TW201335061A - Ozone production and ozone dissolution device - Google Patents

Ozone production and ozone dissolution device Download PDF

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TW201335061A
TW201335061A TW101143451A TW101143451A TW201335061A TW 201335061 A TW201335061 A TW 201335061A TW 101143451 A TW101143451 A TW 101143451A TW 101143451 A TW101143451 A TW 101143451A TW 201335061 A TW201335061 A TW 201335061A
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ozone
tube
fluid
dielectric
dielectric tube
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TW101143451A
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Chinese (zh)
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Hideyuki Nakajima
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Asahi Organic Chem Ind
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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10Preparation of ozone
    • C01B13/11Preparation of ozone by electric discharge
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/72Treatment of water, waste water, or sewage by oxidation
    • C02F1/78Treatment of water, waste water, or sewage by oxidation with ozone
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00Apparatus for treatment of water, waste water or sewage
    • C02F2201/78Details relating to ozone treatment devices
    • C02F2201/782Ozone generators

Abstract

To provide a device for producing ozone by causing discharge within a dielectric tube by the application of voltage to gas, and dissolving the ozone in a fluid. A device for producing ozone by causing plasma by discharge within a dielectric tube by the application of voltage to supplied gas and dissolving the ozone in a fluid, wherein the dielectric tube is disposed at the outer periphery of a Venturi tube to form an enclosed space, a source gas introduction port for supplying the source gas is provided on one side of the dielectric tube, an ozone discharge port for introducing the produced ozone into the Venturi tube is provided on the other side thereof, the interior of the enclosed space of the dielectric tube and a branch tube of the Venturi tube communicate with each other through an ozone transfer tube, the branch tube is provided with a check valve for preventing backflow of the fluid, a high-voltage electrode is placed on the outer side of the dielectric tube, and a ground electrode is disposed in the fluid within the Venturi tube or the fluid discharged from the Venturi tube.

Description

臭氧生成及臭氧溶解裝置 Ozone generation and ozone dissolving device

本發明係關於藉由對氣體施加電壓,在介電質管內發生放電而生成臭氧,且使臭氧溶解在流體的裝置。 The present invention relates to a device for generating ozone in a dielectric tube by applying a voltage to a gas, and dissolving ozone in the fluid.

近年來,在上下水處理設備、化學工廠、藥品工廠、食品工廠等中,係使用一種供細菌類、黴類及酵母等的殺菌、醛類、含硫化合物、氮化合物等臭氣物質的脫臭、排泄物或染料廢液的脫色、使有機溶劑等有害物質無害化之用的臭氧發生裝置。 In recent years, in a sewage treatment facility, a chemical factory, a pharmaceutical factory, a food factory, etc., it is used for the sterilization of bactericidal substances such as bacteria, molds, and yeasts, aldehydes, sulfur compounds, and nitrogen compounds. Ozone generating device for decolorizing odor, excrement or dye waste liquid, and detoxifying harmful substances such as organic solvents.

該技術一般以放電式臭氧產生器生成臭氧,以起泡器、噴射器、靜態混合器等氣液混合部,與處理所需水分相混合而作氣液接觸者。 This technique generally generates ozone by a discharge type ozone generator, and a gas-liquid mixing part such as a bubbler, an ejector, or a static mixer is mixed with water required for the treatment to make a gas-liquid contact.

但是,在習知方法中,臭氧發生部與應處理的水的氣液接觸部的距離遠離,當由臭氧發生部對氣液接觸部移送臭氧氣體時,因臭氧的強力氧化作用,會有因管子破損等所造成的臭氧漏洩的危險性,此外,臭氧為非常不安定的氣體,容易分解為氧,因此以盡可能在接近使用點(use point)的場所生成臭氧為宜。 However, in the conventional method, the distance between the ozone generating portion and the gas-liquid contact portion of the water to be treated is distant, and when the ozone generating portion transfers the ozone gas to the gas-liquid contact portion, there is a possibility due to the strong oxidation of ozone. Ozone is a very unstable gas and is easily decomposed into oxygen. Therefore, it is preferable to generate ozone as close as possible to a point of use.

對於該問題,具備有:使用在圓筒形的絕緣基體設置放電電極及感應電極的臭氧發生體的臭氧發生器;及在內部具有流水通路,對具有該流水通路而在該流水通路流通的水注入由臭氧發生器所得的臭氧的臭氧注入器的水的臭 氧處理裝置已被提出(參照例如專利文獻1)。 This problem is provided with an ozone generator using an ozone generator in which a discharge electrode and a sensing electrode are provided in a cylindrical insulating substrate, and a water flow path inside, and water flowing through the flow path in the flow path. The smell of water injected into the ozone injector of the ozone obtained by the ozone generator An oxygen treatment device has been proposed (see, for example, Patent Document 1).

但是,在前述水的臭氧處理裝置中,成為冷卻水的水在前述絕緣基體的內側流動,設在前述絕緣基體的外周面的前述放電電極被在前述絕緣基體流動的水所冷卻,但是若水為高溫時,並不會被冷卻,而有臭氧生成量變少的問題點。 However, in the ozone treatment device for water, water to be cooled water flows inside the insulating substrate, and the discharge electrode provided on the outer circumferential surface of the insulating substrate is cooled by water flowing through the insulating substrate, but if water is At high temperatures, it is not cooled, and there is a problem that the amount of ozone generated is small.

此外,以其他方法而言,在圓筒形介電質的外周面設置電暈放電極,在該電暈放電極的外側同心設置外筒,形成密閉空間,而且在該圓筒形介電質的內周面設置感應電極,使冷卻用液體流通至該圓筒形介電質的內部而將該介電質冷卻的臭氧產生器及使用該臭氧產生器的臭氧水製造裝置已被提出(參照例如專利文獻2)。 Further, in another method, a corona discharge electrode is disposed on an outer peripheral surface of the cylindrical dielectric, and an outer cylinder is concentrically disposed outside the corona discharge electrode to form a sealed space, and the cylindrical dielectric is formed in the cylindrical dielectric An ozone-generating device that supplies a cooling liquid to the inside of the cylindrical dielectric and that cools the dielectric to the inside of the cylindrical surface and an ozone water-making apparatus using the ozone generator has been proposed (refer to For example, Patent Document 2).

