JP2010071879A - Socket discrete type apparatus and method for testing semiconductor and circulatory type apparatus and method for testing semiconductor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To accurately measure devices and improve delivery quality by adapting to the case that semiconductor testing apparatuses change in a short period with the passage of time. <P>SOLUTION: A socket discrete type semiconductor testing apparatus includes a testing device (c) for sequentially measuring a reference device (e) and a plurality of first devices to be measured (f), creating a first test log of the reference device (e), sequentially measuring the reference device (e) and a plurality of second devices to be measured and (f), and creating a second test log of the reference device (e); an analysis part a4 for comparing the first test log and the second test log of the reference device (e); a measuring environment device (b) for providing measuring environments each for the reference device (e), the plurality of first devices to be measured (f), and the plurality of second devices to be measured (f); and a measuring environment control part a2 for adjusting measuring environments to be provided by the measuring environment device (b) according to differences in results of comparison by the analysis part a4. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention compares the test log obtained by measuring the reference device every several tests with the test log of the reference device that is the reference, so that fluctuations can be detected even with a short-term change over time and accurately. The present invention relates to a socket-separated semiconductor test apparatus capable of measuring devices, a socket-separated semiconductor test method, a circulating semiconductor test apparatus, and a circulating semiconductor test method.

  A correction method of the conventional multiple simultaneous measurement test apparatus will be described with reference to FIG.

In the conventional technique, first, in the first stage, high-precision calibration is performed between the sites to obtain reference data (b100 in FIG. 6). In the second stage, correction data at each site under the use conditions of the user is acquired using the reference device (b101 in FIG. 6). In the third stage, the correction data under the use conditions of the user is calculated by analyzing the data acquired by the reference device (b102 in FIG. 6). In the fourth stage, a correction data file for the user usage conditions calculated in the third stage is created (b103 in FIG. 6). Finally, in the fifth stage, the reference data between each site is shifted based on the correction data file created in the fourth stage, and the high-precision calibration is performed again between the sites. Is corrected (b104 in FIG. 6).
JP 2002-323539 A (published November 08, 2002)

  However, in the above correction method of the prior art, since there is no means for continuously transporting a plurality of devices to be measured to a plurality of sites (sockets), the test of the reference device over a long period (for example, once every several months), and It has a configuration that can only compensate for variations in measurement data between sites. When a change with time occurs in a short period (for example, one day), it cannot cope with the problem that accurate measurement cannot be performed.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a semiconductor test apparatus capable of detecting fluctuations even with a short-term change over time and accurately measuring a device. There is to do.

  In order to solve the above problem, the socket-separated semiconductor test apparatus according to the present invention generates a first test log of the reference device by measuring the reference device and the plurality of first measurement devices in order. Measuring means for sequentially measuring the reference device and a plurality of second measurement devices to generate a second test log of the reference device, and comparing the first test log and the second test log of the reference device According to the difference between the comparison results obtained by the comparison means, the measurement environment means for providing a measurement environment to each of the reference device, the plurality of first measurement devices, and the plurality of second measurement devices. And adjusting means for adjusting the measurement environment provided by the measurement environment means.

  According to said structure, since it becomes possible to compare the 1st test log and 2nd test log of a reference device, it becomes possible to measure a reference device for every short time. Therefore, even if a change with time occurs in a short time, the variation of the semiconductor test apparatus can be detected at an early stage, so that the device can be measured accurately and the shipping quality can be improved.

  Further, the socket-separated semiconductor test method according to the present invention provides a measurement environment for each of the reference device, the plurality of first measurement devices, and the plurality of second measurement devices. The first measurement device is sequentially measured to generate a first test log of the reference device, and then the reference device and the plurality of second measurement devices are sequentially measured to perform a second test of the reference device. A log is generated, the first test log and the second test log of the reference device are compared, and the measurement environment is adjusted according to the difference in the comparison result.

  Further, in order to solve the above-described problem, the circulating semiconductor test apparatus according to the present invention includes four pieces arranged at predetermined intervals along the peripheral edge of the surface of the cylindrical test table that is rotatably provided. A first measurement environment and a third measurement environment, which are arranged to be opposed to the three test sockets of the four test sockets, and provide a measurement environment to each of the reference device and the plurality of measurement devices. Means, a reference device inserted into one of the four test sockets, and a measurement device inserted into the remaining three of the four test sockets. Measurement is performed while sequentially rotating the test table to a position respectively facing the environment unit, and a first test log corresponding to the first to third measurement environment units of the reference device is generated. And the measurement means for generating the second test log corresponding to the first to third measurement environment means of the reference device is compared with the first test log and the second test log of the reference device. Comparison means, and adjustment means for adjusting the measurement environment provided by the first to third measurement environment means according to the difference in the comparison result by the comparison means.

  According to said structure, since it becomes possible to compare the 1st test log and 2nd test log of a reference device, it becomes possible to measure a reference device for every short time. Therefore, even if a change with time occurs in a short time, the variation of the semiconductor test apparatus can be detected at an early stage, so that the device can be measured accurately and the shipping quality can be improved.

  Further, in the circulating semiconductor test method according to the present invention, four test sockets are arranged at predetermined intervals along the peripheral edge of the surface of a cylindrical test table provided rotatably, and the four test sockets are arranged. First to third measurement environment means are disposed so as to be able to face three test sockets of the sockets, respectively, and a measurement environment is provided to each of the reference device and the plurality of measurement devices. The test stand is sequentially rotated to a position where the test socket faces the environmental means, and the reference device inserted into one of the four test sockets and the remaining three of the four test sockets. A measuring device inserted in a unit, and a first test log corresponding to the first to third measuring environment means of the reference device is generated, and the reference table is further rotated, and then the reference device is rotated. A second test log corresponding to the first to third measurement environment means of the chair is generated, the first test log and the second test log of the reference device are compared, and the measurement is performed according to the difference in the comparison result It is characterized by adjusting the environment.

  Further, the socket-separated type semiconductor measurement apparatus according to the present invention is configured such that the reference device, the plurality of first measurement devices, and the plurality of second measurement devices are sequentially placed in a test socket provided in the measurement unit. It is preferable to further include a conveying means for conveying and inserting.

