CN115184373A - Calibration method and related device - Google Patents
Calibration method and related device Download PDFInfo
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- CN115184373A CN115184373A CN202210773449.6A CN202210773449A CN115184373A CN 115184373 A CN115184373 A CN 115184373A CN 202210773449 A CN202210773449 A CN 202210773449A CN 115184373 A CN115184373 A CN 115184373A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
Abstract
The embodiment of the invention discloses a calibration method and a related device, wherein detection equipment comprises a platform, a bearing device, a moving assembly and four first sensors, wherein two first sensors are oppositely arranged along a first reference line, the other two first sensors are oppositely arranged along a second reference line, the bearing device is connected with the platform through the moving assembly, the first sensors are connected with the platform, the calibration device acquires a shading value of the first sensors generated by shading of the bearing device, judges whether the bearing device is subjected to position adjustment or angle adjustment according to the shading value, determines the adjustment distance and the adjustment angle of the bearing device, and finally controls the moving assembly to adjust the bearing device according to the adjustment distance and the adjustment angle to finish the position calibration and the angle calibration of the bearing device, so that the bearing precision of the bearing device is improved, and the detection accuracy of the detection equipment is improved.
Description
Technical Field
The present invention relates to the field of semiconductor manufacturing technologies, and in particular, to a calibration method and a related apparatus.
Background
In the testing process to the piece that awaits measuring, need convey the piece that awaits measuring to on the load bearing device usually, when the piece that awaits measuring is born to the load bearing device, it is convenient in order to guarantee to detect, the center that can make the piece that awaits measuring usually and the center of load bearing device carry out the coincidence, thereby each defective position to the piece that awaits measuring of convenience follow-up fixes a position, but in actual testing process, the problem that skew or deflection takes place for the position or the angle that often can appear bearing device, thereby lead to the increase of the detection error to the piece that awaits measuring on the load bearing device, the detection rate of accuracy to the piece that awaits measuring has been reduced.
Disclosure of Invention
Therefore, in order to overcome at least some of the defects and problems in the prior art, embodiments of the present invention provide a detection apparatus, which aims to improve the detection accuracy of a to-be-detected object.
In particular, in a first aspect, an embodiment of the present invention provides a calibration method, which is applied to a detection device, where the detection device includes a platform, a bearing device, a moving assembly, and four first sensors, two of the first sensors are disposed opposite to each other along a first reference line, two of the other first sensors are disposed opposite to each other along a second reference line, both the first reference line and the second reference line pass through a center of the bearing device, and the first reference line is perpendicular to the second reference line; the bearing device is connected with the platform through the moving assembly, the first sensor is connected with the platform, the first sensor is used for acquiring edge information of the bearing device, and the calibration method comprises the following steps:
acquiring a shading value of each first sensor according to a preset time interval;
determining adjustment parameters of the bearing device according to the shading value of each first sensor, wherein the adjustment parameters comprise an adjustment direction, an adjustment distance, an adjustment angle and an angle adjustment direction;
and controlling the moving assembly to adjust the bearing device according to the adjusting parameters.
Optionally, the determining, according to the shading value of each first sensor, an adjustment parameter of the carrying device, where the adjustment parameter includes an adjustment direction, an adjustment distance, an adjustment angle, and an angle adjustment direction, includes:
determining the adjustment direction and the adjustment distance of the bearing device according to the shading value of each first sensor;
determining a total shading value for all of the first sensors;
when the total shading value is larger than a first preset threshold value; determining the angular adjustment direction of the carrying device;
and determining the adjustment angle of the bearing device according to the shading values of the two first sensors which are oppositely arranged.
Optionally, the determining the adjustment direction and the adjustment distance of the carrying device according to the shading value of each of the first sensors includes:
determining an absolute value of a first difference value of shading values of two oppositely arranged first sensors;
when the absolute value of a first difference value of shading values of any two first sensors is larger than 0, determining that the first sensor corresponding to the first sensor with the larger shading value in the two first sensors which are oppositely arranged is a first target sensor;
determining the direction of the carrying device away from the first target sensor as the adjustment direction, and determining the adjustment distance according to the absolute value of the first difference.
