JP2013086090A - Method and device for cleaning using steam - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suitably remove contamination even when the entire area of a surface to be cleaned is covered with the contamination, which has been difficult to be cleaned before.SOLUTION: A peeled-off part between the surface to be cleaned and the contamination is expanded by a first cleaning process for spraying cleaning fluid from a direction vertical to the surface to be cleaned, and by a second cleaning process for spraying the cleaning fluid at a predetermined angle which is not vertical to the surface to be cleaned partially exposed by the first cleaning process, so as to remove the contamination.

Description

  The present invention relates to a cleaning method and apparatus for cleaning so-called contamination, flux, and the like attached to an electronic component in a manufacturing process of the small electronic component. More specifically, the present invention relates to a high pressure steam cleaning method and apparatus for cleaning the electronic component using high pressure steam.

  The manufacturing process of an electronic component includes a so-called cleaning process for cleaning and removing substances adhering to the electronic component in various processes. The applicant can change the steam spraying position in such a cleaning process, and can spray only a high-pressure steam by spraying a small amount of steam and appropriately changing the spraying position or spraying direction. Has proposed a high-pressure steam cleaning device (Patent Document 1) that can clean various objects to be cleaned.

JP 2011-031148 A

  For example, when contaminants or fluxes are scattered as fine lumps on the surface of the portion to be cleaned, it has been confirmed that these can be removed easily and in a short time even by the high-pressure steam cleaning apparatus described above. However, if the contamination is in a wide range on the surface or covers the entire surface, these cannot be easily removed, and the contamination is much more removed than when the contamination is dispersed as a lump. It was confirmed that it took a long time.

  The present invention has been made in view of the above situation, and even if the object to be removed by cleaning covers the surface of the object to be cleaned over a wide range, it can be easily and quickly removed. It is an object of the present invention to provide a cleaning method and apparatus that enable the above.

  In order to solve the above-described problems, a cleaning method according to the present invention is a cleaning method for cleaning an object to be removed attached to a surface to be cleaned, and includes a cleaning fluid from a direction perpendicular to the surface to be cleaned. And a second cleaning step of spraying the cleaning fluid at a predetermined angle different from perpendicular to the surface to be cleaned.

  In the cleaning method, it is preferable that the second cleaning step is performed first after the cleaning step. Further, it is preferable that the object to be cleaned is movably supported, and the first cleaning process and the second cleaning process are performed while maintaining the state in which the object to be cleaned is supported. In this case, it is more preferable to rotate the object to be cleaned around a predetermined axis while supporting the object to be cleaned. Furthermore, at that time, it is more preferable that the first cleaning step and the second cleaning step are performed while rotating the object to be cleaned. In the cleaning method, the first cleaning step is performed on the surface to be cleaned at a predetermined distance in the first radial direction extending from the predetermined axis, and the second cleaning step is performed in the first radial direction. It is preferable that the cleaning is performed on the surface to be cleaned in the vicinity of the predetermined distance in the second radial direction extending from the predetermined axis at an arbitrary angle. Alternatively, the position on the surface to be cleaned where the second cleaning step is performed is the cleaning fluid sprayed on the surface to be cleaned in the first cleaning step and the cleaning sprayed on the surface to be cleaned in the second cleaning step. It is preferable that the first cleaning step is spaced from the position on the surface to be cleaned by a distance that does not interfere with the fluid. Furthermore, the predetermined angle is preferably smaller than 60 degrees with respect to the surface to be cleaned. Moreover, it is preferable that the cleaning fluid used in the first cleaning step and the second cleaning step is the same. More preferably, the cleaning fluid is made of saturated vapor. Furthermore, by performing a second cleaning process on the surface to be cleaned from which the object to be removed has been partially removed by the first cleaning process, and allowing the cleaning liquid to enter between the object to be removed and the surface to be cleaned, It is more preferable to remove an object to be removed around the surface to be cleaned that has been partially removed.

  In order to solve the above problems, a cleaning apparatus according to the present invention is a cleaning apparatus that cleans an object to be removed attached to a surface to be cleaned, and sprays a cleaning fluid from a direction perpendicular to the surface to be cleaned. Possible vertical nozzle, inclined nozzle capable of spraying the cleaning fluid at a predetermined angle different from perpendicular to the surface to be cleaned, and relative position of the surface to be cleaned relative to the vertical nozzle and the inclined nozzle being movable And the relative position moving means is characterized in that the cleaning fluid can be sprayed from the inclined nozzle onto the surface to be cleaned on which the cleaning fluid is sprayed by the vertical nozzle.

