JP2012114371A - Substrate storage container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate storage container capable of extremely easily changing information indicated by identifying members.SOLUTION: A substrate storage container comprises: a container main body having an opening, for storing a substrate through the opening; a lid body for opening and closing the opening of the container main body; and a bottom plate attached to a bottom portion of the container main body. Identifying regions of the bottom plate each includes identifying members for opening and closing through-holes, or sliding along the through-holes. The identifying members are formed so as to be removed from the through-holes or slide along the through-holes by a tool.

Description

  The present invention relates to a substrate storage container, and in particular, a substrate storage that is used by storing a substrate such as a semiconductor wafer, and that transports and stores the substrate during various processing and processing in the semiconductor production process. Concerning the container.

  As this type of substrate storage container, there is known a container configured to include a container main body having an opening on the front surface and a lid for closing the opening of the container main body so as to be sealable. The container body is provided with a pair of support portions disposed so as to face the inner wall surface, and by supporting a part of the periphery of the substrate in each groove arranged in parallel along the vertical direction with these support portions. The substrate is stored in the container body in a horizontal state.

  Such a substrate storage container has a robotic flange attached to the top surface thereof, and can be transported along a rail installed in the factory via the robotic flange.

  In addition, a bottom plate is provided on the bottom surface of the substrate storage container. With this bottom plate, the substrate storage container is conveyed by conveyor, and sensing (identification), positioning, and positioning of the substrate storage container at each processing apparatus installation location. Or it can be fixed.

  Therefore, the bottom plate includes at least a pair of conveyor rails, a location (identification area) where the identification member is attached, a guide member for positioning the substrate storage container, and a substrate storage container processing apparatus. And a fixing portion for fixing to the like.

  And in the area | region where the identification member of the bottom plate is attached, a plurality of through holes are provided, and the through holes are closed by selectively attaching plugs serving as identification members to these through holes. Yes. That is, by selectively closing the through hole with the plug, the presence or absence of the through hole is made to correspond to the specification of the substrate storage container. On the processing apparatus side, the specifications of the substrate storage container can be confirmed by sensing the presence or absence of these through holes (see Patent Documents 1 and 2).

JP 2005-64378 A JP 2000-315721 A

  However, in the above-described substrate storage container, for example, the bottom plate of the substrate storage container that stores a semiconductor wafer having a diameter of 300 mm and is used in a semiconductor component production factory has a total of four positions, two on the left and right sides as identification regions. The provision of the identification member is defined by SEMI standard E47.1. Here, when an operator lifts the substrate storage container, the bottom of the substrate storage container may be lifted or inspected. At this time, a finger accidentally placed between the bottom plate and the identification member may be used. However, there is a problem that the identification member is touched and the identification member is removed.

Recently, in order to perform finer management in a semiconductor component production factory, it has been studied to increase the number of identification parts. For example, as a substrate storage container for storing a semiconductor wafer having a diameter of 450 mm, which is being considered as a next-generation semiconductor wafer, it has been proposed to arrange four through holes with a narrow interval in the left and right identification regions. . This allows to increase the specifications of substrate storage container to the conventional 16-fold (2 ^8/2 4 = 16). However, in this case, when the identification member is attached to each of the through holes formed with a narrow interval, there is not enough space around, so that it is difficult to remove the identification member after that. There is a concern that it will become.

  Further, the substrate storage container includes a lid on the front side thereof, and the lid includes a locking mechanism that locks the container main body. Therefore, the center of gravity of the substrate storage container is stored. It will be eccentric from the center to the front side. Such eccentricity brings about a bad effect that, when the substrate storage container is transported at a high speed, the shaking becomes large and stable transport cannot be performed. For this reason, it has been considered that the bottom plate is provided with a counterweight (weight adjustment counter) for adjusting the center of gravity of the substrate storage container on the rear side (the side opposite to the front side including the lid). However, it is inevitable that the position where the counterweight is provided is in the vicinity of the identification region, and there arises a problem that it becomes more difficult to remove the identification member from the through hole.

  The objective of this invention is providing the board | substrate storage container which can change the information which an identification member shows very easily.

  An object of the present invention is to provide a substrate storage container in which information indicated by an identification member can be changed very easily even if a weight adjustment counter is disposed in the vicinity thereof.

