JP2012089752A - Substrate processing system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate processing system that prevents a communication failure due to being unable to return a response for a response request within a time limit.SOLUTION: A substrate processing system is composed of at least one substrate processing device 1 for processing a substrate, and a management device 29 for managing the substrate processing device via communication means 31, and is connected online while checking a communication state between the substrate processing device 1 and the management device 29. The substrate processing device 1 transmits a prescribed message to the management device 29 and also transmits a message confirming the communication state with the management device 29 together.

Description

  The present invention relates to a substrate processing system including a substrate processing apparatus that performs processing such as oxidation processing, diffusion processing, and thin film generation on a substrate such as a wafer.

  As one of the processing steps of the semiconductor manufacturing apparatus, there is a substrate processing step in which a substrate such as a silicon wafer is subjected to processing such as oxidation processing, diffusion processing, and thin film generation. There is a substrate processing apparatus as an apparatus for executing the substrate processing step, and there is a vertical substrate processing apparatus that includes a vertical processing furnace and processes a predetermined number of substrates at a time.

  The predetermined number of substrate processing apparatuses are connected to a management apparatus such as a HOST PC via communication means such as a LAN. The management apparatus integrates and manages the online operation of the substrate processing apparatus in the management apparatus by a SECS (Semiconductor Equipment Communication Standard) message service, and performs various substrate processes by automation.

  During the above process, as shown in FIG. 8, a primary message (S6F1) set so as not to request a secondary response may be transmitted from the substrate processing apparatus to the management apparatus. When transmitting the primary message, in order to confirm the communication state between the substrate processing apparatus and the management apparatus, a response request (LinkTest.Req) is transmitted together with the primary message, and a response ( Link Test is performed to return (LinkTest.Rsp).

  However, when the primary message is transmitted in a short cycle, for example, at intervals of 1 second, or when the processing load increases due to an increase in the number of substrate processing apparatuses managed by the management apparatus, the management apparatus has a processing performance. Due to the limitation, a response to a response request may not be returned to the substrate processing apparatus within a set time, and TCP / IP (Transmission Control Protocol / Internet Protocol) may be disconnected. For this reason, there is a problem that trace data until TCP / IP is reconnected and event messages important for automatic operation are lost.

  In view of such circumstances, the present invention provides a substrate processing system that prevents a communication failure due to a failure to return a response to a response request within a time limit.

  The present invention includes at least one substrate processing apparatus that processes a substrate and a management apparatus that manages the substrate processing apparatus via communication means, and sets a communication state between the substrate processing apparatus and the management apparatus. A substrate processing system connected online while checking, wherein a substrate transmits a predetermined message from the substrate processing apparatus to the management apparatus, and transmits a message confirming a communication state with the management apparatus. It relates to a processing system.

  According to the present invention, the apparatus includes at least one substrate processing apparatus that processes a substrate and a management apparatus that manages the substrate processing apparatus via communication means, and communicates between the substrate processing apparatus and the management apparatus. A substrate processing system connected online while checking a state, wherein a predetermined message is transmitted from the substrate processing apparatus to the management apparatus, and a message for confirming a communication state with the management apparatus is transmitted along with the message. Therefore, by adjusting the number of times of confirmation of the communication state, it is possible to reduce the processing load on the management device, and it is possible to exhibit an excellent effect that a communication failure due to an increase in the processing load can be prevented.

It is a schematic sectional elevation view of a substrate processing apparatus used in the substrate processing system of the present invention. It is a block diagram which shows the substrate processing system in this invention. It is a block diagram explaining the control apparatus of the substrate processing apparatus used for the substrate processing system of this invention. It is explanatory drawing explaining the space | interval which implements Link Test between the management apparatus and substrate processing apparatus in this invention. It is a flowchart explaining the flow of a process until it implements Link Test between the management apparatus and substrate processing apparatus in this invention. It is explanatory drawing explaining the flow of the automatic adjustment process of the apparatus constant in this invention. It is a flowchart explaining the automatic adjustment process of the apparatus constant in this invention. It is explanatory drawing explaining the space | interval which implements Link Test between the management apparatus and substrate processing apparatus in the past.

  Embodiments of the present invention will be described below with reference to the drawings.

  First, an outline of a substrate processing apparatus 1 in which the present invention is implemented will be described with reference to FIG.

