JP2012136340A - Air supply device - Google Patents

Air supply device Download PDF

Info

Publication number
JP2012136340A
JP2012136340A JP2010290622A JP2010290622A JP2012136340A JP 2012136340 A JP2012136340 A JP 2012136340A JP 2010290622 A JP2010290622 A JP 2010290622A JP 2010290622 A JP2010290622 A JP 2010290622A JP 2012136340 A JP2012136340 A JP 2012136340A
Authority
JP
Japan
Prior art keywords
air
housing
supply device
air supply
partition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010290622A
Other languages
Japanese (ja)
Other versions
JP5615164B2 (en
Inventor
Heoy-Jai Jeong
ジョン、ヒョジェ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TAESUNG ENGINEERING CO Ltd
Original Assignee
TAESUNG ENGINEERING CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TAESUNG ENGINEERING CO Ltd filed Critical TAESUNG ENGINEERING CO Ltd
Priority to JP2010290622A priority Critical patent/JP5615164B2/en
Publication of JP2012136340A publication Critical patent/JP2012136340A/en
Application granted granted Critical
Publication of JP5615164B2 publication Critical patent/JP5615164B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an air supply device which can accurately and stably convey a glass sheet.SOLUTION: The air supply device includes: a housing 10 whose inside is hollow and an upper side is open; an air fan 20 mounted on the inner bottom surface of the housing 10; a filter 30 disposed at the upper part of the housing 10 above the air fan 20; and a cover 40 closely contacted to the upper surface of the filter 30 to cover the upper side of the housing, and having air discharge holes 41 formed on its surface. Air partitioning parts 50, air-discharge adjustment parts, and air-generation adjustment parts are provided, so that the air is generated for each partition space. The generated air is evened and is discharged upwardly by each partition space, or the amount of the air is increased and is discharged to another adjacent partition space instead of blocking the air discharging from the specific partition space.

Description

本発明は、エア供給装置に関し、より詳しくはハウジングの内部空間にエアを供給する装置に関する。   The present invention relates to an air supply apparatus, and more particularly to an apparatus for supplying air to an internal space of a housing.

従来、LCDやPDP等に用いられる薄板形板ガラスの不良可否を検査するための検査装備上で、板ガラスを検査部側に搬送させるとか、または、他の工程ラインに搬送させるために使用される搬送装置であって、作業台上に一定間隔を置いて配置される複数個の回転軸上に板ガラスの底面を支持し、搬送させるための複数の搬送ローラーが軸結合されるローラー搬送装置が使用されていた。   Conventionally, on the inspection equipment for inspecting the defect of thin plate glass used for LCD, PDP, etc., it is used to transport the plate glass to the inspection section side or to transport it to other process lines A roller transport device is used in which a plurality of transport rollers for supporting and transporting the bottom surface of a sheet glass on a plurality of rotating shafts arranged at regular intervals on a work table are axially coupled. It was.

しかしながら、このような搬送ローラーを用いた板ガラス搬送装置は基本的に板ガラスと搬送ローラーの外周面が互いに接触された後に、板ガラスが搬送されるので、基本的に接触摩擦による揺るぎや振動等のような微細な震え現象は完全に防止しなく、このような震えにより板ガラスの検査際に不良率を正確に測定することができなくなって、検査の精密度が低下される等の問題があった。   However, since the plate glass is transported after the sheet glass and the outer peripheral surface of the transport roller are basically brought into contact with each other, the sheet glass transport device using such a transport roller basically looks like shaking or vibration due to contact friction. Such a fine tremor phenomenon is not completely prevented, and such a tremor causes a problem that the defect rate cannot be accurately measured when inspecting the plate glass, and the accuracy of the inspection is lowered.

このような問題を解決するために、一例で、作業台の中央部に板ガラスをエア浮上させるためのエア浮上部が設けられ、作業台の幅方向両側には板ガラスの両側端部を支えて搬送させる搬送ローラー部が設けられて板ガラスを一定高さにエア浮上させた状態で所望方向に搬送させるようにする搬送装置が提示された。   In order to solve such problems, for example, an air floating part is provided at the center of the workbench to float the platen in the air, and the both sides of the platen glass are supported on both sides in the width direction of the workbench. The conveyance apparatus which is provided with the conveyance roller part to make it convey in a desired direction in the state which air-lifted the plate glass to the fixed height was shown.

しかしながら、このような従来技術の板ガラス搬送装置は作業台の中央部に配置されているエア浮上部のエア吐出の強さにより板ガラスを浮上させる方式であって、特に、吐出されるエアは板ガラスの中央だけにほとんど集中されるので、板ガラスの中央部は盛り上がり、ローラー搬送部側の板ガラスの両側部がへこむ、いわゆる満腹現状が発生されて基本的に板ガラスの搬送がきちんとならなく、さらに板ガラスの損傷が発生される恐れがあり、また、エア吐出が上方に向かって一律的に発生されるので、全般的に板ガラスの微細な下がり等、所望部分に対する集中的なエア供給等のエア制御は全く不可能になるという問題があった。   However, such a conventional sheet glass conveying device is a system in which the sheet glass is levitated by the strength of air discharge from the air floating portion arranged at the center of the work table. Since it is almost concentrated only in the center, the central part of the plate glass swells, and both sides of the plate glass on the roller conveyance part side are dented, so the so-called satiety situation is generated and basically the conveyance of the plate glass is not properly done, and further the damage of the plate glass In addition, since air discharge is uniformly generated upward, air control such as intensive air supply to a desired part, such as a fine drop of the plate glass, is totally impossible. There was a problem of becoming possible.

本発明は、このような問題を解決するために案出されたものであって、ハウジングの内部空間を長手方向に対して多くの空間に区画するエア区画部と、エアファンとフィルターとの間を区画するエア吐出調節部及びエアファン自体のエア発生量をハウジングの幅方向に対して調節するエア発生調節部を備えて、各区画空間ごとにエアが発生されるようにし、発生されたエアは各区画空間別にならして上向吐出されるようにするとか、または、特定区画空間からのエア吐出を遮断させることの代わりに隣接する他の区画空間にエア量を増加させて吐出させるようにすることができ、また、ハウジングの幅方向に対するエア発生方向を調節できるようにすることによって、一例で、板ガラス搬送装置の場合、カバーの上方に位置し水平方向に沿って搬送される薄い平板プレート構造の板ガラスの所望部分に対してエア供給が調節自在になって、搬送中の板ガラスに対する平坦度を一定に維持することができるようにし、これにより、正確且つ安定的な板ガラスの搬送が可能になるようにするエア供給装置を提供することが目的である。   The present invention has been devised in order to solve such a problem, and is provided between an air compartment section that divides the internal space of the housing into a large number of spaces in the longitudinal direction, an air fan, and a filter. An air discharge adjusting section that divides the air and an air generation adjusting section that adjusts the amount of air generated by the air fan itself with respect to the width direction of the housing so that air is generated in each partition space. May be discharged upward in line with each partition space, or instead of blocking air discharge from a specific partition space, it may be discharged by increasing the amount of air to another adjacent partition space In addition, in the case of a plate glass conveying device, the air generating direction can be adjusted with respect to the width direction of the housing. The air supply can be adjusted to a desired portion of the flat glass plate having a thin flat plate structure to be conveyed so that the flatness with respect to the glass plate being conveyed can be maintained constant. An object of the present invention is to provide an air supply device that enables conveyance of plate glass.

