JP2012158807A - Vertical carrying type etching apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vertical carrying type etching apparatus in which the leakage of an etching liquid to the outside of a case is reduced and etching quality is increased.SOLUTION: The etching apparatus is composed of: two lines of carrier roller columns 10, 11, 12, 20, 21, 22; a power input gear set 30; roller column pedestals 40, 41; etching liquid nozzles 50, 51; and a case 60. The power input gear set is provided at each top of the two lines of carrier roller columns, and is composed of: an upper layer gear set 31 operated by outside power; and a lower layer gear set 32 conducting power to the lower part. Further, final power transmission gears rotating in the opposite directions of both sides of the lower layer gear set are inserted into the tops of the corresponding carrier roller columns, the bottoms of the respective carrier roller columns are fixed to the bottom face in the case by inserting the corresponding roller column pedestals, and the roller column pedestals at the bottoms of a line of carrier roller columns are stretched toward the middles of the bottoms of the two lines of carrier roller columns to form carrier rollers rolling the bottom edge of a circuit board.

Description

The present invention is a conventional etching apparatus for circuit board industrial equipment which has improved its drawbacks.

Today's electronic technology is becoming finer and more precise, and it is possible to mount a circuit composed of a large number of electronic elements on a single elaborate chip, and it has more functions. Along with that, electronic products are becoming lighter, thinner, and smaller, and in order to realize them, the copper foil circuit formed by etching on the board surface of the circuit board on which electronic elements or chips are mounted is also fine and precise. However, in the case of a general horizontal etching apparatus, an etching solution accumulates on the plate surface, so that uniform etching cannot be performed and a fine circuit cannot be formed. Therefore, a vertical transfer type etching apparatus has appeared instead of the method of transferring and etching a circuit board in the horizontal direction. According to this method, by vertically transporting the circuit board to be etched, the sprayed etchant quickly slides down from the plate surface, so that the etchant does not accumulate on the plate surface, and the etching accuracy and quality can be improved. it can.

The conventional vertical transfer etching apparatus mainly includes two rows of upright transfer roller columns sandwiching the circuit board, a power input gear set that transmits rotational power to the transfer roller columns of each row, and two rows of transfer rollers. An etching solution nozzle that is vertically provided outside the column and communicates with the etching solution pipe, a plurality of roller column bases, and a case. However, although many components of this device are mounted in the case, the power input gear set is the first helical gear set from which power is first transmitted from the power device, from which each single gear set is transmitted. Power is transmitted from the top of the pillar at a horizontal height, and this power input gear set is a single layer gear set that is exposed entirely from the case top plate. For this reason, in order to connect to the power transmitted from the external power unit, the top plate of the case must be provided with a hole corresponding to each of the top portions of the first row of transport roller columns. Only then can the top of each column protrude from the top plate of the case and be connected to a gear that transmits the power of the power input gear set.

Since the number of through-hole bearings corresponding to at least the tops of all the pillars must be provided at the top of the case, the etching solution and the etching solution spouted in all directions during the etching operation with the etching solution are used. The generated steam is likely to leak to the outside constantly from the gaps of many through-hole bearings that penetrate the top of the column at the top of the case, and the liquid and steam contaminate the surrounding environment. Not only does this impair the image of the circuit board etching industry's approach to environmental protection, it also reduces the quality of the etching.

In addition, regarding the two rows of transport roller pillars that are upright and sandwich the circuit board, the same roller pillar base is inserted vertically into the corresponding position at the bottom of each transport roller pillar that sandwiches the circuit board to be etched. Each conveyance roller column is fixed to the bottom surface in the case by the column base. In addition, these roller column bases are provided with a gear set that moves a conveyance roller that rolls the bottom edge of the circuit board to be etched and conveyance roller columns at both ends. And the conveyance roller column which received the power of the input gear set on the top on the roller column base not only transmits the power to the conveyance roller via the gear set of the roller column base, but also the roller column base It must be transmitted to the other transport roller column via a gear set. Therefore, since the path through which power is transmitted from one row of transport roller columns to another row of transport roller columns is too long, the amount of power consumption is large and it is difficult to cope with the frictional force that causes more roller columns to rotate.

  In view of the above, an object of the present invention is to provide a vertical transfer etching apparatus that can prevent the etchant from leaking out of the case and improve the etching quality.

  Most conventional etching equipment uses helical gears. In the present invention, the use of super gears not only ensures power transmission but also provides an advantage for ordinary machine maintenance.