  In the socket-separated semiconductor measurement apparatus according to the present invention, the reference device, the plurality of first measurement devices, and the plurality of second measurement devices are configured by a camera module, and the measurement environment means includes the camera module. It is preferable to have a light source that emits light.

  The circulating semiconductor measurement apparatus according to the present invention sequentially transports the reference device, the plurality of first measurement devices, and the plurality of second measurement devices to a test socket provided in the measurement means. It is preferable to further include a conveying means to be inserted.

  In the circulating semiconductor measurement apparatus according to the present invention, the reference device, the plurality of first measurement devices, and the plurality of second measurement devices are configured by a camera module, and the measurement environment means is included in the camera module. It is preferable to have a light source that emits light.

  As described above, the socket-separated semiconductor test apparatus according to the present invention generates the first test log of the reference device by sequentially measuring the reference device and the plurality of first measurement devices, and then generating the first test log of the reference device. Measuring means for sequentially measuring a plurality of second measuring devices and generating a second test log of the reference device, and comparing means for comparing the first test log and the second test log of the reference device Measurement environment means for providing a measurement environment to each of the reference device, the plurality of first measurement devices, and the plurality of second measurement devices, and the measurement according to a difference in comparison results by the comparison means And an adjusting means for adjusting the measurement environment provided by the environmental means.

  Therefore, since it is possible to compare the first test log and the second test log of the reference device, it is possible to measure the reference device every short time. As a result, even if a change with time occurs in a short time, the variation of the semiconductor test apparatus can be detected at an early stage, so that the device can be measured accurately and the shipping quality can be improved.

  In addition, as described above, the circulating semiconductor test apparatus according to the present invention includes four test sockets arranged at predetermined intervals along the peripheral edge of the surface of the cylindrical test table that is rotatably provided. 1st to 3rd measurement environment means for providing a measurement environment to each of the reference device and the plurality of measurement devices, each of which is disposed so as to be able to face three test sockets of the four test sockets, A reference device inserted into one of the four test sockets and a measurement device inserted into the remaining three of the four test sockets are respectively used as the first to third measurement environment means. Measurement is performed while sequentially rotating the test table to an opposing position to generate a first test log corresponding to the first measurement environment means of the reference device. Measurement means for generating a second test log corresponding to the first measurement environment means of the reference device, comparison means for comparing the first test log and the second test log of the reference device, and a comparison result by the comparison means And adjusting means for adjusting the measurement environment provided by the first measurement environment means according to the difference.

  Therefore, since it is possible to compare the first test log and the second test log of the reference device, it is possible to measure the reference device every short time. As a result, even if a change with time occurs in a short time, the variation of the semiconductor test apparatus can be detected earlier, so that the device can be measured accurately and the shipping quality can be improved. .

[Embodiment 1]
An embodiment of the present invention will be described below with reference to FIGS. 1 and 2.

  FIG. 1 is a conceptual diagram of a test apparatus according to Embodiment 1 of the present invention. FIG. 2 is a flowchart for improving measurement accuracy.

  The semiconductor test apparatus of the present embodiment includes a control apparatus system a, a measurement environment apparatus b, a test apparatus c, and a transfer apparatus d.

  The control device a includes a CPU a1, a measurement environment control unit a2, a reference device measurement data holding unit a3, an analysis unit a4, a calibration data holding unit a5, and a program holding unit a6. The control device a controls and manages the measurement environment device b, the test device c, and the transfer device d. In addition, the measurement environment control unit a2 adjusts the measurement environment device b.

  The measurement environment apparatus b is composed of a light source (LED, viewer, etc.) required when testing a camera module or the like, and is provided in the measurement environment apparatus b when testing a device inserted into the test socket c1. The light source irradiates light to a device constituted by a camera module or the like.

  The test apparatus c supplies an electrical signal to the test socket c1 and the device inserted in the test socket c1, receives an electrical signal output from the device, and transmits a measurement result to the control apparatus a (not shown). Consists of devices. The test apparatus c performs an electrical test on the device inserted in the test socket c1.

  The transport device d includes a measurement tray d4, a next measurement tray d3, a non-defective product storage tray d1, and a defective product storage tray d2. The non-defective product storage tray d1 is a tray for inserting a device determined to be non-defective according to the result of the test. The defective product storage tray d2 is a tray for inserting a device that is determined to be defective according to the result of the test. In addition, a plurality of measurement devices f and at least one reference device e can be set in advance on the measurement tray d4. A plurality of measurement devices f can be set in advance in the next measurement tray d3.

  Further, the transport device d receives a command from the control device a, and transports the reference device e and the measurement device f at the location d4-1 in the measurement tray d4 to the test socket c1. When the test of the reference device e is completed, the reference device e is transported to the location d3-1 in the next measurement tray d3. When the test of the measuring device f is completed, it is transported to the good product storage tray d1 or the defective product storage tray d2 depending on the test result.

  When the testing of all the devices f in the measurement tray d4 is completed, the transfer device d receives a command from the control device a, and the measurement in the reference device e in the location d3-1 or the next measurement tray d3. The device f is transported to the test socket c1. When the test of the reference device e and the measurement device f is completed, the transport device d transports the non-defective product storage tray d1 or the defective product storage tray d2 depending on the test result.

  Next, a flowchart for improving the measurement accuracy in the test apparatus will be described with reference to FIG.

  The test apparatus c is periodically calibrated and calibrated using calibration data stored in the calibration data holding unit a5 of the control apparatus a. The measurement environment device b is also periodically calibrated (step a100 in FIG. 2).

  A test program in the program holding unit a6 of the control device a is loaded from the control device a to the test device c (step a101 in FIG. 2), and the reference is set to a predetermined location d4-1 of the measurement tray d4 in the transport device d. The device e is manually inserted (step a102 in FIG. 2), the transport device d is controlled from the control device a, and the reference device e at the location d4-1 on the measurement tray d4 is transported to the test socket c1 (FIG. 2). Step a103).

  The control device a is controlled by the control device a to test the reference device e in the test socket c1 (step a104 in FIG. 2). When the test is completed, the test log of the reference device e is stored as a reference device measurement data holding unit a3. (Step a105 in FIG. 2).

