JP2012211800A - Sample inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sample inspection device which simplifies operations for improving inspection accuracy.SOLUTION: A sample inspection device 1 comprises: a plurality of first chucks 12 arranged at regular intervals; at least one second chuck 13 arranged between at least one pair of neighboring first chucks 12; a table 11 with a surface on which the first chucks 12 and the second chucks 13 are arranged in line; and an inspection part 14 which inspects a sample arranged on the first chuck 12 or the second chuck 13 at an inspection position P1 so as to output the inspection result. The table 11 is driven at a first interval between the neighboring first chucks 12 or at a second interval between the neighboring first chuck 12 and the second chuck 13, so that the first chuck 12 or the second chuck 13 may be at the inspection position P1, respectively.

Description

  The present invention relates to a sample inspection apparatus for inspecting a sample typified by various elements such as a light emitting diode (hereinafter referred to as LED).

  In general, before a product such as an LED is manufactured and shipped, a predetermined sample inspection device is used to inspect a part or all of the product. As a result, shipment of defective products is suppressed, and the reliability of the products is guaranteed.

  In order for the sample inspection apparatus to inspect with high accuracy, inspection of the sample inspection apparatus is indispensable. This inspection is performed, for example, at the time of starting the sample inspection apparatus (at the start of a factory that manufactures products), at the time of changing workers, or at the time of changing the production lot. In this inspection, an operator actually inspects a sample with known characteristics using a sample inspection device, and confirms whether or not the obtained inspection result is as expected. Check if it is working. For example, in this inspection, a plurality of samples that are non-defective and have different characteristics (for example, the chromaticity and light emission intensity of light emitted from the LED) can be used.

  Further, in the above inspection, if the inspection result as expected from the sample inspection apparatus is not obtained, the sample inspection apparatus is calibrated. In this calibration, an operator actually inspects a calibration sample with known characteristics using a sample inspection device, and calibrates the sample inspection device based on the obtained inspection results, thereby inspecting the inspection accuracy of the sample inspection device. To improve.

  Conventionally, an operator who inspects and calibrates a sample inspection apparatus places a sample with known characteristics on the sample inspection apparatus or collects the sample from the sample inspection apparatus by handling using tweezers or the like. . Therefore, there is a problem because the inspection accuracy of the sample inspection apparatus can be reduced by causing breakage or contamination of the sample, or if the sample is mistaken or lost. In addition, in order to sufficiently ensure the reliability of the product to be shipped, it is necessary to frequently perform this inspection and calibration. However, the above inspection and calibration work can be very complicated, which is problematic. Become.

  Therefore, in Patent Document 1, for example, by sequentially inspecting a sample in which a sample to be inspected and a sample for calibration are mixed, and when the sample for calibration is inspected, the device is calibrated and stopped, A sample inspection apparatus that improves the inspection accuracy is disclosed. The sample inspection apparatus recognizes whether it is a sample to be inspected or a sample for calibration by identifying an ID number printed on the sample in advance with a laser mark.

JP 2003-59994 A

  However, the sample inspection apparatus disclosed in Patent Document 1 requires a separate process for printing an ID number on a sample, which complicates the process. Further, the sample inspection apparatus requires a device such as a CCD camera for identifying the ID number printed on each sample, which is problematic because the configuration and processing are complicated. Further, as the sample to be inspected becomes smaller in the sample inspection apparatus, it becomes more difficult to print the ID number, and for products that cannot be printed with the ID number, the inspection itself becomes impossible, which becomes a problem. In addition, if the calibration sample is mixed with the sample to be inspected and frequently inspected, deterioration of the calibration sample is promoted, and calibration cannot be performed with high accuracy.

  In view of the above-described problems, an object of the present invention is to provide a sample inspection device that simplifies the work for improving inspection accuracy.

To achieve the above object, the present invention includes a plurality of first chucks arranged at equal intervals,
At least one second chuck disposed between at least one set of adjacent first chucks;
A table in which the first chuck and the second chuck are arranged in a row on the surface;
A table driving unit for driving the table along an arrangement direction of the first chuck and the second chuck;
An inspection unit that performs a predetermined inspection on the sample placed on the first chuck or the second chuck at an inspection position that is a predetermined spatial position by driving the table, and outputs an inspection result;
An inspection target sample supply unit that supplies and arranges a sample to the first chuck that has reached the inspection target sample supply position that is a predetermined spatial position by driving the table;
An inspection target sample recovery unit for recovering the sample arranged in the first chuck that has become the inspection target sample recovery position which is a predetermined spatial position by driving the table;
The table driving unit drives the table at each of a first interval that is an interval between the adjacent first chucks and a second interval that is an interval between the adjacent first chuck and the second chuck. And
When a certain first chuck becomes the inspection position, another sample chuck different from the certain first chuck becomes the inspection object sample supply position and the inspection object sample recovery position. I will provide a.

Furthermore, in the sample inspection apparatus of the above feature, the table has a rotation axis perpendicular to the surface,
The first chuck and the second chuck are disposed on a circumference of a predetermined circle around the rotation axis;
The table driving unit is
The rotary shaft is driven to rotate at a first angle that is a central angle formed by a pair of the first chucks adjacent to the circumference of the circle and the center of the circle, whereby the table is moved to the first. Drive at intervals,
The rotary shaft is driven to rotate at a second angle that is a central angle formed by the first chuck, the second chuck, and the center of the circle that are adjacent to each other on the circumference of the circle. It is preferable to drive at the second interval.

  Furthermore, in the sample inspection apparatus having the above characteristics, it is preferable that one second chuck is disposed at a position that is intermediate between at least one pair of adjacent first chucks.

  Furthermore, the sample inspection apparatus having the above characteristics controls the table driving unit to sequentially drive the table at the first interval in the first operation mode, and the table driving unit controls the table driving unit in the second operation mode. It is preferable to further comprise a control unit that controls the table to be driven at the first interval after the table is driven at the second interval, and then further to drive the table at the second interval.

Furthermore, in the sample inspection apparatus having the above characteristics, the control unit includes:
In the first operation mode, when the table driving unit controls the table to sequentially drive the table at the first interval, the inspection unit is controlled so that the sample disposed on the first chuck at the inspection position is removed. The inspection target sample supply unit is controlled to sequentially arrange samples on the first chuck at the inspection target sample supply position, and the inspection target sample recovery unit is controlled to control the inspection target sample position. Sequentially collect samples placed on the first chuck,
In the second operation mode, when the table driving unit controls the table to sequentially drive the table at the first interval, the inspection unit is controlled to sequentially inspect the samples disposed on the second chuck. ,preferable.

