JP2012520053A5 - - Google Patents
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- Publication number
- JP2012520053A5 JP2012520053A5 JP2011552923A JP2011552923A JP2012520053A5 JP 2012520053 A5 JP2012520053 A5 JP 2012520053A5 JP 2011552923 A JP2011552923 A JP 2011552923A JP 2011552923 A JP2011552923 A JP 2011552923A JP 2012520053 A5 JP2012520053 A5 JP 2012520053A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- magnetic flux
- coupled
- ferromagnetic
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic Effects 0.000 claims description 120
- 230000004907 flux Effects 0.000 claims description 71
- 239000000758 substrate Substances 0.000 claims description 66
- 230000005294 ferromagnetic Effects 0.000 claims description 33
- 239000003302 ferromagnetic material Substances 0.000 claims description 17
- 230000001133 acceleration Effects 0.000 claims description 16
- 230000000875 corresponding Effects 0.000 claims description 16
- 239000004020 conductor Substances 0.000 claims description 8
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 5
- 238000000034 method Methods 0.000 description 21
- 230000001808 coupling Effects 0.000 description 18
- 238000010168 coupling process Methods 0.000 description 18
- 238000005859 coupling reaction Methods 0.000 description 18
- 238000000708 deep reactive-ion etching Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000000873 masking Effects 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 3
- 230000037250 Clearance Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000035512 clearance Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US2009/036394 WO2010101577A1 (fr) | 2009-03-06 | 2009-03-06 | Appareil permettant de générer une puissance sensible aux vibrations mécaniques |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012520053A JP2012520053A (ja) | 2012-08-30 |
| JP2012520053A5 true JP2012520053A5 (fr) | 2015-07-02 |
| JP5846688B2 JP5846688B2 (ja) | 2016-01-20 |
Family
ID=42709939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011552923A Expired - Fee Related JP5846688B2 (ja) | 2009-03-06 | 2009-03-06 | 機械的振動に応答して電力を発生させるための装置 |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP2404371A4 (fr) |
| JP (1) | JP5846688B2 (fr) |
| KR (1) | KR101458265B1 (fr) |
| CN (1) | CN102414969B (fr) |
| CA (1) | CA2754553C (fr) |
| WO (1) | WO2010101577A1 (fr) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8443673B2 (en) | 2009-08-03 | 2013-05-21 | Lumedyne Technologies Incorporated | High sensitivity geophone |
| US9716423B1 (en) | 2016-06-24 | 2017-07-25 | Nanoport Technology Inc. | Tactile feedback actuator, electronic device using same, and method of operating same |
| US11210912B2 (en) | 2016-06-24 | 2021-12-28 | Nanoport Technology Inc. | Tactile feedback actuator, electronic device using same, and method of operating same |
| US10719129B2 (en) | 2017-06-21 | 2020-07-21 | Nanoport Technology Inc. | Compound haptic effects using multimodal tactile feedback actuator |
| CN108429327A (zh) * | 2018-03-12 | 2018-08-21 | 联想(北京)有限公司 | 一种电子设备和电子设备的控制方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6127812A (en) * | 1999-02-16 | 2000-10-03 | General Electric Company | Integrated environmental energy extractor |
| ATE426842T1 (de) * | 1999-12-07 | 2009-04-15 | Asulab Sa | Generator insbesondere fur uhrwerk |
| US6768230B2 (en) * | 2002-02-19 | 2004-07-27 | Rockwell Scientific Licensing, Llc | Multiple magnet transducer |
| WO2005031952A1 (fr) * | 2003-08-28 | 2005-04-07 | Rockwell Scientific Licensing, Llc | Generation d'energie electrique par des aimants couples |
| US6927475B2 (en) * | 2003-11-19 | 2005-08-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | Power generator and method for forming same |
| GB2412501B (en) * | 2004-03-26 | 2007-10-31 | Univ Southampton | An electromagnetic device for converting mechanical vibrational energy into electrical energy |
| JP4704093B2 (ja) * | 2005-04-14 | 2011-06-15 | スミダコーポレーション株式会社 | 振動発電機 |
| US8907533B2 (en) * | 2005-12-30 | 2014-12-09 | Inventus Engineering Gmbh | Device for producing electrical energy with oscillating magnet and coil |
| EP1841049B1 (fr) * | 2006-03-28 | 2012-08-15 | Infineon Technologies AG | Micro-générateur électromagnétique |
| CZ2007331A3 (cs) * | 2007-05-09 | 2008-12-29 | Vysoké ucení technické Brno | Elektromagnetický vibracní generátor pro nízké frekvence vibrací |
-
2009
- 2009-03-06 CA CA2754553A patent/CA2754553C/fr not_active Expired - Fee Related
- 2009-03-06 KR KR1020117023377A patent/KR101458265B1/ko not_active IP Right Cessation
- 2009-03-06 EP EP09841253.9A patent/EP2404371A4/fr not_active Withdrawn
- 2009-03-06 JP JP2011552923A patent/JP5846688B2/ja not_active Expired - Fee Related
- 2009-03-06 CN CN200980159132.6A patent/CN102414969B/zh not_active Expired - Fee Related
- 2009-03-06 WO PCT/US2009/036394 patent/WO2010101577A1/fr active Application Filing
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