JP2012255061A - Thermally conductive adhesive composition, adhesive sheet, and thermally conductive dicing-die attach film - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a thermally conductive adhesive composition that is excellent in high conductivity and in heat radiation property, is capable of being laminated and die-attached at a low temperature, at a low pressure, and in a short time, and is excellent in reliability after moisture-proof test, and to provide an adhesive sheet and a thermally conductive dicing-die attach film using the composition.SOLUTION: The thermally conductive adhesive composition includes (A) a polymer that has an epoxy resin reactive functional group in the polymer skeleton and whose Tg is ≥95°C, (B) a liquid polymer that has an epoxy resin reactive functional group in the polymer skeleton and whose Tg is ≤-30°C, (C) an epoxy resin having ≥2 epoxy groups in one molecule, and (D) an inorganic filler having thermal conductivity of ≥10 W/mK, the adhesive sheet includes a base material and an adhesive layer comprised of the composition and provided on the base material, and the thermally conductive dicing-die attach film includes a dicing film having a base material and an adhesive layer provided on the base material, and an adhesive layer that is comprised of the composition provided on the adhesive layer of the dicing film.

Description

  INDUSTRIAL APPLICABILITY The present invention is used for manufacturing a semiconductor device, and is particularly suitable for a resin mold type semiconductor package. Low temperature lamination and low temperature die attach are possible, and a void between a substrate and a die attach film at the time of die attachment is provided. TECHNICAL FIELD The present invention relates to a heat conductive adhesive composition with a low content, and an adhesive sheet and a heat conductive dicing die attach film using the same.

  In the manufacturing process of semiconductor devices, a large-diameter silicon wafer on which an IC circuit is formed is cut into semiconductor chips in a dicing process, and the lead frame is thermocompression-bonded and fixed with a curable liquid adhesive (die-bonding material). (Mounting), and after wire bonding between electrodes, it is manufactured by sealing for handling and protection from the external environment. As this sealing form, there are a hermetic sealing type such as metal sealing and ceramic sealing, and a non-hermetic sealing type using a resin. However, the transfer molding method using the latter resin is currently excellent in mass productivity and inexpensive. , The most commonly used. However, while this resin mold package has the above-mentioned advantages, it has disadvantages inferior in moisture resistance / heat resistance, thermal stress relaxation, heat dissipation, and the like.

  In addition, due to the recent demand for higher functionality of electronic components with the downsizing and multi-functionalization of electrical and electronic equipment, the wiring of semiconductor devices has been further miniaturized and increased in density. With the advent of semiconductor devices having a structure (CSP) having the same size as an area array junction type chip having no lead frame or a stacked structure of chips (stacked CSP, SiP), these packaging (PKG) The thermal shock (stress) in) has also become severe.

  Furthermore, in the process of mounting and mounting these semiconductor devices on a printed circuit board, the reflow resistance corresponding to lead-free solder has become high (265 ° C.), which is becoming severe. For this reason, there has been a demand for optimization and high performance of materials used. In particular, in a packaging component material, the die bond material can be controlled over a relatively wide range of characteristics, so that it is possible to easily meet these requirements, and therefore it is possible to cope with severe thermal shock (stress) against the die bond material. A material having a low elastic modulus, high adhesion, and high heat resistance has been demanded.

  In addition, miniaturization is also required for the support substrate on which the semiconductor chip is mounted, and in the case of a liquid adhesive, wire bonding occurs due to contamination of the electrode due to protrusion from the end of the chip at the time of mounting the semiconductor chip or inclination of the chip due to uneven thickness of the adhesive layer. Therefore, it is also desired to form an adhesive film that can improve these disadvantages.

  As these adhesives, conventionally, low elastic modulus materials in which a siloxane structure is introduced into polyimide or polyamideimide, which are resins having excellent heat resistance, have been developed. In Patent Documents 1 and 2 and the like, siloxane-modified polyamideimide is proposed, but low elasticity and adhesion to a substrate are not sufficient.

  Patent Document 3 proposes that a compound having two or more maleimide groups is added to a siloxane-modified polyamideimide to improve high temperature characteristics, but this resin composition is inferior in adhesive strength.

  Further, Patent Documents 4 and 5 propose a heat-resistant adhesive film made of polyimide silicone and epoxy resin excellent in adhesiveness, low elasticity and heat resistance, but the adhesive force is improved, but the low elasticity is reduced. not enough.

Japanese Patent Laid-Open No. 3-189127 JP-A-4-264003 Japanese Patent Laid-Open No. 10-60111 Japanese Patent Laid-Open No. 7-224259 JP-A-8-27427 JP 2003-193016 A

  Due to the recent miniaturization of semiconductor chips and high-speed switching, that is, high-speed operation, the amount of heat generated per unit area tends to increase, and in order to efficiently exhaust heat, a semiconductor adhesive film with high thermal conductivity has become a market requirement. It has become.

  In order to simply increase the thermal conductivity, a composition with a filler with high thermal conductivity cannot be processed as a very fragile film, and practically requires a high temperature, high pressure, and a long time for lamination and die attachment. It is an unsuitable composition. Also, if a large amount of low-viscosity components are added to make the film lamination and die attach conditions low temperature, low pressure, and short time, the viscosity will drop significantly during die attach, resulting in an extremely large number of voids. Will be involved.

  The present invention has been made in view of the above circumstances, and in order to eliminate the above drawbacks, it has excellent heat dissipation characteristics with high thermal conductivity, and can be laminated and die-attached at low temperature, low pressure, and in a short time, and after moisture resistance. An object of the present invention is to provide a heat conductive adhesive composition having excellent reliability, an adhesive sheet using the same, and a heat conductive dicing die attach film.

  As a result of intensive studies to achieve the above object, the inventor has an adhesive composition containing a polymer having a Tg of 95 ° C. or higher because the shear viscosity is in a specific range in the die attach temperature range. We found that die attach is possible at low temperature, low pressure and short time. Further, the present inventor has found that an adhesive composition containing a liquid polymer having a Tg of −30 ° C. or lower can be laminated at a low temperature, a low pressure and in a short time. Furthermore, this inventor discovered that the adhesive composition containing the polymer which has a functional group which can react with an epoxy resin is excellent in the reliability after moisture resistance. Thus, the present inventor has made the present invention.

That is, the present invention first provides a heat conductive adhesive composition containing the following components (A) to (D).
(A) 100 parts by mass of a polymer having a glass transition point (hereinafter sometimes referred to as Tg) having a functional group reactive with an epoxy resin in a polymer skeleton at 95 ° C. or more
(B) 10-100 parts by mass of a liquid polymer having a functional group reactive with an epoxy resin in the polymer skeleton and having a glass transition point of -30 ° C or lower
(C) 50 to 400 parts by mass of an epoxy resin having at least two epoxy groups in one molecule
(D) Inorganic filler with a thermal conductivity of 10 W / mK or more 1000 to 4000 parts by mass

Secondly, the present invention provides an adhesive sheet comprising a base material and an adhesive layer made of the heat conductive adhesive composition provided on the base material.
Thirdly, the present invention provides a dicing film having a base material and a pressure-sensitive adhesive layer provided thereon, and an adhesive comprising the above heat-conductive adhesive composition provided on the pressure-sensitive adhesive layer of the dicing film. A thermally conductive dicing die attach film having a layer is provided.

