on the surface plate 2 has been described. While the film thickness measuring device 3 is stationary, the glass plate 1 may be moved on a moving table such as a conveyor belt, or both the glass plate 1 and the multilayer film thickness measuring device 3 may be moved. Good. In other words, it is sufficient that there is a relative movement between the glass plate 1 and the multilayer film thickness measuring device 3.
また、上記の実施形態では、矩形状に切断されたガラス板１を測定対象として説明したが、例えば、ガラス板１をオーバーフローダウンドロー法で成形する場合には、成形体に連続するガラスリボンを測定対象のガラス板としてもよい。この場合、ガラスリボンの反り量の測定は、徐冷ゾーン（アニールゾーン）後であることが好ましい。 Moreover, in said embodiment, although the glass plate 1 cut | disconnected in the rectangular shape was demonstrated as a measuring object, for example, when shape | molding the glass plate 1 with the overflow down draw method, the glass ribbon continuous with a molded object is used. It is good also as a glass plate of a measuring object. In this case, the measurement of the warp amount of the glass ribbon is preferably after the slow cooling zone (annealing zone).
また、ガラス板１の表面や裏面に異物が付着していると、反り量の測定に誤差が生じ得る。このため、ガラス板１の反り量の測定は、クリーンルーム内等の清浄な雰囲気下で行ったり、洗浄工程後に行うことが好ましい。 In addition, if foreign matter adheres to the front or back surface of the glass plate 1, an error may occur in the measurement of the amount of warpage. For this reason, it is preferable to measure the curvature amount of the glass plate 1 in a clean atmosphere such as in a clean room or after the cleaning step.
また、床の振動などの外的要因や装置と床の共振作用で、測定データに悪影響を及ぼすおそれがあるので、パッシブ型またはアクティブ型の除震台の上に装置を設定するようにしてもよい。 In addition, external factors such as floor vibration and resonance between the device and the floor may adversely affect the measurement data. Therefore, the device may be set on a passive or active vibration isolation table. Good.
また、上記の実施形態では、ガラス板１の一方の面を下方にしたときの反り量を測定する場合を説明したが、ガラス板１の一方の面を下方にしたときの反り量と、他方の面を下方にしたときの反り量をそれぞれ測定するようにしてもよい。 Moreover, in said embodiment, although the case where the curvature amount when one surface of the glass plate 1 was made downward was measured was demonstrated, the curvature amount when the one surface of the glass plate 1 was made downward, and the other You may make it measure the amount of curvature when the surface of this is made downward, respectively.
１ ガラス板
２ 定盤
３ 多層膜厚測定装置
４ 空気層
1 Glass plate 2 Surface plate 3 Multilayer film thickness measuring device 4 Air layer
Claims (6)
前記ガラス板の表面側から光を照射し、分光干渉法を用いて、前記ガラス板の裏面で反射した干渉光と前記基準面で反射した干渉光との光路差を求め、前記ガラス板の裏面と前記基準面との間の空気層の厚みを測定することを特徴とするガラス板の反り量測定方法。 In the method for measuring the amount of warpage of a glass plate that measures the amount of warpage of the glass plate positioned on the reference surface,
By irradiating light from the front surface side of the glass plate and using spectral interferometry, an optical path difference between the interference light reflected on the back surface of the glass plate and the interference light reflected on the reference surface is obtained, and the back surface of the glass plate A method for measuring the amount of warpage of a glass plate, comprising measuring a thickness of an air layer between the glass plate and the reference surface.
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