このような上記の目的を達成するための本発明のエア供給装置は、内部が空き、上方が開放されたハウジング;前記ハウジングの内部底面に設けられるエアファン;前記エアファンの上方のハウジングの開放された上方に配置されるフィルター;及び前記フィルターの上面に密着されてハウジングの上方を覆い、表面にエア吐出孔が形成されたカバーを含んで成る。   In order to achieve the above object, the air supply device of the present invention includes a housing that is vacant inside and opened upward; an air fan provided on an inner bottom surface of the housing; an opening of the housing above the air fan; And a cover that is in close contact with the upper surface of the filter and covers the upper portion of the housing, and has an air discharge hole formed on the surface.

また、本発明によるエア供給装置において、前記エアフェアンは、ハウジングの長手方向に沿って一定の間隔を置いて複数個が設けられ、これらのそれぞれのエアファンを区画させるために各エアファンの間のハウジング内部に複数のエア区画部が設けられたことが好ましい。   Also, in the air supply device according to the present invention, a plurality of the air fans are provided at regular intervals along the longitudinal direction of the housing, and the air fans are separated between the air fans in order to partition the air fans. Preferably, a plurality of air compartments are provided inside the housing.

また、本発明によるエア供給装置において、前記エア区画部が設けられるハウジングの一側壁面に貫通孔が設けられ、前記エア区画部は、ハウジングの該当内部空間を区画する区画板と、この区画板の一端部に連結され、前記貫通孔の外部に露出されてハウジングの外側壁面に密着された状態で別の締結具によってハウジングに固定される固定板から成ることが好ましい。   In the air supply device according to the present invention, a through hole is provided in one side wall surface of the housing in which the air partition portion is provided. The air partition portion includes a partition plate that partitions the corresponding internal space of the housing, and the partition plate. Preferably, the fixing plate is fixed to the housing by another fastener while being exposed to the outside of the through hole and in close contact with the outer wall surface of the housing.

また、本発明によるエア供給装置において、前記エア区画部が除去された状態のハウジングの貫通孔を密閉させるための別の密閉板がさらに備えることが好ましい。   In the air supply device according to the present invention, it is preferable that the air supply device further includes another sealing plate for sealing the through hole of the housing in a state where the air partition portion is removed.

また、本発明によるエア供給装置において、前記エア区画部は、前記ハウジングの該当内部空間を区画する区画板;前記区画板の上下方向の中央部に配置され、その両端部がハウジングの両側壁を貫通する回転軸;及び前記ハウジングの外部に露出された回転軸の両端部に結合され、回転操作により前記区画板を軸回転させて区画されているハウジングの両側空間部を連通させるノブを含んで成ることが好ましい。   Further, in the air supply device according to the present invention, the air partition portion is a partition plate that partitions the corresponding internal space of the housing; the partition plate is disposed at a central portion in the vertical direction of the partition plate, and both end portions thereof define both side walls of the housing. A rotating shaft that penetrates; and a knob that is coupled to both ends of the rotating shaft that is exposed to the outside of the housing and communicates with both side spaces of the housing that are partitioned by rotating the partition plate by a rotating operation. Preferably it consists of:

また、本発明によるエア供給装置において、前記エアファンとフィルターとの間のハウジングの内部空間にエアファンから発生されるエアがフィルターへ吐出及び吐出遮断されるように調節するためのエア吐出調節部がさらに備えることが好ましい。   Also, in the air supply device according to the present invention, an air discharge adjusting unit for adjusting the air generated from the air fan in the internal space of the housing between the air fan and the filter so that the air is discharged and blocked to the filter. Is preferably further provided.

また、本発明によるエア供給装置において、前記エア吐出調節部は、前記エアファンとフィルターとの間のハウジングの該当内部空間を区画するためにハウジングの長手方向に沿って連続配置される複数の補助区画板;前記各補助区画板の上下方向の中央部に配置され、その両端部がハウジングの両側壁を貫通する回転軸;及び前記ハウジングの外部に露出された回転軸の両端部に結合され、回転操作により前記各々の補助区画板を軸回転させて区画されているハウジングのエアファンとフィルターとの間の空間部を連通させるノブを含んで成ることが好ましい。   Further, in the air supply device according to the present invention, the air discharge adjusting portion includes a plurality of auxiliary units arranged continuously along the longitudinal direction of the housing in order to define a corresponding internal space of the housing between the air fan and the filter. A partition plate; disposed at the center in the vertical direction of each auxiliary partition plate, and both ends of the rotation shaft penetrating both side walls of the housing; and both ends of the rotation shaft exposed to the outside of the housing; It is preferable to include a knob for communicating the space between the air fan and the filter of the housing which is partitioned by rotating each of the auxiliary partition plates by rotating operation.

また、本発明によるエア供給装置において、前記エアファンとフィルターとの間のハウジングの内部空間にエアファンから発生されるエアがフィルターに吐出及び 吐出遮断されるように調節するためのエア吐出調節部がさらに備えることが好ましい。   Further, in the air supply device according to the present invention, an air discharge adjusting unit for adjusting the air generated from the air fan in the inner space of the housing between the air fan and the filter so that the air is discharged and blocked by the filter. Is preferably further provided.

また、本発明によるエア供給装置において、前記エア吐出調節部は、前記エアファンとフィルターとの間のハウジングの該当内部空間を区画するためにハウジングの長手方向に沿って連続配置される複数の補助区画板;前記各補助区画板の上下方向の中央部に配置され、その両端部がハウジングの両側壁を貫通する回転軸;及び前記ハウジングの外部に露出された回転軸の両端部に結合され、回転操作により前記各々の補助区画板を軸回転させて区画されているハウジングのエアファンとフィルターとの間の空間部を連通させるノブを含んで成ることが好ましい。   Further, in the air supply device according to the present invention, the air discharge adjusting portion includes a plurality of auxiliary units arranged continuously along the longitudinal direction of the housing in order to define a corresponding internal space of the housing between the air fan and the filter. A partition plate; disposed at the center in the vertical direction of each auxiliary partition plate, and both ends of the rotation shaft penetrating both side walls of the housing; and both ends of the rotation shaft exposed to the outside of the housing; It is preferable to include a knob for communicating the space between the air fan and the filter of the housing which is partitioned by rotating each of the auxiliary partition plates by rotating operation.

また、本発明によるエア供給装置において、前記エアファンを覆って、エアファン自体のエア発生量を調節するためのエア発生調節部がさらに備えることが好ましい。   In the air supply device according to the present invention, it is preferable that an air generation adjusting unit for covering the air fan and adjusting an air generation amount of the air fan itself is further provided.

