JP2012178511A - Cutting apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manual-type cutting apparatus with high workability.SOLUTION: A cutting apparatus comprises a chuck table which holds an object to be worked, a cutting means having a cutting blade for cutting the object to be worked held by the chuck table, and a chuck table moving means which moves and positions the chuck table into a cutting area where the object to be worked is cut by the cutting blade and an attaching/detaching area where the object to be worked is attached to and detached from the chuck table. The cutting apparatus further comprises a partition plate for partitioning into the cutting area and the attaching/detaching area, and a partition plate moving means which moves the partition plate between an open position where the partition plate and the object to be worked are not brought into contact with each other while the object to be worked is cut by the cutting blade, and a block position where the cutting area and the attaching/detaching area are blocked when the chuck table is set at the attaching/detaching position.

Description

  The present invention relates to a manual cutting device (manual dicer) in which an operator conveys a workpiece such as a wafer.

  A general cutting apparatus used for cutting a semiconductor wafer includes a chuck table for holding a wafer, a cutting means for rotatably supporting a cutting blade for cutting the wafer held on the chuck table, and the chuck table. Equipped with a processing feed means for processing and feeding to the blade, and an automatic transport device for transporting the wafer housed in the cassette to the chuck table and automatically transporting the wafer after cutting from the chuck table to the cassette. Thus, the wafer can be efficiently divided into individual devices.

  There is a manual cutting device (manual dicer) used for cutting a special workpiece or a small-lot workpiece with respect to the cutting device provided with such an automatic conveyance device. In the manual dicer, the operator conveys the workpiece and attaches / detaches the workpiece to / from the chuck table.

  In the manual dicer as well as the dicer having the automatic conveyance device, the chuck table is moved between the attachment / detachment position of the workpiece and the processing position by the processing feeding means. In manual dicers where the operator places the workpiece on the chuck table, a partition is provided between the workpiece attachment / detachment position and the machining position so that the operator does not accidentally touch the cutting blade or blade cover. is there.

  For example, when cutting a thick workpiece of 10 mm or more, it is necessary to provide a sufficient opening under the partition so that the workpiece does not contact the partition. There is a risk of contact with the cutting blade.

  Therefore, conventionally, when an opening having a height of, for example, 10 mm or more is provided under the partition, the door attached to the outer cover for accessing the chuck table is not until the rotation of the cutting blade is completely stopped. It was controlled not to open.

JP 2006-13312 A

  Since the cutting blade during cutting is rotating at a high speed such as 30000 rpm, it rotates for a while after issuing a rotation stop command, and it takes a long time to stop rotating completely.

  In conventional manual dicers where the door for accessing the chuck table cannot be opened until after the rotation of the cutting blade is completely stopped, the workpiece is placed on the chuck table until the cutting blade is completely stopped. On the other hand, since it cannot be detached, there is a problem that workability is very poor.

  In the conventional manual dicer, the operator has to adjust the height position of the partition (height of the opening) according to the thickness of the workpiece, and the workability is very poor. Furthermore, when the operator forgets to adjust the height position of the partition according to the thickness of the workpiece, the workpiece may collide with the partition and damage the workpiece.

  The present invention has been made in view of these points, and an object of the present invention is to provide manual cutting capable of automatically adjusting the height position of a partition plate that partitions a workpiece attachment / detachment region and a cutting region. Is to provide a device.

  According to the present invention, a chuck table for holding a workpiece, a cutting means having a cutting blade for cutting the workpiece held by the chuck table, and moving the chuck table so that the workpiece is processed by the cutting blade. A cutting apparatus comprising: a cutting area for cutting an object; and a chuck table moving means positioned at an attachment / detachment area for attaching / detaching a workpiece to / from the chuck table, and a partition plate that partitions the cutting area from the attachment / detachment area; When the workpiece is being cut by the cutting blade, the partition plate and the workpiece are not in contact with each other, and the cutting area and the attachment / detachment area are shut off when the chuck table is positioned at the attachment / detachment position. There is provided a cutting device comprising partition plate moving means for moving the partition plate to and from a blocking position.

  The cutting apparatus of the present invention includes partition plate moving means for moving the partition plate that partitions the workpiece attachment / detachment region and the cutting region between the open position and the shut-off position. And can automatically change the height position of the partition plate.

  Therefore, there is no need to wait until the rotation of the cutting blade completely stops when the workpiece is attached / detached, and the workpiece can be quickly attached to / detached from the chuck table. Moreover, since the operator does not need to adjust the height position of a partition plate according to the thickness of a workpiece, workability | operativity improves.

  In addition, when the work piece is attached or removed, the operator touches the cutting blade or blade cover through the opening of the partition plate to get injured, break the cutting blade, change the position of the cutting water nozzle, etc. Is prevented from getting worse.

It is an external appearance perspective view of the cutting device of this invention embodiment. It is a principal part perspective view of a cutting device. It is a right view of FIG. 2 when a partition plate exists in an open position. It is a right view of FIG. 2 when a partition plate exists in the interruption | blocking position.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to FIG. 1, an external perspective view of a manual cutting device (manual dicer) 2 according to an embodiment of the present invention is shown.

  Each mechanism part of the cutting device 2 is covered with an exterior cover 4. Doors 6 and 8 are attached to the exterior cover 4 on the front side of the cutting device 2. The door 6 is a swing type that opens and closes by gripping and pulling the handle 7, and the door 8 is a slide type that grips the handle 9 and slides it left and right.

  A touch panel display monitor 10 is further disposed on the exterior cover 4 on the front side of the cutting device 2. When the operator touches the operation information displayed on the display monitor 10, the operation information of the cutting device 2 can be input. Further, the operating status of the cutting device 2 is displayed on the display monitor 10.

