JP2013046502A - Linear motor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a linear motor including a movable element whose inner iron core forming part is thinned and which is adapted to high speed with less loss due to leakage flux.SOLUTION: A linear motor comprises: two stators 2, 3 comprising a plurality of first teeth and arranged with facing each other as primary magnetic flux generation members; and a plurality of second teeth facing the plurality of first teeth; and a movable element 4 arranged between the two stators 2, 3 as a secondary magnetic flux generation member. The two stators 2, 3 comprise the plurality of first teeth as magnetic poles at the opposite position with the movable element 4 in between. The movable element 4 comprises: an iron core forming part comprising the plurality of second teeth; and a frame body which is provided with an opening in the direction facing the stators 2, 3 and supports the iron core forming part in the state in which the iron core forming part is stored inside the opening.

Description

  The present invention relates to a linear motor using a magnet embedded magnetic circuit.

  Linear motors have features such as high positioning accuracy and excellent wear resistance, and are used in various applications such as transporting semiconductor-related articles in a clean environment. ing. Among them, a linear motor using a magnet-embedded magnetic circuit can extract a larger thrust even with the same size than that using a typical magnetic circuit.

  As a linear motor having such a magnet-embedded magnetic circuit, one disclosed in Patent Document 1 below is known. This is provided with a mover configured in a flat plate shape so as to be movable in a linear direction as a secondary side magnetic field generation member, and provided with a stator as a primary side magnetic field generation member facing the front and back surfaces of the mover, Teeth made of magnets or iron cores are formed on the opposing surfaces. By configuring the mover side as a secondary side magnetic field generating member in this way, the mover can be reduced in weight without requiring a magnet, a coil, or an electrical connection portion, and thus moves faster. It is possible to make it.

JP 2010-130892 A

  In order to further improve the performance of the linear motor described in Patent Document 1, it is conceivable to further reduce the weight of the mover. The method for manufacturing the mover is not specifically mentioned in the above-mentioned patent document 1, but generally the iron core constituting the teeth of the mover is formed by laminating steel plates in order to avoid a decrease in efficiency due to the generation of eddy currents. It is manufactured by fastening with bolts.

  That is, when the technique disclosed in Patent Document 1 is combined with a method for manufacturing an iron core using a general laminated steel sheet, it can be speculated that the following is specific.

  First, as shown in FIG. 18, the movable element 504 configured in a flat plate shape is used as a secondary side magnetic field generating member on a base 501 in a linear direction (in the figure) via linear guide rails 506 and 506 and linear bearings 507 and 507. Provided to be movable in the X direction). Then, stators 502 and 503 as primary-side magnetic field generating members are provided so as to face the front and back surfaces of the mover 504, respectively. Furthermore, first teeth (not shown) are provided on the surfaces of the stators 502 and 503, respectively, and second teeth described later are provided on the surface of the mover 504. As shown in FIG. 19, the mover 504 has a configuration in which an iron core constituting portion 541 made of a soft magnetic material such as iron is sandwiched and fixed by a support portion 542 that protrudes to the left and right, and is supported by the support portion 542. As shown in FIG. 18, it is fixed on the linear bearing 507. The upper stator 502 is directly fixed on the base 501 via upper stator support members 505 and 505 arranged on the left and right.

  The core component 541 (see FIG. 19) is formed with the above-described second teeth 543 and 544 on the upper and lower surfaces of the figure at equal pitches as shown in FIG. The second teeth 543 and 544 are all integrated by being connected to an intermediate portion 545 formed to extend in the left-right direction (X direction) in the figure. The iron core constituting portion 541 is configured by laminating steel plates 508 having a shape as shown in FIG. 20B in the depth direction (Y direction) in the drawing. As shown in FIGS. 20 (a) and 20 (b), each steel plate 508 has convex portions 581 and 582 corresponding to the second teeth 543 and 544 continuously in the X direction while providing gaps 583 and 584, respectively. It is formed at an equal pitch. An elongated hole 586 is provided in the intermediate band portion 585 forming the plate-shaped intermediate portion 545 in order to insert the bolt 547.

  In the state where the plurality of steel plates 508 formed in this manner are stacked in the depth direction (Y direction) in the drawing, the bolts 547 are inserted through the bolt holes 546 formed by the overlapping long holes 586 inside the intermediate portion 545. In this way, the iron core constituent part 541 is fixed to the support part 542 while forming the iron core constituting part 541 shown in FIG.

  As described above, when attempting to realize the linear motor disclosed in Patent Document 1 using a general steel sheet laminating method, as shown in FIGS. Since a long hole 586 for inserting the bolt 547 is required at the center of 508, the width B of the intermediate band portion 585 needs to be sufficiently wider than the width of the long hole 586. For this reason, the thickness H of the iron core component 541 cannot be reduced below a certain value, and there is a limit to the weight reduction of the iron core component 541 and the movable element 504 (see FIG. 19) including the iron core component 541.

Further, since it is necessary to form the width B of the intermediate band portion 585 wider than the width of the long hole 586, the efficiency is also lowered due to leakage magnetic flux. As schematically shown in FIG. 21, in order to drive a linear motor as shown in Patent Document 1, first teeth 523 and 533 in the stators 502 and 503 and second teeth 543 in the mover 504 are provided. The magnetic circuit M is formed between the magnetic circuit 544 and the 544. This figure shows the positional relationship when the mover 504 is moved rightward as an example, and the magnetic circuit M is formed in the clockwise direction. However, due to the large width B of the movable element 504 inside of the intermediate portion 545, flux leakage _{M L} between the second teeth 543, 543, 544, 544 adjacent occurs. Accordingly, a loss on the magnetic circuit is caused, the efficiency is lowered, and the thrust of the mover 504 is reduced.