また、本発明によるエア供給装置において、前記エア発生調節部は、前記エアファンの外部を覆い、上方が開放された開放孔を有する補助ハウジング;前記補助ハウジングの開放孔を遮断してこの補助ハウジングの内部と外部空間を区画するための開閉板;前記開閉板の中央部に配置され、その両端部が補助ハウジングの両側壁を貫通する回転軸;及び前記補助ハウジングの外部に露出された回転軸の両端部に結合され、回転操作により前記開閉板を軸回転させて遮断されている補助ハウジングの内部のエアファンと外部の空間部を連通させるノブを含んで成ることが好ましい。   Further, in the air supply device according to the present invention, the air generation adjusting unit has an auxiliary housing that covers the outside of the air fan and has an open hole that is open on the upper side; An opening / closing plate for partitioning the inside and outside space of the door; a rotating shaft disposed at a central portion of the opening / closing plate and having both end portions penetrating both side walls of the auxiliary housing; and a rotating shaft exposed to the outside of the auxiliary housing It is preferable to include a knob that is connected to both ends of the auxiliary housing and communicates with the internal air fan of the auxiliary housing that is blocked by rotating the opening and closing plate by a rotating operation.

また、本発明によるエア供給装置において、前記開閉板は開放孔の幅方向に沿って連続配置され、各々個別的に回転操作されてハウジングの幅方向に対するエア発生量を調節できるように複数個が設けられることが好ましい。   Further, in the air supply device according to the present invention, the opening and closing plates are continuously arranged along the width direction of the opening hole, and a plurality of the opening and closing plates are individually operated to rotate to adjust the amount of air generated in the width direction of the housing. It is preferable to be provided.

また、本発明によるエア供給装置において、前記ハウジングの下端両側かどは長手方向の全体にわたって直角となる直角構造になることが好ましい。   In the air supply device according to the present invention, it is preferable that the lower side of the housing has a right-angle structure that is perpendicular to the entire longitudinal direction.

また、本発明によるエア供給装置において、前記ハウジングの下端両側かどは長手方向の全体にわたって所定角度で傾斜する直傾斜面構造と成ることが好ましい。   Further, in the air supply device according to the present invention, it is preferable that the both side corners of the housing have a straight inclined surface structure that is inclined at a predetermined angle over the entire longitudinal direction.

また、本発明によるエア供給装置において、前記ハウジングの下端両側かどは長手方向の全体にわたって一定曲率でラウンドされた曲面構造から成ることが好ましい。   In the air supply device according to the present invention, it is preferable that the lower side of the housing has a curved surface structure rounded with a constant curvature over the entire longitudinal direction.

前述したように、本発明によるエア供給装置は、ハウジングの内部空間を長手方向に対して多くの空間に区画するエア区画部と、エアファンとフィルターとの間を区画するエア吐出調節部及びエアファン自体のエア発生量をハウジングの幅方向に対して調節するエア発生調節部を設けて、各区画空間ごとにエアが発生されるようにし、発生されたエアは各区画空間別にならして上向吐出されるようにするとか、又は、特定の区画空間からのエア吐出を遮断させることの代わりに隣接する他の区画空間にエア量を増加させて吐出させることができ、また、ハウジングの幅方向に対するエア発生方向を調節することができるようにすることによって、一例で、板ガラス搬送装置の場合、カバーの上方の位置し水平方向に沿って搬送される薄い平板プレート構造の板ガラスの所望部分に対してエア供給が調節自在になって搬送中の板ガラスに対する平坦度を一定に維持することができ、これによって正確且つ安定的な板ガラスの搬送が可能になる等の効果が得られる。   As described above, the air supply device according to the present invention includes an air partition section that partitions the internal space of the housing into a number of spaces in the longitudinal direction, an air discharge adjustment section that partitions between the air fan and the filter, and an air. An air generation control unit that adjusts the air generation amount of the fan itself in the width direction of the housing is provided so that air is generated for each partition space, and the generated air is separated for each partition space. Instead of blocking air discharge from a specific partition space, it can be discharged by increasing the amount of air to another adjacent partition space, and the width of the housing By making it possible to adjust the direction of air generation relative to the direction, for example, in the case of a plate glass transport device, a thin flat plate positioned above the cover and transported along the horizontal direction The air supply can be adjusted to the desired part of the plate glass of the rate structure, and the flatness with respect to the plate glass being conveyed can be kept constant, thereby enabling accurate and stable conveyance of the plate glass, etc. An effect is obtained.

以下、添付の図面に基づいて本発明を詳しく説明する。   Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

図1乃至図12に示すように、本発明のエア供給装置は内部が空き、上方が開放されたハウジング10と、このハウジング10の内部底面に設けられるエアファン20と、このエアファン20の上方のハウジング10の開放された上方に配置されるフィルター30及びこのフィルター30の上面に密着されてハウジングの上方を覆い、表面にエア吐出孔41が形成されたカバー40を含んで成る。   As shown in FIGS. 1 to 12, the air supply device of the present invention has a housing 10 that is empty inside and open upward, an air fan 20 provided on the inner bottom surface of the housing 10, and an upper side of the air fan 20. A filter 30 disposed above the housing 10 and a cover 40 which is in close contact with the upper surface of the filter 30 to cover the top of the housing and has an air discharge hole 41 formed on the surface.

前記ハウジング10は、長手方向に沿って長く伸びる(好ましくは、板ガラス搬送装置等の作業台の長手方向の全体に対応する長さ)上方が開放された長方形の四角箱状から成る。   The housing 10 is formed in a rectangular square box shape that extends long along the longitudinal direction (preferably, a length corresponding to the entire longitudinal direction of a work table such as a plate glass conveying device) and is opened upward.

前記エアファン20のハウジング10の内部底面に設けられてエアを吐出させる、いわゆるローラーファン構造から成る。   The air fan 20 has a so-called roller fan structure that is provided on the inner bottom surface of the housing 10 and discharges air.

前記フィルター30は、エアファン20上方のハウジング10の開放された上方に配置される四角ブロック状であって、吐出されるエアに含んでいる異物を除去するとか、または、エア吐出の強さをどのぐらい緩和させる等の機能を有する。   The filter 30 has a square block shape disposed above the housing 10 above the air fan 20 so as to remove foreign matters contained in the discharged air or to increase the strength of air discharge. It has functions such as how much to relax.

前記カバー40は、フィルター30の上面に密着されてハウジングの上方を覆い、表面に斜線方向に形成された複数個のエア吐出孔41が設けられる。   The cover 40 is in close contact with the upper surface of the filter 30 to cover the upper portion of the housing, and a plurality of air discharge holes 41 formed in the oblique direction are provided on the surface.

このような構造を有する本発明のエア供給装置に関するいろいろな形態別の実施形態は次のようである。   Various embodiments of the air supply apparatus of the present invention having such a structure are as follows.

図1乃至図3に示すように、第1の実施形態は前記エアファン20がハウジング10の長手方向に沿って一定間隔(など間隔)を置いて複数個が設けられ、これらの各々のエアファン20を区画させるためにエアファン20の間のハウジング10内部に複数のエア区画部50が設けられている。   As shown in FIGS. 1 to 3, in the first embodiment, a plurality of the air fans 20 are provided at regular intervals (equal intervals) along the longitudinal direction of the housing 10. In order to partition 20, a plurality of air partition portions 50 are provided inside the housing 10 between the air fans 20.