  The transport device d is controlled from the control device a, and the reference device e is transported to the determined position d3-1 of the next measurement tray d3 (step a106 in FIG. 2).

  The measurement device f on the measurement tray d4 is transported to the test socket c1 (step a107 in FIG. 2), the test device c is controlled from the control device a, and the measurement device f in the test socket c1 is tested (step in FIG. 2). a108) When the test is completed, when the test results (PASS and FAIL) of the measuring device f are transmitted from the test apparatus c to the control apparatus a, the transport apparatus d is controlled from the control apparatus a, and measurement is performed when the test result is PASS. The device f is transported to the non-defective product storage tray d1, and if the test result is FAIL, the device f is transported to the defective product storage tray d2 (step a109 in FIG. 2), and step a in FIG. 2 is performed until there is no measurement device f in the measurement tray d4. 107, step a108, and step a109 are repeated.

  When the measurement of all the measurement devices f on the measurement tray d4 is completed (step a110 in FIG. 2), the control device a controls the transport device d, and the reference device e at the location d3-1 of the next measurement tray d3 is connected to the test socket c1. (Step a111 in FIG. 2).

  The transport device d is controlled from the control device a to test the reference device e in the test socket c1 (step a112 in FIG. 2). When the test is completed, the test log of the reference device e is a reference device measurement data holding unit a3. (Step a113 in FIG. 2). The test log of the experimental reference device e and the test log of the reference device e measured last time (the test log stored in step a105 in FIG. 2) are compared in the analysis unit a4 (step a114 in FIG. 2).

  If there is a difference in the comparison result, the measurement environment device b is adjusted from the control device a (for example, the illuminance of the LED or the viewer is varied) (a115 in FIG. 2).

  Here, returning to the step a112 in FIG. 2, the reference device e is tested again. The test log is stored in the reference device measurement data holding unit a3 (step a113 in FIG. 2), the test log of the reference device e and the test log of the reference device e measured last time (the test stored in step a105 in FIG. 2). Log) is compared by the analysis unit a4 (step a114 in FIG. 2). In this manner, the above comparison is repeated until there is no difference.

  When the difference is eliminated, the control device a controls the transport device d to transport the measurement device f of the next measurement tray d3 to the test socket c1 (step a116 in FIG. 2).

  The test apparatus c is controlled from the control apparatus a, the test of the measurement device f in the test socket c1 is performed (step a117 in FIG. 2), and when the test is completed, the test results (PASS and FAIL) of the measurement device f are tested. When the test result is PASS, the measuring device f is transported to the non-defective product storage tray d1. When the test result is FAIL, the control device a controls the transport device d. 2 is repeated (step a118 in FIG. 2), and step a116, step a117, and step a118 in FIG. 2 are repeated until there is no measurement device f in the next measurement tray d3. When all the measurement devices f on the next measurement tray d3 are used up, all tests are finished (step a119 in FIG. 2).

  As shown in the above method, the reference device e is newly tested each time the inserted tray changes. Therefore, the test log of the reference device e acquired in step a105 in FIG. 2 is compared with the test log of the reference device e that is tested every time the tray to be inserted is changed among the steps after step a105 in FIG. It becomes possible. Therefore, it is possible to detect changes and failures in the measurement environment apparatus b and the test apparatus c every time the tray into which the reference device is inserted changes.

  Therefore, it is possible to detect changes and failures in the measurement environment apparatus b and the test apparatus c at an early stage, and the measurement accuracy can be improved and the shipping quality can be improved.

  In the above-described embodiment, the insertion place of the reference device e is determined in advance as one place for each tray. However, the insertion place of the reference device e can be determined as a plurality of places for each tray.

  As a result, it is possible to detect changes and failures in the measurement environment apparatus b and the test apparatus c at an early stage, and the measurement accuracy can be improved and the shipping quality can be improved.

[Embodiment 2]
The following will describe another embodiment of the present invention with reference to FIGS. 3, 4 and 5. In addition, about the member similar to Embodiment 1, the same code | symbol is attached | subjected and the description is abbreviate | omitted.

  FIG. 3 is a conceptual diagram of a circulating test apparatus showing the present invention. First, the form of this circulating test apparatus will be described with reference to FIG.

  The test apparatus according to the present embodiment includes a control device aa, measurement environment devices bb1, bb2, and bb3, a circulating test device cc, and a transport device dd.

  The control device aa includes a CPU aa1, a measurement environment control unit aa2, a reference device measurement data holding unit aa3, an analysis unit aa4, a calibration data holding unit aa5, and a program holding unit aa6. The control device aa controls and manages the measurement environment device bb1, the measurement environment device bb2, the measurement environment device bb3, the circulation type test device cc, and the transfer device dd.

  The measurement environment device bb1, the measurement environment device bb2, and the measurement environment bb3 are composed of light sources (LED, viewer, etc.) necessary for testing a camera module and the like, and when testing a device inserted in a test socket, It is an environmental device that irradiates light to a device constituted by a camera module or the like.

  The circulating type test apparatus cc includes a test socket s0, a test socket s1, a test socket s2, a test socket s3, and a cylindrical test table that rotates by mounting the test socket s0, the test socket s1, the test socket s2, and the test socket s3. When the test socket s0, the test socket s1, the test socket s2, and the test socket s3 come to the respective locations of the measurement environment device bb1, the measurement environment device bb2, and the measurement environment device bb3, they are inserted into the test sockets. An apparatus (not shown) that supplies an electrical signal to a device, receives an electrical signal output from the device, and transmits a measurement result to the control device aa. That is, when each test socket comes to the location of the measurement environment device bb1, the measurement environment device bb2, and the measurement environment device bb3, the circulation type test device cc performs an electrical test on the device inserted in each test socket. .

  The transport device dd is tested with a measurement tray dd1 in which the measurement device ee and at least one reference device can be set in advance, and a non-defective tray dd2 for inserting a device determined to be non-defective according to the result of the test. And a defective product tray dd3 for inserting a device determined to be defective according to the result.

