JPH04340352A - Manufacture of movable element of thin film magnet motor - Google Patents

Abstract

PURPOSE:To eliminate the deterioration of a magnetic performance caused by a manufacturing process by a method wherein thin film magnets are applied to the side surfaces of magnetic pole parts by sputtering to manufacture a movable element. CONSTITUTION:Belt-shaped units 1 of which magnetic poles are composed are made from ferromagnetic material such as iron by a method such as machining or sputtering which facilitates a high accuracy. After the belt-shaped unit 1 and a target 3 which is the raw material of a thin film magnet 2 are placed in a vacuum chamber V, the thin film magnets 2 having uniform thicknesses are formed on both the surfaces of the belt-shaped unit 1 by a sputtering method. The belt-shaped units 1 are laminated and fixed by bonding, etc., and the thin film magnets 2 are magnetized to form a linear movable element 5 composed of the thin film magnets 2 and the magnetic belt-shaped units 1 which are alternately arranged on a base 4. As it is not necessary to process the junction surfaces between the magnetic pole parts and the thin film magnets 2, the deterioration of a magnetic performance caused by a manufacturing process can be avoided.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a motor equipped with a mover made of a thin film magnet used in microactuators and the like.

0002

[Prior Art] Conventionally, in a linear motor or a rotary motor, a permanent magnet is provided in a movable element which is opposed to the magnetic poles of a stator with an air gap interposed therebetween, and the permanent magnets have different polarities alternately in the direction of movement. However, a method was used in which iron cores and bulk magnets were alternately laminated and bonded (for example, in the U.S.
．． Patent 4703297).

0003

[Problems to be Solved by the Invention] However, when cutting or grinding the joint surface of a bulk magnet with the iron core, the magnet performance deteriorates in the tens of microns from the surface, and if the surface is thin on the order of tens of microns, , the influence ratio became so large that it could not be used in practice. Furthermore, with conventional methods, it is difficult to manufacture magnets with complex curved shapes such as spherical or cylindrical surfaces. SUMMARY OF THE INVENTION An object of the present invention is to provide a high-performance magnet motor using a method for manufacturing a mover for a thin film magnet motor that does not cause pitch errors and can be shaped freely.

0004

[Means for Solving the Problems] The present invention provides a method for manufacturing a mover for a thin film magnet motor in which magnetic pole parts made of a magnetic material and permanent magnets are alternately arranged, in which thin film magnets are formed between the magnetic pole parts by a sputtering method. This is a method of attaching. In particular, the magnetic pole portion is composed of a strip-shaped body made of a ferromagnetic material,
In this method, thin film magnets are attached to both sides of a plurality of strip-shaped bodies by sputtering, and the strip-shaped bodies are stacked to form a mover. Further, a plurality of grooves are provided on one surface of a flat magnetic material, magnetic pole parts are formed between adjacent grooves by connecting parts, and a thin film magnet is attached to the inner surface of the groove by sputtering. In this method, a movable element of a thin film magnet motor is formed by burying the inside of the groove, removing the thin film magnet attached to the tip of the magnetic pole part of the magnetic material, and removing the connecting part on the other surface of the magnetic material.

[0005]

[Operation] Multiple grooves are formed in the magnetic material, and thin film magnets are attached to the grooves by sputtering to fill the grooves, so the thin film magnets are bonded to the sides of the magnetic poles formed between adjacent grooves without any gaps. However, there is no need to mechanically process the joint surface between the magnetic pole part and the thin film magnet, and deterioration of magnet performance during processing does not occur.

[0006]

[Embodiment] The present invention will be described with reference to an embodiment shown in the drawings. First, as shown in FIG. 2, a plurality of strips 1 constituting the magnetic poles are manufactured from a ferromagnetic material such as iron by a method that is easy to achieve precision, such as machining or etching, and the strips 1 are placed in a vacuum chamber V. After charging the target 3 which is the raw material for the body 1 and the thin film magnet 2, the thin film magnet 2 having a uniform thickness is formed on both sides of the strip body 1 by sputtering. By stacking the strips 1 and fixing them with adhesive or the like, and magnetizing the thin film magnets 2, the thin film magnets 2 and the magnetic strips 1 are placed alternately on the base 4, as shown in FIG. Linear type mover 5 placed in
can be formed. When magnetizing the thin film magnets 2, for example, as shown in FIG. Then, the parts of the strip 1 to which the thin film magnets 2 are not attached are alternately protruded and stretched to the opposite side. On the other hand, a magnetizing jig 6 in which a magnetizing winding 62 is provided on a frame-shaped yoke part 61 is prepared, and every other protruding strip 1 of the mover 5 is brought into contact with the same polarity side of the yoke part 61. , by passing a current through the magnetizing winding 62, the strip body 1 is removed from the yoke portion 1.
A magnetic closed circuit is formed by entering the thin film magnet 2, passing through the adjacent strip 1, and returning to the yoke portion 61. Therefore, the magnetic flux φ shown by the dashed line is generated, and the mutually opposing surfaces of the adjacent thin film magnets 2 are magnetized with the same polarity. Thereafter, the mover 5 is formed by cutting along the broken lines aa' and bb'. When configuring the rotor of a rotary motor, both sides of the strip 1 are processed so that they become tapered surfaces with a predetermined center angle, and thin film magnets 2 are coated on both sides of the strip 1 using the sputtering method described above. A ring-shaped rotor is formed by laminating a plurality of strips 1 in the outer circumferential direction of a cylindrical mandrel and fixing the strips 1 by binding. In addition, when the thickness of the thin film magnet 2 is given a slope and the strips 1 are stacked in a ring shape,
Sputtering is performed by making the strip-shaped body face the target 3 at an angle. Therefore, since the thin film magnet 2 is not processed in the thickness direction, deterioration of the magnet material does not occur.

