JP2015087263A5 - - Google Patents

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Publication number
JP2015087263A5
JP2015087263A5 JP2013226087A JP2013226087A JP2015087263A5 JP 2015087263 A5 JP2015087263 A5 JP 2015087263A5 JP 2013226087 A JP2013226087 A JP 2013226087A JP 2013226087 A JP2013226087 A JP 2013226087A JP 2015087263 A5 JP2015087263 A5 JP 2015087263A5
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JP
Japan
Prior art keywords
vibration
base
vibration mode
resonator element
element according
Prior art date
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Application number
JP2013226087A
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English (en)
Japanese (ja)
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JP2015087263A (ja
JP6318550B2 (ja
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Publication of JP2015087263A5 publication Critical patent/JP2015087263A5/ja
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JP2013226087A 2013-10-31 2013-10-31 振動片、角速度センサー、電子機器および移動体 Active JP6318550B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013226087A JP6318550B2 (ja) 2013-10-31 2013-10-31 振動片、角速度センサー、電子機器および移動体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013226087A JP6318550B2 (ja) 2013-10-31 2013-10-31 振動片、角速度センサー、電子機器および移動体

Publications (3)

Publication Number Publication Date
JP2015087263A JP2015087263A (ja) 2015-05-07
JP2015087263A5 true JP2015087263A5 (cg-RX-API-DMAC7.html) 2016-12-15
JP6318550B2 JP6318550B2 (ja) 2018-05-09

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ID=53050186

Family Applications (1)

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JP2013226087A Active JP6318550B2 (ja) 2013-10-31 2013-10-31 振動片、角速度センサー、電子機器および移動体

Country Status (1)

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JP (1) JP6318550B2 (cg-RX-API-DMAC7.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9654082B2 (en) 2015-04-28 2017-05-16 Seiko Epson Corporation Vibrator, oscillator, electronic device for controlling internal resonance between inherent vibration modes
JP2017200015A (ja) 2016-04-26 2017-11-02 セイコーエプソン株式会社 振動子、発振器、電子機器および移動体
JP6620243B2 (ja) * 2016-07-26 2019-12-11 京セラ株式会社 角速度センサ、センサ素子および多軸角速度センサ
US11112247B2 (en) 2016-07-26 2021-09-07 Kyocera Corporation Angular velocity sensor, sensor element, and multi-axis angular velocity sensor
CN106767747B (zh) * 2016-12-28 2019-09-27 清华大学 一种基于参量激励的数字式速率积分陀螺控制方法和平台

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013030850A (ja) * 2011-07-26 2013-02-07 Seiko Epson Corp 振動デバイスおよび電子機器
JP2013096882A (ja) * 2011-11-02 2013-05-20 Seiko Epson Corp 物理量検出素子、物理量検出装置、および電子機器

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