JP2012118311A5 - - Google Patents

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Publication number
JP2012118311A5
JP2012118311A5 JP2010268140A JP2010268140A JP2012118311A5 JP 2012118311 A5 JP2012118311 A5 JP 2012118311A5 JP 2010268140 A JP2010268140 A JP 2010268140A JP 2010268140 A JP2010268140 A JP 2010268140A JP 2012118311 A5 JP2012118311 A5 JP 2012118311A5
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JP
Japan
Prior art keywords
signal
light
focus
predetermined frequency
objective lens
Prior art date
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Application number
JP2010268140A
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English (en)
Japanese (ja)
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JP2012118311A (ja
JP5831782B2 (ja
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Priority to JP2010268140A priority Critical patent/JP5831782B2/ja
Priority claimed from JP2010268140A external-priority patent/JP5831782B2/ja
Publication of JP2012118311A publication Critical patent/JP2012118311A/ja
Publication of JP2012118311A5 publication Critical patent/JP2012118311A5/ja
Application granted granted Critical
Publication of JP5831782B2 publication Critical patent/JP5831782B2/ja
Active legal-status Critical Current
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JP2010268140A 2010-12-01 2010-12-01 顕微鏡装置 Active JP5831782B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010268140A JP5831782B2 (ja) 2010-12-01 2010-12-01 顕微鏡装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010268140A JP5831782B2 (ja) 2010-12-01 2010-12-01 顕微鏡装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015215934A Division JP2016033676A (ja) 2015-11-02 2015-11-02 顕微鏡装置

Publications (3)

Publication Number Publication Date
JP2012118311A JP2012118311A (ja) 2012-06-21
JP2012118311A5 true JP2012118311A5 (ru) 2013-12-05
JP5831782B2 JP5831782B2 (ja) 2015-12-09

Family

ID=46501191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010268140A Active JP5831782B2 (ja) 2010-12-01 2010-12-01 顕微鏡装置

Country Status (1)

Country Link
JP (1) JP5831782B2 (ru)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5999431B2 (ja) * 2013-01-29 2016-09-28 株式会社ニコン 焦点維持装置及び顕微鏡
JP6489326B2 (ja) * 2016-09-02 2019-03-27 株式会社ニコン 焦点維持装置及び顕微鏡

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2724502B2 (ja) * 1989-06-19 1998-03-09 東京エレクトロン株式会社 走査型顕微鏡装置
JP3376680B2 (ja) * 1994-03-15 2003-02-10 株式会社ニコン 顕微鏡装置
JP4453088B2 (ja) * 2002-06-14 2010-04-21 株式会社ニコン オートフォーカス装置及び顕微鏡
JP5139170B2 (ja) * 2008-06-24 2013-02-06 オリンパス株式会社 多光子励起測定装置

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