JP2013084857A5 - - Google Patents

Download PDF

Info

Publication number
JP2013084857A5
JP2013084857A5 JP2011225180A JP2011225180A JP2013084857A5 JP 2013084857 A5 JP2013084857 A5 JP 2013084857A5 JP 2011225180 A JP2011225180 A JP 2011225180A JP 2011225180 A JP2011225180 A JP 2011225180A JP 2013084857 A5 JP2013084857 A5 JP 2013084857A5
Authority
JP
Japan
Prior art keywords
measurement tank
volume
flow path
pressure gauge
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011225180A
Other languages
English (en)
Japanese (ja)
Other versions
JP5433660B2 (ja
JP2013084857A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011225180A priority Critical patent/JP5433660B2/ja
Priority claimed from JP2011225180A external-priority patent/JP5433660B2/ja
Priority to US13/602,719 priority patent/US8826935B2/en
Priority to TW101133244A priority patent/TWI460570B/zh
Priority to KR1020120113517A priority patent/KR101442574B1/ko
Publication of JP2013084857A publication Critical patent/JP2013084857A/ja
Publication of JP2013084857A5 publication Critical patent/JP2013084857A5/ja
Application granted granted Critical
Publication of JP5433660B2 publication Critical patent/JP5433660B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011225180A 2011-10-12 2011-10-12 ガス流量監視システム Active JP5433660B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2011225180A JP5433660B2 (ja) 2011-10-12 2011-10-12 ガス流量監視システム
US13/602,719 US8826935B2 (en) 2011-10-12 2012-09-04 Gas flow monitoring system
TW101133244A TWI460570B (zh) 2011-10-12 2012-09-12 氣體流量監視系統
KR1020120113517A KR101442574B1 (ko) 2011-10-12 2012-10-12 가스 유량 감시 시스템

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011225180A JP5433660B2 (ja) 2011-10-12 2011-10-12 ガス流量監視システム

Publications (3)

Publication Number Publication Date
JP2013084857A JP2013084857A (ja) 2013-05-09
JP2013084857A5 true JP2013084857A5 (enExample) 2013-08-15
JP5433660B2 JP5433660B2 (ja) 2014-03-05

Family

ID=48085173

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011225180A Active JP5433660B2 (ja) 2011-10-12 2011-10-12 ガス流量監視システム

Country Status (4)

Country Link
US (1) US8826935B2 (enExample)
JP (1) JP5433660B2 (enExample)
KR (1) KR101442574B1 (enExample)
TW (1) TWI460570B (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9305810B2 (en) * 2011-06-30 2016-04-05 Applied Materials, Inc. Method and apparatus for fast gas exchange, fast gas switching, and programmable gas delivery
US9958302B2 (en) * 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
WO2016110931A1 (ja) * 2015-01-05 2016-07-14 株式会社エニイワイヤ 組立用物品管理システム
JP6533740B2 (ja) 2015-12-15 2019-06-19 Ckd株式会社 ガス流量監視方法及びガス流量監視装置
US10697848B1 (en) * 2016-12-12 2020-06-30 Kirk A. Dobbs Smart building water supply management system with leak detection and flood prevention
US10031004B2 (en) 2016-12-15 2018-07-24 Mks Instruments, Inc. Methods and apparatus for wide range mass flow verification
US10358180B2 (en) 2017-01-05 2019-07-23 Sram, Llc Adjustable seatpost
US20180348034A1 (en) * 2017-05-31 2018-12-06 Air Liquide America Specialty Gases Llc Gas sampling apparatus
JP7150340B2 (ja) * 2017-06-22 2022-10-11 株式会社フジキン 流量制御装置および流量制御装置の流量制御方法
JP6811147B2 (ja) * 2017-06-23 2021-01-13 東京エレクトロン株式会社 ガス供給系を検査する方法
JP6960278B2 (ja) * 2017-08-31 2021-11-05 東京エレクトロン株式会社 流量測定システムを検査する方法
US11718913B2 (en) * 2018-06-04 2023-08-08 Asm Ip Holding B.V. Gas distribution system and reactor system including same
CN109085812A (zh) * 2018-08-28 2018-12-25 武汉华星光电技术有限公司 气体流量监测系统及监测和主备用切换方法
JP7358765B2 (ja) * 2019-04-04 2023-10-11 株式会社サタケ 製粉設備の監視システム
WO2020217601A1 (ja) * 2019-04-26 2020-10-29 株式会社堀場エステック 流路形成装置
DE102019117543A1 (de) 2019-06-28 2020-12-31 Aixtron Se Verfahren zum Kalibrieren/Verifizieren von Massenfluss-Mess/Steuer-Geräten eines Gasmischsystems und Vorrichtung zur Durchführung des Verfahrens
JP7680122B2 (ja) * 2021-02-25 2025-05-20 東京エレクトロン株式会社 異常検出方法及び処理装置
US12061103B2 (en) * 2021-05-10 2024-08-13 Applied Materials, Inc. Packaging design for a flow sensor and methods of manufacturing thereof
CN114429870B (zh) * 2022-02-24 2023-03-24 江苏振华新云电子有限公司 一种片式钽电解电容器蒸汽流量稳定输出调节装置
CN115755158B (zh) * 2022-11-29 2025-07-29 上海新漫传感科技有限公司 探测器的保护系统、方法及计算机可读介质