  An object of the present invention is to effectively solve such a problem. Specifically, by reducing the thickness of the internal core component, the linear component having a mover that is lightweight and has little loss due to leakage magnetic flux. An object is to provide a motor.

  In order to achieve this object, the present invention takes the following measures.

  That is, the linear motor of the present invention includes two stators as primary-side magnetic flux generating members that are arranged to face each other with a plurality of first teeth, and a plurality of second that faces the plurality of first teeth. And a mover as a secondary-side magnetic flux generating member disposed between the two stators, and the magnetic poles at positions where the two stators face each other across the mover A plurality of first teeth, and the mover is provided with an iron core component having the plurality of second teeth, and an opening is provided in a direction in which the stator faces, And a frame that supports the iron core component in a state of being housed inside the opening.

  Here, the “primary-side magnetic flux generating member” used in the present invention includes a member having magnetomotive force such as a coil capable of applying a current, and can generate or change a magnetic field. The “secondary magnetic flux generating member” has a property of being magnetized by being placed inside the magnetic field formed by the primary magnetic flux generating unit, and can generate new magnetic flux or magnetic flux. It shall mean something that can be concentrated.

  Furthermore, the “iron core component” used in the present invention is a generic term for a part having a function as an iron core in the mover, and a case where it is composed of a single component or a plurality of divided components. It doesn't matter.

  By configuring as described above, it is not necessary to provide a through hole in the range of the thickness direction of the core component by supporting the core component including the second tooth in a form that fits in the opening of the frame, The intermediate part connecting the second teeth is thinned to reduce the thickness of the iron core component, thereby reducing the weight of the mover and reducing the leakage magnetic flux between the second teeth to improve the efficiency. Thus, it is possible to increase the speed of the mover.

  In addition, in order to prevent a decrease in propulsive force by preventing a deflection around an axis parallel to the width direction of the mover and maintaining a proper gap between the first tooth and the second tooth. The frame includes a stator facing portion sandwiched between the two opposing stators, and a projecting portion projecting from the stator facing portion in a direction perpendicular to the direction in which the mover operates. In addition, it is preferable that the projecting portion is formed along the moving direction of the movable element and is formed to be thicker than the stator facing portion.

  Further, in order to further increase the weight reduction of the mover and the effect of reducing the leakage magnetic flux, and to further increase the speed of the mover, the plurality of second teeth are each independently formed of a plurality of steel plates. In addition to being formed by laminating, the frame body is formed with a plurality of recesses formed at a predetermined pitch so as to form a pair at positions corresponding to both end portions of the second tooth, It is preferable that the first teeth are provided so that both end portions thereof are engaged with the recesses.

  Further, in order to improve efficiency by preventing loss due to eddy current and further increase the propulsive force of the mover, the plurality of steel plates forming the plurality of second teeth are parallel to the opposing direction of the stator. It is preferable that the layers are laminated in such a direction.

  Further, in order to eliminate the need for complicated processing on the frame body and to facilitate the manufacture of the mover, the above-described core structure is used instead of the above-described structure of the core structure that makes the second teeth independent of each other. A plurality of second teeth and a pair of side plates that are respectively connected to both ends of the plurality of second teeth and support the plurality of second teeth arranged in parallel at a predetermined pitch. It is suitable to comprise.

  Further, in order to further facilitate manufacture of the mover, it is preferable that the core component can be manufactured only by laminating steel plates in the same direction. Instead of the above-described configuration of the core component, the core The component is formed by laminating a plurality of steel plates in a direction parallel to the moving direction of the mover and the opposing direction of the stator, and each of the plurality of steel plates is the plurality of second plates. It is preferable to comprise a plurality of tooth constituent parts constituting the teeth and a connecting band part that continuously connects each of the plurality of tooth constituent parts in the vicinity of the central part.

  According to the present invention described above, it is possible to provide a linear motor that has a mover that is lightweight and has little loss due to internal leakage magnetic flux and that can operate at a higher speed than the conventional one.

1 is a perspective view showing a schematic configuration of a linear motor according to a first embodiment of the present invention. The front sectional view of the linear motor. Sectional drawing of the principal part of the linear motor. The top view of the needle | mover of the linear motor. The perspective view of the needle | mover of the linear motor. Assembly drawing of the mover of the linear motor. The perspective view which shows the 2nd tooth | gear which comprises a part of needle | mover of the linear motor. The schematic diagram of the magnetic circuit formed in the linear motor. The perspective view which shows schematic structure of the linear motor which concerns on 2nd Embodiment of this invention. The perspective view of the needle | mover of the linear motor. The disassembled perspective view of the needle | mover of the linear motor. The top view of the needle | mover of the linear motor. The side view of the needle | mover of the linear motor, and the AA sectional drawing and BB sectional drawing in FIG. The perspective view which shows the principal part of the needle | mover of the linear motor which concerns on 3rd Embodiment of this invention. The perspective view which shows the iron core structure part of the linear motor. The perspective view which shows the iron core structure part which forms the needle | mover of the linear motor which concerns on 4th Embodiment of this invention. The top view of the steel plate which comprises the iron core structure part in FIG. The perspective view which shows schematic structure of the linear motor temporarily comprised using the prior art. The top view of the needle | mover of the linear motor. Sectional drawing of the needle | mover of the linear motor, and the side view of the steel plate which is a component of the needle | mover. The schematic diagram of the magnetic circuit formed in the linear motor.