ここで、前記エア区画部50が設けられるハウジング10の一側壁面に貫通孔11が形成され、前記エア区画部50はハウジング10の該当内部空間を区画する四角板状の区画板51と、この区画板51の一端部に連結され、前記貫通孔11の外部に露出されてハウジング10の外側壁面に密着された状態で別の締結具52によってハウジング10に固定される固定板53から成る英文字Tの構造から成る。   Here, a through hole 11 is formed in one side wall surface of the housing 10 where the air partition 50 is provided, and the air partition 50 includes a square plate-like partition plate 51 that partitions the corresponding internal space of the housing 10, An alphabetic character comprising a fixed plate 53 connected to one end portion of the partition plate 51 and exposed to the outside of the through hole 11 and fixed to the housing 10 by another fastener 52 while being in close contact with the outer wall surface of the housing 10. It consists of a T structure.

このような構成による本発明の第1の実施形態であるエア供給装置は、各区画空間別に発生される同一なエア吐出量が固定設置されているエア区画部50を境界にしてすぐに上向吐出されて上方に配置されたカバー40のエア吐出孔41を通じて外部に吐出されて板ガラス等をエア浮上させるようにする。   The air supply device according to the first embodiment of the present invention having such a configuration immediately rises with the air partition portion 50 where the same air discharge amount generated for each partition space is fixedly installed as a boundary. The glass sheet is discharged to the outside through the air discharge holes 41 of the cover 40 which is discharged and disposed above, and the plate glass or the like is allowed to float on the air.

一方、前記第1の実施形態では、エア区画部50を除去して隣接する空間部と連通されるようにすることができ、この時、エア区画部50が除去された状態のハウジング10の貫通孔11は別の密閉板55で密閉させることができる。   On the other hand, in the first embodiment, the air partition portion 50 can be removed so as to communicate with the adjacent space portion. At this time, the penetration of the housing 10 with the air partition portion 50 removed is performed. The hole 11 can be sealed with another sealing plate 55.

図4及び図5に示すように、第2の実施形態は第1の実施形態でエア区画部60だけが変形された構造を示す。   As shown in FIGS. 4 and 5, the second embodiment shows a structure in which only the air partition 60 is deformed in the first embodiment.

前記エア区画部60は、前記ハウジング10の該当内部空間を区画する四角板状の区画板61と、この区画板61の上下方向の中央部に配置され、その両端部がハウジング10の両側壁を貫通する長い棒状の回転軸62及び前記ハウジング10の外部に露出された回転軸62の両端部に結合され、回転操作により前記区画板61を軸回転させて区画されているハウジング10の両側空間部を連通させる取っ手の機能を有するノブ63を含む構造から成る。   The air partition portion 60 is disposed at a square plate-shaped partition plate 61 that partitions the corresponding internal space of the housing 10 and a central portion in the vertical direction of the partition plate 61, and both end portions thereof define both side walls of the housing 10. Both side space portions of the housing 10 which are coupled to both ends of the long rod-shaped rotating shaft 62 and the rotating shaft 62 exposed to the outside of the housing 10 and are partitioned by rotating the partition plate 61 by a rotating operation. It has a structure including a knob 63 having a handle function for communicating with each other.

このような構造による本発明の第2の実施形態であるエア供給装置は各区画空間別に発生される同一なエア吐出量がエア区画部60を境界にしてすぐに上向吐出されて上方に配置されたカバー40のエア吐出孔41を通じて外部に吐出されて板ガラス等をエア浮上させることができ、または、必要な部分にエア供給量を調節するためにノブ63の回転操作により隣接する区画空間同士、互いに連通させてエアを共有することができることは勿論、区画板61の傾斜を調節して共有されるエア量を調節することもできる。   In the air supply device according to the second embodiment of the present invention having such a structure, the same air discharge amount generated for each partition space is immediately discharged upward with the air partition portion 60 as a boundary and disposed above. Can be discharged outside through the air discharge hole 41 of the cover 40 so that the plate glass or the like can be floated on the air, or the adjacent partition spaces can be adjusted by rotating the knob 63 in order to adjust the air supply amount to a necessary portion. The air can be shared by communicating with each other, and the amount of air to be shared can also be adjusted by adjusting the inclination of the partition plate 61.

図6乃至図8に示すように、第3の実施形態は、第2の実施形態で前記エアファン20とフィルター30との間のハウジング10の内部空間にエアファン20から発生されるエアがフィルター30に吐出及び吐出遮断されるように調節するためのエア吐出調節部70がさらに追加された構造を示す。   As shown in FIGS. 6 to 8, in the third embodiment, the air generated from the air fan 20 is filtered in the internal space of the housing 10 between the air fan 20 and the filter 30 in the second embodiment. 30 shows a structure in which an air discharge adjusting unit 70 for adjusting discharge and discharge blocking is further added.

前記エア吐出調節部70は、前記エアファン20とフィルター30との間のハウジング10の該当内部空間を区画するためにハウジング10の長手方向に沿って 連続配置される複数の四角板状の補助区画板71と、この各補助区画板71の上下方向の中央部に配置され、その両端部がハウジング10の両側壁を貫通する長い棒状の回転軸72及び前記ハウジング10の外部に露出された回転軸72の両端部に結合され、回転操作により前記各々の補助区画板71を軸回転させて区画されているハウジング10のエアファン20とフィルター30との間の空間部を連通させる取っ手の機能を有するノブ73を含む構造からなる。   The air discharge adjusting unit 70 includes a plurality of square plate-like auxiliary compartments that are continuously arranged along the longitudinal direction of the housing 10 in order to define a corresponding internal space of the housing 10 between the air fan 20 and the filter 30. A plate 71, a long rod-shaped rotary shaft 72 that is disposed at the center in the vertical direction of each auxiliary partition plate 71 and whose both ends penetrate both side walls of the housing 10, and a rotary shaft exposed to the outside of the housing 10 72, and has a handle function for communicating the space portion between the air fan 20 and the filter 30 of the housing 10 which is coupled by rotating the auxiliary partition plate 71 by a rotation operation. The structure includes a knob 73.

ここで、前記補助区画板71の幅方向の長さは、エアファン20とフィルター30との間を密閉させるために水平に置かれるように回転させた時、隣接する他の補助区画板71の板面と互いに上下に重ねるようにする長さを有することが好ましい。   Here, the length of the auxiliary partition plate 71 in the width direction is such that when the auxiliary partition plate 71 is rotated horizontally so as to be sealed between the air fan 20 and the filter 30, It is preferable to have a length that allows the plate surfaces to overlap each other.