但是,若為前述臭氧產生器及使用該臭氧產生器的臭氧水製造裝置,必須在圓筒形介電質的外周面及內周面設置電極,尤其在狹窄的圓筒形狀介電質的內周設置電極,難以謂為可輕易製作,此外,以電暈放電所得的臭氧係濃度低,臭氧良率亦不佳已眾所週知。 However, in the case of the ozone generator and the ozone water producing apparatus using the ozone generator, it is necessary to provide electrodes on the outer peripheral surface and the inner peripheral surface of the cylindrical dielectric, particularly in a narrow cylindrical dielectric. It is difficult to say that the electrode is easily formed in the week, and it is known that the ozone concentration obtained by corona discharge is low and the ozone yield is also poor.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本特開平2-157091號公報 [Patent Document 1] Japanese Patent Laid-Open No. 2-157091

[專利文獻2]日本特開平2-184505號公報 [Patent Document 2] Japanese Patent Laid-Open No. 2-184505

鑑於上述問題,本發明人精心研究結果,提供一種具有下述特徵的臭氧生成及臭氧溶解裝置。 In view of the above problems, the inventors have carefully studied the results and provided an ozone generating and ozone dissolving device having the following features.

(1)在雙重管的外管外壁設置高電壓電極,在形成文式構造的內管配設接地電極,一面使流體通過至內管內,一面在外管內壁與內管外壁的間隙導入原料氣體(含氧氣體),在電極間施加電壓,使其發生障壁放電,藉此生成臭氧氣體,所生成的臭氧氣體係被導入至內管(文式管(Venturi tube))的狹窄部,且立即被溶解至流體。 (1) A high-voltage electrode is provided on the outer wall of the outer tube of the double tube, and a ground electrode is disposed in the inner tube forming the text structure, and the fluid is passed into the inner tube, and the raw material is introduced into the gap between the inner wall of the outer tube and the outer wall of the inner tube. a gas (oxygen-containing gas) is applied with a voltage between the electrodes to cause a barrier discharge to generate ozone gas, and the generated ozone gas system is introduced into a narrow portion of an inner tube (Venturi tube), and Immediately dissolved into the fluid.

(2)在將放電部與狹窄部相連的管路設置調節閥,藉由任意控制放電部的壓力,可生成高濃度的臭氧氣體。 (2) A regulating valve is provided in a pipe connecting the discharge portion and the narrow portion, and a high concentration of ozone gas can be generated by arbitrarily controlling the pressure of the discharge portion.

本發明係一種臭氧生成及臭氧溶解裝置,其係對所被供給的原料氣體施加電壓,藉此在介電質管內產生放電而生成臭氧,且使該臭氧溶解在流體的裝置,其第1特徵為:在文式管的外周配置該介電質管而形成密閉空間,在該介電質管的一方設置用以供給該原料氣體的原料氣體導入口,在另一方設置用以將所生成的該臭氧導入至該文式管的內部的臭氧排出口,該介電質管的密閉空間內與該文式管的支管以臭氧移送管被連通,在該支管具備有防止流體逆流的翼門止回閥,在該介電質管的外側配置高電壓電極,在文式管的內部的流體或由文式管所吐出的流體配設有接地電極。 The present invention relates to an ozone generating and ozone dissolving device which is a device for applying a voltage to a raw material gas to be supplied, thereby generating a discharge in a dielectric tube to generate ozone, and dissolving the ozone in a fluid. The utility model is characterized in that the dielectric tube is disposed on the outer circumference of the text tube to form a sealed space, and a material gas introduction port for supplying the material gas is provided on one side of the dielectric tube, and the other is provided for generating the material gas inlet port. The ozone is introduced into an ozone discharge port inside the duct, and a closed space of the dielectric tube is communicated with the branch pipe of the vent pipe by an ozone transfer pipe, and the branch pipe is provided with a wing door for preventing reverse flow of the fluid. In the check valve, a high voltage electrode is disposed outside the dielectric tube, and a ground electrode is disposed in the fluid inside the text tube or the fluid discharged from the text tube.

本發明係一種臭氧生成及臭氧溶解裝置,其係對所被 供給的原料氣體施加電壓,藉此在介電質管內產生放電而生成臭氧,且使該臭氧溶解在流體來製造臭氧水的裝置,其第2特徵為:在文式管的外周配置該介電質管而形成密閉空間,在該介電質管的一方設置用以供給該原料氣體的原料氣體導入口,在另一方設置用以將所生成的該臭氧導入至該文式管的內部的臭氧排出口,該介電質管的密閉空間內與該文式管的支管以臭氧移送管被連通,在該支管具備有防止流體逆流的翼門止回閥,在該介電質管的外側配置高電壓電極,在文式管配設有接地電極。 The present invention is an ozone generating and ozone dissolving device, which is A device that generates a voltage in a dielectric material to generate a discharge in the dielectric tube to generate ozone, and dissolves the ozone in a fluid to produce ozone water. The second feature is that the medium is disposed on the outer circumference of the rib tube. The electric tube forms a sealed space, and one of the dielectric tubes is provided with a material gas introduction port for supplying the material gas, and the other is provided for introducing the generated ozone into the inside of the rib tube. An ozone discharge port, wherein the sealed space of the dielectric tube is connected to the branch pipe of the venturi pipe by an ozone transfer pipe, and the branch pipe is provided with a wing gate check valve for preventing backflow of the fluid, on the outer side of the dielectric tube A high voltage electrode is arranged, and a ground electrode is arranged in the text tube.

以在前述臭氧移送管具備有調節前述臭氧的流量的調節閥為第3特徵,以前述接地電極予以玻璃被覆為第4特徵。 The ozone transfer tube is provided with a regulating valve for adjusting the flow rate of the ozone, and the third feature is that the ground electrode is coated with glass.

以前述介電質管為至少陶瓷或玻璃的任一者為第5特徵,以前述文式管由陶瓷、玻璃、樹脂、金屬的任一者所成為第6特徵。 It is the fifth feature that the dielectric tube is at least ceramic or glass, and the above-described tube has a sixth feature from any of ceramics, glass, resin, and metal.

以前述介電質管及前述文式管為石英玻璃製為第7特徵,以前述原料氣體與前述流體的量為氣液比0.3以下為第8特徵。 In the seventh aspect, the dielectric tube and the venturi are made of quartz glass, and the gas-liquid ratio of 0.3 or less is the eighth characteristic of the material gas and the fluid.

以具有將臭氧溶解後的流體再次送回至前述文式管,且使流體作循環的構造為第9特徵。 A structure having a structure in which a fluid obtained by dissolving ozone is returned to the above-described venturi and the fluid is circulated is a ninth feature.