Furthermore, the sample inspection apparatus having the above characteristics further includes a notification unit that notifies abnormality,
When the control unit controls the table driving unit to sequentially drive the table at the first interval in the second operation mode, the inspection result output by the inspection unit does not satisfy a predetermined standard. If confirmed, it is preferable that the notification unit is controlled to notify the abnormality.

  Furthermore, in the sample inspection apparatus having the above characteristics, the control unit outputs the control when the control unit controls the table driving unit to sequentially drive the table at the first interval in the second operation mode. When it is confirmed that the inspection result does not satisfy the first reference, the notification unit is controlled to notify the abnormality of the sample of the second chuck from which the inspection result that does not satisfy the first reference is obtained. preferable.

Furthermore, the sample inspection apparatus of the above feature further includes an abnormality verification unit that verifies the presence or absence of an abnormality in the inspection unit and outputs a verification result,
When the control unit controls the table driving unit to sequentially drive the table at the first interval in the second operation mode, an inspection result output by the inspection unit satisfies a second standard. If it is confirmed that the abnormality verification unit operates, and the verification result output by the abnormality verification unit indicates that the inspection unit indicates an abnormality, the notification unit is controlled to perform the inspection. It is preferable to report the abnormality of the part.

Furthermore, in the sample inspection apparatus having the above characteristics, the abnormality verification unit is configured as follows.
A verification result is output as at least one of a voltage applied to the resistor when a predetermined current flows through the predetermined resistor and a current flowing through the resistor when a predetermined voltage is applied to the predetermined resistor. It is preferable to include one abnormality verification unit.

Furthermore, in the sample inspection apparatus having the above characteristics, the abnormality verification unit is
Based on the output result output by the inspection unit and the temperature characteristics of the sample inspected by the inspection unit, the second abnormality that estimates the ambient temperature when the inspection unit inspects the sample and outputs it as a verification result It is preferable to include a verification unit.

Furthermore, the sample inspection apparatus having the above-described characteristics includes a calibration sample handling unit that supplies and arranges a sample to the first chuck that has become a calibration sample handling position, which is a predetermined spatial position, by driving the table. In addition,
The control unit is
In the second operation mode, when the table driving unit controls the table to sequentially drive the table at the first interval, it is confirmed that the inspection result output by the inspection unit does not satisfy the second standard. However, when confirming that the verification result output by the abnormality verification unit does not indicate an abnormality of the inspection unit,
The table driving unit controls the table to sequentially drive the table at the first interval, and the calibration sample handling unit supplies and arranges the sample to the first chuck at the calibration sample handling position. Control, execute the third mode of operation,
When it is confirmed that the inspection result output from the inspection unit in the third operation mode does not satisfy the third standard, the notification unit is controlled to notify the abnormality of the inspection unit,
When it is confirmed that the inspection result output from the inspection unit in the third operation mode satisfies the third standard, the control for the inspection result output from the inspection unit thereafter is performed based on the inspection result. It is preferable to calibrate the interpretation method of the part.

Furthermore, in the sample inspection apparatus having the above characteristics, the calibration sample handling unit has
A cartridge in which samples are arranged in a row;
The sample placed in the cartridge is supplied to the first chuck at the calibration sample handling position, and the sample placed at the first chuck at the calibration sample handling position is placed. A calibration sample supply / recovery unit that is collected and arranged in the cartridge;
A cartridge driving unit that drives the cartridge along the arrangement direction of the samples arranged in the cartridge,
When the supply and recovery unit supplies the sample disposed in the cartridge to the first chuck, the cartridge driving unit drives the cartridge in the first direction,
When the calibration sample supply / recovery unit collects the sample disposed on the first chuck in the cartridge, the cartridge driving unit drives the cartridge in a second direction opposite to the first direction. ,preferable.

Further, in the sample inspection apparatus having the above characteristics, when the second chuck is located at a position other than the inspection position, a space in which the sample of the second chuck is arranged is shielded, and the inspection of the second chuck is performed by driving the table. A shielding portion that opens a space in which the sample of the second chuck is disposed, so that the sample disposed on the second chuck can be inspected by the inspection portion when the position is reached.
Further provision is preferable.

  In the sample inspection apparatus having the above characteristics, the type of the sample to be inspected by the inspection unit (the sample placed on the first chuck and the sample placed on the second chuck) is changed by changing the table driving method. Can do. Therefore, work such as an operator changing the sample according to the operation content of the sample inspection apparatus can be made unnecessary. Therefore, for example, work for improving inspection accuracy such as inspection operation can be simplified.

The schematic diagram which shows the schematic structural example of the sample test | inspection apparatus which concerns on embodiment of this invention. The block diagram which shows the schematic structural example of the sample test | inspection apparatus which concerns on embodiment of this invention. The schematic diagram which shows the state in the normal test | inspection mode of the sample test | inspection apparatus of FIG. The flowchart which shows operation | movement of the inspection mode and calibration mode of the sample inspection apparatus which concerns on embodiment of this invention. The schematic diagram which shows the state in the inspection mode of the sample inspection apparatus of FIG. Schematic diagram showing the state of the sample inspection apparatus in FIG. 1 in the calibration mode (when the calibration sample is supplied). Schematic diagram showing the state of the sample inspection apparatus in FIG. 1 in the calibration mode (when collecting the calibration sample)

  Hereinafter, a sample inspection apparatus according to an embodiment of the present invention will be described with reference to the drawings. The sample inspection apparatus according to the embodiment of the present invention described below is only one embodiment of the sample inspection apparatus of the present invention, and the sample inspection apparatus of the present invention is compared with the sample inspection apparatus of the embodiment. It can be realized with various modifications.

  In the following, a sample inspection apparatus that inspects an LED will be exemplified for the sake of specific description. However, the sample inspection apparatus of the present invention can also inspect elements other than LEDs. However, it is preferable that the sample inspection method executed by the sample inspection apparatus is compatible with the type of sample to be inspected.

<< Configuration example of sample inspection device >>
First, a configuration example of the sample inspection apparatus will be described with reference to the drawings. FIG. 1 is a schematic diagram showing a schematic configuration example of a sample inspection apparatus according to an embodiment of the present invention. FIG. 2 is a block diagram showing a schematic configuration example of the sample inspection apparatus according to the embodiment of the present invention. FIG. 1 schematically shows the external appearance of the sample inspection apparatus 1 when stopped.

