JP2013110185A - Substrate holding frame body and method of conveying substrate holding frame body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate holding frame body or the like capable of safely storing and transporting a large-size substrate of about two meters square, because the substrate holding frame body is used for conveyance or storage in such a state that a large-size glass substrate is placed thereon and a plurality of substrate holding frame bodies are stacked, and is thus required to prevent the adhesion of foreign matter to the substrate caused by the generation of dust and the occurrence of product quality failure by scratches as well as to have a strength against impact and vibration during conveyance.SOLUTION: On respective upper surfaces of at least two opposite sides of a metal frame part 11, a plurality of openings 17 are provided which are used for suspending a substrate holding frame body 10.

Description

In the present invention, a rigid (flexible) rectangular (quadrangle) substrate is placed one by one on a substrate support plate provided on the inner periphery of a rectangular substrate holding frame, and the substrate is placed thereon. The present invention relates to a substrate holding frame for use in storing and transporting substrate holding frames in multiple stages in a stacked manner and a method for transporting the substrate holding frame.
An example of the substrate is a thin glass substrate, and in particular, a plasma display, an organic EL display, a color filter substrate for a liquid crystal display device, an intermediate product thereof, and other various substrates can be exemplified. These large substrates are easy to bend, and if only the four peripheral edges are supported, they will be slightly curved downwards, but they will not be in contact with each other when stacked in multiple stages, and they will be stacked at a high density. There is a need to. Furthermore, it is necessary to protect the substrate from damage and cracking due to vibration during transportation and storage, and it is also necessary to prevent dust contamination and contamination.

The substrate transportation and storage described above uses the substrate holding frame, the inner pallet that receives the lower surface of the entire substrate holding frame stacked in multiple stages, and the anti-vibration pallet used for the bottom stage. An upper lid, a cover and the like for protecting the upper surface and the periphery of the frame body are required.
The present invention relates to a substrate holding frame body among these transport / storage devices, and in particular, grips a handle portion and an engaging portion projecting from the left and right sides of the frame body as in the prior art. The present invention relates to a substrate holding frame that takes into consideration that it can be transported regardless of the method, and a transport method thereof.

It is important that a substrate used for a color filter for a liquid crystal display, a plasma display, an organic EL display, etc. be transported and stored without being damaged or soiled. When transporting such a plate-like object, it is necessary to store in parallel at a predetermined interval so that the substrates do not contact each other.
However, flat panel display products represented by these liquid crystal display, plasma display, and organic EL display are manufactured in a multi-faceted state, even if the display device itself is upsized, even if it is a small size product. For this reason, the substrate used and its intermediate products have been increased in size, and when the size is about 1 meter square, even if a 0.7 mm thick glass substrate supports two or four sides facing each other, It is inevitable that the intermediate portion is bent downward (gravity direction) by 100 mm or more. Substrates are required to have a size of 2 square meters or more, and it is necessary to store and handle such substrates with high density and safety due to problems of storage space and handling equipment.

  Patent Document 1 relates to a substrate storage tray used for transporting a substrate such as a glass substrate for display, etc., and is described in paragraph (0057) (the frame main body portion 12c includes an upper surface engaging portion 12d and At substantially the same height position, an outwardly projecting flange portion 12f opposite to the upper surface engaging portion 12d is provided over the entire longitudinal frame portion 12a and the width direction frame portion 12b. 12f is used for chucking by a chucking device or the like when the substrate storage tray 10 is transported in a horizontal state, and for engaging the claw portion, etc.) The engaging part which protruded to the periphery outer side is provided.

  Patent Document 2 is a substrate storage tray used for transporting a substrate such as a glass substrate for display, as described in paragraph (0036). 3 is projected. The trays are handled and held by the engagement hooks 3 and 3.

In Patent Document 3, as described in paragraph (0051), F is an outer casing projecting outside the frame frame 2 four sides 2A, 2B, 2C, 2D. It is used to lock the locking claws when transferring on the conveyor of the production line or stacking when transporting and storing the tray T.
As described above, conventionally, the frame body is generally handled by providing an engaging portion that protrudes to the outside of the frame body.

Japanese Patent No. 4215622 JP 2010-137933 A JP 2010-120690 A

Although not described in the prior literature, the related technology prior to the present application will be described.
FIG. 17 shows a general form of a conventional substrate holding frame. The substrate holding frame 10 is constructed by assembling a metal frame having a hollow structure with a rectangular cross section into a rectangular-shaped metal frame portion 11 including left and right sides 11a and 11b and front and rear sides 11c and 11d. Has been. The four corners of the metal frame 11 are joined by a corner piece 16. In some cases, the entire frame is flat, but the center of the front and rear sides 11c, 11d is often curved downward.

A substrate support plate 13 extends inward from the four-round metal frame portion 11, and the thin plate substrate is placed so that the periphery of the thin plate substrate is applied to the surface of the substrate support plate 13. A region K surrounded by the substrate support plate 13 is an empty space region. A fitting portion 12 for aligning the upper and lower frame bodies is formed between the metal frame portion 11 and the substrate support plate 13. The fitting part 12 is formed on the front and back surfaces of the frame. In FIG. 17, only the front-side fitting portion (first fitting portion 12a) is shown.
On the left and right sides (generally, the side on which the long side of the substrate is placed), a handle portion 15 is formed, which serves as a grip portion when the substrate holding frame is transported by a robot.

FIG. 18 is a view showing a packaging state of a conventional substrate holding frame.
The substrate is placed on the substrate holding frame 10 to form a multi-stage stack 100 of 100 to 150 steps, the upper cover 21 is covered on the upper surface, the inner pallet 30 is applied to the lower step, the belt 23 is bound, and the vibration proof pallet 40 is further attached. Generally, it is transported in a packed state.

FIG. 16 is a diagram illustrating a conventional method for transporting a substrate holding frame. Although only one side of the transport device is shown, there is also a pair of mechanisms on the other side that operate in the same way. Moreover, although the state which mounted substrate A1, A2, and A3 is shown, it is the same also when not mounting a substrate.
First, as shown in FIGS. 16A and 16B, the cylinder 51 that is a suspension mechanism of the frame body transfer device 50 is lowered. Next, as shown in FIG. 16C, the hook portion 52 of the cylinder 51 is inserted into the lower surface of the handle portion 15 of the frame body 10. If the cylinder 51 is raised in this state, the hooking portion 52 and the handle portion 15 are engaged, and the substrate holding frame 10 can be conveyed in this state (FIG. 16D).