このような構成による本発明の第3の実施形態のエア供給装置は、各区画空間別に発生される同一なエア吐出量がエア区画部60を境界にしてすぐに上向吐出されて上方に配置されたカバー40のエア吐出孔41を通じて外部に吐出されて板ガラス等をエア浮上させることができ、または、必要な部分にエア供給量を調節するために該当補助区画板71のノブ73を回転操作して、隣接する他の区画空間にエアの方向を転換させた後、互いに連通させてエア量を共有させることができる同時に該当補助区画板71の傾斜を調節してエアが傾けられた補助区画板61の傾斜面に沿って流れることができるようにしてエアの流れに方向性を有するようにすることもできる。   In the air supply device according to the third embodiment of the present invention having such a configuration, the same air discharge amount generated for each partition space is immediately discharged upward with the air partition portion 60 as a boundary, and is disposed above. The glass can be discharged to the outside through the air discharge holes 41 of the cover 40, or the plate 73 can be floated on the air, or the knob 73 of the auxiliary partition plate 71 can be rotated to adjust the air supply amount to a necessary part. Then, after changing the direction of the air to another adjacent partition space, the air can be shared by communicating with each other, and at the same time, the auxiliary partition plate 71 is inclined by adjusting the inclination of the corresponding auxiliary partition plate 71 It is also possible to make the air flow have directionality by allowing it to flow along the inclined surface of the plate 61.

図9乃至図12に示すように、第4の実施形態は第3の実施形態のエア区画部60の構成は削除され、エア吐出調節部70だけが具備された状態で再び前記エアファン20を覆ってエアファン20自体のエア発生量を調節するためのエア発生調節部80がさらに備える構造を示す。   As shown in FIGS. 9 to 12, in the fourth embodiment, the configuration of the air partition section 60 of the third embodiment is deleted, and the air fan 20 is turned on again with only the air discharge adjusting section 70 provided. The structure which the air generation adjustment part 80 for covering and adjusting the air generation amount of air fan 20 itself is further provided is shown.

ここで、前記エア発生調節部80は、前記エアファン20の外部を覆い、上方が開放された開放孔81aを有する四角箱状の補助ハウジング81と、この補助ハウジング81の開放孔81aを遮断してこの補助ハウジング81の内部と外部空間を区画するための四角板状の開閉板82と、この開閉板82の中央部に配置され、その両端部が補助ハウジング81の両側壁を貫通する長い棒状の回転軸83及び前記補助ハウジング81の外部に露出された回転軸83の両端部に結合され、回転操作により前記開閉板82を軸回転させて遮断されている補助ハウジング81の内部のエアファン20と外部の空間部を連通させる取っ手の機能を有するノブ84を含む構造から成る。   Here, the air generation adjusting unit 80 covers the outside of the air fan 20 and blocks the rectangular box-shaped auxiliary housing 81 having an open hole 81a opened upward, and the open hole 81a of the auxiliary housing 81. A rectangular plate-shaped opening / closing plate 82 for partitioning the inside and outside space of the auxiliary housing 81, and a long rod-like shape that is disposed at the center of the opening / closing plate 82 and whose both end portions penetrate both side walls of the auxiliary housing 81. The air fan 20 inside the auxiliary housing 81 is coupled to both ends of the rotary shaft 83 and the both ends of the rotary shaft 83 exposed to the outside of the auxiliary housing 81 and is blocked by rotating the opening / closing plate 82 by a rotating operation. And a knob 84 having a handle function for communicating with the external space.

そして、前記開閉板82は、開放孔81aの幅方向に沿って連続配置され、各々個別的に回転操作されてハウジング10の幅方向に対するエア発生量を調節できるように複数個が設けられる。   The opening / closing plate 82 is continuously arranged along the width direction of the opening hole 81a, and a plurality of the opening / closing plates 82 are provided so that each of the opening / closing plates 82 can be individually rotated to adjust the amount of air generated in the width direction of the housing 10.

このような構成による本発明の第4の実施形態のエア供給装置は、各々のエア吐出調節部70を直立開放させてエアファン20で発生されるエアがすぐに上向吐出されて上方に配置されたカバー40のエア吐出孔41を通じて外部に吐出されて板ガラス等をエア浮上させることができ、該当エアファン20に対する開閉板82を閉鎖させてエア発生が遮断されるようにしてこの部分に対するエア吐出が遮断されるようにすることができ、または、必要な部分にエア供給量を調節するために該当補助区画板71のノブ73を回転操作して隣接する他の区画空間にエアの方向を転換させた後、互いに連通させてエア量を共有させることができる同時に、該当補助区画板71の傾斜を調節してエアが傾けられた補助区画板61の傾斜面に沿って流れることができるようにして、長手方向に沿うエアの流れに方向性を有するようにすることができ、これとともに、開閉板82の開放傾斜も調節して幅方向へのエア吐出の方向性もともに調節して複合的なエア吐出が可能であるようにすることもできる。   In the air supply device according to the fourth embodiment of the present invention having such a configuration, each air discharge adjusting unit 70 is opened upright, and the air generated by the air fan 20 is immediately discharged upward and disposed above. The plate glass or the like can be discharged to the outside through the air discharge holes 41 of the cover 40, and the air to the air fan 20 can be closed by closing the open / close plate 82 with respect to the corresponding air fan 20. The discharge can be blocked or the knob 73 of the auxiliary partition plate 71 is rotated to adjust the air direction to other adjacent partition spaces in order to adjust the air supply amount to a necessary portion. After the conversion, the air amount can be shared by communicating with each other, and at the same time, the inclination of the auxiliary partition plate 71 is adjusted, and the air flows along the inclined surface of the auxiliary partition plate 61 inclined. In this way, the flow of air along the longitudinal direction can be directional, and at the same time, the opening inclination of the opening / closing plate 82 can be adjusted to adjust the direction of air discharge in the width direction. It can also be adjusted so that multiple air discharges are possible.

このように、本発明の多様な実施例を有するエア供給装置を板ガラス搬送装置、または、クリーントンネルユニットなどに設置して板ガラス等の両側部が下方に下がる平坦性の不均衡を是正して、正確且つ安定的に搬送させることができる。   In this way, the air supply device having various embodiments of the present invention is installed in a plate glass transport device or a clean tunnel unit to correct the flatness imbalance in which both side portions of the plate glass and the like are lowered, It can be conveyed accurately and stably.

図13は、本発明のエア供給装置が板ガラス搬送装置に適用された状態を示し、図14は、本発明のエア供給装置がクリーントンネルユニットに適用された状態を示す。   FIG. 13 shows a state where the air supply device of the present invention is applied to a plate glass conveying device, and FIG. 14 shows a state where the air supply device of the present invention is applied to a clean tunnel unit.

一方、図15及び図16は本発明のエア供給装置中、ハウジング10の他の実施例を示し、前記ハウジング10の下端両側かどを長手方向の全体にわたって所定角度が傾斜する直傾斜面12の構造とすることができ、または、前記ハウジング10の下端両側かどが長手方向の全体にわたって一定曲率でラウンドされた曲面13の構造となるようにすることもできる。ハウジング10の下端を曲面13の構造とすると、エアファン20で発生されたエアが直傾斜面の構造により風向が変更される過程で摩擦が発生されることの代わりに、曲面に沿って自然に上方に吐出させることができる。   15 and 16 show another embodiment of the housing 10 in the air supply apparatus of the present invention. The structure of the straight inclined surface 12 in which the lower end of the housing 10 is inclined at a predetermined angle over the entire longitudinal direction. Alternatively, the both sides of the lower end of the housing 10 may have a curved surface 13 rounded with a constant curvature over the entire length. If the lower end of the housing 10 has a curved surface 13 structure, the air generated by the air fan 20 naturally occurs along the curved surface instead of generating friction in the process of changing the wind direction due to the structure of the inclined surface. It can be discharged upward.