  When the instruction from the control device aa is received and the test socket s3 turns to a predetermined location (the location of the test socket s0 in FIG. 3), the transport device dd moves the measurement device ee on the measurement tray dd1 to the test socket s3. Transport to. Thereafter, when the test socket s2 comes to a predetermined location (the location of the test socket s0 in FIG. 3), the transport device dd transports the measurement device ee on the measurement tray dd1 to the test socket s2. Thereafter, when the test socket s1 comes to a predetermined place (the place of the test socket s0 in FIG. 3), the transport device dd transports the measurement device ee on the measurement tray dd1 to the test socket s1.

  Then, a series of tests under the measurement environment device bb1, measurement environment device bb2, and measurement environment device bb3 of the measurement device ee is completed, and the test socket s1, the test socket s2, and the test socket s3 are set at the predetermined locations ( In FIG. 3, the location of the test socket s0) When the control device aa returns and rotates, the device inserted in the test socket s1, the test socket s2, and the test socket s3 is replaced with a non-defective tray dd2 or a defective product. Or conveyed to a tray dd3.

  Next, based on FIG. 4 and FIG. 5, a flowchart for improving the measurement accuracy in the circulating test apparatus will be described.

  The circulating test apparatus cc is periodically calibrated and calibrated using calibration data stored in the calibration data holding unit aa5 of the control apparatus aa. Also, the measurement environment device bb1, the measurement environment device bb2, and the measurement environment device bb3 are periodically calibrated (step a1000 in FIG. 4).

  First, the control device aa loads the test program in the program holding unit aa6 of the control device aa into the cyclic test device cc (step a1001 in FIG. 4), and manually inserts the reference device into the test socket s0 (FIG. 4). Step a1002).

  Next, the control device aa controls the circulating test device cc, and rotates the circulating test device cc by one step (90 ° clockwise) (step a1003 in FIG. 4). Then, the control device aa controls the transport device dd and inserts the measuring device ee into the test socket s3 (step a1004 in FIG. 4).

  The control device aa controls the circulating test device cc, tests the reference device inserted in the test socket s0 coming to the measurement environment device bb1 (step a1005 in FIG. 4), and uses the tested test log as the control device aa. Is held in the reference device measurement data holding unit aa3 (step a1006 in FIG. 4).

  Next, the control device aa controls the circulating test device cc, and rotates the circulating test device cc by one step (90 ° clockwise) (step a1007 in FIG. 4). The control device aa controls the transport device dd and inserts the measuring device ee into the test socket s2 (step a1008 in FIG. 4).

  The control device aa controls the circulating test device cc to test the measurement device inserted in the test socket s3 coming to the measurement environment device bb1 (step a1009 in FIG. 4), and at the same time, the test socket coming to the measurement environment device bb2 The reference device inserted in s0 is tested (step a1010 in FIG. 4), and the tested test log is held in the reference device measurement data holding unit aa3 in the control device aa (step a1011 in FIG. 4).

  Next, the control device aa controls the circulation type test device cc and rotates the circulation type test device cc by one step (90 ° clockwise) (step a1012 in FIG. 4). Then, the control device aa controls the transport device dd, and inserts the measuring device ee into the test socket s1 (step a1013 in FIG. 4).

  The control device aa controls the circulation type test device cc to test the measurement device inserted in the test socket s2 coming to the measurement environment device bb1 (step a1014 in FIG. 4), and to the test socket s3 coming to the measurement environment device bb2. The inserted measuring device is tested (step a1015 in FIG. 4). At the same time, the reference device inserted in the test socket s0 coming to the measurement environment device bb3 is tested (step a1016 in FIG. 4), and the tested test log is stored in the reference device measurement data holding unit aa3 in the control device aa. Hold (step a1017 in FIG. 4).

  Next, the control device aa controls the circulation type test device cc, rotates the circulation type test device cc by one step (90 ° clockwise), and measures the measurement inserted in the socket s1 coming to the measurement environment device bb1. The device is tested, the measurement device inserted into the socket s2 coming to the measurement environment apparatus bb2 is tested, and the measurement device inserted into the socket s3 coming to the measurement environment apparatus bb3 is tested (step a1018 in FIG. 5).

  Next, the control device aa controls the circulating test device cc, and rotates the circulating test device cc by one step (90 ° clockwise) (step a1019 in FIG. 5).

  The control device aa controls the transport device dd, removes the measurement device inserted in the test socket s3 from the test socket s3, and performs a test result under the measurement environment device bb1, a test result under the measurement environment device bb2, When all the test results under the measurement environment device bb3 are PASS, the test results are transferred to the non-defective tray dd2, the test results under the measurement environment device bb1, the test results under the measurement environment device bb2, and the measurement environment device bb3. If all the test results below are not PASS, they are conveyed to the defective product tray dd3 (step a1020 in FIG. 5).

  The control device aa controls the transport device dd and inserts the measuring device into the test socket s3 (step a1021 in FIG. 5). Further, the control device aa controls the circulating test device cc, tests the reference device inserted in the test socket s0 coming to the measurement environment device bb1 (step a1022 in FIG. 5), and controls the tested test log. The data is held in the reference device measurement data holding unit aa3 in the apparatus aa (step a1023 in FIG. 5). Then, the analysis unit aa4 compares the test log held this time with the test log of the reference device held in step a1006 in FIG. 4 (step a1024 in FIG. 5).

  If there is a difference in the comparison result, the measurement environment device bb1 is adjusted (the illuminance of the LED is varied) (step a1025 in FIG. 5).

  Returning to step a1022 of FIG. 5, the reference device is tested again. The tested test log is held in the reference device measurement data holding unit aa3 in the control device aa (step a1023 in FIG. 5), and the analysis log aa4 and the test log held this time and step a1006 in FIG. Is compared with the test log of the reference device held in (Step a1024 in FIG. 5). In this way, the comparison is repeated until there is no difference.

  If there is no difference in the comparison result, the measurement device inserted in the test socket s1 coming to the measurement environment apparatus bb2 is tested (step a1026 in FIG. 5). At the same time, the measurement device inserted in the test socket s2 coming to the measurement environment apparatus bb3 is tested (step a1027 in FIG. 5).