Substrates used in various flat panel displays typified by liquid crystal display, plasma display and organic EL display are 6th generation (1850 * 1500 mm), 7th generation (2200 * 1900 mm), 8th generation (2500 * 2200 mm). As a result, the added value of one substrate is increasing.
Accordingly, handling of the substrate in the manufacturing process as well as handling and transporting of the substrate between the processes so as not to have foreign matters or scratches has become more important than ever.
When transporting a glass-only substrate that does not have a functional layer such as a color filter layer, it is packed with interleaving paper or foam between the substrates so that the substrates do not directly contact each other. When transporting and storing substrates of high value-added products such as color filters with functional layers, it is desirable to prevent slippage and foaming materials from coming into contact as much as possible to prevent scratches and impurity contamination on the surface of the functional layers. In order to prevent damage to the substrate due to impact and vibration at the time, the substrate is placed on a strong frame body one by one, and the frame body on which the substrate is placed is stacked and transported without the upper and lower substrates in contact with each other The method is common.

In the method of stacking and transporting the frames on which the substrates are placed in this way, when taking out the frames on which the substrates are stacked and stacked in multiple stages one by one, the robot hand moves the frame from both sides of the frame. And hold and move the frame. On both side surfaces of the frame on which the substrate is placed, a handle 15 that is gripped and held by the robot hand is attached so as to protrude outward from the frame.
In order to increase the loading efficiency of the substrates, the frames are devised to be stacked at a high density, and the interval between the frames stacked on the G6 (6th generation) size substrate can be reduced to about 10 mm. Along with this, the interval between the handle portions 15 protruding to the outer periphery is similarly reduced.
Therefore, the tolerance for gripping the protruding handle 15 on both side surfaces of the frame on which the robot hands are stacked becomes narrow, and even slight deformation of the handle 15 results in poor gripping.
Since the hand grip portion 15 held by the robot hand extends outward from the outer peripheral frame, deformation may occur due to contact during conveyance, which may cause a grip failure due to the robot hand. The present invention is intended to solve such a grip failure.

Another problem is that the size and weight of the substrate holding frame has increased with the increase in size of the substrate, and the robot, storage device, unpacking device, and packing device used for stacking and taking out the frame have also become larger. There is a demand for space saving from the viewpoint of location.
In addition, reduction of the frame width size has become an important issue from the viewpoint of storing the stacked packages in a container used for truck transportation or sea transportation.
The transportation mode of the substrate is that a stack of frames stacked on a pallet with sufficient strength that can mount a heavy-weight material frame holding the substrate, a lid placed on top and fixed with a belt or the like is being transported. It is in a state where the whole is covered with a cover that is placed on a vibration isolator that reduces vibration.

  Taking a G6 size substrate as an example, the substrate size is 1850 * 1500 mm, the frame size on which the substrate is placed is 1970 * 1670 mm, and the lid size to be placed on the top surface is 1979 * 1670 mm. The size of the pallet on which the body is placed is 1998 * 1698 mm, and the size of the anti-vibration table on which all of these are placed is 2008 * 1708 mm, which is about 200 mm larger than the substrate size in the horizontal direction.

On the other hand, containers used for transportation are sized according to ISO (International Organization for Standardization) standards in order to realize efficient cargo handling at ports around the world. 20 feet, 40 feet, and 45 feet containers are used, but in Japan, 40 feet containers are generally used because 45 feet containers are too large to be loaded on a trailer.
A 40-foot container will be length (12.2m) x width 8ft (2.438m).
In a typical container, the outer dimension in the width direction is 2,438 mm (8 feet), and the inner dimension in the width direction is about 2,346 to 2,352 mm.
The board size is 2200 * 1900mm for the G7 size and 2500 * 2200mm for the G8 size, and the pallet size of these packages is estimated to exceed 2400mm when the width direction is 2100mm or more. Storage becomes difficult in the width direction.
The present invention is also intended to solve the problem of such handling.

  In a first embodiment of the substrate holding frame of the present invention, a metal frame portion having a rectangular shape in plan view composed of flat front and rear metal frames having a hollow structure with a rectangular cross section is provided in the metal frame portion. A substrate holding frame configured to include a substrate support plate extending inward along the frame, and a fitting portion formed at a boundary portion between the metal frame portion and the substrate support plate, at least A plurality of openings for suspending the substrate holding frame body are provided on the upper surfaces of the two opposite metal frame portions.

  The second form of the substrate holding frame of the present invention is a rectangular in plan view composed of flat left and right metal frames which are hollow structures having a rectangular cross section and front and rear metal frames whose central portion is curved downward. The metal frame portion having a shape includes a substrate support plate extending inward of the frame along the metal frame portion, and a fitting portion formed at a boundary portion between the metal frame portion and the substrate support plate. A substrate holding frame having a plurality of openings for suspending the substrate holding frame on at least upper surfaces of two opposing metal frame portions. is there.

  A third form of the substrate holding frame of the present invention is the first and second substrate holding frame, wherein the opening is a cylinder that is a suspension mechanism of a frame transfer device having a hook at the tip. It is an opening through which the tip passes, and the horizontal opening width of the opening is different in at least two orthogonal directions, and the inner upper surface of the hollow metal frame portion has a structure that engages with the hook portion. It is what.

  A fourth form of the substrate holding frame of the present invention is the first and second substrate holding frame, wherein the opening is a cylinder that is a suspension mechanism of a frame transfer device having a hook at the tip. A wide portion that can pass through the tip at a predetermined position, and a narrow portion that engages the upper surface of the metal frame inside the metal frame opening when the suspension device is raised. It is a feature.

  A fifth embodiment of the substrate holding frame of the present invention is the first and second substrate holding frames, wherein the opening is a suspension tip of a frame transfer device having a hook at the tip. It is either a square shape or a circular shape that can be passed through.

  In the first mode of transporting the substrate holding frame of the present invention, the first, second, and third substrate holding frame members have a hooking portion having a shape that can be fitted into the opening at the tip of the opening. After the cylinder tip, which is a suspension mechanism of the frame transfer device having a lowering position, is inserted and the hooking portion is inserted, the hooking portion rotates horizontally in the opening. After the engagement state in which it cannot escape vertically upward from the opening, the suspension mechanism is raised, and the substrate holding frame is moved while maintaining the engagement state.

  The second form of transporting the substrate holding frame of the present invention is a hooking portion having a shape that can be fitted into the opening at the tip in the opening of the first, second, and fourth substrate holding frames. After the tip of the cylinder, which is a suspension mechanism of the frame transfer device having a lowering position, is inserted and the hook is inserted, the hook moves horizontally within the opening by a predetermined distance in the length direction of the metal frame. Then, after the hooking portion is brought into an engaged state in which it cannot escape vertically upward from the opening, the suspension mechanism is lifted to move the substrate holding frame while maintaining the engaged state. To do.