前述したように、本発明は前記の好ましい実施例で説明したが、このような実施例を従来の公知技術と単純に組合適用した変形例は勿論、本発明の特許請求の範囲と詳細な説明で本発明が属する技術分野の当業者が容易に変更して利用できるすべての技術は本発明の技術の範囲に含まれることは当然である。   As described above, the present invention has been described with reference to the above-described preferred embodiments. However, the scope of the present invention is not limited to the modified examples in which such embodiments are simply applied in combination with the prior art. Of course, all the techniques that can be easily modified and used by those skilled in the art to which the present invention belongs are included in the scope of the present invention.

本発明の第1の実施形態によるエア供給装置を示す分解斜視図である。It is a disassembled perspective view which shows the air supply apparatus by the 1st Embodiment of this invention. 本発明の第1の実施形態によるエア供給装置のエア区画部を示す要部拡大斜視図である。It is a principal part expansion perspective view which shows the air division part of the air supply apparatus by the 1st Embodiment of this invention. 本発明の第1の実施形態によるエア供給装置の区画板が除去された後、密閉板が設置された状態を示す要部拡大斜視図である。It is a principal part expansion perspective view which shows the state by which the sealing board was installed after the partition board of the air supply apparatus by the 1st Embodiment of this invention was removed. 本発明の第2の実施形態によるエア供給装置を示す分解斜視図である。It is a disassembled perspective view which shows the air supply apparatus by the 2nd Embodiment of this invention. 本発明の第2の実施形態によるエア供給装置のエア区画部を示す要部拡大斜視図である。It is a principal part expansion perspective view which shows the air division part of the air supply apparatus by the 2nd Embodiment of this invention. 本発明の第3の実施形態によるエア供給装置を示す分解斜視図である。It is a disassembled perspective view which shows the air supply apparatus by the 3rd Embodiment of this invention. 本発明の第3の実施形態によるエア供給装置のエア吐出調節部が開放された状態を示す概略図である。It is the schematic which shows the state by which the air discharge adjustment part of the air supply apparatus by the 3rd Embodiment of this invention was open | released. 本発明の第3の実施形態によるエア供給装置のエア吐出調節部が、一部は閉まり、一部はエア吐出の方向転換のために傾けられた状態を示す概略図である。It is the schematic which shows the state by which the air discharge adjustment part of the air supply apparatus by the 3rd Embodiment of this invention partly closed and partly inclined for the direction change of air discharge. 本発明の第4の実施形態によるエア供給装置を示す分解斜視図である。It is a disassembled perspective view which shows the air supply apparatus by the 4th Embodiment of this invention. 本発明の第4の実施形態によるエア供給装置のエア発生調節部を示す要分概略図である。It is a principal part schematic diagram which shows the air generation adjustment part of the air supply apparatus by the 4th Embodiment of this invention. 本発明の第4の実施形態によるエア供給装置のエア吐出調節部が開放された状態を示す概略図である。It is the schematic which shows the state by which the air discharge adjustment part of the air supply apparatus by the 4th Embodiment of this invention was open | released. 本発明の第4の実施形態によるエア供給装置のエア吐出調節部が、一部は閉まり、一部はエア吐出の方向転換のために傾けられた状態を示す概略図である。It is the schematic which shows the state by which the air discharge adjustment part of the air supply apparatus by the 4th Embodiment of this invention was partially closed and partly inclined for the direction change of air discharge. 本発明によるエア供給装置が板ガラス搬送装置に適用された状態を示す概略斜視図である。It is a schematic perspective view which shows the state by which the air supply apparatus by this invention was applied to the plate glass conveying apparatus. 本発明によるエア供給装置がクリーントンネルユニットに適用された状態を示す概略斜視図である。It is a schematic perspective view which shows the state by which the air supply apparatus by this invention was applied to the clean tunnel unit. 本発明のエア供給装置中でハウジングの他の実施形態を示す概略斜視図である。It is a schematic perspective view which shows other embodiment of a housing in the air supply apparatus of this invention. 本発明のエア供給装置中でハウジングの他の実施形態を示す概略斜視図である。It is a schematic perspective view which shows other embodiment of a housing in the air supply apparatus of this invention.

10 : ハウジング 11 : 貫通孔
12 : 直傾斜面 13 : 曲面
20 : エアファン 30 : フィルター
40 : カバー 41 : エア吐出孔
50 : エア区画部 51 : 区画板
52 : 締結具 53 : 固定板
55 : 密閉板 60 : エア区画部
61 : 区画板 62 : 回転軸
63 : ノブ 70 : エア吐出調節部
71 : 補助区画板 72 : 回転軸
73 : ノブ 80 : エア発生調節部
81 : 補助ハウジング 81a : 開放孔
82 : 開閉板 83 : 回転軸
84 : ノブ
DESCRIPTION OF SYMBOLS 10: Housing 11: Through-hole 12: Directly inclined surface 13: Curved surface 20: Air fan 30: Filter 40: Cover 41: Air discharge hole 50: Air partition part 51: Partition plate 52: Fastener 53: Fixing plate 55: Sealing Plate 60: Air partition 61: Partition plate 62: Rotating shaft 63: Knob 70: Air discharge controller 71: Auxiliary partition plate 72: Rotating shaft 73: Knob 80: Air generation controller 81: Auxiliary housing 81a: Open hole 82 : Open / close plate 83: Rotating shaft 84: Knob

Claims (15)

