JP2013118279A5

JP2013118279A5 - Spin processing device

Info

Publication number: JP2013118279A5
Application number: JP2011264950A
Authority: JP
Filing date: 2011-12-02
Publication date: 2015-02-26
Anticipated expiration: 2031-12-02

Description

本発明の実施形態は、スピン処理装置に関する。 Embodiments of the present invention relates to a spin processing apparatus.

本発明が解決しようとする課題は、基板の均一な処理を実現することができるスピン処
理装置を提供することである。 The problem to be solved by the present invention is to provide a spin processing apparatus that can realize uniform processing of a substrate.

本発明の実施形態に係るスピン処理装置は、基板を回転させて処理するスピン処理装置
であって、回転可能に設けられた回転体と、回転体の回転方向に所定間隔で昇降可能に設
けられ、基板の周縁部を支持する少なくとも三つの基板支持部材と、回転体の回転方向に
所定間隔で偏心回転可能に設けられ、偏心回転により基板の外周面に各々当接して基板を
把持する少なくとも三つのクランプピンと、三つの基板支持部材を同期させて昇降させる
昇降機構と、三つのクランプピンを同期させて偏心回転させる回転機構とを備え、前記回転機構は、前記回転体の回転軸に直交する方向に移動可能に設けられ、前記三つのクランプピンを偏心回転させるための複数のスライドアームと、前記回転体の回転軸を中心として回転可能に設けられ、前記複数のスライドアームを同期させて前記回転体の回転軸に直交する方向に移動させる同期移動リングと、を具備している。 A spin processing apparatus according to an embodiment of the present invention is a spin processing apparatus that rotates and processes a substrate, and is provided so as to be capable of rotating up and down at predetermined intervals in the rotation direction of the rotating body. And at least three substrate support members for supporting the peripheral edge of the substrate and at least three substrate members that are eccentrically rotatable at predetermined intervals in the rotation direction of the rotating body and that respectively contact the outer peripheral surface of the substrate by eccentric rotation. Two clamp pins, a lifting mechanism that moves the three substrate support members in synchronization, and a rotation mechanism that rotates the three clamp pins in synchronization, and the rotation mechanism is orthogonal to the rotation axis of the rotating body. A plurality of slide arms for eccentrically rotating the three clamp pins, a rotation arm about the rotation axis of the rotating body, It is provided with a synchronous moving ring that moves in a direction perpendicular to the rotation axis of the rotating body of the slide arm in synchronization.

Claims

A spin processing apparatus for processing by rotating a substrate,
A rotating body provided rotatably,
At least three substrate support members provided so as to be movable up and down at predetermined intervals in the rotation direction of the rotating body, and supporting the peripheral edge of the substrate;
At least three clamp pins which are provided so as to be eccentrically rotatable at predetermined intervals in the rotation direction of the rotating body, and which respectively contact the outer peripheral surface of the substrate by eccentric rotation and grip the substrate;
An elevating mechanism for elevating and lowering the three substrate support members synchronously;
A rotating mechanism for synchronizing and rotating the three clamp pins in an eccentric manner;
Equipped with a,
The rotation mechanism is
A plurality of slide arms provided so as to be movable in a direction perpendicular to the rotation axis of the rotating body, and for eccentrically rotating the three clamp pins;
A synchronous moving ring provided rotatably about the rotation axis of the rotating body, and moving the plurality of slide arms in a direction perpendicular to the rotation axis of the rotating body;
Spin processing apparatus characterized that you have to include a.

The lifting mechanism is
A support ring for supporting the three substrate support members;
An elevating part for elevating the support ring;
The spin processing apparatus according to claim 1, further comprising:

Each of the plurality of slide arms has a synchronous movement pin;
The spin processing device according to claim 1, wherein the synchronous movement ring includes a plurality of pin contact portions that come into contact with the synchronous movement pin by rotation about a rotation axis of the rotating body.

The synchronous movement ring has a cylindrical portion in which a spiral groove extending in the axial direction of the rotating shaft of the rotating body is formed,
The rotation mechanism is
Lift pins inserted into the groove and movable along the groove;
An elevating ring provided to be movable in the axial direction of the rotating shaft around the rotating shaft of the rotating body, and connected to the elevating pin;
An elevating part for elevating the elevating ring;
The spin processing apparatus according to claim 1, further comprising:

A sensor for detecting the height of the lifting ring;
A determination unit for determining whether or not the holding of the substrate by the plurality of clamp pins is normal according to the height of the lifting ring detected by the sensor;
The spin processing apparatus according to claim 4, further comprising:

An eccentric rotation member that is provided to be eccentrically rotatable and holds the clamp pin;
Two of the clamp pins are provided on the eccentric rotating member, and when the two clamp pins hold the substrate, the distance between the two clamp pins is the width of the notch on the outer peripheral surface of the substrate. The spin processing apparatus according to claim 1, wherein the spin processing apparatus is provided so as to be in contact with the outer peripheral surface of the substrate.

Six substrate support members are provided,
Six clamp pins are provided as a set of three,
The rotating mechanism rotates the six clamp pins in synchronism with each pair,
The spin processing apparatus according to claim 1, wherein the lifting mechanism lifts and lowers the six substrate support members in synchronization.

8. The spin processing apparatus according to claim 7, wherein the six clamp pins grip the substrate alternately for each set during processing of processing the substrate.

The spin processing apparatus according to claim 1, wherein the substrate is a rectangular plate-shaped substrate.