  In the third mode of transporting the substrate holding frame according to the present invention, the first, second, third, fourth, and fifth substrate holding frames are provided in the opening at the tip and initially at the opening. After the cylinder tip, which is a suspension mechanism of a frame body transfer device having a hook portion that has a hook portion that can be expanded in the horizontal direction after being fitted, is lowered and inserted, the hook portion is inserted. Is enlarged within the opening, and the enlargement causes the hooking portion to be in an engagement state in which it cannot escape vertically upward from the opening portion, and then the suspension mechanism is lifted to maintain the engagement state and the substrate. The holding frame is moved.

  In this claim, the suspension is an operation of pulling upward in a state in which the substrate holding frame is engaged at the tip of the cylinder. Further, the suspension mechanism is a device including a robot hand of the frame body transfer device, a cylinder attached to the robot hand, and a hook portion of the tip of the cylinder.

  Conventionally, the handle portion 15 gripped by the robot hand extends outward from the metal frame portion, so that deformation may occur due to contact during transportation, which may cause gripping failure by the robot hand. there were. However, as in the present application, by providing an opening on the upper surface of the metal frame portion having a hollow structure, there is no need to provide a handle portion extending outward from the metal frame body. The frame body hardly deforms, and the suspension mechanism of the frame body transfer device is lowered from the upper surface of the substrate holding frame body, and the hooking portion is inserted into the metal frame portion, and then engaged with the substrate holding frame body. Thus, the substrate holding frame body is suspended and conveyed, so that it is possible to prevent the occurrence of poor gripping of the frame body by the robot hand.

It is a top view which shows the frame for board | substrate holding | maintenance. It is a general view which shows the opening part arrangement | positioning relationship and suspension part of the frame for board | substrate holding | maintenance. It is a figure which shows the operation | movement which suspends the frame for board | substrate holding | stacked by the frame body transfer apparatus laminated | stacked in multiple stages. It is sectional drawing which shows the operation | movement which suspends the board | substrate holding frame. It is a figure which shows the operation | movement to which the board | substrate holding frame body engages 1st. It is a figure which shows engagement with the opening part and hook part of a 1st conveyance form of a board | substrate holding frame. It is a figure which shows engagement with the opening part and hook part of the 2nd conveyance form of a board | substrate holding frame. It is a figure which shows operation | movement of the robot hand of the 2nd conveyance form of a board | substrate holding frame. It is a figure which shows the operation | movement which suspends by the 2nd conveyance form in which a cylinder moves to the width direction and engages the frame body for board | substrate holding | stacked by the frame body transfer apparatus in multiple stages. It is a figure which shows the operation | movement which suspends with the 2nd conveyance form which a cylinder moves to a length direction and engages the frame for board | substrate holding | stacked by which the frame body transfer apparatus was laminated | stacked in multiple stages. It is a figure which shows the specific example of the shape of the opening part of the 2nd conveyance form of a board | substrate holding frame. It is a figure which shows the 3rd conveyance form of a board | substrate holding frame. It is a figure which shows the engagement method of the 3rd conveyance form of the board | substrate holding frame. It is a figure which shows the other method of engagement of the 3rd conveyance form of a board | substrate holding frame. It is a conveyance form of the curved substrate holding frame. It is a figure which shows the conveyance form of the conventional frame for board | substrate holding | maintenance. It is a figure which shows the general form of the conventional board | substrate holding frame. It is a figure which shows the packing state of the conventional board | substrate holding frame.

Hereinafter, first, the substrate holding frame 10 will be described with reference to the drawings.
As shown in FIG. 1, the substrate holding frame 10 is assembled in a rectangular shape in plan view by connecting metal frame portions 11 a, 11 b, 11 c, and 11 d each having a rectangular cross section with a corner piece 16. A substrate support plate 13 in which the metal frame portion 11 extends inward of the frame along the metal frame portion 11, and a fitting portion 12 formed at a boundary portion between the metal frame portion 11 and the substrate support plate 13. It is configured to have. The shape up to this point is the same as the conventional substrate holding frame described with reference to FIG.

The substrate holding frame 10 of the present invention is characterized by the fact that the height of the one-step frame is 10 to 20 mm, preferably 10 to 15 mm, and the substrate holding frame. A plurality of openings 17 for suspending the substrate holding frame body 10 are provided on the upper surfaces of the metal frame sections 11 on at least two sides of the body 10 facing each other. A plurality is a range of 2 to 5 on one side.
The reason for forming the substrate holding frame 10 at a low height is to increase the substrate loading density of the multi-stage stack of frames, and the reason why the openings 17 are provided is to reduce the volume of the package as described above. This is to make it possible to transport the frame 10 that does not include the handle 15.

There are two basic forms of the substrate holding frame, a first form and a second form.
The first form (claim 1) of the substrate holding frame 10 is such that the metal frames 11a, 11b, 11c, and 11d on the four sides of the front, rear, left and right are flat, In the second embodiment (claim 2), the left and right metal frame portions 11a and 11b are flat, but the front and rear metal frame portions 11c and 11d have a shape in which the central portion is curved downward.
Each form has an opening 17 for hanging the frame 10 on the metal frame 11 on two sides facing each other. As shown in FIG. 2A, the openings are arranged at one central portion of one side of the metal frame portion 11 and at two locations on both sides at equal intervals from the central portion. The reason why the metal frame 11 is arranged in the center is to reduce the bending of the center when the metal frame 11 is suspended. In addition, when a large substrate is supported and there is bending when suspended, it is also possible to interpolate and arrange openings. In addition, as shown in FIG. 2B, two openings may be arranged near the ends of one side of the metal frame 11 as shown in FIG. 2B, and two more may be arranged inside if necessary. Is possible.

In the first form and the second form of the substrate holding frame 10, there are three types of transfer forms depending on the engagement method with the hooking portion 52 at the tip of the cylinder 51 which is a suspension mechanism of the frame transfer device 50. There are three types of configurations that limit and define the shape of the opening corresponding to.
The cylinder 51 includes the cylinder 51 and a hook 52 at the tip of the cylinder 51.
The substrate holding frame 10 (Claim 3) corresponding to the first transport mode is an opening through which the shape of the opening 17 passes the tip of a cylinder 51 having a hooking portion 52, and the horizontal opening of the opening The width is different in at least two orthogonal directions, and the inner upper surface of the hollow metal frame portion 11 has a structure that engages with the hook portion 52.
The substrate holding frame 10 corresponding to the second transport mode (Claim 4) includes a wide portion in which the shape of the opening 17 can pass the tip of a cylinder 51 having a hooking portion 52, and a suspension device. When rising, the hook portion 52 has a narrow width portion that engages with the upper surface of the metal frame inside the opening 17 of the metal frame portion 11.
The substrate holding frame 10 corresponding to the third transport mode (Claim 5) has an opening shape corresponding to the first transport mode or the second transport mode in which the shape of the opening 17 corresponds to the first transport mode. Or it is either square shape or circular shape which can let the cylinder 51 tip which has the hook part 52 pass.