  As shown in FIGS. 1 and 2, the sample inspection apparatus 1 includes a table 11 having a rotation shaft 11a, a first chuck 12 disposed on the surface of the table 11, and a second chuck disposed on the surface of the table 11. 13, an inspection unit 14 that inspects a sample placed on the first chuck 12 or the second chuck 13 at the inspection position P1 that is a predetermined spatial position, and a first target supply position P2 that is the predetermined spatial position. An inspection target sample supply unit 15 that supplies and arranges the inspection target sample S1 to the chuck 12, and an inspection that recovers the inspection target sample S1 disposed on the first chuck 12 at the inspection target sample recovery position P3 that is a predetermined spatial position. The calibration sample S3 is supplied to the target sample collection unit 16 and the first chuck 12 at the calibration sample handling position P4 which is a predetermined spatial position. A calibration sample handling unit 17 to be arranged, an abnormality verification unit 18 that verifies the abnormality of the inspection unit 14, a table drive unit 19 that drives the rotating shaft 11a of the table 11, a notification unit 20 that notifies the operator, A recording unit 21 that records data necessary for the operation of the sample inspection device 1, an operation unit 22 that receives an operation of the operator, and the entire sample inspection device 1 based on an instruction of the operator input through the operation unit 22 And a control unit 23 for controlling the operation.

  In the configuration example shown in FIG. 1, the table (for example, index table) 11 is circular, and a rotation shaft 11 a that is rotationally driven by a table driving unit 19 is provided at the center thereof. The operation of the table drive unit 19 is controlled by the control unit 23.

  Further, the first chuck 12 and the second chuck 13 are arranged in a line on the circumference of a predetermined circle centered on the rotation shaft 11 a on the surface of the table 11. The first chucks 12 are arranged at equal intervals on the circumference of the circle, and the second chucks 13 are arranged one by one at positions that are intermediate between the adjacent first chucks 12. In this case, the angle A1 of the central angle formed between the adjacent first chuck 12 and the center of the circle is 2 of the angle A2 of the central angle formed between the adjacent first chuck 12 and the second chuck 13 and the center of the circle. Doubled. The angle of the central angle formed by the adjacent second chuck 13 and the center of the circle is an angle A1.

  The above arrangement example is only an example, and other arrangement examples may be adopted. For example, the number of the second chucks 13 may be smaller than the number of the first chucks 12 (for example, three second chucks 13 and eight first chucks 12). In this case, at least one set of the adjacent first chucks 12 without the second chucks 13 disposed therebetween is included. In this case, the angle formed by the adjacent second chuck 13 and the center of the circle is a multiple of the angle A1.

  As in the example shown in FIG. 1, when eight each of the first chuck 12 and the second chuck 13 are arranged on the circumference of the circle, the angle A1 is 45 degrees and the angle A2 is 22.5 degrees. In addition, although mentioned later for details, the control part 23 controls the table drive part 19 so that the table 11 may be rotationally driven by each of angle A1 and angle A2. Further, the first chuck 12 and the second chuck 13 may have a mechanism (for example, a claw, a concave portion, or a region having a high frictional resistance) for fixing the arranged sample, or may not have the mechanism ( It's okay to just put a sample).

  In the state shown in FIG. 1 (stopped state), no sample is arranged on the first chuck 12, but the inspection sample S <b> 2 is arranged on the second chuck 13 (for example, permanently installed). The second chuck 13 has a shielding portion 13a (portion shown by hatching) that shields the space in which the arranged inspection sample S2 is arranged, so that the inspection sample S2 is not contaminated with dust or dirt. To protect. Therefore, the deterioration of the inspection sample S2 is suppressed. In the inspection mode (details will be described later), the shielding portion 13a opens a space in which the inspection sample S2 is disposed when the second chuck 13 reaches the inspection position P1 (see FIG. 5 described later). Thereby, the inspection unit 14 can inspect the inspection sample S <b> 2 arranged on the second chuck 13.

  The inspection unit 14 is electrically and optically connected to the sample placed on the first chuck 12 or the second chuck 13 at the inspection position P1, inspects the sample, and outputs the inspection result to the control unit 23. To do. The control unit 23 records the inspection result in the recording unit 21 as necessary, or controls the operation of the sample inspection apparatus 1 according to the inspection result.

  The inspection unit 14 is electrically connected to a sample LED, and is applied to a power supply device (for example, a contact probe) that drives (emits light) by supplying a predetermined voltage or current to the LED. And an electrical characteristic evaluation device that detects a current flowing through the LED and a current flowing through the LED. In addition, the inspection unit 14 is optically connected to the sample LED, and an optical characteristic evaluation device (for example, a photodiode or a spectrophotometer) that evaluates the light emitted from the LED, or the light emitted from the LED. Are provided with optical components (for example, a visibility filter, an ND filter, a diffuser plate, an optical lens, an integrating sphere, an optical fiber, etc.) that convert, integrate, transmit, etc. into those suitable for the evaluation of the optical characteristic evaluation apparatus. Note that these are merely examples, and the inspection unit 14 includes necessary devices and parts as appropriate according to the type of sample to be inspected by the sample inspection apparatus 1 and the inspection method as described above.

  The inspection target sample supply unit 15 supplies and arranges the inspection target sample S1 to the first chuck 12 at the inspection target sample supply position P2. For example, in the normal inspection mode (details will be described later), the inspection target sample supply unit 15 sequentially supplies the inspection target sample S1 to the first chuck 12 that sequentially reaches the inspection target sample supply position P2 by the rotational drive of the table 11. And a loader that can be arranged (specifically, for example, a linear feeder). Note that the inspection target sample supply unit 15 may supply and arrange the inspection target sample S1 on the first chuck 12 by any method (for example, a chute or a pickup). For example, the inspection target sample supply unit 15 may pick up the inspection target sample S1 attached to an adhesive sheet or the like, and supply and arrange it on the first chuck 12. The operation of the sample supply unit 15 to be inspected is controlled by the control unit 23.

  The inspection target sample recovery unit 16 recovers the inspection target sample S1 disposed on the first chuck 12 at the inspection target sample recovery position P3. For example, in the normal inspection mode (details will be described later), the inspection target sample collection unit 16 sequentially selects the inspection target samples S1 arranged on the first chuck 12 that sequentially come to the inspection target sample recovery position P3 by rotating the table 11. A recoverable unloader is provided. Note that the inspection target sample recovery unit 16 may recover the inspection target sample S1 disposed on the first chuck 12 by any method (for example, a chute or a pickup). The operation of the sample collection unit 16 to be examined is controlled by the control unit 23.

