JP2010171321A - Workpiece carrying-out tray and workpiece carrying-out method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a workpiece carrying-out tray and a workpiece carrying-out method, allowing safe take-out of a workpiece. <P>SOLUTION: A hook member 15 is rotated by rotating a pair of rotary shafts 14, and a frame F mounted with a workpiece W on a workpiece table 5 moved to a workpiece carrying-out port 7 is lifted up from the lower surface side. When the frame is raised to a horizontal holding position, a tray 13 is unlocked to be openable and closable, and the tray is pulled out through the workpiece carrying-out port along a guide rail 12 to carry out the workpiece. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a workpiece unloading tray and a workpiece unloading method for unloading a workpiece from a dicing apparatus that processes a workpiece on which a semiconductor device or an electronic component is formed.

  A dicing device that performs cutting and grooving processing on a workpiece such as a wafer on which a semiconductor device or an electronic component is formed includes at least a thin disk-shaped blade formed by diamond abrasive grains rotated at high speed by a spindle, A work table for sucking and holding the work and X, Y, Z, and θ movement axes for changing the relative positions of the work table and the blade are provided. When machining a workpiece, a cutting fluid for cooling or lubrication is supplied from a nozzle to a rotating blade or a machining point where the workpiece and the blade are in contact with each other, and the blade and the workpiece are relatively moved by each moving axis. Cutting or grooving is performed on the workpiece by cutting the workpiece with the blade.

  FIG. 1 shows an example of a dicing apparatus. The dicing apparatus 1 includes a high-frequency motor built-in type spindles 3 and 3 which are arranged to face each other and have a blade 2 and a wheel cover (not shown) attached to the tip, and a work W surface mounted on a frame F via a tape T. Is provided with an image pickup means 4 for picking up an image, a work table 5 for sucking and holding the work W, and a blade 6 and a moving shaft (not shown) for moving the work table 5 relatively. The processing unit 6 is provided with a workpiece unloading port 7 for unloading the workpiece W adjacent thereto, and the workpiece unloading port 7 can be opened and closed to prevent the cutting water scattered in the processing unit 6 from flowing out during processing. A cover 8 is provided.

  Other dicing apparatuses include a wafer cleaning apparatus that spin-processes a processed workpiece W, a load port on which a cassette that stores a large number of workpieces W is placed, a conveyance unit that conveys the workpiece W, and the like (for example, (See Patent Document 1).

In the dicing apparatus 1 configured as described above, the blade 2 cannot be rotated when the cover 8 is open because the blade 2 is dangerously rotated at a high speed of 10,000 to 60000 rpm. When the rotation of 2 is started, the cover 8 is locked and cannot be opened. Thereby, during rotation of the blade 2, each part in the processing part 6 cannot be directly touched, and the safety of the operator is ensured.
JP 2007-242726 A

  However, in the dicing apparatus, it is necessary to open the cover in order to change the workpiece before and after processing. Further, it may be necessary to take in and out the workpiece being processed, such as checking the processing state of the workpiece in the middle of processing or unloading a workpiece in which a defect has occurred. In such a case, the dicing machine cannot open the cover without stopping the rotation of the blade. Therefore, after stopping the rotation of the blade, open the cover, insert and remove the workpiece, close the cover, and then again. Start blade rotation. However, the rotation of the blade was very fast, and it took a lot of time to completely stop and restart the rotation of the blade, and the work time became very long, resulting in an increase in cost and a decrease in the operation efficiency of the apparatus. .

  The present invention has been made with respect to such a problem, and an object thereof is to provide a work carry-out tray and a work carry-out method capable of safely taking out a work without opening a cover and stopping rotation of a blade. It is said.

  In order to achieve the above object, the present invention provides a lower part of a work exit where a cover of a dicing apparatus that mounts a work mounted on a frame via a tape on a work table and performs processing with a rotating blade is attached. A tray provided on the outer periphery of the frame placed on the work table moved to the work exit, and the frame lifted and lifted by rotating the frame. A pair of hook members to be held, a pair of rotating shafts for rotating the hook members provided on the tray, and guide rails for moving the tray so that it can be freely inserted and removed from the work outlet. Yes.

  Further, the present invention is characterized in that, in the above invention, the tray is provided with a lock mechanism that is disengaged when the hook member pulls up the frame to the holding position.

  Furthermore, the present invention is characterized in that, in the above invention, the rotating shaft is rotated by a rotary cylinder.

  According to the present invention, the work carry-out tray is substantially parallel to the vicinity of the outer peripheral portion of the frame placed on the work table moved to the work carry-out port and the tray provided at the lower part of the work carry-out port to which the cover is attached. A pair of hook members that are provided and lift the frame by rotating and hold the lifted frame, a pair of rotating shafts provided on the tray, and a guide rail that allows the tray to be moved in and out of the workpiece carry-out port. ing.