  In order to solve the above-described problems, the present invention changes the information indicated by the identification member using, for example, a jig having a simple configuration.

This invention can be grasped | ascertained by the structure shown below.
(1) A substrate storage container according to the present invention includes: a container main body having an opening for storing a substrate through the opening; a lid for closing the opening of the container main body; and a bottom plate attached to the bottom of the container main body. The substrate storage container includes an identification member that opens and closes the through hole or slides along the through hole in the identification region of the bottom plate, and the identification member is removed from the through hole using a jig. Or it can slide.
(2) In the substrate storage container of the present invention, on the premise of (1), the identification region is formed on the bottom plate on the side opposite to the lid, and a barycentric adjustment counter is provided adjacent to the identification region. It is arranged.

(3) In the substrate storage container of the present invention, on the premise of (1), a plurality of first through holes are formed in the identification region of the bottom plate, and the first selected among these first through holes An identification member that is detachably attached to the through hole, has a second through hole disposed adjacent to each of the plurality of first through holes, and the identification member attached to the first through hole is The second through-hole can be removed by a jig.
(4) The substrate storage container of the present invention is characterized in that the shape of the second through hole is slit-like on the premise of (3).
(5) On the premise of (3), the substrate storage container of the present invention is formed by arranging a plurality of first through holes in parallel, and baffle plates are provided adjacent to the first through holes at both ends thereof. It is characterized by.

  According to the substrate storage container having such a configuration, the information indicated by the identification member can be changed very easily. Further, even if a weight adjustment counter is arranged in the vicinity, the information indicated by the identification member can be changed very easily.

It is the perspective view which looked at the board | substrate storage container of Embodiment 1 of this invention from the substantially front side. It is the perspective view which looked at the board | substrate storage container shown in FIG. 1 from the bottom part side. It is a block diagram which shows the identification member used for the board | substrate storage container of Embodiment 1 of this invention. It is sectional drawing which shows the identification member fitted by the 1st through-hole of the bottom plate of the substrate storage container of this invention. It is the perspective view which shows the bottom plate of the board | substrate storage container of this invention, and a partially expanded view. It is a perspective view which shows the back surface of the bottom plate of the substrate storage container of this invention. It is a disassembled perspective view which shows the counterweight attached to the board | substrate storage container of this invention. It is sectional drawing which shows the counterweight attached to the board | substrate storage container of this invention. It is a perspective view which shows the jig for removing the identification member attached to the board | substrate storage container of this invention. It is the figure which showed the procedure which removes the identification member fitted by the board | substrate storage container of this invention. It is a figure which shows Embodiment 2 of the board | substrate storage container of this invention, and is the top view which showed the identification area | region of the bottom plate. It is a figure corresponding to FIG. 11, and is a figure which shows that one of the identification members is slid. It is a block diagram which shows the identification member used for Embodiment 2 of the substrate storage container of this invention.

DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention (hereinafter referred to as embodiments) will be described in detail with reference to the accompanying drawings. Note that the same number is assigned to the same element throughout the description of the embodiment.
(Embodiment 1)
FIG. 1 is a perspective view of the substrate storage container of the present invention viewed from the front side. FIG. 2 is a perspective view of the substrate storage container shown in FIG. 1 viewed from the bottom. A substrate storage container 100 shown in FIGS. 1 and 2 is, for example, a semiconductor wafer as a substrate to be stored, and its diameter is, for example, 450 mm.

  In FIG. 1, a substrate storage container 100 includes a container main body 1 and a lid body 2. The container main body 1 has a substantially cubic shape with an opening (not shown) on the front side, and the lid 2 is arranged with the opening closed so as to be sealable.

  Although the inside of the container main body 1 is not illustrated, the container main body 1 includes a pair of support portions disposed to face the inner wall surface of the container main body 1. The pair of support portions are respectively formed on the left inner wall surface and the right inner wall surface as viewed from the opening of the container body 1. Then, by supporting a part of the periphery of the semiconductor wafer in the grooves arranged in parallel along the vertical direction with these support portions, the semiconductor wafer can be stored in the container body 1 in a horizontal state. ing.