  Further, it is preferable that the inspection target sample collecting unit 16 classifies the inspection target sample S1 when recovering the inspection target sample S1 arranged on the first chuck 12. In this case, the control unit 23 that confirms the test result output by the test unit 14 controls the operation of the test target sample collection unit 16 so that the test target sample S1 is collected and classified at the same time. Specifically, for example, the inspection target sample collection unit 16 has different storage bins according to the classification of the non-defective product and the defective product and the classification of the predetermined rank (for example, the chromaticity and intensity of the light emitted from the LED). The inspection target sample S1 collected in 16a is classified and stored. At this time, the control unit 23 controls the sample collection unit 16 to be inspected so that the classification according to the classification method recorded in the recording unit 21 is performed. The classification method is input by, for example, an operator operating the operation unit 22 in advance and recorded in the recording unit 21.

  The calibration sample handling unit 17 includes a cartridge 17a in which calibration samples S3 are arranged in a straight line and accommodated, a cartridge driving unit 17b that drives the cartridge 17a along the arrangement direction of the calibration samples S3, The calibration sample S3 arranged on the cartridge 17a is supplied to the first chuck 12 at the calibration sample handling position P4 and arranged, and the calibration sample S3 arranged on the first chuck 12 at the calibration sample handling position P4 is arranged. A calibration sample supply / recovery unit 17c that is collected and placed in the cartridge 17a.

  The calibration sample supply / recovery unit 17c is arranged in a calibration mode (details will be described later). A loader capable of sequentially supplying and arranging S3 is provided, and the calibration samples S3 arranged on the first chuck 12 that sequentially come to the calibration sample handling position P4 by the rotational drive of the table 11 are sequentially collected and stored in the cartridge 17a. An unloader that can be arranged is provided. The calibration sample supply / recovery unit 17c may supply and collect the calibration sample S3 by any method (for example, a chute or a pickup). The operations of the cartridge drive unit 17b and the calibration sample supply / recovery unit 17c are controlled by the control unit 23.

  Since the cartridge 17a is detachable from the sample inspection apparatus 1, it can be moved into a desiccator that can keep humidity and temperature constant, for example. Therefore, it is possible to easily and effectively suppress deterioration of the calibration sample S3. If the deterioration of the calibration sample S3 is not a problem, the cartridge 17a may be always connected to the sample inspection apparatus 1.

  The abnormality verification unit 18 verifies the presence / absence of an abnormality in the circuit of the inspection unit 14 (for example, a circuit for outputting an inspection result and a part of a device for evaluating electrical characteristics and optical characteristics, the same applies hereinafter). The abnormality of the inspection state of the inspection unit 14 is verified. Specifically, for example, the abnormality verification unit 18 is configured to apply a voltage applied to the reference resistance when a predetermined current is passed through the reference resistance of the circuit in the inspection unit 14 and the reference resistance of the circuit in the inspection unit 14 (described above). A first abnormality verification unit 18a that outputs at least one of a current flowing through the reference resistance when a predetermined voltage is applied to the reference resistance as a verification result; With reference to the temperature characteristic of the sample to be inspected by the inspection unit 14 (for example, the temperature characteristic of the forward voltage), the atmospheric temperature when the inspection unit 14 inspects the sample is estimated from the inspection result output by the inspection unit 14. And a second abnormality verification unit 18b that outputs the result. In FIG. 2, the abnormality verification unit 18 is illustrated as being different from the inspection unit 14 and the control unit 23, but part or all of the abnormality verification unit 18 is included in the inspection unit 14. It may be included in the control unit 23.

  Regarding the first abnormality verification unit 18a, data indicating the range of the voltage applied to the reference resistor and the current flowing through the reference resistor at the normal time (when the circuit in the inspection unit 14 can be regarded as having no abnormality) is stored in advance in the recording unit 21. In addition, regarding the second abnormality verification unit 18b, data indicating the temperature characteristics of the sample and the normal temperature range of the inspection unit 14 (the temperature range in which the inspection unit 14 can accurately inspect) are recorded in the recording unit 21 in advance. Has been.

  The table driving unit 19 drives the table 11 along the arrangement direction of the first chuck 12 and the second chuck 13. In the example shown in FIG. 1, the first chuck 12 and the second chuck 13 are arranged on the circumference of a predetermined circle centered on the rotating shaft 11 a of the table 11. Therefore, the table drive unit 19 rotationally drives the rotary shaft 11a so as to drive the table 11 along the circumference of the circle. Furthermore, in the example shown in FIG. 1, the table 11 is in one direction (clockwise direction in the drawing. Specifically, for example, the first chuck 12 in which the first inspection target sample S1 is arranged at the inspection target sample supply position P2 is The direction of movement in the order of the inspection position P1 and the inspection target sample collection position P3.

  The notification unit 20 includes, for example, an image display device, a lamp, a speaker, and the like, and performs notification through the visual and auditory sense of the worker. The notification unit 20 is controlled by the control unit 23 that confirms the inspection result output by the inspection unit 14, and the content corresponding to the inspection result (for example, abnormality of the sample inspection apparatus 1, inspection result output by the inspection unit 14, etc.) ).

  The recording unit 21 includes an inspection result output from the inspection unit 14, a correction coefficient applied when the control unit 23 interprets the inspection result output from the inspection unit 14, and operation control of the sample inspection apparatus 1 executed by the control unit 23. Various data necessary for the operation of the sample inspection apparatus 1 such as a program is recorded.

  The operation unit 22 includes buttons, a touch panel, and the like for inputting operator operations. The operator inputs an instruction to the control unit 23 by operating the operation unit 22 to operate the sample inspection apparatus 1 in a desired operation mode or perform a predetermined operation in a desired execution state (for example, start, end, Stop, resume, etc.).

  The control unit 23 includes a calculation device such as a CPU, for example, and controls the operation of each unit of the sample inspection device 1 as described above. In particular, the control unit 23 controls each unit of the sample inspection apparatus 1 so that an appropriate operation is performed in accordance with, for example, an operator instruction input via the operation unit 22 or an inspection result output by the inspection unit 14. To do.

  In addition, when the control unit 23 operates the sample inspection apparatus 1 in a predetermined operation mode (for example, a normal inspection mode or an inspection mode), the inspection result output by the inspection unit 14 is recorded in the recording unit 21. A correction coefficient is applied (for example, multiplication) to interpret the inspection result. For example, the correction coefficient is used to convert data (for example, current value) output from the optical characteristic evaluation device (for example, photodiode) included in the inspection unit 14 into a predetermined index value (for example, value indicating the amount of light). It is a coefficient. As a result, the control unit 23 can accurately interpret the state of the sample to be inspected by the inspection unit 14. Note that the notification unit 20 and the recording unit 21 may notify or record the inspection result to which the correction coefficient is not applied, may notify or record the inspection result to which the correction coefficient is applied, or both of them. May be notified or recorded.