Embodiments of the present invention will be described below with reference to the drawings. In addition, since the operation principle of the linear motor according to the present embodiment is the same as that of the above-described Patent Document 1, a detailed description of a method for forming magnetic poles is omitted.
<First Embodiment>

  As shown in FIG. 1, the linear motor according to the first embodiment of the present invention is roughly composed of a pair of stators 2 and 3 as primary side magnetic field generating members arranged vertically opposite to each other between the stators 2 and 3. And a mover 4 as a secondary side magnetic field generating member arranged in

  Of these, the lower stator 3 is fixed directly on the base 1, and the upper stator 2 is directed downward via an upper stator support portion 5 formed in a U-shape. It is fixed on the top. The mover 4 is provided so as to be movable in the X direction indicated by the seat axis in the figure with respect to the base 1 via linear guide rails 6 and 6 and linear bearings 7 to 7.

  Here, the X direction shown in the drawing is an operation direction of the mover 4, the Z direction is a direction in which the pair of stators 2 and 3 face each other, and the Y direction is the stator 2, 3 and the mover. 4, that is, a direction orthogonal to the X direction and the Z direction, and can be said to be the width direction of the mover 4 and the stators 2 and 3. In the drawings other than FIG. 1 as well, the X, Y, and Z directions are similarly set to the above-described directions, and the following description may be made using these axial directions without particular description.

  In the present embodiment, the linear guide rails 6 and 6 and the linear bearings 7 to 7 that support the mover 4 are arranged so as to fit inside the upper stator support portion 5 formed in a U-shape. Since the upper stator support 5 does not interfere with the moving direction of the mover 4, the mover 4 can be operated with a large stroke.

  Further, in the linear motor according to this embodiment, as shown in the front sectional view of FIG. 2, the stators 2 and 3 arranged vertically are the stator core portions 21 and 31 and coils provided on the outer periphery thereof, respectively. 22 and 32. The mover 4 is composed of an iron core constituting portion 41 configured in a flat plate shape and a frame body 42 that supports the iron core constituting portion 41, and the frame body 42 is fixed on the linear bearings 6 and 6. The upper and lower stator core portions 21 and 31 are arranged to face each other in parallel, and further, an iron core constituting portion 41 is arranged between them. The core-constituting part 41 and the stator core parts 21 and 31 are adjusted so that the faces facing each other are parallel to each other and the gap is the same. These are for balancing the magnetic force acting on the iron core component 41 by the stator core portions 21 and 31 up and down so that forces other than the X direction do not act on the iron core component 41 as much as possible. .

  Various current patterns are provided between the stator core portions 21 and 31 and the iron core constituting portion 41 by applying a current in a predetermined pattern from a control unit (not shown) to the coils 22 and 32 of the stators 2 and 3 thus configured. This magnetic circuit can be formed to generate a thrust toward the mover 4 in the X direction in the figure.

  FIG. 3 shows an enlarged cross section of the stator core portions 21 and 31 and the iron core constituting portion 41. In this figure, the winding portions constituting the coils 22 and 32 (see FIG. 2) are omitted. First, the stator core portion 21 of the upper stator 2 has a plurality of first teeth 23, 23 made of permanent magnets on the surface facing the core constituting portion 41, and a gap portion therebetween. 24 is formed. As described above, the first teeth 23 to 23 are continuously formed at a predetermined pitch in the X direction with the gap 24 on the surface of the stator core 21.

  Furthermore, also about the stator core part 31 in the lower stator 3, like the upper stator 2, the plurality of first teeth 33 to 33 are provided on the surface facing the iron core constituting part 41, and the gap part 34 is provided. Along with this, it is formed at a predetermined pitch continuously in the X direction. Further, the plurality of first teeth 23 to 23 and 33 to 33 in the upper and lower stator core portions 21 and 31 are arranged at positions that are symmetric with respect to the movable element 4.

  A second tooth 41a formed by laminating steel plates, which are soft magnetic materials, is formed on the iron core constituting portion 41 so as to face the plurality of first teeth 23-23, 33-33, and a gap portion 41b is provided. It is formed at an equal pitch in the X direction while forming. Here, the pitch at which the second teeth 41a are provided is set to twice the pitch at which the first teeth 23 and 33 are provided. In the second teeth 41a, the upper portion 41a1 faces the first teeth 23 of the upper stator 2, and the lower portion 41a2 faces the first teeth 33 of the lower stator 3. However, in the present embodiment, as described above, the plurality of first teeth 23 to 23 in the upper stator 2 and the plurality of first teeth 33 to 33 in the lower stator 3 are sandwiched between the mover 4. Since the upper portion 41a1 and the lower portion 41a2 that are opposed to each other are provided in a symmetrical manner, the second teeth 41a that are integrally formed continuously in the vertical direction each have a simple rectangular cross section. It is formed as.

