JPS627135A - Integrated circuit chip identification device - Google Patents
Integrated circuit chip identification deviceInfo
- Publication number
- JPS627135A JPS627135A JP14445785A JP14445785A JPS627135A JP S627135 A JPS627135 A JP S627135A JP 14445785 A JP14445785 A JP 14445785A JP 14445785 A JP14445785 A JP 14445785A JP S627135 A JPS627135 A JP S627135A
- Authority
- JP
- Japan
- Prior art keywords
- chip
- image
- color
- integrated circuit
- circuit chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は集積回路（以下、ＩＣと記す）のダイボンデ
ィング作業などの時に使用するＩＣチップ認識装置に関
し、特にＩＣチップ表面の有彩色被膜をカラーテレビカ
メラで撮像してＩＣチップの位置及び形状を認識するＩ
Ｃチップ認識装置に関するものである。
、 ９〔従来の技術〕
従来から、ＩＣ製造ラインに於いてＩＣチップ □
の位置及び形状をＩＣチップ認識装置により認識して、
金属リードフレーム又はフレーム基板などに搭載するダ
イボンデング作業が多く行なわれている。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to an IC chip recognition device used in die bonding work of integrated circuits (hereinafter referred to as IC), and in particular, to I recognize the position and shape of an IC chip by capturing an image with a color television camera.
The present invention relates to a C chip recognition device.
, 9 [Conventional technology] Conventionally, IC chips have been manufactured on the IC manufacturing line.
The position and shape of is recognized by an IC chip recognition device,
Die bonding work for mounting on metal lead frames or frame substrates is often performed.
第２図によって従来のＩＣチップ認識装置を説明する。A conventional IC chip recognition device will be explained with reference to FIG.
第２図に於いて、ＩＣチップ（１）全白黒テレビ（以下
１． Ｔ Ｖと記す−）カメラ（３）で撮像して白黒モ
□ニタＴＶに画像を映す。１． Ｃチップ（１）
と有彩色被膜（２）の表面光沢は周辺に対して明るい為
にＴＶ画像（５）はＩＣチップ（１）の輪郭内が白い画
像となシ、ＩＣチップの位置及形状全認識する事ができ
る。In Figure 2, an IC chip (1) captures an image using a full black and white television (hereinafter referred to as 1.TV) camera (3) and displays the image on a black and white monitor TV. 1. C chip (1)
Since the surface gloss of the chromatic coating (2) is brighter than the surrounding area, the TV image (5) is a white image within the outline of the IC chip (1), making it difficult to fully recognize the position and shape of the IC chip. can.
なお、有彩色被膜（２）はポリイミド被膜パターンで、
この被膜（２）は太陽などから放射されるα線などを遮
へいする効果があり、ＩＣメモリーの誤動作防止の目的
でＩＣメモリーの表面保護膜として用いられている膜で
ある。色はオレンジ色又は黄色である。In addition, the chromatic coating (2) is a polyimide coating pattern,
This film (2) has the effect of shielding alpha rays emitted from the sun and the like, and is a film used as a surface protective film of IC memories for the purpose of preventing IC memories from malfunctioning. The color is orange or yellow.
上記のような従来のＩＣチップ認識装置では、ＩＣチッ
プ（１）全個別切断分離する工程に於いてＩＣチップ（
１）の外形輪郭が複雑な形状となる為に、ＴＶ画像（５
）も第２図に示すように外形輪郭が複雑な形状となシ、
位置及び形状を正確に計測して認識する事は極めて困難
でおるなどの問題点があったＯ
この発明は、かかる問題点を解決するため罠なされたも
ので、有彩色被膜（２）は、ＩＣチップ（１）上の回路
パターンを写真製版技術を用いて製作する際に被膜パタ
ーンも同時に製版される為に、回路パターンに対して位
置及び形状は極めて正確に施されていることに着目し、
カラーＴＶカメラで有彩色被膜（２）全撮像して表示す
ることによ、り、ＩＣチップの位置及び形状を正確に計
測して認識することができるＩＣチップ認識装置を得る
こと金目的とする。In the conventional IC chip recognition device as described above, in the process of individually cutting and separating all the IC chips (1),
Since the outline of 1) is complicated, the TV image (5
) also has a complex outline as shown in Figure 2.