  The adhesive composition of the present invention has high heat conductivity and excellent heat dissipation characteristics, can be laminated and die-attached at low temperature, low pressure and in a short time, and has excellent reliability after moisture resistance. A highly reliable resin packaging semiconductor device can be manufactured by the adhesive sheet and the thermally conductive dicing die attach film using the adhesive composition of the present invention.

  Hereinafter, the present invention will be described in more detail. In addition, in this specification, a weight average molecular weight and a number average molecular weight mean the weight average molecular weight and number average molecular weight of polystyrene conversion by gel permeation chromatography (GPC), respectively.

The adhesive composition of the present invention contains the components (A) to (D), maintains a shape at room temperature, forms a film-like thin film, and cures through a plastic state by heating. Excellent adhesion to the material, and can be laminated and die-attached at low temperature and low pressure. The cured product of the adhesive composition of the present invention is excellent in thermal conductivity. The semiconductor package manufactured using the heat conductive dicing die attach film provided with the adhesive layer made of the adhesive composition of the present invention is excellent in reliability. The adhesive composition of the present invention preferably has a shear viscosity of 1 × 10 ³ to 1 × 10 ⁵ Pa · s at at least one point of 130 to 170 ° C.

[(A) Polymer having Tg of 95 ° C. or higher having functional group reactive with epoxy resin in polymer skeleton]
The reason why a polymer having a Tg of 95 ° C. or higher is required for the adhesive composition of the present invention is as follows. In general, it is known that Tg is the sum of products of volume fraction of each component contained in the composition and Tg. In order to reduce the void between the adhesive film and the substrate at the time of die attachment, the shear viscosity of the adhesive film at at least one point of 130 to 170 ° C. is in the range of 1 × 10 ³ to 1 × 10 ⁵ Pa · s. It has been experimentally clarified that it is necessary. In order to maintain the above-mentioned shear viscosity within a predetermined range, a polymer component having a higher viscosity than that of the monomer is contained in the composition constituting the adhesive film and has a high Tg of 95 ° C. or higher. It is necessary that an ingredient be included in the composition. (A) A component can be used individually by 1 type and can also use 2 or more types together.

  The functional group reactive with the epoxy resin in the component (A) is, for example, at least one selected from the group consisting of a carboxyl group, an amino group, an imino group, an epoxy group, a phenolic hydroxyl group, and a thiol group. A functional group is mentioned.

  The polymer (A) has a polystyrene-equivalent weight average molecular weight of preferably 10,000 to 200,000, more preferably 20,000 to 100,000, and even more preferably 30,000 to 80,000. . When the weight average molecular weight is within the above range, it is easy to form a coating film from the resulting composition, and an adhesive film having sufficient softness to fill the unevenness of the substrate surface having a fine circuit pattern It is also easy to obtain.

  (A) As a polymer of a component, a polyimide resin is mention | raise | lifted. As the polymer of the component (A), a polyamic acid that is a precursor of a polyimide resin can be used, but water is by-produced by imidization (dehydration ring closure) at the time of heat curing in the die bonding process, and peeling of the adhesive surface is caused. Since it may occur, it is preferable to use a polyimide resin that has been imidized (dehydrated and closed) in advance. Examples of the polyamic acid include those represented by the following general formula (1). As a polyimide resin, what is represented by following General formula (2) is mentioned, for example. The polyamic acid and the polyimide resin may contain a diorganopolysiloxane bond, and preferably have a phenolic hydroxyl group in the skeleton from the viewpoint of adhesiveness.

（式中、Ｘは芳香族環又は脂肪族環を含む四価の有機基、Ｙは二価の有機基、ｑは１〜３００の整数である。）

(In the formula, X is a tetravalent organic group containing an aromatic ring or an aliphatic ring, Y is a divalent organic group, and q is an integer of 1 to 300.)

（式中、Ｘは芳香族環又は脂肪族環を含む四価の有機基、Ｙは二価の有機基、ｑは１〜３００の整数である。）

(In the formula, X is a tetravalent organic group containing an aromatic ring or an aliphatic ring, Y is a divalent organic group, and q is an integer of 1 to 300.)

  In the above general formula (1), q is an integer of 1 to 300, preferably an integer of 2 to 300, particularly an integer of 5 to 300. The polyamic acid having such a repeating number is obtained by the following method. Can be easily obtained. The polyimide resin represented by the general formula (2) can be obtained by dehydrating and ring-closing the polyamic acid represented by the general formula (1) by a conventional method.

  The polyamic acid represented by the general formula (1) has the following structural formula (3)

（但し、Ｘは上記と同様の意味を示す。）
で表されるテトラカルボン酸二無水物と、下記構造式（４）
Ｈ₂Ｎ−Ｙ−ＮＨ₂ （４）
（但し、Ｙは上記と同様の意味を示す。）
で表されるジアミンとを常法に従って、ほぼ等モルで有機溶媒中で反応させることによって得ることができる。

(However, X has the same meaning as described above.)
A tetracarboxylic dianhydride represented by the following structural formula (4)
_{H 2 N-Y-NH 2} (4)
(However, Y has the same meaning as described above.)
According to a conventional method, the diamine can be obtained by reacting in a substantially equimolar amount in an organic solvent.

  Here, specific examples of the tetracarboxylic dianhydride represented by the above formula (3) include the following, but are not limited thereto.

  These tetracarboxylic dianhydrides represented by the above formula (3) may be used alone or in combination of two or more as desired.

-(A) Diaminosiloxane compound Of the diamine represented by the above formula (4), preferably 1 to 80 mol%, more preferably 1 to 60 mol% is represented by the following structural formula (5). A compound is desirable from the viewpoint of solubility in an organic solvent, adhesion to a substrate, low elasticity, and flexibility.

（式中、Ｒ¹は炭素原子数３〜９の二価の有機基、Ｒ²及びＲ³はおのおの独立に非置換又は置換の炭素原子数１〜８の一価炭化水素基であり、ｒは１〜２００の整数である。）

Wherein R ¹ is a divalent organic group having 3 to 9 carbon atoms, R ² and R ³ are each independently an unsubstituted or substituted monovalent hydrocarbon group having 1 to 8 carbon atoms, and r Is an integer from 1 to 200.)

In the siloxane diamine (or α, ω-diaminopolysiloxane) represented by the general formula (5), examples of the divalent organic group having 3 to 9 carbon atoms represented by R ¹ include — (CH _{2 ) 3 -, - (CH 2} ) 4 -, - CH 2 CH (CH 3) -, - (CH 2) 6 -, - (CH 2) 8 - such as an alkylene group,

等のアリーレン基、これらを組み合わせたアルキレン・アリーレン基、−（ＣＨ_２）_３−Ｏ−，−（ＣＨ_２）_４−Ｏ−等のオキシアルキレン基、

Arylene groups such as, alkylene / arylene groups combining these, oxyalkylene groups such as — (CH ₂ ) ₃ —O—, — (CH ₂ ) ₄ —O—,

等のオキシアリーレン基やこれらを組み合わせた

Oxyarylene groups such as

等のオキシアルキレン・アリーレン基などの、エーテル酸素原子を含んでもよい二価炭化水素基が挙げられる。

And a divalent hydrocarbon group which may contain an ether oxygen atom, such as an oxyalkylene / arylene group.

Examples of the unsubstituted or substituted monovalent hydrocarbon group having 1 to 8 carbon atoms represented by R ² or R ³ include, for example, methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert. -Alkyl groups such as butyl group, hexyl group, cyclohexyl group, 2-ethylhexyl group, octyl group, allyl group, propenyl group, isopropenyl group, alkenyl group such as butenyl group, isobutenyl group, hexenyl group, phenyl group, tolyl group An aryl group such as a xylyl group, an aralkyl group such as a benzyl group or a phenylethyl group, or a part or all of the hydrogen atoms bonded to the carbon atoms of these groups are substituted with halogen atoms such as fluorine, bromine or chlorine Groups, for example, halogen-substituted alkyl groups such as chloromethyl group, bromoethyl group, 3,3,3-trifluoropropyl group, etc. Of these, a methyl group and a phenyl group are preferred.

  Specific examples of the diaminosiloxane compound represented by the above formula (5) include those shown below.

  These diaminosiloxane compounds represented by the above formula (5) can be used alone or in combination of two or more as desired.

-(B) Diamine compound which does not have a phenolic hydroxyl group Furthermore, as diamine which does not have a phenolic hydroxyl group other than the diaminosiloxane compound represented by the said Formula (5) among the diamine represented by the said Formula (4). Are, for example, p-phenylenediamine, m-phenylenediamine, 4,4′-diaminodiphenylmethane, 4,4′-diaminodiphenyl ether, 2,2′-bis (4-aminophenyl) propane, 4,4′-diamino Diphenyl sulfone, 4,4′-diaminodiphenyl sulfide, 1,4-bis (3-aminophenoxy) benzene, 1,4-bis (4-aminophenoxy) benzene, 1,4-bis (p-aminophenylsulfonyl) Benzene, 1,4-bis (m-aminophenylsulfonyl) benzene, 1,4-bis (p-aminophenyl) Ruthioether) benzene, 1,4-bis (m-aminophenylthioether) benzene, 2,2-bis [4- (4-aminophenoxy) phenyl] propane, 2,2-bis [3-methyl-4- ( 4-aminophenoxy) phenyl] propane, 2,2-bis [3-chloro-4- (4-aminophenoxy) phenyl] propane, 1,1-bis [4- (4-aminophenoxy) phenyl] ethane, 1 , 1-bis [3-methyl-4- (4-aminophenoxy) phenyl] ethane, 1,1-bis [3-chloro-4- (4-aminophenoxy) phenyl] ethane, 1,1-bis [3 , 5-Dimethyl-4- (4-aminophenoxy) phenyl] ethane, bis [4- (4-aminophenoxy) phenyl] methane, bis [3-methyl-4- (4-aminophen) Xyl) phenyl] methane, bis [3-chloro-4- (4-aminophenoxy) phenyl] methane, bis [3,5-dimethyl-4- (4-aminophenoxy) phenyl] methane, bis [4- (4 -Aminophenoxy) phenyl] sulfone, aromatic ring-containing diamines such as 2,2-bis [4- (4-aminophenoxy) phenyl] perfluoropropane and the like, preferably p-phenylenediamine, m-phenylenediamine 4,4′-diaminodiphenylmethane, 4,4′-diaminodiphenyl ether, 1,4-bis (3-aminophenoxy) benzene, 1,4-bis (4-aminophenoxy) benzene, 2,2-bis [4 -(4-aminophenoxy) phenyl] propane, 2,2-bis [3-methyl-4- (4-aminophenoxy) pheny ] Propane and the like.

  Among the diamines represented by the above formula (4), preferably 40 to 95 mol%, more preferably 50 to 90 mol% is a diamine compound having no phenolic hydroxyl group. It is desirable from the viewpoint of adjusting the flexibility of the resin composition by controlling the crosslinking point and controlling the compatibility with the epoxy resin.

-(C) Diamine compound having phenolic hydroxyl group In the present invention, it is preferable that the polymer skeleton of the polyimide resin has a phenolic hydroxyl group from the viewpoint of adhesion, and the introduction of this hydroxyl group is highly reactive with the epoxy group. It can obtain by using the diamine compound which has the phenolic hydroxyl group which has property, and what is represented by a following formula can be illustrated as such diamine.

（式中、Ｒ⁴は独立に水素原子；フッ素原子、臭素原子、よう素原子などのハロゲン原子；又はアルキル基、アルケニル基、アルキニル基、トリフルオロメチル基、フェニル基などの非置換もしくは置換の炭素原子数１〜８の一価炭化水素基であり、ｎは０〜５の整数であり、ＡおよびＢの各々は互いに同一でも異なっていてもよい。Ｒは独立に水素原子、ハロゲン原子又は非置換もしくは置換の一価炭化水素基である。）

Wherein R ⁴ is independently a hydrogen atom; a halogen atom such as a fluorine atom, a bromine atom or an iodine atom; or an unsubstituted or substituted alkyl group, alkenyl group, alkynyl group, trifluoromethyl group, phenyl group or the like. A monovalent hydrocarbon group having 1 to 8 carbon atoms, n is an integer of 0 to 5, and each of A and B may be the same or different from each other, and R is independently a hydrogen atom, a halogen atom or An unsubstituted or substituted monovalent hydrocarbon group.)

Here, the unsubstituted or substituted monovalent hydrocarbon group having 1 to 8 carbon atoms of R ⁴ is the same as those exemplified for R ² or R ³ above, or an ethynyl group, a propynyl group, or a butynyl group. And alkynyl groups such as a hexynyl group. In addition, the unsubstituted or substituted monovalent hydrocarbon group of R can be exemplified by the same groups as those exemplified for R ⁴ above.

  In the present invention, among the diamine compounds having a phenolic hydroxyl group, a diamine compound represented by the following formula (6) is particularly preferable.

（式中、Ｒ⁴は上記と同じである。）

(In the formula, R ⁴ is the same as above.)

  In the present invention, the amount of the diamine compound having a phenolic hydroxyl group is preferably 5 to 60 mol%, particularly preferably 10 to 40 mol%, based on the entire diamine compound. If the amount is too small, the adhesive strength may be low, and if it is too large, the flexibility of the adhesive layer may be insufficient.

-(D) Monoamine compound which has phenolic hydroxyl group Moreover, the monoamine which has a phenolic hydroxyl group can also be used for introduction | transduction of a phenolic hydroxyl group, and can illustrate the following structure.

（式中、Ｒ⁴は上記と同じであり、各芳香族環に付いている置換基は全て又は一部同じでも構わないし、全て異なっていても構わない。Ｄは１種単独で用いても２種以上を併用してもよい。また、ｐは１〜３の整数である。）

(In the formula, R ⁴ is the same as above, and the substituents attached to each aromatic ring may be all or partly the same or all different. D may be used alone. Two or more may be used in combination, and p is an integer of 1 to 3.)

  When a monoamine having a phenolic hydroxyl group is used, the amount is 1 to 10 mol%, preferably 2 to 8 mol%, based on the entire diamine compound.

  The amine compounds are not limited to these, and these amine compounds can be used alone or in combination of two or more as desired.

  Specific examples of the polyamic acid and polyimide resin formation reaction are as follows. The above starting materials are dissolved in a solvent under an inert atmosphere, and are usually reacted at 80 ° C or lower, preferably 0 to 40 ° C. Synthesize polyamic acid. Further, by heating the obtained polyamic acid to 100 to 200 ° C., preferably 150 to 200 ° C., the acid amide portion of the polyamic acid can be dehydrated and closed to synthesize the target polyimide resin. .

  The organic solvent used for the reaction may not be one that can completely dissolve the starting material as long as it is inert to the resulting polyamic acid. Examples include tetrahydrofuran, 1,4-dioxane, cyclopentanone, cyclohexanone, γ-butyrolactone, N-methylpyrrolidone, N, N-dimethylacetamide, N, N-dimethylformamide and dimethyl sulfoxide, preferably aprotic Polar solvents, particularly preferably N-methylpyrrolidone, cyclohexanone and γ-butyrolactone. These solvents can be used alone or in combination of two or more.

  In order to facilitate the dehydration ring closure, it is desirable to use an azeotropic dehydrating agent such as toluene or xylene. Further, dehydration ring closure can be performed at a low temperature using an acetic anhydride / pyridine mixed solution.

  In order to adjust the molecular weight of the polyamic acid and the polyimide resin, dicarboxylic acid anhydrides such as maleic anhydride and phthalic anhydride, and monoamines such as aniline, n-butylamine, and monoamines having the above-described phenolic hydroxyl groups are used. One or both can be added. However, the addition amount of dicarboxylic anhydride is usually 0 to 2 parts by mass per 100 parts by mass of tetracarboxylic dianhydride, and the addition amount of monoamine is usually 0 to 2 parts by mass per 100 parts by mass of diamine. Part.

  Examples of the polymer of the component (A) include phenoxy resins in addition to polyimide resins. Examples of such phenoxy resins include bisphenol type epoxy resins derived from epichlorohydrin and bisphenol A or F. As such phenoxy resins, PKHC, PKHH, and PKHJ (all manufactured by Sakai Chemical Co., Ltd.), bisphenol A / bisphenol F mixed type product names Epicoat 4250, Epicoat 4275, Epicoat 1255HX30, and Epicoat using brominated epoxy 5580BPX40 (all manufactured by Nippon Kayaku Co., Ltd.), bisphenol A type trade names YP-50, YP-50S, YP-55, YP-70 (all manufactured by Toto Kasei), JER E1256, E4250, E4275, YX6954BH30 YL7290BH30 (all manufactured by Japan Epoxy Resin Co., Ltd.).

[(B) Liquid polymer with functional group reactive with epoxy resin in polymer skeleton with Tg of -30 ° C or lower]
The reason why a liquid polymer having a Tg of −30 ° C. or lower is required for the adhesive composition of the present invention is as follows. The dicing die attach film is generally laminated to a silicon wafer at 40 ° C. to 90 ° C. When the adhesive composition in the dicing die attach film contains only a component having a high Tg of 95 ° C. or higher, lamination conditions of high temperature, high pressure and long time are required. In order to realize lamination at low temperature, low pressure, and short time, it is necessary that the composition contains a liquid polymer having a low Tg of −30 ° C. or lower. (B) A component can be used individually by 1 type and can also use 2 or more types together.

  The functional group reactive with the epoxy resin in the component (B) is, for example, at least one selected from the group consisting of a carboxyl group, an amino group, an imino group, an epoxy group, a phenolic hydroxyl group, and a thiol group. A functional group is mentioned.

  The polymer (B) has a polystyrene-equivalent number average molecular weight of preferably 1,000 to 20,000, more preferably 2,000 to 10,000, and even more preferably 3,000 to 6,000. . When the number average molecular weight is within the above range, it is easy to form a coating film from the resulting composition, and an adhesive film having sufficient softness to fill the unevenness of the substrate surface having a fine circuit pattern It is also easy to obtain.

  Examples of the polymer of the component (B) include diene liquid rubber having a Tg of −30 ° C. or less having a functional group reactive with an epoxy resin in the polymer skeleton. Examples of the diene-based liquid rubber include liquid acrylonitrile butadiene rubber, polybutadiene rubber, polyisoprene rubber, polychloroprene rubber having a Tg of −30 ° C. or less having a functional group reactive with an epoxy resin in the polymer skeleton. be able to. In particular, the acrylonitrile butadiene rubber and the polybutadiene rubber are preferable.

  Specific examples of the polymer of component (B) include polymers represented by the following formula.

（式中、Gはカルボキシル基、アミノ基、エポキシ基、及びチオール基からなる群より選択される少なくとも１種の官能基、R⁵は２価の有機基、Ｌは１≦Ｌ≦２００を満たす整数であり、ｍは０≦ｍ≦１００を満たす整数であり、GとR⁵は環を形成してもよい。）

(In the formula, G is at least one functional group selected from the group consisting of a carboxyl group, an amino group, an epoxy group, and a thiol group, R ⁵ is a divalent organic group, and L satisfies 1 ≦ L ≦ 200. (It is an integer, m is an integer satisfying 0 ≦ m ≦ 100, and G and R ⁵ may form a ring.)

Examples of R ⁵ include an unsubstituted or substituted divalent hydrocarbon group having or not having a hetero atom. Examples of the divalent hydrocarbon group include an unsubstituted, halogen-substituted, alkylene group, cycloalkylene group, arylene group, or a combination of two or more thereof, which may or may not have heteroatoms. Examples of the alkylene group include unsubstituted or halogen atom-substituted methylene group, ethylene group, propylene group, butylene group, pentylene group, hexylene group, heptylene group, and octylene group that have or do not have heteroatoms. Examples of the cycloalkylene group include an unsubstituted or halogen atom-substituted cyclopropylene group, cyclobutylene group, cyclopentylene group, cyclohexylene group and the like, which have or do not have heteroatoms. Examples of the arylene group include an unsubstituted or halogen atom-substituted phenylene group and naphthylene group having or not having a hetero atom. Examples of the hetero atom include an oxygen atom, a nitrogen atom, a sulfur atom, and a phosphorus atom. As a halogen atom, a fluorine atom, a chlorine atom, a bromine atom, an iodine atom etc. are mentioned, for example. The number of carbon atoms of R ⁵ is preferably 1-8, more preferably 1-5.

  L is an integer that usually satisfies 1 ≦ L ≦ 200, preferably 2 ≦ L ≦ 100, more preferably 2 ≦ L <100. m is an integer that usually satisfies 0 ≦ m ≦ 100, preferably 1 ≦ m ≦ 100, more preferably 1 ≦ m ≦ 50, and even more preferably 1 ≦ m <30.

Typical products of the component (B) having a carboxyl group include the following.
Hicar CTBN 1300 × 8
Hicar CTBN 1300 × 9
Hicar CTBN 1300 × 13
Hicar CTBN 1300 × 18
Hicar CTBN 1300 × 31
Hicar CTBN 2000 × 162
(All of the above are manufactured by BF Goodrich)

Typical products having at least one of an amino group and an imino group include the following.
Hicar ATBN 1300 × 16
Hicar ATBN 1300 × 21
Hicar ATBN 1300 × 35
Hicar ATBN 1300 × 42
Hicar ATBN 1300 × 45
(All of the above are manufactured by BF Goodrich)

The following are mentioned as typical goods which have an epoxy group.
Hicar ETBN 1300 × 40 (BF Goodrich)
NISSO EPB-13 (Nippon Soda Co., Ltd.)
Epolide PB3600 (manufactured by Daicel Chemical Industries, Ltd.)
E-1800-6.5 (Nippon Oil Co., Ltd.)

  (B) The compounding quantity of a component is 10-100 mass parts normally with respect to 100 mass parts of polymers of (A) component, Preferably it is 10-50 mass parts. When the blending amount of the component (B) is too small, the resulting composition may have a reduced viscosity at the time of die attachment, and may not follow the unevenness of the substrate. When the blending amount of component (B) is too large, the resulting composition may have an excessive increase in viscosity at the time of die attachment, and may not follow the unevenness of the substrate.

[(C) Epoxy resin having at least two epoxy groups in one molecule]
The molecular structure, molecular weight, etc. of the epoxy resin as component (C) are not particularly limited. The epoxy resin of component (C) has a polystyrene-equivalent weight average molecular weight of preferably 100 to 10,000, more preferably 100 to 1,000. (C) A component can be used individually by 1 type and can also use 2 or more types together.

  As such an epoxy compound, for example, bis (4-hydroxyphenyl) methane, 2,2′-bis (4-hydroxyphenyl) propane or a diglycidyl ether of this halide and a condensation polymer thereof (so-called bisphenol F) Type epoxy resin, bisphenol A type epoxy resin, etc.), butadiene diepoxide, vinylcyclohexene dioxide, diglycidyl ether of resorcin, 1,4-bis (2,3-epoxypropoxy) benzene, 4,4′-bis (2 , 3-epoxypropoxy) diphenyl ether, 1,4-bis (2,3-epoxypropoxy) cyclohexene, bis (3,4-epoxy-6-methylcyclohexylmethyl) adipate, 1,2-dioxybenzene or resorcinol, many Polyhydric phenol or many Epoxy novolac obtained by condensing novolak type phenol resin (or halogenated novolak type phenol resin) such as epoxy glycidyl ether or polyglycidyl ester, phenol novolak, cresol novolak and the like obtained by condensing alcohol and epichlorohydrin and epichlorohydrin ( In other words, novolac type epoxy resin), epoxidized polyolefin epoxidized by peroxidation method, epoxidized polybutadiene, naphthalene ring-containing epoxy resin, biphenyl type epoxy resin, phenol aralkyl type epoxy resin, biphenyl aralkyl type epoxy resin, cyclopentadiene type epoxy Resin etc. are mentioned.

  It should be noted that a monoepoxy compound may be appropriately used in combination with an epoxy compound having at least two epoxy groups in one molecule. Examples of the monoepoxy compound include styrene oxide, cyclohexene oxide, propylene oxide, methyl glycidyl ether, Examples include ethyl glycidyl ether, phenyl glycidyl ether, allyl glycidyl ether, octylene oxide, dodecene oxide and the like. Monoepoxy compounds can be used alone or in combination of two or more.

  (C) The compounding quantity of component is 50-400 mass parts normally with respect to 100 mass parts of polymers of (A) component, Most preferably, it is 80-300 mass parts. If the amount of the epoxy resin is too small, the adhesive strength may be inferior. If the amount is too large, the liquid epoxy resin may cause excessive tackiness on the film and may be difficult to handle. In some cases, the adhesive layer may not be in a film state.

[(D) Inorganic filler with thermal conductivity of 10 W / mK or more]
The thermal conductivity of the inorganic filler (D) is usually 10 W / mK or higher, preferably 20 W / mK or higher, particularly preferably 30 W / mK or higher. In this specification, the thermal conductivity is a value at 25 ° C. When the thermal conductivity is less than 10 W / mK, the heat dissipation is insufficient, and the temperature of the semiconductor element and the substrate may increase. The upper limit of the thermal conductivity is not particularly limited, but is typically 500 W / mK or less. Specific examples of the component (D) include oxide powders such as alumina powder, zinc oxide powder, and magnesium oxide powder; nitrides such as aluminum nitride, hexagonal boron nitride, cubic boron nitride, and silicon nitride; aluminum powder, Examples thereof include metal powders such as copper powder, silver powder, gold powder and metal silicon powder; carbon powders such as diamond powder and carbon nanotubes. (D) A component may be used individually by 1 type, or may be used as a 2 or more types of mixture. (D) It is preferable that the average particle diameter of a component is 0.05-50 micrometers.

  (D) The compounding quantity of a component is 1000-4000 mass parts normally with respect to 100 mass parts of polymers of (A) component, Preferably it is 1000-2000 mass parts. When there are too few compounding quantities of (D) component, the cured | curing material which has the heat conductivity required industrially may not be obtained. When there are too many compounding quantities of (D) component, the composition obtained may not make a film shape and it may become difficult to use as a film adhesive.

[(E) Curing catalyst]
The epoxy resin curing catalyst (E) used in the present invention is not particularly limited, and examples thereof include phosphorus catalysts and amine catalysts. (E) A component can be used individually by 1 type and can also use 2 or more types together.

  Here, examples of the phosphorus-based catalyst include triphenylphosphine, triphenylphosphonium triphenylborate, tetraphenylphosphonium tetraphenylborate, and compounds shown below.

（式中、Ｒ⁶〜Ｒ¹³は水素原子又はフッ素、臭素、よう素などのハロゲン原子、あるいは炭素原子数１〜８のアルキル基、アルケニル基、アルキニル基、又は炭素原子数１〜８のアルコキシ基、トリフルオロメチル基、フェニル基などの非置換もしくは置換一価炭化水素基であり、総ての置換基が同一でも、おのおの異なっていても構わない。）

(Wherein R ^{6 to} R ¹³ are a hydrogen atom or a halogen atom such as fluorine, bromine or iodine, or an alkyl group, alkenyl group, alkynyl group, or alkoxy having 1 to 8 carbon atoms) A non-substituted or substituted monovalent hydrocarbon group such as a group, a trifluoromethyl group or a phenyl group, and all the substituents may be the same or different.)

Here, examples of the monovalent hydrocarbon group of R ^{6 to} R ¹³ are the same as those exemplified for R ⁴ above, and alkoxy groups such as a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, and a butoxy group. Can be mentioned.

  Examples of the amine catalyst include imidazole derivatives such as dicyandiamide, 2-methylimidazole, 2-ethyl-4-methylimidazole, 1-cyanoethyl-2-methylimidazole, 2-phenyl-4,5-dihydroxymethylimidazole, and the like. It is done.

  The amount of component (E) may be a catalytic amount (that is, an effective amount as a catalyst).

[(F) Epoxy resin curing agent]
In the adhesive composition of the present invention, (F) an epoxy resin curing agent can be used. As this curing agent, conventionally known various curing agents for epoxy resins can be used, for example, diethylenetriamine, triethylenetetramine, diethylaminopropylamine, N-aminoethylpiperazine, bis (4-amino). Amine compounds such as -3-methylcyclohexyl) methane, metaxylylenediamine, menthanediamine, 3,9-bis (3-aminopropyl) -2,4,8,10-tetraoxaspiro (5,5) undecane Epoxy resins-modified aliphatic polyamines such as diethylenetriamine adducts, amine-ethylene oxide adducts, cyanoethylated polyamines; bisphenol A, trimethylolallyloxyphenol, low polymerization degree phenol novolac resins, epoxidized or butylated pheno Le resin or "Super Beckcite" 1001 [manufactured by Nippon Reichhold Chemical Co. (Ltd.)], "Hitanol" 4010 [(Ltd.) manufactured by Hitachi, Ltd.], Scado form L. A phenolic resin containing at least two phenolic hydroxyl groups in the molecule, such as a phenolic resin known under the trade name of 9 (manufactured by Scado Zwoll, The Netherlands), Methylon 75108 (manufactured by General Electric, USA); and “Beckamine "P. 138 [manufactured by Nippon Reichhold Chemical Co., Ltd.], “Melan” [manufactured by Hitachi, Ltd.], “U-Van” 10R [manufactured by Toyo Kodan Kogyo Co., Ltd.], etc. Resin; amino resin such as melamine resin and aniline resin; represented by formula HS (C ₂ H ₄ OCH ₂ OC ₂ H ₄ SS) _s C ₂ H ₄ OCH ₂ OC ₂ H ₄ SH (s = 1 to 10 integer) Polysulfide resin having at least two mercapto groups in one molecule; phthalic anhydride, hexahydrophthalic anhydride, tetrahydrophthalic anhydride, pyromellitic anhydride, methyl nadic acid, dodecyl succinic anhydride, chlorendic anhydride Examples thereof include organic acids such as acids or anhydrides (acid anhydrides) thereof. Among the curing agents described above, the phenolic resin (phenol novolac resin) gives good molding workability to the composition of the present invention, provides excellent moisture resistance, is non-toxic and relatively inexpensive. Is desirable. The curing agent of component (F) is not necessarily limited to one type in use, and two or more types may be used in combination depending on the curing performance.

  The amount of the curing agent used varies depending on its specific type, but generally ranges from 0 to 100 parts by weight, preferably from 5 to 50 parts by weight, based on 100 parts by weight of the epoxy resin. It is preferable. When the amount of the curing agent used is less than 1 part by mass, it may be difficult to cure the composition of the present invention satisfactorily. May be diluted to require a long time for curing, and there may be a disadvantage that the physical properties of the cured product are deteriorated.

  Moreover, when using the polyimide resin which has a phenolic hydroxyl group in frame | skeleton as (A) component, the compounding ratio with an epoxy resin and a phenol-type resin hardening | curing agent is important. In this case, the curing reaction is carried out by utilizing the reaction between the phenolic hydroxyl group and the epoxy group. However, if the epoxy group is too small, the adhesive force with the adherend may not be sufficient. Since the elastic modulus may be increased by the resin, it is unsuitable for producing a flexible adhesive sheet. Therefore, the blending amount of the epoxy resin and the phenolic resin curing agent is 1 to 900 parts by mass, preferably 5 to 400 parts by mass with respect to 100 parts by mass of the polyimide resin.

  Here, the total chemical equivalent ratio of the phenolic resin curing agent to the epoxy resin and the polyimide resin having a phenolic hydroxyl group in the skeleton is not particularly limited, but is preferably in the range of 0.7 to 1.3, More preferably, it is 0.8-1.2. If this range is exceeded, the characteristics may change over time.

  In addition, also when not using a phenol-type resin as an epoxy resin hardening | curing agent, the compounding quantity and equivalent ratio of a polyimide resin and an epoxy resin can be made the same as the above.

[Other ingredients]
Further, the resin composition of the present invention includes a filler other than the component (D) such as silica fine powder, titanium oxide, carbon black, and conductive particles, an inorganic type, or the like within a range not impairing the effects of the present invention. Coloring agents such as organic pigments and dyes, additives such as wetting improvers, antioxidants and heat stabilizers can be added according to the purpose.

[Preparation Method and Use of Adhesive Composition]
The adhesive composition of the present invention can be prepared by mixing the above components (A) to (D) and, if necessary, the components (E), (F) and other components according to a conventional method. it can.

  The usage method of the adhesive composition of the present invention obtained above is as follows. For example, the adhesive composition is dissolved in an aprotic polar solvent such as toluene, cyclohexanone, or NMP at an appropriate concentration, applied onto a substrate, dried, and the adherend is pressure-bonded and heat-cured. In addition, an adhesive composition dissolved in an appropriate concentration in a solvent is applied onto a supporting substrate (hereinafter sometimes simply referred to as a substrate), dried, and the substrate and the substrate provided on the substrate are dried. An adhesive sheet comprising an adhesive layer made of the composition (this composition formed into a film shape, hereinafter referred to as an adhesive film) is obtained, and the adhesive film is formed of a substrate and an adherend. It can also be bonded by pinching, pressure bonding, heat curing. As the substrate, polyethylene, polypropylene, polyester, polyamide, polyimide, polyamideimide, polyetherimide, polytetrafluoroethylene, paper, metal foil or the like, or those obtained by releasing the surface thereof can be used.

When the adhesive composition is formed into a film to obtain an adhesive film, it is preferably dried at room temperature to 200 ° C., particularly 80 to 150 ° C. for 1 minute to 1 hour, particularly 3 to 10 minutes.
The film thickness of the adhesive film is not particularly limited and can be selected according to the purpose. The adhesive film is cured at a pressure of 0.01 to 10 MPa, particularly 0.1 to 2 MPa, and then cured at a temperature of 100 to 200 ° C., particularly 120 to 180 ° C. for 30 minutes to 5 hours, particularly 1 to 4 hours. It is preferable.

  The usage method of the heat conductive dicing die attach film which uses the adhesive composition of this invention as an adhesive bond layer is as follows. If necessary, the base material film on the adhesive layer side is peeled off. The wafer is fixed on the dicing die attach film by thermocompression bonding to the adhesive layer of the dicing die attach film. The thermocompression bonding conditions can be variously selected depending on the composition of the adhesive layer, but are usually 40 to 120 ° C. and 0.01 to 0.2 MPa. Next, the chip is fixed to a dicing apparatus, and after dicing, the chip with the adhesive layer attached is peeled off from the pressure-sensitive adhesive layer and picked up, and the chip is bonded to the lead frame by thermocompression bonding and heat curing. The thermocompression bonding conditions can be the same as the thermocompression bonding conditions of the wafer and the adhesive layer, and the heat curing conditions can be variously selected depending on the composition of the adhesive layer. is there.

  The adhesive composition of the present invention can be used not only as a dicing die attach film in the production of electronic parts, but also in various processes involving adhesion.

  EXAMPLES Hereinafter, although an Example and a comparative example are shown and this invention is demonstrated concretely, this invention is not restrict | limited to the following Example.

[material]
(A) Polymer having functional group reactive with epoxy resin in polymer skeleton and Tg of 95 ° C. or higher ・ Polyimide resin having phenolic hydroxyl group obtained in Synthesis Example 1 below ・ jER (registered trademark) 1256 (trade name, (Product made by JER, phenoxy resin having epoxy group, weight average molecular weight: 50000, Tg: 100 ° C)
(A ') Polymer having functional group reactive with epoxy resin in polymer skeleton and Tg of more than -30 ℃ and less than 95 ℃ (for comparison)
-Polyimide resin having a phenolic hydroxyl group obtained in Synthesis Example 2 below
(B) Polymer having functional group reactive with epoxy resin in polymer skeleton and Tg of −30 ° C. or lower ・ ATBN 1300 × 16 (trade name, manufactured by BF Goodrich, number average molecular weight: 1800, Tg: −51 ° C.)
CTBN 1300x31 (trade name, manufactured by BF Goodrich, number average molecular weight: 3800, Tg: -66 ° C)
E-1800-6.5 (trade name, manufactured by Nippon Oil Co., Ltd., Tg: -60 ° C)
(C) Epoxy resin having at least two epoxy groups in one molecule RE-310S: Bisphenol A type epoxy resin (trade name, manufactured by Nippon Kayaku Co., Ltd., weight average molecular weight: 600)
(D) Inorganic filler with a thermal conductivity of 10 W / mK or more AO-502 (trade name, manufactured by Admatechs, alumina, thermal conductivity: 27 W / mK)
-2 types of zinc oxide (trade name, manufactured by Mitsui Kinzoku Co., Ltd., zinc oxide, thermal conductivity: 25W / mK)
(D ') Inorganic filler with thermal conductivity less than 10W / mK (for comparison)
・ SO-C2 (trade name, manufactured by Admatex, silica, thermal conductivity: 1.3 W / mK)
(E) Curing catalyst-DICY-7 (trade name, manufactured by JER Corporation, dicyandiamide)

[Synthesis of polyimide resin]
[Synthesis Example 1]
A diaminosiloxane (trade name: KF-8010, Shin-Etsu Chemical Co., Ltd.) having the following structural formula as a diamine was added to a 1-L separable flask equipped with a 25 ml water meter with a faucet connected to a reflux condenser, a thermometer, and a stirrer. (Made) 44.03 parts by mass and 100 parts by mass of 2-methylpyrrolidone as a reaction solvent were charged and stirred at 80 ° C. to disperse the diamine in the reaction solvent. A solution consisting of 38.72 parts by mass of acid anhydride 6FDA (2,2-bis (3,4-dicarboxyphenyl) hexafluoropropane dianhydride) and 100 parts by mass of 2-methylpyrrolidone was added dropwise thereto. The mixture was stirred at room temperature for 2 hours to react a diamine with an acid anhydride to synthesize an acid anhydride-rich amic acid oligomer.

但し、ｔ＝１０

Where t = 10

  Next, the following formula:

で示されるフェノール性水酸基を有する芳香族ジアミン１７．２５質量部と２−メチルピロリドン１００質量部とを、還流冷却器を連結した２５ｍｌのコック付き水分定量受器、温度計、及び攪拌器を備えた１Ｌのセパラブルフラスコに仕込み、芳香族ジアミンを２−メチルピロリドン中に分散させた。これに前出の酸無水物リッチのアミック酸オリゴマーを滴下した後、室温で１６時間攪拌し、ポリアミック酸溶液を合成した。その後、この溶液にキシレン２５ｍｌを投入してから温度を上げ、約１８０℃で２時間還流させた。水分定量受器に所定量の水がたまっていること、水の流出が見られなくなっていることを確認し、水分定量受器にたまっている流出液を除去しながら、１８０℃でキシレンを除去した。反応終了後、大過剰のメタノール中に得られた反応液を滴下し、ポリマーを析出させ、減圧乾燥して、骨格中にフェノール性の水酸基を有するポリイミド樹脂を得た。フェノール性水酸基の含有量はアミンユニットに対して２０モル％であった。また、重量平均分子量は５００００であった。

A 25-ml water meter with a cock, thermometer, and stirrer having 17.25 parts by mass of an aromatic diamine having a phenolic hydroxyl group and 100 parts by mass of 2-methylpyrrolidone connected to a reflux condenser. The 1 L separable flask was charged and the aromatic diamine was dispersed in 2-methylpyrrolidone. The acid anhydride-rich amic acid oligomer described above was added dropwise thereto, and the mixture was stirred at room temperature for 16 hours to synthesize a polyamic acid solution. Thereafter, 25 ml of xylene was added to this solution, and then the temperature was raised and refluxed at about 180 ° C. for 2 hours. Confirm that the specified amount of water has accumulated in the moisture meter and that no water has flowed out, and remove xylene at 180 ° C while removing the effluent collected in the meter. did. After completion of the reaction, the reaction solution obtained in a large excess of methanol was added dropwise to precipitate a polymer and dried under reduced pressure to obtain a polyimide resin having a phenolic hydroxyl group in the skeleton. The content of the phenolic hydroxyl group was 20 mol% with respect to the amine unit. Moreover, the weight average molecular weight was 50000.

When the infrared absorption spectrum of the obtained polyimide resin was measured, absorption based on polyamic acid indicating that there was an unreacted functional group did not appear, and absorption based on an imide group was confirmed at 1780 cm ⁻¹ and 1720 cm ^−1. Absorption based on a phenolic hydroxyl group was confirmed at 3500 cm ⁻¹ .

  The obtained polyimide resin was cast on a Teflon (registered trademark) film to prepare a polyimide film having a thickness of 100 μm. The Tg of this polyimide film was measured by a thermomechanical analysis (TMA) method with a thermomechanical tester TM-7000 manufactured by Vacuum Riko Co., Ltd. under the conditions of a load of 10 g and a heating rate of 10 ° C / min. It was.

[Synthesis Example 2]
In Synthesis Example 1, except that the amount of the diaminosiloxane was changed from 44.03 parts by mass to 58.71 parts by mass, and the amount of the aromatic diamine was changed from 17.25 parts by mass to 8.63 parts by mass, In the same manner as in Synthesis Example 1, a polyimide resin having a phenolic hydroxyl group in the skeleton was obtained. The content of the phenolic hydroxyl group was 10 mol% with respect to the amine unit. Moreover, the weight average molecular weight was 60000.

When the infrared absorption spectrum of the obtained polyimide resin was measured, absorption based on polyamic acid indicating that there was an unreacted functional group did not appear, and absorption based on an imide group was confirmed at 1780 cm ⁻¹ and 1720 cm ^−1. Absorption based on a phenolic hydroxyl group was confirmed at 3500 cm ⁻¹ .

  A polyimide film having a thickness of 100 μm was produced from the obtained polyimide in the same manner as in Synthesis Example 1, and the Tg of this polyimide film was measured in the same manner as in Synthesis Example 1 to be 40 ° C.

[Preparation and property evaluation of adhesive composition]
[Examples 1-6, Comparative Examples 1-6]
The component (A) or the component (A ′) is dissolved in a polymer diluent solvent (cyclohexanone) in the blending amounts shown in Table 1 or 2 below, and the resulting solution contains the components (B), (C), and (D). The component (D ′), the component (E) and the post-addition solvent were added in the blending amounts shown in Table 1 or 2 below and mixed to prepare an adhesive composition.

[Preparation of adhesive sheet]
The adhesive composition obtained above was coated on a PET film having a thickness of 38 μm and a diameter of 8 inches coated with a fluorosilicone release agent, dried by heating at 110 ° C. for 10 minutes, and an adhesive layer having a thickness of about 25 μm. An adhesive sheet provided (hereinafter referred to as an adhesive film) was produced.

[Lamination temperature]
The produced adhesive sheet was attached to an 8-inch silicon wafer having a thickness of 75 μm at various temperatures using a film mounter FM-114 manufactured by Technovision, and the PET film was peeled off. A dicing film is attached to the exposed adhesive film so that the adhesive film and the adhesive layer of the dicing film are in contact with each other, and silicon is sized at 9mm x 9mm at 40000rpm, 50mm / min using DISCOR's Dicer DAD341. The wafer and the adhesive film were diced. The silicon wafer sized in this way was picked up. Of the temperatures at which the adhesive sheet is attached to the silicon wafer, the lowest temperature at which no peeling occurs between the silicon wafer and the adhesive film during pick-up of the silicon wafer is defined as the lamination temperature.
The laminating temperature is preferably room temperature to 80 ° C. or less because there is a heat resistance limit in the portion of the dicing die attach film that functions as the dicing film.

[Die attach temperature]
Multi-purpose die bonder BESTEM manufactured by Canon Machinery Co., Ltd. was used so that the obtained 9 mm × 9 mm silicon wafer with an adhesive film was placed on a BT substrate having a surface roughness of 5 μm or less so that the adhesive film and the BT substrate were in contact with each other. -D03 Die attach at various temperatures under conditions of 800gf and 1sec. The lowest temperature at which the width of the fillet of the adhesive film formed on the silicon wafer and the BT substrate becomes 0 to 500 μm or less was defined as the die attach temperature. The results are shown in Table 1 or 2.

[Shear viscosity at die attach temperature]
The above-mentioned adhesive film was laminated, and a disc-shaped laminate having a thickness of 1 mm and a diameter of 8 mm made of the adhesive film was produced. The temperature-viscosity dependency of this laminate (film adhesive composition) was measured with a rheometer MARS II manufactured by HAAKE at a frequency of 1 Hz, a load of 0.2 N, and a temperature increase rate of 10 ° C./min. The shear viscosity at the die attach temperature obtained above is shown in Table 1 or 2.

[Void area under die]
The silicon wafer with an adhesive film was die-attached onto the BT substrate at the above-mentioned die attach temperature in the same manner as described above to produce a laminate composed of the silicon wafer, the adhesive film, and the BT substrate. This laminate was heated to 175 ° C. to cure the adhesive film, and then the void layer between the cured adhesive film and the BT substrate in the laminate was observed with an ultrasonic flaw detector FineSAT FS100II manufactured by Hitachi Construction Machinery Co., Ltd. The area ratio of the void layer to the silicon wafer was defined as the void area under the die. The results are shown in Table 1 or 2.
Since the void between the adhesive film and the substrate causes a decrease in the reliability of the semiconductor device, the void area under the die is preferably 5% or less.

[Thermal conductivity]
The above-mentioned adhesive film was laminated, and a disc-shaped laminate composed of the adhesive film and having a thickness of 50 μm and a diameter of 12.5 mm was produced. This laminate was sandwiched between two 1 mm thick Al plates and heated to 175 ° C. to cure the adhesive film, and then cured with a laser flash method using a Xenon flash analyzer LFA 447 from NETZSCH. The thermal conductivity was measured. The results are shown in Table 1 or 2.

Claims (11)

The heat conductive adhesive composition containing the following (A)-(D) component.
(A) 100 parts by mass of a polymer having a glass transition point of 95 ° C. or higher having a functional group reactive with an epoxy resin in the polymer skeleton
(B) 10-100 parts by mass of a liquid polymer having a functional group reactive with an epoxy resin in the polymer skeleton and having a glass transition point of -30 ° C or lower
(C) 50 to 400 parts by mass of an epoxy resin having at least two epoxy groups in one molecule
(D) Inorganic filler with a thermal conductivity of 10 W / mK or more 1000 to 4000 parts by mass The heat conductive adhesive composition whose shear viscosity in at least 1 point of 130-170 degreeC is 1 * 10 < ³ > -1 * 10 < ⁵ > Pa * s.   The functional group in the component (A) and the component (B) is at least one functional group selected from the group consisting of a carboxyl group, an amino group, an imino group, an epoxy group, a phenolic hydroxyl group, and a thiol group. The heat conductive adhesive composition which concerns on a certain 1 or 2. The component (A) is selected from the group consisting of a polyimide resin that is a ring-closing derivative of polyamic acid that is a reaction product of a tetracarboxylic dianhydride and a diamine compound containing a diamine represented by the following formula (5). The thermally conductive adhesive composition according to any one of claims 1 to 3, wherein the polymer contains at least one kind of polymer.

Wherein R ¹ is a divalent organic group having 3 to 9 carbon atoms, R ² and R ³ are each independently an unsubstituted or substituted monovalent hydrocarbon group having 1 to 8 carbon atoms, and r Is an integer from 1 to 200.) The thermally conductive adhesive composition according to claim 4, wherein the diamine compound further comprises a diamine represented by the following formula (6 ').

[Wherein, R ⁴ is independently a hydrogen atom, a halogen atom, or an unsubstituted or substituted monovalent hydrocarbon group having 1 to 8 carbon atoms, n is an integer of 0 to 5, and A is independently

(In the formula, R ⁴ is the same as above, and R is independently a hydrogen atom, a halogen atom, or an unsubstituted or substituted monovalent hydrocarbon group.)
And B is independently

(In the formula, R ⁴ is the same as above.)
It is. ] The heat conductive adhesive composition according to claim 5, wherein the diamine represented by the formula (6 ') is a diamine represented by the following formula (6).

(In the formula, R ⁴ is the same as above.)   The thermally conductive adhesive according to any one of claims 1 to 6, wherein the component (B) is a diene liquid rubber having a functional group reactive with an epoxy resin in a polymer skeleton and having a glass transition point of -30 ° C or lower. Agent composition. The thermally conductive adhesive composition according to any one of claims 1 to 7, wherein the component (B) is a polymer represented by the following formula.

(In the formula, G is at least one functional group selected from the group consisting of a carboxyl group, an amino group, an epoxy group, and a thiol group, R ⁵ is a divalent organic group, and L satisfies 1 ≦ L ≦ 200. (It is an integer, m is an integer satisfying 0 ≦ m ≦ 100, and G and R ⁵ may form a ring.)   The heat conductive adhesive composition which concerns on any one of Claims 1-8 shape | molded by the film form.   The adhesive sheet provided with the base material and the adhesive bond layer which consists of a heat conductive adhesive composition of any one of Claims 1-9 provided on this base material.   The dicing film which has a base material and the adhesive layer provided on it, and the heat conductive adhesive composition of any one of Claims 1-9 provided on the adhesive layer of this dicing film Thermally conductive dicing die attach film provided with an adhesive layer made of material.