JP2012164724A - Semiconductor device manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a resin composition such as a thermosetting adhesive composition, and a semiconductor device using the same, which are excellent in workability and do not cause defects such as cracks on the semiconductor device even under a high temperature environment of 260°C or more thereby lending excellent reliability to the semiconductor device.SOLUTION: A semiconductor device manufacturing method comprises: a step of coating a thermosetting adhesive composition on a resin substrate composed of a fibrous support base material with a thermosetting resin being impregnated and bonding a semiconductor element under a predetermined heat condition A after arranging the semiconductor element via the adhesive composition; a step of encapsulating the substrate and the semiconductor element bonded in the above-described step under a predetermined heat condition B with a resin composition for encapsulation; and a step of performing heat treatment after being encapsulated in the above-described step. A color (R, B, G) concerning equipment recognition of the thermosetting adhesive composition is determined as (100<R≤255, 100<B≤255, 100<G≤255) [Evaluation Test 1].

Description

  The present invention relates to a method for manufacturing a conductor device.

  As a method of adhering a semiconductor element such as an IC and a support such as a metal frame or an organic substrate, a method of mounting a semiconductor element on a support via an adhesive resin composition and curing and bonding is widely used. Yes. At the time of mounting, it is necessary to mount the semiconductor element at an intended place, and the adhesive resin composition needs to be recognized by the device in order to control the amount and spread of the adhesive resin composition. Therefore, the device recognition ability of the adhesive resin composition is required. In general semiconductor element loading process, a thermosetting adhesive composition is applied on a resin support obtained by impregnating a fibrous support material with a thermosetting resin, and the applied shape is recognized and image processed. A semiconductor element is loaded after checking that there is no appearance abnormality. However, in the device recognition process in the loading process, there are problems such as a decrease in productivity due to device recognition abnormality and an inability to grasp appearance abnormality due to insufficient device recognition. As for the device recognition ability in the composition, it has been increasingly required to ensure sufficient device recognition ability.

  In order to meet such demands, it is necessary to obtain device recognition capability in a small amount without impairing the properties of the adhesive resin composition, and therefore, studies have been made using colorants and the like. However, at the same time as reducing defects such as cracks in the semiconductor device due to an increase in thermal stress generated with an increase in solder reflow temperature required as an adhesive (for example, see Patent Document 1), device recognition capability is ensured. That isn't enough.

JP2002-212267

  An object of the present invention is to provide a semiconductor device that has sufficient device recognition ability and can impart excellent reliability to a semiconductor device without causing defects such as cracks even in a high temperature environment of 260 ° C. or higher. It is to provide a manufacturing method.

Such an object is achieved by the present invention described in the following [1] to [10].
[1] A step of applying a thermosetting adhesive composition on a resin support made by impregnating a fibrous support material with a thermosetting resin, a step of recognizing the applied shape and image processing, and an appearance inspection A method of manufacturing a semiconductor device comprising: a step of loading a semiconductor element on a resin support obtained by impregnating a fibrous support material with a thermosetting resin via a thermosetting adhesive composition The color [evaluation test 1] (R, B, G) related to shape device recognition of the thermosetting adhesive composition is (100 <R ≦ 255, 100 <B ≦ 255, 100 <G ≦ 255). A method for manufacturing a semiconductor device.
[Evaluation Test 1:
Sample molding conditions: A thermosetting resin composition is applied on a resin support obtained by impregnating a fibrous support base material with a thermosetting resin, and the thickness is adjusted to 30 μm.
Color measurement conditions; Measurement conditions: After taking a sample, an average value of R, B, and G of the thermosetting resin composition part is calculated. ]

[2] The method for manufacturing a semiconductor device according to [1], wherein the thermosetting adhesive composition contains a compound having a radical polymerizable functional group.

[3] The method for manufacturing a semiconductor device according to [1] or [2], wherein the thermosetting adhesive composition includes a compound having a hydroxyl group.

[4] The method for manufacturing a semiconductor device according to [1] to [3], wherein the thermosetting adhesive composition includes a low stress agent.

[5] The method for manufacturing a semiconductor device according to [4], wherein the low-stress agent includes a butadiene polymer or copolymer.

[6] The above-mentioned [1] to [1], wherein the thermosetting adhesive composition has at least one of a cyanate resin, an epoxy resin, a radical polymerizable acrylic resin, and a maleimide resin as a thermosetting resin. [5] A method for manufacturing a semiconductor device according to [5].

[7] The method for manufacturing a semiconductor device according to [1] to [6], wherein the thermosetting adhesive composition has titanium oxide.

[8] The method for manufacturing a semiconductor device according to the above [7], wherein the pre-titanium oxide is 0.7 parts or more and less than 10 parts when the total thermosetting adhesive composition is 100 parts.

[9] The method for manufacturing a semiconductor device according to [1] to [8], wherein the thermosetting adhesive composition includes an oxide composed of a metalloid element and an oxygen atom.

[10] The oxide of the metalloid element and oxygen atom is 20 parts by weight or more and less than 80 parts by weight when the total thermosetting adhesive composition is 100 parts by weight. A method for manufacturing a semiconductor device according to item [9].

  By using the method for manufacturing a semiconductor device according to the present invention, it is excellent in device recognition ability and workability, and does not cause defects such as cracks in a semiconductor device even in a high temperature environment of 260 ° C. or higher, and has excellent reliability. To the device.