There were problems such as it was extremely difficult to accurately measure and recognize the position and shape. This invention was made to solve these problems, and the chromatic coating (2) We focused on the fact that when the circuit pattern on the IC chip (1) is produced using photolithography, the film pattern is also made at the same time, so the position and shape of the circuit pattern are extremely accurate. ,
The objective is to obtain an IC chip recognition device that can accurately measure and recognize the position and shape of an IC chip by capturing and displaying the entire chromatic coating (2) using a color TV camera. .
この発明に係るＩＣチップ認識装置は、ＩＣチップ−を
色彩撮像手段に依って撮像して色彩映像電気信号に変換
し、ＩＣチップ表面の特定な有彩色被膜の色彩映像電気
信号のみ抽出し次ＴＶ画像から、ＩＣチップの位置及び
形状を閣識するものである。The IC chip recognition device according to the present invention images an IC chip using a color imaging means, converts the image into a color video electrical signal, extracts only the color video electrical signal of a specific chromatic coating on the surface of the IC chip, and extracts only the color video electrical signal of a specific chromatic coating on the surface of the IC chip. The position and shape of the IC chip can be determined from the image.
この発明においては、ＩＣチップの表面を０色彩撮像手
段で撮像して、回路パターンに対して位置及び形状が極
めて正確に施されている有彩色被膜の色彩映像電気信号
のみ゛抽出したＴＶ画像からＩＣチップの位置及び形状
’を認識するから、極めて正確に計測して認識すること
ができる。In this invention, the surface of the IC chip is imaged by a zero-color imaging means, and only the color video electrical signals of the chromatic coating whose position and shape are extremely accurately applied to the circuit pattern are extracted from the TV image. Since the position and shape of the IC chip are recognized, it can be measured and recognized extremely accurately.
以下、第１図に示す一実施例にもとづき、この本発明の
詳細な説明する。The present invention will be described in detail below based on an embodiment shown in FIG.
第１図に於いて、ＩＣチップ（１）を色彩撮像手段であ
るカラーＴＶカメラ（６）で撮像して、映像信号処理手
段であるカラー画像メモリ−ユニット（７）に入力する
。カラー画像メモリ−ユニット（７）は、カラー映像信
号から有彩色被膜（２）の特定な色彩映像電気信号のみ
抽出して、白黒モニタＴ１４）へ出力する。In FIG. 1, an image of an IC chip (1) is taken by a color TV camera (6), which is a color imaging means, and input to a color image memory unit (7), which is a video signal processing means. The color image memory unit (7) extracts only the specific color image electric signal of the chromatic film (2) from the color image signal and outputs it to the monochrome monitor T14).
白黒モニタＴ１４）に映されたＴＶ画像（５ａ）は、Ｉ
Ｃチップ（１）の表面に設けられた有彩色被膜（２）の
部分のみ白い画像となる。The TV image (5a) shown on the black and white monitor T14) is
Only the portion of the chromatic coating (2) provided on the surface of the C chip (1) becomes a white image.
有彩色被膜（２）は、ＩＣチップ（１）上の回路パター
ンを写真製版技術を用いて製作する際に被膜パターンも
同時に製版される為に、回路パターンに対して位置及び
形状は極めて正確に施こされている・従って、白黒モニ
タＴＶ（５）に映された画像（５ａ）からＩＣチップ（
１）の位置、即ち回路パターンに対する正確な位置及形
状を認識することができる。When the circuit pattern on the IC chip (1) is produced using photolithography, the chromatic coating (2) is also plate-made at the same time, so the position and shape of the chromatic coating (2) can be extremely accurately determined with respect to the circuit pattern. Therefore, the IC chip (
1) The position, that is, the accurate position and shape of the circuit pattern can be recognized.
カラー画像メモリユニット（７）は、ＲＧＢカラーＴＶ
カメラ（６）で映した映像を静止画像に記憶する機能が
あり、記憶した赤・緑・青の３色記憶画像状態をコンピ
ュータで３色レベルを演算処理して任意のカラー映像信
号を出力するものである。この画像メモリユニット（７
）としては、市販されている地上通信機製［イメー・ジ
フレームメモリＪＩＭ−３０００、シパンク鯛「テジタ
ルビデオメモリ」ＶＭＯ２ＡＩ、エムティティ製「イメ
ージプロセッサー Ｊ ＩＰ５１２などを使うことがで
きる。The color image memory unit (7) is an RGB color TV
It has a function to store the image captured by the camera (6) as a still image, and uses a computer to process the three color levels of the stored three-color memory image state of red, green, and blue and output an arbitrary color video signal. It is something. This image memory unit (7
), commercially available image frame memory JIM-3000 manufactured by Terrestrial Communication Equipment, ``Digital Video Memory'' VMO2AI manufactured by Shipunku Tai, ``Image Processor J IP512'' manufactured by Mtiti, etc. can be used.