  In the cleaning apparatus, it is preferable that the relative position moving unit supports an object to be cleaned having a surface to be cleaned and rotates about a predetermined rotation axis. The vertical nozzle sprays the cleaning fluid against the surface to be cleaned at a predetermined distance in the first radial direction extending from the predetermined axis, and the inclined nozzle has a predetermined angle from the first radial direction. Preferably, the cleaning fluid is sprayed onto the surface to be cleaned that is in the vicinity of a predetermined distance in the second radial direction extending from the axis of the nozzle. Further, when the rotation direction of the predetermined rotation axis is a plus direction, the arbitrary angle is preferably an angle provided in the plus direction with respect to the first radial direction. Alternatively, the position on the surface to be cleaned where the inclined nozzle sprays the cleaning fluid is vertical by a distance that does not interfere with the cleaning fluid that the vertical nozzle sprays on the surface to be cleaned and the cleaning fluid that the inclined nozzle sprays on the surface to be cleaned. The nozzle is preferably spaced from the position on the surface to be cleaned where the cleaning fluid is sprayed. The predetermined angle is preferably smaller than 60 degrees with respect to the surface to be cleaned. Moreover, it is preferable that the cleaning fluid sprayed on the surface to be cleaned by the vertical nozzle and the inclined nozzle is the same. More preferably, the cleaning fluid is made of saturated vapor.

  According to the present invention, by ejecting fluid using a plurality of nozzles and cleaning an object to be cleaned, it is possible to remove an object to be removed that covers a surface to be cleaned that has been difficult to remove in the past. Become.

It is explanatory drawing which shows typically the 1 process about the concept of the washing | cleaning method in this invention. It is explanatory drawing which shows typically the 1 process about the concept of the washing | cleaning method in this invention. It is explanatory drawing which shows typically the 1 process about the concept of the washing | cleaning method in this invention. It is explanatory drawing which shows typically the 1 process about the concept of the washing | cleaning method in this invention. It is a figure which shows typically the washing | cleaning apparatus which concerns on 1st embodiment of this invention. It is a figure which shows typically the response | compatibility to the one washing | cleaning method in the washing | cleaning apparatus which concerns on 2nd embodiment of this invention. It is a figure which shows typically the response | compatibility to the other washing | cleaning method in the washing | cleaning apparatus which concerns on 2nd embodiment of this invention. It is a figure which shows the positional relationship at the time of seeing a pair of nozzle in the further aspect of embodiment shown to FIG. 3 and 4 from the side. It is a figure which shows the positional relationship in the plane in one aspect | mode about a pair of nozzle shown in FIG. It is a figure which shows the positional relationship in the plane in a different aspect from the aspect shown in FIG. 6 about a pair of nozzle shown in FIG. It is a figure which shows the positional relationship in the plane in a further aspect about a pair of nozzle shown in FIG. The nozzle configuration according to one embodiment of the present invention is a cleaning device configured to rotate an object to be cleaned, and is configured when the nozzle is viewed along the direction from the outside of the rotation of the object to be cleaned toward the center of rotation. FIG. FIG. 10 is a diagram showing a configuration of the nozzle configuration shown in FIG. 9 when the nozzle is viewed along the radial direction of rotation of the cleaning target in the cleaning device configured to rotate the cleaning target.

  The concept of an embodiment of the cleaning method according to the present invention will be described below with reference to the drawings. 1A to 1D show the concept of the steam cleaning method by disassembling the steps and sequentially showing them. Specifically, the state of the product 3 and the contamination 5, which are the objects to be cleaned, the nozzle 10, and the cleaning fluid 11 sprayed as a vapor from the nozzles to the objects to be cleaned in the process is schematically shown. . Normally, when the object to be removed such as contamination or the material to be removed is scattered on the product surface as a lump, the contamination and the product are thermally expanded by spraying a hot cleaning fluid, for example, due to the difference in expansion amount at that time. A gap through which the cleaning fluid or the like can enter is formed between them. The separation and removal of contamination is promoted by the penetration of cleaning liquid or the like that has turned from the cleaning fluid into this gap. For this purpose, the elevation of the cleaning liquid at a small elevation angle with respect to the product surface is facilitated. It is preferable to spray the cleaning fluid. In this embodiment, the cleaning liquid may be vaporized according to the contamination 5 mode or the like, or the cleaning liquid and a mixture thereof, or a cleaning liquid alone may be used, and these are collectively referred to as a cleaning fluid.

