JP2013129544A - Ozone production and ozone dissolution device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device for producing ozone by causing discharge within a dielectric tube by the application of voltage to gas, and dissolving the ozone in a fluid.SOLUTION: A device for producing ozone by causing plasma by discharge within a dielectric tube by the application of voltage to supplied gas and dissolving the ozone in a fluid is provided, wherein the dielectric tube is disposed at the outer periphery of a Venturi tube to form an enclosed space; a source gas introduction port for supplying the source gas is provided on one side of the dielectric tube; an ozone discharge port for introducing the produced ozone into the Venturi tube is provided on the other side thereof; the interior of the enclosed space of the dielectric tube and a branch tube of the Venturi tube communicate with each other through an ozone transfer tube; the branch tube is provided with a check valve for preventing backflow of the fluid; a high-voltage electrode is placed on the outer side of the dielectric tube, and a ground electrode is disposed in the fluid within the Venturi tube or the fluid discharged from the Venturi tube.

Description

  The present invention relates to an apparatus for generating a discharge in a dielectric tube by applying a voltage to a gas to generate ozone and dissolving the ozone in a fluid.

  In recent years, in water and sewage treatment facilities, chemical factories, pharmaceutical factories, food factories, etc., sterilization of bacteria, molds and yeasts, deodorization of odorous substances such as aldehydes, sulfur compounds, nitrogen compounds, decolorization of human waste and dye waste liquids, An ozone generator is used to detoxify harmful substances such as organic solvents.

  In this technique, ozone is generally generated by a discharge-type ozonizer, mixed with water that requires treatment in a gas-liquid mixing section such as a bubbler, an ejector, or a static mixer, and brought into gas-liquid contact.

  However, in the conventional method, the distance of the gas-liquid contact part between the ozone generation part and the water to be treated is separated, and when ozone gas is transferred from the ozone generation part to the gas-liquid contact part, due to the strong oxidizing action of ozone. There is a risk of ozone leakage due to breakage of the tube, and ozone is a very unstable gas and easily decomposes into oxygen. Therefore, it is desirable to generate ozone as close to the point of use as possible.

  To solve this problem, an ozone generator using an ozone generator in which a discharge electrode and an induction electrode are provided on a cylindrical insulating base, and a flowing water passage inside the flowing water passage, the flowing water passage An ozone treatment apparatus for water comprising an ozone injector for injecting ozone obtained from an ozone generator into water flowing through the water has been proposed (for example, see Patent Document 1).

  However, in the water ozone treatment apparatus, water serving as cooling water flows inside the insulating base, and the discharge electrode provided on the outer peripheral surface of the insulating base is cooled by the water flowing through the insulating base. When the temperature is high, there is a problem that the amount of ozone generation is reduced without being cooled.

  As another method, a corona discharge electrode is provided on the outer peripheral surface of the cylindrical dielectric, an outer cylinder is provided concentrically outside the corona discharge electrode to form a sealed space, and the inner periphery of the cylindrical dielectric is also provided. An ozonizer that cools the dielectric by providing an induction electrode on the surface and circulating a cooling liquid inside the cylindrical dielectric and an ozone water production apparatus using the same have been proposed (for example, see Patent Document 2). ).

  However, in the case of the ozonizer and the ozone water production apparatus using the same, it is necessary to provide electrodes on the outer peripheral surface and inner peripheral surface of the cylindrical dielectric, and in particular, provide an electrode on the inner periphery of the narrow cylindrical meter-shaped dielectric. Is not easily manufactured, and ozone obtained by corona discharge is known to have a low concentration and a poor ozone yield.

