JP2012111023A - Plate-like member grinding device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To grind a plate-like member through feeding motion of the plate-like member by a feeding mechanism and circular locus plane motion of the plate-like member by a plane grinding motion mechanism, improve the surface roughness of the plate-like member in conjunction with reveal of a new grinding surface by transfer of an abrasive tape in a transferring direction, and improve grinding workability.SOLUTION: A tape transferring mechanism B, a tape guiding mechanism C, and a tape press-contact mechanism D are arranged at a fixing machine body 5. A plane grinding motion mechanism F is arranged for making a holding base 1 carry out circular locus plane motion R by simultaneously reciprocally moving it in the same direction H as the transferring direction G of the abrasive tape T and an orthogonal direction K orthogonal to the transferring direction of the grinding tape, respectively.

Description

  The present invention relates to a plate-shaped member polishing apparatus used when polishing the surface of a plate-shaped member such as a copper plate, a printed board, a filter, and a stainless plate.

  Conventionally, as this type of plate member polishing apparatus, an apparatus body, a holding table capable of holding the plate member, and a polishing tape capable of polishing the surface of the plate member are continuously or intermittently provided between a pair of tape reels. A tape transfer mechanism for transferring the tape, a tape guide mechanism for guiding the polishing tape to be transferred between the tape reels to the surface of the plate member, and a polishing tape guided by the tape guide mechanism in pressure contact with the surface of the plate member. A structure having a tape pressure contact mechanism and a feed mechanism that feeds and moves the holding table is known.

Japanese Patent No. 3997480

  However, in the case of these conventional structures, the tape transport mechanism, the tape guide mechanism, and the tape pressure contact mechanism perform a planar polishing motion together by a planar polishing motion mechanism, and polish the plate-shaped member in cooperation with the feeding motion of the plate-shaped member. For this reason, the moment of inertia of the planar polishing motion is increased, which may cause the planar polishing motion to become unsmooth, which may affect the polishing accuracy and workability of the plate-like member. have.

  SUMMARY OF THE INVENTION The present invention aims to solve such inconveniences. Among the present inventions, the invention according to claim 1 is an apparatus body, a holding base capable of holding a plate-like member, and the plate-like member. A tape transfer mechanism for transferring a polishing tape capable of polishing the surface of the tape continuously or intermittently between a pair of tape reels, and a tape guide mechanism for opposingly guiding the polishing tape transferred between the tape reels to the surface of the plate member And a tape pressing mechanism for pressing the polishing tape guided by the tape guiding mechanism against the surface of the plate-like member, and a feeding mechanism for feeding and moving the holding base. The fixing machine body is provided with the tape transfer mechanism, the tape guide mechanism, and the tape pressure contact mechanism, and the holding base is set in the same direction as the polishing tape transfer direction and in the orthogonal direction orthogonal to the polishing tape transfer direction. In the plate-like member polishing apparatus characterized by comprising providing a planar polishing motion mechanism that during reciprocation is allowed by circular locus planar motion.

  According to a second aspect of the present invention, as the planar polishing motion mechanism, a transfer direction moving base that can reciprocate in the same direction as the transfer direction of the polishing tape, and a reciprocation in an orthogonal direction orthogonal to the transfer direction of the polishing tape. A movable orthogonal direction moving table and an eccentric mechanism for reciprocating the moving direction moving table and the orthogonal direction moving table simultaneously are provided.

  According to a third aspect of the present invention, there is provided a counterweight mechanism having a counterweight member that reciprocates in a direction opposite to each reciprocating direction of the transfer direction moving table and the orthogonal direction moving table. In the invention according to claim 4, the counterweight mechanism includes a transfer direction auxiliary table that reciprocates in a direction opposite to the transfer direction moving table, and a direction opposite to the orthogonal direction moving table. And an auxiliary eccentric mechanism for simultaneously reciprocating the transfer direction auxiliary table and the orthogonal direction auxiliary table, respectively, and the invention according to claim 5. The eccentric mechanism and the auxiliary eccentric mechanism are structured to be driven by the same reciprocating motor.

  As described above, according to the first aspect of the present invention, a fixing machine body is provided in the apparatus body, the tape transport mechanism, a tape guide mechanism, and a tape pressure contact mechanism are provided in the fixing body, and the holding base is provided. Is provided with a planar polishing motion mechanism for reciprocating simultaneously in the same direction as the polishing tape transfer direction and in the orthogonal direction orthogonal to the polishing tape transfer direction to cause a circular locus plane movement. The plate-like member can be moved in a circular path by a plane polishing motion mechanism to polish the plate-like member as well as feeding, and the appearance of a new polished surface due to the transfer in the transfer direction of the polishing tape is also combined. Thus, the surface roughness of the plate-like member can be improved and the polishing workability can be improved.