Optionally, when the total shading value is greater than a first preset threshold; determining the angular adjustment direction of the carrying device, comprising:
controlling the moving assembly to adjust the angle of the bearing device according to the preset angle;
determining the variation of the shading values of two groups of oppositely arranged first sensors;
and determining the angle adjustment direction of the bearing device according to the variable quantity.
Optionally, the determining an adjustment angle of the bearing device according to the shading values of the two first sensors which are oppositely arranged includes:
determining a difference value between the shading values of the two oppositely arranged first sensors and a second preset threshold value;
when the shading values of the two first sensors are not equal to the difference value of the second preset threshold value, determining a second difference value of the shading values of the two oppositely arranged first sensors and the difference value of the second preset threshold value;
determining an edge thickness of the carrier;
and determining the adjusting angle according to the second difference and the edge thickness of the bearing device.
In a second aspect, an embodiment of the present invention provides a calibration apparatus, which is applied to a detection device, where the detection device includes a platform, a carrying device, a moving assembly, and four first sensors, two of the first sensors are disposed opposite to each other along a first reference line, and the other two first sensors are disposed opposite to each other along a second reference line, where the first reference line and the second reference line both pass through a center of the carrying device, and the first reference line is perpendicular to the second reference line; the bearing device is connected with the platform through the moving assembly, the first sensor is connected with the platform, the first sensor is used for acquiring edge information of the bearing device, and the calibration and calibration device comprises:
the acquisition unit is used for acquiring the shading value of each first sensor according to a preset time interval;
the determining unit is used for determining adjustment parameters of the bearing device according to the shading value of each first sensor, wherein the adjustment parameters comprise an adjustment direction, an adjustment distance, an adjustment angle and an angle adjustment direction;
and the adjusting unit is used for controlling the moving assembly to adjust the bearing device according to the adjusting parameters.
Optionally, in terms of determining the adjustment parameter of the carrying device according to the shading value of each of the first sensors, the determining unit is specifically configured to:
determining the adjustment direction and the adjustment distance of the bearing device according to the shading value of each first sensor;
determining a total shading value of shading values of all the first sensors;
when the total shading value is larger than a first preset threshold value; determining the angular adjustment direction of the carrying device;
and determining the adjustment angle of the bearing device according to the shading values of the two oppositely arranged first sensors.
Optionally, in terms of determining the adjustment direction and the adjustment distance of the carrying device according to the shading value of each of the first sensors, the determining unit is specifically configured to:
determining the absolute value of a first difference value of the shading values of two oppositely arranged first sensors;
when the absolute value of the first difference is greater than 0, determining that the first sensor corresponding to the first sensor with the larger shading value is a first target sensor in the two first sensors which are oppositely arranged;
determining the direction of the carrying device away from the first target sensor as the adjustment direction, and determining the adjustment distance according to the absolute value of the first difference.
In a third aspect, an embodiment of the present invention provides a detection apparatus, which is characterized by including the calibration device according to any one of the above embodiments.
In a fourth aspect, an embodiment of the present invention provides a computer-readable storage medium, which is characterized by storing a computer program for electronic data exchange, wherein the computer program causes a computer to execute the method according to any one of the above embodiments.