A vertical transfer etching apparatus according to the present invention mainly includes two substantially upright transfer roller columns (supporting the substrate vertically) for etching a circuit board, a power input gear set, and a plurality of roller column bases. And a plurality of etching solution nozzles and a case. The power input gear set is provided at the top of the two rows of conveying roller columns, and is constituted by an upper layer gear set that operates by external power and a lower layer gear set that transmits power downward. In addition, the final power transmission gear that rotates in opposite directions on both sides of the lower gear set is inserted into the top of the corresponding transport roller column, and the bottom of each transport roller column is inserted into the case by inserting the corresponding roller column base. The roller column pedestal fixed to the bottom of the inner row and extending toward the middle of the bottom of the two rows of transfer roller columns forms a transfer roller that rolls the bottom edge of the circuit board to be etched To do. All components except the upper gear set are sealed in the case. Thereby, it becomes unnecessary to provide the top plate of the case with holes corresponding to the tops of the transport roller columns one by one.

Further, in the vertical conveyance type etching apparatus according to the present invention, the opening of the final power transmission gear of the lower gear set of the power input gear set is inserted into the top of the two rows of conveyance roller columns, and the two rows of conveyance roller columns are It receives power from the lower gear set almost simultaneously. In addition, the roller column base at the bottom of the single row conveyance roller column extends toward the middle of the bottom of the two rows of conveyance roller columns to form a conveyance roller that rolls the bottom edge of the circuit board to be etched. A gear set that meshes with each other is provided between the conveyance roller corresponding to the roller column base and the conveyance roller column on the roller column base, and at this time, the tooth portion meshes with the conveyance roller column of the other row. Instead, the power at the bottom of the transport roller column is only transmitted to the transport roller. As a result, in the conventional etching apparatus, first, power is transmitted to one row of transport roller columns, and the power is transmitted to the transport rollers via the roller column base at the bottom of the transport roller column, and further to the other row of transport roller columns. Therefore, the present invention overcomes the disadvantage that the power transmission distance is long and the resistance is large.

It is the perspective view which showed the external appearance of the vertical conveyance type etching apparatus by this invention. 1 is an exploded perspective view showing a structure of a vertical transfer etching apparatus according to the present invention. It is the enlarged view which showed a part of vertical conveyance type etching apparatus by this invention. It is the disassembled perspective view which showed the roller column base and conveyance roller column of the vertical conveyance type etching apparatus by this invention. It is the side view which showed the operation | movement which the vertical conveyance type etching apparatus by this invention conveys a circuit board in the state which removed the case board and the etchant nozzle. It is the front view which showed the operation | movement which the vertical conveyance type etching apparatus by this invention conveys a circuit board in the state which removed the case board. It is the bird's-eye view which showed the state which removed the case board of the vertical conveyance type etching apparatus by this invention. It is the disassembled perspective view which showed the structure of Example 2 of the roller column base and conveyance roller column of the vertical conveyance type etching apparatus by this invention. It is the perspective view which showed the state which combined Example 2 of the roller column base and conveyance roller column of the vertical conveyance type etching apparatus by this invention. It is the bird's-eye view which showed the state which removed the case board of Example 2 of the vertical conveyance type etching apparatus by this invention.

Example 1
Please refer to FIG. 1 to FIG. FIG. 1 is a perspective view showing the appearance of a vertical transfer etching apparatus according to the present invention, FIG. 2 is an exploded perspective view showing the structure of the vertical transfer etching apparatus according to the present invention, and FIG. FIG. 4 is an enlarged view showing a part of a vertical conveyance type etching apparatus according to the invention, and FIG. 4 is an exploded perspective view showing a roller column base and a conveyance roller column of the vertical conveyance type etching apparatus according to the present invention. First, an explanation will be given by taking an example of an apparatus for etching a general circuit board. As can be seen from FIGS. 1 to 4, the vertical transfer etching apparatus according to the present invention mainly includes two substantially upright transfer roller columns 10, 11, 12, 20, 21, 22 and a power input gear set 30. And a plurality of roller column bases 40, 41, 42, 43, a plurality of etching solution nozzles 50, 51, and a case 60. The power input gear set 30 is provided at the top of the two rows of transport roller pillars 10, 11, 12, 20, 21, and 22, and an upper layer gear set 31 that is operated by external power and a lower layer gear that transmits power downward. It consists of set 32.