  The movable element 4 configured in this way is formed in an H-shaped flat plate shape as shown in FIG. 4 when viewed from the thickness direction (Z direction). The mover 4 includes an iron core constituting portion 41 and a frame body 42 having a rectangular opening 42c that supports the iron core constituting portion 41 in a state in which the mover 4 is housed.

  The iron core constituting portion 41 is configured such that the second teeth 41a to 41a arranged so as to extend in the Y direction are arranged in the X direction at a predetermined pitch with the gaps 41b to 41b interposed therebetween. A part of the frame body 42 sandwiched by the stator stators 2 and 3 (see FIG. 2) together with the iron core constituent part 41b is formed as the stator facing part 42a with the same thickness as the second teeth 41a to 41a. ing. Further, from the stator facing portion 42a and the iron core constituting portion 41, overhang portions 42b and 42b as part of the frame body 42 are provided on both sides in the direction (Y direction) orthogonal to the direction in which the mover 4 operates. It has been.

  These projecting portions 42b and 42b are formed with rectangular support portions 42b1 to 42b1 at both ends, and the support portions 42b1 to 42b1 are provided with screw holes 42b2 to 42b2. The support portions 42b1 to 42b1 are fixed to the upper portions of the linear bearings 7 to 7 (see FIG. 1) by screws (not shown) through which the screw holes 42b2 to 42b2 are inserted, and are supported so as to be operable in the X direction.

  FIG. 5 is a perspective view of the mover 4. As described above, the movable element 4 is composed of the frame body 42 having the rectangular opening 42c at the center and the second teeth 41a to 41a as the iron core constituting part 41 housed therein. The frame body 42 is made of a nonmagnetic material such as resin or aluminum, and holds the second teeth 41a to 41a as the iron core constituting portion 41 while holding them inside, and inside the holding portion 43 It is comprised by the fixing | fixed part 44 and 44 for fixing the iron core structure part 41 accommodated in this.

  The stator facing portion 42a described above is formed as a part of the frame body 42 so as to have the same thickness as the iron core constituting portion 41 and to extend in the Y direction before and after the iron core constituting portion 41 in the X direction. The second teeth 41a are arranged in a direction in which the longitudinal direction is the Y direction, and are arranged at a predetermined pitch with respect to the operation direction (X direction) of the mover 4 with the gap 41b interposed therebetween.

  The overhang portions 42b and 42b described above are a part of the frame 44 including the holding portion 43 and the fixing portions 44 and 44, and screw holes 42b2 to 42b2 are provided in the linear bearings 7 to 7 (see FIG. 1). By attaching via the holding part 43, the holding part 43 and the fixing parts 44, 44 are integrated. The projecting portions 42b and 42b are formed so that the thickness t2 thereof is larger than the thickness t1 of the stator facing portion 42a and extend along the moving direction of the mover 4. Therefore, the overhang portions 42b and 42b act as strength members that suppress the deflection of the movable element 4 in the direction around the Y axis.

  Such a mover 4 is assembled as shown in FIG.

  The holding portion 43 constituting a part of the frame body 42 of the movable element 4 has a rectangular opening portion 42c at the center as the opening portion 42c of the frame body. And the recessed part 43a-43a of a rectangular cross section is formed with the predetermined pitch in the position corresponding to the both ends of each 2nd tooth | gear 41a-41a.

  The 2nd teeth 41a-41a which comprise the iron core structure part 41 are each comprised independently, and it is formed so that it may become a rod-shaped form which has a rectangular cross section, respectively. The second teeth 41a to 41a have both ends corresponding to the recesses 43a to 43a, and each end is engaged with the recesses 43a to 43a so that they are arranged in parallel in the X direction at a predetermined pitch. It has come to be.

  In a state where the second teeth 41a to 41a are engaged with all the concave portions 43a to 43a, the fixing portions 44 and 44 are attached so as to press both ends of the second teeth 41a to 41a from above. The positions of the second teeth 41a to 41a are fixed. In this case, it is also preferable to use an adhesive in combination in order to fix the positions of the second teeth 41a to 41a.

  The second teeth 41a to 41a are respectively configured as shown in FIG. Specifically, each second tooth 41a is configured by laminating a plurality of electromagnetic steel plates 45 to 45 that are soft magnetic materials. Each steel plate is arranged in a direction parallel to the moving direction (X direction) of the mover 4 (see FIG. 1) and the opposing direction (Z direction) of the stator, thereby laminating such steel plates. It is integrated. In order to perform such integration, techniques such as caulking, adhesion, welding, and integral molding using resin as a binder can be used. In the case where the second teeth 41a to 41a are configured in such a form, the mass of each laminated steel sheet can be reduced, and therefore, the integration can be performed with a smaller fastening force than in the past.

  Furthermore, step portions 41a3 and 41a3 having shapes corresponding to the above-described recesses 43a to 43a (see FIG. 6) are formed at both ends of each second tooth 41a. In the method of forming the step portions 41a3 and 41a3, the method of forming the steel plates by stacking and integrating the steel plates and then cutting a part of the steps, and making the shape of the steel plates to be laminated different from each other at the end portions are laminated. Any method of forming the step portions 41a3 and 41a3 in the process can be used.