  Further, in the invention described in claim 2, as the planar polishing motion mechanism, a transfer direction moving base that can reciprocate in the same direction as the transfer direction of the polishing tape, and an orthogonal direction orthogonal to the transfer direction of the polishing tape. Since there is an orthogonal moving table that can reciprocate freely, and an eccentric mechanism that simultaneously moves the moving direction moving table and the orthogonal moving table, the moving direction moving table and the orthogonal moving table can reciprocate smoothly. And the structure can be simplified.

  According to a third aspect of the present invention, there is provided a counterweight mechanism having a counterweight member that reciprocally moves in a direction opposite to the reciprocating direction of the transfer direction moving table and the orthogonal direction moving table. Therefore, the counterweight member that reciprocates in the opposite direction the vibration phenomenon of the transfer direction moving table, the orthogonal direction moving table, and the polishing tape caused by the reaction force generated when the reciprocating movement of the transfer direction moving table and the orthogonal direction moving table is reversed. Accordingly, it is possible to improve the polishing performance of the plate-like member with the polishing tape, and in the invention according to claim 4, the counterweight mechanism includes the transfer direction moving table and Transfer direction auxiliary table that reciprocates in the opposite direction, orthogonal direction auxiliary table that reciprocates in the opposite direction to the orthogonal direction movement table, transfer direction auxiliary table and orthogonal direction Since it comprises an auxiliary eccentric mechanism for reciprocally moving the auxiliary bases simultaneously, the structure of the counterweight mechanism can be simplified. In the invention of claim 5, the eccentric mechanism and the auxiliary eccentric mechanism are Since it is driven by the same reciprocating motor, it can be reciprocated in synchronization with each other in the transfer direction moving table, orthogonal direction moving table, transfer direction auxiliary table and orthogonal direction auxiliary table, and the structure is simple. Can be

1 is an overall front view of an embodiment of the present invention. It is a partial enlarged front view of the embodiment of the present invention. It is a fragmentary top view of the example of an embodiment of the invention. It is a partial enlarged plan view of an example of an embodiment of the invention. It is an expansion side of the embodiment of the present invention. It is a grinding | polishing process description perspective view of the embodiment of this invention.

  1 to 6 show an embodiment of the present invention. In this case, as shown in FIG. 1, the apparatus body A, the holding base 1 capable of holding the plate member W, and the surface of the plate member W are roughly divided. The tape transfer mechanism B for transferring the polishing tape T capable of polishing the tape between the tape reels 2 and 2 continuously or intermittently, and the polishing tape T for transferring between the tape reels 2 and 2 on the surface of the plate-like member W The tape guide mechanism C for guiding the tape, the tape pressing mechanism D for pressing the polishing tape T guided by the tape guide mechanism C against the surface of the plate-like member W, the feed mechanism E for feeding the holding base 1 and the above holding A planar polishing motion mechanism F for reciprocally moving the table 1 simultaneously in the same direction H as the polishing tape T transfer direction G and in the orthogonal direction K perpendicular to the polishing tape T transfer direction G to perform a circular locus plane motion R is provided. It is configured.

  In this case, the holding base 1 is provided with a suction mechanism and a gripping mechanism (not shown) capable of fixing and holding the plate-like member W, and the feeding mechanism E includes the apparatus body A as shown in FIGS. The feed table 3 is provided on the slide table 3a so as to be reciprocally movable. The feed table 3 includes a ball screw mechanism 4 including a feed motor 4a, a ball screw 4b, and a nut portion 4c.

  Reference numeral 5 denotes a fixed machine body, which is erected in a fixed state on the apparatus machine body A as shown in FIG. 1, and the fixed machine body 5 is provided with the tape transport mechanism B, the tape guide mechanism C, and the tape pressure contact mechanism D. The tape transport mechanism B is provided with a pair of left and right reel shafts 5a and 5a on the fixed body 5, and the tape reels 2 and 2 are rotatably attached to the reel shafts 5a and 5a, and one of the tape reels 2 is unwound by the unwinding motor 2a. The other tape reel 2 is unwound and rotated by the winding motor 2b, and the unused polishing tape T is wound from the left tape reel 2 in the drawing to the other right tape reel 2 in the drawing. The structure is such that it is wound and transferred via a pair of left and right guide rolls 5b and 5b, and the polishing tape T is unwound between the pair of tape reels 2 and 2 by controlling the rotation and stop of the motor 2a and the winding motor 2b. Freely continuously or intermittently moved is constituted by hung.