Next, the conveyance mode of the substrate holding frame of the present invention will be described.
Initially, with reference to FIG. 4, the basic conveyance method of the board | substrate holding frame is demonstrated.
First, as shown in FIG. 4A, the tip of a cylinder 51 serving as a suspension mechanism of the frame body transfer device stands by above the opening 17 formed in the metal frame portion 11 of the frame body 10. A hook 52 is attached to the tip of the cylinder 51. Next, as shown in FIG. 4B, the cylinder 51 is lowered and the hook 52 is inserted into the opening 17. Thereafter, as shown in FIG. 4C, the cylinder 51 is rotated, the hook 52 is horizontally moved, or the hook 52 is enlarged in the opening 17 so that the hook 52 is removed from the opening. Engage so that it cannot escape vertically upward.
In this state, as shown in FIG. 4D, when the cylinder 51 is raised, the substrate holding frame 10 is transported with the movement of the transfer device while maintaining the engaged state.

FIG. 3 is a diagram illustrating an operation in which the frame transport apparatus suspends the substrate holding frames stacked in multiple stages. The same operation as in FIG. 4 is performed. FIG. 4 shows the suspension operation on one side, while FIG. 3 shows the operation on both sides. Naturally, the left and right operate in parallel.
Hereinafter, each form for the frame body transfer device to suspend the substrate holding frame body 10 will be sequentially described in combination with a specific shape of the opening 17 and an engagement method.
In the following first conveyance mode, the hooking portion at the tip of the cylinder rotates and engages horizontally, and in the second conveyance mode, the hooking portion moves horizontally in the length direction of the frame. The third transport mode is a mode in which the hooking portion is enlarged and engaged in the opening.

In the first transport mode of the present invention, as shown in FIG. 1, an opening 17 is formed in the metal frame portions 11a and 11b opposed to the substrate holding frame 10 at one central portion and the center of each metal frame portion. One or more portions are provided in both end directions at equal intervals from the portion. In FIG. 1, the metal frame portions 11a and 11b have three openings 17 in the metal frame portions 11a and 11b, respectively.
FIG. 2 is a conceptual diagram in which a cylinder 51 provided with a hooking portion 52 at the tip of the suspension mechanism is engaged with the opening 17 of the metal frame portion 11. The opening portion 17 has an opening shape through which the hook portion 52 at the tip of the cylinder 51 which is a suspension mechanism of the frame body transfer device 50 is passed.
As shown in FIG. 7, the shape of the opening 17 is different in at least two orthogonal directions in the horizontal opening width, and the inner upper surface of the hollow metal frame around the opening is engaged with the hook 52. It has the structure to do.

Next, referring to FIG. 5 and FIG. 6, the step of hanging the substrate holding frame 10 by the frame transfer device 50 and the step of separating the substrate holding frame 10 held by the frame transfer device 50. Will be described. FIG. 5 is a diagram illustrating the first engaging operation of the substrate holding frame, and FIG. 6 is a diagram illustrating the engagement between the opening portion and the hooking portion of the first conveyance form of the substrate holding frame. FIG. 2 shows a plan view from the upper surface of the frame.
As shown in FIG. 5, the frame body transfer device 50 includes a cylinder 51 that can move up and down on the metal frame portion 11 of the substrate holding frame body 10, and a hook portion 52 attached to the tip of the cylinder 51. The cylinder 51 has a function capable of rotating integrally with the hook portion 52.

  In this specification, the suspending step or the suspending step is an operation procedure for suspending the substrate holding frame by the suspending mechanism, and the separation means that the substrate holding frame is separated from the cylinder tip of the suspending mechanism. In this state, the substrate holding frame and the suspension mechanism are separated from the engaged state in the disengaged state, and the separation step or separation step is an operation procedure for separating the substrate holding frame.

The opening 17 of the substrate holding frame 10 is different in two directions in which the width of the opening shape is orthogonal, and the cylinder 51 provided with the hooking portion 52 at the front end of the frame transfer device 50 is lowered to lower the substrate holding frame 10. As shown in FIG. 5A, the cylinder 51 is fixed at a position where the hook 52 can pass, and the hook 52 passes as shown in FIG. 5B. After that, as shown in FIG. 5C, the hook 52 is rotated to a position where it engages with the metal frame. As shown in FIG. 5D, the hook 52 rotates 90 degrees and stops.
As the cylinder 51 is raised, the hook 52 is engaged with the inner upper surface of the opening 17 of the substrate holding frame 10 at the portion ke shown in FIG. .

  The relationship between the length and width of the opening 17 of the metal frame 11 and the length and width of the hook 52 at the tip of the cylinder 51 will be described with reference to FIG. The length k2 of the long side of the opening portion 17 is longer than the long side h1 of the hook portion 52, the length k1 of the short side of the opening portion 17 is longer than the length h2 of the short side of the hook portion 52, and The length h1 of the long side of the portion 52 is longer than the length k1 of the short side of the opening 17, and the length k1 of the short side of the opening 17 is longer than the length h2 of the short side of the hook portion 52. It is necessary. FIG. 6A shows the positional relationship when the hook 52 passes through the opening 17. FIG. 6B is a diagram showing a positional relationship when the opening 17 and the hooking portion 52 are engaged, and ke shows an upper inner surface of the metal frame portion and an engaging portion of the hooking portion 52.

FIG. 4 is a cross-sectional view showing the operation of suspending the substrate holding frame.
FIG. 4A shows a substrate support plate 13 in which a metal frame portion 11 assembled in a rectangular shape in plan view, a metal frame having a hollow structure with a rectangular cross section, is extended along the metal frame portion 11 inside the frame; On the opening 17 provided in the metal frame portion 11 with respect to the substrate holding frame body 10 configured to include the fitting portion 12 formed at the boundary portion between the metal frame portion and the substrate support plate. It is a figure which shows the place where the cylinder 51 provided with the hook part 52 at the front-end | tip attached to the robot hand 55 of a frame transfer apparatus is waiting. FIG. 4B is a view showing a state where the cylinder 51 having the hook 52 at the tip inserts the hook 52 at the tip into the opening 17. FIG. 4C is a diagram illustrating the rotation to the position where the hook 52 at the tip of the cylinder 51 is engaged. FIG. 4D is a view showing a state where the cylinder 51 is engaged with the inner upper surface of the metal frame portion 17 to suspend the substrate holding frame 10.