  However, as shown in FIG. 1A and the like, when so-called contamination 5 adheres to the entire surface of the product 3, the above-described gap that triggers peeling is caused by a cleaning fluid that suppresses the elevation angle as in the prior art. It is almost impossible to expect just by spraying. Therefore, in the present embodiment, first, as shown as the first step in FIG. 1A, the nozzle 10 sprays the cleaning fluid 11 vertically on the surface of the product 3, more preferably on the surface of the contamination 5. . In this case, since the flow velocity of the cleaning fluid 11 is large in the direction perpendicular to the surface of the contamination 5, the impact obtained from the cleaning fluid 11 can be applied to the contamination 5 most effectively. As shown in FIG. 1B, the contamination 5 is partially removed by an impact obtained from the cleaning fluid 11, a spray pressure applied from the cleaning liquid 11, and the like, and an area where the surface to be cleaned 3a is exposed is obtained. Further, a minute amount of the cleaning liquid 11a generated by turning from the cleaning fluid 11 remains in the removed portion of the contamination 5.

  Subsequently, the spraying angle of the cleaning fluid 11 sprayed from the nozzle 10 to the product 3 and the contaminant 5 is changed to a predetermined angle α smaller than 90 °, and the region that has been partially removed, that is, the exposed surface 3a to be cleaned. The cleaning fluid 11 is sprayed again (FIG. 1C). At that time, around the area where the contamination 5 is partially removed, a gap in which the cleaning liquid 11a can enter between the product 3 and the contamination 5 is generated due to the difference in thermal expansion amount between the product 3 and the contamination 5. Further, the cleaning liquid 11a enters the interface between the product 3 and the contamination 5, and the adhesion between them is also reduced. Further, by reducing α, which is the spray angle of the cleaning fluid 11, the flow rate of the cleaning fluid 11 in the extending direction of the product 3 and the contamination 5 increases, and the cleaning fluid 11 or the cleaning liquid 11a enters the gap described above. Is made more efficient.

  Due to the effects obtained from the cleaning fluid 11 and the cleaning liquid 11a, the impact force from the cleaning fluid 11 applied to the gap, and the spraying pressure of the cleaning fluid 11, it is generated around the exposed area of the surface to be cleaned 3a. The peeled part spreads around the spraying direction. The contamination 5 is removed from the surface of the product 3 by expanding the peeled portion. That is, with a first cleaning step in which the cleaning fluid 11 is sprayed perpendicularly to the surface of the contamination 5 to generate a partial peeling area, and a predetermined elevation angle α different from the perpendicular to the peeling area. By performing the second cleaning step in which the cleaning fluid 11 is sprayed stepwise, it is difficult to clean the product 3 that has been difficult in the past and the contamination 5 covers the entire surface or the entire area. The vertical reference is preferably the surface of the product 3 or the surface of the contamination 5. When the surface of the product 3 is uneven, it can be defined by viewing the surface of the product 3 macroscopically. It is preferable that Therefore, the vertical angle in the present invention includes an angle defined with respect to such a substantially plane, and a predetermined angle α different from the vertical may be defined with reference to the substantially plane defined in this way. preferable. Further, the viewpoint of preventing the cleaning fluid 11 sprayed on the surface of the product 3 in the first cleaning step and the cleaning fluid 11 sprayed on the surface of the product 3 in the second cleaning step from interfering with each other to reduce the peeling effect. Therefore, it is preferable that the second cleaning step is performed after the end of the first cleaning step.

  Next, a cleaning apparatus for executing the above-described method will be described with reference to the drawings. In the above-described method embodiment, a single nozzle may be used, but the first and second cleaning steps are different from each other from the viewpoint of the tact time required for the process or the simplification of the apparatus structure. It is more preferable to carry out at. From the above, in the following embodiments, a single cleaning apparatus, which has a plurality of nozzles, will be exemplified.