  In this case, the plate-like member W has a size of about 300 mm × 300 mm and a thickness of about 3 mm, and the polishing tape T has a width of about 345 mm. For example, a polyester film, metal, cloth, foam A material obtained by coating or bonding a fixed abrasive having a predetermined particle size such as aluminum oxide, chromium oxide, silicon carbide, diamond or the like on a substrate such as a film or a flocking cloth is used. Lubricant is supplied using a dry polishing structure that does not use a lubricant using a polishing tape having a structure in which fixed abrasive grains are fixed to a base material, or a polishing tape that has a structure in which fixed abrasive grains are fixed to a base material. Adopting a wet polishing structure that polishes while polishing, or a wet polishing structure that supplies abrasive containing free abrasive grains using a woven fabric, non-woven fabric, foam film, or flocked cloth without fixed abrasive as a polishing tape Accordingly, the polishing tape T here includes a polishing tape having a structure in which fixed abrasive grains are fixed and a polishing tape having a structure in which fixed abrasive grains are not fixed.

  In this case, as shown in FIG. 1, the tape guide mechanism C is provided with a pair of left and right guide rolls 5c and 5c in the middle portion of the fixed machine body 5 so as to be rotatable. The polishing tape T between the pair of tape reels 2 and 2 which is unwound from one tape reel 2 and transferred to the other tape reel 2 on the right side in the figure is moved to the plate-like member W by a pair of left and right guide rolls 5c and 5c. It is configured to transfer and guide in one direction of the transfer direction G facing the surface.

  In this case, as shown in FIGS. 3, 4, 5, 6, and 7, the tape pressure contact mechanism D has a mounting plate 5d projecting from the lower central portion of the fixed machine body 5, and a pressure welding cylinder 5e on the mounting plate 5d. And a roll-like pressure contact member 5g is attached to the rod 5f of the pressure contact cylinder 5e, and the polishing tape T guided by the tape guide mechanism C is pressed against the surface of the plate-like member W. It is configured to do.

Further, in this case, as the planar polishing motion mechanism F, as shown in FIGS. 2, 3, and 4, a transfer direction moving base 6 is placed on the feed base 3 of the feed mechanism E by a sliding portion 6a. It is provided so as to be able to reciprocate in the same direction H as the transfer direction G, and an orthogonal direction moving table 7 can be reciprocated in the orthogonal direction K perpendicular to the transfer direction G of the polishing tape T by the sliding portion 7a on this transfer direction moving table 6. And an eccentric mechanism 8 for reciprocally moving the transfer direction moving table 6 and the orthogonal direction moving table 7 at the same time to cause a circular locus plane motion R. In this case, the eccentric mechanism 8 reciprocates to the feed table 3. and Tate設driving shaft 8b is provided with the rotating motor 8a, and rotates the drive shaft 8b by a belt 8c, eccentricity _{S 1,} the eccentric shaft in this case 2.5mm with respect to the drive shaft 8b of the rotation axis to the driving shaft 8b 8d is attached to the eccentric shaft 8d One end of the connecting link 8e is pivotally attached by a sliding hole 8f, the other end of the connecting link 8e is attached to the orthogonal moving table 7, the holding table 1 is mounted on the orthogonal moving table 7, and a reciprocating motor 8a is attached. By rotating the eccentric shaft 8d eccentrically, the holder 1 is reciprocated simultaneously in the same direction H as the transfer direction G of the polishing tape T and in the orthogonal direction K perpendicular to the transfer direction G of the polishing tape T, thereby causing a circular locus plane. It is configured to exercise R.

