JP2013084011A5 - - Google Patents
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- Publication number
- JP2013084011A5 JP2013084011A5 JP2013016097A JP2013016097A JP2013084011A5 JP 2013084011 A5 JP2013084011 A5 JP 2013084011A5 JP 2013016097 A JP2013016097 A JP 2013016097A JP 2013016097 A JP2013016097 A JP 2013016097A JP 2013084011 A5 JP2013084011 A5 JP 2013084011A5
- Authority
- JP
- Japan
- Prior art keywords
- movable portion
- movable
- actuator according
- center axis
- rotation center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052710 silicon Inorganic materials 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 16
- 238000005530 etching Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims 3
- 238000001579 optical reflectometry Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013016097A JP5842837B2 (ja) | 2013-01-30 | 2013-01-30 | アクチュエーター、光スキャナーおよび画像形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013016097A JP5842837B2 (ja) | 2013-01-30 | 2013-01-30 | アクチュエーター、光スキャナーおよび画像形成装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011066803A Division JP5842356B2 (ja) | 2011-03-24 | 2011-03-24 | アクチュエーター、光スキャナーおよび画像形成装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013084011A JP2013084011A (ja) | 2013-05-09 |
| JP2013084011A5 true JP2013084011A5 (enExample) | 2014-05-08 |
| JP5842837B2 JP5842837B2 (ja) | 2016-01-13 |
Family
ID=48529171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013016097A Active JP5842837B2 (ja) | 2013-01-30 | 2013-01-30 | アクチュエーター、光スキャナーおよび画像形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5842837B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN121311809A (zh) * | 2023-06-20 | 2026-01-09 | 富士胶片株式会社 | 微镜器件及光扫描装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3740444B2 (ja) * | 2001-07-11 | 2006-02-01 | キヤノン株式会社 | 光偏向器、それを用いた光学機器、ねじれ揺動体 |
| JP4645067B2 (ja) * | 2004-06-04 | 2011-03-09 | ブラザー工業株式会社 | 反射ミラー製作方法 |
| JP2009069675A (ja) * | 2007-09-14 | 2009-04-02 | Ricoh Co Ltd | 光スキャナ、光走査装置、画像形成装置及び光スキャナの製造方法 |
| JP5521359B2 (ja) * | 2008-03-13 | 2014-06-11 | セイコーエプソン株式会社 | 光偏向器及びその製造方法 |
| JP2009217193A (ja) * | 2008-03-13 | 2009-09-24 | Seiko Epson Corp | 光偏向器及びその製造方法 |
| JP2009294458A (ja) * | 2008-06-05 | 2009-12-17 | Brother Ind Ltd | 光スキャナ |
| JP5655365B2 (ja) * | 2009-08-04 | 2015-01-21 | セイコーエプソン株式会社 | 光偏向器、光偏向器の製造方法および画像表示装置 |
-
2013
- 2013-01-30 JP JP2013016097A patent/JP5842837B2/ja active Active
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