JP2012154876A5 - - Google Patents
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- Publication number
- JP2012154876A5 JP2012154876A5 JP2011016163A JP2011016163A JP2012154876A5 JP 2012154876 A5 JP2012154876 A5 JP 2012154876A5 JP 2011016163 A JP2011016163 A JP 2011016163A JP 2011016163 A JP2011016163 A JP 2011016163A JP 2012154876 A5 JP2012154876 A5 JP 2012154876A5
- Authority
- JP
- Japan
- Prior art keywords
- temperature difference
- region
- temperature
- unit
- control unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims 5
- 238000001816 cooling Methods 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 3
- 238000000034 method Methods 0.000 claims 2
- 238000013459 approach Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011016163A JP5691562B2 (ja) | 2011-01-28 | 2011-01-28 | 磁場測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011016163A JP5691562B2 (ja) | 2011-01-28 | 2011-01-28 | 磁場測定装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012154876A JP2012154876A (ja) | 2012-08-16 |
| JP2012154876A5 true JP2012154876A5 (enExample) | 2014-01-23 |
| JP5691562B2 JP5691562B2 (ja) | 2015-04-01 |
Family
ID=46836737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011016163A Expired - Fee Related JP5691562B2 (ja) | 2011-01-28 | 2011-01-28 | 磁場測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5691562B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016029362A (ja) * | 2014-07-24 | 2016-03-03 | セイコーエプソン株式会社 | ガスセルおよび磁気測定装置 |
| JP2017215226A (ja) * | 2016-06-01 | 2017-12-07 | セイコーエプソン株式会社 | ガスセル、磁場計測装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4985449B2 (ja) * | 2008-02-13 | 2012-07-25 | 東京エレクトロン株式会社 | 成膜装置 |
| JP2010205875A (ja) * | 2009-03-03 | 2010-09-16 | Seiko Epson Corp | ガスセル |
-
2011
- 2011-01-28 JP JP2011016163A patent/JP5691562B2/ja not_active Expired - Fee Related
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