この発明は以上説明し、友通り、ＩＣチップを色彩撮像
手段によυ撮像して色彩映像電気信号に変換し、ＩＣチ
ップ表面の特定な有彩色被膜の色彩映像電気信号のみ抽
出したＴＶ画像から、ＩＣチップの位置及び形状をＶ識
するようにしたので、極めて正確に計測して認識するこ
とができる。As described above, this invention is based on a TV image in which an IC chip is imaged by a color imaging means and converted into a color video electrical signal, and only the color video electrical signal of a specific chromatic coating on the surface of the IC chip is extracted. Since the position and shape of the IC chip can be recognized by V, it is possible to measure and recognize the IC chip extremely accurately.
第１図はこの発明の一実施例のブロック構成を示す構成
図、第２図は従来のＩＣチップ認識装置のブロック構成
を示す構成図である。
図中、（１）はＩＣチップ、（２）は有彩色被膜、（４
）は白黒モニｐＴＶｓ （５ｍ）はＴＶ画像、（６）
はカラーＴＶカメラ、（７）はカラー画像メモリュニツ
、トである。
なお、図中、同一符号は同一または相当部分を示す。
代理人 弁理士 佐 藤 正 年
第１図
ム
ロ：カラーＴＶ７７メラ
７！刀ラ一画イ象
メ七リーユニットFIG. 1 is a block diagram showing the block structure of an embodiment of the present invention, and FIG. 2 is a block diagram showing the block structure of a conventional IC chip recognition device. In the figure, (1) is an IC chip, (2) is a chromatic coating, and (4) is an IC chip.
) is black and white monitor pTVs (5m) is TV image, (6)
is a color TV camera, and (7) is a color image memory. In addition, in the figures, the same reference numerals indicate the same or corresponding parts. Agent: Tadashi Sato, Patent Attorney Figure 1 Muro: Color TV77 Mela 7! Katara one stroke elephant mechili unit
Claims (1)
号に変換して表示装置に表示し、前記表示装置に表示さ
れた集積回路チップの画像により集積回路チップの位置
及び形状を認識する集積回路チップ認識装置において、
集積回路チップの表面を撮像して色彩映像電気信号に変
換する色彩撮像手段と、この色彩撮像手段の出力信号か
ら集積回路チップ表面の特定な有彩色被膜の色彩映像電
気信号のみ抽出して前記表示装置に出力する映像信号処
理手段とを備えたことを特徴とする集積回路チップ認識
装置。Integrated circuit chip recognition that captures an image of the surface of an integrated circuit chip, converts it into a video electrical signal and displays it on a display device, and recognizes the position and shape of the integrated circuit chip from the image of the integrated circuit chip displayed on the display device. In the device,
a color imaging means for capturing an image of the surface of the integrated circuit chip and converting it into a color video electrical signal, and extracting only the color video electrical signal of a specific chromatic coating on the surface of the integrated circuit chip from the output signal of the color imaging means and displaying the extracted color video electrical signal. An integrated circuit chip recognition device comprising: video signal processing means for outputting to the device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14445785A JPS627135A (en) | 1985-07-03 | 1985-07-03 | Integrated circuit chip identification device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14445785A JPS627135A (en) | 1985-07-03 | 1985-07-03 | Integrated circuit chip identification device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS627135A true JPS627135A (en) | 1987-01-14 |
Family
ID=15362695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14445785A Pending JPS627135A (en) | 1985-07-03 | 1985-07-03 | Integrated circuit chip identification device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS627135A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012164724A (en) * | 2011-02-04 | 2012-08-30 | Sumitomo Bakelite Co Ltd | Semiconductor device manufacturing method |
-
1985
- 1985-07-03 JP JP14445785A patent/JPS627135A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012164724A (en) * | 2011-02-04 | 2012-08-30 | Sumitomo Bakelite Co Ltd | Semiconductor device manufacturing method |
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