(Semiconductor device manufacturing process)
Hereinafter, a method for manufacturing a semiconductor device according to the present invention will be described in detail.
The method of manufacturing a semiconductor device according to the present invention includes a step of applying a thermosetting adhesive composition on a resin support obtained by impregnating a fibrous support material with a thermosetting resin, and an image obtained by recognizing the applied shape. It is characterized by being a manufacturing method of a semiconductor device which has a process step and a step of loading a semiconductor element after inspecting that there is no appearance abnormality.

  The method for manufacturing a semiconductor device according to the present invention includes a step of applying a thermosetting adhesive composition onto a resin support obtained by impregnating a fibrous support material with a thermosetting resin. A resin support made by impregnating a fibrous support base material used in the present invention with a thermosetting resin is a resin impregnated base material called a prepreg produced by impregnating a glass cloth with a thermosetting resin. It is a laminated board. Here, representative examples of the thermosetting resin impregnated with the glass cloth include an epoxy resin and a bismaleimide triazine resin. A thermosetting adhesive composition is applied on the cured support equipment.

  The method for manufacturing a semiconductor device according to the present invention further includes a step of recognizing the shape applied with the thermosetting adhesive composition and processing the image, and a step of stacking semiconductor elements after inspecting that there is no appearance abnormality. Specifically, it is necessary to recognize and memorize the shape of the thermosetting adhesive composition with a photographing apparatus. This is an initial step necessary for inspecting the stability of coating, and is a step necessary for ensuring a stable coating shape. Further, it has a step of finding that there is no abnormality in appearance in comparison with the previously set conditions. When a change in color or abnormality in recognition occurs, it is recognized as an appearance abnormality, so that a sufficient device recognition ability needs to be imparted to the adhesive composition. For this purpose, a color recognition ability on the support is necessary. In that case, in order to make it recognize on the support body of R (red), B (blue), and G (green), it is desirable that it is a white side. The RBG values of the thermosetting resin composition are preferably (100 <R ≦ 255, 100 <B ≦ 255, 100 <G ≦ 255), respectively. Examples of fillers for giving a white color include alumina and titanium oxide, but the particle diameter is 30 μm or less, and as a colorant that can be colored in a small amount without impairing the adhesion characteristics of the thermosetting adhesive composition, an oxidizing agent is used. Titanium is preferred. The amount of the colorant is preferably 0.7% by weight or more and less than 10.0% by weight with respect to the total weight of the thermosetting resin composition. This is because if 0.7% by weight or less, sufficient visibility may not be ensured, and if it is 10.0 parts or more, the viscosity and thixotropy will be reduced. This is because handling such as a coating operation to a semiconductor element becomes easy.

  The manufacturing method of the semiconductor device concerning this invention has the process (a) which seals the adhere | attached support body and semiconductor element with sealing resin after said process. The sealing resin used in this step is often a thermosetting resin, and is often cured by heating after sealing. The manufacturing method of the semiconductor device concerning this invention has the process (b) which heat-processes (heats) to Sarah after sealing a semiconductor element by the said process (a). This step is a step aimed at promoting the curing reaction of the sealing material, and has a step called post mold cure.

  The compound having a hydroxyl group used in the thermosetting adhesive composition used in the present invention is not particularly limited, but is a compound in which hydrogen on carbon other than the benzene ring such as alkane or alkene is substituted with a hydroxyl group. And phenol obtained by substituting hydrogen of the benzene ring with a hydroxyl group. More preferably, it is a compound having an alcoholic hydroxyl group, and a compound having an alcoholic hydroxyl group as a functional group in a cyanate resin, an epoxy resin, a radical polymerizable acrylic resin, a maleimide resin, or the like can also be used. In order not to deteriorate the coating workability, it is preferable to use a radically polymerizable acrylic resin having a small number of polar functional groups.

Furthermore, from the viewpoint of improving bleeding properties and reducing unreacted substances, a compound represented by the following general formula (1) can be used. In general, low viscosity acrylic ester compounds such as mono (meth) acrylate and di (meth) acrylate are used as reactive diluents, but by using a compound of the following general formula (1), good adhesion and It becomes possible to show excellent bleeding properties. Bleed here refers to a phenomenon in which the resin component of the resin composition spreads on the surface of the support when the resin composition is applied to a support such as a lead frame or an organic substrate, or during heat curing. (Wire bond from semiconductor element to die pad) This is an undesired phenomenon because it causes a defect or decreases the adhesive force of the sealing material to the die pad, causing peeling and cracking. The excellent bleedability means that bleed does not easily occur, that is, the above-described problems hardly occur. Such a compound can be obtained by the reaction of (meth) acrylic acid and cyclohexanedimethanol, and a particularly preferred compound is a reaction product of (meth) acrylic acid and 1,4-cyclohexanedimethanol.