  In addition, it can replace with the 2nd tooth | gear 41a shown to Fig.7 (a), and can also use the 2nd tooth | gear 141a shown in FIG.7 (b). In this case, the second teeth 141a are arranged so that the plurality of steel plates 145 to 145 are parallel to the width direction (Y direction) of the mover 4 (see FIG. 1) and the opposing direction of the stator (Z direction). Steps 141a3 and 141a3 are formed at both ends, respectively. If it does in this way, the 2nd tooth | gear 141a of a desired shape can be easily formed only by laminating | stacking each steel plate 145-145 as a T-shaped identical shape.

  Moreover, even if it is the 2nd tooth | gear 41a, 141a of any form of Fig.7 (a) and FIG.7 (b), the direction which the steel plate to laminate | stack is parallel with the opposing direction (Z direction) of a stator In this way, it is common, and by doing this, it is possible to suppress the influence of eddy currents generated by the magnetic field generated in the direction of the opposite direction of the stator (Z direction), and to suppress the reduction in thrust efficiency Become.

  As described above, the iron core component 41 is configured such that the second teeth 41a to 41a (141a to 141a) are independent of each other, so that the bolt hole as shown in FIG. The intermediate portion 545 that is formed large to provide the 546 becomes unnecessary. Moreover, the thickness t1 of the iron core structure part 41 shown in FIG. 5 can also be reduced. Therefore, since the mover 4 can be reduced in weight, the acceleration of the mover 4 can be increased and the reaction can be accelerated even with the same power.

Further, when a magnetic circuit M is formed between the stator core portions 21 and 31 and the iron core constituting portion 41 in order to give a thrust to the mover 4, as schematically shown in FIG. 8, the second teeth 41a Therefore, the leakage magnetic flux M _L (see FIG. 21), which is inevitable in the prior art, can be extremely reduced, and the efficiency can be improved. Therefore, the magnetic flux density between the first teeth 23 and 33 in the stator core portions 21 and 31 and the second teeth 41a in the mover 41 can be increased to increase the thrust on the mover 4. Even with the same electric power, the acceleration of the mover 4 can be further increased to speed up the reaction.

  Furthermore, in this embodiment, as shown in FIG. 3, the stator core parts 21 and 31 and the first teeth 23 and 33 formed thereon are provided symmetrically with respect to the iron core constituting part 41, respectively. . For this reason, the magnetic force acting on the iron core component 41 is balanced between the iron core component 41 and the magnetic force acting on the iron core component 41 is only the thrust in the X direction. Therefore, the iron core constituting portion 41 can be further thinned, and the effect obtained by reducing the weight of the mover 4 can be further enhanced.

  Further, as shown in FIG. 5, since the second teeth 41 a to 41 a have independent configurations, the iron core component 41 is formed discontinuously with respect to the operation direction (X direction) of the mover 4. Therefore, it is not possible to prevent the deflection around the axis parallel to the width direction (Y direction) of the mover 4. However, since the projecting portions 42b and 42b of the frame body 42 that supports the iron core constituting portion 41 are thickened and formed so as to extend in the X direction, this acts as a strength member so that the movable element 4 Deformation can be suppressed.

  For this reason, the gap as a magnetic gap between the first teeth 23 to 23 and 33 to 33 formed on the stators 2 and 3 and the second teeth 41 a to 41 a formed on the mover 4 is appropriate. Therefore, it is possible to prevent the propulsive force of the mover 4 from being lowered due to the reduction in efficiency.

  As described above, the linear motor according to this embodiment includes a plurality of first teeth 23 to 23 and 33 to 33 and two stators 2 and 3 as primary magnetic flux generation members arranged to face each other. The secondary side magnetic flux generating member provided with a plurality of second teeth 41a to 41a facing the plurality of first teeth 23 to 23 and 33 to 33, and disposed between the two stators 2 and 3 A plurality of first teeth 23 to 23 and 33 to 33 as magnetic poles at positions where the two stators 2 and 3 face each other with the mover 4 interposed therebetween. The movable element 4 is provided with an opening 42c with respect to a direction in which the stator 2 and 3 face each other, and an iron core component 41 including the plurality of second teeth 41a to 41a. In a state where the iron core component 41 is housed in the opening 42c. It is obtained by configured with a frame 42 for lifting.

  Since it comprises in this way, the through-hole for fixing the core structure part 41 by making it support in the form accommodated in the opening part 42c of the frame 42 with the iron core structure part 41 provided with the 2nd teeth 41a-41a. Therefore, it is possible to reduce the leakage magnetic flux between the second teeth 41a to 41a and reduce the movable magnetic element 4 while reducing the thickness of the iron core component 41. The child 4 can be increased in speed.

  In addition, the frame body 42 has a stator facing part 42a sandwiched between the two stators 2 and 3 facing each other, and a direction orthogonal to the direction in which the movable element 4 operates from the stator facing part 42a. Overhanging portions 42b and 42b are provided, and the overhanging portions 42b and 42b are formed along the operation direction of the mover 4, and are formed to be thicker than the stator facing portion 42a. Therefore, it is possible to prevent the deflection around the axis parallel to the width direction of the mover 4 and appropriately maintain the gap between the first teeth 23 to 23 and 33 to 33 and the second teeth 41a to 41a. It is possible to suppress a decrease in the propulsive force of the mover 4 due to the deformation of the member.

