JP2012108476A5 - - Google Patents

Download PDF

Info

Publication number
JP2012108476A5
JP2012108476A5 JP2011190375A JP2011190375A JP2012108476A5 JP 2012108476 A5 JP2012108476 A5 JP 2012108476A5 JP 2011190375 A JP2011190375 A JP 2011190375A JP 2011190375 A JP2011190375 A JP 2011190375A JP 2012108476 A5 JP2012108476 A5 JP 2012108476A5
Authority
JP
Japan
Prior art keywords
imaging
test object
moving
image
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011190375A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012108476A (ja
JP6071177B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2011190375A external-priority patent/JP6071177B2/ja
Priority to JP2011190375A priority Critical patent/JP6071177B2/ja
Priority to KR1020137012934A priority patent/KR20130083453A/ko
Priority to EP11779865.2A priority patent/EP2633358A1/en
Priority to BR112013009408A priority patent/BR112013009408A2/pt
Priority to PCT/JP2011/073774 priority patent/WO2012056920A1/en
Priority to US13/823,062 priority patent/US20130169788A1/en
Priority to RU2013124820/28A priority patent/RU2540453C2/ru
Priority to CN201180051439.1A priority patent/CN103180769B/zh
Publication of JP2012108476A publication Critical patent/JP2012108476A/ja
Publication of JP2012108476A5 publication Critical patent/JP2012108476A5/ja
Publication of JP6071177B2 publication Critical patent/JP6071177B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011190375A 2010-10-29 2011-09-01 顕微鏡、画像取得装置及び画像取得システム Expired - Fee Related JP6071177B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2011190375A JP6071177B2 (ja) 2010-10-29 2011-09-01 顕微鏡、画像取得装置及び画像取得システム
RU2013124820/28A RU2540453C2 (ru) 2010-10-29 2011-10-11 Микроскоп, устройство получения изображения и система получения изображения
EP11779865.2A EP2633358A1 (en) 2010-10-29 2011-10-11 Microscope, image acquisition apparatus, and image acquisition system
BR112013009408A BR112013009408A2 (pt) 2010-10-29 2011-10-11 microscópio, aparelho de aquisição de imagem, e sistema de aquisição de imagem
PCT/JP2011/073774 WO2012056920A1 (en) 2010-10-29 2011-10-11 Microscope, image acquisition apparatus, and image acquisition system
US13/823,062 US20130169788A1 (en) 2010-10-29 2011-10-11 Microscope, image acquisition apparatus, and image acquisition system
KR1020137012934A KR20130083453A (ko) 2010-10-29 2011-10-11 현미경, 화상 취득 장치 및 화상 취득 시스템
CN201180051439.1A CN103180769B (zh) 2010-10-29 2011-10-11 显微镜、图像获取装置和图像获取系统

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010243802 2010-10-29
JP2010243802 2010-10-29
JP2011190375A JP6071177B2 (ja) 2010-10-29 2011-09-01 顕微鏡、画像取得装置及び画像取得システム

Publications (3)

Publication Number Publication Date
JP2012108476A JP2012108476A (ja) 2012-06-07
JP2012108476A5 true JP2012108476A5 (enrdf_load_stackoverflow) 2014-10-16
JP6071177B2 JP6071177B2 (ja) 2017-02-01

Family

ID=46494101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011190375A Expired - Fee Related JP6071177B2 (ja) 2010-10-29 2011-09-01 顕微鏡、画像取得装置及び画像取得システム

Country Status (1)

Country Link
JP (1) JP6071177B2 (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015522850A (ja) * 2012-07-05 2015-08-06 ナショナル ユニバーシティ オブ シンガポール 光学顕微鏡およびその制御方法
JP6245177B2 (ja) * 2012-10-15 2017-12-13 ソニー株式会社 画像取得装置およびスライド傾き測定方法
JP2014178403A (ja) * 2013-03-14 2014-09-25 Sony Corp デジタル顕微鏡装置、情報処理方法、および情報処理プログラム
CN104777604A (zh) * 2015-04-16 2015-07-15 浙江大学 基于usb显微探头和步进扫描台的可定位显微成像系统
CN105938243B (zh) * 2016-06-29 2018-04-13 华南理工大学 一种tft‑lcd检测中多倍率显微镜快速对焦方法
CN106291899A (zh) * 2016-09-29 2017-01-04 东方晶源微电子科技(北京)有限公司 照明模块、光学显微系统及电子束检测装置
JP7717487B2 (ja) * 2021-04-30 2025-08-04 株式会社キーエンス 分析装置
JP7720163B2 (ja) 2021-04-30 2025-08-07 株式会社キーエンス 分析装置
CN118400615B (zh) * 2024-06-25 2024-10-11 三诺生物传感股份有限公司 一种血液分析仪的相机拍照方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5073314B2 (ja) * 2007-02-26 2012-11-14 大塚電子株式会社 顕微測定装置
US8059336B2 (en) * 2007-05-04 2011-11-15 Aperio Technologies, Inc. Rapid microscope scanner for volume image acquisition
JP2010101959A (ja) * 2008-10-21 2010-05-06 Olympus Corp 顕微鏡装置

Similar Documents

Publication Publication Date Title
JP2012108476A5 (enrdf_load_stackoverflow)
EP2579100A3 (en) Inspection apparatus, lithographic apparatus, and device manufacturing method
MX356121B (es) Sístema y método para medir dimensiones internas de un objeto mediante tomografía de coherencia óptica.
CN102183221B (zh) 显微系统光轴垂直度的测量方法
JP2015090471A5 (enrdf_load_stackoverflow)
JP2011186305A5 (enrdf_load_stackoverflow)
JP2017107105A5 (enrdf_load_stackoverflow)
EP4354118A3 (en) Microscope device
JP2012134553A5 (ja) 露光装置、液体検出方法、及びデバイス製造方法
EP2702416A4 (en) GRID MICROSCOPE WITH COMPACT SCANNER
EP2645079A3 (en) Hardness tester
RU2013124820A (ru) Микроскоп, устройство получения изображения и система получения изображения
CN105136063A (zh) 一种基于远心物镜的显微双目立体视觉测量装置
EP2813434A3 (fr) Banc de test pour senseur stellaire, et procédé de test
WO2013151421A8 (en) Integrated optical and charged particle inspection apparatus
CN203325305U (zh) 一种光的干涉实验仪
EP2806251A3 (en) Fiber optic position sensor and method for using
JP2017050120A5 (enrdf_load_stackoverflow)
JP2013140846A5 (enrdf_load_stackoverflow)
JP2019500607A5 (enrdf_load_stackoverflow)
JP2012103072A5 (enrdf_load_stackoverflow)
EP2693167A3 (en) Optical device and method for measuring microscopic structures
CN104833480A (zh) 一种测试刃边倾角对调制传递函数影响的装置及方法
JP2011145468A5 (enrdf_load_stackoverflow)
JP2013092508A5 (enrdf_load_stackoverflow)