The upper gear set 31 is provided at the upper end of the case top plate 61, and includes a main driving bevel gear 33 and a driven bevel gear 34. The main driving bevel gear 33 is connected to an input shaft 82 (rotation main shaft) of the external power unit 91 with each constant. The driven bevel gear 34 is engaged with the main driving bevel gear 33 in the vertical direction. The driven bevel gear 34 is connected every linear distance (about 1 meter). A through hole 68 for penetrating the shaft boss portion 34A is provided at a location corresponding to the shaft boss portion 34A of the driven bevel gear 34 in the case 60. The lower gear set 32 includes transmission gears 32A, 32B, 32C, and 32D that are meshed with each other and arranged in a row, and a final power transmission gear 32a that is disposed near the transmission gears 32A, 32B, 32C, and 32D. 32b, 32c, and 32d are meshed with each other. A shaft 32E is provided at the center of the transmission gear 32D provided below the shaft boss portion 34A, the shaft 32E is inserted into the upper shaft boss portion 34A, and the remaining transmission gears 32A, 32B, At the center of 32D, threaded suspension shafts 35A, 35B, and 35C are provided, and the threaded suspension shafts 35A, 35B, and 35C are round countersunk screw holes 62, 63 provided at positions where the bottom portion of the case top plate 61 is suspended. 64. Further, the final power transmission gear meshed with the next sequential transmission gear in the same row (for example, 32B next to 32A in the figure) is arranged on the opposite side (for example, 32a and 32b in the figure are arranged on different sides). The final power transmission gears 32a, 32b, 32c, and 32d are alternately arranged on both sides of the transmission gears 32A, 32B, 32C, and 32D and rotate in opposite directions. Further, sleeves 36A, 36B, 36C having openings facing downward and screws connected to the top ends by bearings are provided at the centers of the final power transmission gears 32a, 32b, 32c, 32d. , 36C are screwed into round countersunk screw holes 65, 66, 67 provided at positions where the bottom of the case top plate 61 is suspended. Moreover, the opening part of sleeve 36A, 36B, 36C is inserted in the top part of the corresponding conveyance roller pillar 10, 11, 12, 20, 21, 22 as shown in FIG.

Moreover, the bottom part of each conveyance roller pillar 10,11,12,20,21,22 is fixed to the bottom face in case 60 by inserting corresponding roller pillar base 40,41,42,43, and a row of conveyance roller The roller column bases 40 and 42 at the bottom of the columns 10, 11, and 12 extend toward the middle of the bottom of the two rows of transport roller columns 10, 11, 12, 20, 21, and 22 and are etched. A conveying roller 80 for rolling the bottom edge is formed. The plurality of etchant nozzles 50 and 51 are provided upright on the outer sides of the two rows of transport roller columns 10, 11, 12, 20, 21, and 22, and two adjacent transport roller columns (10 11, 11 and 12, 20 and 21, 21 and 22), and the bottom openings of the etching solution nozzles 50 and 51 penetrate the case 60 and communicate with the etching pipe 70. All components except the upper gear set 31 are sealed in the case 60. As a result, the number of holes in the case top plate 61 for attaching the shafts for moving the transport roller pillars 10, 11, 12, 20, 21, and 22 can be reduced. As a result, the etching spouted from the etching solution nozzles 50 and 51 can be performed. It is possible to reduce the leakage of the liquid from the gap between the holes, and to reduce the impurity outside the case 60 from entering the case through the gap between the holes, thereby reducing the probability that the etching solution becomes dirty.

For the detailed configuration of the roller column bases 40, 41, 42, and 43, refer to the exploded perspective view showing the roller column base and the transport roller column in FIG. The roller column bases 40, 41, 42, 43 are arranged at positions corresponding to the two rows of transport roller columns 10, 11, 20, 21 and form two rows of bases having different structures. Each roller column base 40, 41, 42, 43 is provided with a column cover rotating plate 40 </ b> A into which the bottom ends of the conveyance roller columns 10, 11, 20, 21 are inserted downward, and a row of conveyance roller columns 10. The roller column bases 40, 42 provided at the bottom of 11 are extended toward the middle of the bottom of the two rows of transfer roller columns 10, 11, 20, 21 to convey the bottom edge of the circuit board to be etched. Roller 80 is formed. The roller surface of the conveyance roller 80 is perpendicular to the surface of the column cover rotating disk 40A adjacent thereto, and the central axis of the conveyance roller 80 is lower than the height of the disk surface of the column cover rotating disk 40A. Further, the contact surfaces of the transport roller 80 and the column cover rotating disk 40A adjacent thereto that contact each other during rotation form a gear set 81 that meshes with each other and rotates. Then, after the power is simultaneously transmitted downward from the two rows of transport roller columns 10, 11, 20, and 21, only the power at the bottom of the row of transport roller columns 10 and 11 is set to the gear set of the roller column bases 40 and 42. It is transmitted via 81 and rotates the transport roller 80, so that the power does not interfere with the transport roller columns 10 and 11 in the other rows.