Japanese Patent Laid-Open No. 2-157091 Japanese Patent Laid-Open No. 2-184505

  As a result of earnest research, the present inventor has provided a high voltage electrode on the outer wall of the outer tube of the double tube, arranged a ground electrode on the inner tube formed with the venturi structure, and passed the fluid into the inner tube. Then, a raw material gas (gas containing oxygen) is introduced into the gap between the inner wall of the outer tube and the outer wall of the inner tube, and a voltage is applied between the electrodes to generate a barrier discharge, thereby generating ozone. It is introduced into the constriction of the Venturi tube and immediately dissolved in the fluid. In addition, a control valve is provided in a conduit connecting the discharge part and the constriction part, and an ozone generation and ozone dissolution apparatus capable of generating high-concentration ozone by arbitrarily controlling the pressure of the discharge part has been provided. .

  In a device for generating ozone by generating a voltage in the dielectric tube by applying a voltage to the supplied raw material gas and dissolving the ozone in the fluid, the dielectric tube is disposed on the outer periphery of the venturi tube and sealed. A source gas introduction port for forming a space and supplying the source gas to one of the dielectric tubes is provided, and an ozone discharge port for introducing the generated ozone into the venturi tube is provided on the other side. The branch pipe of the venturi pipe and the branch pipe of the venturi pipe are communicated with each other by an ozone transfer pipe, and a check valve for preventing a back flow of fluid is provided in the branch pipe. The first feature is that a voltage electrode is disposed, and a ground electrode is disposed in a fluid inside the venturi tube or a fluid discharged from the venturi tube.

  In a device for generating ozone by generating a voltage in the dielectric tube by applying a voltage to the supplied raw material gas and dissolving the ozone in the fluid, the dielectric tube is disposed on the outer periphery of the venturi tube and sealed. A raw material gas introduction port for forming a space and supplying the raw material gas to one of the dielectric tubes is provided, and an ozone discharge port for introducing the generated ozone into the venturi tube is provided on the other side. The branch pipe of the venturi pipe and the branch pipe of the venturi pipe are communicated with each other by an ozone transfer pipe, and a check valve for preventing a back flow of fluid is provided in the branch pipe. A second feature is that a voltage electrode is disposed and a ground electrode is disposed on the venturi tube.

  A third feature is that the ozone transfer pipe is provided with a regulating valve for regulating the flow rate of the ozone, and a fourth feature is that the ground electrode is covered with glass.

  A fifth feature is that the dielectric tube is at least one of ceramics and glass, and a sixth feature is that the venturi tube is made of any one of ceramics, glass, resin, and metal.

  The seventh feature is that the dielectric tube and the venturi tube are made of quartz glass, and the eighth feature is that the gas-liquid ratio of the source gas to the fluid is 0.3 or less.

  A ninth feature is that the fluid in which ozone is dissolved is returned to the venturi tube again to circulate the fluid.

  According to the ozone generation and ozone dissolution apparatus according to the present invention, the following excellent effects can be obtained.

(1) The ozone generation and ozone dissolution apparatus of the present invention can be easily manufactured, can generate ozone at a high concentration, and can dissolve ozone into a fluid with high efficiency.
(2) Since the fluid is close to the discharge part and the gas such as ozone generated in the discharge part immediately acts on the fluid, not only ozone but also radicals generated by the discharge can be used.
(3) When the generated ozone is introduced into the venturi tube, the ozone bubbles are crushed so that active species such as OH radicals can be generated, and a compound that cannot be oxidatively decomposed by ozone can be decomposed.
(4) By adjusting the control valve provided in the branch pipe of the venturi pipe, the pressure of the discharge part can be manipulated, high-concentration ozone can be generated, and the ozone concentration can be adjusted.
(5) By controlling the gas-liquid ratio of the gas and fluid introduced into the dielectric tube, ozone water having a target concentration can be easily produced.