  FIG. 2 schematically shows the main configuration of the cleaning apparatus 100 according to an embodiment of the present invention. The cleaning apparatus 100 includes a vertical nozzle 10 a, an inclined nozzle 10 b, and a support / moving means 13. The vertical nozzle 10 a is arranged so that the cleaning fluid 11 can be sprayed perpendicularly to a predetermined position on the surface 3 a to be cleaned of the product 3. The inclined nozzle 10b is arranged so that the cleaning fluid 11 can be sprayed at the predetermined angle α described above with respect to a predetermined position on the surface to be cleaned 3a. The support / moving means 13 supports the product 3, and after the first cleaning step described above is performed under the vertical nozzle 10a, the product 3 is placed under the inclined nozzle 10b to perform the second cleaning step. Move to a predetermined position. The support / moving means 13 can be constructed by a known mechanism such as a suction stage disposed on a linear slider, and therefore will not be described in detail here.

  By using the cleaning apparatus 100 having the above-described structure, it is possible to expand the removal range of the contamination 5 by moving the product 3 after partially removing the contamination 5. Therefore, the above-described cleaning method can be continuously and effectively performed. In the present embodiment, a configuration is shown in which one vertical nozzle 10a and one inclined nozzle 10b are fixedly arranged, but the present invention is not limited to this embodiment. For example, a plurality of vertical nozzles 10a may be arranged in a direction perpendicular to the conveying direction of the support / moving means 13 and parallel to the surface to be cleaned 3a (contamination 5 surface), or the vertical nozzles 10a may move in that direction. good. In this case, it is preferable that a plurality of inclined nozzles 10b are also arranged or movable. Further, an auxiliary inclined nozzle is disposed between the first cleaning step and the second cleaning step so as to expand the removal region obtained by the vertical nozzle 10a in the direction perpendicular to the transport direction described above. A typical cleaning step may be provided.

  Further, in the present embodiment, the vertical nozzle 10a and the inclined nozzle 10b are basically fixed, and the support / moving means 13 moves the product 3 in one direction. It is not limited. That is, the support / moving means 13 may move the product 3 in the XY plane so that the cleaning liquid is sprayed from these nozzles over the entire surface 3a to be cleaned of the product 3, and only these nozzles move. Thus, the cleaning liquid may be sprayed over the entire surface to be cleaned 3a. That is, the support / moving means 13 exemplified here can move the relative position (relative position) of the object to be cleaned with respect to the vertical nozzle 10a and the inclined nozzle 10b, including the case of moving the vertical nozzle 10a and the inclined nozzle 10b. Should be understood as one aspect of the relative position moving means.

  The saturated vapor suitably used as the cleaning fluid in the present invention will be supplementarily described below. In the present invention, a fluid in which a liquid and a vapor of the same substance, such as water and water vapor, are in heat parallel is defined as a saturated vapor. In this state, liquid phase and gas phase water coexist, and the rate at which water evaporates and the rate at which it aggregates are the same. Usually, such a saturated vapor pressure is referred to as a saturated vapor pressure, and is indicated by a unit of atmospheric pressure such as Pa (Pascal). Saturated steam is excellent in use as a heat source because it can be heated rapidly and uniformly by latent heat heating, the pressure and temperature can be temporarily set, and the heat transfer coefficient is high. In the present invention, a saturated vapor in which such a liquid phase and a gas phase are mixed is described as the cleaning liquid. However, the apparatus is not limited to the saturated vapor, and depending on the conditions of the object to be cleaned, superheated steam or boiling water is used. You may perform washing by. Furthermore, it is possible to use various substances such as organic solvents and gases as the cleaning fluid depending on the material of the contamination.

  Next, a second embodiment of the cleaning apparatus according to the present invention will be described. FIGS. 3 and 4 are diagrams schematically showing different correspondence modes of the cleaning method using the cleaning apparatus 200 according to the second embodiment. Note that the same reference numerals are used for the same configurations as those illustrated in the first embodiment described above, and a description thereof is omitted here. The cleaning apparatus 200 is characterized in that the support / moving means 13 rotates around a predetermined axis A. In the cleaning method shown in FIG. 3, in the first cleaning step, the contamination 5 is partially removed directly below the vertical nozzle 10 a, and then the product 3 is rotated by the support / moving means 13. The rotation of the product 3 is stopped after the position where the partial removal has been performed by the rotation (the portion where the product surface 3a is exposed) reaches the spraying position of the cleaning fluid 11 by the inclined nozzle 10b. The cleaning step is performed.