  The plurality of second teeth 41a to 41a are formed by laminating a plurality of steel plates 45 to 45 independently of each other, and the frame body 42 is formed of the second teeth 41a. A plurality of pairs of recesses 43a to 43a formed at a predetermined pitch so as to form a pair at positions corresponding to both ends of .about.41a, the plurality of second teeth 41a to 41a being arranged at both ends thereof. Since it is configured to be engaged with the recesses 43a to 43a, the weight of the mover 4 can be further reduced, and the leakage magnetic flux generated between the second teeth 41a to 41a can be reduced. It is possible to improve the propulsive force of the mover 4 and realize higher speed.

Further, since the plurality of steel plates 45 to 45 forming the plurality of second teeth 41a to 41a are stacked in a direction parallel to the opposing direction of the stators 2 and 3, the vortex By preventing loss due to current, the efficiency can be improved, the propulsive force of the mover 4 can be further increased, and the speed can be increased.
Second Embodiment

FIG. 9 shows a linear motor according to the second embodiment of the present invention.
In the linear motor in this embodiment, the stators 202 and 203 are provided in such a form as to project to the side of the base 201 arranged so as to extend in the operation direction of the mover 204. The stators 202 and 203 are configured to face each other in the vertical direction (Z direction) in the figure, and a mover 204 is disposed so as to be sandwiched between them.

  Support members 201a and 201b are provided at both ends of the base 201, and columnar guide members 206 are provided so that both ends are connected by the support members 201a and 201b. . The movable element 204 is configured to be movable in the X direction while being supported by the guide member 206.

  The positional relationship and configuration of the stators 202 and 203 and the mover 204 are substantially the same as those in the first embodiment described above, and the operation principle is exactly the same.

  The second embodiment is greatly different from the first embodiment in the method of supporting the mover 204, and specifically has a configuration as shown in FIG.

  As in the case of the first embodiment, the mover 204 is mainly composed of a frame body 242 and an iron core component 241 incorporated therein, and the iron core component 241 is formed by independent second teeth 241a to 241a. It is configured. The frame body 242 is sandwiched from above and below in a state in which the plurality of second teeth 241a to 241a are held by the holding portion 243, and the holding portion 243 that holds the plurality of second teeth 241a to 241a as the iron core constituting portion 241. It is comprised from the fixing | fixed part 244,244 fixed by.

  The movable element 204 is supported by the above-described guide member 204 (see FIG. 9) via semicircular concave guide portions 244 a to 244 a provided in the fixed portions 244 and 244, and 3 of the holding portion 243. It is supported in the vertical direction (Z direction) inside the groove portion 201c provided in the base 201 via rectangular convex guide portions 243c to 243c provided in the places. The groove 201c and the guide member 206 (see FIG. 9) are provided so as to be parallel to each other, and the movable element 204 is operable in the X direction along these.

  The frame body 242 is formed in a thin plate shape together with the second teeth 241a to 241a as a stator facing portion 242a at a portion facing the stators 202 and 203 (see FIG. 9), and this stator facing portion 242a. On the other hand, a protruding portion 242 b that protrudes in the width direction of the mover 204 is formed by the fixing portion 244. Also in this case, as in the case of the first embodiment, the overhanging portion 242b is formed thicker than the stator facing portion 242a and extends in the width direction of the mover 204, thereby acting as a strength member. The deflection of the movable element 204 can be prevented.

  FIG. 11 shows a method for assembling the mover 204. As in the case of the first embodiment, the holding portion 243 constituting the mover 204 has groove portions 243a to 243a formed at a predetermined pitch, and the second teeth 241a to 241a formed in a shape corresponding to the groove portions 243a to 243a. Incorporate.

  Then, a pair of fixing portions 244 and 244 are screwed and provided so that one end portion of the second teeth 241a to 241a is sandwiched in the vertical direction together with the holding portion 243, so that the second portion with respect to the holding portion 243 is provided. The teeth 241a to 241a can be fixed. Also in this case, it is possible to increase the fixing force by using an adhesive together.

  As described above, the holding portions 244 and 244 are formed with semicircular concave guide portions 244a to 244a, respectively, and a cylindrical sliding bearing (not shown) is attached to the inside thereof, through which It can be attached to the guide member 206 as shown in FIG. Since the guide member 206 constitutes a sliding portion, it is preferable that the guide member 206 is made of a material having high thermal conductivity such as aluminum.

  FIG. 12 is a plan view of the mover 204 configured as described above. The holding portion 243 constituting the frame body 242 is provided with a rectangular opening 243d at the center, and the opening 243d constitutes an opening 242c as the frame 242. And in this opening part 242c, 2nd tooth | gear 241a-241a is arrange | positioned along with the moving direction of the needle | mover 204 by predetermined pitch, pinching | interposing the space | gap 241b-241b. The second teeth 241a to 241a are configured to be independent from each other, and are arranged so as to extend in the width direction (Y direction) of the mover 204.

  Each of the second teeth 241a to 241a has the same configuration as that of FIG. 7A, and a plurality of steel plates are laminated in a direction parallel to the X direction and the Z direction, and stepped portions are formed at both ends. (41a3) is provided. In addition, the direction of the laminated steel plates of the second teeth 241a to 241a may be parallel to the Y direction and the Z direction, similarly to FIG. 7B, and the loss due to the eddy current is similarly suppressed. Can do.

  FIG. 13A shows a side view of the mover 204. When the holding portion 243 is viewed in the width direction (Y direction), a convex guide portion 243c is provided at one end portion, and the end portion is sandwiched in the thickness direction (Z direction) at the other end portion. A fixing portion 244 having flange portions 244b and 244b formed so as to be inserted is provided.