  In the frame transfer device 50, the cylinder 51 is lowered to a predetermined position and stopped when the held substrate holding frame 10 is moved to a predetermined position. The descending stop position descends to a position where the hook 52 at the tip of the cylinder 51 is disengaged from the substrate holding frame 10 and stops. With the engagement disengaged, it is rotated 90 degrees so that the hooking portion 52 at the tip of the cylinder 51 can pass through the opening 17 of the substrate holding frame 10, and the cylinder 51 is raised to move the substrate holding frame 10. To separate.

  In the first transport mode, an opening 17 is provided on the upper surface of the hollow metal frame 11 of the substrate holding frame 10, and the opening of the cylinder 51 attached to the frame transfer device 50 is provided in the opening 17. The substrate holding frame 10 is transported by being held and suspended or separated by the rotation of the hook 52.

  As shown in FIG. 16, the conventional transport mode is such that the chucking portion provided in the frame body transfer device engages the substrate holding frame body 10 from the outer side surface of the substrate holding frame body 10. In order to handle and transport the body 10, it is necessary to provide a handle 15 that protrudes outside the side surface of the substrate holding frame 10 as shown in FIG. 17. In contrast, the present invention eliminates the handle 15 protruding outward from the metal frame 11 as described above, and uses the opening 17 on the upper surface of the metal frame 11 to hold the substrate from the upper part of the metal frame. Since the frame is engaged, deformation of the peripheral part of the substrate holding frame due to contact during transportation is unlikely to occur, and even if the side surface of the substrate holding frame is deformed due to contact during transportation, Since the suspension mechanism of the frame body transfer device is lowered from the upper surface of the frame body and the hooking portion is inserted, the substrate holding frame body is held or separated and the substrate holding frame body is conveyed. The occurrence of poor body retention can be reduced.

Next, the 2nd conveyance form of this invention is demonstrated.
In the second transport mode, the opening 17 of the substrate holding frame 10 has a pair of shapes arranged at symmetrical positions or parallel movement positions along the length direction of the hollow metal frame 11. Thus, the shape of the opening 17 is such that the hook portion 52 at the tip of the cylinder 51 can be passed through a predetermined position, and when the suspension device is lifted, the hook portion 52 has a metal frame portion. 11 has an opening portion 17 having a narrow width portion that engages with the upper surface of the metal frame portion 11.
Specifically, the shape of the opening 17 includes a triangular shape, a trapezoidal shape, a T-shaped shape, a deformed elliptical shape having a different width, or a keyhole shape as shown in FIG.

The state in which the opening 17 of the metal frame 11 in the second transport mode and the hooking portion 52 at the tip of the cylinder 51 are engaged and separated will be described with reference to FIG. FIG. 7A shows a triangular opening, FIG. 7B shows a trapezoid opening, and FIG. 7C shows a T-shaped opening.
7A to 7C each have a shape in which the opening width is different in the length direction of the metal frame portion 11, and FIG. 7D is a T-shaped opening shape in which the opening width is different in the width direction of the metal frame portion 11. Shape. It is inserted into the position P1 of the opening 17 (a wide portion through which the hooking portion 52 at the tip of the cylinder 51 can pass) and the position of P2 inside the metal frame 11 (the hooking portion 52 is a metal frame). It moves to the narrow portion engaging with the upper surface of the metal frame portion 11 inside the opening portion 17 of the portion 11 and engages.

  FIG. 8 is a diagram showing the operation of the robot hand in the second conveyance mode of the substrate holding frame, and the function of the robot hand 55 in which the frame transfer device 50 handles the substrate holding frame 10 one by one. FIG. As shown in FIG. 8A, the robot hand 55 includes a cylinder b54 that can be raised and lowered on the metal frame portion 11 of the substrate holding frame 10, a hook portion 52 that is attached to the tip of the cylinder b54, and the cylinder b54. And a cylinder a53 that can move horizontally in the length direction or width direction of the metal frame portion 11. FIG. 8B is an enlarged view of the cylinder a53, the cylinder b54, and the hooking portion 52.

  FIG. 8C is a diagram illustrating the operation of the cylinder a53 in which the cylinder b54 provided with the hook portion 52 at the tip moves in the horizontal direction.

  FIG. 8D is a diagram illustrating an operation in which the cylinder b54 provided with the hooking portion 52 at the tip moves in the vertical direction.

The process of suspending the T-shaped substrate holding frame 10 with the opening 17 will be described with reference to FIGS. FIG. 9 is a diagram illustrating an operation in which the frame transport device suspends the substrate holding frame stacked in multiple stages in a second transport mode in which the cylinder moves and engages in the width direction.
FIG. 9A is a diagram illustrating a state where the cylinder a53 of the robot hand 55 has moved to the position of the wide portion where the hook 52 at the tip of the cylinder b54 can pass (position P1 in FIG. 7D). FIG. 9B is a diagram showing a state in which the hook 52 is lowered by the cylinder b54 into the T-shaped opening 17 of the metal frame 11 and the hook 52 is inserted into the opening 17.

  In FIG. 9C, the hook 52 is moved horizontally by the cylinder a53 in the width direction of the metal frame 11 to the narrow portion of the T-shaped opening 11 (position P2 in FIG. 7D). It is a figure which shows the place which moved to the position of the engagement state which cannot escape vertically upward. FIG. 9D is a view showing a state where the cylinder b54 is raised and the substrate holding frame 10 is suspended while maintaining the engaged state.

  7D, the process of suspending the substrate holding frame 10 having an opening shape with a T-shaped opening shape and a different opening width in the width direction of the metal frame 11 has been described. In the step of suspending the substrate holding frame having a shape with different opening widths in the length direction of the metal frame 11 as in 7C, the cylinder a53 uses the cylinder b54 and the hooking portion 52 at the tip to the width of the metal frame 11. This is possible by moving in the length direction of the metal frame 11 instead of the direction.

  7C and FIG. 10, the substrate holding frame 10 is stacked one by one from the stack of substrate holding frames 10 stacked in the second transport mode, and the hook 52 at the tip of the cylinder b54 is set to the cylinder a53. A process of moving in the length direction of the metal frame 11, engaging with the metal frame 11, and hanging.