As can be seen from the above, the above embodiments of the present invention may achieve one or more of the following advantages: the periphery of the bearing device is provided with a plurality of first sensors, the shading values of the first sensors generated due to the fact that the bearing device is shaded are obtained, whether the bearing device is subjected to position adjustment or angle adjustment is judged according to the shading values, the adjustment distance and the adjustment angle of the bearing device are determined, and finally the mobile assembly is controlled to adjust the bearing device according to the adjustment distance and the adjustment angle, the bearing device is subjected to position calibration and angle calibration, so that the bearing precision of the bearing device is improved, and the detection accuracy of the detection equipment is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the description below are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a schematic flowchart of a calibration method according to an embodiment of the present invention;
FIG. 2 is a schematic flow chart of another calibration method according to an embodiment of the present invention;
FIG. 3 is a schematic flow chart of another calibration method according to an embodiment of the present invention;
FIG. 4 is a schematic flow chart of another calibration method according to an embodiment of the present invention;
FIG. 5 is a schematic flow chart of another calibration method according to an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of a calibration apparatus according to an embodiment of the present invention;
FIG. 7 is a front view of a calibration device provided in accordance with an embodiment of the present invention;
FIG. 8 is a schematic diagram illustrating a position shift of a carrying device according to an embodiment of the present invention;
FIG. 9 is a schematic view of a carriage assembly according to an embodiment of the present invention being angularly offset to one side;
FIG. 10 is a schematic view of a carrier being angularly offset to another side according to an embodiment of the present invention;
fig. 11 is a schematic structural diagram of a calibration apparatus according to an embodiment of the present application.
The reference numbers illustrate:
| reference numerals | Name (R) | Reference numerals | Name (R) |
| 10 | |
30 | |
| 20 | |
40 | First sensor |
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is only a part of the embodiment of the present invention, and not a whole embodiment. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments of the invention described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein. Moreover, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements explicitly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
It should be noted that the division of the embodiments in the present invention is only for convenience of description and should not be construed as a limitation, and features of various embodiments may be combined and referred to each other without contradiction.
A first embodiment of the present invention provides a calibration method, as shown in fig. 1 to 11, the calibration method is applied to a detection apparatus, the detection apparatus includes a platform 10, a carrying device 20, a moving assembly 30, and four first sensors 40, wherein two first sensors 40 are disposed opposite to each other along a first reference line, and the other two first sensors 40 are disposed opposite to each other along a second reference line, the first reference line and the second reference line both pass through the center of the carrying device 20, and the first reference line is perpendicular to the second reference line; the carrying device 20 is connected with the platform 10 through the moving assembly 30, the first sensor 40 is connected with the platform 10, and the first sensor 40 is used for acquiring edge information of the carrying device 20. In a specific embodiment, the first sensors 40 are spaced at equal angles around the center of the supporting device 20, and an included angle formed by the connecting line between the center of the supporting device 20 and two adjacent first sensors 40 is 90 degrees and is distributed at intervals along the peripheral side edge of the supporting device 20.
In the present application, the calibration method includes:
s10, acquiring a shading value of each first sensor 40 according to a preset time interval;
the light blocking value is 20, 30 or other values, and represents a signal receiving degree of the first sensor 40, specifically, the light blocking value ranges from 0 to 100, when the light blocking value is 0, the light signal of the first sensor 40 is not blocked, when the light blocking value is 50, the light signal of the first sensor 40 is blocked by 50%, and when the light blocking value is 30, the light signal of the first sensor 40 is blocked by 30%.
The first sensor 40 is a correlation sensor, the first sensor 40 includes an emitting end and a receiving end, the emitting end emits a signal and then transmits the signal to the receiving end, when the edge of the carrying device 20 is located between the emitting end and the receiving end, the signal detected by the receiving end changes, so that the shading value of the first sensor 40 can be determined according to the signal change, and a subsequent calibration method can be executed according to the shading value of the first sensor 40.
S20, determining adjustment parameters of the bearing device 20 according to the shading value of each first sensor 40, wherein the adjustment parameters comprise an adjustment direction, an adjustment distance, an adjustment angle and an angle adjustment direction;
in order to calibrate the carrying device 20, the position and the angle of the carrying device 20 need to be calibrated, wherein the position of the carrying device 20 refers to the relative position of the carrying device 20 with respect to the platform 10; the angle of the supporting device 20 refers to an included angle formed between the supporting surface of the supporting device 20 and the platform 10. In an ideal state, the bearing surface of the bearing device 20 is parallel to the surface where the platform 10 is located, so as to ensure the detection angle of the detection equipment to the piece to be detected on the bearing device 20.