  Next, the control device aa controls the circulating test device cc, and rotates the circulating test device cc by one step (90 ° clockwise) (step a1028 in FIG. 5). The control device aa controls the transport device dd, and the measurement device inserted in the test socket s2 is removed from the test socket s2, and the test result under the measurement environment bb1, the test result under the measurement environment bb2, and the measurement When all the test results under the environment bb3 are PASS, the test results are transferred to the non-defective tray dd2, and the test results under the measurement environment bb1, the test results under the measurement environment bb2, and the test results under the measurement environment bb3. Are not all PASS, they are conveyed to the defective product tray dd3 (step a1029 in FIG. 5).

  The control device aa controls the transport device dd and inserts the measurement device into the test socket s2 (step a1030 in FIG. 5). Further, the control device aa controls the circulation type test device cc to test the measurement device inserted in the test socket s3 coming to the measurement environment device bb1 (step a1031 in FIG. 5).

  At the same time, the reference device inserted in the test socket s0 coming to the measurement environment device bb2 is tested (a1032 in FIG. 5), and the tested test log is held in the reference device measurement data holding unit aa3 in the control device aa. (Step a1033 in FIG. 5). Then, the analysis unit aa4 compares the test log held this time with the test log of the reference device held in step a1011 in FIG. 4 (step a1034 in FIG. 5).

  If there is a difference in the comparison result, the measurement environment device bb2 is adjusted (the illuminance and the like of the LED is varied) (step a1035 in FIG. 5).

  Returning to step a1032 in FIG. 5, the reference device is tested again. The tested test log is held in the reference device measurement data holding unit aa3 in the control device aa (step a1033 in FIG. 5). Then, the analysis unit aa4 compares the test log held this time with the test log of the reference device held in step a1011 in FIG. 4 (step a1034 in FIG. 5). In this way, the comparison is repeated until there is no difference.

  If there is no difference in the comparison result, the measurement device inserted in the test socket s1 coming to the measurement environment apparatus bb3 is tested (step a1036 in FIG. 5).

  Next, the control device aa controls the circulating test device cc, and rotates the circulating test device cc by one step (90 ° clockwise) (step a1037 in FIG. 5). Then, the control device aa controls the transport device dd, and the measurement device inserted in the test socket s1 is removed from the test socket s1, the test result under the measurement environment device bb1, and the test under the measurement environment device bb2 As a result, when all the test results under the measurement environment device bb3 are PASS, the test results are transferred to the non-defective tray dd2, and the test results under the measurement environment device bb1, the test results under the measurement environment device bb2, and the measurement environment device If all the test results under bb3 are not PASS, they are conveyed to the defective product tray dd3 (step a1038 in FIG. 5).

  The control device aa controls the transport device dd and inserts the measuring device into the socket s1 (step a1039 in FIG. 5). At the same time, the control device aa controls the circulation type test device cc to test the measurement device inserted in the test socket s2 coming to the measurement environment device bb1 (step a1040 in FIG. 5), and to the test socket coming to the measurement environment device bb2. The measurement device inserted in s3 is tested (step a1041 in FIG. 5).

  Further, the reference device inserted in the test socket s0 coming to the measurement environment device bb3 is tested (step a1042 in FIG. 5), and the tested test log is stored in the reference device measurement data holding unit aa3 in the control device aa. Hold (step a1043 in FIG. 5). Then, the analysis unit aa4 compares the test log held this time with the test log of the reference device held in step a1017 in FIG. 4 (step a1044 in FIG. 5).

  If there is a difference in the comparison result, the measurement environment device bb3 is adjusted (the illuminance of the LED is varied) (step a1045 in FIG. 5).

  Returning to step a1042 in FIG. 5, the reference device is tested again. The tested test log is held in the reference device measurement data holding unit aa3 in the control device aa (step a1043 in FIG. 5). Then, the analysis unit aa4 compares the test log held this time with the test log of the reference device held in step a1017 in FIG. 4 (step a1044 in FIG. 5). In this manner, the above comparison is repeated until there is no difference.

  If there is no difference in the comparison result, the process returns to the step a1018 in FIG. 5 and is repeated until all the measurement devices ee on the measurement tray dd1 are exhausted. The process ends when all the measurement devices ee on the measurement tray dd1 are exhausted (step a1046 in FIG. 5).

  As shown in the above method, the circulating test apparatus always inserts the reference device into the predetermined test socket, thereby obtaining the test log of the reference device under the measurement environment apparatus bb1 obtained first, the measurement environment apparatus bb2 The reference device test log below, the reference device test log under measurement environment device bb3, the second and subsequent reference device test log under measurement environment device bb1, and the second and subsequent times under measurement environment device bb2 It is possible to compare the test log of the reference device and the test log of the reference device for the second and subsequent times under the measurement environment apparatus bb3.

  Therefore, it becomes possible to detect changes and failures between the measurement environment devices bb1, bb2, bb3 and the circulation type test device at an early stage, and the measurement accuracy can be improved and the shipping quality can be improved.

[Embodiment 3]
The following will describe another embodiment of the present invention with reference to FIG. In addition, about the member similar to Embodiment 2, the same code | symbol is attached | subjected and the description is abbreviate | omitted.

  FIG. 6 is a conceptual diagram of a circulating test apparatus showing the present invention. The configuration of this circulating test apparatus will be described with reference to FIG.

  The test apparatus of the present embodiment includes a control device aa, measurement environment devices bb1 and bb2, a circulation type test device cc, and a transfer device dd.

  The control device aa includes a CPU aa1, a measurement environment control unit aa2, a reference device measurement data holding unit aa3, an analysis unit aa4, a calibration data holding unit aa5, and a program holding unit aa6. The control device aa controls and manages the measurement environment device bb1, the measurement environment device bb2, the circulation type test device cc, and the transport device dd.

  The measurement environment device bb1 and the measurement environment device bb2 are composed of light sources (LED, viewer, etc.) necessary for testing the camera module and the like. When testing the device inserted in the test socket, It is an environmental device that irradiates light to a configured device.