  FIG. 10A is a diagram illustrating a position where the hook 52 of the robot hand 55 is located at a position on the opening of the metal frame 11 (P1 in FIG. 7). FIG. 10B is a diagram showing the robot hand 55 descending toward the metal frame portion 11. The robot hand 55 stops at a height at which the hook 52 at the tip of the cylinder does not contact the upper part of the surface of the metal frame 11. FIG. 10C shows a state in which the cylinder b54 extends and the hook 52 at the tip of the cylinder b54 passes through the opening 17 and is inserted into the metal frame 11 with the robot hand stopped at a height near the metal frame. FIG.

  FIG. 10D is a diagram showing a state where the cylinder a53 extends through the opening in the length direction of the metal frame and moves to a position where the hook 52 engages with the metal frame 11 (P2 in FIG. 7C).

Although not shown here, as shown in FIG. 10D, after the hook 52 moves to the position where the metal frame 11 is engaged, the cylinder of the cylinder b54 is contracted, and the hook 52 is engaged with the metal frame 11. The substrate holding frame is suspended.
FIG. 10E is a view showing a state where the robot hand 55 is lifted and the substrate holding frame 11 is suspended while the hook 52 is engaged with the metal frame 11.

Next, the separation process of the substrate holding frame 10 will be described.
In the robot hand 55 of the frame body transfer device 50, the cylinder b54 is lowered to a predetermined position and stopped when the held substrate holding frame body 10 is moved to a predetermined position. The descent stop position is lowered to a position where the hook 52 at the tip of the cylinder is disengaged from the substrate holding frame 10 and stops. In the disengaged state, the hook 52 attached to the tip of the cylinder b54 is moved horizontally by the cylinder a53, and is wider than the narrow part (position P2 in FIG. 7) of the T-shaped opening 17. Stop at the part (position P1 in FIG. 7). The hook 52 at the tip of the cylinder b54 is positioned so as to be able to pass through the opening 17 of the substrate holding frame 10, and the cylinder b54 is raised so that the substrate holding frame 10 can be separated.

  In order for the inner upper surface of the opening 17 of the substrate holding frame 10 and the hooking portion 52 at the tip of the cylinder 51 to engage and suspend a heavy substrate holding frame, the strength of the engaging portion Is required. It is also necessary to increase the area of the engaging portion to reduce the weight load per unit area. By reducing the area of the opening as much as possible and increasing the area of the hooking portion, the engaging portion As the area increases, the load on the unit area decreases.

  In the first transport mode, the hooking portion 52 needs to rotate 90 degrees in the horizontal direction inside the hollow metal frame 11, and the length of the long side of the hooking portion 52 is shown in FIG. As shown, it cannot be made longer than the length k0 inside the width direction of the metal frame 11. This is a great restriction on the enlargement of the area of the engaging portion. On the other hand, the hooking portion 52 of the second conveyance form can be engaged by moving in the length direction of the metal frame 11 as long as it has a shape that passes through the opening 17 of the metal frame 11. Therefore, various shapes can be applied to enlarge the area of the engaging portion as shown in FIG. FIG. 11 shows an example of an opening shape combining shapes including a triangle, a trapezoid and a curve.

Next, the 3rd conveyance form of this invention is demonstrated.
The hooking portion 52 at the tip of the cylinder 51 of the suspension mechanism of the frame body transfer device 50 can be initially fitted into the opening 17 in the opening 17 of the substrate holding frame 10. The hook 52 is engaged with the inner upper surface of the opening 17 of the substrate holding frame. After the suspension machine hooking portion 52 of the frame body transfer device 50 is brought into an engagement state in which it cannot escape from the opening 17 in the vertical direction, the suspension mechanism is raised and the engagement state is maintained to maintain the substrate holding frame. You can move your body.
In the transfer method, the substrate holding frame 10 including a square shape and a circular shape in which the opening portion 17 can pass through a cylinder tip which is a suspension mechanism of a frame body transfer device having a hook portion at the tip. Can also be supported.

A method for transporting the substrate holding frame 10 having the square opening 17 will be described with reference to FIG.
As shown in FIG. 12A, the robot hand 55 of the frame body transfer device 50 includes a cylinder 51 that can be raised and lowered on the metal frame portion 11 of the substrate holding frame 10 and a hook portion that is attached to the tip of the cylinder 51. 52. FIG. 12B is a view showing a state where the cylinder 51 is lowered and the hook 52 is inserted into the square opening 17. Next, FIG. 12C shows a state in which the hook portion 52 is bent in the opening portion 17 so that the hook portion 52 does not escape vertically upward on the inner upper surface of the square opening portion. FIG. 12D is a diagram showing a state where the cylinder hand is raised and the robot hand is raised and the substrate holding frame 10 is suspended and moved after maintaining the engaged state.

The operation of the hooking portion 52 in the third transport mode will be described with reference to FIG.
The shape when the hook 52 at the tip of the cylinder 51 passes through the opening of the metal frame 11 is shown in FIGS. 13A1, 13B1, and 13C1. The hook portion 52 has an engagement portion 58 and a drive rod 56 or a drive wire 57. The engagement portion 58 is long in the vertical direction when passing through the opening 17, and the horizontal cross section is a metal frame portion. 11, the drive rod 56 or the drive wire 57 connected to the engagement portion 58 pushes or pulls the engagement portion 58 after passing through the opening portion. Is expanded in the horizontal direction, and can be engaged with the opening 17 of the metal frame 11.

FIG. 14 shows another form of the hooking portion 52 in the third transport form.
FIG. 14A is an example in which the engaging portion 58 is engaged by enlarging and reducing using compressed air, and FIG.

  Next, the separation process of the substrate holding frame 10 in the third transport mode will be described. In the frame transfer device 50, the cylinder 51 is lowered to a predetermined position and stopped when the held substrate holding frame 10 is moved to a predetermined position. The descending stop position descends to a position where the hook 52 at the tip of the cylinder 51 is disengaged from the substrate holding frame 10 and stops. With the engagement disengaged, the hook 52 attached to the tip of the cylinder 51 is reduced to a size that can pass through the opening of the metal frame 11 and can escape from the square opening. The hooking portion 52 at the tip of the cylinder 51 is large enough to pass through the opening 17 of the substrate holding frame 10, and the cylinder 51 can be raised to separate the substrate holding frame 10.

