JP2013115366A - Support device and support method of long body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a support body and support method of a long body that does not require accurate alignment to adequately communicate data with a data carrier when supporting an axial core member which the long body is wound around and which is provided with the data carrier with a support shaft.SOLUTION: A support device comprises: a support shaft 221 which has a base end part 221E and a front end part 221T and supports an axial core member 23 by being inserted into the axial core member 23 from one end side of it; a frame which supports the support shaft 221 from the side of the base end part 221E; and guide means 26 which makes it possible to align the axial core member 23 by fixing the guide means to a front end part 221C of the support shaft 221. The axial core member 23 is provided with a data carrier 29 which is capable of at least one of storing and transmitting prescribed data in a plane which is at the other end side of the hollow part and orthogonal to the axial line CF of the shaft core member 23. At an outer guide plate 264 orthogonal to the axial line CE of the support shaft 221, there is provided a loop antenna 27 wound around in a loop manner surrounding the axial line CE of the support shaft 221.

Description

  The present invention relates to a long body support device and a support method.

2. Description of the Related Art Conventionally, in a pasting apparatus that feeds a strip-shaped adhesive sheet and pastes it on a semiconductor wafer (hereinafter sometimes referred to as “wafer”), a data carrier is provided on a shaft core member around which the adhesive sheet is wound, and the data carrier is written. A configuration is known in which the data is read to appropriately set the pasting conditions (see, for example, Patent Document 1).
In the configuration described in Patent Document 1, a data carrier is provided on the inner surface of the shaft member, and a tape data read / write device is provided on the unwinding shaft on which the shaft member is mounted.

JP 2007-12807 A

  However, in the configuration described in Patent Document 1, if the data carrier is displaced around the unwinding axis, data cannot be read or written (data communication). There is a problem that the positioning with the reading / writing device must be performed accurately, and the mounting work of the shaft core member is troublesome.

  The object of the present invention is to eliminate the need for accurate alignment for appropriately communicating data to the data carrier when the shaft member on which the long body is wound and the data carrier is supported by the support shaft. An object of the present invention is to provide a support device and a support method for a long body.

  In order to achieve the above object, the long body support device of the present invention supports the long body wound around the hollow cylindrical shaft core member so that the long body can be fed, or the hollow cylindrical shaft core member In a long body support device that supports a long body in a rollable manner, the long body has a proximal end portion and a distal end portion, and is inserted by inserting one end side of the hollow portion of the shaft core member from the distal end portion side. A support shaft for supporting the shaft core member, a frame for supporting the support shaft from the base end side, and a detachably provided at the distal end portion of the support shaft, and positioning the shaft core member by attaching to the distal end portion The shaft core member is capable of at least one of storing and transmitting predetermined data in a plane on the other end side of the hollow portion and intersecting the axis of the shaft core member. A data carrier is provided, and the guide means includes a tip of the support shaft. When secured to section, the disposed data carrier and opposite to, available communication section with the data carrier adopts the configuration that is provided.

  In this case, it is preferable that the guide unit includes a wireless communication unit capable of wirelessly communicating data stored in the data carrier and data received or read by the communication unit from the data carrier.

  On the other hand, the long body support method of the present invention supports the long body wound around the hollow cylindrical shaft core member so that the long body can be fed, or winds the long body around the hollow cylindrical shaft core member. In the method of supporting an elongated body to be supported, at least one of storage and transmission of predetermined data is performed on the other end side of the hollow portion of the shaft core member and in a plane intersecting the axis of the shaft core member. A step of preparing a shaft member provided with a possible data carrier, a step of inserting one end side of the hollow portion of the shaft core member from the tip end side of the support shaft, and supporting the shaft member, and the support Attaching the guide means capable of positioning the shaft core member to the tip portion of the shaft, and supporting the communication section provided on the guide means and the data carrier opposite to each other; and the communication section and the data carrier And having a process of communicating with It has adopted the configuration.

  According to the present invention as described above, as long as the shaft core member is inserted into the support shaft and the guide means is fixed to the tip portion, the data carrier and the communication unit such as an antenna are reliably opposed to each other. As in the prior art, accurate alignment for appropriately performing communication between the data carrier and the loop antenna becomes unnecessary.

  At this time, if the guide means includes wireless communication means, it is necessary to wire a communication unit such as a reader / writer that can read data stored in the data carrier and write data to the data carrier. This eliminates the need for wiring, and allows the device to be installed in any location within the range where it can communicate with the wireless communication means.

The side view of the sticking apparatus which concerns on embodiment of this invention. The disassembled perspective view of the support apparatus of the sticking apparatus of FIG. The fragmentary sectional view of the support apparatus of the sticking apparatus of FIG.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In each of the drawings, the shape and arrangement of each component are exaggerated for easy understanding of the contents of the present invention. Further, for example, when directions such as up, down, left, right, front, and back are shown without giving a reference figure in the present embodiment, all are based on FIG.
In FIG. 1, a sticking device 1 sticks an adhesive sheet AS to a wafer WF. Here, the adhesive sheet AS has an adhesive layer AD laminated on one surface of the base sheet BS, and a raw material as a long body temporarily attached to the release sheet RL via the adhesive layer AD. RS is prepared by being wound around the outer periphery of a hollow cylindrical shaft core member 23 in advance. Data carriers 29 are provided at both ends of the shaft core member 23, respectively.
Each data carrier 29 covers a part of the opening in the end surface 231 of the shaft core member 23 and is provided in a plane orthogonal to the axis CF of the shaft core member 23. These data carriers 29 are formed in a D shape in plan view surrounded by an adherend-like edge 291 along a part of the outer peripheral edge of the end surface 231 and a relief edge 292.
The data carrier 29 can read and store data or transmit data by using electromagnetic waves as a communication medium. As such a data carrier 29, for example, a so-called RF memory, RFID tag, or the like composed of an IC chip and a transmission / reception conductive coil connected to the IC chip can be used.

  The sticking device 1 includes a support device 2 that supports the adhesive sheet AS so that the adhesive sheet AS can be fed, a feeding unit 3 that feeds the adhesive sheet AS, a pressing unit 4 that presses and sticks the fed adhesive sheet AS to the wafer WF, and a wafer. A moving means 5 for relatively moving the WF and the pressing means 4 is provided, and the overall operation is controlled by a control means 6 such as a personal computer or a sequencer.

The support device 2 includes a frame 21 and a support portion 22 provided on the frame 21.
The feeding means 3 is entirely supported by the frame 21, and peels off the adhesive sheet AS from the release sheet RL by folding back the release sheet RL of the original fabric RS and the guide rollers 32 and 33 that guide the original fabric RS. The release sheet RL is formed by a plate 34, a drive roller 36 driven by a rotation motor 35 as a drive device, a pinch roller 37 that sandwiches the release sheet RL between the drive roller 36, and a rotation motor 39 as a drive device. And a collection roller 38 for collection.
The pressing means 4 is made of an elastically deformable member such as rubber or resin, and is rotatably supported by a support member (not shown).
The moving means 5 includes a table 51 on which a wafer WF is placed and can hold the wafer WF by suction holding means (not shown) such as a decompression pump and a vacuum ejector, and a driving device in which a slider 52 is fixed to the lower surface of the table 51. The table 51 can be moved in the left-right direction by sliding the slider 52.

  As shown in FIGS. 2 and 3, the support portion 22 has a base end portion 221E and a tip end portion 221T, and one end side (left side in FIG. 3) of the hollow portion of the shaft core member 23 from the tip end portion 221T side. By inserting, a columnar support shaft 221 that supports the shaft member 23, and an inner guide plate 222 that restricts the movement of the shaft member 23 inserted into the support shaft 221 in the left direction in FIG. It has. The support shaft 221 passes through a through hole 21A formed in the frame 21 on the base end 221E side, and is rotatably supported by a rotary bearing BC provided on the other surface (the left surface in FIG. 3). Yes.

  The distal end portion 221T of the support shaft 221 is provided with a breaking means 24 that is formed so as to protrude in the direction of the axis CE of the support shaft 221, and a thin shaft portion 25.

  The breaking means 24 is provided in a shape along the outer edge of the tip surface 221C in the tip portion 221T, and is formed in a shape capable of breaking the data carrier 29 provided on one end side of the shaft core member 23.

The thin shaft portion 25 has a columnar shape that is thinner than the support shaft 221, and its axis is provided so as to coincide with the axis CE of the support shaft 221, so that the guide means 26 is detachably supported. The guide means 26 includes a boss 263 having an insertion hole 261 through which the thin shaft portion 25 can be inserted, a clamper 262 as a fixing means that is screwed to the boss 263 and restricts the movement of the boss 263 by tightening, and a boss 263. And an outer guide plate 264 attached thereto.
The outer guide plate 264 is provided in a plane perpendicular to the axis CG of the insertion hole 261 of the boss 263, and is opposite to the inner guide surface 265 (left surface in FIG. 3) facing the shaft core member 23 and the inner guide surface 265. A loop antenna 27 is provided on the outer guide surface 266 so as to surround the boss 263. The loop antenna 27 is provided with an outer guide surface 266 (right surface in FIG. 3) that is a side surface.

  The boss 263 is provided with wireless communication means 28 connected to the loop antenna 27 by a conductor 281. This wireless communication means 28 is based on the reader / writer 7 that can read data stored in the data carrier 29 and write data to the data carrier 29 based on control by the control means 6, and by infrared rays, radio waves, magnetic force, etc. Provided so that wireless communication is possible, and has a function of wirelessly transmitting data received or read by the loop antenna 27 from the data carrier 29 to the reader / writer 7 and a function of transmitting a signal wirelessly received from the reader / writer 7 to the loop antenna 27. ing.

  The data communicated between the data carrier 29 and the loop antenna 27 includes the type, material, product name, code, thickness, length, width, diameter, and other standard dimensions of the adhesive sheet AS, Lot number, length using the original fabric RS, remaining length of the original fabric RS, quality assurance period of the adhesive sheet AS, remaining number of adhesive sheets AS before and after the start of feeding, the number of fed adhesive sheets AS, adhesion Consultation on the recommended feeding speed at which the sheet AS can be optimally delivered, the application conditions for the adhesive sheet AS such as the recommended application tension and the recommended pressing force at which the adhesive sheet AS can be optimally applied, the adhesive sheet AS and the raw material RS The contact information of the window can be exemplified. And the data read from the data carrier 29 can be displayed on the monitor which is not shown in figure provided in the sticking apparatus 1, and the sticking conditions of the said sticking apparatus 1 can be set based on the read data. A protective member for protecting the loop antenna 27 may be provided so as to cover the loop antenna 27.

  In the pasting device 1 described above, when the adhesive sheet AS is pasted on the wafer WF, first, the original fabric RS wound around the shaft core member 23 is supported by the support shaft 221. At this time, since the support shaft 221 includes the breaking means 24, the data carrier 29A provided on one end side of the shaft core member 23 in the data carrier 29 can be broken. When the shaft core member 23 is inserted into the support shaft 221, the axis CF of the shaft core member 23 becomes parallel to the axis CE of the support shaft 221.

Next, when the thin shaft portion 25 is inserted into the insertion hole 261 of the boss 263 and tightened and attached by the clamper 262, the axial center CG of the insertion hole 261 becomes parallel to the axis CE of the support shaft 221, and the shaft core is extended. The axis CF of the member 23 and the axis CG of the insertion hole 261 are parallel. Therefore, the data carrier 29B provided in a plane orthogonal to the axes CF and CG and the loop antenna 27 face each other. Thereby, it is possible to maintain the positional relationship in which the data carrier 29B and the loop antenna 27 face each other regardless of the position around the axis CE of the support shaft 221. In addition, it is possible to prevent the data carrier 29B from being displaced in the direction of the axis CE with respect to the loop antenna 27 and to prevent the data carrier 29B from communicating with each other, so that the communication distance can be reliably maintained.
Note that the data carrier 29A broken by the breaking means 24 enters into the gap between the inner wall of the shaft core member 23 and the support shaft 221, and does not face the loop antenna 27. There is no communication (interference) with the two data carriers 29A and 29B.

  Thereafter, the moving means 5 drives the single-axis robot 53 to carry the table 51 leftward, and when the detecting means such as an optical sensor (not shown) detects that the wafer WF has reached a predetermined position, the feeding means. 3 drives the rotation motors 35 and 39 to feed out the adhesive sheet AS, and the pressing means 4 presses and adheres the adhesive sheet AS to the transferred wafer WF.

Here, the control means 6 controls the reader / writer 7 before starting the pasting and transmits a signal to the wireless communication means 28. The wireless communication means 28 that has received the signal generates a transmission means such as magnetic flux, static electricity, or microwave by causing a current to flow through the loop antenna 27 based on the signal, and generates an electromotive force via the conductive coil of the data carrier 29. The data written in the data carrier 29B is read, and this data is transmitted to the reader / writer 7 by wireless communication. The control means 6 controls the entire pasting apparatus 1 based on the data received by the reader / writer 7. This control is performed, for example, based on the recommended feeding speed of the adhesive sheet AS in the data written on the data carrier 29B, and the table 51 is moved by the rotation speed of the rotation motors 35 and 39 or the single-axis robot 53. It is possible to set the pressing force by determining the moving speed, or by determining the lifting / lowering amount of a linear motion motor (not shown) that lifts and lowers the pressing means 4 based on the recommended pressing force, the torque applied to the output shaft, etc. it can.
At this time, since the loop antenna 27 and the conductive coil of the data carrier 29B are opposed to each other, the conductive coil can be always present at the passing position of the transmission means generated by the loop antenna 27. Can efficiently generate electromotive force in the conductive coil via the loop antenna 27 and reliably read the data written in the IC chip of the data carrier 29B.

  Further, the control means 6 controls the reader / writer 7 during rotation of the shaft core member 23 after the start of sticking, and generates a transmission means for the loop antenna 27 via the wireless communication means 28. Can also be written to the data carrier 29B. Even when the shaft core member 23 is rotating as described above, the conductive coil of the data carrier 29B is always present at the passing position of the transmission means of the loop antenna 27, and the reader / writer 7 is connected to the loop antenna 27. Thus, the electromotive force can be efficiently generated in the conductive coil via the, and the data can be reliably written to the chip of the data carrier 29B. Examples of data to be written at this time include the number of sheets using the adhesive sheet AS, the length using the original fabric RS, and the like.

Further, since the reader / writer 7 can communicate with the loop antenna 27 via the wireless communication means 28, it is not necessary to perform wiring taking into account the rotation of the loop antenna 27, and the labor of wiring can be saved and the reader / writer 7 can be connected to the wireless communication means. As long as it is a place where wireless communication with 28 is possible, it can be installed in any place.
When the adhesive sheet AS is pasted on the predetermined number of wafers WF, the reader / writer 7 can be controlled to write data to the data carrier 29B. As data to be written at this time, for example, the remaining number of adhesive sheets AS after the start of feeding obtained by subtracting the number of sheets using the adhesive sheet AS from the remaining number of adhesive sheets AS before the start of feeding, or the remaining length of the original fabric RS Examples of this can be given. The number of used adhesive sheets AS can be calculated based on the number of times the rotation motor 35 is activated, the number of times detected by a detection means (not shown) that detects that the wafer WF has reached a predetermined position, and the like. The length using the anti-RS can be calculated based on the number of rotations, pulses, and the like of the rotation motor 35. In this way, for example, when changing to another original fabric RS before the entire adhesive sheet AS in one original fabric RS is used, data is written to the data carrier 29B of the first original fabric RS. Thus, when the original material RS is used again, it can be immediately handled by reading the data in the same manner as described above. Further, the stock of the original fabric RS can be managed by transmitting the remaining number of the adhesive sheets AS stored in the data carrier 29B to an external computer (not shown).

  According to the present embodiment as described above, as long as the shaft core member 23 is inserted into the support shaft 221 and the outer guide plate 264 is fixed to the thin shaft portion 25, the data carrier 29B and the loop antenna 27 are securely connected. Since it can be made to oppose, it becomes unnecessary to perform the exact alignment for performing communication with the data carrier 29B and the loop antenna 27 appropriately like the past.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

For example, the loop antenna 27 may be provided between the boss 263 and the outer guide plate 264.
Further, the loop antenna 27 may be formed at a position that does not surround the thin shaft portion 25.
Further, the outer guide plate 264 is made of a material capable of shielding radio waves and electromagnetic waves used for communication between the wireless communication means 28 and the reader / writer 7 and electromagnetic waves used for communication between the loop antenna 27 and the data carrier 29B. Thus, the communication can be performed more appropriately without interfering with each other.

  Further, the support shaft 221 may be provided so as not to rotate with respect to the frame 21, and the shaft core member 23 may rotate with respect to the support shaft 221.

The shape of the breaking means 24 is not particularly limited as long as the data carrier 29 can be broken, and other shapes than those shown in FIGS. 2 and 3 can be used.
Furthermore, a rotation motor as a driving device may be connected to the base end portion 221E of the support shaft 221 so that the support shaft 221 itself rotates.
Moreover, in the said embodiment, although the case where the raw fabric RS wound by the axial core member 23 was supported as the support apparatus 2 so that supply was possible was illustrated, as the support apparatus 2, various long bodies are used for the axial core member 27. For example, a configuration in which the shaft core member 23 is fixed to the collection roller 38 of the embodiment and the release sheet RL is wound up can be exemplified.
Furthermore, the data carrier 29 may be disposed only on the other end side of the shaft core member 23, or one or more data carriers 29 may be disposed on each end surface 231.
The data carrier 29 may be one that can only store data, or one that can only transmit data. For example, the data carrier 29 may be a bar code, a QR code (registered trademark), or a magnetic sheet. Good. At this time, instead of the loop antenna 27, a communication unit may be provided with a reader capable of reading a barcode or QR code. In the case of a magnetic sheet, a magnetic field is generated to magnetize the magnetic material and write data. A so-called magnetic head that reads out data by detecting a change in the magnetic field may be used. If the amount of information to be stored is small, such as a barcode or QR code, a code that can be accessed by a higher-level control means such as a higher-level computer is stored in these codes, and the higher-level control means performs the same as described above. The data may be received.
Further, the data carrier 29 may have a round shape, a triangular shape, a quadrangular shape, or the like in addition to the D shape, or a shape that covers all the openings in the end surface 231 and is attached with a guide means. It may have a hole that can be used.

Further, the loop antenna 27 and the data carrier 29 may be provided in a slightly curved surface or a bent surface. In short, even if the loop antenna 27 and the data carrier 29 face each other and the data carrier 29 is displaced about the axis CE of the support shaft 221, it is only necessary to maintain the facing positional relationship between them.
In the above-described embodiment, the example in which the data carrier 29 is provided in the plane orthogonal to the axis CF of the shaft core member 23 is described. However, the shaft core member 23 is tilted 60 degrees with respect to the axis CF. Even in the case where it is provided, it has been proved that it is possible to communicate with the loop antenna 27 provided on the tip surface 221C perpendicular to the axis CE of the support shaft 221.
Further, even when the barcode is provided on the shaft core member 23 in a state inclined by 30 degrees with respect to the axis CF (pitch angle 30 degrees), a reading surface is provided on the front end surface 221C perpendicular to the axis CE of the support shaft 221. It was proved that it was possible to communicate with a bar code reader. In the case of the QR code, it was proved that communication was possible at the same angle of 65 degrees (pitch angle 65 degrees).

In the embodiment, the example in which the loop antenna 27 is provided on the tip surface 221C orthogonal to the axis CE of the support shaft 221 is described. However, the support shaft is tilted 60 degrees with respect to the axis CE. Even when it is provided at 221, it was proved that communication with the data carrier 29 provided in the plane perpendicular to the axis CF of the shaft core member 23 was possible.
Further, even when the reading surface of the barcode reader is provided on the support shaft 221 in a state where the reading surface is inclined by 30 degrees with respect to the axis CE, the barcode reader can communicate with the barcode provided in the plane perpendicular to the axis CF of the shaft core member 23. Was proved (pitch angle 30 degrees). In the case of the QR code, it was proved that communication was possible at the same angle of 65 degrees (pitch angle 65 degrees).

  Further, the long body is not limited to the raw fabric RS, and may be a belt-like adhesive sheet, paper, cloth, steel plate, belt, resin, wood board, etc., and a long thread, string, wire, cord, A tube, a hose, etc. may be sufficient.

Furthermore, the type and material of the adhesive sheet AS in the present invention are not particularly limited. For example, the adhesive sheet AS has an intermediate layer between the base sheet BS and the adhesive layer AD, or has three other layers. The above may be used. The adhesive sheet AS may be a protective sheet, a dicing tape, a die attach film, or the like. Examples of the semiconductor wafer include a silicon semiconductor wafer and a compound semiconductor wafer. The adhesive sheet to be attached to such a semiconductor wafer is not limited to a protective sheet, a dicing tape, and a die attach film, but any other sheet, film, or tape. An adhesive sheet having an arbitrary use and shape can be applied. Further, the plate member may be an optical disk substrate, and the adhesive sheet may have a resin layer constituting the recording layer. As described above, as a plate-like member, not only a glass plate, a steel plate, a resin plate, and other members, but also members and articles of any form can be targeted.
Further, the pressing means 4 may be composed of other than those shown in the above embodiment, and the pressing means 4 is not limited in any way as long as an adhesive sheet can be attached to a plate-like member. A pressing member made of a material, air spray, rubber, resin, sponge or the like can be employed.

  The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

2 ... support device 21 ... frame 24 ... breaking means 26 ... guide means 27 ... loop antenna (communication part)
28 ... wireless communication means 29 (29A, 29B) ... data carrier 221 ... support shaft 221E ... base end 221T ... tip end CE, CF, CG ... axis RS ... original fabric (long body)

Claims (3)

In a long body support device that supports a long body wound around a hollow cylindrical shaft core member so that the long body can be drawn out, or supports a long body wound around a hollow cylindrical shaft core member,
A support shaft that has a proximal end portion and a distal end portion, and supports the shaft core member by inserting one end side of the hollow portion of the shaft core member from the distal end portion side;
A frame that supports the support shaft from the base end side;
A guide means that is detachably provided at the distal end portion of the support shaft, and capable of positioning the shaft core member by being attached to the distal end portion;
The shaft core member is provided with a data carrier capable of at least one of storing and transmitting predetermined data in a plane that intersects the axis of the shaft core member on the other end side of the hollow portion.
The guide means is provided with a communication unit that is arranged to face the data carrier and is communicable with the data carrier when fixed to the tip of the support shaft. Body support device.   The said guide means is provided with the radio | wireless communication means which can carry out the radio | wireless communication of the data memorize | stored in the said data carrier, and the data which the said communication part received or read from the said data carrier. Long body support device. In a long body support method for supporting a long body wound around a hollow cylindrical shaft core member so that the long body can be drawn out or supported on a hollow cylindrical shaft core member so that the long body can be wound up,
A shaft core member provided with a data carrier capable of at least one of storing and transmitting predetermined data in a plane intersecting the axis of the shaft core member on the other end side of the hollow portion of the shaft core member. A process to prepare;
Inserting one end side of the hollow portion in the shaft core member from the tip end side of the support shaft to support the shaft core member;
Attaching the guide means capable of positioning the shaft core member to the distal end portion of the support shaft, and supporting the communication section provided in the guide means and the data carrier opposite to each other;
And a step of performing communication between the communication unit and the data carrier.

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