  FIG. 13B is a cross-sectional view taken along the line AA in FIG. In this manner, the holding portion 243 is formed with an opening 242c (241b) as a space in a portion where the second teeth 241a to 241a are not present.

  FIG.13 (c) is a BB cross-sectional arrow view in FIG. Similarly to the first embodiment, the second teeth 241a to 241a are fitted in a form in which stepped portions 241a3 and 241a3 at both ends are engaged with rectangular grooves 243a and 243a formed in the holding portion 243. And one end part is fixed so that it may be pinched | interposed by the collar parts 244b and 244b formed in the fixing | fixed part 244,244 with the holding | maintenance part 243. FIG.

  Even in such a configuration, as in the case of the first embodiment described above, the weight of the mover 204 is reduced as compared with the conventional case, and the leakage flux inside is reduced to reduce the thrust of the mover 204. It is possible to improve the speed of the operation of the mover 204.

  In addition, since the second teeth 241a to 241a are constituted by laminated steel plates, and the steel plates are laminated so as to be parallel to the facing direction (Z direction) of the stators 202 and 203, It is also possible to further increase efficiency by reducing losses due to eddy currents.

As described above, the linear motor according to the second embodiment can also obtain the same effects as the linear motor according to the first embodiment.
<Third Embodiment>

  The linear motor according to the third embodiment of the present invention is obtained by changing the mover 204 according to the second embodiment shown in FIG. More specifically, the shapes of the holding portion 243 and the iron core constituting portion 241 shown in FIG. 10 are changed. Therefore, the description of the same parts as those in the above embodiment is omitted.

  As shown in FIG. 14, the mover 304 used in the linear motor according to the third embodiment includes an iron core constituent part 341 and a frame body 342, and the frame body 342 includes the holding part 343 and 2 shown in FIG. 10. It is comprised from the one support part 244,244.

  The iron core constituting portion 341 shown in FIG. 14 is formed in a box shape, and a rectangular opening portion 343 d corresponding to the iron core constituting portion 341 is provided in the holding portion 343. The opening 343 d of the holding portion 343 constitutes an opening 342 c as the frame body 342.

  As shown in FIG. 15, the iron core constituting portion 341 is formed with a plurality of second teeth 341 a to 341 a extending in the width direction (Y direction), and both end surfaces of the second teeth 341 a to 341 a. Are connected by side plates 341c and 341c to form a box shape. The plurality of second teeth 341a to 341a are formed by stacking steel plates in the same direction as in FIG. 7A or FIG. 7B, respectively.

  As shown in FIG. 15, the side plates 341c and 341c allow the second teeth 341a to 341a to be connected to each other in a state where they are aligned at a predetermined pitch, and can be handled in an integrated state as the iron core component 341. .

  In order to connect the side plates 341c and 341c and the plurality of second teeth 341a to 341a, an engaging portion is formed on both the side plate 341c and the second teeth 341a and engaged. Alternatively, a fixing method such as welding or adhesion may be used. Further, in the case where the plurality of second teeth 341a to 341a are formed by laminating steel plates oriented in parallel to the X direction and the Z direction as shown in FIG. The side plate 341c can also be fixed simultaneously with the second teeth 341a to 341a.

  As described above, the iron core constituting portion 341 configured in a rectangular box shape is fitted into the rectangular opening 342c of the frame body 342 as shown in FIG. In such a state, the iron core constituting portion 341 can be fixed to the frame body 342 by attaching the fixing portion 244 (see FIG. 10). At this time, it is possible to further increase the fixing force by using an adhesive.

  Even in this case, the operation can be performed in the same manner as in the first embodiment and the second embodiment, and the second teeth 341a to 341a are not connected at the center. In addition, the weight of the movable element 304 can be reduced, and the leakage magnetic flux can be reduced. For this reason, it is possible to increase the speed of the mover 304.

  Further, as described above, since the second teeth 341a to 341a are connected at a predetermined pitch by the side plate 341c, the second teeth 341a to 341a are arranged at a predetermined pitch on the frame body 342 side. The groove portions 243a (see FIG. 11) for holding them individually are unnecessary, and the frame body 342 can be configured more easily.

  As described above, in the linear motor according to the present embodiment, the core component 341 is connected to the plurality of second teeth 341a to 341a and both ends of the plurality of second teeth 341a to 341a, respectively. It has a pair of side plates 341c and 341c that support a plurality of second teeth 341a to 341a arranged in parallel at a predetermined pitch.

Since it comprises in this way, since the several 2nd teeth 341a-341a can be formed in the state arrange | positioned by predetermined pitch only by the iron core structure part 341, the complicated process with respect to the frame 342 becomes unnecessary. This makes it easier to manufacture the movable element 304.
<Fourth embodiment>

  The linear motor according to the fourth embodiment of the present invention has the same basic configuration as that of the third embodiment, and the iron core component 341 in the third embodiment shown in FIGS. 14 and 15 is shown in FIG. It is changed like an iron core component 441. Therefore, the description of the same parts as those in the above embodiment is omitted.

  The iron core constituting portion 441 constitutes the mover 404 by adopting a form housed in the frame 342 (see FIG. 14) shown in the third embodiment.