It is a flowchart of the experimental apparatus in 1st and 2nd embodiment of this invention. It is the figure which showed the ozone production | generation and ozone dissolution apparatus of 1st embodiment of this invention. It is the figure which showed another ozone production | generation and ozone dissolution apparatus of 1st embodiment of this invention. It is the figure which showed the ozone production | generation and ozone dissolution apparatus of 2nd embodiment of this invention. It is the graph which showed transition of the production | generation ozone concentration for every voltage application time in Example 1 and Example 3 to Example 7 of this invention. It is the graph which showed transition of the dissolved ozone concentration for every voltage application time in Example 1 and Example 3 to Example 7 of this invention. It is the graph which showed transition of the integrated production amount of the production | generation ozone for every processing time in Example 2 and Comparative Example 1. FIG. It is the graph which showed transition of the methylene blue removal amount for every processing time in Example 2 and Comparative Example 1. It is a flowchart of the experimental apparatus in 3rd embodiment of this invention. It is the graph which showed the relationship between the gas-liquid ratio and the dissolution efficiency of ozone in Example 8 to Example 9 and Comparative Example 2 of the present invention. It is the graph which showed the electrode temperature in Example 10 and Comparative Example 3 of this invention. It is the graph which showed the power consumption in Example 10 and Comparative Example 3 of this invention.

(Embodiment 1)
Hereinafter, the first embodiment of the present invention will be described with reference to FIGS. 2 and 3, but it goes without saying that the present invention is not limited to the present embodiment.

  In FIG. 2, the ozone generating and ozone dissolving apparatus of the present invention includes a dielectric tube 1, a venturi tube 2, a high voltage electrode 3, a ground electrode 4, a power source 5, a raw material gas inlet 6, an ozone outlet 7, a branch pipe 8, and ozone. It consists of a transfer pipe 9, a check valve 10 and a control valve 11.

  The dielectric tube 1 has a substantially cylindrical shape made of glass. The dielectric tube 1 may have a quadrilateral, rhombus, or polygonal cross section, but a circular shape is desirable for ease of disposition of the high voltage electrode 3, adjustment of the gap with the venturi tube 2 and ease of manufacture.

  The venturi tube 2 is on the same circle center of the dielectric tube 1, and a part of the venturi tube 2 is a constricted portion like a normal venturi tube. The Venturi tube 2 may have a quadrilateral, rhombus, or polygonal cross section. However, since the Venturi tube 2 functions as a dielectric, it has the same shape as the dielectric tube 1 so that the gap with the dielectric tube 1 is uniform. Is desirable.

  The venturi tube 2 has a sealed structure depending on the dielectric tube 1. The dielectric tube 1 has a raw material gas inlet 6 for introducing a raw material gas on one side and an ozone discharge port for discharging generated ozone on the other side. An outlet 7 is provided.

  The fluid introduced into the venturi tube 2 may be pressurized and supplied by a height difference or a pump, and the fluid is a liquid or a gas containing a liquid such as vapor.

  The gap formed by the dielectric tube 1 and the venturi tube 2 is connected to the branch tube 8 protruding from the narrowed portion of the venturi tube 2 via the ozone transfer tube 9, and when the fluid passes through the venturi tube 2, the venturi tube A strong negative pressure is generated in the constricted portion 2 and ozone generated in the gap between the dielectric tube 1 and the venturi tube 2 is sucked.

  The high voltage electrode 3 is disposed outside the dielectric tube 1 and connected to the power source 5. The material and shape of the electrode are not particularly limited, but preferably the dielectric tube 1 has a jacket structure so that the electrode does not deteriorate, electrolytic water is sealed inside, and a stainless steel wire is inserted inside to connect the power source 5. The

  The ground electrode 4 may be provided with an electrode rod at the center of the venturi tube 2, and fluid flows through the venturi tube 2, so that the inside of the venturi tube 2 serves as a ground. Further, as shown in FIG. 3, the ground electrode 4 may be disposed in the water discharged from the venturi tube 2.