  In FIG. 1, 2 indicates a housing. The wafer 3 is carried into and out of the substrate processing apparatus 1 in a state where the wafer 3 is stored in a substrate transfer container. As the substrate transport container, for example, a pod 4 is used, and a predetermined number of wafers 3, for example, 25 sheets are accommodated in the pod 4. The pod 4 is a hermetically sealed container having a lid that can be opened and closed, and the loading and unloading of the wafer 3 to and from the pod 4 is performed by opening the lid.

  A substrate transfer device 5 is provided in front of the substrate processing apparatus 1, and the pod 4 is carried into and out of the substrate transfer device 5 by an external transfer device (not shown).

  A pod loading / unloading port 6 is provided at a portion of the housing 2 facing the substrate transfer device 5, and a front shutter 7 for opening and closing the pod loading / unloading port 6 is provided. The pod 4 passes through the front shutter 7. It is carried in and out of the housing 2.

  A pod transfer device 8 is provided at the front of the housing 2, and the pod transfer device 8 includes a pod transfer arm 9 that can hold the pod 4. Further, the pod transfer arm 9 can move up and down, traverse (perpendicular to the plane of the paper), and advance and retreat (left and right direction of the plane of the paper). It can be transported.

  Opposite to the pod transfer device 8, a pod storage portion 11 is provided in the upper part of the housing 2. The pod storage unit 11 has a plurality of pod storage shelves 12 that can rotate intermittently, and each pod storage shelf 12 can store a plurality of the pods 4. Each pod storage shelf 12 is provided with a pod detection sensor (not shown) for detecting whether or not the pod 4 is stored, and a substrate detection sensor (not shown) for detecting the wafer 3 in the pod 4.

  A sub case 13 is provided below the rear part in the case 2, and the sub case 13 defines a transfer chamber 14.

  Pod openers 16 and 16 are provided on the front wall 15 of the sub casing 13 in two upper and lower stages. Each of the pod openers 16 includes a mounting table 17 and a lid attaching / detaching mechanism 18. The pod 4 is placed on the mounting table 17 and is in close contact with the front wall 15, and the lid is opened and closed by the lid attaching / detaching mechanism 18. It has become like that. When the lid of the pod 4 is opened, the inside of the pod 4 and the transfer chamber 14 are in communication with each other.

  A processing furnace 19 is erected on the rear part in the casing 2 and on the upper side of the sub casing 13. The processing furnace 19 includes a reaction tube that hermetically defines a processing chamber, a heater provided around the reaction tube, and a gas supply line and an exhaust line are connected to the reaction tube. The processing chamber is heated and maintained at a predetermined processing pressure, and the processing gas is supplied and discharged.

  The processing chamber has a furnace port portion communicating with the transfer chamber 14 at the lower end, and the furnace port portion is opened and closed by a furnace port shutter 21.

  In the transfer chamber 14, a boat elevator 22 is provided below the processing furnace 19, and the boat elevator 22 has a seal cap 23 capable of airtightly closing the furnace port portion. 24, the boat elevator 22 can move the seal cap 23 up and down so that the boat 24 can be attached to and detached from the processing chamber. Further, when the boat 24 is loaded in the processing chamber, the seal cap 23 airtightly closes the furnace port.

  In the transfer chamber 14, a substrate transfer machine 25 is provided between the pod opener 16 and the boat elevator 22, and the substrate transfer machine 25 holds a plurality of holding substrate plates (tweezers) for holding the wafer 3. 26. For example, five tweezers 26 are arranged at equal intervals in the vertical direction, and the vertical interval (pitch) is the same as the wafer storage pitch of the pod 4 and the wafer holding pitch of the boat 24.

  The substrate transfer machine 25 has a configuration in which the tweezers 26 can be moved back and forth in the horizontal direction and can be rotated about the vertical axis in the up and down direction. The wafer 3 can be held and transferred to a desired position.

  The substrate processing apparatus 1 includes a control device 27, and the control device 27 is disposed, for example, on the front surface of the substrate processing apparatus 1.

  FIG. 2 shows a schematic configuration of a substrate processing system 28 in which the present invention is implemented.

  In FIG. 2, reference numeral 29 denotes a management device such as a HOST PC. The management device 29 is connected to the control devices 27 of the plurality of substrate processing apparatuses 1 via a HUB 32, a Router 33, and the like by communication means such as a LAN 31. Has been.

