JP2012232880A - Scribe device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a scribe device capable of eliminating troubles caused by the spattering of chips and offcuts when forming scribe grooves.SOLUTION: In the scribe device A in which a scribe head 7 having a cutter attaching member 10 for holding a cutter wheel 11 and a holder 9 turnably supporting a supporting shaft 12 of the cutter attaching member 10 via a bearing holder 13 is installed so as to be able to move along a guide 6 arranged in a guide 3 bar of the scribe device A, a gas blowing out opening 16 is formed in the scribe head 7, and the gas blowing out opening 16 is formed so as to blow out to a blade tip part of the cutter wheel 11 while putting the guide bar 3 side in an upstream.

Description

  The present invention relates to a scribing apparatus for forming a scribe groove (cut groove) in a brittle material substrate such as a glass substrate or a semiconductor substrate.

  In the process of cutting a glass substrate which is a brittle material substrate, a method of forming a scribe groove by moving a cutter wheel (also called a scribing wheel) against the substrate surface is generally known. 1 is also disclosed.

With reference to FIG. 7, the outline | summary of the scribe apparatus of patent document 1 is demonstrated.
A scribing head 22 having a cutter wheel 21 at the lower end is provided so as to be movable in the X direction along the guide 24 of a guide bar 23 extending in the X direction above the substrate surface. The guide bar 23 is supported by left and right support columns 25 and 25 and is formed so as to be movable in the Y direction along the guide rail 26. A table 27 that can be rotated in a horizontal plane is disposed below the scribe head 22, and the substrate W is placed on the table 27.

As shown in FIG. 8, the cutter wheel 21 is pivotally supported around a rotation axis at the lower part of a cutter attachment member (holder joint) 29, and is attached to the holder 28 via the cutter attachment member 29.
The scribe head 22 holds a holder 28 that can be moved up and down, and the cutter mounting member 29 has a support shaft 30 that is perpendicular to the upper part, and the support shaft 30 rotates to the lower part of the holder 28 via a bearing 31. Supported as possible. The position of the rotation axis of the cutter wheel 21 is set so that it moves off the line extending the support shaft 30 vertically downward, for example, to move in the same manner as a caster of a chair, and moves the scribe head 22 linearly. When this is done, the straightness in the rolling direction of the cutter wheel 21 is maintained (so-called caster effect). The cutter wheel 21 is lowered so that the cutting edge is pressed against the substrate W on the table 27, and the scribe head 22 is moved in the X direction along the guide 24, whereby the scribe groove is processed in the substrate W. .

  By the way, in order to blow off chips such as glass scraps generated during the processing of the scribe groove and small end materials, the inside of the cutter mounting member 29 (to support the cutter wheel 21 rotatably, in an obliquely upper direction of the cutter wheel 21). ), An air outlet 32 for blowing out compressed air downward is opened. The air outlet 32 communicates with a compressed air supply source (not shown) through a flow path 33 that passes through the cutter attachment member 29 and the support shaft 30, and the air outlet 32 is used when the scribe groove is formed. Then, compressed air is blown toward the cutter wheel 21 to blow off chips and scraps.

JP 2000-247667 A

  By the way, as shown in FIG. 8, when the compressed air is blown out from the air outlet 32 formed inside the cutter mounting member 29 obliquely above the cutter wheel 21, the compressed air is directed downward to face the opposing substrate. Although it is sprayed on the surface of W, after that, compressed air is scattered and blown away outward together with the chips, or it is swung up again, and its scattering direction cannot be controlled. As a result, chips and scraps may enter the bearing 31 and other motion mechanisms, causing malfunctions. In particular, when the scattered chips adhere to the linear scale S for detecting the position of the scribe head provided in the lower part of the guide bar 23 in parallel with the traveling direction of the scribe head 22 (cutter wheel 21), the measurement of the linear scale S is performed. There were problems such as errors and reading errors.

  Then, an object of this invention is to provide the scribing apparatus which can eliminate the trouble which arises by scattering of a chip and an end material at the time of formation of a scribe groove | channel.

The scribing device of the present invention, which has been made to solve the above problems, supports a cutter mounting member that holds a cutter wheel in a rollable manner and a support shaft formed on the cutter mounting member so as to be rotatable via a bearing. And a scribing head with a holder. The scribing head is supported by a guide bar provided with a guide for moving the scribing head and a position detection mechanism for detecting the position of the scribing head, and rolls the cutter wheel on the substrate to be processed. Thus, a scribe groove is formed.
The scribe head is formed with a gas blowout port for blowing out purge gas from the side of the cutter wheel, and the guide bar is blown toward the blade edge portion so as to be upstream of the flow of purge gas from the gas blowout port. is there.
Here, the position detection mechanism can measure the position on the guide bar of the scribe head, and for example, a detection mechanism configured by a linear scale and an optical reading device that observes the linear scale can be used.
The purge gas only needs to be able to blow off the chips, so compressed air may be inexpensive, but dry nitrogen or the like may be used.