  The circulating test apparatus cc includes a test socket s0, a test socket s1, a test socket s2, a test socket s0, a test socket s1, a cylindrical test table that rotates by mounting the test socket s2, a test socket s0, and a test socket s1. When the test socket s2 and the test socket s2 come to the respective locations of the measurement environment device bb1 and the measurement environment device bb2, an electrical signal is supplied to and output from the device inserted in each test socket. It is comprised with the apparatus which is not shown in figure which receives an electrical signal and transmits a measurement result to control apparatus aa. In other words, the circulating test apparatus cc performs an electrical test on the devices inserted in the test sockets when the test sockets reach the measurement environment apparatus bb1 and the measurement environment apparatus bb2.

  The transport device dd is tested with a measurement tray dd1 in which the measurement device ee and at least one reference device can be set in advance, and a non-defective tray dd2 for inserting a device determined to be non-defective according to the result of the test. And a defective product tray dd3 for inserting a device determined to be defective according to the result.

  When the instruction from the control device aa is received and the test socket s2 turns to a predetermined place (the place of the test socket s0 in FIG. 6), the transport device dd moves the measurement device ee on the measurement tray dd1 to the test socket s2. Transport to. Thereafter, when the test socket s1 comes to a predetermined location (the location of the test socket s0 in FIG. 6), the transport device dd transports the measurement device ee on the measurement tray dd1 to the test socket s1.

  Then, a series of tests under the measurement environment device bb1 and the measurement environment device bb2 of the measurement device ee are completed, and the test socket s1 and the test socket s2 are determined (location of the test socket s0 in FIG. 6). When returning once, the control device aa transports the device inserted in the test socket s1 and test socket s2 to the non-defective product tray dd2 or the defective product tray dd3 depending on the test result.

  The circulating test apparatus cc is periodically calibrated and calibrated using calibration data stored in the calibration data holding unit aa5 of the control apparatus aa. The measurement environment device bb1 and the measurement environment device bb2 are also periodically calibrated.

  Next, based on FIG. 6, the flow of improving the measurement accuracy in the circulating test apparatus will be described.

  First, the control device aa loads the test program in the program holding unit aa6 of the control device aa into the circulating test device cc, and manually inserts the reference device into the test socket s0.

  Then, the control device aa controls the circulation type test device cc, and rotates the circulation type test device cc by one step (clockwise rotation of 120 °). Then, the control device aa controls the transport device dd and inserts the measuring device ee into the test socket s2. The control device aa controls the circulating test device cc, tests the reference device inserted in the test socket s0 coming to the measurement environment device bb1, and uses the tested test log as reference device measurement data in the control device aa. It holds in holding part aa3.

  Next, the control device aa controls the circulation type testing device cc, and rotates the circulation type testing device cc by one step (clockwise rotation of 120 °). The control device aa controls the transport device dd and inserts the measuring device ee into the test socket s1. The control device aa controls the circulating test device cc to test the measurement device inserted in the test socket s2 coming to the measurement environment device bb1, and at the same time, the reference inserted to the test socket s0 coming to the measurement environment device bb2. The device is tested, and the tested test log is held in the reference device measurement data holding unit aa3 in the control device aa.

  Next, the control device aa controls the circulation type testing device cc, and rotates the circulation type testing device cc by one step (clockwise rotation of 120 °). The control device aa controls the circulation type test device cc to test the measurement device inserted in the test socket s1 coming to the measurement environment device bb1, and at the same time, the measurement inserted to the test socket s2 coming to the measurement environment device bb2. Test the device.

  Next, the control device aa controls the circulation type testing device cc, and rotates the circulation type testing device cc by one step (clockwise rotation of 120 °).

  The control device aa controls the transport device dd, and the measurement device inserted in the test socket s2 is removed from the test socket s2, and the test result under the measurement environment device bb1 and the test result under the measurement environment device bb2 are In the case of all PASS, it is transported to the non-defective product tray dd2, and when the test results under the measurement environment device bb1 and the test results under the measurement environment device bb2 are not all PASS, they are transported to the defective tray dd3. Then, the control device aa controls the transport device dd and inserts the measurement device into the test socket s2.

  Further, the control device aa controls the circulation type test device cc, tests the reference device inserted in the test socket s0 coming to the measurement environment device bb1, and the tested test log is used as the reference device in the control device aa. The measurement data is stored in the measurement data storage unit aa3. Then, the analysis unit aa4 compares the test log held this time with the test log of the reference device held for the first time under the measurement environment apparatus bb1.

  If there is a difference in the comparison result, the measurement environment device bb1 is adjusted (the illuminance of the LED is varied), and the reference device is tested again. The tested test log is held in the reference device measurement data holding unit aa3 in the control device aa, and the test device held this time and the reference device held for the first time under the measurement environment device bb1 in the analysis unit aa4 Compare with test log. In this way, the comparison is repeated until there is no difference.

  If there is no difference in the comparison result, the measurement device inserted in the test socket s1 coming to the measurement environment apparatus bb2 is tested.

  Next, the control device aa controls the circulation type testing device cc, and rotates the circulation type testing device cc by one step (clockwise rotation of 120 °). Then, the control device aa controls the transport device dd, and the measurement device inserted in the test socket s1 is removed from the test socket s1, and the test result under the measurement environment device bb1 and the test result under the measurement environment device bb2 Are all transferred to the non-defective product tray dd2, and when the test results under the measurement environment device bb1 and the test results under the measurement environment device bb2 are not all PASS, they are transferred to the defective product tray dd3. Then, the control device aa controls the transport device dd, and inserts the measurement device into the test socket s1. At the same time, the reference device inserted in the test socket s0 coming to the measurement environment device bb2 is tested, and the tested test log is held in the reference device measurement data holding unit aa3 in the control device aa. Then, the analysis unit aa4 compares the test log held this time with the test log of the reference device held for the first time under the measurement environment apparatus bb2.

  If there is a difference in the comparison result, the measurement environment device bb2 is adjusted (the illuminance of the LED is varied), and the reference device is tested again. The tested test log is held in the reference device measurement data holding unit aa3 in the control device aa, and the test device held this time and the reference device held for the first time under the measurement environment device bb2 in the analysis unit aa4 Compare with test log. In this way, the comparison is repeated until there is no difference.

  If there is no difference in the comparison result, the measurement device inserted in the test socket s2 coming to the measurement environment apparatus bb1 is tested.