藉由本發明之臭氧生成及臭氧溶解裝置,可得以下優異效果。 According to the ozone generating and ozone dissolving device of the present invention, the following excellent effects can be obtained.

(1)本發明之臭氧生成及臭氧溶解裝置係可簡單製作,可高濃度生成臭氧,且高效率地將臭氧溶解至流體。 (1) The ozone generating and ozone dissolving device of the present invention can be easily produced, can generate ozone at a high concentration, and efficiently dissolve ozone into a fluid.

(2)流體離放電部的距離近,在放電部所生成的臭氧等氣體會立即作用於流體,因此不僅臭氧,亦可利用藉由放電所生成的自由基。 (2) The distance between the fluid and the discharge portion is short, and the gas such as ozone generated in the discharge portion acts on the fluid immediately. Therefore, not only ozone but also radicals generated by the discharge can be used.

(3)當將所生成的臭氧氣體導入至文式管內部時,因臭氧氣泡壓壞而可生成OH自由基等活性種,可進行以臭氧並無法氧化分解的化合物的分解。 (3) When the generated ozone gas is introduced into the inside of the rib tube, an active species such as an OH radical can be generated due to the collapse of the ozone bubble, and decomposition of the compound which cannot be oxidatively decomposed by ozone can be performed.

(4)藉由調整在文式管的支管所具備的調節閥,可操作放電部的壓力,高濃度臭氧的生成成為可能,並且可調整臭氧濃度。 (4) By adjusting the regulating valve provided in the branch pipe of the rib tube, the pressure of the discharge portion can be operated, and the generation of high-concentration ozone is possible, and the ozone concentration can be adjusted.

(5)藉由控制導入至介電質管內的氣體與流體的氣液比,可簡單地製造目的濃度的臭氧水。 (5) By controlling the gas-liquid ratio of the gas introduced into the dielectric tube to the fluid, ozone water of a desired concentration can be easily produced.

(實施形態1) (Embodiment 1)

以下根據圖2、圖3,說明本發明中的第一實施形態,惟本發明並非限定於本實施形態,自不待言。 Hereinafter, the first embodiment of the present invention will be described with reference to Figs. 2 and 3, but the present invention is not limited to the embodiment, and it goes without saying.

在圖2中,本發明之臭氧生成及臭氧溶解裝置係由介電質管1、文式管2、高電壓電極3、接地電極4、電源5、原料氣體導入口6、臭氧氣體吐出口7、支管8、臭氧移送管9、翼門止回閥10、調節閥11所構成。 In Fig. 2, the ozone generating and ozone dissolving device of the present invention is composed of a dielectric tube 1, a text tube 2, a high voltage electrode 3, a ground electrode 4, a power source 5, a material gas introduction port 6, and an ozone gas discharge port 7. The branch pipe 8, the ozone transfer pipe 9, the wing gate check valve 10, and the regulating valve 11 are formed.

介電質管1係玻璃製之大致圓筒狀者。介電質管1的剖面可為四角形、菱形、多角形,但是以高電壓電極3的 配設容易度或與文式管2之間隙的調整及製作容易度來看,以圓形為宜。 The dielectric tube 1 is a substantially cylindrical shape made of glass. The cross section of the dielectric tube 1 may be a quadrangle, a diamond, or a polygon, but with a high voltage electrode 3 It is preferable to use a circular shape in terms of ease of fitting or adjustment of the gap with the text tube 2 and ease of manufacture.

文式管2係位於介電質管1的同一圓心上,與一般的文式管一樣,一部分形成為狹窄部。文式管2的剖面可為四角形、菱形、多角形,由於文式管2發揮介電質的作用,因此以與介電質管1的間隙成為均一的方式,以與介電質管1為相同形狀為宜。 The text tube 2 is located on the same center of the dielectric tube 1, and is formed into a narrow portion like a general style tube. The cross section of the rib tube 2 may be a quadrangular shape, a rhombus shape, or a polygonal shape. Since the rib tube 2 functions as a dielectric material, the gap with the dielectric tube 1 is uniform, and the dielectric tube 1 is The same shape is preferred.

文式管2係藉由介電質管1而形成密閉構造,在介電質管1係設有用以對其中一方導入原料氣體的原料氣體導入口6、對另一方吐出所生成的臭氧的臭氧吐出口7。 The heat pipe 2 is formed in a sealed structure by the dielectric tube 1, and the dielectric tube 1 is provided with ozone for introducing the raw material gas introduction port 6 of the source gas to one of the other, and discharging the generated ozone to the other. Spit out 7.

被導入至文式管2的流體係若藉由高低差或泵等而被加壓供給即可,流體係液體或例如蒸氣般含有液體的氣體。 The flow system introduced into the text tube 2 may be supplied under pressure by a step, a pump, or the like, and a liquid system or a gas containing a liquid such as a vapor.

以介電質管1與文式管2所形成的間隙係透過臭氧移送管9而與由文式管2的狹窄部突出的支管8相連通,若流體通過文式管2時,在文式管2的狹窄部發生強負壓,來吸入在介電質管1與文式管2的間隙所生成的臭氧。 The gap formed by the dielectric tube 1 and the text tube 2 is transmitted through the ozone transfer tube 9 to communicate with the branch tube 8 protruding from the narrow portion of the text tube 2. If the fluid passes through the text tube 2, the pattern is A strong negative pressure is generated in the narrow portion of the tube 2 to suck in ozone generated in the gap between the dielectric tube 1 and the text tube 2.

高電壓電極3係被配設在介電質管1的外側而與電源5相連接。電極的材質或形狀並非特別限定,但是較佳為以電極不會劣化的方式,將介電質管1形成為套管構造而在內部封入電解水,將不銹鋼製的金屬絲插入在內部而使電源5被連接。 The high voltage electrode 3 is disposed outside the dielectric tube 1 and connected to the power source 5. The material or shape of the electrode is not particularly limited. However, it is preferable that the dielectric tube 1 is formed into a sleeve structure so that the electrode does not deteriorate, and the electrolyzed water is sealed inside, and the stainless steel wire is inserted inside. The power source 5 is connected.

接地電極4若在文式管2的中央部配置電極棒即可,由於流體在文式管2的內部流動,使文式管2的內部發揮 接地的作用。此外,如圖3所示,接地電極4亦可配設在由文式管2所被吐出的水。 When the ground electrode 4 is provided with an electrode rod at the center of the rib tube 2, the fluid flows inside the rib tube 2, and the inside of the wenwan tube 2 is exerted. The role of grounding. Further, as shown in FIG. 3, the ground electrode 4 may be disposed in the water discharged from the text tube 2.