Reference numeral 9 denotes a counterweight mechanism, which reciprocates in the opposite directions M and N with respect to the reciprocating movement directions H and K of the transfer direction moving table 6 and the orthogonal direction moving table 7 as shown in FIGS. In this case, as shown in FIG. 4, a relief groove 6b is formed in the transfer direction moving table 6, and the transfer direction auxiliary table 11 is formed on the feed table 3 by the sliding portion 11a. Is provided so as to be able to reciprocate in the direction M opposite to the transfer direction moving table 6, and the orthogonal direction auxiliary table 12 can be reciprocated in the direction N opposite to the orthogonal direction moving table 7 by the sliding portion 12 e on the transfer direction auxiliary table 11. And an auxiliary eccentric mechanism 13 that reciprocates the transfer direction auxiliary table 11 and the orthogonal direction auxiliary table 12 simultaneously. In this case, the auxiliary drive shaft 12a is provided vertically on the feed table 3 as the auxiliary eccentric mechanism 13. And above The auxiliary drive shaft 12a of the belt 8c by placement into triangular ring rotated by the reciprocating motor 8a, eccentricity S ₂ from the axis of rotation of the auxiliary drive shaft 12a to the auxiliary drive shaft _12a, in this case, a crank plate having a 25mm Install the 12b, and pivotally attached pin 12c to the position of the eccentric amount S ₂ from the rotational axis of the auxiliary drive shaft 12a on the radial upright crank plate 12b, pivoted to one end portion of the connecting link 12d to pivot pin 12c Then, the other end portion of the connecting link 12d is attached to the orthogonal auxiliary table 12, and the crank plate 12b is rotated by the same reciprocating motor 8a of the eccentric mechanism 8 and the auxiliary eccentric mechanism 13, whereby the counterweight member 10 is The transfer direction moving table 6 and the orthogonal direction moving table 7 are configured to reciprocate in opposite directions M and N with respect to the reciprocating directions H and K of the reciprocating direction.

  Although not shown in the figure, the control means having a control circuit such as a personal computer is provided, and this control means provides a tape transport mechanism B, a tape guide mechanism C, a tape pressure contact mechanism D, a feed mechanism E, Each drive element such as the planar polishing motion mechanism F is controlled.

  Since this embodiment is configured as described above, as shown in FIG. 1, the plate member W to be polished is held on the holding table 1, and the holding table 1 is moved by the feed mechanism E and moved by the feed mechanism E, and by the tape transfer mechanism B. The polishing tape T is transferred continuously or intermittently in one direction between the pair of tape reels 1 and 1, and the polishing tape T transferred between the tape reels 1 and 1 is transferred to the surface of the plate-like member W by the tape guide mechanism C. The polishing tape T guided by the tape guide mechanism C is pressed against the surface of the plate member W by the tape pressing mechanism D, and the plate member W is polished by the polishing tape T.

  At this time, as shown in FIG. 1, FIG. 2, FIG. 3, the fixing machine body 5 is disposed in the apparatus body A, the tape transport mechanism B, the tape guide mechanism C, and the tape pressure contact mechanism D are provided in the fixing machine body 5. There is provided a planar polishing motion mechanism F for reciprocally moving the holding table 1 simultaneously in the same direction H as the transfer direction G of the polishing tape T and in the orthogonal direction K perpendicular to the transfer direction G of the polishing tape T to perform a circular locus plane motion R. Therefore, as shown in FIG. 6, the plate-like member W feeds the feed mechanism E and the plate-like member W polishes the plate-like member W by the circular movement plane motion R by the plane polishing motion mechanism F. The surface roughness of the plate-like member W can be improved and the polishing workability can be improved together with the appearance of a new polished surface by the transfer of the polishing tape T in the transfer direction G. it can.

  In this case, as the planar polishing motion mechanism F, as shown in FIGS. 2 and 3, the transfer direction moving table 6 that can reciprocate in the same direction H as the transfer direction G of the polishing tape T, and the transfer direction G of the polishing tape T are used. Since there is provided an orthogonal direction moving table 7 that can reciprocate in an orthogonal direction K orthogonal to each other, and an eccentric mechanism 8 that reciprocates the transfer direction moving table 6 and the orthogonal direction moving table 7 simultaneously, the transfer direction moving table 6 and The orthogonal movement table 7 can be smoothly reciprocated and the structure can be simplified.