  Note that the inspection target sample S1 is, for example, a part or all of a product to be shipped, and is a sample whose characteristics are unknown. The inspection sample S2 is a sample that is inspected to determine whether or not the sample inspection apparatus 1 can perform a normal inspection, and is a sample with known characteristics. The calibration sample S3 is a sample to be inspected so that the sample inspection apparatus 1 can perform a normal inspection (calibration), and the sample has a known characteristic. The characteristics of the inspection sample S2 and the calibration sample S3 that are already known are recorded in the recording unit 21.

<< Operation example of sample inspection device >>
Next, an operation example of the sample inspection apparatus will be described with reference to the drawings. The sample inspection apparatus 1 according to the embodiment of the present invention includes a “normal inspection mode” (corresponding to the first operation mode), an “inspection mode” (corresponding to the second operation mode), and a “calibration mode” (third operation). 3 operation modes) (corresponding to the mode). Hereinafter, each of these operation modes will be described.

<Normal inspection mode>
The normal inspection mode is an operation mode in which the sample inspection apparatus 1 sequentially inspects the inspection target sample S1. For example, when the operator operates the operation unit 22 and inputs an instruction to execute the normal inspection mode to the control unit 23, the normal inspection mode is executed.

  FIG. 3 is a schematic diagram showing a state in the normal inspection mode of the sample inspection apparatus of FIG. As shown in FIG. 3, in the normal inspection mode, the control unit 23 performs control so that the table driving unit 19 sequentially rotates the rotation shaft 11a of the table 11 at an angle A1.

  Furthermore, the control unit 23 causes the inspection target sample supply unit 15 to sequentially supply and arrange the inspection target sample S1 with respect to the first chuck 12 that sequentially reaches the inspection target sample supply position P2 by the rotational drive of the table 11. ,Control. Further, the control unit 23 outputs the inspection result output from the inspection unit 14, the correction coefficient applied to the inspection result recorded in the recording unit 21, the classification method of the inspection target sample S1 recorded in the recording unit 21, The inspection object sample collection unit 16 sequentially collects and collects the inspection object samples S1 arranged on the first chuck 12 that are sequentially located at the inspection object sample collection position P3 by rotating the table 11. Control is performed so that the sample S1 is stored in the storage bin 16a.

  The sample inspection apparatus 1 operates in the normal inspection mode to inspect the inspection target sample S1, for example, the state of a product to be shipped (whether it is a non-defective product or what characteristics it has) Can be inspected.

<Inspection mode>
The inspection mode is an operation mode in which the sample inspection apparatus 1 sequentially inspects the inspection sample S2. For example, when the operator operates the operation unit 22 and inputs an instruction to execute the inspection mode to the control unit 23, the inspection mode is executed.

  FIG. 4 is a flowchart showing operations in the inspection mode and the calibration mode of the sample inspection apparatus according to the embodiment of the present invention. As shown in FIG. 4, when the inspection mode is started, the control unit 23 controls the table drive unit 19 so that the rotary shaft 11a of the table 11 is rotationally driven at an angle A2 (step # 1).

  The state of the sample inspection apparatus 1 at this time is shown in FIG. FIG. 5 is a schematic diagram showing a state in the inspection mode of the sample inspection apparatus of FIG. In a normal operation such as the normal inspection mode described above, the rotary shaft 11a of the table 11 is rotationally driven at an angle A1, and therefore the first chuck 12 can be at the inspection position P1, but is shifted from the first chuck 12 by an angle A2. The second chuck 13 is not in the inspection position P1. However, when the rotary shaft 11a of the table 11 is rotationally driven by the angle A2 as described above, the second chuck 13 can be in the inspection position P1 as shown in FIG.

  When the second chuck 13 reaches the inspection position P1, the shielding unit 13a opens the space where the inspection sample S2 of the second chuck 13 is arranged so that the inspection sample S2 can be inspected by the inspection unit 14. Therefore, the inspection unit 14 can output the inspection result obtained by inspecting the inspection sample S2 in which the deterioration is suppressed. In FIG. 5, the space where the inspection sample S2 is arranged is opened by dividing the shielding portion 13a of the second chuck 13 at the inspection position P1 into two, but this is an example. However, the shielding part 13a may open the space in any way. In addition, the opening / closing mechanism of the shielding part 13a may be one that is controlled to be opened / closed by the control part 23, and is opened / closed spontaneously (mechanically) depending on whether or not it is located at the inspection position P1. May be.

  The control unit 23 is arranged on the second chuck 13 where the table driving unit 19 sequentially rotates the rotation shaft 11a of the table 11 at an angle A1, and the inspection unit 14 is sequentially moved to the inspection position P1 by the rotation driving of the table 11. Control is performed so that the inspection sample S2 is sequentially inspected (step # 2). Further, the control unit 23 performs control so that the table driving unit 19 rotationally drives the rotation shaft 11a of the table 11 at an angle A2 (step # 3). As a result, the first chuck 12 returns to a state where it can be in the inspection position P1.

  The control unit 23 outputs the inspection result output from the inspection unit 14, the correction coefficient applied to the inspection result recorded in the recording unit 21, and the known characteristics of the inspection sample S2 recorded in the recording unit 21. Each is confirmed, and it is determined whether or not an inspection result satisfying a predetermined standard is obtained (the inspection result to which the correction coefficient is applied is as expected) (step # 4). That is, the sample inspection apparatus 1 determines whether or not the sample can be inspected with high accuracy.

  Specifically, for example, the inspection result obtained by applying the correction coefficient to all the inspection samples S2 inspected by the inspection unit 14 is equal to or lower than the upper limit value set for each inspection sample S2. If it is confirmed that it is equal to or higher than the lower limit value, it is determined that the sample inspection apparatus 1 can inspect the sample with high accuracy (step # 4, YES). In this case, the control unit 23 ends the inspection mode. Note that the control unit 23 may control the operation of the sample inspection apparatus 1 so that the normal inspection mode described above is subsequently executed after the inspection mode ends.

  On the other hand, for the at least one inspection sample S2 inspected by the inspection unit 14, the control unit 23 applies the correction coefficient to the inspection result that is greater than the upper limit value set for the inspection sample S2. If it is confirmed that the value is smaller than the value, it is determined that the sample inspection apparatus 1 cannot inspect the sample with high precision (step # 4, NO).

  At this time, the control unit 23 determines whether or not the inspection sample S2 has an abnormality (step # 5). Specifically, for example, for all of the inspection samples S2 inspected by the inspection unit 14, if the above criteria are not satisfied in the same manner (the inspection results to which the correction coefficient is applied are all larger than the upper limit value or all lower limit values If smaller than this, the control unit 23 determines that there is an abnormality other than the inspection sample S2 (step # 5, NO).

  In cases other than the above, the control unit 23 determines that the inspection sample S2 is abnormal (step # 5, YES), and controls the notification unit 20 to check the abnormal inspection sample S2 (inspection result applying the correction coefficient). Is greater than the upper limit value or smaller than the lower limit value) (step # 6). By checking the notification content of the notification unit 20, the worker can easily find and replace the inspection sample S2 having an abnormality. Then, the control unit 23 stops the operation until the operator inputs an instruction to the effect that the abnormality has been resolved via the operation unit 22 (step # 7, NO), but if the instruction is input (step #) 7, YES), control is performed so that the inspection sample S2 is inspected again (steps # 1 to # 4).

  When the control unit 23 determines that there is an abnormality other than the inspection sample S2 (step # 5, NO), the abnormality verification unit 18 is operated to check whether the inspection unit 14 is abnormal. For example, the control unit 23 compares the verification result output from the first abnormality verification unit 18a with the data indicating the range of the verification result in the normal state of the inspection unit 14 recorded in the recording unit 21, It is determined whether or not there is an abnormality in the circuit of the inspection unit 14 (step # 8).

  When the control unit 23 determines that there is an abnormality in the circuit of the inspection unit 14 (step # 8, YES), the control unit 23 controls the notification unit 20 to notify the operator to that effect (step # 9). The operator can easily find out the abnormality of the inspection unit 14 and repair the inspection unit 14 by checking the notification content of the notification unit 20. Then, the control unit 23 stops the operation until the operator inputs an instruction to the effect that the abnormality has been resolved via the operation unit 22 (step # 7, NO), but if the instruction is input (step #) 7, YES), control is performed so that the inspection sample S2 is inspected again (steps # 1 to # 4).

  On the other hand, when the control unit 23 determines that there is no abnormality in the circuit of the inspection unit 14 (step # 8, NO), the verification result output by the second abnormality verification unit 18b and the inspection unit recorded in the recording unit 21 14 is compared with data indicating the normal temperature range, and it is determined whether or not the ambient temperature during the inspection of the inspection unit 14 is abnormal (step # 10).

  When the control unit 23 determines that the ambient temperature at the time of the inspection of the inspection unit 14 is abnormal (step # 10, YES), the control unit 23 controls the notification unit 20 to notify the operator to that effect (step #). 11). By confirming the notification content of the notification unit 20, the operator can easily find out that the ambient temperature at the time of the inspection of the inspection unit 14 is abnormal and return the ambient temperature to normal. Then, the control unit 23 stops the operation until the operator inputs an instruction to the effect that the abnormality has been resolved via the operation unit 22 (step # 7, NO), but if the instruction is input (step #) 7, YES), control is performed so that the inspection sample S2 is inspected again (steps # 1 to # 4).

  On the other hand, when the control unit 23 determines that the ambient temperature at the time of the inspection of the inspection unit 14 is not abnormal (step # 10, NO), the control unit 23 estimates that the correction coefficient is an abnormal value and performs the following calibration mode. The sample inspection apparatus 1 is operated.

<Calibration mode>
First, the control unit 23 waits until it is confirmed that the calibration sample S3 can be inspected (for example, the cartridge 17a is attached to the sample inspection apparatus 1) (step # 12, NO). When the control unit 23 confirms that the calibration sample S3 can be inspected (step # 12, YES), the table driving unit 19 sequentially rotates the rotation shaft 11a of the table 11 at the angle A1, and the calibration. The sample handling unit 17 sequentially supplies the calibration sample S3 to the first chuck 12 that sequentially reaches the calibration sample handling position P4 by the rotational drive of the table 11, and then sequentially collects it. Control is performed so that the calibration samples S3 arranged on one chuck 12 are sequentially inspected (step # 13).

  The operation of the calibration sample handling unit 17 in step # 13 will be described with reference to the drawings. 6 and 7 are schematic views showing a state in the calibration mode of the sample inspection apparatus of FIG. FIG. 6 shows a state when the calibration sample handling unit 17 supplies and arranges the calibration sample S3 to the first chuck 12 at the calibration sample handling position P4. On the other hand, FIG. 7 shows a state when the calibration sample handling unit 17 collects the calibration sample S3 arranged on the first chuck 12 at the calibration sample handling position P4.

  First, as shown in FIG. 6, every time the calibration sample supply / recovery unit 17c supplies and arranges the calibration sample S3 to the first chuck 12 at the calibration sample handling position P4, the cartridge driving unit 17b is installed in the cartridge 17a. The cartridge 17a is driven along the direction in which the calibration sample S3 is arranged (the horizontal direction in the figure). FIG. 6 illustrates the case where the cartridge 17a is driven in the right direction in the figure.

  Then, when the calibration sample supply / recovery unit 17c sequentially supplies and arranges a predetermined number of calibration samples S3 from the cartridge 17a to the first chuck 12, as shown in FIG. The calibration samples S3 disposed on the first chuck 12 are sequentially collected and sequentially disposed on the cartridge 17a.

  At this time, every time the calibration sample supply / recovery unit 17c collects the calibration sample S3 disposed in the first chuck 12 at the calibration sample handling position P4 and places it in the cartridge 17a, the cartridge driving unit 17b performs the cartridge 17a. The cartridge 17a is driven along the direction in which the calibration sample S3 is arranged (the left-right direction in the figure). However, the drive direction of the cartridge 17a at this time is opposite to the drive direction shown in FIG. FIG. 7 illustrates the case where the cartridge 17a is driven in the left direction in the figure.

  As described above, when it is necessary to suppress the deterioration of the calibration sample S3, the calibration sample S3 supplied from the cartridge 17a to the first chuck 12 is collected from the first chuck 12 to the cartridge 17a, and the cartridge 17a. Is preferably stored in a desiccator or the like because handling becomes easy. At this time, if the cartridge 17a is driven as shown in FIGS. 6 and 7, the range in which the calibration sample supply / recovery unit 17c is driven to sequentially supply and sequentially collect the calibration samples S3 can be reduced. Become. More preferably, the calibration sample supply / recovery unit 17c can handle the calibration sample S3 at the same spatial position when the calibration sample S3 is sequentially supplied and when it is sequentially recovered. Therefore, the configuration of the calibration sample supply / recovery unit 17c can be simplified.

  When the inspection of the calibration sample S3 by the inspection unit 14 is completed, the control unit 23 calculates a correction coefficient based on the inspection result output by the inspection unit 14 (step # 14). At this time, the control unit 23 indicates each obtained inspection result (for example, the current value of the photodiode) and an index value (for example, a light amount) to be obtained from the calibration sample S3 recorded in the recording unit 21. Value) and a correction coefficient is calculated. Specifically, for example, the control unit 23 calculates the correction coefficient by obtaining the relationship between the inspection result and the corresponding index value by the least square method.

  Then, the control unit 23 changes the correction coefficient calculated in step # 14 so as to deviate from an allowable range having a predetermined size with respect to the correction coefficient applied immediately before (or first). (Step # 15, NO), it is determined that there is an abnormality in the inspection unit 14 (for example, an abnormality in an optical component such as an integrating sphere) because the change in the correction coefficient is too large, and the notification unit 20 is controlled. This is notified to the worker (step # 16). By checking the notification content of the notification unit 20, the operator can easily find out that the inspection unit 14 is abnormal and repair the inspection unit 14. Then, the control unit 23 stops the operation until the operator inputs an instruction to the effect that the abnormality has been resolved via the operation unit 22 (step # 7, NO), but if the instruction is input (step #) 7, YES), control is performed so that the inspection sample S2 is inspected again (steps # 1 to # 4).

  On the other hand, the control unit 23 determines that the correction coefficient calculated in step # 14 has fluctuated within the allowable range with respect to the correction coefficient set immediately before (or first) (step # 15, After that, the correction coefficient is recorded in the recording unit 21 in order to apply the correction coefficient to the inspection result of the inspection unit 14 (step # 17). And the control part 23 is controlled so that the test | inspection sample S2 is test | inspected again (step # 1- # 4).

  As described above, the sample inspection apparatus 1 changes the driving method of the table 11 so that the types of samples to be inspected by the inspection unit 14 (for example, the inspection target sample S1 and the second chuck disposed on the first chuck 12). The inspection sample S2) arranged at 13 can be changed. Therefore, work such as an operator changing the sample according to the operation content of the sample inspection apparatus can be eliminated. Therefore, for example, work for improving inspection accuracy such as inspection can be simplified.

<< Modification >>
[1] Although the case where the first chuck 12 and the second chuck 13 are arranged in a line on the circumference of a predetermined circle on the surface of the table 11 and the table 11 is rotationally driven is illustrated, on the surface of the table 11 Other arrangement methods and driving methods may be used as long as the first chuck 12 and the second chuck 13 are arranged in a line along a predetermined direction and the table 11 is driven along the direction. For example, the first chuck 12 and the second chuck 13 may be arranged in a straight line on the surface of the table 11, and the table 11 may be driven along the linear direction. In this case, the table 11 includes an interval between the adjacent first chucks 12 (first interval, corresponding to the above-described angle A1) and an interval between the adjacent first chuck 12 and second chuck 13 (second interval, the above-described angle). Is equivalent to A2).

  However, when the first chuck 12 and the second chuck 13 are arranged in a line on the circumference of a predetermined circle on the surface of the table 11 and the table 11 is rotationally driven as in the above-described embodiment, the table 11 11 can be prevented from moving in the space (rotation driven on the spot), and the spatial positions of the positions P1 to P4 can be fixed. Furthermore, the configuration of the table driving unit 19 can be simplified. Therefore, the configuration of the sample inspection device 1 can be simplified.

  [2] Although the case where the number of the first chucks 12 and the number of the second chucks 13 is eight is illustrated, the first chucks 12 are arranged at equal intervals, and at least between one pair of adjacent first chucks 12. Any number of the first chucks 12 and the second chucks 13 may be provided as long as at least one second chuck is disposed. In any configuration, the first chuck 12 and the second chuck 13 can be set to the inspection position P1 by driving the table 11 at the first interval (angle A1) and the second interval (angle A2).

  However, the type of the chucks 12 and 13 that can be located at the respective positions P1 to P4 can be easily switched when the second chuck 13 is provided in the middle of at least one pair of the adjacent first chucks 12. Is possible. Specifically, every time the table 11 is driven at the second interval (angle A2), the types of chucks 12 and 13 that can be positioned at the respective positions P1 to P4 can be switched.

  [3] In the above-described embodiment, the table 11 rotates in a certain direction (for example, the clockwise direction in FIG. 1), but rotation in the reverse direction may be allowed. For example, when the table 11 rotates at an angle A2 (for example, steps # 1 and # 3 in FIG. 4), at least one direction may be opposite to the certain direction. Further, when operating in the calibration mode, the rotation direction may be reversed between when the calibration sample S3 is supplied to the first chuck 12 (see FIG. 6) and when it is collected (see FIG. 7).

  [4] In the cartridge 17a of the calibration sample handling unit 17 in the above-described embodiment, the calibration sample S3 is arranged on a straight line, but is arranged on another line (for example, on a circumference or an arc). They may be arranged, or may be arranged on a straight line in another direction (for example, a direction perpendicular to the direction shown in FIG. 1 or the like).

  [5] It is preferable that the first chuck 12 and the second chuck 13 are made of the same structure or material because the inspection accuracy of the inspection unit 14 can be further improved. However, if the sample to be inspected is a light emitting element such as an LED, the positional relationship between the sample and the optical property evaluation apparatus and the optical component is larger in the inspection result than the structure and material of the first chuck 12 and the second chuck 13. Affect. Therefore, if the positional relationship can be realized with good reproducibility, the structures and materials of the first chuck 12 and the second chuck 13 are not necessarily the same.

  The present invention is applicable to a sample inspection apparatus that inspects a sample. For example, it is suitable when applied to a sample inspection apparatus for inspecting an LED before shipment.

DESCRIPTION OF SYMBOLS 1: Sample inspection apparatus 11: Table 11a: Rotary shaft 12: 1st chuck 13: 2nd chuck 14: Inspection part 15: Inspection object sample supply part 16: Inspection object sample collection part 17: Calibration sample handling part 17a: Cartridge 17b: Cartridge drive unit 17c: Calibration sample supply / recovery unit 18: Abnormality verification unit 18a: First abnormality verification unit 18b: Second abnormality verification unit 19: Table drive unit 20: Notification unit 21: Recording unit 22: Operation unit 23 : Control unit

Claims (13)

A plurality of first chucks arranged at equal intervals;
At least one second chuck disposed between at least one set of adjacent first chucks;
A table in which the first chuck and the second chuck are arranged in a row on the surface;
A table driving unit for driving the table along an arrangement direction of the first chuck and the second chuck;
An inspection unit that performs a predetermined inspection on the sample placed on the first chuck or the second chuck at an inspection position that is a predetermined spatial position by driving the table, and outputs an inspection result;
An inspection target sample supply unit that supplies and arranges a sample to the first chuck that has reached the inspection target sample supply position that is a predetermined spatial position by driving the table;
An inspection target sample recovery unit for recovering the sample arranged in the first chuck that has become the inspection target sample recovery position which is a predetermined spatial position by driving the table;
The table driving unit drives the table at each of a first interval that is an interval between the adjacent first chucks and a second interval that is an interval between the adjacent first chuck and the second chuck. And
When a certain first chuck becomes the inspection position, another sample chuck different from the certain first chuck becomes the inspection object sample supply position and the inspection object sample recovery position. . The table has a rotation axis perpendicular to the surface;
The first chuck and the second chuck are disposed on a circumference of a predetermined circle around the rotation axis;
The table driving unit is
The rotary shaft is driven to rotate at a first angle that is a central angle formed by a pair of the first chucks adjacent to the circumference of the circle and the center of the circle, whereby the table is moved to the first. Drive at intervals,
The rotary shaft is driven to rotate at a second angle that is a central angle formed by the first chuck, the second chuck, and the center of the circle that are adjacent to each other on the circumference of the circle. The sample inspection apparatus according to claim 1, wherein the sample inspection apparatus is driven at a second interval.   3. The sample inspection apparatus according to claim 1, wherein one of the second chucks is disposed at a position that is intermediate between at least one pair of the adjacent first chucks.   In the first operation mode, the table driving unit controls the table to sequentially drive the table at the first interval. In the second operation mode, the table driving unit drives the table at the second interval. The sample inspection apparatus according to claim 1, further comprising a control unit that controls the table to be sequentially driven at the first interval. The control unit is
In the first operation mode, when the table driving unit controls the table to sequentially drive the table at the first interval, the inspection unit sequentially inspects the samples disposed on the first chuck at the inspection position. And controlling the inspection target sample supply unit to sequentially arrange the samples on the first chuck at the inspection target sample supply position, and controlling the inspection target sample recovery unit to control the inspection target sample position. Sequentially recovering the samples placed on the first chuck;
In the second operation mode, when the table driving unit controls the table to sequentially drive the table at the first interval, the inspection unit is controlled to inspect the sample disposed on the second chuck. The sample inspection apparatus according to claim 4, wherein the sample inspection apparatus is controlled. A notification unit for notifying abnormality,
When the control unit controls the table driving unit to sequentially drive the table at the first interval in the second operation mode, the inspection result output by the inspection unit does not satisfy a predetermined standard. 6. The sample inspection apparatus according to claim 4 or 5, wherein the abnormality can be notified by controlling the notification unit upon confirmation.   When the control unit controls the table driving unit to sequentially drive the table at the first interval in the second operation mode, an inspection result output by the inspection unit satisfies a first standard. If it is confirmed that there is no, the notification unit is controlled to notify the abnormality of the sample of the second chuck from which an inspection result that does not satisfy the first reference is obtained. Sample inspection device. An abnormality verification unit that verifies the presence or absence of an abnormality in the inspection unit and outputs a verification result,
When the control unit controls the table driving unit to sequentially drive the table at the first interval in the second operation mode, an inspection result output by the inspection unit satisfies a second standard. If it is confirmed that the abnormality verification unit operates, and the verification result output by the abnormality verification unit indicates that the inspection unit indicates an abnormality, the notification unit is controlled to perform the inspection. The sample inspection apparatus according to claim 6 or 7, wherein an abnormality of a part is reported. The abnormality verification unit
A verification result is output as at least one of a voltage applied to the resistor when a predetermined current flows through the predetermined resistor and a current flowing through the resistor when a predetermined voltage is applied to the predetermined resistor. The sample inspection apparatus according to claim 8, further comprising one abnormality verification unit. The abnormality verification unit
Based on the output result output by the inspection unit and the temperature characteristics of the sample inspected by the inspection unit, the second abnormality that estimates the ambient temperature when the inspection unit inspects the sample and outputs it as a verification result The sample inspection apparatus according to claim 8, further comprising a verification unit. A calibration sample handling unit for supplying and arranging a sample to the first chuck that has become a calibration sample handling position which is a predetermined spatial position by driving the table;
The control unit is
In the second operation mode, when the table driving unit controls the table to sequentially drive the table at the first interval, it is confirmed that the inspection result output by the inspection unit does not satisfy the second standard. However, when confirming that the verification result output by the abnormality verification unit does not indicate an abnormality of the inspection unit,
The table driving unit controls the table to sequentially drive the table at the first interval, and the calibration sample handling unit supplies and arranges the sample to the first chuck at the calibration sample handling position. Control, execute the third mode of operation,
When it is confirmed that the inspection result output from the inspection unit in the third operation mode does not satisfy the third standard, the notification unit is controlled to notify the abnormality of the inspection unit,
When it is confirmed that the inspection result output from the inspection unit in the third operation mode satisfies the third standard, the control for the inspection result output from the inspection unit thereafter is performed based on the inspection result. The sample inspection apparatus according to any one of claims 8 to 10, wherein the interpretation method of the part is calibrated. The calibration sample handling unit is
A cartridge in which samples are arranged in a row;
The sample placed in the cartridge is supplied to the first chuck at the calibration sample handling position, and the sample placed at the first chuck at the calibration sample handling position is placed. A calibration sample supply / recovery unit that is collected and arranged in the cartridge;
A cartridge drive unit for driving the cartridge along the arrangement direction of the samples of the cartridge,
When the supply and recovery unit supplies the sample disposed in the cartridge to the first chuck, the cartridge driving unit drives the cartridge in the first direction,
When the calibration sample supply / recovery unit collects the sample disposed on the first chuck in the cartridge, the cartridge driving unit drives the cartridge in a second direction opposite to the first direction. The sample inspection apparatus according to claim 11. When the second chuck is in a position other than the inspection position, the space where the sample of the second chuck is arranged is shielded, and when the second chuck is in the inspection position by driving the table, the second chuck A shielding part that opens a space in which the sample of the second chuck is arranged, so that the arranged sample can be inspected by the inspection part;
The sample inspection apparatus according to claim 1, further comprising:

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