  A robotic flange 4 is attached to the top surface of the container body 1, and the substrate storage container 100 can be conveyed along a rail (not shown) installed in the factory via the robotic flange 4. It is like that. The robotic flange 4 includes, for example, a base part for mounting, a side wall part in the left-right direction rising vertically from the base part, a side wall part in the front-rear direction connected to the side wall part in the left-right direction, and the side wall parts. It is comprised from the substantially plate-shaped flange part formed in the upper surface of this.

  The lid body 2 is disposed so as to close an opening (not shown) of the container body 1 and includes a locking mechanism 2a. The locking mechanism 2a includes a rotatable circular member 2b and an arm that extends in the vertical direction of the lid 2 and includes a pin (not shown) inserted into an arc groove 2c formed in the circular member 2b. The arm 2d slides in the longitudinal direction by the rotation of the circular member 2b, and when the lid 2 is closed, the tip of the arm 2d is a part of the periphery of the opening of the container body 1 Is locked in a locking groove (not shown). The circular member 2b is rotated using, for example, a key (not shown). Note that two locking mechanisms 2a are provided, for example, and are provided on the left and right when the lid 2 is viewed from the front side. Since the lid 2 incorporates such a locking mechanism 2a, the lid 2 has a relatively large weight. For this reason, the position of the center of gravity of the substrate storage container 100 is stored on the front side (the lid 2). To the side). This eccentricity can be avoided by a counterweight 20 described in detail later.

  A bottom plate 3 is attached to the bottom of the container body 1. As shown in FIG. 2, the bottom plate 3 has a rectangular shape that is substantially the same size as the bottom of the container body 1. For example, three positioning members 5 are incorporated in the bottom plate 3. Two positioning members 5 are provided on the left and right sides of the opening (on the lid body 2 side) of the container main body 1, and one is provided at the center on the rear side (on the opposite side to the lid body 2). That is, these positioning members 5 are arranged so as to be positioned at the tip portions in the three directions of “Y” virtually drawn on the bottom plate 3. The positioning members 5 are fitted with positioning pins arranged at locations corresponding to the positioning members 5 when the substrate storage container 100 is transported to the processing device for processing the semiconductor wafer. As a result, centering of positioning is performed.

  These positioning members 5 are exposed from positioning through holes 7 formed on the surface of the bottom plate 3. Further, on the surface of the bottom plate 3, as viewed from the opening of the container body 1, conveyor rails 6 for conveying the conveyor are formed around each of the front and rear direction and the left and right direction. Further, a fixing means 8 is formed between the two positioning members 5 positioned on the opening (lid 2 side) side of the container body 1 in order to fix the substrate storage container 100 to the processing apparatus. .

  Further, the bottom plate 3 has an identification area (indicated by a dotted frame in the figure) around the positioning member 5 (hereinafter denoted by reference numeral 5a) located on the rear side (opposite side of the lid 2) of the container body 1. Region 9) is formed. For example, when viewed from the opening side of the container body 1, the identification region 9 is arranged at a position slightly ahead of the positioning member 5 a, and two identification regions 9 are provided on the left and right sides of the positioning member 5 a as the center. It has been.

  In each of these identification regions 9, a plurality of first through holes 10 made of, for example, a circle are formed on the surface of the bottom plate 3. For example, four first through holes 10 are formed in parallel in a direction orthogonal to the direction from the opening side of the container body 1 to the rear side in each identification region 9. As a result, a total of eight first through holes 10 are formed in the identification region 9. These first through holes 10 are adapted to be fitted with identification members 12 to be described in detail later as required. Further, on the surface of the bottom plate 3, slit-like second through holes 11 are formed so as to correspond to the first through holes 10 in the vicinity of the first through holes 10. The second through hole 11 is located in front of the first through hole 12 when viewed from the opening side of the container body 1, and the longitudinal direction of the slit is the direction from the opening side of the container body 1 to the rear side. It is matched with. The second through hole 11 is a hole for easily removing the identification member from the first through hole 12 after the identification member 12 is fitted into the first through hole 10, and will be described in detail later. A jig can be inserted. In addition, since the second through hole 11 has a narrow slit shape, it is possible to prevent the operator from inserting a finger into the second through hole 11.

  FIGS. 3A and 3B show an identification member 12 that is detachably attached to the first through hole 10 formed in the identification region 9. FIG. 3A is a perspective view of the identification member 12 as viewed from above, and FIG. 3B is a perspective view of the identification member 12 as viewed from below.

