JP2012160995A5 - - Google Patents

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Publication number
JP2012160995A5
JP2012160995A5 JP2011020413A JP2011020413A JP2012160995A5 JP 2012160995 A5 JP2012160995 A5 JP 2012160995A5 JP 2011020413 A JP2011020413 A JP 2011020413A JP 2011020413 A JP2011020413 A JP 2011020413A JP 2012160995 A5 JP2012160995 A5 JP 2012160995A5
Authority
JP
Japan
Prior art keywords
electrode
resonator element
element according
vibrating
vibrating piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011020413A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012160995A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011020413A priority Critical patent/JP2012160995A/ja
Priority claimed from JP2011020413A external-priority patent/JP2012160995A/ja
Priority to US13/363,475 priority patent/US8581669B2/en
Priority to CN2012100224198A priority patent/CN102629861A/zh
Publication of JP2012160995A publication Critical patent/JP2012160995A/ja
Publication of JP2012160995A5 publication Critical patent/JP2012160995A5/ja
Pending legal-status Critical Current

Links

JP2011020413A 2011-02-02 2011-02-02 振動片、振動子、発振器及び電子機器 Pending JP2012160995A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011020413A JP2012160995A (ja) 2011-02-02 2011-02-02 振動片、振動子、発振器及び電子機器
US13/363,475 US8581669B2 (en) 2011-02-02 2012-02-01 Vibrator element, vibrator, oscillator, and electronic apparatus
CN2012100224198A CN102629861A (zh) 2011-02-02 2012-02-01 振动片、振子、振荡器以及电子设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011020413A JP2012160995A (ja) 2011-02-02 2011-02-02 振動片、振動子、発振器及び電子機器

Publications (2)

Publication Number Publication Date
JP2012160995A JP2012160995A (ja) 2012-08-23
JP2012160995A5 true JP2012160995A5 (cg-RX-API-DMAC7.html) 2014-03-06

Family

ID=46841146

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011020413A Pending JP2012160995A (ja) 2011-02-02 2011-02-02 振動片、振動子、発振器及び電子機器

Country Status (1)

Country Link
JP (1) JP2012160995A (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7053313B2 (ja) * 2017-03-29 2022-04-12 日東電工株式会社 圧電デバイス、及び圧電デバイスの製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4328853B2 (ja) * 2003-01-22 2009-09-09 独立行政法人産業技術総合研究所 圧電素子およびその製造方法
JP2010081156A (ja) * 2008-09-25 2010-04-08 Seiko Epson Corp 圧電薄膜振動片、圧電薄膜振動片の製造方法、圧電薄膜振動子及び発振回路

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