  In the first and second transport modes, the shape of the opening 17 is restricted such that the orthogonal linear distance is different or the width of the opening is different in the length direction of the metal frame. In the transport mode, the shape of the opening 17 of the substrate holding frame 10 is not such a restriction and is larger than the horizontal size when the hook 52 at the tip of the suspension mechanism is reduced, and the hook 52 If the shape is smaller than the size in the horizontal direction when enlarged, a shape such as a circle, a square, or an indefinite shape is possible. Moreover, since the hook part 52 expands after passing through the opening part 17, it becomes possible to make the opening part small and to reduce the frame outer dimension by shortening the horizontal width of the metal frame part.

  Next, the metal frame part assembled in a rectangular shape in plan view with a metal frame having a hollow structure with a rectangular cross section is placed inside the frame along the metal frame part before and after the metal frame part before and after the central part curved downward. An extended substrate support plate, flat left and right metal frame portions, a substrate support plate extended inward along the metal frame portion, and a fitting formed at the boundary between the metal frame portion and the substrate support plate A plurality of openings for suspending the substrate holding frame on the upper surfaces of at least two opposing metal frame portions, respectively. A substrate holding frame having a carrier will be described with reference to FIGS. 1, 6, and 15. FIG.

FIG. 15 shows a form of conveyance of the curved substrate holding frame.
Such a curved substrate holding frame is used for storage, transportation, and the like by stacking a large substrate of a sixth generation substrate (1850 * 1500 mm 0.7 mmt) or more at a high density. Any of the first to third conveyance modes of the present invention is also possible in conveying the substrate holding frame in these forms.
By providing a plurality of openings on the upper surfaces of the flat left and right metal frame parts 11, the upper surface of the metal frame part 11 and the hooking part 52 at the tip of the cylinder 51 having a suspension mechanism are engaged in the openings, The board | substrate conveyance frame 10 can be conveyed.

  A first transfer form of the substrate holding frame for storing the curved sixth generation substrate (1850 * 1500 mm 0.7 mmt) will be described below.

  As shown in FIG. 1, openings 17 are formed at equal intervals from the central portion and the central portion of each of the metal frame portions to the flat left and right metal frame portions 11a and 11b of the substrate holding frame 10 facing each other. One or more are provided in both end directions. In FIG. 1, the metal frame portions 11a and 11b have three openings 17 in the metal frame portions 11a and 11b, respectively. Further, the opening may have a shape other than the above-described portion as long as it is a pair of shapes arranged in a symmetric position or a parallel movement position along the length direction of the hollow metal frame portion 11. The opening portion 17 has an opening shape that passes through a hooking portion 52 at the tip of a cylinder 51 that is a suspension mechanism of the frame body transfer device 50. As shown in FIG. The linear distance is different in at least two orthogonal directions, and the inner upper surface of the hollow metal frame 11 around the opening has a structure that engages with the hook 52.

Next, a step of suspending the substrate holding frame 10 and a step of separating the suspended substrate holding frame 10 by the frame transfer device 50 will be described with reference to FIG.
The frame body transfer device 50 includes a cylinder 51 that can move up and down on the metal frame portion 11 of the substrate holding frame body 10 and a hooking portion 52 that is attached to the tip of the cylinder 51. It has a function capable of rotating integrally with the part 52.
As shown in FIG. 6, the opening 17 of the substrate holding frame 10 is different in two directions in which the opening shapes are orthogonal, and a cylinder 51 having a hook 52 at the tip of the frame transfer device 50 is lowered to hold the substrate. When the cylinder 51 is inserted into the opening 17 of the frame 10, the cylinder 51 is fixed at a position where the hook 52 can pass, stops after the hook 52 passes, and is 90 degrees. Ascend after rotating. Because the hook part rotated 90 degrees,
As the cylinder 51 rises, the hook 52 engages with the periphery of the opening 17 of the substrate holding frame 10, and as the cylinder 51 rises, the substrate holding frame 10 also rises.

  Next, in the frame holding device 50 for the substrate holding frame, the cylinder 51 is lowered to a predetermined position and stopped when the held substrate holding frame 10 is moved to a predetermined position. The descending stop position descends to a position where the hook 52 at the tip of the cylinder 51 is disengaged from the substrate holding frame 10 and stops. With the engagement disengaged, it is rotated 90 degrees so that the hooking portion 52 at the tip of the cylinder 51 can pass through the opening 17 of the substrate holding frame 10, and the cylinder 51 is raised to move the substrate holding frame 10. To separate.

  In the first transport mode, an opening 17 is provided on the upper surface of the hollow metal frame 11 of the substrate holding frame 10, and the opening of the cylinder 51 attached to the robot transport device is hooked on the opening 17. The substrate holding frame 10 is transported by being held and suspended or separated by the rotation of the part 52. Therefore, since it does not extend outward from the metal frame, deformation of the substrate holding frame due to contact at the time of transportation is unlikely to occur, and the suspension mechanism of the frame body transfer device descends from the upper surface of the substrate holding frame, After the hook portion is inserted, the substrate holding frame is held or separated and the substrate holding frame is conveyed, so that occurrence of defective holding of the frame by the robot hand can be reduced.

  Especially for storing and transporting large substrates of the 6th generation and higher, place large substrates flexed one by one on a substrate holding frame that has strength against vibrations caused by transport, and improve the efficiency of storage and transport. In order to increase the size, it is made into a large, heavy-weight package that is stacked in multiple layers, stored in a container with a forklift, etc., and loaded on a truck or ship for transportation. The deformation due to the contact in handling of the conveyance is eliminated by eliminating the handle 15 on the side surface of the substrate holding frame 10 and providing an engaging portion with the robot hand on the upper surface of the substrate holding frame 10. It can be done less and can be transported more safely.

Eliminates the hooks on the side of the metal frame that suspends or holds the metal frame with the curved width of the substrate holding frame and the substrate holding frame with a robot hand, and suspends or holds the substrate holding frame. By making it possible at the opening on the top surface of the metal frame, the dimensions in the width direction of the package including the frame for holding the substrate can be shortened, the installation area of the equipment can be reduced, and the transport efficiency of large substrates can be increased. Became possible.
The substrate holding frame in which the pair of opposing metal frame portions are curved is less likely to move up and down due to vibration, so the thickness of the metal frame portion can be reduced and the distance between the substrates can be made closer, so that the frame is accommodated in the frame. High density substrate assembly can be realized.
Conventional 6th generation glass substrate 1500mm * 1850mm 0.7mmt is due to the bending of the substrate, so when stacking the substrates, in order to prevent the substrates from contacting each other, an interval of about 30mm is necessary. Due to the limitation, stacking was limited to 60 steps, but the interval of 10 mm to 20 mm was possible, and it was possible to stack up to 100 steps at 15 mm, and packaging with up to 150 steps was possible at 10 mm. .
This contributes to a reduction in substrate storage space, an improvement in transport efficiency, and a reduction in the size and efficiency of the manufacturing apparatus.

