JP2012104861A5 - - Google Patents

Download PDF

Info

Publication number
JP2012104861A5
JP2012104861A5 JP2012030228A JP2012030228A JP2012104861A5 JP 2012104861 A5 JP2012104861 A5 JP 2012104861A5 JP 2012030228 A JP2012030228 A JP 2012030228A JP 2012030228 A JP2012030228 A JP 2012030228A JP 2012104861 A5 JP2012104861 A5 JP 2012104861A5
Authority
JP
Japan
Prior art keywords
laser
component
extreme ultraviolet
light
linearly polarized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012030228A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012104861A (ja
JP5223015B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012030228A priority Critical patent/JP5223015B2/ja
Priority claimed from JP2012030228A external-priority patent/JP5223015B2/ja
Publication of JP2012104861A publication Critical patent/JP2012104861A/ja
Publication of JP2012104861A5 publication Critical patent/JP2012104861A5/ja
Application granted granted Critical
Publication of JP5223015B2 publication Critical patent/JP5223015B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012030228A 2012-02-15 2012-02-15 極端紫外光源装置 Expired - Fee Related JP5223015B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012030228A JP5223015B2 (ja) 2012-02-15 2012-02-15 極端紫外光源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012030228A JP5223015B2 (ja) 2012-02-15 2012-02-15 極端紫外光源装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2007127777A Division JP4932592B2 (ja) 2007-05-14 2007-05-14 極端紫外光源装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012095210A Division JP5511882B2 (ja) 2012-04-19 2012-04-19 極端紫外光源装置

Publications (3)

Publication Number Publication Date
JP2012104861A JP2012104861A (ja) 2012-05-31
JP2012104861A5 true JP2012104861A5 (cg-RX-API-DMAC7.html) 2012-07-12
JP5223015B2 JP5223015B2 (ja) 2013-06-26

Family

ID=46394825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012030228A Expired - Fee Related JP5223015B2 (ja) 2012-02-15 2012-02-15 極端紫外光源装置

Country Status (1)

Country Link
JP (1) JP5223015B2 (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6252358B2 (ja) * 2014-05-27 2017-12-27 ウシオ電機株式会社 極端紫外光光源装置
JP7426299B2 (ja) * 2020-06-26 2024-02-01 ギガフォトン株式会社 極端紫外光生成システム及び電子デバイスの製造方法
JP7657877B1 (ja) 2023-09-25 2025-04-07 レーザーテック株式会社 光源装置、検査装置、露光装置、光源制御方法、検査方法及び露光方法
JP7657878B1 (ja) 2023-09-25 2025-04-07 レーザーテック株式会社 光源装置、検査装置、露光装置、光源制御方法、検査方法及び露光方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3363835B2 (ja) * 1999-06-07 2003-01-08 住友重機械工業株式会社 戻り光除去方法と装置
JP2000357835A (ja) * 1999-06-15 2000-12-26 Amada Eng Center Co Ltd レーザ発振器
JP2002280322A (ja) * 2001-03-15 2002-09-27 Ishikawajima Harima Heavy Ind Co Ltd レーザ照射装置及びレーザ照射方法
JP4875879B2 (ja) * 2005-10-12 2012-02-15 株式会社小松製作所 極端紫外光源装置の初期アライメント方法

Similar Documents

Publication Publication Date Title
JP6401283B2 (ja) Ｅｕｖ光源内でターゲット材料の液滴を制御するためのシステム及び方法
JP7241143B2 (ja) 極端紫外光源におけるターゲット膨張率制御
CN104472019B (zh) 具有激光射束源和用于操纵激光射束的射束导引设备的极紫外激励光源
ATE478357T1 (de) Auf einem wellenlängenplättchen basierende vorrichtung und methode zur reduzierung von speckles in laserbeleuchtungssystemen
JP6054028B2 (ja) レーザ装置および極端紫外光生成システム
JP2013083980A5 (cg-RX-API-DMAC7.html)
WO2013083335A3 (en) Radiation source
JP2010161092A5 (cg-RX-API-DMAC7.html)
WO2012114178A3 (en) Optical device, laser apparatus, and extreme ultraviolet light generation system
KR102661250B1 (ko) 극자외선 광원에서 타겟 궤적 계측 방법
JP2012104861A5 (cg-RX-API-DMAC7.html)
JP2016512383A5 (cg-RX-API-DMAC7.html)
JP2013084807A (ja) アライメントシステム
JP2003255551A5 (ja) 露光装置及び収束レンズの制御方法
US9888555B2 (en) Transmission system for transmitting pulse laser beam to extreme ultraviolet light chamber, and laser system
JP2013529775A5 (cg-RX-API-DMAC7.html)
JP2009141048A5 (cg-RX-API-DMAC7.html)
US11374379B2 (en) Laser system, extreme ultraviolet light generation apparatus, and extreme ultraviolet light generation method
JP2015152405A5 (cg-RX-API-DMAC7.html)
JP2014168608A5 (cg-RX-API-DMAC7.html)
US20190239329A1 (en) Extreme ultraviolet light generation apparatus
JP5223015B2 (ja) 極端紫外光源装置
JP2014228492A (ja) レーザ装置
WO2015166524A1 (ja) 極端紫外光生成装置
JP2008129315A5 (cg-RX-API-DMAC7.html)