  Next, the control device aa controls the circulation type test device cc, and rotates the circulation type test device cc by one step (clockwise rotation by 120 °). The control device aa controls the circulating test device cc to test the measuring device inserted in the test socket s1 coming to the measurement environment device bb1, and at the same time, the measurement inserted to the test socket s2 coming to the measurement environment device bb2. Test the device. In this way, the process is repeated until all the measurement devices ee on the measurement tray dd1 are exhausted. When all the measurement devices on the measurement tray dd1 are used up, the process ends.

  As shown in the above method, the circulating test apparatus always inserts the reference device into the predetermined test socket, thereby obtaining the test log of the reference device under the measurement environment apparatus bb1 obtained first, the measurement environment apparatus bb2 The test log of the reference device below can be compared with the test log of the second and subsequent reference devices under the measurement environment device bb1, and the test log of the second and subsequent reference devices under the measurement environment device bb2. It becomes possible.

  Therefore, it becomes possible to detect changes and failures between the measurement environment devices bb1 and bb2 and the circulation type test device at an early stage, and the measurement accuracy can be improved and the shipping quality can be improved.

[Embodiment 4]
The following will describe another embodiment of the present invention with reference to FIG. In addition, about the member similar to Embodiment 2, the same code | symbol is attached | subjected and the description is abbreviate | omitted.

  FIG. 7 is a conceptual diagram of a circulating test apparatus showing the present invention. The form of this circulating test apparatus will be described with reference to FIG.

  The test apparatus of the present embodiment includes a control device aa, a measurement environment device bb1, a circulation type test device cc, and a transfer device dd.

  The control device aa includes a CPU aa1, a measurement environment control unit aa2, a reference device measurement data holding unit aa3, an analysis unit aa4, a calibration data holding unit aa5, and a program holding unit aa6. The control device aa controls and manages the measurement environment device bb1, the circulation type test device cc, and the transfer device dd.

  The measurement environment apparatus bb1 is composed of a light source (LED, viewer, etc.) necessary for testing a camera module or the like, and a device configured by the camera module or the like when testing a device inserted in a test socket. It is an environmental device that irradiates light.

  The circulation type test apparatus cc includes a test socket s0, a test socket s1, a cylindrical test table mounted with the test socket s0 and the test socket s1, and a test socket s0 and a test socket s1 each having a measurement environment device bb1. A device (not shown) for supplying an electrical signal to a device inserted in each test socket, receiving an electrical signal output from the device, and transmitting a measurement result to the control device aa. Consists of. In other words, the circulating test apparatus cc performs an electrical test of the device inserted in each test socket when each test socket comes to the place of the measurement environment apparatus bb1.

  The transport device dd is tested with a measurement tray dd1 in which the measurement device ee and at least one reference device can be set in advance, and a non-defective tray dd2 for inserting a device determined to be non-defective according to the result of the test. And a defective product tray dd3 for inserting a device determined to be defective according to the result.

  When the instruction from the control device aa is received and the test socket s1 turns to a predetermined place (the place of the test socket s0 in FIG. 7), the transport device dd moves the measurement device ee on the measurement tray dd1 to the test socket s1. Transport to.

  When the test of the measurement device ee under the measurement environment device bb1 is completed and the test socket s1 is returned to a predetermined location (the location of the test socket s0 in FIG. 7), the control device aa carries the device inserted in the test socket s1 to the non-defective product tray dd2 or the defective product tray dd3 depending on the test result.

  The circulating test apparatus cc is periodically calibrated and calibrated using calibration data stored in the calibration data holding unit aa5 of the control apparatus aa. The measurement environment device bb1 is also periodically calibrated.

  Next, based on FIG. 7, the flow of measurement accuracy improvement in the circulation type test apparatus will be described.

  First, the control device aa loads the test program in the program holding unit aa6 of the control device aa into the circulation type test device cc, and manually inserts the reference device into the test socket s0.

  Then, the control device aa controls the circulation type test device cc and rotates the circulation type test device cc by one step (180 ° rotation in the clockwise direction). Then, the control device aa controls the transport device dd and inserts the measuring device ee into the test socket s1. The control device aa controls the circulating test device cc, tests the reference device inserted in the test socket s0 coming to the measurement environment device bb1, and uses the tested test log as reference device measurement data in the control device aa. It holds in holding part aa3.

  Next, the control device aa controls the circulation type test device cc, and rotates the circulation type test device cc by one step (180 ° rotation in the clockwise direction). The control device aa controls the circulating test device cc, and tests the measurement device inserted in the test socket s1 coming to the measurement environment device bb1.

  Next, the control device aa controls the circulation type test device cc, and rotates the circulation type test device cc by one step (180 ° rotation in the clockwise direction). The control device aa controls the circulation type test device cc, tests the measurement device inserted in the test socket s0 coming to the measurement environment device bb1, and uses the tested test log as reference device measurement data in the control device aa. It holds in holding part aa3. Then, the analysis unit aa4 compares the test log held this time with the test log of the reference device held for the first time under the measurement environment apparatus bb1.

  If there is a difference in the comparison result, the measurement environment device bb1 is adjusted (the illuminance of the LED is varied), and the reference device is tested again. The tested test log is held in the reference device measurement data holding unit aa3 in the control device aa, and the test device held this time and the reference device held for the first time under the measurement environment device bb1 in the analysis unit aa4 Compare with test log. In this way, the comparison is repeated until there is no difference.

  If there is no difference in the comparison result, the control device aa controls the transport device dd, and the measurement device inserted in the test socket s1 is removed from the test socket s1, and the lower test result of the measurement environment device bb1 is PASS When the test result under the measurement environment device bb1 is not PASS, the product is transported to the defective product tray dd3. In this way, the process is repeated until all the measurement devices ee on the measurement tray dd1 are exhausted. The process ends when all the measurement devices on the measurement tray dd1 are exhausted.

  As shown in the above method, the circulating test apparatus always inserts the reference device into a predetermined test socket, thereby obtaining the test log of the reference device under the measurement environment apparatus bb1 obtained first, and the measurement environment apparatus. It becomes possible to compare the test log of the reference device after the second time under bb1.

  Therefore, it becomes possible to detect changes and failures between the measurement environment apparatus bb1 and the circulation type test apparatus at an early stage, and the measurement accuracy can be improved and the shipping quality can be improved.