The first transport mode of the substrate holding frame 10 having two curved sides facing each other has been described, but it is obvious that the same effect can be obtained by the above-described method also in the second and third transport modes. is there.

Next, the package body of the substrate will be described.
FIG. 18 is a diagram showing a state in which the substrate holding frames 10 on which the substrates are placed are stacked in multiple stages and packed using the inner pallet 30 and the vibration isolating pallet 40.
That is, the substrate holding frames 10 on which one substrate is placed are stacked in multiple stages by fitting the fitting portions 12 of the metal frame 11, and the uppermost substrate holding frame 10 is fitted. The fitting portion of the upper lid 20 is fitted and sealed to the portion, and the surface plate 21 is inserted so that the upper lid 20 does not contact the substrate, and the curved shape of the substrate is inserted into the fitting portion of the lowermost substrate holding frame. The fitting portion of the pallet (inner pallet) 30 that is shaped so as not to contact the substrate in a state of being fitted is fitted and sealed, and the upper lid and the inner pallet are bound by the bundling mechanism 22 and the bundling belt 23 to further prevent the pallet. Place on the shaking pallet 40. When transporting and storing, cover the whole with a cover (not shown) to prevent foreign matter from adhering to it, transport it by truck as forklift transport or cargo, or store the package in a container and transport by truck or ship as cargo. It is normal.

  According to the present invention relating to the substrate holding frame and the transport method, as described above, the substrate holding frame is also increased in size and weight as the size of the substrate is increased, and the robot used for stacking and taking out the frame, Since the storage device, unpacking device, and packing device are also large and save space from the viewpoint of equipment location, the extended part around the frame can be deleted, and there is no need to grasp the frame from the side of the robot hand. The space of the device can also be reduced.

  Furthermore, the board size is 2200 * 1900mm for the G7 size and 2500 * 2200mm for the G8 size, and the pallet size of these packages is estimated to exceed 2400mm when the width direction is 2100mm or more. Although it becomes difficult to store in the width direction, the board holding frame is curved, so that the board can be held stably and the length in the width direction can be shortened. As a result, G8 size substrates can also be transported in 40-foot containers.

DESCRIPTION OF SYMBOLS 10 Board | substrate holding | maintenance frame 11 Metal frame parts 11a and 11b Left and right metal frame parts 11c and 11d Front and rear metal frame parts 12a First fitting part 12b Second fitting part 13 Substrate support plate 15 Handle part 16 Corner piece 17 Opening 20 Upper lid 21 Surface plate 22 Bundling mechanism 23 Bundling belt 30 Inner pallet 40 Anti-vibration pallet 50 Frame body transfer device 51 Cylinder 52 Hooking part 53 Cylinder a
54 Cylinder b
55 Robot hand 56 Drive rod 57 Drive wire 58 Engagement unit 100 Multi-stage stack A of frames A Substrate K Substrate holding frame Space k0 Length in width direction in metal frame k1 Opening in width direction of metal frame Length k2 Opening portion Length in the length direction of the metal frame ke Engaging portion length h1 of the metal frame and the hooking portion Long side length h2 of the hooking portion Short side length of the hooking portion

Claims (8)

A substrate support plate in which a rectangular metal frame portion composed of flat front, rear, left and right metal frames having a hollow structure with a rectangular cross section extends inside the frame along the metal frame portion, and a metal frame And a fitting portion formed at a boundary portion of the substrate support plate, and a substrate holding frame body configured to have at least an upper surface of each of the opposing metal frame portions, A substrate holding frame having a plurality of openings for suspending the substrate holding frame. A rectangular metal frame portion in plan view composed of flat left and right metal frames having a hollow structure with a rectangular cross section and front and rear metal frames whose center portion is curved downward is formed along the metal frame portion. A substrate holding frame having a substrate support plate extending inward and a fitting portion formed at a boundary portion between the metal frame portion and the substrate support plate, at least facing two. A substrate holding frame having a plurality of openings for suspending the substrate holding frame on each upper surface of the metal frame on the side. The opening is an opening through which a cylinder tip, which is a suspension mechanism of a frame body transfer device having a hooking portion at the tip, passes through at least two directions perpendicular to each other. The substrate holding frame according to claim 1, wherein the inner upper surface of the metal frame portion has a structure that engages with the hook portion. The opening includes a wide portion through which a cylinder tip, which is a suspension mechanism of a frame body transfer device having a hook at the tip, can pass at a predetermined position, and the hook when the lift is lifted. The substrate holding frame according to claim 1, further comprising a narrow width portion that engages with an inner upper surface of the metal frame portion inside the metal frame portion opening. The said opening part is either square shape or circular shape which can let the cylinder front-end | tip which can pass the suspension mechanism of the frame body transfer apparatus which has a hook part at the front-end | tip, The 1st or Claim characterized by the above-mentioned. The substrate holding frame according to 2. A suspension mechanism for a frame body transfer device, wherein a hook portion having a shape that can be fitted into the opening portion is provided at a tip of the opening portion of the substrate holding frame body according to any one of claims 1 to 3. After the cylinder tip is lowered and the hooking portion is inserted, the hooking portion rotates horizontally within the opening, and the rotation causes the hooking portion to escape vertically upward from the opening. A substrate holding frame transport method, wherein the suspension mechanism is moved up after being brought into an incapable engagement state, and the substrate holding frame is moved while maintaining the engaged state. A frame body transfer having a hook portion having a shape that can be fitted into the opening portion in the opening portion of the substrate holding frame body according to any one of claims 1, 2, and 4. After the tip of the cylinder, which is the suspension mechanism of the apparatus, is lowered and the hook is inserted, the hook moves horizontally within the opening by a predetermined distance in the length direction of the metal frame, and the hook is The substrate holding frame is configured to move the substrate holding frame while maintaining the engaged state after the suspension mechanism is lifted after being engaged so that it cannot escape vertically upward from the opening. Transport method. 6. The substrate holding frame according to any one of claims 1 to 5, wherein the substrate holding frame has a shape that can be initially fitted into the opening at the tip, and expands in the horizontal direction after fitting. After the tip of the cylinder, which is a suspension mechanism of the frame body transfer device having a hooking portion, moves down and inserts the hooking portion, the hooking portion expands in the opening, and the hooking is performed by the enlargement. The substrate holding frame is configured to move the substrate holding frame while maintaining the engaged state after the suspension portion is moved into an engaged state in which the portion cannot escape vertically upward from the opening. The method of conveying the frame.

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