The adjusting direction is parallel to the plane where the platform 10 is located, the adjusting distance is 5mm, 10mm or other values, the adjusting angle is 1 degree, 2 degrees or other values, and the angle adjusting direction is perpendicular to the plane where the platform 10 is located.
When the position or the angle of the carrying device 20 is adjusted, the shading value detected by the first sensors 40 located on the periphery of the carrying device 20 will change, so that the adjustment distance and the adjustment angle of the carrying device 20 can be determined according to the relationship between the shading value of each first sensor 40 and the preset shading value.
And S30, controlling the moving assembly 30 to adjust the bearing device 20 according to the adjustment parameters.
After the adjustment distance and the adjustment angle of the carrying device 20 are determined, the position and the angle of the carrying device 20 are adjusted by controlling the moving assembly 30, so that the position calibration and the angle calibration of the carrying device 20 are completed.
In the embodiment of this application, bearing device 20 week side sets up a plurality ofly first sensor 40 to obtain first sensor 40 because of bearing device 20 shelters from and produces the shading value, according to again the shading value is judged whether bearing device 20 takes place position adjustment or angle modulation, confirms bearing device 20's adjustment distance and angle modulation, at last according to adjustment distance and angle modulation, control removal subassembly 30 is right bearing device 20 adjusts, accomplishes right bearing device 20 is to position calibration and angle calibration, thereby it is right to improve bearing device 20's the precision of bearing, improve check out test set's detection accuracy rate.
In an optional embodiment, the determining, according to the shading value of each first sensor 40, adjustment parameters of the carrying device 20, where the adjustment parameters include an adjustment direction, an adjustment distance, an adjustment angle, and an angle adjustment direction, includes:
s21, determining the adjusting direction and the adjusting distance of the bearing device 20 according to the shading value of each first sensor 40;
specifically, when the position of the carrier 20 changes, the light shielding value detected by the first sensor 40 on the peripheral side of the carrier 20 changes, as shown in fig. 8, the peripheral side of the carrier 20 includes a first sensor a, a first sensor B, a first sensor C, and a first sensor D, the dotted line is the original position of the carrier 20, the solid line is the current position of the carrier 20, and specifically, when the carrier 20 moves to the right, the light shielding value detected by the first sensor B increases, and the light shielding value detected by the first sensor D decreases.
In an alternative embodiment, the determining the adjustment direction and the adjustment distance of the carrying device 20 according to the shading value of each of the first sensors 40 includes:
s211, determining an absolute value of a first difference between the shading values of the two first sensors 40 that are oppositely disposed;
as shown in fig. 8, since the first sensor a is disposed opposite to the first sensor C, and the first sensor B is disposed opposite to the first sensor D, centers of the first sensor a, the first sensor C, and the supporting device 20 are on the same straight line, and centers of the first sensor B, the first sensor D, and the supporting device 20 are on the same straight line.
In one embodiment, the first sensor a has a shading value of 30 and the first sensor C has a shading value of 40, and the absolute value of the first difference between the shading values of the first sensor a and the first sensor C is 10.
S212, when an absolute value of a first difference between the light-shielding values of any one of the two first sensors 40 is greater than 0, determining that the first sensor 40 corresponding to the relatively large light-shielding value of the two first sensors 40 that are relatively disposed is a first target sensor;
when the absolute value of the first difference of the shading values of any two first sensors 40 is greater than 0, it indicates that the position of the carrying device 20 is shifted, and then the first sensor 40 with the larger shading value in every two oppositely arranged first sensors 40 is determined as the first target sensor.
S213, determining a direction of the carrying device 20 away from the first target sensor as the adjustment direction, and determining the adjustment distance according to an absolute value of the first difference.
Wherein, besides determining the direction of the carrying device 20 away from the first target sensor as the adjustment direction, it is also required to determine the adjustment distance of the carrying device.
In a specific embodiment, the calibration device determines a relationship between an absolute value of the first difference and the adjustment distance according to a first formula L = m × a1, where L is the adjustment distance, m is the absolute value of the first difference, a1 is a first preset parameter, and the first preset parameter is a value set by a user or a parameter value obtained by performing last adjustment.
In a specific embodiment, if the first predetermined parameter is 0.05 and the absolute value of the first difference is 10, the adjustment distance is determined to be 10 × 0.05=0.5mm.
S22, determining a total shading value of all the first sensors 40;
in order to distinguish whether the carrying device 20 has a position deviation or an angle deviation, it can be understood that, when the carrying device 20 has only a position deviation and does not have an angle deviation, the sum of the light shielding values detected by all the first sensors 40 is equal to the first preset threshold, but when the carrying device 20 has only an angle deviation and does not have a position deviation, the light shielding value of all the first sensors 40 is greater than the first preset threshold, so that the current state of the carrying device 20 can be determined according to the comprehensive light shielding value of all the first sensors 40.
When the total shading value of all the first sensors 40 is greater than a first preset threshold value, the angle of the bearing device 20 is inclined due to the thickness of the bearing device 20, so that the total shading value detected by all the first sensors 40 on the peripheral side of the bearing device 20 is increased.
S23, when the total shading value is larger than a first preset threshold value; determining the angular adjustment direction of the carrier 20;
wherein the first preset threshold is 100, 150 or other values.
In order to adjust the angle of the carrying device 20, it is first necessary to determine the angle adjustment direction of the carrying device 20.
In an alternative embodiment, when the total shading value is greater than a first preset threshold value; determining the angular adjustment direction of the carrier 20 comprises:
s231, controlling the moving assembly 30 to adjust the angle of the carrying device 20 according to the preset angle;
wherein the preset angle is 1 degree, 2 degrees or other values.
As shown in fig. 9 and 10, when the carrier 20 is tilted by 1 degree to a side close to the first sensor B or by 1 degree to a side close to the first sensor D, the total shading value is equal, and thus it is necessary to first determine the tilting direction of the carrier 20.
S232, determining a variation of the shading values of the two sets of first sensors 40 oppositely disposed;
and S233, determining the angle adjustment direction of the bearing device 20 according to the variation.
Wherein, after the carrier 20 is adjusted according to the preset angle, when the adjustment direction of the angle is correct, the variation of the two first sensors 40 arranged oppositely is decreased, and when the adjustment direction of the angle is wrong, the variation of the two first sensors 40 arranged oppositely is increased, so that whether the adjustment direction of the angle of the carrier 20 is correct or not can be determined according to the variation of the shading value,
and S24, determining the adjustment angle of the bearing device 20 according to the shading values of the two oppositely arranged first sensors 40.
After determining the angle adjustment direction, the adjustment angle needs to be determined, so as to facilitate leveling of the carrying device 20.
In an alternative embodiment, the determining the adjustment angle of the carrier 20 according to the shading values of the two oppositely-arranged first sensors 40 includes:
s241, determining a difference between the shading values of the two first sensors 40 which are oppositely arranged and a second preset threshold;
wherein the second preset threshold is 30mm, 35mm, 40mm or other values.
S242, determining a second difference between the shading values of the two oppositely disposed first sensors 40 and the second preset threshold when the difference between the shading values of the two first sensors 40 and the second preset threshold is not equal to each other;
considering the current position offset of the carrying device 20, when the carrying device 20 is not angularly offset, the difference between the two first sensors 40 that are oppositely disposed and the second preset threshold is equal, and when the carrying device 20 is angularly offset, the difference between the two first sensors 40 that are oppositely disposed and the second preset threshold is not equal, so that the difference between the shading values of the two first sensors 40 that are oppositely disposed can be determined.
In a specific embodiment, the second preset threshold is 34, the light shielding value of the first sensor a is 30mm, and the light shielding value of the first sensor C is 44, then the difference between the light shielding value of the first sensor a and the second preset threshold is 4, and the difference between the light shielding value of the first sensor C and the second preset threshold is 10, then the second difference is 6.
S243, determining an edge thickness of the carrier 20;
in this case, the shading value change when the carrier 20 is inclined at an angle is larger as the edge thickness of the carrier 20 is larger, and therefore, in order to accurately determine the angular offset of the carrier 20, the edge thickness of the carrier 20 needs to be determined first.
In another embodiment, when the carrying device 20 of the detection apparatus can be replaced, a sensor for detecting the thickness may be disposed on one side of the carrying device 20, so as to determine the edge thickness of the carrying device 20 according to the sensor.
S244, determining the adjustment angle according to the second difference and the edge thickness of the bearing device 20. After the second difference and the edge thickness are determined, the adjustment angle is determined according to a second formula W = a × a2, where W is the adjustment angle, a is the second difference, T is the edge thickness of the support device 20, a2 is a second preset parameter, and the second preset parameter is a value set by a user or a parameter value obtained by the last adjustment.
In a specific embodiment, the second predetermined parameter is 0.015, the second difference is 6, and the edge thickness is 15mm, then the adjustment distance is determined to be 15 × 6 × 0.05=1.35 degrees.
Referring to fig. 11, fig. 11 is a calibration apparatus provided in an embodiment of the present application, which is applied to a detection device, where the detection device includes a carrying device 20, a moving assembly 30, and four first sensor 40 assemblies, where two first sensors 40 are disposed opposite to each other along a first reference line, and the other two first sensors 40 are disposed opposite to each other along a second reference line, the first reference line and the second reference line both pass through a center of the carrying device 20, and the first reference line is perpendicular to the second reference line; the carrier 20 is connected to the platform 10 through the moving assembly 30, the first sensor 40 is connected to the platform 10, the first sensor 40 is used for acquiring edge information of the carrier 20, and the calibration device includes:
an obtaining unit 410, configured to obtain a shading value of each first sensor 40 at preset time intervals;
a determining unit 420, configured to determine adjustment parameters of the carrying device 20 according to the shading value of each first sensor 40, where the adjustment parameters include an adjustment direction, an adjustment distance, an adjustment angle, and an angle adjustment direction;
an adjusting unit 430, configured to control the moving assembly 30 to adjust the carrying device 20 according to the adjustment parameter.
In an implementation manner of the present application, in determining an adjustment parameter of the carrying apparatus 20 according to the shading value of each first sensor 40, where the adjustment parameter includes an adjustment direction, an adjustment distance, an adjustment angle, and an angle adjustment direction, the determining unit 420 is specifically configured to:
determining the adjustment direction and the adjustment distance of the carrying device 20 according to the shading value of each first sensor 40;
determining a total shading value for all of the first sensors 40;
when the total shading value is larger than a first preset threshold value; determining the angular adjustment direction of the carrier 20;
the adjustment angle of the carrying device 20 is determined according to the shading values of the two first sensors 40 which are oppositely arranged.
In an implementation manner of the present application, in determining the adjustment direction and the adjustment distance of the carrying device 20 according to the shading value of each first sensor 40, the determining unit is specifically configured to:
determining an absolute value of a first difference between shading values of two oppositely arranged first sensors 40;
when the absolute value of the first difference of the shading values of any two first sensors 40 is greater than 0, determining that the corresponding first sensor 40 with the larger shading value in the two first sensors 40 which are oppositely arranged is a first target sensor;
determining the direction of the carrying device 20 away from the first target sensor as the adjustment direction, and determining the adjustment distance according to the absolute value of the first difference.
In one implementation of the present application, when the total shading value is greater than a first preset threshold value; in terms of determining the angular adjustment direction of the carrying device 20, the determining unit 420 is specifically configured to:
controlling the moving assembly 30 to perform angle adjustment on the carrying device 20 according to the preset angle;
determining a variation of the shading values of the two sets of oppositely arranged first sensors 40;
and determining the angle adjustment direction of the bearing device 20 according to the variation.
In an implementation manner of the present application, in terms of determining the adjustment angle of the carrying device 20 according to the shading values of the two oppositely disposed first sensors 40, the determining unit 420 is specifically configured to:
determining a difference value between the shading values of the two oppositely arranged first sensors 40 and a second preset threshold value;
when the difference value between the shading values of the two first sensors 40 and the second preset threshold value is not equal, determining a second difference value between the shading values of the two first sensors 40 which are oppositely arranged and the second preset threshold value;
determining an edge thickness of the carrier 20;
and determining the adjusting angle according to the second difference and the edge thickness of the bearing device 20.
It should be noted that the obtaining unit 410 and the determining unit 420 may be implemented by a processor, and the adjusting unit 430 is implemented by the moving component 30.
The present invention further provides a detection apparatus, where the detection apparatus includes the calibration device according to any of the above embodiments, and the specific structure of the calibration device refers to the above embodiments, and since the calibration device adopts all technical solutions of all the above embodiments, at least all beneficial effects brought by the technical solutions of the above embodiments are achieved, and details are not repeated herein.
Embodiments of the present application further provide a computer-readable storage medium, where the computer-readable storage medium stores a computer program for electronic data exchange, where the computer program makes a computer perform some or all of the steps described in the service apparatus in the above method embodiments.
It should be noted that, in the several embodiments provided in the present application, it should be understood that the disclosed system, apparatus and/or method may be implemented in other ways. For example, the above-described apparatus embodiments are merely illustrative, and for example, the division of the units/modules is only one type of logical functional division, and other divisions may be realized in practice, for example, multiple units or modules may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection through some interfaces, devices or units, and may be in an electrical, mechanical or other form.
The units/modules described as separate parts may or may not be physically separate, and parts displayed as units/modules may or may not be physical units, may be located in one place, or may be distributed on multiple network units. Some or all of the units/modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment.
In addition, each functional unit/module in the embodiments of the present invention may be integrated into one processing unit/module, or each unit/module may exist alone physically, or two or more units/modules may be integrated into one unit/module. The integrated units/modules may be implemented in the form of hardware, or may be implemented in the form of hardware plus software functional units/modules.
The integrated unit/module implemented in the form of software functional unit/module may be stored in a computer readable storage medium. The software functional unit is stored in a storage medium and includes several instructions for causing one or more processors of a computer device (which may be a personal computer, a server, or a network device) to execute some steps of the methods according to the embodiments of the present invention.
Although the present invention has been described with reference to the preferred embodiments, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted for elements thereof without departing from the scope of the present invention.
Claims (10)
1. The calibration method is applied to detection equipment, wherein the detection equipment comprises a platform, a bearing device, a moving assembly and four first sensors, two first sensors are oppositely arranged along a first datum line, the other two first sensors are oppositely arranged along a second datum line, the first datum line and the second datum line both pass through the center of the bearing device, and the first datum line is perpendicular to the second datum line; the bearing device is connected with the platform through the moving assembly, the first sensor is connected with the platform, the first sensor is used for acquiring edge information of the bearing device, and the calibration method comprises the following steps:
acquiring a shading value of each first sensor according to a preset time interval;
determining adjustment parameters of the bearing device according to the shading value of each first sensor, wherein the adjustment parameters comprise an adjustment direction, an adjustment distance, an adjustment angle and an angle adjustment direction;
and controlling the moving assembly to adjust the bearing device according to the adjusting parameters.
2. The calibration method according to claim 1, wherein the determining adjustment parameters of the carrying device according to the shading value of each first sensor, the adjustment parameters including an adjustment direction, an adjustment distance, an adjustment angle and an angle adjustment direction, comprises:
determining the adjustment direction and the adjustment distance of the bearing device according to the shading value of each first sensor;
determining a total shading value for all of the first sensors;
when the total shading value is larger than a first preset threshold value; determining the angular adjustment direction of the carrying device;
and determining the adjustment angle of the bearing device according to the shading values of the two first sensors which are oppositely arranged.