内部が空き、上方が開放されているハウジング10と;
前記ハウジング10の内部底面に設けられたエアファン20と;
前記エアファン20の上方であるハウジング10の開放されている上方に設けられるフィルター30と;及び
前記フィルター30の上面に密着されてハウジングの上方を覆い、表面にエア吐出孔41が設けられたカバー40と;
を含んで成るエア供給装置。
A housing 10 that is empty inside and open at the top;
An air fan 20 provided on the inner bottom surface of the housing 10;
A filter 30 provided above the air fan 20 that is open above the housing 10; and a cover that is in close contact with the upper surface of the filter 30 and covers the top of the housing, and is provided with an air discharge hole 41 on the surface. 40 and;
An air supply device comprising:
前記エアファン20は、ハウジング10の長手方向に沿って一定間隔を置いて複数個が設けられ、これら各々のエアファン20を区画させるためにエアファン20の間のハウジング10の内部に複数のエア区画部50、60が設けられたことを特徴とする請求項1に記載のエア供給装置。   A plurality of the air fans 20 are provided at regular intervals along the longitudinal direction of the housing 10, and a plurality of air fans 20 are provided inside the housing 10 between the air fans 20 to partition each air fan 20. The air supply device according to claim 1, wherein partition portions are provided. 前記エア区画部50が設けられるハウジング10の一側壁面に貫通孔11が設けられ、
前記エア区画部50は、 ハウジング10の該当内部空間を区画する区画板51と、この区画板51の一端部に連結され、前記貫通孔11の外部に露出されてハウジング10の外側壁面に密着された状態で別の締結具によりハウジング10に固定される固定板53から成ることを特徴とする請求項2に記載のエア供給装置。
A through hole 11 is provided on one side wall surface of the housing 10 where the air partition 50 is provided
The air partition 50 is connected to a partition plate 51 that partitions the corresponding internal space of the housing 10 and one end of the partition plate 51, is exposed to the outside of the through hole 11, and is in close contact with the outer wall surface of the housing 10. The air supply device according to claim 2, further comprising a fixing plate 53 fixed to the housing 10 by another fastener in a state where the air supply device is in a closed state.
前記エア区画部50が除去された状態のハウジング10の貫通孔11を密閉させるための別の密閉板55がさらに備えることを特徴とする請求項3に記載のエア供給装置。   The air supply device according to claim 3, further comprising another sealing plate 55 for sealing the through hole 11 of the housing 10 in a state where the air partition portion 50 is removed. 前記エア区画部60は、
前記ハウジング10の該当内部空間を区画する区画板61と;
前記区画板61の上下方向の中央部に設けられ、その両端部がハウジング10の両側壁を貫通する回転軸62と;及び
前記ハウジング10の外部に露出された回転軸62の両端部に結合され、回転操作により前記区画板61を軸回転させて区画されているハウジング10の両側空間部を連通させるノブ63と;
を含んで成ることを特徴とする請求項2に記載のエア供給装置。
The air compartment 60 is
A partition plate 61 that partitions the corresponding internal space of the housing 10;
The partition plate 61 is provided at a central portion in the vertical direction, and both end portions thereof are coupled to the rotation shafts 62 penetrating both side walls of the housing 10; and both ends of the rotation shaft 62 exposed to the outside of the housing 10. A knob 63 for communicating the both side spaces of the housing 10 partitioned by rotating the partition plate 61 by a rotation operation;
The air supply device according to claim 2, comprising:
前記エアファン20とフィルター30との間のハウジング10の内部空間にエアファン20から発生されるエアがフィルター30へ吐出または吐出遮断されるように調節するためのエア吐出調節部70をさらに備えることを特徴とする請求項5に記載のエア供給装置。   An air discharge adjusting unit 70 is further provided in the internal space of the housing 10 between the air fan 20 and the filter 30 to adjust the air generated from the air fan 20 to be discharged to or blocked from the filter 30. The air supply device according to claim 5. 前記エア吐出調節部70は、
前記エアファン20とフィルター30との間のハウジング10の該当内部空間を区画するためにハウジング10の長手方向に沿って連続配置される複数の補助区画板71と;
前記各補助区画板71の上下方向の中央部に設けられ、その両端部がハウジング10の両側壁を貫通する回転軸72と;及び
前記ハウジング10の外部に露出された回転軸72の両端部に結合され、回転操作により前記それぞれの補助区画板71を軸回転させて区画されているハウジング10のエアファン20とフィルター30との間の空間部を連通させるノブ73と;
を含んで成ることを特徴とする請求項6に記載のエア供給装置。
The air discharge adjusting unit 70
A plurality of auxiliary partition plates 71 arranged continuously along the longitudinal direction of the housing 10 to partition the corresponding internal space of the housing 10 between the air fan 20 and the filter 30;
A rotary shaft 72 provided at the center of each auxiliary partition plate 71 in the vertical direction, and both ends of the auxiliary partition plate 71 penetrating both side walls of the housing 10; and both ends of the rotary shaft 72 exposed to the outside of the housing 10 A knob 73 that is coupled and communicates with a space between the air fan 20 of the housing 10 and the filter 30 by rotating the respective auxiliary partition plates 71 by a rotation operation;
The air supply device according to claim 6, comprising:
前記エアファン20とフィルター30との間のハウジング10の内部空間にエアファン20から発生されるエアがフィルター30へ吐出または吐出遮断されるように調節するためのエア吐出調節部70をさらに備えることを特徴とする請求項1に記載のエア供給装置。   An air discharge adjusting unit 70 is further provided in the internal space of the housing 10 between the air fan 20 and the filter 30 to adjust the air generated from the air fan 20 to be discharged to or blocked from the filter 30. The air supply device according to claim 1. 前記エア吐出調節部70は、
前記エアファン20とフィルター30との間のハウジング10の該当内部空間を区画するためにハウジング10の長手方向に沿って連続配置される複数の補助区画板71と;
前記各補助区画板71の上下方向の中央部に設けられ、その両端部がハウジング10の両側壁を貫通する回転軸72と;及び
前記ハウジング10の外部に露出された回転軸72の両端部に結合され、回転操作により前記各々の補助区画板71を軸回転させて区画されているハウジング10のエアファン20とフィルター30との間の空間部を連通させるノブ73と;
を含んで成ることを特徴とする請求項8に記載のエア供給装置。
The air discharge adjusting unit 70
A plurality of auxiliary partition plates 71 arranged continuously along the longitudinal direction of the housing 10 to partition the corresponding internal space of the housing 10 between the air fan 20 and the filter 30;
A rotary shaft 72 provided at the center of each auxiliary partition plate 71 in the vertical direction, and both ends of the auxiliary partition plate 71 penetrating both side walls of the housing 10; and both ends of the rotary shaft 72 exposed to the outside of the housing 10 A knob 73 that is connected and communicates with a space between the air fan 20 and the filter 30 of the housing 10 that is partitioned by rotating each auxiliary partition plate 71 by a rotation operation;
The air supply device according to claim 8, comprising:
前記エアファン20を覆ってエアファン20自体のエア発生量を調節するためのエア発生調節部80をさらに備えることを特徴とする請求項9に記載のエア供給装置。   The air supply device according to claim 9, further comprising an air generation adjusting unit 80 that covers the air fan 20 and adjusts an air generation amount of the air fan 20 itself. 前記エア発生調節部80は、
前記エアファン20の外部を覆い、上方が開放された開放孔81aを有する補助ハウジング81と;
前記補助ハウジング81の開放孔81a を遮断してこの補助ハウジング81の内部と外部空間を区画するための開閉板82と;
前記開閉板82の中央部に配置され、その両端部が補助ハウジング81の両側壁を貫通する回転軸83と;及び
前記補助ハウジング81の外部に露出された回転軸83の両端部に結合され、回転操作により前記開閉板82を軸回転させて遮断されている補助ハウジング81内部のエアファン20と外部の空間部を連通させるノブ84と;
を含んで成ることを特徴とする請求項10に記載のエア供給装置。
The air generation adjusting unit 80 includes:
An auxiliary housing 81 that covers the outside of the air fan 20 and has an open hole 81a opened upward;
An opening / closing plate 82 for blocking the open hole 81a of the auxiliary housing 81 to partition the inside and the outside of the auxiliary housing 81;
A rotary shaft 83 disposed at a central portion of the opening / closing plate 82 and having both ends thereof penetrating both side walls of the auxiliary housing 81; and both ends of the rotary shaft 83 exposed to the outside of the auxiliary housing 81; A knob 84 for connecting the air fan 20 inside the auxiliary housing 81 and the outside space portion, which is blocked by rotating the opening / closing plate 82 by a rotation operation;
The air supply device according to claim 10, comprising:
前記開閉板82は、開閉孔81aの幅方向に沿って連続配置され、各々個別的に回転操作されてハウジング10の幅方向に対するエア発生量を調節することができるように複数個が設けられたことを特徴とする請求項11に記載のエア供給装置。   The opening / closing plate 82 is continuously arranged along the width direction of the opening / closing hole 81a, and a plurality of the opening / closing plates 82 are provided so that each of the opening / closing plates 82 can be individually rotated to adjust the amount of air generated in the width direction of the housing 10. The air supply device according to claim 11. 前記ハウジング10の下端両側かどは、長手方向の全体にわたって直角となる直角構造から成ることを特徴とする請求項1に記載のエア供給装置。   2. The air supply device according to claim 1, wherein the lower end of the housing has a right-angle structure that is perpendicular to the entire longitudinal direction. 前記ハウジング10の下端両側かどは、長手方向の全体にわたって所定角度が傾斜する直傾斜面12構造から成ることを特徴とする請求項1に記載のエア供給装置。   2. The air supply device according to claim 1, wherein both sides of the lower end of the housing have a straight inclined surface 12 structure that is inclined at a predetermined angle over the entire longitudinal direction. 前記ハウジング10の下端両側かどは、長手方向の全体にわたって一定曲率でラウンドされた曲面13構造から成ることを特徴とする請求項1に記載のエア供給装置。   2. The air supply device according to claim 1, wherein both sides of the lower end of the housing have a curved surface 13 structure rounded with a constant curvature over the entire longitudinal direction.
JP2010290622A 2010-12-27 2010-12-27 Air supply device Expired - Fee Related JP5615164B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010290622A JP5615164B2 (en) 2010-12-27 2010-12-27 Air supply device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010290622A JP5615164B2 (en) 2010-12-27 2010-12-27 Air supply device