  Regarding the transfer operation of the apparatus of the present invention, reference is made to FIGS. FIG. 5 is a side view showing the operation of transferring the circuit board by the vertical transfer etching apparatus according to the present invention with the case plate and the etchant nozzle removed, and FIG. 6 shows the vertical transfer etching apparatus according to the present invention. FIG. 7 is a front view showing the operation of transferring the circuit board with the case plate removed, and FIG. 7 is an overhead view showing the state of removing the case plate of the vertical transfer etching apparatus according to the present invention. First, when the apparatus of the present invention is activated, each of the transport roller pillars 10, 11, 12, 20, 21, 22 and the transport roller 80 rotate by receiving power, so that the circuit board 90 is in a vertical state. It enters from the entrance and is sandwiched between two rows of transport roller pillars 10, 11, 12, 20, 21, and 22. Then, the edge of the bottom plate of the circuit board 90 in the vertical state comes into contact with the edge of the top of the transport roller 80, and the sandwiched circuit board 90 is automatically transported forward. At that time, as shown in FIG. 6, the etching liquid nozzles 50 and 51 on both sides perform etching of the circuit board 90 by continuously injecting the etching liquid. Further, as clearly seen from the overhead view of FIG. 7, the etching solution nozzles 50 and 51 on both sides are provided upright outside the two rows of transport roller columns 10, 11, 12, 20, 21 and 22. In addition, since the two adjacent transport roller columns (10 and 11, 20 and 21) are alternately arranged, the jetted etching solution is transported roller columns 10, 11, 12, 20, 21, The surface of the circuit board 90 can be sprayed directly without being obstructed by the 22 roller surfaces.

(Example 2)
In the first embodiment described above, a thick circuit board that is difficult to bend during conveyance has been described as an example. However, the vertical conveyance etching apparatus according to the present invention can process a thin circuit board having a soft hardness. Can be changed. Please refer to FIG. FIG. 8 is an exploded perspective view showing the structure of a roller column base and a conveyance roller column of Example 2 of the vertical conveyance type etching apparatus according to the present invention. The roller column bases 40 and 41 are arranged corresponding to the respective positions of the two rows of transport roller columns 10, 11, 20, and 21 to form two rows of bases having different structures. In addition, two pillar cover rotating plates 40B and 40C into which the bottom ends of the conveyance roller pillars 10, 11, 20, and 21 are inserted downward are provided on the pedestal surface close to the conveyance place of the roller pillar pedestals 40 and 41, respectively. The roller column bases 40 and 41 provided at the bottoms of the one row of transport roller columns 10 and 11 are arranged corresponding to the lateral positions of the column cover rotating plates 40B and 40C. Moreover, the roller column bases 40 and 41 are extended toward the middle of the bottoms of the two rows of conveyance roller columns 10, 11, 20, and 21 to form conveyance rollers 83 and 84 that roll the bottom edge of the circuit board to be etched. The roller surfaces of the transport rollers 83 and 84 are perpendicular to the surface of the column cover rotating plates 40B and 40C adjacent thereto, and the central axes of the transport rollers 83 and 84 are the surface of the plate surfaces of the column cover rotating plates 40B and 40C. Lower than height. Further, the contact surfaces of the transport rollers 83 and 84 and the column cover rotating disks 40B and 40C adjacent to the transport rollers 83 and 84 that are in contact with each other during rotation form a gear set 85 that meshes with each other and rotates. Then, after the power is simultaneously transmitted downward from the two rows of transport roller columns 10, 11, 20, and 21, the gear set 85 of the roller column base 40 is moved only by the power of the bottom of the one row of transport roller columns 10 and 11. , The transport rollers 83 and 84 are rotated, and the transport roller columns 20 and 21 in the other rows do not interfere with each other.

In addition, driven gears 44 and 45 whose center forms a column cover are provided on the same side of the roller column bases 40 and 41 as the column cover rotary plates 40B and 40C, and the bottom plate of the column cover rotary plates 40B and 40C is provided. A portion close to the center extends downward to form a drive gear 46, and the drive gears 46, 45 corresponding to the roller column bases 40, 41, 42, 43 are driven between the drive gears 46. An indirect power transmission gear 47 meshed with the gear 46 and the driven gears 44 and 45 is provided, whereby the power of the column cover rotating disks 40B and 40C is transmitted to the driven gears 44 and 45. The shaft covers of the driven gears 44 and 45 are inserted with the bottoms of the additional transport roller columns 10, 11, 10 </ b> A, 11 </ b> A, and the roller column bases 40, 41 have four transport roller columns 10, 11, 10A, 11A are inserted, and the four transport roller columns 10, 11, 10A, 11A are arranged on the roller column bases 40, 41 in a state where they are densely mixed in the front and rear and the top and bottom of the transport roller. . Thereby, a thin circuit board can be further pinched and conveyed.

The two rows of transport roller columns 10, 11, 12, 20, 21, 22 and the plurality of transport roller columns 10A, 11A added are inserted into the roller column bases 40, 41, 42 (42 is not shown) 9) and are arranged corresponding to the etching solution nozzles 50 and 51. As shown in the perspective view of FIG. 9, the etchant nozzles 50 and 51 are arranged in a part on the outer side of the roller column bases 42 and 43 in a staggered manner with a certain interval. Moreover, the etching solution nozzles 50 and 51 corresponding to the roller column bases 42 and 43 directly spray the etching solution so that the etching solution is directly sprayed by not providing the plurality of additional transport roller columns 10A and 11A. Create a partially open space. The overall arrangement is shown in the overhead view of FIG. As can be clearly seen from this figure, the etching solution nozzles 50 and 51 are arranged in a staggered manner at a certain interval on a part of the outside of the roller column bases 42 and 43. Further, the conveyance roller columns 10A and 11A are not provided in front of the nozzles of the etching solution nozzles 50 and 51, and the etching solution can be directly sprayed. 9, that is, the driving structure of the top of the transport roller pillars 10, 11, 12, 20, 21, and 22 in the region A in FIG. 10 is substantially the same as the driving method of the thick circuit board described above. However, the only difference is that the sleeves 36A, 36B, and 36C of the final power transmission gears 32a, 32b, 32c, and 32d are not inserted into the tops of the added plurality of transport roller pillars 10A and 11A, and run idle. Thereby, a thin circuit board can be conveyed, and at the same time, an etching operation can be performed.

10, 11, 10A, 11A, 12, 20, 21, 22 Conveyor roller column 30 Power input gear set 31 Upper layer gear set 32 Lower layer gear sets 32A, 32B, 32C, 32D Transmission gears 32a, 32b, 32c, 32d Final power transmission Gear 32E Shaft 33 Main drive bevel gear 34 Driven bevel gear 34A Shaft boss 35A, 35B, 35C Screwed suspension shaft 36A, 36B, 36C Sleeve 40, 41, 42, 43 Roller column base 40A, 40B, 40C Column cover rotating disk 44, 45 Drive gear 46 Drive gear 47 Indirect power transmission gear 50, 51 Etch solution nozzle 60 Case 61 Case top plate 62, 63, 64, 65, 66, 67 Round countersunk screw hole 68 Through hole 70 Etching pipe 80 Conveying roller 81, 85 Gear set 82 Input shaft 83, 84 Conveyance row Over 90 circuit board 91 external power unit

Claims (8)