  The management apparatus 29 can control the online operation of a plurality of substrate processing apparatuses 1 by SECS message service via the LAN 31. In the online operation, the management apparatus 29 controls the substrate processing apparatus 1 from the management apparatus 29. By inputting an instruction to the device 27, a series of processing such as loading / unloading of the pod 4, specification of process conditions, specification of process start, collection of trace data, and the like can be executed by automation.

  Next, referring to FIG. 3, the control device 27 for controlling the operation of the substrate processing apparatus 1 will be described.

  The control device 27 includes a process control unit 34, a transfer control unit 35, a main control unit 36, a display unit 37 such as a monitor, and an operation unit 38 such as a mouse and a keyboard, which are electrically connected to each other. Has been.

  The process control unit 34 includes a storage unit 39 such as a memory or an HDD, and the storage unit 39 stores a drive control program for driving each control unit described later and a recipe for executing process processing. The process control unit 34 controls the operation of a temperature control unit that controls the heating of the processing furnace 19 by driving a heater (not shown), opening / closing of a pump or a valve (not shown), a flow rate controller, and the like. A flow rate control unit for controlling the supply flow rate of the processing gas to the furnace 19, a pressure control unit for controlling the exhaust of the gas from the processing furnace 19, or for controlling the pressure of the processing furnace 19, etc. .

  The conveyance control unit 35 includes a storage unit 41 such as a memory or an HDD, and the storage unit 41 stores a conveyance control program for driving each conveyance unit described later. The transfer control unit 35 is, for example, a pod transfer unit that controls the drive of the pod transfer device 8, a boat transfer unit that controls the drive of the boat elevator 22, and a wafer transfer that controls the drive of the substrate transfer device 25. Department.

  The main control unit 36 includes a calculation control unit 42 such as a CPU, a timer 43 connected to the calculation control unit 42, a storage unit 44 such as a memory and an HDD, and a communication control unit 45. The unit 45 is an A / D conversion function for converting the analog data obtained from the process control unit 34 and the transfer control unit 35 into digital data or the digital data from the management device 29 into analog data. A conversion function, and a function of transmitting and receiving data to and from the management device 29.

  In addition, a data storage area 46 and a program storage area 47 are formed in the storage unit 44. The program storage area 47 includes a communication control program 48, a determination program 49, a counter addition program 50, and a counter initial value. Stored therein is a computer program 51 and a device constant addition program 52.

  In the data storage area 46, a standby time n indicating how often the primary message (S6F1) set not to request a secondary response is transmitted to the management device 29, and the primary message A transmission counter indicating the number of times of transmission, a link test is performed every time the primary message is transmitted, that is, the device constant CN in which the link test execution interval for the management device 29 is set, the upper limit of the device constant CN A set value such as a transmission interval upper limit CN_MAX shown is stored. Note that the standby time n, the device constant CN, and the transmission interval upper limit CN_MAX are appropriately set by the operator via the operation unit 38 described later or the management device 29, and the device constant CN is a nonvolatile memory such as an HDD. It is assumed that it is stored in a storage device.

  The communication control program 48 has a function of controlling communication between the management apparatus 29 and the substrate processing apparatus 1, and performs a Link Test with the management apparatus 29 according to the setting value stored in the data storage area 46. Then, it has a function of sending a start signal and a standby time n to the timer 43 and transmitting a primary message such as S6F1 and S6F11 to the management device 29 by the standby time end signal from the timer 43.

  The determination program 49 determines the success or failure of transmission of a message such as the primary message transmitted from the substrate processing apparatus 1 to the management apparatus 29 and the success or failure of Link Test, and the number of transmissions of the primary message and apparatus constant. It has a function of determining the CN value and the like.

  The counter addition program 50 has a function of adding 1 to a transmission counter that counts the number of transmissions of the primary message every time a primary message set not to require a secondary response is transmitted. The initialization program 51 has a function of initializing the transmission counter to 0 when the transmission counter reaches the device constant CN.

  Further, the device constant addition program 52 has a function of adding 1 to the device constant CN when it is determined by the determination program 49 that transmission of a primary message such as S6F1 or S6F11 or Link Test has failed. ing. The device constant CN is added by the device constant addition program 52 until the transmission interval upper limit CN_MAX is reached. After the device constant CN reaches the transmission interval upper limit CN_MAX, the device constant addition program 52 executes the device constant. The constant CN is not added.

