JP2012171118A5 - - Google Patents

Download PDF

Info

Publication number
JP2012171118A5
JP2012171118A5 JP2011032895A JP2011032895A JP2012171118A5 JP 2012171118 A5 JP2012171118 A5 JP 2012171118A5 JP 2011032895 A JP2011032895 A JP 2011032895A JP 2011032895 A JP2011032895 A JP 2011032895A JP 2012171118 A5 JP2012171118 A5 JP 2012171118A5
Authority
JP
Japan
Prior art keywords
forming
metal
reference hole
mask
alignment mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011032895A
Other languages
English (en)
Japanese (ja)
Other versions
JP5591733B2 (ja
JP2012171118A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011032895A priority Critical patent/JP5591733B2/ja
Priority claimed from JP2011032895A external-priority patent/JP5591733B2/ja
Publication of JP2012171118A publication Critical patent/JP2012171118A/ja
Publication of JP2012171118A5 publication Critical patent/JP2012171118A5/ja
Application granted granted Critical
Publication of JP5591733B2 publication Critical patent/JP5591733B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011032895A 2011-02-18 2011-02-18 メタルマスク及びその製造方法、並びにアライメントマークの形成方法 Active JP5591733B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011032895A JP5591733B2 (ja) 2011-02-18 2011-02-18 メタルマスク及びその製造方法、並びにアライメントマークの形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011032895A JP5591733B2 (ja) 2011-02-18 2011-02-18 メタルマスク及びその製造方法、並びにアライメントマークの形成方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014155067A Division JP5893690B2 (ja) 2014-07-30 2014-07-30 配列用マスク

Publications (3)

Publication Number Publication Date
JP2012171118A JP2012171118A (ja) 2012-09-10
JP2012171118A5 true JP2012171118A5 (cg-RX-API-DMAC7.html) 2013-11-21
JP5591733B2 JP5591733B2 (ja) 2014-09-17

Family

ID=46974482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011032895A Active JP5591733B2 (ja) 2011-02-18 2011-02-18 メタルマスク及びその製造方法、並びにアライメントマークの形成方法

Country Status (1)

Country Link
JP (1) JP5591733B2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023125403A (ja) * 2022-02-28 2023-09-07 マクセル株式会社 アライメントマーク、アライメントマークの形成方法、アライメントマークを備えるメタルマスク

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3103904B2 (ja) * 1991-11-01 2000-10-30 九州日立マクセル株式会社 スクリーン印刷用メタルマスク、およびその製造方法
JPH10151724A (ja) * 1996-11-21 1998-06-09 Ibiden Co Ltd 印刷用マスクおよびそれを用いたプリント配線板の半田印刷方法
JP2005193512A (ja) * 2004-01-07 2005-07-21 Murata Mfg Co Ltd スクリーン印刷用マスク
JP5178501B2 (ja) * 2008-12-26 2013-04-10 株式会社ソノコム 認識マークを備えたメタルマスク及びその製造方法

Similar Documents

Publication Publication Date Title
JP2013247367A5 (cg-RX-API-DMAC7.html)
JP2017210657A5 (cg-RX-API-DMAC7.html)
JP2016029697A5 (cg-RX-API-DMAC7.html)
WO2011006634A3 (de) Verfahren zur herstellung eines mehrschichtkörpers sowie mehrschichtkörper
WO2012047042A3 (ko) 미세 패턴 형성 방법 및 이를 이용한 미세 채널 트랜지스터 및 미세 채널 발광트랜지스터의 형성방법
JP2017014620A5 (cg-RX-API-DMAC7.html)
JP2011060925A5 (cg-RX-API-DMAC7.html)
JP2014502418A5 (cg-RX-API-DMAC7.html)
TW200632542A (en) Mask, mask forming method, pattern forming method, and wiring pattern forming method
JP2014174145A5 (cg-RX-API-DMAC7.html)
SG2014008841A (en) Overlay targets with orthogonal underlayer dummyfill
EP3335079A4 (en) METHOD FOR PRODUCING AN ESTETRESIST PATTERN ON A METALLIC SURFACE
WO2013015648A3 (en) Method of manufacturing mold for nano imprint
JP2014109274A5 (cg-RX-API-DMAC7.html)
FR2974194B1 (fr) Procede de lithographie
EP3304197A4 (en) METHOD FOR PRODUCING AN ESTETRESIST PATTERN ON A METALLIC SURFACE
JP2015088216A5 (cg-RX-API-DMAC7.html)
JP2014107282A5 (cg-RX-API-DMAC7.html)
JP2014135417A5 (cg-RX-API-DMAC7.html)
JP2012166506A5 (cg-RX-API-DMAC7.html)
TW200619856A (en) Printing plate and method for fabricating the same
JP2011044616A5 (cg-RX-API-DMAC7.html)
JP2012171118A5 (cg-RX-API-DMAC7.html)
JP2009212163A5 (cg-RX-API-DMAC7.html)
JP2013197574A5 (cg-RX-API-DMAC7.html)