This is a vertical transfer type etching apparatus composed of two rows of transfer roller pillars sandwiching a circuit board to be etched and almost upright, a power input gear set, a plurality of roller column bases, a plurality of etchant nozzles, and a case. And
The power input gear set is provided at the top of the two rows of conveying roller pillars, and is composed of an upper gear set that operates by external power and a lower gear set that transmits power to the lower side, and is opposite to both sides of the lower gear set. The final power transmission gear rotating in the direction is inserted into the top of the corresponding roller roller column, and the bottom of each roller roller column is fixed to the bottom surface in the case by inserting the corresponding roller column base, The roller column pedestal at the bottom of the conveyance roller column extends toward the middle of the bottom of the two rows of conveyance roller columns, forms a conveyance roller that rolls the bottom edge of the circuit board to be etched, all except the upper gear set The vertical transfer type etching apparatus is characterized in that the constituent members are sealed in a case. The upper gear set is provided at the upper end of the case top plate, and is composed of a main driving bevel gear and a driven bevel gear. The main driving bevel gear is connected to the input shaft of the external power unit at each fixed linear distance, and the driven bevel gear is The through-hole for penetrating the shaft boss portion is provided at a position corresponding to the shaft boss portion of the driven bevel gear in the case, which is meshed with the main bevel gear in the vertical direction. Vertical transfer type etching equipment. The lower gear set is formed below the shaft boss portion by meshing a transmission gear meshed with each other and a final power transmission gear arranged beside the transmission gear. A shaft is provided at the center of the transmission gear, the shaft is inserted into the upper shaft boss, and a threaded suspension shaft is provided at the center of the remaining transmission gear, and the threaded suspension shaft is connected to the case top plate. The final power transmission gear that is screwed into the round countersunk screw hole provided at the bottom hanging position and meshed with the next sequential transmission gear in the same row is arranged on the opposite side, so that the final power transmission gear is the transmission Staggered on both sides of the gear and rotate in opposite directions, with the opening facing down at the center of the final power transmission gear And a sleeve having a screw connected to the top end by a bearing.The screw at the top of the sleeve is screwed into a round countersunk screw hole provided at a position where the bottom of the case top plate is suspended, and the opening of the sleeve is The vertical transfer etching apparatus according to claim 2, wherein the vertical transfer etching apparatus is inserted into a top of a corresponding transfer roller column. The roller column base is disposed at a position corresponding to the two rows of transport roller columns, and forms two rows of bases having different structures, and the bottom end of the transport roller column is downward in each roller column base. The column cover rotating disk to be inserted is provided, and the roller column pedestal provided at the bottom of one row of conveyance roller columns extends toward the middle of the bottom of the two rows of conveyance roller columns, and the bottom edge of the circuit board to be etched The roller surface of the transport roller is perpendicular to the surface of the column cover rotating disk adjacent thereto, and the center axis of the transport roller is lower than the height of the surface of the column cover rotating disk, The contact surfaces of the transport roller and the column cover rotating disk adjacent to each other that come into contact with each other during rotation form a gear set that meshes with each other and rotates. 2. The vertical according to claim 1, wherein after being transmitted downward, only the power of the bottom of the row of conveying roller columns is transmitted through the gear set of the roller column base to rotate the conveying roller. Transport-type etching equipment. 5. The vertical according to claim 4, wherein the etchant nozzles are provided upright on the outer sides of two rows of transport roller columns, and are disposed between each two adjacent transport roller columns. Transport-type etching equipment. The roller column pedestal is arranged corresponding to each position of the two rows of transport roller columns, and forms two rows of pedestals with different structures, on the pedestal surface close to the transport location of each roller column pedestal, There are two column cover turntables where the bottom ends of the transport roller columns are inserted downward, and the roller column bases provided at the bottom of one row of transfer roller columns are in the horizontal position of each column cover turntable. The roller column pedestals are correspondingly arranged, the roller column pedestal extends toward the middle of the bottom of the two rows of conveyance roller columns, forms a conveyance roller that rolls the bottom edge of the circuit board to be etched, and the conveyance roller roller surface is It is perpendicular to the surface of the column cover rotating disk adjacent to it, and the central axis of the conveying roller is lower than the height of the surface of the column cover rotating disk, each conveying roller and the column cover adjacent to it. The contact surfaces that come into contact with each other during rotation form a gear set that meshes with each other and rotates, and after power is transmitted downward simultaneously from the two rows of conveying roller columns, one row of conveying roller columns 2. The vertical transfer etching apparatus according to claim 1, wherein only the power of the bottom portion is transmitted through the gear set of the roller column base to rotate the transfer roller. A driven gear whose center forms a column cover is provided on the same side as each column cover rotating plate in the roller column base, and a portion near the center of the bottom plate of the column cover rotating plate extends downward and is driven. An indirect power transmission gear meshed with the drive gear and the driven gear is provided between each driven gear corresponding to the roller column base and the drive gear, so that the power of the column cover rotating disk is driven by the driven gear. The bottom of the added transport roller column is inserted into the shaft cover of the driven gear, the four transport roller columns in the same row are inserted into the roller column base, and the four transport roller columns are In order to convey a thin circuit board further tightly, it is arranged on the roller column base so as to be densely arranged in the front and rear and the top and bottom of the conveyance roller in a mixed state. Conveying etching apparatus. The etchant nozzles are arranged in a staggered manner at several intervals on a part of the outer side of the roller column base, and the etchant nozzles corresponding to the roller column bases directly wipe the etchant. The vertical transfer etching apparatus according to claim 7, wherein an additional transfer roller column is not provided, and a partially open space for directly spraying an etching solution is created.

Images