  When the workpiece is taken out while the blade is rotating, the hook member is rotated by rotating a pair of rotating shafts, and the frame on which the workpiece on the work table moving to the workpiece carry-out port is mounted is lifted from the lower surface side. When the frame rises to the horizontal holding position, the tray is unlocked and can be opened and closed, and the work is carried out by pulling out the tray from the work carry-out port by the guide rail.

  As a result, the workpiece can be safely taken out without opening the cover even while the blade is rotating. Since the cover cannot be opened, the rotation of the blade does not stop and the restart time is shortened, so that dicing can be performed efficiently.

  As described above, according to the work carry-out tray and the work carry-out method of the present invention, it is possible to safely take out the work without opening the cover and stopping the rotation of the blade, and the restart time is shortened, which is efficient. Therefore, dicing can be performed.

  Hereinafter, preferred embodiments of a work carry-out tray and a work carry-out method according to the present invention will be described in detail with reference to the accompanying drawings. First, the structure of the workpiece carry-out tray according to the present invention will be described. FIG. 2 is a perspective view showing a dicing apparatus provided with a work carry-out tray according to the present invention, and FIG. 3 is a perspective view showing a state of the work taken out from the work carry-out port by the work carry-out tray.

  The dicing apparatus 10 includes a high-frequency motor built-in spindles 3 and 3 that are arranged to face each other and have a blade 2 and a wheel cover (not shown) attached to the tip, and a work W surface that is mounted on a frame F via a tape T. Is provided with an imaging means 4 for picking up an image, a work table 5 for attracting and holding the work W, and a moving shaft 17 for moving the blade 2 and the work table 5 relatively. The processing unit 6 is provided with a workpiece unloading port 7 for unloading the workpiece W adjacent thereto, and the workpiece unloading port 7 can be opened and closed to prevent the cutting water scattered in the processing unit 6 from flowing out during processing. A cover 8 is provided.

  A workpiece carry-out tray 11 is provided below the workpiece carry-out port 7. The work carry-out tray 11 includes a tray 13 guided by guide rails 12, 12 provided between the base casting 18 and the gantry frame 19, a pair of rotary shafts 14, 14 provided in the tray 13, A pair of hook members 15, 15 provided substantially parallel to the vicinity of the outer peripheral portion of the frame F placed on the work table 5 moved to the carry-out port 7 are provided.

  The tray 13 is provided so as to be movable in and out of the work carry-out port 7 by the guide rail 12. Further, the tray 13 is provided with a lock mechanism (not shown), and movement when the frame F is not lifted is restricted.

  The rotary shafts 14 and 14 are provided to the tray 13 via rotary cylinders 16 and 16 using air or electricity as a drive source. The rotating shaft 14 is rotated about the axis by a rotary cylinder 16 to rotate the hook member 15. As a result, the frame F mounting the work W placed on the work table 5 moving to the work unloading port 7 is lifted from the lower surface side.

  When the frame F lifted by the hook member 15 rises to a horizontal holding position, the tray 13 is unlocked and can be moved, and the tray 13 is pulled out from the work carry-out port 7 by the guide rail 12, and the work piece as shown in FIG. W is carried out.

  As a result, the workpiece W can be safely taken in and out of the workpiece carry-out port 7 without opening the cover 8 even during rotation of the blade 2. Since the cover 8 cannot be opened, the rotation of the blade 2 does not stop and the restart time is shortened, so that dicing can be performed efficiently.

  In the present embodiment, the rotary shaft 14 is rotated by the rotary cylinder 16. However, the present invention is not limited to this, and the rotary shaft 14 may be manually rotated by a handle provided outside.

  Next, the work carrying-out method according to the present invention will be described. FIG. 4 is a cross-sectional view showing a state where the frame is lifted by the work carry-out tray.

  As shown in FIG. 2, a dicing apparatus 10 provided with a work carry-out tray according to the present invention includes spindles 3 and 3 having blades 2 and a wheel cover (not shown) attached to the tip, and a frame T with a tape T interposed therebetween. A processing unit 6 having an image pickup means 4 for picking up an image of the surface of the mounted workpiece W, a work table 5 for sucking and holding the workpiece W, and a moving shaft 17 for moving the blade 2 and the work table 5 relatively. ing. A workpiece exit 7 for carrying out the workpiece W is provided adjacent to the processing unit 6, and a cover 8 that can be opened and closed is provided at the workpiece exit 7. A workpiece carry-out tray 11 is provided below the workpiece carry-out port 7.

  In the dicing apparatus 10, first, the work W mounted on the frame F is carried from the work carry-out port 7 and is sucked and placed on the work table 5. When the work W is sucked and placed on the work table 5, the cover 8 is closed and the blade 2 starts to rotate. Subsequently, the workpiece W is aligned by the imaging unit 4 and a moving unit (not shown), and the aligned workpiece W is diced by the rotating blade 2. While the blade 2 is rotating, the cover 8 is locked and cannot be opened and closed.

