JP2012501237A5 - - Google Patents

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JP2012501237A5
JP2012501237A5 JP2011525295A JP2011525295A JP2012501237A5 JP 2012501237 A5 JP2012501237 A5 JP 2012501237A5 JP 2011525295 A JP2011525295 A JP 2011525295A JP 2011525295 A JP2011525295 A JP 2011525295A JP 2012501237 A5 JP2012501237 A5 JP 2012501237A5
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sensor device
resonator
hardware
dielectric
hardware device
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JP5715951B2 (ja
JP2012501237A (ja
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Priority claimed from PCT/US2009/055772 external-priority patent/WO2010028077A1/en
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JP2011525295A 2008-09-02 2009-09-02 バイオmemsセンサ及び装置ならびにその方法 Expired - Fee Related JP5715951B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US9368808P 2008-09-02 2008-09-02
US61/093,688 2008-09-02
US18754809P 2009-06-16 2009-06-16
US61/187,548 2009-06-16
PCT/US2009/055772 WO2010028077A1 (en) 2008-09-02 2009-09-02 Biomems sensor and apparatuses and methods thereof

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JP2012501237A JP2012501237A (ja) 2012-01-19
JP2012501237A5 true JP2012501237A5 (enExample) 2012-10-11
JP5715951B2 JP5715951B2 (ja) 2015-05-13

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US (2) US9326728B2 (enExample)
EP (2) EP3009067A1 (enExample)
JP (1) JP5715951B2 (enExample)
KR (1) KR101332239B1 (enExample)
CN (1) CN102123657B (enExample)
BR (1) BRPI0917288A2 (enExample)
CA (1) CA2734690C (enExample)
ES (1) ES2557496T3 (enExample)
WO (1) WO2010028077A1 (enExample)

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