  As shown in FIGS. 3A and 3B, the identification member 12 has a cylindrical portion 15, and one end of the cylindrical portion 15 is closed by a lid portion 13. The lid portion 13 has a flange portion 18 that extends in the radial direction from the peripheral surface of the cylindrical portion 15, and the diameter thereof is larger than the diameter of the cylindrical portion 15. The other end of the cylindrical portion 15 is opened, and for example, four notches 16 extending in the axial direction from the periphery of the opening are formed at equal intervals in the circumferential direction. The opening periphery of the cylindrical portion 15 can change the diameter of the opening periphery by elastic deformation by providing the notch 16 described above. Further, a claw portion 17 protruding in the radial direction is provided on the outer peripheral surface of the opening of the cylindrical portion 15.

  FIG. 4 is a cross-sectional view showing a state in which the identification member 12 is attached to the identification region 9 of the bottom plate 3. FIG. 4 is a cross-sectional view taken along a line passing through the center of the first through hole 10 and extending in the extending direction of the second through hole 11.

  In FIG. 4, there is a bottom plate 3, and the upper side in the figure corresponds to the inside of the bottom plate 3. Here, the through-hole 10 of the bottom plate 3 is configured as a stepped hole having a protruding portion 10A having a peripheral edge protruding toward the inner side of the bottom plate 3 and a smaller inner diameter.

  The identification member 12 is inserted into the first through hole 10 from the lower side in the figure with respect to the bottom plate 3. The identification member 12 is inserted into the first through hole 10 with the claw portion 17 first. In the identification member 12 inserted into the first through hole 10, the claw portion 17 gets over the protruding portion 10 </ b> A formed on the peripheral edge of the first through hole 10, and the collar portion 18 contacts the peripheral surface of the first through hole 10. At the same time, the protruding portion 10 </ b> A is opposed to the cylindrical portion 15 so as to be locked in the first through hole 10. For this reason, the identification member 12 after being inserted into the first through hole 10 has an effect that it is difficult to easily come off from the first through hole 10.

  Since the identification member 12 inserted into the first through hole 10 has the lid portion 13, the first through hole 10 is thereby closed by the identification member 12. Therefore, by selectively closing the first through hole 10 with the identification member 12, the presence or absence of the first through hole 10 can correspond to the specification of the substrate storage container 100. On the processing apparatus side, various specifications of the substrate storage container 100 can be detected by sensing the presence or absence of the first through holes 10.

  FIG. 5A shows a plan view of the bottom plate 3 in the case where the identification member 12 is attached to each of the first through holes 10, and among these, the identification region 9 (solid line round frame in FIG. 5A) is shown. FIG. 5B is an enlarged view. The surface of the bottom plate 3 and the surface of the lid portion 13 of the identification member 12 are substantially flush. FIG. 6A is a perspective view showing the bottom plate 3 shown in FIG. FIG. 6B is an enlarged view of the identification region 9 (solid line round frame) shown in FIG. As is apparent from FIG. 6B, the notch 16 and the claw 17 of the identification member 12 inserted into the first through hole 10 can be visually observed.

As shown in FIG. 6A, a baffle plate 19 is provided around the outermost first through-hole 10 among the first through-holes 10 arranged in parallel to prevent the operator from inserting fingers. ing. The baffle plate 19 is formed by being planted in a wall shape on the bottom plate 3.
This baffle plate 19 prevents an operator from putting a finger in a relatively large hole disposed adjacent to the first through hole 10 and accidentally removing the identification member 12 from the first through hole 10. It can be done. Further, for example, two counterweights 20 are attached to the back surface of the bottom plate 3 in the vicinity of the identification region 9.

The counterweight 20 is disposed on the back side of each identification region 9 when viewed from the opening side of the container body 1. The counterweight 20 balances the weight of the lid 2 of the container body 1 so that the position of the center of gravity of the substrate storage container 100 can coincide with the vicinity of the center of the semiconductor wafer stored in the substrate storage container 100. become.