  In this way, when the work W is diced and the dicing process is completed or the work W needs to be taken out during the dicing process due to some problem, the work table 5 is first moved from the lower side of the blade 2 to FIG. ), The workpiece W is moved to the work exit 7 and stopped, and the suction of the workpiece W is released.

  After the work table 5 has moved to the work exit 7, as shown in FIG. 4B, the rotary shaft 16 rotates in the direction of the arrow θ by the rotary cylinder 16 so that the hook member 15 contacts the lower surface side of the frame F. .

  Subsequently, as shown in FIG. 4C, when the rotation shaft 14 further rotates and the hook member 15 moves to the horizontal position which is the frame F holding position, the rotation of the rotation shaft 14 stops and the frame F is held. The When the frame F is raised to the horizontal position and held, the tray 13 is unlocked, and the workpiece W is unloaded from the workpiece unloading port 7 together with the frame F and the tray 13.

  After the work W is carried out, the new or confirmed work W is placed on the hook member 15 in a state of being mounted on the frame F with the tape T removed.

  The workpiece W placed on the hook member 15 is loaded into the workpiece unloading port 7 again by the workpiece unloading tray 11. After the workpiece W is carried into the workpiece carry-out port 7, the rotary shaft 16 rotates the rotating shaft 14 in the direction opposite to the arrow θ shown in FIG. 4B to lower the frame F. In this way, the workpiece W is again placed on the work table 5 by suction. When the lowering of the frame F is started, the tray 13 is locked and cannot move.

  As a result, the workpiece W can be safely taken in and out of the workpiece carry-out port 7 without opening the cover 8 even during rotation of the blade 2. Since the cover 8 cannot be opened, the rotation of the blade 2 does not stop and the restart time is shortened, so that dicing can be performed efficiently.

  As described above, according to the work carry-out tray and the work carry-out method according to the present invention, the work is lifted by the moving tray and the hook member provided on the rotating shaft, and it is possible to safely do not open the cover even while the blade is rotating. The workpiece can be taken out. Since the cover cannot be opened, the rotation of the blade does not stop and the restart time is shortened, so that dicing can be performed efficiently.

The perspective view which showed the conventional dicing apparatus. The perspective view which showed the dicing apparatus provided with the workpiece carry-out tray concerning this invention. The perspective view which showed the mode of the workpiece | work taken out from the workpiece carry-out exit by the workpiece carry-out tray. Sectional drawing which showed a mode that a flame | frame was lifted by the workpiece carry-out tray.

DESCRIPTION OF SYMBOLS 1, 10 ... Dicing apparatus, 2 ... Blade, 3 ... Spindle, 4 ... Imaging device, 5 ... Work table, 6 ... Processing part, 7 ... Work carry-out port, 8 ... Cover, 11 ... Work carry-out tray, 12 ... Guide rail , 13 ... tray, 14 ... rotating shaft, 15 ... hook member, 16 ... rotary cylinder, 17 ... moving shaft, 18 ... base casting, 19 ... gantry frame 19, F ... frame, T ... tape, W ... work

Claims (4)

A tray provided at the lower part of the work carry-out port to which a cover of a dicing apparatus that mounts a work mounted on a frame via a tape on a work table and performs processing with a rotating blade;
A pair of hook members provided substantially parallel to the vicinity of the outer peripheral portion of the frame placed on the work table moved to the work carry-out port and lifting the frame by rotation and holding the raised frame; ,
A pair of rotating shafts for rotating the hook member provided on the tray;
A work carry-out tray, comprising: a guide rail that moves the tray so as to be freely inserted and removed from the work carry-out port.   The workpiece carry-out tray according to claim 1, wherein the tray includes a lock mechanism that is released when the hook member pulls up the frame to a holding position.   3. The work carry-out tray according to claim 1, wherein the rotary shaft is rotated by a rotary cylinder. In a dicing apparatus that performs processing with a blade that rotates by placing a work mounted on a frame via a tape on a work table,
A tray provided at a lower portion of a work carry-out port to which a cover is attached and a rotation provided by being substantially parallel to the vicinity of the outer peripheral portion of the frame placed on the work table moved to the work carry-out port. A pair of hook members for lifting the frame and holding the lifted frame, a pair of rotating shafts for rotating the hook member provided on the tray, and a guide rail for moving the tray so that it can be moved in and out of the work carry-out port And comprising
The hook member is rotated by rotating the rotating shaft, the frame is lifted from the lower surface side and held horizontally, and the tray is pulled out from the work carry-out port by the guide rail, and the work is carried out. The work unloading method.

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