  The ozone transfer pipe 9 is provided with a check valve 10 so that the fluid passing through the inside of the venturi pipe 2 does not flow backward, and further a control valve 11 is provided so that the flow rate of ozone and the pressure of the discharge part can be adjusted. . The speed of the fluid can be arbitrarily determined, and it is preferable to set the flow rate according to the purpose of the fluid to be processed based on the discharge frequency calculated from the frequency of the power source to be used. In order to dissolve the gas such as ozone generated by the discharge in the fluid, the ratio of the amount of the fluid and the gas is preferably 0.3 or less.

  The material of the dielectric tube 1 is preferably ceramic or glass having plasma resistance, heat resistance and ozone resistance, preferably quartz glass having a low dielectric constant.

  The material of the venturi tube 2 can be arbitrarily selected, but ceramic, glass, resin, and metal excellent in ozone resistance and durability are preferable, and quartz glass is preferable.

  The material of the ground electrode 4 may be selected from metals such as copper and stainless steel according to the properties of the fluid. However, if it is difficult to elute the metal components, such as when cleaning electronic parts, the ground electrode 4 is insulated. The compound may be coated, and quartz glass having a low dielectric constant and less elution into the fluid is preferable.

  The introduced source gas can be pressurized and supplied by a blower, a cylinder, or the like, or can be self-supplied by using the negative pressure generated when the fluid passes through the venturi tube 2. In either case, the source gas inlet 6 Is introduced into the inside of the dielectric tube 1. The source gas 12 can be arbitrarily determined according to the purpose of the fluid to be processed. However, in order to generate active species such as ozone and OH radicals, any gas containing at least oxygen may be used.

  When the device of the present application is used for water treatment, if a compound to be removed remains in the treated water, it is resent again inside the venturi 2 of the device using a pump or the like, and the treatment is repeated. Just do it.

  When a source gas (gas containing oxygen) 12 is introduced from the source gas inlet 6 and a voltage is applied while flowing a fluid through the venturi tube 2, the dielectric tube 1 of the portion where the high voltage electrode 3 is disposed is provided. A discharge is generated circumferentially between the inner wall and the outer wall of the venturi tube 2, oxygen in the raw material gas 12 that has passed through the discharge part is excited, ozone is generated, and the generated ozone is generated in the ozone discharge port 7 and the ozone. It is introduced into the narrow portion of the venturi tube 2 through the transfer tube 9 and immediately dissolved in the fluid. At this time, if the ratio of the flow rate of the raw material gas 12 and the fluid (gas-liquid ratio) is reduced, a strong negative pressure is generated, so that ozone is crushed during gas-liquid mixing, and OH radicals can be generated.

(Embodiment 2)
Next, although 2nd embodiment in this invention is described based on FIG. 4, it cannot be overemphasized that this invention is not limited to this embodiment.

  Since the configuration of the apparatus is the same as that of the first embodiment except for the position of the ground electrode, description thereof is omitted.

  The ground electrode 4 may be outside or inside the venturi tube 2. As shown in FIG. 4, the venturi tube 2 has a jacket structure, and electrolytic water is sealed inside, and a stainless steel wire is inserted inside to connect the power source. In this case, the high voltage electrode 3 of the dielectric tube 1 and the ground electrode 4 of the venturi tube 2 can be interchanged.

  When the venturi tube 2 is made of metal, the venturi tube 2 itself serves as the ground electrode 4.

(Embodiment 3)
Next, although 3rd embodiment in this invention is described based on FIG. 9, it cannot be overemphasized that this invention is not limited to this embodiment.

  Since the configuration of the apparatus is the same as that of the first embodiment, description thereof is omitted.

  As shown in FIG. 9, the fluid passing through the device of the present application is passed without being circulated.

  In the present invention, using the above-described embodiment, photography during discharge and tests of exhaust ozone concentration and dissolved ozone concentration were performed. The measurement method of the test is shown below.