在臭氧移送管9係以通過文式管2的內部的流體不會逆流的方式設有翼門止回閥10,另外以可調節臭氧的流量或放電部的壓力的方式設有調節閥11。流體的速度可任意決定,若形成為因應根據由所使用的電源頻率所算出的放電頻度所應處理的流體的目的的流速即可。為了使藉由放電所生成的臭氧等氣體溶解於流體,流體與氣體的量的比以氣液比0.3以下為佳。 The ozone transfer pipe 9 is provided with a wing gate check valve 10 so that the fluid inside the passage pipe 2 does not flow back, and the regulator valve 11 is provided so that the flow rate of the ozone or the pressure of the discharge portion can be adjusted. The speed of the fluid can be arbitrarily determined, and it can be formed as a flow rate for the purpose of the fluid to be treated in accordance with the discharge frequency calculated from the power source frequency used. In order to dissolve a gas such as ozone generated by the discharge in the fluid, the ratio of the amount of the fluid to the gas is preferably 0.3 or less.

介電質管1的材質係以具有耐電漿性、耐熱性、耐臭氧性的陶瓷或玻璃為佳,較佳為以介電係數低的石英玻璃為佳。 The material of the dielectric tube 1 is preferably ceramic or glass having plasma resistance, heat resistance, and ozone resistance, and is preferably quartz glass having a low dielectric constant.

文式管2的材質可任意選定,惟以耐臭氧性、耐久性優異的陶瓷、玻璃、樹脂、金屬為佳,較佳為石英玻璃為佳。 The material of the rib tube 2 can be arbitrarily selected, but ceramics, glass, resin, and metal excellent in ozone resistance and durability are preferable, and quartz glass is preferred.

接地電極4的材質係按照流體的性質,來選定銅或不銹鋼等金屬即可,但是如電子零件洗淨等般,若金屬成分溶出即有不良情形時,若在接地電極4被覆絕緣化合物即可,較佳為以介電係數低,對流體的溶出少的石英玻璃為佳。 The material of the ground electrode 4 may be selected from a metal such as copper or stainless steel according to the nature of the fluid. However, if the metal component is eluted, such as when the electronic component is cleaned, the insulating compound may be applied to the ground electrode 4. Preferably, the quartz glass having a low dielectric constant and a small amount of dissolution of the fluid is preferred.

所被導入的原料氣體係可藉由鼓風機或鋼瓶等而被加壓供給,或者利用流體通過文式管2時所產生的負壓來自給,任何情形下均通過原料氣體導入口6而被導入至介電質管1的內部。原料氣體12係可因應所應處理的流體的 目的來任意決定,但是在生成臭氧或OH自由基等活性種時,若為至少含氧氣體即可。 The raw material gas system to be introduced may be supplied by pressure by a blower, a steel cylinder, or the like, or may be supplied by a negative pressure generated when the fluid passes through the text tube 2, and is introduced through the raw material gas introduction port 6 in any case. To the inside of the dielectric tube 1. The raw material gas 12 is compatible with the fluid to be treated The purpose is arbitrarily determined, but when an active species such as ozone or OH radical is generated, it is sufficient to contain at least an oxygen gas.

若將本案裝置使用在水處理時,在經一次處理的水殘留有應去除的化合物時,再次使用泵等而再送至本裝置的文式管2的內部,反覆進行處理即可。 When the apparatus of the present invention is used for water treatment, when the compound to be removed remains in the water treated once, the pump or the like is again used and sent to the inside of the text tube 2 of the apparatus, and the treatment may be repeated.

一面由原料氣體導入口6導入原料氣體(含氧氣體)12,並且在文式管2的內部流通流體,一面施加電壓時,在配設有高電壓電極3的部分的介電質管1的內壁與文式管2的外壁之間以圓周狀發生放電,通過放電部的原料氣體12中的氧會激發而生成臭氧,所生成的臭氧係通過臭氧吐出口7及臭氧移送管9,而被導入至文式管2的狹窄部,且立即溶解至流體。此外,此時,若減小原料氣體12與流體的流速比(氣液比)時,會產生強力負壓,因此氣液混合時,臭氧會壓壞,而可生成OH自由基。 The material gas (oxygen-containing gas) 12 is introduced into the raw material gas inlet port 6, and the fluid is passed through the inside of the vent tube 2, and when a voltage is applied, the dielectric tube 1 of the portion where the high-voltage electrode 3 is disposed is placed. The inner wall and the outer wall of the text tube 2 are circumferentially discharged, and oxygen in the material gas 12 passing through the discharge portion is excited to generate ozone, and the generated ozone passes through the ozone discharge port 7 and the ozone transfer pipe 9, and It is introduced into the narrow portion of the text tube 2 and immediately dissolved into the fluid. Further, at this time, when the flow velocity ratio (gas-liquid ratio) of the material gas 12 to the fluid is decreased, a strong negative pressure is generated. Therefore, when the gas-liquid mixture is mixed, the ozone is crushed and OH radicals are generated.

(實施形態2) (Embodiment 2)

接著,根據圖4,說明本發明中的第二實施形態,惟本發明並非限定於本實施形態,自不待言。 Next, a second embodiment of the present invention will be described with reference to Fig. 4. However, the present invention is not limited to the embodiment, and it goes without saying.

除了接地電極的位置以外,裝置的構成係與第一實施形態相同,故省略說明。 The configuration of the apparatus other than the position of the ground electrode is the same as that of the first embodiment, and thus the description thereof is omitted.

接地電極4可為文式管2的外側或內側,如圖4所示,亦可將文式管2形成為套管構造而在內部封入電解水,將不銹鋼製的金屬絲插入在內部而將電源連接,此時亦可更換介電質管1的高電壓電極3與文式管2的接地電 極4。 The grounding electrode 4 may be the outer side or the inner side of the text tube 2, as shown in FIG. 4, the text tube 2 may be formed into a sleeve structure, and the electrolyzed water may be sealed inside, and the stainless steel wire may be inserted inside. Power connection, at this time, the high voltage electrode 3 of the dielectric tube 1 and the grounding voltage of the text tube 2 can also be replaced. Extreme 4.

此外,若文式管2為金屬製,文式管2本身發揮接地電極4的作用。 Further, if the text tube 2 is made of metal, the text tube 2 itself functions as the ground electrode 4.

(實施形態3) (Embodiment 3)

接著,根據圖9,說明本發明中的第三實施形態,惟本發明並非限定於本實施形態,自不待言。 Next, a third embodiment of the present invention will be described with reference to Fig. 9, but the present invention is not limited to the embodiment, and it goes without saying.

裝置的構成與第一實施形態相同,故省略說明。 Since the configuration of the device is the same as that of the first embodiment, the description thereof is omitted.

如圖9所示,使通過本案裝置的流體未作循環地通過。 As shown in Figure 9, the fluid passing through the apparatus of the present invention was passed without circulation.

[實施例] [Examples]

在本發明中,使用前述實施形態,進行放電時的照相攝影及排臭氧濃度及溶存臭氧濃度的試驗。試驗的測定方法如以下所示。 In the present invention, the above-described embodiment is used to carry out tests for photographing, ozone concentration, and dissolved ozone concentration at the time of discharge. The measurement method of the test is as follows.

(1)生成臭氧濃度的測定 (1) Determination of ozone concentration

氣相臭氧濃度計:東亞DKK公司製OZ-3O Gas phase ozone concentration meter: OZ-3O made by East Asia DKK Co., Ltd.

在受水槽上部插入臭氧濃度感測器,使用氣相臭氧濃度計來進行測定。 An ozone concentration sensor was inserted into the upper portion of the water tank, and the measurement was performed using a gas phase ozone concentration meter.

(2)溶存臭氧濃度的測定 (2) Determination of dissolved ozone concentration

溶存臭氧濃度計:東亞DKK公司製OZ-2O Dissolved Ozone Concentration Meter: OZ-2O made by East Asia DKK Co., Ltd.

在循環槽內投入溶存臭氧濃度感測器來進行測定。 A dissolved ozone concentration sensor was placed in the circulation tank to perform measurement.

[實施例1] [Example 1]

在圖1顯示實驗裝置的流程圖。實驗裝置係由臭氧生成及臭氧溶解裝置、與接受由臭氧生成及臭氧溶解裝置所吐出的處理水的受水槽(15L)所構成,以可由循環槽對臭氧生成及臭氧溶解裝置進行循環移送的方式配置泵來進行配管,在受水槽係在水面上部設置臭氧濃度感測器、及在水面下部設置溶存臭氧濃度感測器。此外,將臭氧生成及臭氧溶解裝置的氣體導入口與氧鋼瓶以管子進行連接。在圖2中顯示臭氧生成及臭氧溶解裝置。臭氧生成及臭氧溶解裝置本體的介電質管及文式管係石英玻璃製,由文式管狹窄部,1次側成為雙重管。在文式管(內徑12mm、外徑14mm、排水部口徑5mm)內係使自來水通過,並且在介電質管(內徑16mm、外徑18mm)與文式管的間隙(1mm)係由氧鋼瓶流通氧。通過文式管與介電質管的間隙的氧係在文式管與介電質管的間隙發生放電而成為臭氧,但是所生成的臭氧係以被導入至文式管內管的狹窄部的方式進行管子連接。其中,在該管子係具備有閥,俾以可調整放電部的壓力,並且具備有翼門止回閥,俾使通過文式管內的自來水不會由狹窄部逆流。 A flow chart of the experimental setup is shown in FIG. The experimental apparatus is composed of an ozone generating and ozone dissolving device, and a water receiving tank (15L) that receives the treated water discharged from the ozone generating and ozone dissolving device, and the ozone generating and ozone dissolving device can be cyclically transferred by the circulating tank. A pump is arranged to perform piping, an ozone concentration sensor is disposed on the surface of the water receiving tank, and a dissolved ozone concentration sensor is disposed in the lower portion of the water surface. Further, the gas introduction port of the ozone generating and ozone dissolving device is connected to the oxygen cylinder by a pipe. An ozone generating and ozone dissolving device is shown in FIG. The dielectric tube of the ozone generating and ozone dissolving device and the quartz tube of the literary tube system are made of a narrow tube of the text tube, and the primary side is a double tube. The tap water is passed through the text tube (inner diameter 12 mm, outer diameter 14 mm, drain portion diameter 5 mm), and the gap between the dielectric tube (inner diameter 16 mm, outer diameter 18 mm) and the text tube (1 mm) is Oxygen cylinders flow oxygen. The oxygen in the gap between the rib tube and the dielectric tube is discharged into the gap between the rib tube and the dielectric tube to form ozone, but the generated ozone is introduced into the narrow portion of the inner tube of the rib tube. Pipe connection. The pipe system is provided with a valve for adjusting the pressure of the discharge portion, and a wing gate check valve is provided so that the tap water passing through the pipe does not flow back from the narrow portion.

此外,介電質管係成為套管構造(內部5mm、長度100mm),在套管內部係封入有35%氯化鈉溶液,插入不銹鋼製的金屬絲而形成為高電壓電極,而與電源相連接。另一方面,在自來水所通過的文式管內插入直徑2mm的不銹鋼製的接地電極而與電源相連接。 In addition, the dielectric tube system is a sleeve structure (inner 5 mm, length 100 mm), a 35% sodium chloride solution is sealed inside the sleeve, and a stainless steel wire is inserted to form a high voltage electrode, and the power source is connection. On the other hand, a grounding electrode made of stainless steel having a diameter of 2 mm was inserted into a venturi through which the tap water passed, and was connected to a power source.

實驗係使泵起動,以30L/min的流速使自來水作循 環,並且一面由氧鋼瓶,以3L/min的風量導入氧,一面施加電壓(12kV、7kHz)來進行放電,以進行臭氧生成量及臭氧水濃度的測定。結果,如圖5所示,放電開始30分鐘後的生成臭氧濃度係成為10500ppm,如圖6所示,溶存臭氧濃度成為3.75ppm。 The experimental system started the pump and used tap water at a flow rate of 30 L/min. On the other hand, oxygen was introduced into the ring by an oxygen cylinder, and a voltage (12 kV, 7 kHz) was applied to discharge the oxygen to measure the amount of ozone generated and the concentration of ozone water. As a result, as shown in Fig. 5, the ozone concentration after 30 minutes from the start of discharge was 10,500 ppm, and as shown in Fig. 6, the dissolved ozone concentration was 3.75 ppm.

[實施例2] [Embodiment 2]

除了以次甲基藍濃度成為5mg/L的方式添加在自來水以外,係與實施例1同樣地進行,將積算生成臭氧量的經時變化顯示於圖7,次甲基藍脫色量的經時變化顯示於圖8。 In the same manner as in Example 1 except that the concentration of the methylene blue was 5 mg/L, the change over time in the amount of ozone generated was shown in Fig. 7, and the time of decolorization of the methine blue was shown. The changes are shown in Figure 8.

[比較例1] [Comparative Example 1]

除了以作為OH自由基補充劑的t-BuOH成為1mM的方式進行添加以外,係與實施例2同樣地進行,將積算生成臭氧量的經時變化顯示於圖7,次甲基藍脫色量的經時變化顯示於圖8。由該結果,無關於生成臭氧為同等,均因t-BuOH的添加而使脫色率降低,暗示藉由本電漿生成裝置所致之OH自由基的生成。 The addition of the t-BuOH as an OH radical supplement to 1 mM was carried out in the same manner as in Example 2, and the time-dependent change in the amount of accumulated ozone was shown in Fig. 7, and the amount of methine blue decolorization was shown. The change over time is shown in Figure 8. From this result, irrespective of the generation of ozone, the decolorization rate was lowered by the addition of t-BuOH, suggesting the formation of OH radicals by the plasma generating apparatus.

[實施例3] [Example 3]

除了在由文式管所被吐出的水配設有接地電極以外,係與實施例1同樣地進行,進行臭氧生成量及臭氧水濃度的測定(參照圖3)。結果,如圖5所示,放電開始30 分鐘後的生成臭氧濃度係成為5400ppm,如圖6所示,溶存臭氧濃度成為1.57ppm。 The amount of ozone generation and the concentration of ozone water were measured in the same manner as in Example 1 except that a ground electrode was disposed in the water discharged from the rib tube (see FIG. 3). As a result, as shown in FIG. 5, the discharge starts 30 The generated ozone concentration after the minute was 5,400 ppm, and as shown in Fig. 6, the dissolved ozone concentration was 1.57 ppm.

[實施例4] [Example 4]

除了在文式管的外側配設有接地電極以外,係與實施例1同樣地進行,進行臭氧生成量及臭氧水濃度的測定(參照圖4)。結果,如圖5所示,放電開始30分鐘後的生成臭氧濃度係成為10850ppm,如圖6所示,溶存臭氧濃度成為3.84ppm。 In the same manner as in Example 1, except that a ground electrode was disposed outside the rib tube, the amount of ozone generated and the concentration of ozone water were measured (see FIG. 4). As a result, as shown in Fig. 5, the ozone concentration after 30 minutes from the start of discharge was 10,850 ppm, and as shown in Fig. 6, the dissolved ozone concentration was 3.84 ppm.

[實施例5] [Example 5]

除了將接地電極進行玻璃被覆於不銹鋼製的金屬絲,將施加電壓設為(15kV、7kHz)以外,係與實施例1同樣地進行,進行臭氧生成量及臭氧水濃度的測定。結果,如圖5所示,放電開始30分鐘後的生成臭氧濃度係成為9400ppm,如圖6所示,溶存臭氧濃度成為3.28ppm。 The ozone generation amount and the ozone water concentration were measured in the same manner as in Example 1 except that the ground electrode was coated with a stainless steel wire and the applied voltage was (15 kV, 7 kHz). As a result, as shown in Fig. 5, the ozone concentration after 30 minutes from the start of discharge was 9,400 ppm, and as shown in Fig. 6, the dissolved ozone concentration was 3.28 ppm.

[實施例6] [Embodiment 6]

除了以文式管與介電質管的間隙(放電部)的壓力成為107kPa的方式,調整連接於文式管之支管的調節閥以外,係與實施例1同樣地進行,進行臭氧生成量及臭氧水濃度的測定。結果,如圖5所示,放電開始30分鐘後的生成臭氧濃度係成為11750ppm,如圖6所示,溶存臭氧濃度成為4.15ppm。 Except that the pressure of the gap (discharge portion) between the rib tube and the dielectric tube was 107 kPa, the amount of ozone generation was performed in the same manner as in the first embodiment except that the regulating valve connected to the branch pipe of the rib tube was adjusted. Determination of ozone water concentration. As a result, as shown in Fig. 5, the ozone concentration after the start of discharge 30 minutes was 11,750 ppm, and as shown in Fig. 6, the dissolved ozone concentration was 4.15 ppm.

[實施例7] [Embodiment 7]

除了以文式管與介電質管的間隙(放電部)的壓力成為117kPa的方式,調整連接於文式管之狹窄部的調節閥以外,係與實施例6同樣地進行,進行臭氧生成量及臭氧水濃度的測定。結果,如圖5所示,放電開始30分鐘後的生成臭氧濃度係成為13150ppm,如圖6所示,溶存臭氧濃度成為4.68ppm。 The ozone generation amount was performed in the same manner as in Example 6 except that the pressure of the gap (discharge portion) between the rib tube and the dielectric tube was 117 kPa, and the adjustment valve connected to the narrow portion of the rib tube was adjusted. And determination of ozone water concentration. As a result, as shown in Fig. 5, the ozone concentration after the start of discharge was 13150 ppm, and as shown in Fig. 6, the dissolved ozone concentration was 4.68 ppm.

[實施例8] [Embodiment 8]

如圖9所示,除了使自來水未作循環而連續排水以外,係與實施例1(氣液比0.1)同樣地進行,來測定臭氧水濃度。結果,如圖10所示,臭氧溶解效率成為57%。 As shown in Fig. 9, the ozone water concentration was measured in the same manner as in Example 1 (gas-liquid ratio 0.1) except that the tap water was continuously discharged without circulation. As a result, as shown in Fig. 10, the ozone dissolution efficiency was 57%.

[實施例9] [Embodiment 9]

除了將自來水的流速設為10L/min(氣液比0.3)以外,係與實施例8同樣地進行,來測定臭氧水濃度。結果,如圖10所示,臭氧溶解效率成為23%。 The ozone water concentration was measured in the same manner as in Example 8 except that the flow rate of the tap water was 10 L/min (gas-liquid ratio: 0.3). As a result, as shown in FIG. 10, the ozone dissolution efficiency was 23%.

[比較例2] [Comparative Example 2]

除了將自來水的流速設為7.5L/min(氣液比0.4)以外,係與實施例8同樣地進行,來測定臭氧水濃度。結果,如圖10所示,臭氧溶解效率成為17%。 The ozone water concentration was measured in the same manner as in Example 8 except that the flow rate of the tap water was 7.5 L/min (gas-liquid ratio: 0.4). As a result, as shown in FIG. 10, the ozone dissolution efficiency was 17%.

[實施例10] [Embodiment 10]

臭氧生成及臭氧溶解裝置本體的介電質管1及文式管2係石英玻璃製,由文式管2狹窄部,1次側成為雙重管(參照圖4)。在文式管2(內徑12mm、外徑14mm、排水部口徑5mm)內係使自來水通過,並且在介電質管1(內徑19mm、外徑21mm)與文式管2的間隙(1mm)係由氧鋼瓶流通氧。通過文式管2與介電質管1的間隙的氧係在文式管2與介電質管1的間隙發生放電而成為臭氧,但是所生成的臭氧係以被導入至文式管2的內管的狹窄部的方式進行管子連接。其中,在該管子係具備有閥調節閥11,俾以可調整放電部的壓力,並且具備有翼門止回閥12,俾使通過文式管2之內的自來水不會由狹窄部逆流。 The dielectric tube 1 and the text tube 2 of the ozone generating and ozone dissolving device are made of quartz glass, and the narrow portion of the text tube 2 is a double tube (see Fig. 4). In the style tube 2 (inner diameter 12 mm, outer diameter 14 mm, drain portion diameter 5 mm), tap water is passed through, and the gap between the dielectric tube 1 (inner diameter 19 mm, outer diameter 21 mm) and the text tube 2 (1 mm) ) The oxygen is circulated from the oxygen cylinder. The oxygen in the gap between the text tube 2 and the dielectric tube 1 is discharged into the gap between the text tube 2 and the dielectric tube 1 to become ozone, but the generated ozone is introduced into the inside of the text tube 2. The tube is connected in the manner of the narrow portion of the tube. Here, the pipe system is provided with a valve regulating valve 11 that adjusts the pressure of the discharge portion and includes a winged door check valve 12 so that the tap water passing through the inside of the pipe 2 does not flow back from the narrow portion.

此外,文式管2及介電質管1係形成為套管構造(內部5mm、長度100mm),在套管內部係封入35%氯化鈉溶液,在文式管2的套管內部插入不銹鋼製的金屬絲而形成為接地電極4,在介電質管1的套管內部插入不銹鋼製的金屬絲而形成為高電壓電極3,分別與電源相連接。 In addition, the text tube 2 and the dielectric tube 1 are formed into a sleeve structure (internal 5 mm, length 100 mm), a 35% sodium chloride solution is sealed inside the sleeve, and stainless steel is inserted inside the sleeve of the text tube 2. The wire is formed into a ground electrode 4, and a stainless steel wire is inserted into the sleeve of the dielectric tube 1 to form a high voltage electrode 3, which is connected to a power source.

實驗係以10L/min的流速使自來水通過,並且一面由氧鋼瓶以3L/min的風量導入氧,一面施加電壓(15kV、7kHz)來進行放電,使用非接觸式溫度計來測定電極溫度,並且測定消耗電力。結果,如圖11所示,放電開始後30分鐘的電極溫度係高電壓電極為42.3℃、 接地電極為28.1℃。此外,如圖12所示,消耗電力成為35W。 In the experiment, the tap water was passed at a flow rate of 10 L/min, and oxygen was introduced into the oxygen cylinder at a flow rate of 3 L/min, and a voltage (15 kV, 7 kHz) was applied to discharge, and the temperature of the electrode was measured using a non-contact thermometer. Consume power. As a result, as shown in FIG. 11, the electrode temperature at 30 minutes after the start of discharge is 42.3 ° C for the high voltage electrode. The ground electrode is 28.1 °C. Further, as shown in FIG. 12, the power consumption is 35 W.

[比較例3] [Comparative Example 3]

使自來水未通過而與實施例10同樣地進行,使用非接觸式溫度計來測定電極溫度,共且測定消耗電力。結果,如圖11所示,放電開始後30分鐘的電極溫度係高電壓電極為62.3℃、接地電極為66.6℃。此外,如圖12所示,消耗電力成為38W。 The tap water was passed through in the same manner as in Example 10, and the electrode temperature was measured using a non-contact thermometer to measure the power consumption. As a result, as shown in Fig. 11, the electrode temperature 30 minutes after the start of discharge was 62.3 ° C for the high voltage electrode and 66.6 ° C for the ground electrode. Further, as shown in FIG. 12, the power consumption is 38 W.

1‧‧‧介電質管 1‧‧‧ dielectric tube

2‧‧‧文式管 2‧‧‧文管

3‧‧‧高電壓電極 3‧‧‧High voltage electrode

4‧‧‧接地電極 4‧‧‧Ground electrode

5‧‧‧電源 5‧‧‧Power supply

6‧‧‧原料氣體導入口 6‧‧‧Material gas inlet

7‧‧‧臭氧吐出口 7‧‧‧Ozone spitting

8‧‧‧支管 8‧‧‧ branch

9‧‧‧臭氧移送管 9‧‧Ozone transfer tube

10‧‧‧翼門止回閥 10‧‧‧wing door check valve

11‧‧‧調節閥 11‧‧‧Regulator

12‧‧‧原料氣體 12‧‧‧Material gases

圖1係本發明之第一及第二實施形態中的實驗裝置的流程圖。 BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a flow chart showing the experimental apparatus in the first and second embodiments of the present invention.

圖2係顯示本發明之第一實施形態之臭氧生成及臭氧溶解裝置的圖。 Fig. 2 is a view showing an ozone generating and ozone dissolving device according to a first embodiment of the present invention.

圖3係顯示本發明之第一實施形態之其他臭氧生成及臭氧溶解裝置的圖。 Fig. 3 is a view showing another ozone generating and ozone dissolving device according to the first embodiment of the present invention.

圖4係顯示本發明之第二實施形態之臭氧生成及臭氧溶解裝置的圖。 Fig. 4 is a view showing an ozone generating and ozone dissolving apparatus according to a second embodiment of the present invention.

圖5係顯示本發明之實施例1及實施例3至實施例7中每個電壓施加時間的生成臭氧濃度的推移圖表。 Fig. 5 is a graph showing the transition of the generated ozone concentration for each voltage application time in Example 1 and Example 3 to Example 7 of the present invention.

圖6係顯示本發明之實施例1及實施例3至實施例7中每個電壓施加時間的溶存臭氧濃度的推移圖表。 Fig. 6 is a graph showing the transition of the dissolved ozone concentration for each voltage application time in Example 1 and Example 3 to Example 7 of the present invention.

圖7係顯示實施例2及比較例1中每個處理時間的生 成臭氧的積算生成量的推移圖表。 Figure 7 shows the growth of each processing time in Example 2 and Comparative Example 1. A graph showing the amount of change in the amount of ozone generated.

圖8係顯示實施例2及比較例1中每個處理時間的次甲基藍脫色量的推移圖表。 Fig. 8 is a graph showing the transition of the amount of methine blue decolorization per treatment time in Example 2 and Comparative Example 1.

圖9係顯示本發明之第三實施形態中的實驗裝置的流程圖。 Fig. 9 is a flow chart showing the experimental apparatus in the third embodiment of the present invention.

圖10係顯示本發明之實施例8至實施例9及比較例2中的氣液比與溶解效率的關係圖表。 Fig. 10 is a graph showing the relationship between the gas-liquid ratio and the dissolution efficiency in Examples 8 to 9 and Comparative Example 2 of the present invention.

圖11係顯示本發明之實施例10及比較例3中的電極溫度的圖表。 Fig. 11 is a graph showing electrode temperatures in Example 10 and Comparative Example 3 of the present invention.

圖12係顯示本發明之實施例10及比較例3中的消耗電力的圖表。 Fig. 12 is a graph showing power consumption in Example 10 and Comparative Example 3 of the present invention.

Claims (9)

一種臭氧生成及臭氧溶解裝置,其係對所被供給的原料氣體施加電壓,藉此在介電質管內產生放電而生成臭氧,且使該臭氧溶解在流體的裝置,其特徵為:在文式管的外周配置該介電質管而形成密閉空間,在該介電質管的一方設置用以供給該原料氣體的原料氣體導入口,在另一方設置用以將所生成的該臭氧導入至該文式管的內部的臭氧排出口,該介電質管的密閉空間內與該文式管的支管以臭氧移送管被連通,在該支管具備有防止流體逆流的翼門止回閥,在該介電質管的外側配置高電壓電極,在文式管的內部的流體或由文式管所吐出的流體配設有接地電極。 An ozone generating and ozone dissolving device which is a device for applying a voltage to a raw material gas to be supplied, thereby generating a discharge in a dielectric tube to generate ozone, and dissolving the ozone in a fluid, characterized in that The dielectric tube is disposed on the outer circumference of the tube to form a sealed space, and a raw material gas introduction port for supplying the material gas is provided in one of the dielectric tubes, and the generated ozone is introduced to the other side. An ozone discharge port inside the duct, the sealed space of the dielectric tube is connected to the branch pipe of the vent pipe by an ozone transfer pipe, and the branch pipe is provided with a wing gate check valve for preventing backflow of the fluid. A high voltage electrode is disposed outside the dielectric tube, and a ground electrode is disposed in the fluid inside the text tube or the fluid discharged from the tube. 一種臭氧生成及臭氧溶解裝置,其係對所被供給的原料氣體施加電壓,藉此在介電質管內產生放電而生成臭氧,且使該臭氧溶解在流體來製造臭氧水的裝置,其特徵為:在文式管的外周配置該介電質管而形成密閉空間,在該介電質管的一方設置用以供給該原料氣體的原料氣體導入口,在另一方設置用以將所生成的該臭氧導入至該文式管的內部的臭氧排出口,該介電質管的密閉空間內與該文式管的支管以臭氧移送管被連通,在該支管具備有防止流體逆流的翼門止回閥,在該介電質管的外側配置高電壓電極,在文式管配設有接地電極。 An apparatus for generating ozone, which is a device for applying ozone to a source gas to be supplied, thereby generating a discharge in a dielectric tube to generate ozone, and dissolving the ozone in a fluid to produce ozone water. The dielectric tube is disposed on the outer circumference of the rib tube to form a sealed space, and a raw material gas introduction port for supplying the material gas is provided on one side of the dielectric tube, and the generated material is provided on the other side. The ozone is introduced into an ozone discharge port inside the duct, and a closed space of the dielectric tube is communicated with a branch pipe of the vent pipe by an ozone transfer pipe, and the branch pipe is provided with a wing stop for preventing fluid from flowing backward. In the return valve, a high voltage electrode is disposed outside the dielectric tube, and a ground electrode is disposed in the text tube. 如申請專利範圍第1項或第2項之臭氧生成及臭氧溶解裝置,其中,在前述臭氧移送管具備有調節前述臭氧的流量的調節閥。 An ozone generating and ozone dissolving device according to claim 1 or 2, wherein the ozone transfer pipe is provided with a regulating valve for adjusting a flow rate of the ozone. 如申請專利範圍第1項至第3項中任一項之臭氧生成及臭氧溶解裝置,其中,前述接地電極予以玻璃被覆。 The ozone generating and ozone dissolving device according to any one of claims 1 to 3, wherein the ground electrode is coated with glass. 如申請專利範圍第1項至第4項中任一項之臭氧生成及臭氧溶解裝置,其中,前述介電質管為至少陶瓷或玻璃的任一者。 The ozone generating and ozone dissolving device according to any one of claims 1 to 4, wherein the dielectric tube is at least one of ceramics and glass. 如申請專利範圍第1項至第5項中任一項之臭氧生成及臭氧溶解裝置,其中,前述文式管由陶瓷、玻璃、樹脂、金屬的任一者所成。 The ozone generating and ozone dissolving device according to any one of claims 1 to 5, wherein the said tube is made of any one of ceramics, glass, resin, and metal. 如申請專利範圍第1項至第6項中任一項之臭氧生成及臭氧溶解裝置,其中,前述介電質管及前述文式管為石英玻璃製。 The ozone generating and ozone dissolving device according to any one of claims 1 to 6, wherein the dielectric tube and the ray tube are made of quartz glass. 如申請專利範圍第1項至第7項中任一項之臭氧生成及臭氧溶解裝置,其中,前述所被供給的原料氣體與前述流體的量為氣液比0.3以下。 The ozone generating and ozone dissolving device according to any one of claims 1 to 7, wherein the amount of the raw material gas to be supplied and the fluid is 0.3 or less. 如申請專利範圍第1項至第8項中任一項之臭氧生成及臭氧溶解裝置,其中,具有將臭氧溶解後的流體再次送回至前述文式管,且使流體作循環的構造。 The ozone generating and ozone dissolving device according to any one of claims 1 to 8, which has a structure in which a fluid dissolved in ozone is returned to the above-described venturi and the fluid is circulated.
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