  According to the present invention, when the scribe groove is formed according to the present invention, the chips and end material generated in the cutting edge portion of the cutter wheel are upstream of the purge gas ejected from the gas outlet on the side of the cutter wheel. Since it is blown away outward from the guide bar side, chips and the like do not adhere to the guide bar, and the position detection mechanism is not adversely affected. In addition, since it is blown off from the side of the cutter wheel, it can be suppressed from flying up above the cutter wheel, thereby preventing chips from entering the bearing inside the scribe head and causing malfunction. it can.

Moreover, in this invention, it is good to set it as the structure by which the gas blower outlet is elongated in the horizontal direction along the substrate surface processed.
As a result, purge gas such as compressed air blown out from the guide bar side becomes a horizontal belt-like flow and is blown around the cutting edge of the cutter wheel to effectively wipe off chips and scraps.

It is a perspective view which shows an example of the scribing apparatus which concerns on this invention. It is a perspective view of the scribe head of FIG. It is the expansion perspective view which looked at the scribe head of FIG. 1 from the lower side. It is a partial cross section figure of the scribe head of FIG. It is the perspective view which looked at another Example of the scribe head from the lower side. It is the perspective view which looked at another one Example of the scribe head from the lower side. It is a perspective view explaining the structure of the conventional scribe device. It is sectional drawing which shows the principal part of the conventional scribe head.

Hereinafter, the scribing apparatus of the present invention will be described in detail with reference to FIGS.
FIG. 1 is a perspective view showing an example of a scribing apparatus according to the present invention. 2 to 4 are a perspective view of a scribing head in the scribing apparatus of FIG. 1, an enlarged perspective view seen from below, and a partial cross-sectional view. The scribing apparatus A includes a table 1 on which a glass substrate W is placed. The table 1 can be rotated left and right in a horizontal plane by a rotation drive mechanism (not shown).

A bridge 4 is constituted by the support pillars 2 and 2 on both sides arranged so as to straddle the table 1 and the guide bar 3 extending in the X direction. The support column 2 is configured to move along the slide portion 5 serving as a guide in the Y direction by a Y-axis drive mechanism (not shown). A scribe head 7 is attached to the bridge 4, and can be moved in the X direction along the guide 6 by an X-axis drive mechanism supported by the guide bar 3.
In addition, a linear scale S is provided below the guide bar 6 as a position detecting mechanism for the X direction of the scribe head 7. A scale is displayed on the linear scale S, and the scale is read by an optical detection unit (not shown) mounted on the scribe head 7 so that the position and moving distance of the scribe head 7 in the X direction can be detected. It has become.

As shown in FIGS. 2 to 4, the scribe head 7 is provided with a holder 9 that is moved up and down by an elevating drive unit 8. A bearing 13 is attached to the lower part of the holder 9, and a vertical support shaft 12 provided on the upper part of the cutter attaching member 10 (holder joint) is pivotally supported via the bearing 13. The member 10 is rotated.
The cutter attachment member 10 is composed of a block body that supports the rotating shaft so as to sandwich the cutter wheel 11 from both sides. The cutter attachment member 29 described in FIG. 8 has the same shape except that the air outlet 32 and the flow path 33 are not provided. Therefore, the position of the rotary shaft of the cutter wheel 11 is perpendicular to the support shaft 12. It is designed to move in the same way as a caster of a chair so that it is off the line extending downward.

In the present embodiment, guide rollers 14 and 14 are arranged in a straight line at positions before and after the cutter wheel 11 and are held by the holder 9. The guide rollers 14 and 14 are arranged so that the roller surface comes to a height position slightly retreated upward from the cutting edge of the cutter wheel 11, and the substrate of the cutting edge of the cutter wheel 11 when processing the scribe groove. Excessive biting into W is suppressed. In addition, when the cutter wheel 11 is lowered to process the scribe groove from outside the edge of the substrate W, if there is a lowering than the setting, the guide roller 14 on the substrate W side is moved to the edge portion of the substrate W. Suppress further descent by touching the top surface. Thereby, it is made to reduce that the blade edge of the cutter wheel 11 is damaged accidentally.
The rolling direction of the cutter wheel 11 is set along the direction along the guide rollers 14, 14, that is, the direction of the guide 6 (X direction) of the guide bar 3 (see FIG. 1).

  The scribe head 7 is provided with a gas blowing nozzle 15 provided with a gas blowing port 16 at a position on the side of the cutter wheel 11. The gas blowing nozzle 15 is connected to a compressed air supply source (not shown) via a tube 18 so that purge gas is supplied. The purge gas is not limited to compressed air, and dry nitrogen or the like may be used instead.