  Reference numeral 12 denotes a display lamp for displaying the operating status of the cutting device 2, which lights up in green when the cutting device 2 is operating normally, and flashes red when some failure occurs. 14 is an emergency stop button. When the operator presses the emergency stop button 14, the operation of the cutting device 2 can be stopped immediately.

  Referring to FIG. 2, a perspective view of a main part of the cutting device 2 according to the embodiment of the present invention is shown. A sheet metal casing 34 is mounted on the base 16. A door 6 formed of a transparent resin such as an acrylic plate shown in FIG. 1 is rotatably attached to the casing 34, and a door 8 similarly formed of a transparent resin such as an acrylic plate is slidably mounted. Yes.

  A chuck table 18 is mounted on the base 16 so as to be movable in the X-axis direction. The chuck table 18 is moved in the X-axis direction between an attachment / detachment area A for attaching / detaching the workpiece shown in FIG. 2 and a cutting area B for cutting the workpiece by a machining feed mechanism (not shown). Reference numeral 20 denotes a water cover for protecting a motor or the like that rotates the chuck table 18 from the cutting water, and the bellows 22 and 24 are attached to the water cover 20.

  Reference numeral 26 denotes a cutting unit (cutting means), which is configured by attaching a cutting blade 30 to the tip of a spindle 28 that is rotationally driven by a servo motor. A blade cover (wheel cover) 32 covers the cutting blade 30. The cutting unit 26 is moved in the Y-axis direction by an index feed mechanism (not shown).

  Reference numeral 35 denotes a partition wall that divides the attachment / detachment region A for attaching / detaching the workpiece to / from the chuck table 18 and the cutting region B for cutting the workpiece by the cutting blade 30, as shown in FIGS. 3 and 4. An opening 35a is formed in the opening.

  A partition plate 36 is disposed adjacent to the partition wall 35, and the partition plate 36 is moved in the vertical direction by the air cylinder 40. The air cylinder 40 is mounted on a stay (support member) 38 attached to the housing 34, and the piston rod 42 of the air cylinder 40 is connected to the partition plate 36.

  A pair of guide holes 37 extending in the vertical direction are formed in the partition plate 36, and screws 46 attached to the partition wall 35 are engaged with the guide holes 37. Reference numeral 44 denotes an alignment unit including an imaging camera.

  Hereinafter, the operation of the cutting apparatus 2 configured as described above will be described. As shown in FIG. 2, when the chuck table 18 is positioned in the attachment / detachment area A where the workpiece is attached / detached, the door 6 is unlocked and the operator opens the door 6 to access the chuck table 18. Can do.

  Further, as shown in FIG. 4, the piston rod 42 of the air cylinder 40 is retracted, and the partition plate 36 is positioned at a blocking position for blocking the attachment / detachment region A and the cutting region B, and the opening 35a of the partition wall 35 is made large. Partially occludes. As a result, even if the spindle 28 is not completely stopped, the operator cannot access the cutting blade 30 and the blade cover 32 because the partition plate 36 is obstructed.

  Therefore, when the workpiece is attached / detached, the worker contacts the cutting blade 30 or the blade cover 32 to be injured, the cutting blade 30 is damaged, or the position of the cutting water nozzle 31 is changed. It can prevent that processing quality deteriorates.

  When the operator closes the door 6 and inputs a cutting start command via the display monitor 10, the spindle 28 starts rotating and the piston rod 42 of the air cylinder 40 is extended so that the partition plate 36 is shown in FIG. To the open position.

  When the rotation of the spindle 28 reaches a predetermined rotation (for example, 30000 rpm), the machining feed mechanism is driven and the chuck table 18 starts moving in the X-axis direction. At this time, since the partition plate 36 is positioned at the open position shown in FIG. 3, the opening 35 a of the partition wall 35 is opened widely, and the workpiece 48 held on the chuck table 18 is obstructed by the partition plate 36. Without moving to the cutting region B, the workpiece 48 is started to be cut.

  When the cutting of the workpiece such as a semiconductor wafer is completed, the chuck table 18 is returned to the attachment / detachment region A which is the home position shown in FIG. As the chuck table 18 is returned to the attaching / detaching position, the partition plate 36 is lowered to the blocking position shown in FIG. When the partition plate 36 is lowered to the blocking position, the door 6 is unlocked and the door 6 can be opened.

  Therefore, even if the rotation of the spindle 28 is not completely stopped, the operator opens the door 6 and takes out the workpiece after cutting from the chuck table 18 and puts a new workpiece on the chuck table 18. The work efficiency can be improved. At this time, since the partition plate 36 is positioned at the blocking position, it is possible to prevent the operator from accidentally contacting the cutting blade 30 and the blade cover 32.

2 Cutting device 4 Exterior cover 6, 8 Door 10 Display monitor 18 Chuck table 26 Cutting unit (cutting means)
28 Spindle 30 Cutting blade 35 Partition wall 36 Partition plate 40 Air cylinder

Claims (1)

A chuck table for holding a workpiece, a cutting means having a cutting blade for cutting the workpiece held by the chuck table, and a cutting for moving the chuck table and cutting the workpiece by the cutting blade A cutting apparatus comprising a chuck table moving means positioned in an area and an attachment / detachment area for attaching / detaching a workpiece to / from the chuck table,
A partition plate that partitions the cutting region and the detachable region;
When the workpiece is being cut by the cutting blade, the partition plate and the workpiece are not in contact with each other, and the cutting area and the attachment / detachment area are shut off when the chuck table is positioned at the attachment / detachment position. Partition plate moving means for moving the partition plate to and from the blocking position;
A cutting apparatus comprising:

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