Furthermore, when stacking iron cores with magnets attached to both sides, if the dimensional and surface accuracy of each magnet and iron core is not made good, pitch errors may occur or gaps may form between the layers. This may result in poor magnet performance, but the following method may be taken as a remedy for this problem. In this case, first, as shown in the perspective view of FIG. 4(a), a plurality of grooves 71 are formed at equal pitches by machining or etching a flat plate-shaped magnetic body 7 made of a ferromagnetic material. By processing, a plurality of magnetic pole parts 72 are formed in a comb shape between adjacent grooves, and are connected by a connecting part 73. next,
As shown in FIG. 4(b), a thin film made of a magnetic material is formed by sputtering on the inner surface of the groove 71, that is, on the side surface of the magnetic pole part 72 and the tip of the magnetic pole part 72.
Fill the inside with thin film magnet 2. Next, as shown in FIG. 4(c), remove the excess thin film magnet 2 on the upper surface of the magnetic body 7
2, along with a portion of the tip thereof, are removed by cutting, grinding, or the like up to the point indicated by the broken line c-c'. The connecting portion 73 on the lower surface of the magnetic body 7 is similarly removed along with a portion of the thin film magnet 2 up to the point indicated by the broken line dd'. In this way, as shown in FIG. 4(d), the thin film magnets 2 are joined to the side surfaces of the magnetic pole portions 72, and the magnetic pole portions 72 and the thin film magnets 2 are arranged alternately. Here, a plurality of magnetic pole parts 7 are formed between a plurality of thin film magnets 2 by magnetizing the opposing end surfaces of adjacent thin film magnets 2 to have the same polarity.
2, different poles are formed alternately in the moving direction, and a plate-shaped movable element 5 is formed. Note that the method for magnetizing the thin film magnet in this case will be omitted because the protruding portion of the movable element 5 shown in FIG. 3 may be provided on the magnetizing jig side.

When forming the mover 5 in a cylindrical shape, first, as shown in FIG. A comb-shaped magnetic pole portion 72 is formed between adjacent grooves, and a connecting portion 73 is formed on the inner periphery. Next, as in the case of the plate-shaped mover, a thin film made of magnetic material is formed by sputtering on the side surface and tip of the magnetic pole part 72, and the groove 71
Fill the inside with thin film magnet 2. Next, as shown in FIG. 5B, the excess thin film magnet 2 on the outer peripheral surface of the magnetic body 7 is removed together with a portion of the tip of the magnetic pole part 72 by cutting or grinding. The connecting portion 73 on the inner circumferential surface of the magnetic body 7 is similarly removed along with a portion of the thin film magnet 2. In this way, the ring-shaped thin film magnets 2 and the magnetic pole parts 72 are arranged alternately in the axial direction. As shown in FIG. 6, the method of magnetizing the thin film magnet is to sandwich the outer periphery of the ring-shaped magnetic pole part 72 at a symmetrical position with respect to the central axis and to alternately contact adjacent magnetic pole parts 72. A protrusion 63 is provided on the yoke part 61 of the magnetic jig 6, and the protrusion 63 of the same polarity is magnetized so as to contact every other magnetic pole part. Alternatively, the magnetic body 7 may be made into a hollow body with an arbitrary cross section in advance, or after the thin film magnet 2 is attached to the cylindrical magnetic body 7, the outer diameter and inner diameter may be adjusted as shown in FIG. 5(c). By processing it into an arbitrary shape, the cross section of the mover can be made into a complicated cross section other than circular.