  Further, the guide bar 3 provided with the linear scale S is located upstream of the flow of the purge gas from the gas outlet 16 so that no purge gas is blown onto the guide bar 3 and directed toward the cutting edge portion of the cutter wheel 11. The purge gas is blown out. In this embodiment, the gas outlet 16 is elongated in the lateral direction parallel to the surface of the substrate W to be processed.

A cover 17 is provided in the vicinity of the cutter wheel 11 and on the side close to the guide bar 3. The cover 17 has a substantially U-shape in plan view, surrounds the side surface of the cutter wheel 11 on the guide bar 3 side, and is fixed to the frame of the guide rollers 14 and 14. A cutout 17 a is provided at the lower end edge of the cover 17 so as not to hinder the air blown from the gas blower outlet 16 from being blown to the cutting edge portion of the cutter wheel 11. In FIG. 4, the guide roller 14 is omitted, and the position of the cover 17 attached to the guide roller 14 is indicated by a two-dot chain line.
Further, as shown in FIG. 2, a wall plate 19 is provided to conceal the inside of the middle part of the scribe head 7 so that even if chips swell, the mechanical movement mechanism inside the scribe head 7 does not enter. is there.

In the scribing apparatus A, the cutter wheel 11 is lowered so that the cutting edge is pressed against the substrate W on the table 1, and the scribing head 7 is moved along the guide 6 in the X direction so that a scribe groove is formed in the substrate W. It is formed.
When machining the scribe groove, chips and scraps generated at the cutting edge portion with the rolling of the cutter wheel 11 are gas outlets of the gas outlet nozzle 15 provided on the guide bar 3 side (see FIG. 1). 16 is blown away outward from the guide bar 3 side by the compressed air discharged from 16. Thereby, it is possible to prevent chips and the like from adhering to the linear scale S of the guide bar 3. In addition, since chips and the like are blown outward from the guide bar 3 side, it is possible to suppress the chips from rising upward, and the chips and the like enter the bearing and motion mechanism portion inside the scribe head 7. To prevent malfunction.

  Further, since the gas outlet 16 is formed to be elongated in the lateral direction parallel to the surface of the substrate W to be processed, the compressed air that is blown out is blown around the cutting edge of the cutter wheel 11 in a band-like flow. This makes it possible to clean up chips and the like.

  In addition, as shown in FIG. 5, the gas blowing nozzle 15 can be formed in a tube shape and the blowout port 16 can be formed in a circular shape.

  In the above embodiment, the cutter wheel 11 of the scribe head 7 rolls in the X direction along the guide bar 3. However, as shown in FIG. 6, the cutter wheel 11 is perpendicular to the guide bar 3. It can also be formed to roll in the direction. In this case, when the scribe groove is processed, the bridge 4 shown in FIG. 1 is moved in the Y direction, or a drive mechanism capable of moving the table 1 in the Y direction is provided. At this time, the positional relationship is such that one guide roller 14 is present between the guide bar 3 and the cutter mounting member 10. For example, as shown in FIG. The gas blower outlet 16 is arranged at a position on the oblique side in the middle so that the guide bar 3 is upstream of the flow of purge gas from the gas blower outlet 16.

  As mentioned above, although the typical Example of this invention was described, this invention is not necessarily limited only to said Example structure. For example, the guide rollers 14 and 14 can be omitted, and the cover 17 can also be omitted. Others The present invention can be appropriately modified and changed within the scope of achieving the object and without departing from the scope of the claims.

  The present invention can be applied to a scribing apparatus for forming a scribe groove in a brittle material substrate such as a glass substrate or a semiconductor substrate.

A Scribing device W Brittle material substrate (glass substrate)
DESCRIPTION OF SYMBOLS 1 Table 2 Support pillar 3 Guide bar 6 Guide 7 Scribe head 9 Holder 10 Cutter attachment member 11 Cutter wheel 12 Support shaft 13 Bearing 15 Gas blowing nozzle 16 Gas outlet

Claims (2)

A scribe head comprising a cutter mounting member that holds the cutter wheel in a rollable manner, and a holder that rotatably supports a support shaft formed on the cutter mounting member via a bearing,
The scribe head is supported by a guide bar provided with a guide for moving the scribe head and a position detection mechanism for detecting the position of the scribe head, and rolls the cutter wheel on a substrate to be processed. In a scribing device that forms a scribe groove by
The scribe head is formed with a gas blowout port for blowing out purge gas from the side of the cutter wheel, and the guide bar is blown toward the blade edge portion so as to be upstream of the flow of purge gas from the gas blowout port. A scribing device characterized by that. The scribing apparatus according to claim 1, wherein the gas outlet is formed to be elongated in the lateral direction along the substrate surface to be processed.

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