  7 and 8 show a developed perspective view and a sectional view of the counterweight 20, respectively. As shown in FIG. 7, the counterweight 20 includes a weight cover 21, a sealing O-ring 22, and a weight main body 23, and is attached to the bottom plate 3. The weight cover 21 has a cylindrical shape with the upper portion closed, and has a flange portion 24 at the periphery of the opening at the lower end. The flange portion 24 is formed with a groove 25 (see FIG. 8) in which an O-ring 21 that forms a seal with the bottom plate 3 can be accommodated, and the O-ring is accommodated in the groove 25. ing. For example, two cylindrical bosses 26 for attachment to the bottom plate are formed on the outside of the flange portion 24. The weight main body 23 can be made of a metal member such as aluminum or SUS, and has a cylindrical shape corresponding to the shape of the weight cover 21. The surface of the weight body 23 is preferably provided with a resin coating to prevent contamination by metal ions.

  FIG. 9 is a perspective view showing a jig 27 for removing the identification member 12 inserted into the first through hole 10 of the bottom plate 3 very easily. The jig 27 includes a grip portion 28 and a key portion 29 that extends from the grip portion 28 to some extent and then bends in a J-shape.

  FIGS. 10A to 10C are explanatory views showing a procedure for removing the identification member 12 fitted in the first through hole 10 of the bottom plate 3 using the jig 27. First, as shown in FIG. 10A, the jig 27 is used by inserting the key portion 29 into the second through hole 11 of the bottom plate 3. Since the key portion 29 has a line segment shape when viewed in a plan view, the key portion 29 can be easily inserted into the second through hole 11 formed in a slit shape. Thereafter, as shown in FIG. 10B, when the jig 27 is operated so that the key portion 29 can be moved to the first through hole 10 side, the tip of the key portion 29 is inserted into the first through hole 10. It is positioned above the identification member 12. Then, as shown in FIG. 10C, by operating the jig 27 so as to pull it forward, the tip of the key portion 29 presses the identification member 12 in a direction away from the bottom plate 3. In the identification member 12 pressed by the tip of the key portion 29, the claw portion 17 is disengaged from the protruding portion 10 </ b> A of the first through hole 10 due to the elastic deformation of the cylindrical portion 15 in which the notch 16 is formed. It can be easily removed from the hole 10.

The substrate storage container 100 configured in this way can easily remove the identification member 12 fitted in the first through hole 10 formed in the bottom plate 3 using the jig 27. . Moreover, even if the counterweight 20 is disposed in the vicinity, the identification member 12 fitted in the first through hole 10 can be easily removed using the jig 27 without causing the counterweight 20 to become an obstacle. Will be able to.
(Embodiment 2)

  In Embodiment 1, the identification member 12 is configured to be detachable with respect to the first through hole 10 formed in the bottom plate 3, and each information is represented with or without the identification member 12. However, the identification member is fitted into a long hole formed in the bottom plate, and the identification member is moved to one end side (first position) of the long hole or moved to the other end side (second position). , Each information may be represented.

  FIG. 11 is a plan view when the identification member 30 is configured to be movable on the bottom plate 3. FIG. 11 is a view of the identification region as viewed from the surface side of the bottom plate 3.

  In FIG. 11, for example, four identification members 30 are attached to the identification area. One of the identification members 30 (for example, the identification member on the leftmost side in the figure) will be described. The identification member 30 can move along a long hole 41 formed in the bottom plate 3. Yes. 11 shows the identification member 30 positioned at one end of the long hole, and FIG. 12 drawn corresponding to FIG. 11 shows the identification member 30 positioned at the other end of the long hole 41. ing. The long hole 41 has a function as a guide rail of the identification member 30.

  FIG. 13 is a perspective view showing only the identification member 30 taken out. The identification member 30 includes a detection unit 31 made of a flat circular member, a support column 32 extending perpendicularly from the center of the detection unit 31, and formed at the end of the support column 32 and arranged in parallel with the detection unit 31. It is comprised from the rod-shaped leg part 33 to be performed. Here, both ends of the leg portion 33 are, for example, spherical surfaces. In addition, a hole 34 having a small diameter is provided in a part of the surface of the detection unit 31. The hole 34 is used when a key portion of a jig (not shown) is inserted and the identification member 30 is moved on the bottom plate 3.

  The support column 32 of the identification member 30 is positioned in the elongated hole 41, and the detection unit 31 and the leg 33 are positioned so as to sandwich the bottom plate 3 from the front and back.

  One end of the long hole 41 is provided with an insertion hole 42 for the identification member 30 so as to intersect the long hole 41, and has a shape corresponding to the shape of the leg portion 33 of the identification member 30. Thereby, the identification member 30 can be made to position the support | pillar part 32 in the said long hole 41 by inserting in the insertion port 42 from the leg part 33 side.

  When the identification member 30 is moved to one end of the long hole 31 as shown in FIG. 11, locking portions 50 (indicated by reference numeral 50 a in FIG. 12) whose surfaces are spherical on both sides of the long hole 11. The both ends (in the shape of a sphere) of the leg portion 33 of the identification member 30 move over the locking portion 50a and can be stopped, for example, at the first position. Similarly, when the identification member 30 moves to the other end of the long hole 41 as shown in FIG. 12, a locking portion 50 (reference numeral 50 b in FIG. 11) has a spherical surface on both sides of the long hole 41. And the both ends (which are spherical) of the leg portion 33 of the identification member 30 move over the locking portion 50b, so that, for example, a stop at the first position can be secured. Yes. In this case, as shown in FIG. 11, the locking part 50 (FIG. 11) protrudes slightly larger toward the long hole 42 than the locking part 50b at a position close to the insertion hole 42 side with respect to the locking part 50b. , And the leg portion 33 of the identification member 30 can be prevented from moving to the insertion hole 42 and detaching the identification member 30.

  The movement (sliding) of the identification member 30 along the long hole 41 requires a relatively large force in order to sufficiently secure a stop at either the first position or the second position. However, the identification member 30 can be easily moved by, for example, using a jig having a key portion and pulling the key portion in a desired direction while the tip of the key portion is locked in the hole 34 of the detection portion 31. become.

  The substrate storage container 100 configured in this manner can easily slide the identification member 30 fitted in the long hole 41 formed in the bottom plate 3 using a jig. Moreover, even if the counterweight 20 is disposed in the vicinity, the identification member 30 fitted in the long hole 41 can be easily slid using a jig without the counterweight 20 being obstructed. It becomes like this.

  As mentioned above, although this invention was demonstrated using embodiment, it cannot be overemphasized that the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiments. Further, it is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

  DESCRIPTION OF SYMBOLS 1 ... Container body, 2 ... Lid body, 2a ... Locking mechanism, 2b ... Circular member, 2c ... Circular groove, 2d ... Arm, 3 ... Bottom plate, 4 ... Robotic flange, 5 ... ... positioning member, 6 ... conveyor rail, 7 ... positioning through hole, 8 ... fixing means, 9 ... identification area, 10 ... first through hole, 10A ... projection, 11 ... second penetration Hole: 12: Identification member, 13: Cover part, 15: Cylindrical part, 16: Notch, 17: Claw part, 18: Brim part, 19: Baffle plate, 20: Counterweight, 21... Weight cover, 22... O-ring, 23... Weight body, 24. Flange, 25. O-ring storage groove, 26. ... Key part, 30 ... Identification member, 31 ... Detection part, 32 ... Stand part, 33 ... Parts, 34 ...... hole, 41 ...... slots, 42 ...... insertion hole 100 ...... substrate storage container.

Claims (5)

A container storage container comprising: a container main body that has an opening and stores a substrate through the opening; a lid that closes the opening of the container main body; and a bottom plate that is attached to a bottom portion of the container main body.
The identification area of the bottom plate is provided with an identification member that opens and closes a through hole or slides along the through hole,
A substrate storage container characterized in that the identification member can be removed from the through-hole using a jig or slidable.   2. The substrate storage container according to claim 1, wherein the identification area is formed on the bottom plate on a side opposite to the lid, and a barycentric adjustment counter is disposed adjacent to the identification area. . A plurality of first through holes are formed in the identification region of the bottom plate, and includes an identification member that is detachably attached to a first through hole selected from these first through holes,
A second through hole is formed in proximity to each of the plurality of first through holes;
2. The substrate storage container according to claim 1, wherein the identification member attached to the first through hole can be removed by a jig through the second through hole.   The substrate storage container according to claim 3, wherein the second through hole has a slit shape.   The substrate storage container according to claim 3, wherein the plurality of first through holes are formed side by side, and baffle plates are provided adjacent to the first through holes at both ends thereof.

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