  In the cleaning method shown in FIG. 4, the first cleaning process and the second cleaning process are not separated as separate processes, but the cleaning fluid from each of the vertical nozzle 10 a and the inclined nozzle 10 b even during the rotation operation of the product 3. 11 spraying is continued. For example, when the drying process after cleaning is also considered, the substrate support means in the so-called spin dryer is used as the support / moving means 13 of the product 3 in the present invention, and the cleaning nozzle according to the present invention is used for the spin dryer. By adding, it is possible to obtain the configuration shown in FIG. In the cleaning apparatus 200 as well, a plurality of nozzles may be used as described in the first embodiment, or each nozzle may be moved. In the case of a configuration in which the nozzle is moved, the vertical nozzle 10a is linearly moved outward from the rotation plane from the axis A which is the center of rotation, and the inclined nozzle 10b is moved from the axis A so as to correspond to the movement of the vertical nozzle 10a. It is preferable to move so that the distances are the same.

  Next, the structure which calculated | required more suitable conditions regarding arrangement | positioning of the vertical nozzle 10a and the inclination nozzle 10b in the washing | cleaning apparatus 200 shown as 2nd embodiment is demonstrated as 3rd embodiment. FIG. 5 is a diagram showing a positional relationship when a pair of nozzles in a further aspect of the embodiment shown in FIGS. 3 and 4 is viewed from the side. Moreover, FIG. 6 is a figure which shows the positional relationship in the plane in the said aspect about a pair of nozzle shown in FIG. 3 and 4, the spray position by the vertical nozzle 10a and the spray position by the inclined nozzle 10b are arranged such that the nozzle delay angle (the amount of deviation of the spray position) θd is 180 degrees on the rotation surface. In this embodiment, this nozzle delay angle θd is made smaller. In this embodiment, the support / moving means 13 rotates the product 3 in the direction of arrow CW (rotation direction CW) in the figure. Further, the cleaning surface 3a of the product 3 which is a plane is defined to be parallel to the XY plane perpendicular to the Z axis so that the rotation axis A is along the Z axis direction in the drawing.

  In this embodiment, when viewed from the side, the vertical hit region 5a, which is the spraying position of the cleaning fluid 11 by the vertical nozzle 10a, and the inclined hit region 5b, which is the spraying position of the cleaning fluid 11 by the inclined nozzle 10b, overlap. Placed in. Further, the cleaning fluid 11 sprayed from the inclined nozzle 10b is ejected from the inclined nozzle 10b in the direction along the arrow B in FIG. 6 which is the radial direction of the rotating surface. Thus, by making the both nozzles close to each other, the vertical nozzle 10a and the inclined nozzle 10b can be unitized. As a result, the form of the cleaning nozzle can be simplified, and the management of the cleaning space is facilitated. In FIG. 5, the vertical hit area 5a and the inclined hit area 5b overlap with each other when viewed from the side. More strictly speaking, this embodiment is a hit area in the circumferential direction during rotation. Is desirable to match. That is, the vertical nozzle 10a sprays the cleaning fluid 11 to a position at a predetermined distance in the first radial direction extending from the predetermined axis A (z axis), and the inclined nozzle 10b is arbitrarily selected from the first radial direction. The cleaning fluid 11 is sprayed to a position at a predetermined distance in the second radial direction extending from a predetermined axis A (z axis) with an angle (nozzle delay angle θd). However, in reality, the shape of the inclined hit region 5b of the inclined nozzle 10b is distorted so as to be longer in the ejecting direction than the shape of the vertical hit region 5a of the vertical nozzle 10a. It is difficult to make it.

