JP2012198048A - 角度センサの検出信号補正方法 - Google Patents
角度センサの検出信号補正方法 Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
- G01B7/31—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
- G01D18/001—Calibrating encoders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/18—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying effective impedance of discharge tubes or semiconductor devices
- G01D5/183—Sensing rotation or linear movement using strain, force or pressure sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
- G01D5/2013—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by a movable ferromagnetic element, e.g. a core
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Measuring Magnetic Variables (AREA)
Abstract
【解決手段】ホール素子から成る角度検出用センサ15は磁束密度検出面であるチップ面Tが、磁束方向と平行になる場合をθ=0となるように配置されている。センサ15の出力Vには、定電流Iを供給することで、角度変位θと無関係で内部抵抗に起因するオフセット電圧値O1が発生し、出力Vに重畳している。
オフセット電圧値O1を得るためには、オフラインにおいてセンサ15に無磁界状態で定電流Iを供給しながら温度Δtを変化させて、出力Vのデータを求める。データから温度Δtに対するオフセット電圧値O1のテーブルを作成する。
角度測定中では、周囲温度を測定し、オフセット電圧値O1を記憶したテーブルから求め出力Vから差し引けば、オフセット電圧値O1が除去される。
【選択図】図3
Description
V=(K/d)B・I …(1)
V=(K/d)・B・I・sinθ …(2)
V=(K/d)・B・I・θ …(2)'
Vs=(Ks/ds)・B・I …(3)
V/Vs=(K/d)・θ/(Ks/ds) …(4)
V=(K/d)・B・I・θ+O1 …(5)
O1=I・R・(1+α・Δt) …(6)
Vs=(Ks/ds)・B・I+O1s …(7)
すると、第1のオフセット電圧値O1sは次の(8)式のように表せる。
O1s=I・Rr・(1+αs・Δt) …(8)
V/Vs=(K/d)・θ/(Ks/ds) …(9)
V=(K/d)・B・I・θ+O1+β・Δt+D …(10)
O2=O1+β・Δt+D=I・R・(1+α・Δt)+β・Δt+D
=γ・Δt+F …(11)
12 貫通孔
13 軸
14 ベアリング
15 角度検出用センサ
16、16’マグネット
17 基準用センサ
18 温度検出用センサ
19 信号処理部
Claims (5)
- 磁束を一様に発生する磁界発生機構に対し相対的に回転可能とした軸に取り付け、前記磁界発生機構の磁界方向に対する相対角度を検出するホール素子から成る角度検出用センサを備え、測定角度が0°の零位角度において前記角度検出用センサの磁束密度検出面であるチップ面を前記磁界発生機構からの磁束の方向と平行に配置する角度検出用センサの検出信号補正方法において、
オフラインにおいて、無磁界状態で定電流を前記角度検出用センサに供給して、前記角度検出用センサの複数の周囲温度による内部抵抗に起因する第1のオフセット電圧値をそれぞれ測定し、前記第1のオフセット電圧値の温度特性を求める第1のステップと、
オンラインでの角度測定中に、温度検出用センサによる周囲温度の測定を行い、前記角度検出用センサの出力から前記温度特性に該当する前記第1のオフセット電圧値を除去する補正を行う第2のステップとを有することを特徴とする角度センサの検出信号補正方法。 - 磁束を一様に発生する磁界発生機構に対し相対的に回転可能とした軸に取り付け、前記磁界発生機構の磁界方向に対する相対角度を検出するホール素子から成る角度検出用センサを備え、測定角度が0°の零位角度において前記角度検出用センサの磁束密度検出面であるチップ面を前記磁界発生機構からの磁束の方向と平行に配置する角度検出用センサの検出信号補正方法において、
オフラインにおいて、前記角度検出用センサを磁界方向と前記角度検出用センサのチップ面が並行になるように前記零位角度に固定し、所定の磁束を発生させた有磁界状態で、定電流を前記角度検出用センサに供給して、前記角度検出用センサの複数の周囲温度による内部抵抗に起因する第1のオフセット電圧値に前記角度検出用センサのカット面によるローレンツ力に起因する起電力を加えた第2のオフセット電圧値をそれぞれ測定し、前記第2のオフセット電圧値の温度特性を求める第1のステップと、
オンラインでの角度測定中に、温度検出用センサによる周囲温度の測定を行い、前記角度検出用センサの出力から前記温度特性に該当する前記第2のオフセット電圧値を除去する補正を行う第2のステップとを有することを特徴とする角度センサの検出信号補正方法。 - 前記相対角度は、補正した前記角度検出用センサの出力を、前記磁界発生機構の固定し磁束密度検出面であるチップ面を前記磁束の方向と直交するように配置した基準用センサの出力で除することにより算出することを特徴とする請求項1又は2に記載の角度センサの検出信号補正方法。
- オフラインにおいて、無磁界状態で定電流を前記基準用センサに供給して、前記基準用センサの複数の周囲温度による内部抵抗に起因する基準用センサのオフセット電圧値をそれぞれ測定し、前記基準用センサのオフセット電圧値の温度特性を求め、
オンラインでの角度測定中に、前記温度検出用センサによる周囲温度の測定を行い、前記基準用センサの出力から前記温度特性に該当する前記基準用センサのオフセット電圧値を除去する補正を行うことを特徴とする請求項1〜3の何れか1つの請求項に記載の角度センサの検出信号補正方法。 - 前記軸は液面計のフロートに連結したことを特徴とする請求項1〜4の何れか1つの請求項に記載の角度センサの検出信号補正方法。