  The low stress agent used for reducing the stress inside the semiconductor device at high and low temperatures used in the thermosetting adhesive composition used in the present invention is preferably in a liquid form. By using a liquid low-stress agent, sufficient workability as a resin composition can be obtained, and low-stress properties can be imparted to the cured product. As a result, it is possible to obtain high adhesiveness that hardly causes peeling. In particular, the liquid low stress agent used for the purpose of imparting low stress is not limited, but diene compounds such as butadiene and isoprene can be used as a structural unit. Preferably, a polymer or copolymer of a butadiene compound is used. Polymers or copolymers of butadiene compounds can be obtained by reaction of polybutadiene having a carboxy group and (meth) acrylate having a hydroxyl group, or reaction of polybutadiene having a hydroxyl group and (meth) acrylic acid or a derivative thereof. It can also be obtained by reaction of polybutadiene added with maleic anhydride and (meth) acrylate having a hydroxyl group. The preferred molecular weight of these polymers is 500 or more and less than 50000, more preferably 700 or more and less than 20000. Within these ranges, it is possible to obtain a resin composition having good workability. The influence of the main chain skeleton structure of the polymer or copolymer of the butadiene compound on the low stress property imparted to the cured product of the thermosetting adhesive composition is large. When attention is paid to the microstructure of the butadiene polymer or copolymer, 1.8 to 2.2 ppm (1,4 vinyl bond) and 4.8 in 1H-NMR (400 MHz) using deuterated chloroform as a solvent. It is preferable that the ratio of 1,4 vinyl bonds is 50% or more with respect to the total of 1,4 vinyl bonds and 1,2 vinyl bonds calculated from the peak area ratio of ˜5.1 ppm (1,2 vinyl bonds). The higher the 1,4 vinyl bond ratio, the lower the viscosity of the butadiene compound as a polymer or copolymer, the better the workability such as application of the resulting resin composition to the support, and the low temperature of the cured product. It is because it is excellent in low-stress property. More preferably, the ratio of 1,4 vinyl bonds is 60% or more and 85% or less.

  In the present invention, it is more preferable to use polybutadiene having a functional group from the viewpoint of improving compatibility with other resins. Specific functional groups possessed by polybutadiene include vinyl groups, epoxy groups, carboxy groups, hydroxyl groups or maleic acid groups. Among these functional groups, it is more preferable to use a polybutadiene having a maleic acid group in terms of obtaining a resin composition having high compatibility and excellent coating workability.

  In this invention, the compounding quantity of the polymer or copolymer (C) of a preferable butadiene compound is 1 to 25 weight part with respect to 100 weight part of thermosetting resins. By making the upper limit of the range or less, the obtained resin composition has suitable workability, and by making the upper limit of the range or more, it expresses a suitable low stress property in a high temperature or low temperature environment. Can do.

  The thermosetting adhesive composition used in the present invention is a general thermosetting resin that forms a three-dimensional network structure by heating. The thermosetting resin is not particularly limited, but is preferably a material that forms a liquid resin composition, and is preferably liquid at room temperature (25 ° C.). For example, cyanate resin, epoxy resin, radical polymerizable acrylic resin, maleimide resin and the like can be mentioned.

  The cyanate resin is a compound having an —NCO group in the molecule, and forms a three-dimensional network structure by the reaction of the —NCO group by heating to be cured. Specifically, 1,3-dicyanatobenzene, 1,4-dicyanatobenzene, 1,3,5-tricyanatobenzene, 1,3-dicyanatonaphthalene, 1,4-dicyanatonaphthalene, 1, 6-dicyanatonaphthalene, 1,8-dicyanatonaphthalene, 2,6-dicyanatonaphthalene, 2,7-dicyanatonaphthalene, 1,3,6-tricyanatonaphthalene, 4,4'-dicyanatobiphenyl, bis (4-cyanatophenyl) methane, bis (3,5-dimethyl-4-cyanatophenyl) methane, 2,2-bis (4-cyanatophenyl) propane, 2,2-bis (3,5-dibromo -4-Cyanatophenyl) propane, bis (4-cyanatophenyl) ether, bis (4-cyanatophenyl) thioether, bis (4-cyanatophenyl) And ruthenes, tris (4-cyanatophenyl) phosphite, tris (4-cyanatophenyl) phosphate, and cyanates obtained by reacting novolak resins with cyanogen halides. A prepolymer having a triazine ring formed by trimerizing a cyanate group can also be used. This prepolymer is obtained by polymerizing the above-mentioned polyfunctional cyanate resin monomer using, for example, an acid such as mineral acid or Lewis acid, a base such as sodium alcoholate or tertiary amine, or a salt such as sodium carbonate as a catalyst. It is done.

As the curing accelerator for the cyanate resin, generally known ones can be used. Examples include organometallic complexes such as zinc octylate, tin octylate, cobalt naphthenate, zinc naphthenate and acetylacetone iron, metal salts such as aluminum chloride, tin chloride and zinc chloride, and amines such as triethylamine and dimethylbenzylamine. However, it is not limited to these. These curing accelerators can be used alone or in combination.
In addition, the cyanate resin can be used in combination with other resins such as an epoxy resin, an oxetane resin, an acrylic resin, and a maleimide resin.

  The epoxy resin is a compound having one or more glycidyl groups in the molecule, and is a resin that forms a three-dimensional network structure by the reaction of the glycidyl groups by heating and cures. It is preferable that two or more glycidyl groups are contained in one molecule, but this is because sufficient cured product characteristics cannot be exhibited even if the glycidyl group is reacted with only one compound. Compounds containing two or more glycidyl groups per molecule include bisphenol compounds such as bisphenol A, bisphenol F, and biphenol, or derivatives thereof, hydrogenated bisphenol A, hydrogenated bisphenol F, hydrogenated biphenol, cyclohexanediol, and cyclohexanedimethanol. Diols having an alicyclic structure such as shidilohexanediethanol or derivatives thereof, bifunctional ones obtained by epoxidizing aliphatic diols such as butanediol, hexanediol, octanediol, nonanediol, decanediol, or derivatives thereof , Trihydroxyphenylmethane skeleton, trifunctional one having aminophenol skeleton, phenol novolak resin, cresol novolak resin, phenol aralkyl resin, bif Examples thereof include, but are not limited to, polyfunctional ones obtained by epoxidizing ruar aralkyl resins, naphthol aralkyl resins, and the like, and the resin composition must be liquid at room temperature. The liquid form is preferable. It is also possible to use reactive diluents as is usual. Examples of the reactive diluent include monofunctional aromatic glycidyl ethers such as phenyl glycidyl ether and cresyl glycidyl ether, and aliphatic glycidyl ethers. A curing agent is used for the purpose of curing the epoxy resin.