  The display unit 37 and the operation unit 38 are electrically connected to the main control unit 36, and various commands can be input from the operation unit 38. The process control is performed via the main control unit 36. Various commands are transmitted to the unit 34 and the transfer control unit 35, and output results from the process control unit 34 and the transfer control unit 35 are received by the display unit 37 via the main control unit 36. ing. The display unit 37 may be a touch panel, and the display unit 37 may also serve as the operation unit 38.

  When the start of processing is input from the management device 29, the transport control unit 35 receives a command via the main control unit 36, and drives each transport unit stored in the storage unit 41 by receiving the command. A conveyance control program is executed for this purpose.

  According to the transfer control program, the pod transfer device 8 is driven, and the pod 4 is carried into the substrate processing apparatus 1 and is transferred to the pod storage unit 11 and the pod opener 16.

  Next, the wafer 3 in the pod 4 placed on the substrate platform 17 is transferred to the boat 24 by the substrate transfer machine 25, and finally the boat 24 is processed by the boat elevator 22. Charged into the furnace 19.

  After the loading of the boat 24, a predetermined process process is performed according to the recipe stored in the storage unit 39 of the process control unit 34. After the completion of the process process, the transfer control program is started again, which is the reverse of the above. By performing the process, the pod 4 containing the processed wafer 3 is carried out of the substrate processing apparatus 1.

  During the above-described process processing, the trace data that is history data such as temperature, gas flow rate, pressure, etc. in the process processing is sent from the substrate processing apparatus 1 to the management apparatus 29 as a trace data report (S6F1). ) And a link test is performed every time the primary message (S6F1) is transmitted a predetermined number of times in order to confirm the communication state between the substrate processing apparatus 1 and the management apparatus 29. Yes.

  In FIG. 4, the Link Test is sent from the transmission of the primary message (S6F1) set not to request the trace data confirmation (S6F2) as the secondary response from the substrate processing apparatus 1 to the management apparatus 29. The outline of the flow until it is performed will be described. In FIG. 4, the transmission interval of the primary message (S6F1), that is, the standby time n is 1 second, and the number of transmissions of the primary message (S6F1) until the Link Test is performed, that is, the device constant CN is 60 times. .

  When the process processing is started, the substrate processing apparatus 1 transmits the trace data fed back from the process control unit 34 to the management apparatus 29 as a primary message (S6F1) and also a primary message (S6F1). Count the number of transmissions.

  After the transmission of the primary message (S6F1), the primary message (S6F1) is transmitted again one second later and the number of transmissions is counted, and thereafter the same processing is repeated.

  When the number of transmissions of the primary message (S6F1) reaches 60 times, a Link Test is performed to confirm the arrival of the primary message (S6F1) between the substrate processing apparatus 1 and the management apparatus 29. A LinkTest. Message that is a message for confirming the communication state with the management apparatus 29 from the substrate processing apparatus 1 to the management apparatus 29. Req is transmitted. The management device 29 is LinkTest. When Req is received, LinkTest. Rsp is returned to the substrate processing apparatus 1.

  In the substrate processing apparatus 1, LinkTest. When Rsp is received, a primary message (S6F11), which is a report of an event message, is subsequently transmitted from the substrate processing apparatus 1 to the management apparatus 29, and the management apparatus that has received the primary message (S6F11). 29 replies to the substrate processing apparatus 1 with a secondary message (S6F12), which is an event message reception confirmation, as a secondary response. After the substrate processing apparatus 1 receives the secondary message (S6F12), the number of transmissions of the primary message (S6F1) is reset, and the above processing is repeated until the process processing is completed.

  Next, from the transmission of the primary message (S6F1) set not to request the trace data confirmation (S6F2) as the secondary response from the substrate processing apparatus 1 to the management apparatus 29 using the flowchart of FIG. The details of the flow until Link Test is performed will be described.

  STEP: 01 When the process processing is started, first, the counter initialization program 51 initializes the transmission counter C to 0, and stores the initialized transmission counter C in the data storage area 46.

  STEP: 02 After the transmission counter C is initialized, the trace data fed back from the process control unit 34 is A / D converted by the communication control unit 45 so that the communication control program 48 does not request a secondary response. The primary message (S6F1) is transmitted from the substrate processing apparatus 1 to the management apparatus 29.

  STEP: 03 After transmitting the primary message (S6F1), the counter addition program 50 adds 1 to the transmission counter C stored in the data storage area 46.