  In this iron core constituting portion 441, second teeth 441a to 441a configured in a rectangular parallelepiped shape are arranged so as to be parallel to each other, and these are connected by connecting portions 441b to 441b formed in a thin plate shape. . With this configuration, the second teeth 441a to 441a can be formed in a state where a predetermined pitch is maintained.

  The iron core constituting portion 441 having such a shape is configured by laminating a plurality of steel plates, and each steel plate is disposed in a direction parallel to the X direction and the Z direction. The steel plates to be laminated have shapes as shown in FIG. 17, respectively, and rectangular tooth constituent portions 441a1 to 441a1 corresponding to the second teeth 441a to 441a (see FIG. 16) and these tooth constituent portions 441a1 to 441a1. It has the form which has the connection belt | band | zone part 441b1-441b1 corresponding to the connection part 441b-441b (refer FIG. 16) which connects 441a1 continuously in the center part vicinity. A plurality of such steel plates 445 having the same shape are manufactured by punching or the like, and the iron core constituting portion 441 can be easily configured simply by stacking them.

  By configuring in this manner, the iron core component 441 can be configured by integrating the second teeth 441a to 441a into a shape connected at a predetermined pitch as shown in FIG. The frame body 342 for attaching can be easily manufactured as a simple shape.

  Further, since the connecting portions 441b to 441b are merely for connecting the second teeth 441a to 441a while maintaining a predetermined pitch, the connecting portions 441b to 441b can be formed thin, and the leakage magnetic flux caused by this portion can be kept small. Is possible.

  As described above, the linear motor according to the present embodiment has a plurality of steel plates in such an orientation that the iron core constituting portion 441 is parallel to the moving direction of the mover 404 and the opposing direction of the stators 202 and 203. Each of the plurality of steel plates is formed by laminating a plurality of tooth constituent parts 441a1 to 441a1 constituting the plurality of second teeth 441a to 441a, and each of the plurality of tooth constituent parts 441a1 to 441a1. It is characterized by comprising connecting band portions 441b1 to 441b1 connected continuously in the vicinity of the central portion.

  Since it comprises in this way, the complicated process with respect to the frame 342 becomes unnecessary, and since the iron core structure part 441 can be manufactured only by laminating | stacking a steel plate, the needle | mover 404 is made easier. It can be made.

  The specific configuration of each unit is not limited to the above-described embodiment.

  For example, in the above-described embodiment, the stators 2 and 3 (202, 203) are arranged in the vertical direction, but these are arranged so as to face each other and the stators 2 and 3 (202, 203) to the movable element 4 ( 204, 304, 404) as long as thrust can be applied, the arrangement direction is not limited, and each of them can be configured to be laterally or obliquely arranged.

  Other configurations can be variously modified without departing from the spirit of the present invention.

1 ... Base 2 ... Stator (upper side)
3 ... Stator (lower side)
DESCRIPTION OF SYMBOLS 4 ... Movable element 5 ... Upper stator support part 6 ... Linear guide rail 7 ... Linear bearing 21 ... Stator core part (upper side)
22 ... Coil (upper side)
23 ... 1st tooth (upper side)
31 ... Stator core (lower side)
32 ... Coil (lower side)
33 ... 1st tooth (lower side)
41 ... Iron core constituent part 41a ... Second tooth 42 ... Frame body 42a ... Stator facing part 42b ... Overhang part 42c ... Opening part 43 ... Holding part 44 ... Fixed part

Claims (6)

Two stators as primary-side magnetic flux generating members provided with a plurality of first teeth and facing each other;
In a linear motor comprising a plurality of second teeth facing the plurality of first teeth and a mover as a secondary magnetic flux generating member disposed between the two stators,
The two stators are provided with a plurality of first teeth as magnetic poles at positions facing each other with the mover interposed therebetween,
The mover is
An iron core component comprising the plurality of second teeth;
A linear motor comprising an opening provided in a direction in which the stator faces and a frame that supports the iron core component in a state in which the opening is accommodated. A stator facing portion in which the frame body is sandwiched between the two facing stators;
A projecting portion projecting from the stator facing portion in a direction perpendicular to the direction in which the mover operates;
2. The linear motor according to claim 1, wherein the projecting portion is formed along an operation direction of the mover and is thicker than the stator facing portion. The plurality of second teeth are
Each is formed independently and by laminating a plurality of steel plates,
The frame is
A plurality of recesses formed in pairs at positions corresponding to both ends of the second tooth are formed at a predetermined pitch;
3. The linear motor according to claim 1, wherein the plurality of first teeth are provided so that both end portions thereof are engaged with the concave portion. 4.   The linear motor according to claim 3, wherein a plurality of steel plates forming the plurality of second teeth are stacked in a direction parallel to a facing direction of the stator. The iron core component is
A plurality of second teeth;
2. A pair of side plates that are respectively connected to both ends of the plurality of second teeth and support the plurality of second teeth arranged in parallel at a predetermined pitch. Or the linear motor of 2. The iron core component is
It is formed by laminating a plurality of steel plates in a direction parallel to the moving direction of the mover and the opposing direction of the stator,
Each of the plurality of steel plates includes a plurality of tooth constituent portions constituting the plurality of second teeth;
The linear motor according to claim 1, wherein the linear motor is configured to include a connecting band portion that continuously connects each of the plurality of tooth constituent portions in the vicinity of the center portion.

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