  Note that the positional relationship between the vertical nozzle 10a and the inclined nozzle 10b is such that, for example, when the rotation direction CW of the support / moving means 13 is the + (plus) direction, the nozzle delay angle θd is also + ( It must be placed in the plus) direction. Alternatively, the operation direction of the support / moving means 13 and the nozzle so that the cleaning fluid 11 is sprayed from the inclined nozzle 10b in the order of the description in relation to the spraying of the cleaning fluid 11 from the vertical nozzle 10a. It is necessary to set the delay angle θd. In order to effectively perform the second cleaning step, it is preferable to spray the cleaning liquid at the boundary between the surface of the product 3 and the contamination 5, but in reality, the nozzle delay angle θd and the angle α of the inclined nozzle 10b are described above. The cleaning ability is determined by various conditions such as the temperature of the cleaning fluid 11, the pressure of the cleaning fluid 11, the distance between the vertical nozzle 10a and the inclined nozzle 10b and the surface to be cleaned, that is, the predetermined axis A in the present invention. The predetermined distance defined from (z-axis) is defined by taking into account the deviation caused by the above conditions between the surface to be cleaned in which the first cleaning step is performed and the surface to be cleaned in which the second cleaning step is performed. Alternatively, it is defined as the vicinity of a predetermined distance.

  As described above, the gap between the product 3 and the contamination 5 is preferably enlarged by the difference in expansion amount when each of them thermally expands. In the present invention, saturated steam in a heated state is used as the cleaning fluid 11, and the product 3 and the contamination 5 are also heated by spraying the cleaning fluid 11 and applying heat through the steam. Accordingly, the product 3 and the contamination 5 can be heated to a higher temperature as the time required from the spraying of the cleaning fluid 11 from the vertical nozzle 10a to the spraying of the cleaning fluid 11 from the inclined nozzle 10b is shortened. In the embodiment shown in FIG. 7, the vertical hit region 5 a and the inclined hit region 5 b are as close to each other as possible in consideration of this heating effect. In addition, it is not preferable that the vertical hit area 5a and the inclined hit area 5b overlap each other or be installed at a position where interference occurs. In this case, a phenomenon occurs in which the cleaning fluids 11 sprayed from both nozzles collide with each other, which may impair each role. The nozzle delay angle θd shown in FIG. 7 is the minimum angle considering the above. By setting the arrangement of both nozzles in this way, it is possible to more effectively advance the peeling of the contamination 5 from the product 3.

  In the case of the embodiment shown in FIG. 7, when the vertical hit area 5a and the like approach the axis A (Z axis in the figure), the positional relationship between the vertical hit area 5a and the inclined hit area 5b in the circumferential direction is the axis A It is different from the case where it is far from. In this case, it is considered preferable to define the positional relationship between the two nozzles based on the XY coordinate system as shown in FIG. 8 instead of the so-called rθ system arrangement shown in FIG. In the embodiment shown in the figure, the delay angle of the nozzle is provided in the form of offset d. Also in this aspect, by setting the value of the offset d based on the same concept as the nozzle delay angle θd described above, it is possible to remove the preferred contamination 5 from the product 3. That is, the position of the inclined nozzle 10b on the surface to be cleaned 3a to which the cleaning fluid 11 is sprayed is the cleaning fluid 11 that the vertical nozzle 10a sprays on the surface to be cleaned 3a and the cleaning fluid that the inclined nozzle 10b sprays on the surface to be cleaned 3a. The vertical nozzle 10a is spaced from the position on the surface to be cleaned 3a where the cleaning fluid 11 is sprayed by an offset d or a nozzle delay angle θd by a distance that does not interfere with the nozzle 11.

  Next, an example in which the nozzle shown in FIG. 8 is actually embodied will be described with reference to the drawings. FIG. 9 shows a nozzle 200 according to a further embodiment of the present invention in a cleaning apparatus 200 configured to rotate an object to be cleaned, along the direction from the outside of the rotation of the product 3 toward the axis A that is the center of rotation. FIG. 3 is a diagram showing a configuration when the nozzle 10 is viewed. FIG. 10 is a diagram illustrating a configuration of the nozzle configuration illustrated in FIG. 9 when the nozzle 10 is viewed along the radial direction of rotation of the product 3. The nozzle 10 in this embodiment includes a vertical nozzle 10a, an inclined nozzle 10b, a manifold portion 22, a holder 23, a nozzle holding and moving body 24, and a pipe 25.

  Each of the vertical nozzle 10a and the inclined nozzle 10b is connected to the manifold portion 22 via a flexible tube. The vertical nozzle 10a is fixed to a position at which the cleaning fluid 11 can be sprayed onto the vertical hit area 5a on the surface to be cleaned 3a by a flexible tube. The position of the inclined nozzle 10b is fixed by a flexible tube so that the spray angle of the cleaning fluid 11 is a predetermined angle α and the inclined hit area 5b is offset d with respect to the vertical hit area 5a. The manifold portion 22 is supported by a holder 23, and the holder 23 is supported by a nozzle holding and moving body 24 so as to be movable in the X direction in the figure. The pipe 25 is made of a heat-resistant material and is connected to a not-shown saturated steam source. The cleaning fluid supplied from the saturated vapor source is sent from the pipe 25 to the vertical nozzle 10 a and the inclined nozzle 10 b through the holder 23 and the fluid path inside the manifold portion 22.

  In the above-described embodiment, the cleaning fluid 11 supplied to the vertical nozzle 10a and the inclined nozzle 10b may use different cleaning liquids. However, the present invention does not use the chemical characteristics of the cleaning fluid 11 sprayed from individual nozzles, but differs in physical events such as a difference in the direction of stress applied to the contamination 5 due to the difference in the spraying direction of the cleaning fluid 11. Is used. Accordingly, as shown in the nozzle configuration embodying the present invention described above, the cleaning liquid is shared by these nozzles, simplifying the fluid path, simplifying the apparatus configuration, and further reducing the cost required for supplying the cleaning liquid. Etc. are preferably performed.

同表によれば、角度２０度の場合には全ての条件で洗浄が良好に行われ、４０度の場合には概ね良好であるが条件によってはコンタミの再付着等が懸念され、６０度の場合にはコンタミの再付着の可能性が高いが条件によっては採用可能であることが理解できる。 Next, the following table shows the results of actual cleaning when the elevation angle (predetermined angle α) in the inclined nozzle 10b is changed. In the table, the conditions of the product 3 and the contamination 5 are all the same, and the contamination 5 is washed and removed. The very good case is indicated by ◎, the good case is indicated by ○, and the case where there is a difficulty is indicated by △. In addition, a plurality of evaluations have been made, and these are due to the fact that the cleaning liquid flow rate other than the angle, the cleaning liquid temperature, the distance between the nozzle and the tilt hit area, and the like are changed.

According to the table, when the angle is 20 degrees, cleaning is performed satisfactorily under all conditions, and when the angle is 40 degrees, it is generally good, but depending on the conditions, there is a concern about contamination re-adhesion, etc. In some cases, the possibility of contamination reattachment is high, but it can be understood that it can be used depending on conditions.

  By using the cleaning device comprising the nozzle 10 having the above simple configuration and the supporting / moving means that rotates around the axis A, the removal of contamination, etc., covering the surface to be cleaned which has been difficult to remove in the past. The product can be removed from the product surface. Note that the flow rate in the direction perpendicular to the surface to be cleaned 3a becomes larger after the partial contamination 5 removal region is formed with respect to the preferable range of the predetermined angle α based on the above-described actual evaluation result. However, it is considered that the possibility that the cleaning liquid 11a effectively enters between the product 3 and the contamination 5 increases as the flow velocity in the parallel direction increases. Therefore, in principle, the predetermined angle α is preferably 45 degrees or less, and the result of 40 degrees in the table supports this. However, the physical properties of the contamination 5 or the adhesion force of the contamination 5 to the product 3 is large, and it may be required to continuously apply the above-described impact in the vertical direction. From the table, it is confirmed that the spraying effect by the inclined nozzle is obtained even when the vertical impact force is increased at 60 degrees. From the above, it is preferable that the predetermined angle is set to a maximum of 60 degrees, preferably 40 degrees smaller than this, and more preferably 20 degrees or less.

3: Product, 3a: Surface to be cleaned, 5: Contamination, 5a: Vertical hit area, 5b: Inclined hit area, 10: Nozzle, 10a: Vertical nozzle, 10b: Inclined nozzle, 11: Cleaning fluid, 11a: Cleaning liquid, 13 : Supporting / moving means 22: Manifold part 23: Holder 24: Nozzle holding / moving part 25: Piping 100, 200: Cleaning device A: Predetermined center of rotation (axis) B: Cleaning fluid ejection direction CW: Direction of rotation, α: Predetermined angle, θd: Nozzle delay angle, d: Offset

Claims (19)

A cleaning method for cleaning an object to be removed attached to a surface to be cleaned,
A first cleaning step of spraying a cleaning fluid from a direction perpendicular to the surface to be cleaned;
And a second cleaning step of spraying the cleaning fluid at a predetermined angle different from perpendicular to the surface to be cleaned.   The cleaning method according to claim 1, wherein the second cleaning step is performed after the first cleaning step.   3. The object to be cleaned is movably supported, and the first cleaning step and the second cleaning step are performed while maintaining the state in which the object to be cleaned is supported. The cleaning method described.   The cleaning method according to claim 3, wherein the object to be cleaned is rotated around a predetermined axis while the object to be cleaned is supported.   The cleaning method according to claim 4, wherein the first cleaning step and the second cleaning step are performed while rotating the object to be cleaned.   The first cleaning step is performed on the surface to be cleaned at a predetermined distance in a first radial direction extending from the predetermined axis, and the second cleaning step is optional from the first radial direction. The cleaning method according to claim 4, wherein the cleaning method is performed on the surface to be cleaned that is in the vicinity of the predetermined distance in a second radial direction extending from the predetermined axis at an angle of .   The position on the surface to be cleaned where the second cleaning step is performed is the position of the cleaning fluid sprayed against the surface to be cleaned in the first cleaning step and the surface to be cleaned in the second cleaning step. 7. The device according to claim 1, wherein the cleaning fluid sprayed against the cleaning fluid is spaced from a position on the surface to be cleaned where the first cleaning process is performed by a distance that does not interfere with the cleaning fluid. The cleaning method according to 1.   The cleaning method according to claim 1, wherein the predetermined angle is smaller than 60 degrees with respect to the surface to be cleaned.   The cleaning method according to claim 1, wherein the cleaning fluid used in the first cleaning step and the second cleaning step is the same.   The cleaning method according to claim 1, wherein the cleaning fluid is made of saturated vapor.   The second cleaning step is performed on the surface to be cleaned from which the object to be removed has been partially removed by the first cleaning step, and the cleaning liquid enters between the object to be removed and the surface to be cleaned. The cleaning method according to claim 1, wherein an object to be removed around the surface to be cleaned that has been partially removed is removed. A cleaning device for cleaning an object to be removed attached to a surface to be cleaned,
A vertical nozzle capable of spraying a cleaning fluid from a direction perpendicular to the surface to be cleaned;
An inclined nozzle capable of spraying the cleaning fluid at a predetermined angle different from perpendicular to the surface to be cleaned;
A relative position moving means capable of moving the relative position of the surface to be cleaned with respect to the vertical nozzle and the inclined nozzle,
The cleaning apparatus according to claim 1, wherein the relative position moving unit enables spraying of the cleaning fluid from the inclined nozzle onto the surface to be cleaned onto which the cleaning fluid is sprayed by the vertical nozzle.   The cleaning apparatus according to claim 12, wherein the relative position moving unit supports an object to be cleaned having the surface to be cleaned and rotates about a predetermined rotation axis.   The vertical nozzle sprays the cleaning fluid against the surface to be cleaned at a predetermined distance in a first radial direction extending from the predetermined axis, and the inclined nozzle forms an arbitrary angle from the first radial direction. The cleaning apparatus according to claim 13, wherein the cleaning fluid is sprayed to the surface to be cleaned that is in the vicinity of the predetermined distance in a second radial direction that extends from the predetermined axis.   The cleaning according to claim 14, wherein when the rotation direction of the predetermined rotation axis is a plus direction, the arbitrary angle is an angle provided in the plus direction with respect to the first radial direction. apparatus.   The position on the surface to be cleaned where the inclined nozzle sprays the cleaning fluid is the cleaning fluid that the vertical nozzle sprays on the surface to be cleaned and the cleaning fluid that the inclined nozzle sprays on the surface to be cleaned. The cleaning apparatus according to claim 12 or 13, wherein the vertical nozzle is spaced from a position on the surface to be cleaned where the cleaning fluid is sprayed by a distance that does not interfere with the cleaning fluid.   The cleaning apparatus according to any one of claims 12 to 16, wherein the predetermined angle is smaller than 60 degrees with respect to the surface to be cleaned.   The cleaning apparatus according to any one of claims 12 to 17, wherein the cleaning fluid sprayed by the vertical nozzle and the inclined nozzle onto the surface to be cleaned is the same.   The cleaning device according to any one of claims 12 to 18, wherein the cleaning fluid is made of saturated vapor.

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