Publications (2)

Publication Number Publication Date
JP2012136340A true JP2012136340A (en) 2012-07-19
JP5615164B2 JP5615164B2 (en) 2014-10-29

Family

ID=46674113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010290622A Expired - Fee Related JP5615164B2 (en) 2010-12-27 2010-12-27 Air supply device

Country Status (1)

Country Link
JP (1) JP5615164B2 (en)

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11236125A (en) * 1997-12-16 1999-08-31 Ngk Insulators Ltd Article conveying device
JP2001358206A (en) * 2000-06-12 2001-12-26 Toray Eng Co Ltd Method and apparatus for cooling board
JP2005075499A (en) * 2003-08-28 2005-03-24 Murata Mach Ltd Levitation conveyance device
JP2007191310A (en) * 2006-01-19 2007-08-02 Taesung Engineering Corp Plate glass conveying device
JP2007230738A (en) * 2006-03-02 2007-09-13 Shinko Electric Co Ltd Pneumatic floating unit and method of manufacturing pneumatic floating unit
JP2007269490A (en) * 2006-03-31 2007-10-18 Taesung Engineering Corp Filter installation structure of glass sheet conveyance device
JP2008140987A (en) * 2006-12-01 2008-06-19 Airtech Japan Ltd Semiconductor wafer and apparatus for air floating and transporting liquid crystal glass
JP2008260591A (en) * 2007-04-10 2008-10-30 Nippon Sekkei Kogyo:Kk Sheet-like material conveying device and method
JP2009161283A (en) * 2007-12-28 2009-07-23 Myotoku Ltd Levitating unit and device
JP2009256002A (en) * 2008-04-11 2009-11-05 Hitachi Plant Technologies Ltd Tabular body carrying device and its control method
JP2011207622A (en) * 2010-03-26 2011-10-20 Taesung Engineering Co Ltd Air supply device
JP2011238914A (en) * 2010-04-30 2011-11-24 Tae Sung Engineering Co Ltd Air supply device

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11236125A (en) * 1997-12-16 1999-08-31 Ngk Insulators Ltd Article conveying device
JP2001358206A (en) * 2000-06-12 2001-12-26 Toray Eng Co Ltd Method and apparatus for cooling board
JP2005075499A (en) * 2003-08-28 2005-03-24 Murata Mach Ltd Levitation conveyance device
JP2007191310A (en) * 2006-01-19 2007-08-02 Taesung Engineering Corp Plate glass conveying device
JP2007230738A (en) * 2006-03-02 2007-09-13 Shinko Electric Co Ltd Pneumatic floating unit and method of manufacturing pneumatic floating unit
JP2007269490A (en) * 2006-03-31 2007-10-18 Taesung Engineering Corp Filter installation structure of glass sheet conveyance device
JP2008140987A (en) * 2006-12-01 2008-06-19 Airtech Japan Ltd Semiconductor wafer and apparatus for air floating and transporting liquid crystal glass
JP2008260591A (en) * 2007-04-10 2008-10-30 Nippon Sekkei Kogyo:Kk Sheet-like material conveying device and method
JP2009161283A (en) * 2007-12-28 2009-07-23 Myotoku Ltd Levitating unit and device
JP2009256002A (en) * 2008-04-11 2009-11-05 Hitachi Plant Technologies Ltd Tabular body carrying device and its control method
JP2011207622A (en) * 2010-03-26 2011-10-20 Taesung Engineering Co Ltd Air supply device
JP2011238914A (en) * 2010-04-30 2011-11-24 Tae Sung Engineering Co Ltd Air supply device

Also Published As

Publication number Publication date
JP5615164B2 (en) 2014-10-29

Similar Documents

Publication Publication Date Title
JP4248532B2 (en) Sheet glass transfer device
KR101152708B1 (en) Transporting apparatus
CN102054664B (en) Substrate processing apparatus
KR100721550B1 (en) Apparatus for transferring of glass panel
KR100713815B1 (en) Apparatus for transferring of glass panel
TWI472767B (en) Detection device
JP4647378B2 (en) Drying equipment
JP5615164B2 (en) Air supply device
KR101107053B1 (en) Air supply apparatus
JP4217963B2 (en) Plate-shaped body transfer device
KR20080081855A (en) Stocker for semiconductor substrate
ATE452316T1 (en) METHOD FOR OPERATING SEVERAL CLEANROOMS
JP4333925B2 (en) Sheet glass conveyor
CN211870749U (en) Glass panel conveying device
KR100676887B1 (en) Apparatus for transferring of glass panel
KR101330820B1 (en) Apparatus for transferring of glass panel
KR20100105447A (en) Apparatus for treating substrate
JP4509613B2 (en) Substrate processing equipment
JP4186129B2 (en) Plate-shaped body transfer device
JP2005345018A (en) Water removal machine
JP2004331395A (en) Transport device for plates
JP6962683B2 (en) Board processing equipment
KR100721939B1 (en) Apparatus for transferring of glass panel
KR101151776B1 (en) Processing device for large area substrate
JP3225512U (en) Substrate processing equipment

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130521

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140213

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140225

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140523

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140812

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140909

R150 Certificate of patent or registration of utility model

Ref document number: 5615164

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees