JP2012210011A - Linear motor and method of manufacturing linear motor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a linear motor that can reduce the thickness of an iron core portion therein and has a movable element having little loss caused by leakage magnetic flux.SOLUTION: A linear motor is provided with stators 2,3 as primary side magnetic field generating members, and a movable element 4 as a secondary side magnetic field generating member. The movable element 4 is constructed by an iron core portion formed of plural laminated steel plates and a joint portion for joining the steel plates. The joint portion is formed of resin, and the stators 2,3 is divided into two parts so as to sandwich the movable element 4 therebetween. The movable element 4 is configured so that a portion thereof sandwiched by the stators 2, 3 is planar. The two stators 2, 3 are provided with plural first teeth which are arranged at equal pitches at symmetrical positions so as to sandwich the movable element 4, and the iron core portion constituting the movable element 4 is provided with plural second teeth arranged at equal pitches. The plural second teeth are formed integrally with one another so as to face the corresponding first teeth of the stators 2, 3.

Description

  The present invention relates to a linear motor using a magnet-embedded magnetic circuit and a method for manufacturing the linear motor.

  Linear motors have features such as high positioning accuracy and excellent wear resistance, and are used in various applications such as transporting semiconductor-related articles in a clean environment. ing. Among them, a linear motor using a magnet-embedded magnetic circuit can extract a larger thrust even with the same size than that using a typical magnetic circuit.

  As a linear motor having such a magnet-embedded magnetic circuit, one disclosed in Patent Document 1 below is known. This is provided with a mover configured in a flat plate shape so as to be movable in a linear direction as a secondary side magnetic field generation member, and provided with a stator as a primary side magnetic field generation member facing the front and back surfaces of the mover, Teeth made of magnets or iron cores are formed on the opposing surfaces. By configuring the mover side as a secondary side magnetic field generating member in this way, the mover can be reduced in weight without requiring a magnet, a coil, or an electrical connection portion, and thus moves faster. It is possible to make it.

JP 2010-130892 A

  In order to further improve the performance of the linear motor described in Patent Document 1, it is conceivable to further reduce the weight of the mover. The method for manufacturing the mover is not specifically mentioned in the above-mentioned patent document 1, but generally the iron core constituting the teeth of the mover is formed by laminating steel plates in order to avoid a decrease in efficiency due to the generation of eddy currents. It is manufactured by fastening with bolts.

  That is, when the technique disclosed in Patent Document 1 is combined with a method for manufacturing an iron core using a general laminated steel sheet, it can be speculated that the following is specific.

  First, as shown in FIG. 12, a flat plate-like movable element 504 is used as a secondary side magnetic field generating member in a linear direction (X direction in the figure) on a base 501 through a linear guide rail 506 and a linear bearing 507. Provide to be movable. Then, stators 502 and 503 as primary-side magnetic field generating members are provided so as to face the front and back surfaces of the mover 504, respectively. Furthermore, first teeth (not shown) are provided on the surfaces of the stators 502 and 503, respectively, and second teeth described later are provided on the surface of the mover 504. As shown in FIG. 13, the mover 504 has a form in which a mover core part 541 made of an iron core is sandwiched and fixed by a support part 542 from the left and right, and by the support part 542, as shown in FIG. Fixed on the linear bearing 507. The upper stator 502 is directly fixed on the base 501 via upper stator support members 505 and 505 arranged on the left and right.

  As shown in the central cross-sectional view of FIG. 14A, the mover core portion 541 is formed with the second teeth 543 and 544 described above at equal pitches on the upper and lower surfaces of the figure, and these second teeth 543 are formed. 544 is supported by an intermediate portion 545 formed to extend in a plate shape in the X direction, so that all are integrated. The mover core portion 541 is configured by laminating steel plates 508 having a shape as shown in FIG. 14B in the Y direction in the figure. As shown in FIGS. 14A and 14B, the respective steel plates 508 have the convex portions 581 and 582 corresponding to the second teeth 543 and 544 continuously in the X direction while providing gaps 583 and 584, respectively. It is formed at an equal pitch. An elongated hole 586 is provided in the intermediate band portion 585 forming the plate-shaped intermediate portion 545 in order to insert the bolt 547.

  In a state where the plurality of steel plates 508 formed in this manner are overlapped in the Y direction in the drawing, the bolts 547 are inserted through the bolt holes 546 formed by the overlapping elongated holes 586 inside the intermediate portion 545, and FIG. The mover core part 541 is fixed to the support part 542 while forming the mover core part 541 shown in FIG.

  As described above, when attempting to realize the linear motor disclosed in Patent Document 1 using a general steel sheet laminating method, as shown in FIGS. Since a long hole 586 for inserting the bolt 547 is required at the center of 508, the width B of the intermediate band portion 585 needs to be sufficiently wider than the width of the long hole 586. Therefore, the thickness H of the mover core portion 541 cannot be reduced below a certain value, and there is a limit to the weight reduction of the mover core portion 541 and the mover 504 including the mover core portion 541 (see FIG. 13).

Further, since it is necessary to form the width B of the intermediate band portion 585 wider than the width of the long hole 586, the efficiency is also lowered due to leakage magnetic flux. As schematically shown in FIG. 15, in order to drive the linear motor as shown in Patent Document 1, the first teeth 523 and 533 in the stators 502 and 503 and the second teeth 543 in the mover 504, The magnetic circuit M is formed between the magnetic circuit 544 and the 544. This figure shows the positional relationship when the mover 504 is moved rightward as an example, and the magnetic circuit M is formed in the clockwise direction. However, due to the large width B of the movable element 504 inside of the intermediate portion 545, flux leakage _{M L} between the second teeth 543, 543, 544, 544 adjacent occurs. Accordingly, a loss on the magnetic circuit is caused, the efficiency is lowered, and the thrust of the mover 504 is reduced.

  An object of the present invention is to effectively solve such problems. Specifically, a linear motor having a mover that is light in weight and has little loss due to leakage magnetic flux by thinning an inner iron core. And it aims at providing the manufacturing method.

  In order to achieve this object, the present invention takes the following measures.

  That is, the linear motor of the present invention includes a stator as a primary-side magnetic field generating member, and a secondary-side magnetic field generating member that is provided so as to be movable in a linear direction facing the stator and driven by the stator. The mover includes an iron core portion in which a plurality of steel plates are stacked, and a connecting portion that connects the plurality of steel plates, and the connecting portion is formed of a resin. In addition, two of the stators are provided across the mover, and the mover is formed so that at least a portion sandwiched between the two stators has a plate shape, and each of the two stators Comprises a plurality of first teeth at an equal pitch at positions symmetrical to each other with the mover interposed therebetween, and the iron core part constituting the mover comprises a plurality of second teeth at an equal pitch, Each of the second teeth Wherein the people are the corresponding said forming first integrally to the tooth facing the stator.

  When configured in this way, it is possible to maintain the state in which the steel plates are connected and laminated by the resin, so the portion that has formed the bolt holes through which the bolts that conventionally connected the plurality of steel plates are not necessary becomes unnecessary. The mover can be made thinner accordingly. Further, since the magnetic force acting on the movable element by the stator is balanced in the thickness direction, it is possible to reduce the strength in the thickness direction and make it thinner. Therefore, the weight of the mover can be reduced, and the acceleration of the mover can be increased to speed up the reaction. Further, since the leakage magnetic flux can be reduced, the magnetic flux density between the mover and the stator can be increased, and the reaction can be further accelerated.

  In addition, while it is possible to easily manufacture a linear motor having the above-mentioned effects, and to maintain and stabilize the shape, it is preferable that all the steel plates to be laminated have substantially the same shape and are in contact with each other equally. Each of the plurality of steel plates is stacked in a direction parallel to the moving direction of the mover and the thickness direction of the mover, and a plurality of the steel plates are respectively provided at positions corresponding to the plurality of second teeth. It is suitable to comprise so that the tooth | gear structure part may be provided.

  Further, in order to make the mover easier to form, it is preferable that each of the plurality of steel plates has a connecting band portion that continuously connects the plurality of tooth constituent portions in the vicinity of the center portion. It is.

  Furthermore, in order to easily manufacture a linear motor having the above-described effect, the manufacturing method includes the step of manufacturing the mover, and closely stacking the plurality of steel plates in a molding die. It is preferable to include a step of molding and a step of molding by injecting a molten resin into the molding die and solidifying.

  Moreover, in order to manufacture this easily while improving the effect as said linear motor more, the manufacturing method is used by the temporary connection part which becomes unnecessary after finishing in the process of manufacturing the said needle | mover. Forming the plurality of steel plates into a shape in which the plurality of tooth constituent portions are connected, and closely laminating the plurality of steel plates including the temporary connection portions in a molding die; and It is preferable to include a step of molding by injecting a molten resin into a molding die and solidifying and a step of removing the temporary connection portion by shaving the molded product after the molding. It is.

  According to the present invention described above, it is possible to provide a linear motor that has a mover that is lightweight and has little loss due to internal leakage magnetic flux, and that can operate at a higher speed than the conventional one, and a method for manufacturing the same. Become.

1 is a perspective view showing a schematic configuration of a linear motor according to a first embodiment of the present invention. The front sectional view of the linear motor. Sectional drawing of the principal part of the linear motor. The perspective view of the needle | mover of the linear motor. The top view of the needle | mover of the linear motor. Sectional drawing of the needle | mover of the linear motor, and the side view of the steel plate which is a component of the needle | mover. The schematic diagram of the magnetic circuit formed in the linear motor. The perspective view which shows schematic structure of the shaping die used when shape | molding the needle | mover of the linear motor. Sectional drawing of the needle | mover of the linear motor which concerns on 2nd Embodiment of this invention, and the side view of the steel plate which is a component of the needle | mover. The schematic diagram of the magnetic circuit formed in the linear motor. The perspective view which shows schematic structure of the shaping die used when shape | molding the needle | mover of the linear motor. The perspective view which shows schematic structure of the linear motor temporarily comprised using the prior art. The top view of the needle | mover of the linear motor. Sectional drawing of the needle | mover of the linear motor, and the side view of the steel plate which is a component of the needle | mover. The schematic diagram of the magnetic circuit formed in the linear motor.

Embodiments of the present invention will be described below with reference to the drawings. In addition, since the operation principle of the linear motor according to the present embodiment is the same as that of the above-described Patent Document 1, a detailed description of a method for forming magnetic poles is omitted.
<First Embodiment>

  As shown in FIG. 1, the linear motor according to the first embodiment of the present invention is roughly composed of a pair of stators 2 and 3 as primary side magnetic field generating members arranged vertically opposite to each other between the stators 2 and 3. And a mover 4 as a secondary side magnetic field generating member arranged in

  Of these, the lower stator 3 is fixed directly on the base 1, and the upper stator 2 is directed downward via an upper stator support portion 5 formed in a U-shape. It is fixed on the top. The mover 4 is provided so as to be movable in the X direction indicated by the seat axis in the figure with respect to the base 1 via the linear guide rail 6 and the linear bearing 7.

  In the following description, directions will be described using the coordinate axes shown in the drawing without any particular description.

  In the present embodiment, the linear guide rail 6 and the linear bearing 7 that support the mover 4 are arranged so as to be accommodated in the upper stator support portion 5 that is formed in a U-shape. Since the upper stator support portion 5 does not interfere with the moving direction, the mover 4 can be operated with a large stroke.

  Further, in the linear motor according to this embodiment, as shown in the front sectional view of FIG. 2, the stators 2 and 3 arranged vertically are the stator core portions 21 and 31 and coils provided on the outer periphery thereof, respectively. 22 and 32. The mover 4 includes a mover core portion 41 configured in a flat plate shape, and support portions 42 and 42 that support the mover core portion 41 from both sides. The support portions 42 and 42 are fixed on the linear bearings 6 and 6, respectively. Yes. The upper and lower stator core parts 21 and 31 are arranged to face each other in parallel, and the mover core part 41 is arranged between them. The mover core portion 41 and the stator core portions 21 and 31 are adjusted so that the faces facing each other are parallel to each other and the gap is the same. These balance the magnetic force acting on the mover core 41 by the stator core portions 21 and 31 so that forces other than the X direction do not act on the mover core 41 as much as possible. The shape of the mover core 41 is not limited as long as it does not face the stator cores 21 and 31 and does not act on the magnetic force.

  Magnetic currents of various patterns are formed between the stator core portions 21 and 31 and the mover core portion 41 by applying a current in a predetermined pattern to the coils 22 and 32 thus configured from a control unit (not shown). Thus, thrust can be generated in the mover 4.

  In FIG. 3, the cross section of the stator core parts 21 and 31 and the needle | mover core part 41 is expanded and shown. In this figure, the winding portion constituting the coil (see FIG. 2) is omitted. First, the stator core portion 21 of the upper stator 2 has a plurality of first teeth 23, 23 made of permanent magnets on the surface facing the mover core portion 41, and there is a gap between them. A portion 24 is formed. As described above, the first teeth 23 are continuously formed on the surface of the stator core portion 21 at an equal pitch in the X direction with the gap portion 24.

  Further, the stator core portion 31 in the lower stator 3 is also provided with a plurality of first teeth 33 on the surface facing the mover core portion 41 and the gap portion 34 as in the upper stator 2. However, it is formed at an equal pitch continuously in the X direction. Further, the plurality of first teeth 23 and 33 in the upper and lower stator core portions 21 and 31 are positioned symmetrically with respect to the movable element 4.

  The second teeth 43 constituting the iron core portion are formed in the mover core portion 41 at equal pitches in the X direction while forming the gap portions 44 so as to face the plurality of first teeth 23 and 33. ing. Below, the iron material part formed with the below-mentioned steel plate etc. inside the needle | mover core part 41 will generically be called an iron core part. Here, the pitch at which the second teeth 43 are provided is set to be twice the pitch at which the first teeth 23 and 33 are provided. In the second teeth 43, the upper portion 43 a faces the first teeth 23 in the upper stator 2, and the lower portion 43 b faces the first teeth 33 in the lower stator 3. However, in the present embodiment, as described above, the plurality of first teeth 23 in the upper stator 2 and the plurality of first teeth 33 in the lower stator 3 are provided symmetrically in the vertical direction. The upper portion 43a and the lower portion 43b that face each other are integrally formed continuously in the vertical direction, and the second teeth 43 are each formed to have a simple rectangular cross section. Further, a resin layer is formed in the gap 44 between the second teeth 43 and 43.

  The mover core portion 41 configured as described above is formed in a plate shape as shown in FIG. Each of the second teeth 43 described above is skewed and extended in a direction shifted from the Y-axis direction. Further, flat plate-like support portions 42 and 42 having larger thicknesses are provided on both sides of the mover core portion 41 to constitute the mover 4 as a whole. The support portions 42 and the gap portion 44 described above are integrally formed of resin as a connecting portion 45 for connecting the second teeth 43. Here, the support portion 42 is configured in a flat plate shape. However, as long as the entire movable element 4 can be supported on the above-described linear bearing 7 (see FIG. 1), the support portion 42 is not necessarily configured in a flat plate shape.

  Further, as shown in FIG. 5, the second teeth 43 in the mover core portion 41 are configured by laminating steel plates 8 as so-called electromagnetic steel plates, which are magnetic plates made of a ferromagnetic material. The iron core part is constituted by the assembly. Each steel plate 8 is disposed in a direction parallel to the moving direction (X direction) and the thickness direction (Z direction) of the mover 4 and stacked in the Y direction, and the stator core portions 21 and 31 (see FIG. 2). The eddy current generated by the applied magnetic field is suppressed to prevent a decrease in magnetic efficiency.

  As a result of the above configuration, the movable element 4 according to the present embodiment is independent of the second teeth 43 inside the movable element core portion 41 in the X direction by the gap portion 44 as shown in FIG. Will be formed. Such a mover 4 is manufactured as follows.

  First, the steel plate 8 which forms the 2nd tooth | gear 43 by being laminated | stacked is formed in a shape as shown in FIG.6 (b). Hereinafter, it demonstrates concretely using FIG. 6 (a) and (b). The rectangular tooth constituent portions 81 corresponding to the second teeth 43 arranged at an equal pitch in the X direction are continuously arranged in the X direction while forming the gap 82 corresponding to the gap portion 44, and All of these are formed into a shape connected together at the bottom of the figure by a strip-shaped temporary connection portion 83 that is not required after finishing. That is, it is formed into a shape having a larger width than the thickness H when the movable element core portion 141 is completed.

  And the steel plate 8 shape | molded in the shape as shown in FIG.6 (b) is laminated | stacked closely to a Y direction, skewing inside the shaping | molding die 9 shown in FIG. The molding die 9 is formed by combining the upper die 91 and the lower die 92 to form a hollow mover die 94 therein, and is held in a state where the steel plate 8 is closely laminated at the center thereof. It is configured to be able to. In this state, molten resin (not shown) is injected from an injection hole 93 provided in the upper mold 93 and then solidified.

  By removing unnecessary portions including the above-described temporary connection portion 83 (see FIG. 6B) from the molded product after the molding by a grinding process such as grinding, the molded product is trimmed as shown in FIG. By doing so, the mover 4 can be easily manufactured, and the second teeth 43 formed inside the mover core portion 41 are made independent as shown in FIG. It can be in the form.

  By using such a manufacturing method, it is simpler and more accurate than the resin processing after forming and laminating rectangular tooth constituent portions 81 as shown in FIG. 4 can be manufactured. Further, even after finishing, as shown in FIG. 5, each tooth component 81 is equally held in contact with the gap 44 as the connecting portion, so that the movable element 4 can be moved even when a magnetic force is applied. It becomes easy to maintain the shape.

  With the above-described configuration, when the conventional technique is used, the intermediate portion 545 that is large for providing the bolt hole 546 as shown in FIG. In addition, the thickness H of the mover core portion 41 shown in FIG. 6A can be reduced. Therefore, since the mover 4 shown in FIG. 4 can be reduced in weight, even with the same electric power, the acceleration of the mover 4 can be increased to speed up the reaction.

Further, when a magnetic circuit M is formed between the stator core portions 21 and 31 and the mover core portion 41 as schematically shown in FIG. 43 since it is configured independently, can be extremely small leakage flux M _{L (see} FIG. 15) was inevitable in the prior art. Therefore, the magnetic flux density between the first teeth 23 and 33 in the stator core portions 21 and 31 and the second teeth 33 in the mover 41 can be increased to increase the thrust on the mover 4, Even with the same electric power, the acceleration of the mover 4 can be further increased to speed up the reaction.

  Furthermore, in this embodiment, as shown in FIG. 3, the stator core portions 21 and 31 and the first teeth 23 and 33 formed thereon are provided symmetrically with respect to the mover core portion 41. Yes. Therefore, the magnetic force acting on the mover core 41 is balanced up and down across the mover core 41, and as a result, the magnetic force acting on the mover core 41 is only the thrust in the X direction. Therefore, the mover core portion 41 can be further thinned, and the effect of reducing the weight of the mover 4 can be further enhanced. Further, even when a deviation occurs in the balance of the magnetic force acting on the upper and lower surfaces of the mover core portion 41 due to the influence of an attachment error or the like, the support portion 42 that supports the mover core portion 41 as shown in FIG. Since it is formed thick, it can act as a strength member and suppress deformation of the mover core portion 41.

  As described above, the linear motor according to the present embodiment includes the stators 2 and 3 as primary magnetic field generating members and the stator 2 provided so as to be movable in a linear direction so as to face the stators 2 and 3. 3, and a mover 4 as a secondary side magnetic field generating member driven by 3, wherein the mover 4 connects an iron core portion in which a plurality of steel plates 8 are laminated to the plurality of steel plates 8. The connecting portion 45 is formed of resin, and two stators 2 and 3 are provided with the movable element 4 interposed therebetween, and at least the two stators 2 and 3 are provided. The movable element 4 is formed so that a portion 41 sandwiched between the movable elements 4 has a plate shape, and each of the two stators 2 and 3 has a plurality of equal pitches at symmetrical positions with respect to the movable element 4. The first mover 23, 33 is provided, and the mover The iron core portion includes a plurality of second teeth 43 at an equal pitch, and each of the plurality of second teeth 43 corresponds to the first teeth 23, 33 of the stators 2, 3 respectively. It is configured to be integrally formed so as to face each other.

Since it is configured in this way, it is possible to maintain the state where the steel plates 8 are laminated and connected by the resin, and the bolt holes 546 for inserting the bolts 547 that have conventionally connected the steel plates 8 are not necessary, Accordingly, the mover 4 can be made thinner. Further, since the stators 2 and 3 are provided symmetrically with the mover 4 in between, the magnetic force acting in the thickness direction of the mover 4 is balanced, so that the force in the moving direction acts even if the force in the moving direction acts. Since it does not act, the mover 4 can be reduced in strength in the thickness direction, and can be made thinner. Therefore, the weight of the mover 4 can be reduced, and the acceleration of the mover 4 can be increased to speed up the reaction. Moreover, since it becomes possible to reduce leakage magnetic flux M _L inside of the movable element 4, it can be faster and more increased to further react the magnetic flux density between the armature 4 and the stator 2 and 3 it can

Further, each of the plurality of steel plates 8 is laminated in a direction parallel to the moving direction of the mover 4 and the thickness direction of the mover 4, and the plurality of second teeth 43 are stacked. Since the plurality of tooth constituent portions 81 are provided at the corresponding positions, all the steel plates 8 to be laminated can be easily manufactured in substantially the same shape, and all the steel plates 8 are equal. Since it can contact | connect the connection part 45 formed between the tooth | gear structure parts 81, it becomes easy to maintain the laminated | stacked shape. Further, by molding without the portion connecting a plurality of teeth forming section 81, it is possible to extremely reduce the leakage flux M _L, be further faster reaction of the mover 4 to increase the more the magnetic flux density it can.

  Further, in the method for manufacturing the linear motor according to the present embodiment, the step of closely laminating the plurality of steel plates 8 in the molding die 9 and the molding in the step of manufacturing the movable element 4. And the step of forming the mold 9 by injecting molten resin into the mold 9 and solidifying it, so that the above-described movable element 4 can be easily manufactured, and the linear motor having the above-described effects can be easily obtained. It can be manufactured.

Furthermore, in the process of manufacturing the mover 4, the process of forming the plurality of steel plates 8 in a shape in which the plurality of tooth constituent parts 81 are connected by temporary connection parts 83 that are not required after finishing, A step of closely laminating the plurality of steel plates 8 including the temporary connection portion 83 in the mold 9 and a step of forming by injecting molten resin into the mold 9 and solidifying it. And the step of removing the temporary connection portion 83 by shaving the molded product after the molding, the second teeth 43 are completely independent in the above-described mover core portion 41. Thus, it is possible to easily configure them, and it is possible to manufacture them with high accuracy, and it is possible to manufacture a linear motor having the above-mentioned effects easily and with high accuracy.
Second Embodiment

  The linear motor according to the second embodiment of the present invention is obtained by changing the mover 4 according to the first embodiment shown in FIG. For this reason, parts other than the mover 4 are denoted by the same reference numerals and description thereof is omitted.

  The needle | mover 104 used with the linear motor which concerns on 2nd Embodiment has a cross section as shown to Fig.9 (a). The outer shape of the mover 104 is the same as that of the mover 4 of the first embodiment shown in FIGS.

  Returning to FIG. 9A, the first teeth 23 and 33 (see FIG. 3) formed on the stator core portions 21 and 31 (see FIG. 3), respectively, in the mover core portion 141 of the mover 104 in the second embodiment. Teeth 143a and 143b are provided so as to face each other, and are continuously formed vertically as a second tooth 143 so as to have a rectangular cross section. Such second teeth 143 are continuously provided at an equal pitch in the X direction with the gap 144 interposed therebetween. Further, a connecting portion 146 for connecting the second teeth 143 to each other is provided at the central portion in the thickness direction of the mover core portion 141. Thereby, in this embodiment, an iron core part is comprised by all the 2nd teeth 143 and the connection part 146. FIG. Similarly to the first embodiment, the gap portion 144 and the support portion 142 for supporting the mover core portion 141 from the Y direction are integrally formed of resin.

  The second teeth 143 are formed by laminating steel plates 108 having the shape shown in FIG. 9B in the Y direction. The steel plate 108 includes a rectangular tooth constituent portion 181 corresponding to each of the second teeth 143 and a connecting band portion 183 that continuously connects the tooth constituent portions 181 in the vicinity of the central portion in the width direction. The connection band portion 183 constitutes the connection portion 146 described above after being stacked. The connecting band portion 183 is provided only for maintaining the mutual positional relationship during resin molding, which will be described later, by connecting the respective tooth constituent portions 181, and a long hole 586 for inserting a bolt (FIG. 14B). ))), The width B can be made smaller than in the prior art.

  The steel plate formed as described above is provided in the vicinity of the center of the mover die 194 as a hollow portion formed inside the forming die 109 constituted by the upper die 191 and the lower die 192 shown in FIG. Closely stacked in the direction. At this time, since each steel plate 108 is integrated by a central connecting band portion 183 (see FIG. 9B), it is easy to perform positioning inside the mover mold 194. Then, the molten resin is injected from the injection hole 193 and solidified, whereby the movable element 104 as shown in FIG. 9A can be formed. Unlike the first embodiment, it is not necessary to cut the surface of the molded product.

  At the time of such forming, as shown in FIGS. 9A and 9B, the steel plate 108 forming the second teeth 143 has only the same shape, and therefore can be easily manufactured. Furthermore, since all the steel plates 108 are maintained in the connected state by the resin portions that form the gap portions 144 equally, it is easy to maintain the stacked shapes.

  The mover 104 configured as described above can reduce the thickness H of the mover core portion 141 shown in FIG. Thereby, since the mover 104 can be reduced in weight, the acceleration of the mover 104 can be increased and the reaction can be accelerated even with the same electric power.

Further, in order to apply a thrust to the mover 104, when the magnetic circuit M is formed between the stator core portions 21 and 31 and the mover core portion 141 as shown in FIG. 10, the second teeth 143 are connected to each other. for connecting portion 146 is formed sufficiently small, it is possible to reduce the leakage magnetic flux M _L which passes between this. Therefore, the magnetic flux density between the first teeth 23 and 33 in the stator core portions 21 and 31 and the second teeth 143 in the mover 141 can be increased to increase the thrust on the mover 104. Even with the same electric power, the acceleration of the mover 104 can be further increased to speed up the reaction.

  As described above, the linear motor according to the second embodiment is configured such that each of the plurality of steel plates 108 has the connecting band portion 182 that continuously connects the plurality of tooth constituent portions 181 near the central portion. Is,

Since it is configured in this manner, each of the steel plates 108 constituting the iron core portion has a configuration in which the tooth configuration portion 181 corresponding to the second tooth 143 is connected by the connection band portion 182, so that the movable element 104 is manufactured. easier, while the weight of the movable member 104 as described above, by reducing the leakage magnetic flux M _L inside, increasing the acceleration of the movable element 104, becomes easy to obtain the effect of increasing the reaction. Instead it for other effects are almost the same as in the first embodiment described above, the influence of the leakage magnetic flux M _L since there is a portion connecting a plurality of teeth forming portion 181 remains negligible, resin molding There is an advantage that the subsequent surface shaving is not required.

  The specific configuration of each unit is not limited to the above-described embodiment.

  For example, in the first and second embodiments described above, the stators 2, 3 (2, 3) and the mover 4 (104) are arranged in the vertical direction, but they are arranged facing each other. As long as thrust can be applied from the stator to the mover, the arrangement direction is not limited, and it is possible to configure each of them by placing them sideways or obliquely.

  Other configurations can be variously modified without departing from the spirit of the present invention.

1 ... Base 2 ... Stator (upper side)
3 ... Stator (lower side)
DESCRIPTION OF SYMBOLS 4 ... Movable element 5 ... Upper stator support part 6 ... Linear guide rail 7 ... Linear bearing 8 ... Steel plate 9 ... Molding die 21 ... Stator core part (upper side)
22 ... Coil (upper side)
23 ... 1st tooth (upper side)
31 ... Stator core (lower side)
32 ... Coil (lower side)
33 ... 1st tooth (lower side)
DESCRIPTION OF SYMBOLS 41 ... Movable core part 42 ... Support part 43 ... 2nd tooth | gear 45 ... Connection part 81 ... Teeth component part 93 ... Injection hole H ... Movable element core thickness M ... Magnetic circuit

Claims (5)

A linear motor comprising a stator as a primary side magnetic field generating member and a mover as a secondary side magnetic field generating member provided so as to be movable in a linear direction so as to face the stator and driven by the stator. The mover includes an iron core portion in which a plurality of steel plates are stacked, and a connecting portion that connects the plurality of steel plates, and the connecting portion is formed of resin, and the stator is movable. The movable element is formed so that at least two portions sandwiched between the two stators are plate-shaped, and each of the two stators sandwiches the movable element. A plurality of first teeth are provided at symmetric positions at an equal pitch, and the iron core portion constituting the mover includes a plurality of second teeth at an equal pitch, and each of the plurality of second teeth is Before the corresponding stator Linear motor, characterized in that it is integrally formed so as to be opposed to the first teeth. Each of the plurality of steel plates is stacked in a direction parallel to the moving direction of the mover and the thickness direction of the mover, and a plurality of the steel plates are respectively provided at positions corresponding to the plurality of second teeth. The linear motor according to claim 1, further comprising: a tooth component. 3. The linear motor according to claim 2, wherein each of the plurality of steel plates has a connecting band portion that continuously connects the plurality of tooth constituent portions in the vicinity of a central portion. It is a manufacturing method of the linear motor in any one of Claims 1-3, Comprising: The process of laminating | stacking these steel plates closely in a shaping die in the process of manufacturing the said needle | mover, And a step of molding by injecting a molten resin into the molding die and solidifying the molten resin. It is a manufacturing method of the linear motor of Claim 2 or 3, Comprising: In the process which manufactures the said needle | mover, it is in the shape where the said several tooth structure part was connected by the temporary connection part which becomes unnecessary after finishing. A step of forming the plurality of steel plates, a step of closely laminating the plurality of steel plates including the temporary connection portion in the molding die, and injecting molten resin into the molding die. A method for manufacturing a linear motor, comprising: a step of forming by solidification; and a step of removing the temporary connection portion by cutting the formed product after the forming.

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