Examples of epoxy resin curing agents include aliphatic amines, aromatic amines, dicyandiamide, dihydrazide compounds, acid anhydrides, and phenol resins.
Examples of the dihydrazide compound include carboxylic acid dihydrazides such as adipic acid dihydrazide, dodecanoic acid dihydrazide, isophthalic acid dihydrazide, p-oxybenzoic acid dihydrazide, and the acid anhydrides include phthalic anhydride, tetrahydrophthalic anhydride, hexahydroanhydride. Examples thereof include phthalic acid, endomethylenetetrahydrophthalic anhydride, dodecenyl succinic anhydride, a reaction product of maleic anhydride and polybutadiene, and a copolymer of maleic anhydride and styrene.

  A phenol resin used as a curing agent for an epoxy resin is a compound having two or more phenolic hydroxyl groups in one molecule. In the case of a compound having one phenolic hydroxyl group in one molecule, a cross-linked structure may be taken. Therefore, the cured product characteristics deteriorate and cannot be used. The number of phenolic hydroxyl groups in one molecule can be used as long as it is 2 or more, but the number of phenolic hydroxyl groups is preferably 2 to 5. When the amount is larger than this, the molecular weight becomes too large, and the viscosity of the conductive paste becomes too high, which is not preferable. The number of phenolic hydroxyl groups in one molecule is more preferably 2 or 3. Such compounds include bisphenol F, bisphenol A, bisphenol S, tetramethyl bisphenol A, tetramethyl bisphenol F, tetramethyl bisphenol S, dihydroxy diphenyl ether, dihydroxy benzophenone, tetramethyl biphenol, ethylidene bisphenol, methyl ethylidene bis (methyl phenol ), Bisphenols such as cyclohexylidene bisphenol and biphenol and their derivatives, trifunctional phenols such as tri (hydroxyphenyl) methane and tri (hydroxyphenyl) ethane and their derivatives, and phenols such as phenol novolac and cresol novolac A compound obtained by reacting formaldehyde with formaldehyde, the main one being a binuclear or trinuclear body Such as derivatives.

Examples of epoxy resin curing accelerators include imidazoles, triphenylphosphine or tetraphenylphosphine salts, amine compounds such as diazabicycloundecene, and salts thereof, such as 2-methylimidazole and 2-ethylimidazole. 2-phenylimidazole, 2-phenyl-4-methylimidazole, 2-phenyl-4-methyl-5-hydroxymethylimidazole, 2-phenyl-4,5-dihydroxy methyl imidazole, 2-C ₁₁ H ₂₃ - imidazole, 2 An imidazole compound such as an adduct of methyl imidazole and 2,4-diamino-6-vinyltriazine is preferably used. Particularly preferred is an imidazole compound having a melting point of 180 ° C. or higher. The epoxy resin is also preferably used in combination with a cyanate resin, an acrylic resin, or a maleimide resin.

  The radical polymerizable acrylic resin is a compound having a (meth) acryloyl group in the molecule, and is a resin that forms a three-dimensional network structure by the reaction of the (meth) acryloyl group and cures. Although it is necessary to have one or more (meth) acryloyl groups in the molecule, it is preferable that two or more (meth) acryloyl groups are contained. Particularly preferred acrylic resins are polyethers, polyesters, polycarbonates, poly (meth) acrylates having a molecular weight of 500 to 10,000 and compounds having a (meth) acrylic group. As a polyether, what a C3-C6 organic group repeated via the ether bond is preferable, and what does not contain an aromatic ring is preferable. It can be obtained by reacting a polyether polyol with (meth) acrylic acid or a derivative thereof. As the polyester, those in which an organic group having 3 to 6 carbon atoms is repeated via an ester bond are preferable, and those having no aromatic ring are preferable. It can be obtained by reacting a polyester polyol with (meth) acrylic acid or a derivative thereof. As a polycarbonate, what a C3-C6 organic group repeated via the carbonate bond is preferable, and the thing which does not contain an aromatic ring is preferable. It can be obtained by reacting a polycarbonate polyol with (meth) acrylic acid or a derivative thereof.

  Examples of the poly (meth) acrylate include a copolymer of (meth) acrylic acid and (meth) acrylate or a copolymer of (meth) acrylate having a polar group and (meth) acrylate having no polar group. preferable. In the case of reacting these copolymers with a carboxy group, it can be obtained by reacting an acrylate having a hydroxyl group, and in the case of reacting with a hydroxyl group, (meth) acrylic acid or a derivative thereof.