  The circulating test apparatus of the present invention is not limited to the above embodiment, and the number of measurement environment devices and the number of test sockets can be changed, and each test socket comes under each measurement environment device. As described above, it is possible to change the rotation angle of the test stand of the circulation type test apparatus.

  That is, the present invention is not limited to the above-described embodiments, and various modifications are possible within the scope shown in the claims, and the embodiments can be obtained by appropriately combining the technical means disclosed in the embodiments. The form is also included in the technical scope of the present invention.

  The present invention can also be expressed as follows.

  That is, the semiconductor test apparatus according to the present invention sequentially measures the reference device and the plurality of first measurement devices to generate the first test log of the reference device, and then the reference device and the plurality of second measurement devices. Measuring means for sequentially measuring devices to generate a second test log of the reference device; comparing means for comparing the first test log and the second test log of the reference device; the reference device; A measurement environment means for providing a measurement environment to each of the first measurement devices and the plurality of second measurement devices, and a measurement provided by the measurement environment means according to a difference in comparison result by the comparison means And an adjusting means for adjusting the environment.

  Since the first test log and the second test log of the reference device can be compared, it is possible to detect changes and failures in the semiconductor test equipment over time in a short period of time, and the measurement accuracy of the semiconductor test equipment is improved. And shipping quality is improved.

1 is a conceptual diagram of a semiconductor test apparatus according to Embodiment 1 of the present invention. It is a control flowchart for improving a measurement system using the semiconductor test apparatus of FIG. It is a conceptual diagram of the semiconductor test apparatus which concerns on Embodiment 2 of this invention. 4 is a control flowchart for improving measurement accuracy using the semiconductor test apparatus of FIG. 3. 4 is a control flowchart for improving measurement accuracy using the semiconductor test apparatus of FIG. 3. It is a conceptual diagram of the semiconductor test apparatus which concerns on Embodiment 3 of this invention. It is a conceptual diagram of the semiconductor test apparatus which concerns on Embodiment 4 of this invention. It is a flowchart explaining a prior art.

Explanation of symbols

a2, aa2 Measurement environment control unit (adjustment means)
a4, aa4 analysis unit (comparison means)
b Measurement environment device (measurement environment means)
bb1 Measurement environment device (measurement environment means)
bb2 Measurement environment device (measurement environment means)
bb3 Measurement environment device (measurement environment means)
c Test equipment (measuring means)
cc Circulation type test equipment (measuring means)
c1 test sockets s0, s1, s2, s3 test sockets d, dd transport device (transport means)
e Reference device f, ee Measuring device

Claims (8)

After measuring a reference device and a plurality of first measuring devices in order to generate a first test log of the reference device, measuring the reference device and a plurality of second measuring devices in order Measuring means for generating a second test log of the device;
Comparing means for comparing the first test log and the second test log of the reference device;
Measurement environment means for providing a measurement environment to each of the reference device, the plurality of first measurement devices, and the plurality of second measurement devices;
A socket-separated semiconductor test apparatus, comprising: an adjustment unit that adjusts a measurement environment provided by the measurement environment unit according to a difference in a comparison result by the comparison unit.   The apparatus further comprises transport means for sequentially transporting and inserting the reference device, the plurality of first measurement devices, and the plurality of second measurement devices into a test socket provided in the measurement means. The socket-separated type semiconductor test apparatus as described. The reference device, the plurality of first measurement devices, and the plurality of second measurement devices are configured by a camera module,
The socket-separated semiconductor test apparatus according to claim 1, wherein the measurement environment unit includes a light source that irradiates light to the camera module. Providing a measurement environment for each of the reference device, the plurality of first measurement devices, and the plurality of second measurement devices;
After measuring the reference device and the plurality of first measurement devices in order to generate a first test log of the reference device, the reference device and the plurality of second measurement devices are measured in order. To generate a second test log of the reference device,
Comparing the first test log and the second test log of the reference device;
A socket-separated semiconductor test method, wherein the measurement environment is adjusted according to a difference in comparison results. Four test sockets arranged at predetermined intervals along the peripheral edge of the surface of a cylindrical test table provided rotatably;
First to third measurement environment means for providing a measurement environment to each of the reference device and the plurality of measurement devices, which are arranged to be opposed to three of the four test sockets, respectively;
The reference device inserted into one of the four test sockets and the measurement device inserted into the remaining three of the four test sockets are used as the first to third measurement environment means. After the test table is rotated while rotating the test table sequentially to the opposite positions, a first test log corresponding to the first to third measurement environment means of the reference device is generated, and the test table is further rotated one time. Measuring means for generating a second test log corresponding to the first to third measurement environment means of the reference device;
Comparing means for comparing the first test log and the second test log of the reference device;
A circulating semiconductor test apparatus comprising: an adjustment unit that adjusts a measurement environment provided by the first to third measurement environment units according to a difference in comparison result by the comparison unit.   6. The apparatus according to claim 5, further comprising transport means for sequentially transporting and inserting the reference device, the plurality of first measurement devices, and the plurality of second measurement devices into a test socket provided in the measurement means. The circulating semiconductor test apparatus described. The reference device, the plurality of first measurement devices, and the plurality of second measurement devices are configured by a camera module,
The circulating semiconductor test apparatus according to claim 5, wherein the measurement environment means includes a light source that irradiates light to the camera module. Four test sockets are arranged at predetermined intervals along the peripheral edge of the surface of a cylindrical test table provided rotatably.
The first to third measurement environment means are arranged so as to be able to face three test sockets of the four test sockets, respectively, and a measurement environment is provided to each of the reference device and the plurality of measurement devices,
The test table is sequentially rotated to a position where the test socket faces the first to third measurement environment means, and a reference device inserted into one of the four test sockets and the four tests. The measurement devices inserted into the remaining three of the sockets are measured, and first test logs corresponding to the first to third measurement environment means of the reference device are generated, and the test table is further rotated once. And generating a second test log corresponding to the first to third measurement environment means of the reference device,
Comparing the first test log and the second test log of the reference device;
A circulating semiconductor test method, wherein the measurement environment is adjusted according to a difference in comparison results.

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