JP2013100446A5 - - Google Patents

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Publication number
JP2013100446A5
JP2013100446A5 JP2012087463A JP2012087463A JP2013100446A5 JP 2013100446 A5 JP2013100446 A5 JP 2013100446A5 JP 2012087463 A JP2012087463 A JP 2012087463A JP 2012087463 A JP2012087463 A JP 2012087463A JP 2013100446 A5 JP2013100446 A5 JP 2013100446A5
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JP
Japan
Prior art keywords
upper layer
cutting waste
recovered
comparative examples
examples
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Pending
Application number
JP2012087463A
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English (en)
Japanese (ja)
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JP2013100446A (ja
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Publication date
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Priority to JP2012087463A priority Critical patent/JP2013100446A/ja
Priority claimed from JP2012087463A external-priority patent/JP2013100446A/ja
Priority to KR1020120115804A priority patent/KR20130043583A/ko
Publication of JP2013100446A publication Critical patent/JP2013100446A/ja
Publication of JP2013100446A5 publication Critical patent/JP2013100446A5/ja
Pending legal-status Critical Current

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JP2012087463A 2011-10-20 2012-04-06 固定砥粒ワイヤソー用水溶性加工液、切削加工方法 Pending JP2013100446A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012087463A JP2013100446A (ja) 2011-10-20 2012-04-06 固定砥粒ワイヤソー用水溶性加工液、切削加工方法
KR1020120115804A KR20130043583A (ko) 2011-10-20 2012-10-18 고정 연마 입자 와이어 소용 수용성 가공액 및 절삭 가공 방법

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011230705 2011-10-20
JP2011230705 2011-10-20
JP2012087463A JP2013100446A (ja) 2011-10-20 2012-04-06 固定砥粒ワイヤソー用水溶性加工液、切削加工方法

Publications (2)

Publication Number Publication Date
JP2013100446A JP2013100446A (ja) 2013-05-23
JP2013100446A5 true JP2013100446A5 (enExample) 2015-03-12

Family

ID=48621382

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012087463A Pending JP2013100446A (ja) 2011-10-20 2012-04-06 固定砥粒ワイヤソー用水溶性加工液、切削加工方法

Country Status (1)

Country Link
JP (1) JP2013100446A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015046474A (ja) * 2013-08-28 2015-03-12 コマツＮｔｃ株式会社 ウェーハの製造方法及びワイヤソーにおける加工条件決定方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000296455A (ja) * 1999-04-09 2000-10-24 Tokyo Seimitsu Co Ltd 固定砥粒マルチワイヤソー
JP2002144229A (ja) * 2000-11-02 2002-05-21 Nippei Toyama Corp ワイヤソー及びワイヤソーの切断方法
JP2003165995A (ja) * 2001-12-03 2003-06-10 Sanyo Chem Ind Ltd 廃水処理性が良好なポリエーテル系潤滑剤
JP3967692B2 (ja) * 2002-05-23 2007-08-29 三洋化成工業株式会社 金属加工用潤滑剤
WO2004092312A1 (ja) * 2003-03-24 2004-10-28 Sanyo Chemical Industries Ltd. 水系金属加工油用潤滑剤
JP2009057423A (ja) * 2007-08-30 2009-03-19 Kyodo Yushi Co Ltd 固定砥粒ワイヤソー用水溶性加工油剤
JP2010029998A (ja) * 2008-07-30 2010-02-12 Japan Fine Steel Co Ltd 固定砥粒ワイヤソーに使用したクーラントの処理方法及びその処理装置

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