3. The calibration method according to claim 2, wherein the determining the adjustment direction and the adjustment distance of the carrier device according to the shading value of each first sensor comprises:
determining an absolute value of a first difference value of shading values of two oppositely arranged first sensors;
when the absolute value of a first difference value of shading values of any two first sensors is larger than 0, determining that the first sensor corresponding to the first sensor with the larger shading value in the two first sensors which are oppositely arranged is a first target sensor;
determining the direction of the carrying device away from the first target sensor as the adjustment direction, and determining the adjustment distance according to the absolute value of the first difference.
4. The calibration method according to claim 2, wherein when the total shading value is greater than a first preset threshold value; determining the angular adjustment direction of the carrying device, comprising:
controlling the moving assembly to adjust the angle of the bearing device according to the preset angle;
determining the change quantity of the shading values of two groups of oppositely arranged first sensors;
and determining the angle adjustment direction of the bearing device according to the variable quantity.
5. The calibration method according to claim 2, wherein the determining the adjustment angle of the carrying device according to the shading values of the two oppositely arranged first sensors comprises:
determining a difference value between the shading values of the two oppositely arranged first sensors and a second preset threshold value;
when the shading values of the two first sensors are not equal to the difference value of the second preset threshold value, determining a second difference value of the shading values of the two oppositely arranged first sensors and the difference value of the second preset threshold value;
determining an edge thickness of the carrier;
and determining the adjusting angle according to the second difference and the edge thickness of the bearing device.
6. The calibration device is applied to detection equipment, wherein the detection equipment comprises a platform, a bearing device, a moving assembly and four first sensors, two first sensors are oppositely arranged along a first reference line, the other two first sensors are oppositely arranged along a second reference line, the first reference line and the second reference line both pass through the center of the bearing device, and the first reference line is perpendicular to the second reference line; the carrying device is connected with the platform through the moving assembly, the first sensor is connected with the platform, the first sensor is used for acquiring edge information of the carrying device, and the calibration device comprises:
the acquisition unit is used for acquiring the shading value of each first sensor according to a preset time interval;
the determining unit is used for determining adjustment parameters of the bearing device according to the shading value of each first sensor, wherein the adjustment parameters comprise an adjustment direction, an adjustment distance, an adjustment angle and an angle adjustment direction;
and the adjusting unit is used for controlling the moving assembly to adjust the bearing device according to the adjusting parameters.
7. The calibration device according to claim 6, wherein in determining the adjustment parameter of the carrying device according to the shading value of each of the first sensors, the determining unit is specifically configured to:
determining the adjustment direction and the adjustment distance of the bearing device according to the shading value of each first sensor;
determining a total shading value of shading values of all the first sensors;
when the total shading value is larger than a first preset threshold value; determining the angular adjustment direction of the carrying device;
and determining the adjustment angle of the bearing device according to the shading values of the two oppositely arranged first sensors.
8. The calibration apparatus according to claim 7, wherein in determining the adjustment direction and the adjustment distance of the carrying apparatus according to the shading value of each of the first sensors, the determining unit is specifically configured to:
determining an absolute value of a first difference value of shading values of two oppositely arranged first sensors;
when the absolute value of the first difference is greater than 0, determining that the first sensor corresponding to the relatively large shading value in the two first sensors which are oppositely arranged is a first target sensor;
determining the direction of the carrying device away from the first target sensor as the adjustment direction, and determining the adjustment distance according to the absolute value of the first difference.
9. A test device characterized in that it comprises a calibration apparatus according to any one of claims 6-8.
10. A computer-readable storage medium, characterized in that a computer program for electronic data exchange is stored, wherein the computer program causes a computer to perform the method according to any of the claims 1-5.
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| CN202210773449.6A CN115184373A (en) | 2022-07-01 | 2022-07-01 | Calibration method and related device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116608800A (en) * | 2023-07-20 | 2023-08-18 | 钛玛科（北京）工业科技有限公司 | Sensor performance detection method and device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116608800A (en) * | 2023-07-20 | 2023-08-18 | 钛玛科（北京）工业科技有限公司 | Sensor performance detection method and device |
| CN116608800B (en) * | 2023-07-20 | 2023-12-01 | 钛玛科（北京）工业科技有限公司 | Sensor performance detection method and device |
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