  In this case, as shown in FIGS. 2, 4 and 5, the counters reciprocally move in opposite directions MN with respect to the reciprocating movement directions H and K of the transfer direction moving table 6 and the orthogonal direction moving table 7. Since the counterweight mechanism 9 having the weight member 10 is provided, the transfer direction moving table 6 and the orthogonal direction moving table are generated by the reaction force generated when the transfer direction moving table 6 and the orthogonal direction moving table 7 are reciprocally reversed. And the vibration phenomenon of the polishing tape T can be suppressed by the counterweight member 10 that reciprocates in the opposite directions M and N, and the polishing performance of the plate member W by the polishing tape T can be improved accordingly, In this case, the counterweight mechanism 9 reciprocates in the transfer direction auxiliary table 11 that reciprocates in the direction M opposite to the transfer direction moving table 6 and in the direction N opposite to the orthogonal direction moving table 7. Since the cross-direction auxiliary base 12 and the auxiliary eccentric mechanism 13 for reciprocating the transfer-direction auxiliary base 11 and the orthogonal direction auxiliary base 12 at the same time, respectively, the structure of the counterweight mechanism 9 can be simplified. Since the eccentric mechanism 8 and the auxiliary eccentric mechanism 13 are driven by the same reciprocating motor 8a, the transfer direction moving table 6, the orthogonal direction moving table 7, the transfer direction auxiliary table 11, and the orthogonal direction auxiliary are supported. The bases 12 can be reciprocated in synchronization with each other, and the structure can be simplified.

  The present invention is not limited to the above embodiment, and the structure of the tape transport mechanism B, the tape guide mechanism C, the tape pressure contact mechanism D, the eccentric mechanism 8, the auxiliary eccentric mechanism 13 and the like is appropriately changed and designed. Is done.

  Further, for example, in the above-described embodiment, a dry polishing structure is used, but a processing liquid or a lubricant containing free abrasive grains or chemical agents of various materials is provided between the plate-like member W and the polishing tape T. There may be a so-called wet polishing structure to be supplied, which is selected and designed according to the type of plate member W and polishing conditions.

  As described above, the intended purpose can be sufficiently achieved.

A machine body W plate-like member T polishing tape B tape transfer mechanism C tape guide mechanism D tape pressure contact mechanism E feed mechanism G transport mechanism H same direction K orthogonal direction R circular locus plane motion F plane polishing motion mechanism M opposite direction N opposite direction DESCRIPTION OF SYMBOLS 1 Holding stand 2 Tape reel 5 Fixed machine body 6 Transfer direction moving table 7 Orthogonal direction moving table 8 Eccentric mechanism 8a Reciprocating motor 9 Counterweight mechanism 10 Counterweight member 11 Transfer direction auxiliary table 12 Orthogonal direction auxiliary table 13 Auxiliary eccentric mechanism

Claims (5)

  An apparatus body, a holding base capable of holding a plate-like member, a tape transfer mechanism for transferring a polishing tape capable of polishing the surface of the plate-like member continuously or intermittently between a pair of tape reels, and the tape reel A tape guide mechanism for opposingly guiding the polishing tape to be transported between the surfaces of the plate member, a tape pressing mechanism for pressing the polishing tape guided by the tape guide mechanism against the surface of the plate member, and the holding table. A feed mechanism for feeding motion, a fixed machine body is provided in the machine body, the tape transport mechanism, a tape guide mechanism and a tape pressure contact mechanism are provided in the fixed machine body, and the holding table is transported by the polishing tape. A planar polishing mechanism comprising a plane polishing motion mechanism that simultaneously moves back and forth in the same direction as the direction and a direction orthogonal to the direction in which the polishing tape is transported to perform a circular locus plane motion. Apparatus.   As the planar polishing motion mechanism, a transfer direction moving table that can reciprocate in the same direction as the transfer direction of the polishing tape, an orthogonal direction moving table that can reciprocate in a direction orthogonal to the transfer direction of the polishing tape, 2. The plate member polishing apparatus according to claim 1, further comprising an eccentric mechanism for reciprocally moving the transfer direction moving table and the orthogonal direction moving table, respectively.   3. A counterweight mechanism having a counterweight member that reciprocates in a direction opposite to the reciprocating direction of each of the transfer direction moving table and the orthogonal direction moving table. Plate member polishing apparatus.   The counterweight mechanism includes a transfer direction auxiliary table that reciprocates in a direction opposite to the transfer direction movement table, an orthogonal direction auxiliary table that reciprocates in a direction opposite to the orthogonal direction movement table, the transfer direction auxiliary table, and the orthogonal direction. 4. A plate-shaped member polishing apparatus according to claim 3, comprising an auxiliary eccentric mechanism for reciprocally moving the direction auxiliary bases simultaneously.   5. The plate member polishing apparatus according to claim 4, wherein the eccentric mechanism and the auxiliary eccentric mechanism are driven by the same reciprocating motor.