JP2013003031A5 - - Google Patents

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Publication number
JP2013003031A5
JP2013003031A5 JP2011136010A JP2011136010A JP2013003031A5 JP 2013003031 A5 JP2013003031 A5 JP 2013003031A5 JP 2011136010 A JP2011136010 A JP 2011136010A JP 2011136010 A JP2011136010 A JP 2011136010A JP 2013003031 A5 JP2013003031 A5 JP 2013003031A5
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JP
Japan
Prior art keywords
film
substrate
forming
pressure sensor
manufacturing
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Application number
JP2011136010A
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English (en)
Japanese (ja)
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JP2013003031A (ja
JP5828378B2 (ja
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Priority to JP2011136010A priority Critical patent/JP5828378B2/ja
Priority claimed from JP2011136010A external-priority patent/JP5828378B2/ja
Publication of JP2013003031A publication Critical patent/JP2013003031A/ja
Publication of JP2013003031A5 publication Critical patent/JP2013003031A5/ja
Application granted granted Critical
Publication of JP5828378B2 publication Critical patent/JP5828378B2/ja
Expired - Fee Related legal-status Critical Current
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JP2011136010A 2011-06-20 2011-06-20 圧力センサーデバイスの製造方法 Expired - Fee Related JP5828378B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011136010A JP5828378B2 (ja) 2011-06-20 2011-06-20 圧力センサーデバイスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011136010A JP5828378B2 (ja) 2011-06-20 2011-06-20 圧力センサーデバイスの製造方法

Publications (3)

Publication Number Publication Date
JP2013003031A JP2013003031A (ja) 2013-01-07
JP2013003031A5 true JP2013003031A5 (cg-RX-API-DMAC7.html) 2014-07-31
JP5828378B2 JP5828378B2 (ja) 2015-12-02

Family

ID=47671738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011136010A Expired - Fee Related JP5828378B2 (ja) 2011-06-20 2011-06-20 圧力センサーデバイスの製造方法

Country Status (1)

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JP (1) JP5828378B2 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6824504B2 (ja) * 2015-03-06 2021-02-03 株式会社ＢｌｕｅＳｐｉｎ 磁気メモリ、磁気メモリへのデータ書き込み方法及び半導体装置
JP6541066B2 (ja) * 2015-06-08 2019-07-10 セイコーＮｐｃ株式会社 圧力センサ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5177661A (en) * 1989-01-13 1993-01-05 Kopin Corporation SOI diaphgram sensor
EP0702221A3 (en) * 1994-09-14 1997-05-21 Delco Electronics Corp Sensor integrated on a chip
US6928879B2 (en) * 2003-02-26 2005-08-16 Robert Bosch Gmbh Episeal pressure sensor and method for making an episeal pressure sensor
JP2009139340A (ja) * 2007-12-10 2009-06-25 Seiko Epson Corp 圧力センサの製造方法、圧力センサ、半導体装置、電子機器
WO2010055734A1 (ja) * 2008-11-17 2010-05-20 アルプス電気株式会社 半導体圧力センサ

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