  If necessary, the following compounds can be used in combination. For example, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, 3-hydroxybutyl (meth) acrylate, 4-hydroxy Butyl (meth) acrylate, 1,2-cyclohexanediol mono (meth) acrylate, 1,3-cyclohexanediol mono (meth) acrylate, 1,4-cyclohexanediol mono (meth) acrylate, 1,2-cyclohexanedimethanol mono (Meth) acrylate, 1,3-cyclohexanedimethanol mono (meth) acrylate, 1,4-cyclohexanedimethanol mono (meth) acrylate, 1,2-cyclohexanediethanol mono (meth) acrylate 1,3-cyclohexanediethanol mono (meth) acrylate, 1,4-cyclohexanediethanol mono (meth) acrylate, glycerin mono (meth) acrylate, glycerin di (meth) acrylate, trimethylolpropane mono (meth) acrylate, tri (Meth) acrylate having a hydroxyl group such as methylolpropane di (meth) acrylate, pentaerythritol mono (meth) acrylate, pentaerythritol di (meth) acrylate, pentaerythritol tri (meth) acrylate, neopentyl glycol mono (meth) acrylate, Examples thereof include (meth) acrylates having a carboxy group obtained by reacting these (meth) acrylates having a hydroxyl group with dicarboxylic acid or a derivative thereof. Examples of dicarboxylic acids that can be used here include oxalic acid, malonic acid, succinic acid, glutaric acid, adipic acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, maleic acid, fumaric acid, phthalic acid, and tetrahydrophthalic acid. , Hexahydrophthalic acid and derivatives thereof.

  In addition to the above, methyl (meth) acrylate, ethyl (meth) acrylate, n-butyl (meth) acrylate, isobutyl (meth) acrylate, tertiary butyl (meth) acrylate, isodecyl (meth) acrylate, lauryl (meth) acrylate, Tridecyl (meth) acrylate, cetyl (meth) acrylate, stearyl (meth) acrylate, isoamyl (meth) acrylate, isostearyl (meth) acrylate, behenyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, other alkyl (meth) ) Acrylate, cyclohexyl (meth) acrylate, tertiary butyl cyclohexyl (meth) acrylate, tetrahydrofurfuryl (meth) acrylate, benzyl (meth) acrylate, phenol Xylethyl (meth) acrylate, isobornyl (meth) acrylate, glycidyl (meth) acrylate, trimethylolpropane tri (meth) acrylate, zinc mono (meth) acrylate, zinc di (meth) acrylate, dimethylaminoethyl (meth) acrylate, diethylaminoethyl ( (Meth) acrylate, neopentyl glycol (meth) acrylate, trifluoroethyl (meth) acrylate, 2,2,3,3-tetrafluoropropyl (meth) acrylate, 2,2,3,3,4,4-hexafluoro Butyl (meth) acrylate, perfluorooctyl (meth) acrylate, perfluorooctylethyl (meth) acrylate, ethylene glycol di (meth) acrylate, propylene glycol di (meth) acrylate 1,4-butanediol di (meth) acrylate, 1,6-hexanediol di (meth) acrylate, 1,9-nonanediol di (meth) acrylate, 1,3-butanediol di (meth) acrylate, 1 , 10-decanediol di (meth) acrylate, tetramethylene glycol di (meth) acrylate, methoxyethyl (meth) acrylate, butoxyethyl (meth) acrylate, ethoxydiethylene glycol (meth) acrylate, methoxypolyalkylene glycol mono (meth) acrylate , Octoxy polyalkylene glycol mono (meth) acrylate, Lauroxy polyalkylene glycol mono (meth) acrylate, Stearoxy polyalkylene glycol mono (meth) acrylate, Allyloxy polyalkyl Lenglycol mono (meth) acrylate, nonylphenoxypolyalkylene glycol mono (meth) acrylate, N, N′-methylenebis (meth) acrylamide, N, N′-ethylenebis (meth) acrylamide, 1,2-di (meth) Acrylamide ethylene glycol, di (meth) acryloyloxymethyl tricyclodecane, N- (meth) acryloyloxyethyl maleimide, N- (meth) acryloyloxyethyl hexahydrophthalimide, N- (meth) acryloyloxyethyl phthalimide , N-vinyl-2-pyrrolidone, styrene derivatives, α-methylstyrene derivatives and the like can also be used.

