JP2013024719A - 放射状照明と曲面鏡を有する検査装置。 - Google Patents

放射状照明と曲面鏡を有する検査装置。 Download PDF

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Publication number
JP2013024719A
JP2013024719A JP2011159578A JP2011159578A JP2013024719A JP 2013024719 A JP2013024719 A JP 2013024719A JP 2011159578 A JP2011159578 A JP 2011159578A JP 2011159578 A JP2011159578 A JP 2011159578A JP 2013024719 A JP2013024719 A JP 2013024719A
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Japan
Prior art keywords
curved mirror
mirror
illumination
inspection
inspected
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JP2011159578A
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Japanese (ja)
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JP2013024719A5 (https=
Inventor
Shinichi Yoshida
慎一 吉田
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ISC Inc
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ISC Inc
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Priority to JP2011159578A priority Critical patent/JP2013024719A/ja
Publication of JP2013024719A publication Critical patent/JP2013024719A/ja
Publication of JP2013024719A5 publication Critical patent/JP2013024719A5/ja
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JP2011159578A 2011-07-21 2011-07-21 放射状照明と曲面鏡を有する検査装置。 Pending JP2013024719A (ja)

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JP2011159578A JP2013024719A (ja) 2011-07-21 2011-07-21 放射状照明と曲面鏡を有する検査装置。

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JP2011159578A JP2013024719A (ja) 2011-07-21 2011-07-21 放射状照明と曲面鏡を有する検査装置。

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JP2013024719A true JP2013024719A (ja) 2013-02-04
JP2013024719A5 JP2013024719A5 (https=) 2014-09-04

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JP2011159578A Pending JP2013024719A (ja) 2011-07-21 2011-07-21 放射状照明と曲面鏡を有する検査装置。

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018091759A (ja) * 2016-12-05 2018-06-14 リコーエレメックス株式会社 光切断検査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7636204B1 (en) * 2007-10-30 2009-12-22 LumenFlow Corp. 360 degree view imaging system
JP2010261950A (ja) * 2009-05-04 2010-11-18 Hommel-Etamic Gmbh 工作物の空所の内面を模写する装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7636204B1 (en) * 2007-10-30 2009-12-22 LumenFlow Corp. 360 degree view imaging system
JP2010261950A (ja) * 2009-05-04 2010-11-18 Hommel-Etamic Gmbh 工作物の空所の内面を模写する装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018091759A (ja) * 2016-12-05 2018-06-14 リコーエレメックス株式会社 光切断検査装置

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