Next, in the case of a rotor of a rotary motor, as shown in FIG. 7(a), a plurality of grooves 71 are provided radially around the outer periphery of a ring-shaped magnetic body 7, and a plurality of grooves 71 are provided between adjacent grooves. Magnetic pole part 7
2, and a connecting portion 73 is formed on the inner peripheral surface. and,
A thin film made of a magnetic material is formed by sputtering on the side surface and the tip of the magnetic pole part 72, and the inside of the groove 71 is filled with the thin film magnet 2. Next, the excess thin film magnet 2 on the outer circumferential surface of the magnetic body 7 is removed together with a portion of the tip of the magnetic pole portion 72 to a point indicated by a broken line E by means such as cutting or grinding. The connecting portion 73 on the inner circumferential surface of the magnetic body 4 is similarly removed along with a portion of the thin film magnet 2 up to the point indicated by the broken line F. In this way, as shown in FIG. 7(b), the ring-shaped thin film magnets 2 and the magnetic bodies 7 are arranged alternately in the rotation direction. Here, the method of magnetizing the thin plate magnet is as shown in FIG.
A magnetizing jig 6 having a protrusion 63 that contacts the magnet 2 is prepared. By using such a magnetizing jig 6, adjacent thin film magnets 2
By magnetizing the opposing sides of the magnets so that they have the same polarity, the plurality of magnetic pole parts 72 formed between the plurality of thin film magnets 2 have different polarities alternately formed in the circumferential direction, and the inner circumference is A rotor 8 of a rotary motor is formed by being fixed to a support portion 81 made of a non-magnetic material. Note that if the ends of the magnetic pole parts 72 are made to protrude alternately in the axial direction, the protrusions 6 can be attached to the magnetizing jig 6.
There is no need to provide 3.

0010

As described above, according to the present invention, since the thin film magnet is bonded to the side surface of the magnetic pole portion by sputtering, there is no deterioration in magnet performance due to processing. Furthermore, a highly accurate thin-film magnet type motor can be provided without creating a gap, which is a problem when laminating magnetic bodies and magnets. Furthermore, the cross section of the mover can be made into any shape, and the assembly work is simple, which has the effect of reducing the number of processing steps and making mass production possible.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention.

FIG. 2 is an explanatory diagram showing a processing state of the present invention.

FIG. 3 is an explanatory diagram showing a method of magnetizing a thin film magnet of the present invention.

FIG. 4 is an explanatory diagram showing a processing state of another embodiment of the present invention.

FIG. 5 is an explanatory diagram showing another embodiment of the present invention.

FIG. 6 is an explanatory diagram showing another method of magnetizing a thin film magnet according to the present invention.

FIG. 7 is an explanatory diagram showing another embodiment of the rotor of the present invention.

FIG. 8 is an explanatory diagram showing a method of magnetizing a thin film magnet of a rotor according to the present invention.

[Explanation of symbols]

1 Band-shaped body
2 thin film magnet 3 target
4 Base 5
mover
6 Magnetizing jig 61 Yoke part
62 Magnetized winding 63 Protrusion
7 Magnetic material 71 Groove
72
Magnetic pole part 73 connection part
8 Rotor 81 Support part

Claims (8)

[Claims] 1. A method for manufacturing a mover for a thin film magnet motor in which magnetic pole parts made of a magnetic material and permanent magnets are arranged alternately at equal intervals, including the step of attaching thin film magnets between the magnetic pole parts by a sputtering method. A method for manufacturing a mover for a thin film magnet motor. 2. The magnetic pole portion is formed of a strip made of a ferromagnetic material, thin film magnets are attached to both surfaces of a plurality of strips by sputtering, and the strips are stacked to form a mover. Method for manufacturing a mover for a thin film magnet motor according to item 1 3. A plurality of grooves are provided on one surface of a flat magnetic body, and a magnetic pole portion is formed between adjacent grooves connected by a connecting portion formed on the other surface of the magnetic body, 2. The thin film according to claim 1, wherein a thin film magnet is attached to the inner surface of the groove by a sputtering method to fill the inside of the groove, and the thin film magnet attached to the tip of the magnetic pole part is removed and the connecting part is removed to form the movable element. A method for manufacturing a mover for a magnet motor. 4. The method of manufacturing a mover for a thin film magnet motor according to claim 3, wherein the thin film magnet attached to the tip of the magnetic pole part of the magnetic body and the connecting part are removed together with a part of the magnetic pole part. 5. The method of manufacturing a mover for a thin film magnet motor according to claim 1, wherein the magnetic pole portions are arranged in a ring shape. 6. A magnetizing jig, which forms a magnetic closed circuit consisting of yoke portions that contact mutually opposite end portions in the longitudinal direction of the adjacent magnetic pole portions, and includes a magnetizing winding provided in the magnetic closed circuit. 6. The method of manufacturing a mover for a thin film magnet motor according to claim 1, wherein the mutually opposing surfaces of the adjacent thin film magnets are magnetized to have the same polarity. 7. The method of manufacturing a mover for a thin film magnet motor according to claim 6, wherein both ends of the adjacent magnetic poles are alternately projected to opposite sides and brought into contact with the yoke portion. 8. The method of manufacturing a mover for a thin-film magnet motor according to claim 6, wherein the yoke portion is provided with a protrusion, and the protrusion portion is brought into contact with end portions on opposite sides in the longitudinal direction of the adjacent magnetic pole portions.