(1) Measurement of generated ozone concentration Gas phase ozone concentration meter: OZ-3O manufactured by TOA DK Corporation
An ozone concentration sensor was inserted into the upper part of the water receiving tank, and measurement was performed using a gas phase ozone concentration meter.
(2) Measurement of dissolved ozone concentration Dissolved ozone concentration meter: OZ-2O manufactured by TOA DK Corporation
A dissolved ozone concentration sensor was put into the circulation tank and measured.

[Example 1]
FIG. 1 shows a flowchart of the experimental apparatus. The experimental device consists of an ozone generator and ozone dissolver and a water receiving tank (15L) that receives treated water discharged from the ozone generator and ozone dissolver, and can be circulated from the circulation tank to the ozone generator and ozone dissolver. As shown in the figure, a pump was arranged and piped, and an ozone concentration sensor was installed in the upper part of the water surface and a dissolved ozone concentration sensor was installed in the lower part of the surface of the water receiving tank. In addition, the gas inlet of the ozone generating and ozone dissolving apparatus and an oxygen cylinder were connected by a tube.
FIG. 2 shows an ozone generation and ozone dissolution apparatus. The dielectric tube and the venturi tube of the ozone generating and ozone dissolving apparatus main body are made of quartz glass, and the primary side from the narrowed portion of the venturi tube is a double tube. Tap water is allowed to pass through the Venturi tube (inner diameter 12 mm, outer diameter 14 mm, water passage diameter 5 mm), and the gap (1 mm) between the dielectric tube (inner diameter 16 mm, outer diameter 18 mm) and the venturi tube is from an oxygen cylinder. Oxygen was flushed. Oxygen that passes through the gap between the Venturi tube and the dielectric tube is discharged to generate ozone in the gap between the Venturi tube and the dielectric tube, but the generated ozone is connected to the tube so that it is introduced into the constricted part of the tube inside the Venturi tube. doing. The tube is provided with a control valve so that the pressure of the discharge part can be adjusted, and a check valve is provided so that tap water passing through the venturi tube does not flow backward from the constriction part.
The dielectric tube has a jacket structure (internal 5 mm, length 100 mm), 35% sodium chloride solution is sealed inside the jacket, and a stainless steel wire is inserted to form a high voltage electrode. Connected with. On the other hand, a stainless steel ground electrode having a diameter of 2 mm is inserted into a venturi tube through which tap water passes and connected to a power source.
In the experiment, the pump was started and tap water was circulated at a flow rate of 30 L / min. A voltage was applied (12 kV, 7 kHz) while introducing oxygen from an oxygen cylinder at a flow rate of 3 L / min. The ozone water concentration was measured. As a result, as shown in FIG. 5, the generated ozone concentration 30 minutes after the start of discharge was 10500 ppm, and as shown in FIG. 6, the dissolved ozone concentration was 3.75 ppm.

[Example 2]
Except that it was added to tap water so that the methylene blue concentration was 5 mg / L, it was carried out in the same manner as in Example 1, and the time-dependent change of the accumulated ozone amount is shown in FIG. 7, and the time-dependent change of the methylene blue removal amount is shown in FIG. It was.

[Comparative Example 1]
Except that t-BuOH, which is an OH radical scavenger, was added so as to be 1 mM, it was carried out in the same manner as in Example 2. FIG. 7 shows the change over time in the total amount of ozone produced and FIG. Indicated. From this result, although the generated ozone was equivalent, the decolorization rate was lowered by the addition of t-BuOH, suggesting the generation of ozone and the generation of OH radicals by the ozone dissolution apparatus.

[Example 3]
Except that the ground electrode was disposed on the water discharged from the venturi tube, the same procedure as in Example 1 was performed to measure the amount of ozone generated and the concentration of ozone water (see FIG. 3). As a result, as shown in FIG. 5, the generated ozone concentration 30 minutes after the start of discharge was 5400 ppm, and as shown in FIG. 6, the dissolved ozone concentration was 1.57 ppm.

[Example 4]
Except that the ground electrode was disposed outside the venturi tube, the same procedure as in Example 1 was performed, and the amount of ozone generated and the concentration of ozone water were measured (see FIG. 4). As a result, as shown in FIG. 5, the generated ozone concentration 30 minutes after the start of discharge was 10850 ppm, and as shown in FIG. 6, the dissolved ozone concentration was 3.84 ppm.

[Example 5]
The amount of ozone generated and the concentration of ozone water were measured in the same manner as in Example 1 except that the ground electrode was covered with glass on a stainless steel wire and the applied voltage was (15 kV, 7 kHz). As a result, as shown in FIG. 5, the generated ozone concentration 30 minutes after the start of discharge was 9400 ppm, and as shown in FIG. 6, the dissolved ozone concentration was 3.28 ppm.

[Example 6]
Except that the control valve connected to the branch pipe of the venturi tube was adjusted so that the pressure in the gap (discharge part) between the venturi tube and the dielectric tube was 107 kPa, The ozone water concentration was measured. As a result, as shown in FIG. 5, the generated ozone concentration 30 minutes after the start of discharge was 11750 ppm, and as shown in FIG. 6, the dissolved ozone concentration was 4.15 ppm.

[Example 7]
Except that the control valve connected to the narrowed portion of the venturi tube was adjusted so that the pressure in the gap (discharge portion) between the venturi tube and the dielectric tube was 117 kPa, The ozone water concentration was measured. As a result, as shown in FIG. 5, the generated ozone concentration 30 minutes after the start of discharge was 13150 ppm, and as shown in FIG. 6, the dissolved ozone concentration was 4.68 ppm.

[Example 8]
As shown in FIG. 9, ozone water concentration was measured in the same manner as in Example 1 (gas-liquid ratio 0.1) except that tap water was continuously passed without being circulated. As a result, as shown in FIG. 10, the ozone dissolution efficiency was 57%.

[Example 9]
The ozone water concentration was measured in the same manner as in Example 8 except that the flow rate of tap water was 10 L / min (gas-liquid ratio 0.3). As a result, as shown in FIG. 10, the ozone dissolution efficiency was 23%.

[Comparative Example 2]
The ozone water concentration was measured in the same manner as in Example 8 except that the flow rate of tap water was 7.5 L / min (gas-liquid ratio 0.4). As a result, as shown in FIG. 10, the ozone dissolution efficiency was 17%.

[Example 10]
The dielectric tube 1 and the venturi tube 2 of the ozone generating and ozone dissolving device main body are made of quartz glass, and the primary side of the narrowed portion of the venturi tube 2 is a double tube. (See FIG. 4) Tap water is passed through the venturi tube 2 (inner diameter: 12 mm, outer diameter: 14 mm, water passage diameter: 5 mm) and the gap between the dielectric tube 1 (inner diameter: 19 mm, outer diameter: 21 mm) and the venturi tube 2. In (1 mm), oxygen was supplied from an oxygen cylinder. Oxygen that passes through the gap between the venturi tube 2 and the dielectric tube 1 is discharged into the gap between the venturi tube 2 and the dielectric tube 1 to become ozone, but the generated ozone goes to the narrowed portion of the inner tube of the venturi tube 2. The tube is connected so that it can be introduced. The tube is provided with a control valve 11 so that the pressure of the discharge part can be adjusted, and a check valve 12 is provided so that tap water passing through the interior of the venturi tube 2 does not flow backward from the constriction part. .

  The Venturi tube 2 and the dielectric tube 1 have a jacket structure (internal 5 mm, length 100 mm). A 35% sodium chloride solution is sealed inside the jacket, and the Venturi tube 2 is made of stainless steel inside the jacket. Are inserted into the ground electrode 4, and a stainless steel wire is inserted into the jacket of the dielectric tube 1 to form the high voltage electrode 3, each of which is connected to a power source.

