JP2012145675A - 光フィルター、光フィルターの製造方法および光機器 - Google Patents
光フィルター、光フィルターの製造方法および光機器 Download PDFInfo
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- JP2012145675A JP2012145675A JP2011002758A JP2011002758A JP2012145675A JP 2012145675 A JP2012145675 A JP 2012145675A JP 2011002758 A JP2011002758 A JP 2011002758A JP 2011002758 A JP2011002758 A JP 2011002758A JP 2012145675 A JP2012145675 A JP 2012145675A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 97
- 238000004519 manufacturing process Methods 0.000 title claims description 34
- 239000000758 substrate Substances 0.000 claims abstract description 359
- 239000010408 film Substances 0.000 claims abstract description 303
- 239000012788 optical film Substances 0.000 claims abstract description 178
- 238000000034 method Methods 0.000 claims description 15
- 230000003213 activating effect Effects 0.000 claims description 8
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 42
- 239000011521 glass Substances 0.000 description 23
- 239000000463 material Substances 0.000 description 17
- 238000010586 diagram Methods 0.000 description 15
- 239000000428 dust Substances 0.000 description 10
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 8
- 238000012545 processing Methods 0.000 description 8
- 230000004913 activation Effects 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 7
- 230000006866 deterioration Effects 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 7
- 239000011651 chromium Substances 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 238000004891 communication Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 229910010413 TiO 2 Inorganic materials 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000005304 joining Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 3
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 239000011259 mixed solution Substances 0.000 description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 3
- 238000009832 plasma treatment Methods 0.000 description 3
- 238000006116 polymerization reaction Methods 0.000 description 3
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- DKNPRRRKHAEUMW-UHFFFAOYSA-N Iodine aqueous Chemical compound [K+].I[I-]I DKNPRRRKHAEUMW-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- XMPZTFVPEKAKFH-UHFFFAOYSA-P ceric ammonium nitrate Chemical compound [NH4+].[NH4+].[Ce+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O XMPZTFVPEKAKFH-UHFFFAOYSA-P 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000004737 colorimetric analysis Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
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- 238000013461 design Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000005355 lead glass Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Optical Filters (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011002758A JP2012145675A (ja) | 2011-01-11 | 2011-01-11 | 光フィルター、光フィルターの製造方法および光機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011002758A JP2012145675A (ja) | 2011-01-11 | 2011-01-11 | 光フィルター、光フィルターの製造方法および光機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012145675A true JP2012145675A (ja) | 2012-08-02 |
| JP2012145675A5 JP2012145675A5 (enExample) | 2014-01-23 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011002758A Withdrawn JP2012145675A (ja) | 2011-01-11 | 2011-01-11 | 光フィルター、光フィルターの製造方法および光機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2012145675A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019135559A (ja) * | 2017-07-06 | 2019-08-15 | 浜松ホトニクス株式会社 | ミラーユニット |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001228317A (ja) * | 2000-02-16 | 2001-08-24 | Kyodo Printing Co Ltd | 接着剤による透明導電膜の支持方法および層構成 |
| JP2008116669A (ja) * | 2006-11-02 | 2008-05-22 | Seiko Epson Corp | 光学デバイス、光学デバイスの製造方法、波長可変フィルタ、波長可変フィルタモジュール、および光スペクトラムアナライザ |
| JP2009134025A (ja) * | 2007-11-29 | 2009-06-18 | Seiko Epson Corp | 光学デバイス、波長可変フィルタモジュール、および光スペクトラムアナライザ |
-
2011
- 2011-01-11 JP JP2011002758A patent/JP2012145675A/ja not_active Withdrawn
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001228317A (ja) * | 2000-02-16 | 2001-08-24 | Kyodo Printing Co Ltd | 接着剤による透明導電膜の支持方法および層構成 |
| JP2008116669A (ja) * | 2006-11-02 | 2008-05-22 | Seiko Epson Corp | 光学デバイス、光学デバイスの製造方法、波長可変フィルタ、波長可変フィルタモジュール、および光スペクトラムアナライザ |
| JP2009134025A (ja) * | 2007-11-29 | 2009-06-18 | Seiko Epson Corp | 光学デバイス、波長可変フィルタモジュール、および光スペクトラムアナライザ |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019135559A (ja) * | 2017-07-06 | 2019-08-15 | 浜松ホトニクス株式会社 | ミラーユニット |
| JP7112986B2 (ja) | 2017-07-06 | 2022-08-04 | 浜松ホトニクス株式会社 | ミラーユニット |
| US11624605B2 (en) | 2017-07-06 | 2023-04-11 | Hamamatsu Photonics K.K. | Mirror unit and optical module |
| US11629946B2 (en) | 2017-07-06 | 2023-04-18 | Hamamatsu Photonics K.K. | Mirror unit and optical module |
| US11629947B2 (en) | 2017-07-06 | 2023-04-18 | Hamamatsu Photonics K.K. | Optical device |
| US11635290B2 (en) | 2017-07-06 | 2023-04-25 | Hamamatsu Photonics K.K. | Optical module |
| US11879731B2 (en) | 2017-07-06 | 2024-01-23 | Hamamatsu Photonics K.K. | Mirror unit and optical module |
| US12152878B2 (en) | 2017-07-06 | 2024-11-26 | Hamamatsu Photonics K.K. | Mirror unit and optical module |
| US12298132B2 (en) | 2017-07-06 | 2025-05-13 | Hamamatsu Photonics K.K. | Optical device |
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