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI73315C (fi) * 1984-06-15 1987-09-10 Nokia Oy Ab Kalibreringssystem foer kalibrering av massastroemreglerare.
US5233861A (en) * 1990-12-03 1993-08-10 Motorola, Inc. Apparatus and method for in situ calibration of a metering device
JP2692770B2 (ja) * 1992-09-30 1997-12-17 シーケーディ株式会社 マスフローコントローラ流量検定システム
JP3367811B2 (ja) 1996-01-05 2003-01-20 シーケーディ株式会社 ガス配管系の検定システム
JP2002535122A (ja) * 1999-01-20 2002-10-22 マイクロリス・コーポレーション 流れコントローラ
US6363958B1 (en) * 1999-05-10 2002-04-02 Parker-Hannifin Corporation Flow control of process gas in semiconductor manufacturing
US6439253B1 (en) * 2000-12-28 2002-08-27 International Business Machines Corporation System for and method of monitoring the flow of semiconductor process gases from a gas delivery system
JP4502590B2 (ja) * 2002-11-15 2010-07-14 株式会社ルネサステクノロジ 半導体製造装置
US6955072B2 (en) * 2003-06-25 2005-10-18 Mks Instruments, Inc. System and method for in-situ flow verification and calibration
US6973375B2 (en) 2004-02-12 2005-12-06 Mykrolis Corporation System and method for flow monitoring and control
US7740024B2 (en) * 2004-02-12 2010-06-22 Entegris, Inc. System and method for flow monitoring and control
US7412986B2 (en) * 2004-07-09 2008-08-19 Celerity, Inc. Method and system for flow measurement and validation of a mass flow controller
US7376520B2 (en) * 2005-03-16 2008-05-20 Lam Research Corporation System and method for gas flow verification
US7174263B2 (en) * 2005-03-25 2007-02-06 Mks Instruments, Inc. External volume insensitive flow verification
JP4801726B2 (ja) * 2006-03-07 2011-10-26 シーケーディ株式会社 ガス流量検定ユニット付ガス供給ユニット
JP4788920B2 (ja) * 2006-03-20 2011-10-05 日立金属株式会社 質量流量制御装置、その検定方法及び半導体製造装置
US7743670B2 (en) * 2006-08-14 2010-06-29 Applied Materials, Inc. Method and apparatus for gas flow measurement
US7881886B1 (en) * 2006-11-17 2011-02-01 Lam Research Corporation Methods for performing transient flow prediction and verification using discharge coefficients
US8104323B2 (en) * 2006-12-05 2012-01-31 Horiba Stec, Co., Ltd. Flow controller, flow measuring device testing method, flow controller testing system, and semiconductor manufacturing apparatus
US8074677B2 (en) * 2007-02-26 2011-12-13 Applied Materials, Inc. Method and apparatus for controlling gas flow to a processing chamber
JP5134841B2 (ja) * 2007-03-16 2013-01-30 Ｃｋｄ株式会社 ガス供給ユニット
WO2009091935A1 (en) * 2008-01-18 2009-07-23 Pivotal Systems Corporation Method and apparatus for in situ testing of gas flow controllers
US8205629B2 (en) * 2008-04-25 2012-06-26 Applied Materials, Inc. Real time lead-line characterization for MFC flow verification
JP5346628B2 (ja) * 2009-03-11 2013-11-20 株式会社堀場エステック マスフローコントローラの検定システム、検定方法、検定用プログラム
US9846074B2 (en) * 2012-01-20 2017-12-19 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time

Similar Documents

Publication Publication Date Title
JP2013084857A5 (enExample)
WO2014152755A3 (en) Pressure-based gas flow controller with dynamic self-calibration
JP2016516963A5 (enExample)
JP2017512079A5 (enExample)
JP2017023956A5 (enExample)
EA201592149A1 (ru) Определения коэффициента расхода при истечении через штуцер/клапан для бурения под управляемым давлением
MX2018011500A (es) Manometro electronico para sistema presurizado con flujos de salida variables.
HRP20200558T1 (hr) Mjerni sistem i metoda za kriogene tekućine
UA102242C2 (ru) Резервуар закрытого типа газового котла
WO2012145395A3 (en) Fluid pump and method of pumping a fluid
RU2014118593A (ru) Конструкция для создания веерообразной струи, предназначенная для использования в выдачном пускателе
EP2620678A3 (en) Flow control device
MX2015015488A (es) Dispositivo para distribuir fluidos.
JP2016520490A5 (enExample)
JP2017213250A5 (enExample)
JP2012200387A5 (enExample)
SA515370076B1 (ar) حاوية لتخزين وتوصيل الماء المُعقم ‏
GB2547370A (en) Leak testing method and apparatus for use with heat exchangers
RU2012108759A (ru) Устройство для введения реагента в транспортируемую по трубам текучую среду
MX2016007731A (es) Herramienta para purgar fluido de un tubo.
JP2016085857A5 (enExample)
MD67Z (ro) Instalaţie de epurare a biogazului cu regenerarea dioxidului de carbon
IN2014MN02006A (enExample)
AR103247A1 (es) Dispositivo para evacuar líquidos acumulados en un pozo
JP2015148198A5 (enExample)