  In the experiment, tap water is passed at a flow rate of 10 L / min, a voltage is applied (15 kV, 7 kHz) while oxygen is introduced from an oxygen cylinder at a flow rate of 3 L / min, and a non-contact thermometer is used. The electrode temperature was measured and the power consumption was measured. As a result, as shown in FIG. 11, the electrode temperature for 30 minutes after the start of discharge was 42.3 ° C. for the high voltage electrode and 28.1 ° C. for the ground electrode. Moreover, as shown in FIG. 12, the power consumption was 35 W.

[Comparative Example 3]
It carried out similarly to Example 10 without letting a tap water pass, and while measuring electrode temperature using the non-contact-type thermometer, power consumption was measured. As a result, as shown in FIG. 11, the electrode temperature for 30 minutes after the start of discharge was 62.3 ° C. for the high voltage electrode and 66.6 ° C. for the ground electrode. Moreover, as shown in FIG. 12, the power consumption was 38W.

DESCRIPTION OF SYMBOLS 1 ... Dielectric tube 2 ... Venturi tube 3 ... High voltage electrode 4 ... Ground electrode 5 ... Power supply 6 ... Source gas introduction port 7 ... Ozone discharge port 8 ... Branch pipe 9 ... Ozone transfer pipe 10 ... Check valve 11 ... Control valve 12 ... Raw material gas

Claims (9)

  In a device for generating ozone by generating a voltage in the dielectric tube by applying a voltage to the supplied raw material gas and dissolving the ozone in the fluid, the dielectric tube is disposed on the outer periphery of the venturi tube and sealed. A raw material gas introduction port for forming a space and supplying the raw material gas to one of the dielectric tubes is provided, and an ozone discharge port for introducing the generated ozone into the venturi tube is provided on the other side. The branch pipe of the venturi pipe and the branch pipe of the venturi pipe are communicated with each other by an ozone transfer pipe, and a check valve for preventing a back flow of fluid is provided in the branch pipe. An ozone generation and ozone dissolution apparatus characterized in that a voltage electrode is disposed, and a ground electrode is disposed in a fluid inside the venturi tube or a fluid discharged from the venturi tube.   In a device for generating ozone by generating a voltage in the dielectric tube by applying a voltage to the supplied raw material gas and dissolving the ozone in the fluid, the dielectric tube is disposed on the outer periphery of the venturi tube and sealed. A raw material gas introduction port for forming a space and supplying the raw material gas to one of the dielectric tubes is provided, and an ozone discharge port for introducing the generated ozone into the venturi tube is provided on the other side. The branch pipe of the venturi pipe and the branch pipe of the venturi pipe are communicated with each other by an ozone transfer pipe, and a check valve for preventing a back flow of fluid is provided in the branch pipe. An ozone generation and ozone dissolution apparatus characterized in that a voltage electrode is disposed and a ground electrode is disposed on the venturi tube.   The ozone generation and ozone dissolution apparatus according to claim 1 or 2, wherein the ozone transfer pipe is provided with a control valve for adjusting a flow rate of the ozone.   The ozone generation and ozone dissolution apparatus according to any one of claims 1 to 3, wherein the ground electrode is coated with glass.   The ozone generation and ozone dissolution apparatus according to any one of claims 1 to 4, wherein the dielectric tube is at least one of ceramics and glass.   The ozone generation and ozone dissolution apparatus according to any one of claims 1 to 5, wherein the venturi tube is made of any one of ceramics, glass, resin, and metal.   7. The ozone generation and ozone dissolution apparatus according to claim 1, wherein the dielectric tube and the venturi tube are made of quartz glass.   The ozone generation and ozone dissolution apparatus according to any one of claims 1 to 7, wherein an amount of the supplied source gas and the fluid is a gas-liquid ratio of 0.3 or less.   The ozone generation and ozone dissolution apparatus according to any one of claims 1 to 8, further comprising a structure in which the fluid in which ozone is dissolved is returned to the venturi pipe and the fluid is circulated.

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