  Further, a thermal radical polymerization initiator is preferably used as the polymerization initiator. Although it is not particularly limited as long as it is normally used as a thermal radical polymerization initiator, it is desirable that a rapid heating test (decomposition start temperature when a sample is placed on an electric heating plate and heated at 4 ° C./min. In which the decomposition temperature is 40 to 140 ° C. When the decomposition temperature is less than 40 ° C., the storage stability of the conductive paste at room temperature is deteriorated, and when it exceeds 140 ° C., the curing time becomes extremely long, which is not preferable. Specific examples of the thermal radical polymerization initiator satisfying this include methyl ethyl ketone peroxide, methylcyclohexanone peroxide, methyl acetoacetate peroxide, acetylacetone peroxide, 1,1-bis (t-butylperoxy) 3, 3, 5 -Trimethylcyclohexane, 1,1-bis (t-hexylperoxy) cyclohexane, 1,1-bis (t-hexylperoxy) 3,3,5-trimethylcyclohexane, 1,1-bis (t-butylperoxy) ) Cyclohexane, 2,2-bis (4,4-di-t-butylperoxycyclohexyl) propane, 1,1-bis (t-butylperoxy) cyclododecane, n-butyl 4,4-bis (t- Butyl peroxy) valerate, 2,2-bis (t-butylperoxy) Tan, 1,1-bis (t-butylperoxy) -2-methylcyclohexane, t-butyl hydroperoxide, P-menthane hydroperoxide, 1,1,3,3-tetramethylbutyl hydroperoxide, t -Hexyl hydroperoxide, dicumyl peroxide, 2,5-dimethyl-2,5-bis (t-butylperoxy) hexane, α, α'-bis (t-butylperoxy) diisopropylbenzene, t-butyl Cumyl peroxide, di-t-butyl peroxide, 2,5-dimethyl-2,5-bis (t-butylperoxy) hexyne-3, isobutyryl peroxide, 3,5,5-trimethylhexanoyl peroxide , Octanoyl peroxide, lauroyl peroxide, cinnamic acid peroxide m-toluoyl peroxide, benzoyl peroxide, diisopropyl peroxydicarbonate, bis (4-t-butylcyclohexyl) peroxydicarbonate, di-3-methoxybutyl peroxydicarbonate, di-2-ethylhexyl peroxide Carbonate, di-sec-butylperoxydicarbonate, di (3-methyl-3-methoxybutyl) peroxydicarbonate, di (4-t-butylcyclohexyl) peroxydicarbonate, α, α′-bis (neo) Decanoylperoxy) diisopropylbenzene, cumylperoxyneodecanoate, 1,1,3,3-tetramethylbutylperoxyneodecanoate, 1-cyclohexyl-1-methylethylperoxyneodecanoate, t-Hexylpao Cineodecanoate, t-butylperoxyneodecanoate, t-hexylperoxypivalate, t-butylperoxypivalate, 2,5-dimethyl-2,5-bis (2-ethylhexanoylperoxy) ) Hexane, 1,1,3,3-tetramethylbutylperoxy-2-ethylhexanoate, 1-cyclohexyl-1-methylethylperoxy-2-ethylhexanoate, t-hexylperoxy-2-ethyl Hexanoate, t-butylperoxy-2-ethylhexanoate, t-butylperoxyisobutyrate, t-butylperoxymaleic acid, t-butylperoxylaurate, t-butylperoxy-3 , 5,5-trimethylhexanoate, t-butylperoxyisopropyl monocarbonate, t Butylperoxy-2-ethylhexyl monocarbonate, 2,5-dimethyl-2,5-bis (benzoylperoxy) hexane, t-butylperoxyacetate, t-hexylperoxybenzoate, t-butylperoxy-m- Toluoyl benzoate, t-butylperoxybenzoate, bis (t-butylperoxy) isophthalate, t-butylperoxyallyl monocarbonate, 3,3 ′, 4,4′-tetra (t-butylperoxycarbonyl) Examples thereof include benzophenone, but these may be used alone or in combination of two or more in order to control curability. The radical polymerizable acrylic resin is also preferably used in combination with a cyanate resin, an epoxy resin, or a maleimide resin.

  The maleimide resin is a compound that contains one or more maleimide groups in one molecule, and forms a three-dimensional network structure when the maleimide group reacts by heating, and is cured. For example, N, N ′-(4,4′-diphenylmethane) bismaleimide, bis (3-ethyl-5-methyl-4-maleimidophenyl) methane, 2,2-bis [4- (4-maleimidophenoxy) phenyl ] A bismaleimide resin such as propane may be mentioned. More preferred maleimide resins are compounds obtained by reaction of dimer acid diamine and maleic anhydride, and compounds obtained by reaction of maleimidated amino acids such as maleimide acetic acid and maleimide caproic acid with polyols. The maleimidated amino acid is obtained by reacting maleic anhydride with aminoacetic acid or aminocaproic acid. As the polyol, polyether polyol, polyester polyol, polycarbonate polyol, poly (meth) acrylate polyol is preferable, and an aromatic ring is formed. What does not contain is especially preferable. Since the maleimide group can react with an allyl group, the combined use with an allyl ester resin is also preferable. The allyl ester resin is preferably an aliphatic one, and particularly preferred is a compound obtained by transesterification of a cyclohexane diallyl ester and an aliphatic polyol. The number average molecular weight of the allyl ester compound is not particularly limited, but is preferably 500 to 10,000, and particularly preferably 500 to 8,000. When the number average molecular weight is within the above range, curing shrinkage can be particularly reduced, and deterioration of adhesion can be prevented. Moreover, combined use with cyanate resin, an epoxy resin, and an acrylic resin is also preferable.

  You may use another additive for the resin composition of this invention as needed. Other additives include silane coupling agents such as epoxy silane, mercapto silane, amino silane, alkyl silane, ureido silane, vinyl silane, sulfide silane, titanate coupling agent, aluminum coupling agent, aluminum / zirconium coupling agent, etc. Coupling agents, colorants such as carbon black, solid low stress components such as silicone oil and silicone rubber, inorganic ion exchangers such as hydrotalcite, antifoaming agents, surfactants, various polymerization inhibitors, and antioxidants And various additives may be appropriately blended. These compounds may be used individually by 1 type, or may use 2 or more types together.

  In the present invention, it is also possible to add a filler. Thereby, adjustment of viscosity and thixotropy, toughening of the resin composition, and the like are possible, and handling such as application to a support or a semiconductor element becomes easy.

For the filler, metal powder such as silver, gold, nickel, iron or the like can be used to impart conductivity. Among these, silver is preferable from the viewpoint of imparting conductivity.
For the purpose of improving the insulation, ceramic particles, thermosetting resin or thermoplastic resin particles can be used. In addition to the colorant, a metal oxide can be used for the purpose of improving the strength of the resin composition. Depending on the metal oxide used, a resin composition can be produced at a lower cost than using a resin component. As metal oxides that can be used in the present invention, metal components such as boron, silicon, germanium, arsenic, antimony, tellurium, polonium and the like, Fermi energy in the band theory, the top of the valence band, There is a substance which shows a state crossing the lowest part of the conduction band (a state where the valence band and the conduction band are slightly overlapped), and a material made of the oxide is preferable. Particularly preferred is silicon oxide which is inexpensive and easily available. More preferably, silicon oxide produced by a deflagration method is used.