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JP2011060879A JP5343101B2 (ja) | 2011-03-18 | 2011-03-18 | 角度センサの検出信号補正方法 |
KR1020110043655A KR101440181B1 (ko) | 2011-03-18 | 2011-05-09 | 각도 센서의 검출 신호 보정 방법 |
CN201110177463.1A CN102679862B (zh) | 2011-03-18 | 2011-06-29 | 角度传感器的检测信号校正方法 |
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WO2014141767A1 (ja) * | 2013-03-15 | 2014-09-18 | 村田機械株式会社 | 磁気式の位置センサ及び位置検出方法 |
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US10823764B2 (en) * | 2017-09-01 | 2020-11-03 | Te Connectivity Corporation | Hall effect current sensor |
US10564192B2 (en) * | 2017-10-12 | 2020-02-18 | Itx-M2M Co., Ltd. | Hall sensor apparatus with temperature measurement function and current sensor apparatus with the same function |
JP6965815B2 (ja) * | 2018-04-12 | 2021-11-10 | 愛知製鋼株式会社 | マーカ検出システム、及びマーカ検出システムの運用方法 |
JP2020153813A (ja) * | 2019-03-20 | 2020-09-24 | 日本電産コパル電子株式会社 | 非接触角度センサ |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS6295402A (ja) * | 1985-10-21 | 1987-05-01 | Tokyo Keiso Kk | 回転角度検出器 |
JPH03261869A (ja) * | 1990-03-13 | 1991-11-21 | Omron Corp | ホール素子の出力信号補正装置 |
JP2005351849A (ja) * | 2004-06-14 | 2005-12-22 | Denso Corp | 回転角度検出装置および回転角度検出方法 |
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JP4291936B2 (ja) * | 2000-07-12 | 2009-07-08 | カヤバ工業株式会社 | 回転角度センサ |
JP2003021503A (ja) | 2001-07-06 | 2003-01-24 | Yamatake Corp | 角度センサの温度補償装置およびトルクチューブ式計測計 |
JP4044880B2 (ja) * | 2003-08-05 | 2008-02-06 | 株式会社日立製作所 | 非接触式角度測定装置 |
JP4797609B2 (ja) * | 2005-12-06 | 2011-10-19 | 株式会社デンソー | 回転角度検出装置の温度特性補正方法および回転角度検出装置 |
CN201311272Y (zh) * | 2008-12-15 | 2009-09-16 | 银川英奥特自控有限公司 | 无接触式高精度角度传感器 |
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- 2011-03-18 JP JP2011060879A patent/JP5343101B2/ja active Active
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- 2011-06-29 CN CN201110177463.1A patent/CN102679862B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6295402A (ja) * | 1985-10-21 | 1987-05-01 | Tokyo Keiso Kk | 回転角度検出器 |
JPH03261869A (ja) * | 1990-03-13 | 1991-11-21 | Omron Corp | ホール素子の出力信号補正装置 |
JP2005351849A (ja) * | 2004-06-14 | 2005-12-22 | Denso Corp | 回転角度検出装置および回転角度検出方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014141767A1 (ja) * | 2013-03-15 | 2014-09-18 | 村田機械株式会社 | 磁気式の位置センサ及び位置検出方法 |
JP2014178283A (ja) * | 2013-03-15 | 2014-09-25 | Murata Mach Ltd | 磁気式の位置センサ |
US9995597B2 (en) | 2013-03-15 | 2018-06-12 | Murata Machinery, Ltd. | Magnetic position sensor and position detecting method |
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KR101440181B1 (ko) | 2014-09-12 |
KR20120106506A (ko) | 2012-09-26 |
CN102679862A (zh) | 2012-09-19 |
JP5343101B2 (ja) | 2013-11-13 |
CN102679862B (zh) | 2016-06-29 |
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