When using these oxide of a metalloid element and an oxygen atom and low stress agent, the peak area values occurring below 3720cm ^-1 or 3770cm ^-1 in the IR powder diffuse reflection method is 0.1 ^{(Acm -1)} It is preferable that it is less than 2.0 (Acm < ^-1 >) above. The above-mentioned wavelength region is a wavelength region around the metal oxide, in particular, a wavelength region in which a peak in the semi-metal-O2 functional group is likely to occur. When used with a stress agent, the compatibility is good and the coating workability is favorable.
Among these, from the viewpoint of obtaining a stable BLT, heat or a composition or thermosetting resin particles having a uniform particle diameter are preferable. The shape of particles generally used as a filler includes various shapes such as scales, spheres, and needles, but the shape is not particularly limited.

The content of the filler is not particularly limited, but is preferably 20 parts by weight or more and less than 80 parts by weight. This is because when the content is within the above range, the viscosity and thixotropy can be improved, and handling such as a coating operation to a semiconductor element becomes easy.

  The average particle diameter of the filler is preferably 0.1 μm or more and less than 10 μm. Particularly preferably, it is preferably 0.5 μm or more and less than 8 μm. This is because if the average particle size is less than the lower limit, the specific surface area of the particles increases, workability may deteriorate, and if the particle size is more than the upper limit, problems such as nozzle clogging and semiconductor element Inclination during assembly occurs, which is not preferable. In addition, the said average particle diameter can be measured using the particle size distribution measuring apparatus which used the laser diffraction / scattering method, for example.

A method for using the thermosetting adhesive composition used in the method for manufacturing a semiconductor device according to the present invention will be described using a specific example.
When the thermosetting adhesive composition used in the method for manufacturing a semiconductor device according to the present invention is a liquid adhesive, after premixing various components as described above, kneading is performed using three rolls, and vacuum is further applied. By defoaming, a liquid adhesive can be obtained. The obtained liquid adhesive is dispense-applied to, for example, a predetermined portion of a support (especially a lead frame) using a commercially available die bonder, and then a semiconductor element is mounted and heat-cured. Then, a semiconductor device can be obtained by wire bonding and transfer molding using a sealing resin whose main component is an epoxy resin or the like.

  In addition, it can use similarly to the above about a film adhesive. In this case, for example, after laminating a film adhesive on the support, a semiconductor device can be obtained by the same process.

Production method of thermosetting resin (Examples and Comparative Examples)
EXAMPLES The present invention will be specifically described below using examples, but is not limited thereto. The blending ratio is expressed in parts by weight. In both Examples and Comparative Examples, the following raw materials were blended in parts by weight shown in Table 1, and then kneaded and defoamed using three rolls to obtain a resin composition.

(Thermosetting resin)
Thermosetting resin 1: obtained by reaction of polycarbonate diol and methyl methacrylate obtained by reaction of 1,4-cyclohexanedimethanol / 1,6-hexanediol (= 3/1 (weight ratio)) and dimethyl carbonate Polycarbonate dimethacrylate compound (manufactured by Ube Industries, UM-90 (3/1) DM, molecular weight 1000, hereinafter thermosetting resin 1)
Thermosetting resin 2: 1,4-cyclohexanedimethanol monoacrylate as a compound having an alcoholic hydroxyl group (manufactured by Nippon Kasei Chemical Co., Ltd., CHDMMA, molecular weight 198, hereinafter thermosetting resin 2)
Thermosetting resin 3: Tetrahydrofurfuryl acrylate (manufactured by Kyoeisha Chemical Co., Ltd., light ester THF-A, molecular weight 156, hereinafter thermosetting resin 3)

(Low stress agent)
Maleic anhydride-modified polybutadiene (number average molecular weight 3100, acid value 74 meqKOH / g, Satomer) obtained by reaction of polybutadiene having a 1,4 vinyl bond ratio of 72% and maleic anhydride as a polymer or copolymer of a butadiene compound Ricobond 1731 manufactured by Co., Ltd., hereinafter low stress agent 1)

(Additive)
Additive 1: Coupling agent having epoxycyclohexyl (manufactured by Shin-Etsu Chemical Co., Ltd., KBM-303, hereinafter additive 1)
Additive 2: Coupling agent having a methacryl group (manufactured by Shin-Etsu Chemical Co., Ltd., KBM-503P, hereinafter additive 2)
Additive 3: Coupling agent having tetrasulfide (Daiso Co., Ltd., CABRUS4, hereinafter referred to as Additive 3)

(Radical initiator)
Radical initiator: 1,1-di (tert-butylperoxy) cyclohexane (manufactured by NOF Corporation, Perhexa CS, hereinafter radical initiator 1)

(filler)
It describes below about the oxide which consists of a metalloid element and an oxygen atom.
Oxide: average particle size 0.6 μm, specific surface area 5.0 m 2 / g, manufactured by Admatechs, amorphous silica

(Evaluation test)
The following evaluation tests were performed on the resin compositions of Examples and Comparative Examples obtained above. The evaluation results are shown in Table 1.

(Adhesive strength)
Using a resin composition shown in Table 1, a 5 × 5 mm silicon chip was mounted on a substrate and cured in an oven at 175 ° C. for 60 minutes (including a heating time of 30 minutes). Thereafter, the treatment was carried out in an oven at 175 ° C. for 4 hours, and after the moisture absorption treatment (85 ° C., 85%, 72 hours), the hot die shear strength at 260 ° C. was measured using an automatic adhesive force measuring apparatus. The case where the die shear strength when heated at 260 ° C. was 30 N / chip or more was regarded as acceptable. The unit of adhesive strength is N / chip.

(Elastic modulus)
About each resin composition of an Example and a comparative example, a 4x20x0.1mm film-like test piece is produced (hardening conditions 150 degreeC 30 minutes), and it is a tensile mode with a dynamic viscoelasticity measuring machine (DMA). Measurements were made at The measurement conditions are as follows.
Measurement temperature: -100 to 300 ° C
Temperature increase rate: 5 ° C / min Frequency: 10Hz
Load: 100mN
The case where the storage elastic modulus at −50 ° C. was 10000 MPa or less and the storage elastic modulus at 250 ° C. was 700 MPa or less was regarded as acceptable. The unit of elastic modulus is MPa. The results are shown in Table 1.

(Device recognition ability)
The thermosetting resin composition was applied on a resin support obtained by impregnating a fibrous support base material with a thermosetting resin, and the thickness was adjusted to 30 μm. Then, after photographing a sample with a digital scope microscope, the average value of R, B, and G of the thermosetting resin composition part was calculated.
The case of 100 or more and 255 or less in each numerical value of R, B, and G was set as the pass. The results are shown in Table 1.

(Reflow resistance 1)
It describes about the following reflow-proof evaluation using each resin composition (thing immediately after resin composition preparation) of an Example and a comparative example. Ball grid array (hereinafter referred to as MAPBGA) (body size: 10 × 12 mm, PKG thickness: 1.0 mm, substrate: bismaleimide triazine resin, thickness: 0.3 mm) using a mold array packaging method The substrate and the silicon chip were cured and bonded at 175 ° C. for 60 minutes. Furthermore, sealing was performed using a sealing material (Sumicon EME-G760L, manufactured by Sumitomo Bakelite Co., Ltd.) to manufacture a semiconductor device. This semiconductor device was subjected to a moisture absorption treatment at 60 ° C. and a relative humidity of 60% for 120 hours, followed by an IR reflow treatment (260 ° C., 10 seconds, 3 times reflow). The degree of peeling of the treated semiconductor device was measured by an ultrasonic flaw detector (transmission type). The case where the ratio of the peeled area to the chip area was less than 10% was regarded as acceptable. The unit of the peeled area is%. The results are shown in Table 1.
Semiconductor device: MAPBGA (10 x 12 mm)
Chip size: 7 × 7mm
Curing conditions for resin composition: 175 ° C. in oven for 60 minutes

(Reflow resistance 2)
Reflow resistance 1 except that a syringe (10 cc) filled with 30 g of the resin composition of Examples and Comparative Examples was used after being stored for 48 hours in a thermostat adjusted to 25 ° C. with the tip of the syringe facing down. Similarly, the degree of peeling was measured. The case where the ratio of the peeled area to the chip area was less than 10% was regarded as acceptable. The unit of the peeled area is%. The results are shown in Table 1.

The resin composition of the present invention is excellent in workability and storage stability at room temperature, has a low elastic modulus of the cured product and excellent in low stress, and has good adhesion characteristics and reflow peeling resistance. It can be used as a touch paste or a material for adhering heat dissipation members.

Claims (8)

Applying a thermosetting adhesive composition on a resin support obtained by impregnating a fibrous support material with a thermosetting resin;
Recognizing the applied shape and image processing;
A method for manufacturing a semiconductor device, comprising: a step of inspecting an appearance; and a step of loading a semiconductor element on a resin support obtained by impregnating a fibrous support material with a thermosetting resin via a thermosetting adhesive composition And the color [evaluation test 1] (R, B, G) related to shape device recognition of the thermosetting adhesive composition is (100 <R ≦ 255, 100 <B ≦ 255, 100 <G ≦ 255). A method of manufacturing a semiconductor device.
[Evaluation Test 1:
Sample molding conditions: A thermosetting resin composition is applied on a resin support obtained by impregnating a fibrous support base material with a thermosetting resin, and the thickness is adjusted to 30 μm.
Color measurement conditions; Measurement conditions: After taking a sample, an average value of R, B, and G of the thermosetting resin composition part is calculated. ]   The method of manufacturing a semiconductor device according to claim 1, wherein the thermosetting adhesive composition includes a compound having a functional group capable of radical polymerization.   The method for manufacturing a semiconductor device according to claim 1, wherein the thermosetting adhesive composition contains a compound having a hydroxyl group.   The method for manufacturing a semiconductor device according to claim 1, wherein the thermosetting adhesive composition contains a low-stress agent.   The method of manufacturing a semiconductor device according to claim 4, wherein the low-stress agent includes a butadiene polymer or copolymer. The thermosetting adhesive composition has at least one of a cyanate resin, an epoxy resin, a radical polymerizable acrylic resin, and a maleimide resin as a thermosetting resin. A method for manufacturing the semiconductor device according to the item.   The method for manufacturing a semiconductor device according to claim 1, wherein the thermosetting adhesive composition has titanium oxide. 8. The method of manufacturing a semiconductor device according to claim 7, wherein the titanium oxide is 0.7% by weight or more and less than 10% by weight with respect to the total weight of the thermosetting adhesive composition.