  (Step 04) After the transmission counter C is added, the determination program 49 compares the transmission counter C stored in the data storage area 46 with a preset device constant CN (60 in FIG. 4) to transmit the data. It is determined whether the value of the counter C and the device constant CN are equal.

  STEP: 05 In STEP: 04, if it is determined that the transmission counter C is not equal to the device constant CN, that is, the transmission counter C has not reached the device constant CN, a Link Test with the management device 29 is performed. Absent.

  STEP: 06 After STEP: 05, or after STEP: 08 described later, the communication control program 48 waits for the waiting time n (1 in FIG. 4) stored in the data storage area 46 together with the start signal in the timer 43. Seconds). When the standby time n elapses, an end signal is output from the timer 43, and the process of STEP: 02 is performed again in response to the end signal.

  STEP: 07 The processing of STEP: 02 to STEP: 06 is repeated until it is determined in STEP: 04 that the transmission counter C and the device constant CN are equal, so that the transmission counter C and the device constant CN are equal, that is, the transmission counter C is If it is determined that the device constant CN has been reached, LinkTest. Req is transmitted, and a Link Test for confirming a communication state between the substrate processing apparatus 1 and the management apparatus 29 is performed.

  After the execution of STEP: 08 Link Test, the counter initialization program 51 initializes the transmission counter C stored in the data storage area 46 to 0, and the processing of STEP: 02 is performed again.

  The processing of STEP: 02 to STEP: 06 described above is repeated until the process processing in the substrate processing apparatus 1 is completed.

  Note that there are cases in which the processing load on the management device 29 cannot be sufficiently reduced with the device constant CN preset by the operator. In this embodiment, a primary message requesting a secondary response (such as S6F11), a primary message not requesting a secondary response (such as S6F1), or LinkTest. When transmission of Req fails and a response indicating that transmission has failed is received, a secondary message or LinkTest. When Rsp cannot be received within the time limit, the device constant CN is automatically increased to automatically adjust the device constant CN to reduce the processing load on the management device 29. .

  With reference to FIG. 6, the outline of the automatic adjustment processing of the device constant CN will be described. FIG. 6 illustrates a case where the preset device constant CN is 60, the upper limit of the device constant CN, that is, the transmission interval upper limit CN_MAX is 70, and transmission of the primary message (S6F11) fails.

  If the substrate processing apparatus 1 fails to transmit a primary message (S6F11) set to request a secondary response (secondary message (S6F12)) after a Link Test is performed during the process, After 1 is added to the constant CN (60 in FIG. 6) to reduce the processing load on the management device 29, the primary message (S6F11) is transmitted again.

  Even if 1 is added to the device constant CN, the processing load on the management device 29 cannot be sufficiently reduced, and if the transmission of the primary message (S6F11) fails again, the primary message (S6F11) is transmitted. Until the success, 1 is sequentially added to the device constant CN. When the primary message (S6F11) is successfully transmitted, the processing is continued with the value of the device constant CN at the time of success being maintained. .

  Further, when the device constant CN reaches the transmission interval upper limit CN_MAX (70 in FIG. 6), even if transmission of the primary message (S6F11) fails, addition to the device constant CN is not performed. The processing is continued with the device constant CN kept at the transmission interval upper limit CN_MAX.

  Next, details of the automatic adjustment processing of the device constant CN will be described using the flowchart of FIG. In FIG. 7, as in FIG. 6, the case where transmission of the primary message (S6F11) requesting the secondary message (S6F12) fails is described.

  STEP: 11 When process processing is started, a primary message (S6F11) set to request a secondary message (S6F12) according to the set value stored in the data storage area 46 is sent to the management device 29. Sent.

  STEP: 12 After the transmission of the primary message (S6F11), whether the primary message (S6F11) has been successfully transmitted by the judgment program 49, that is, the secondary message (S6F12) for the primary message (S6F11) is the time limit. It is determined whether the response was

  STEP: 13 When it is determined in STEP: 12 that the secondary message (S6F12) is a response within the time limit, the determination program 49 further determines whether the secondary message (S6F12) is a normal response. If the response is normal, the automatic adjustment processing of the device constant CN is ended here.

  STEP: 14 The secondary message (S6F12) for the primary message (S6F11) cannot be received within the time limit at STEP: 12, or the secondary message (S6F12) is determined to be an abnormal response at STEP: 13. If the device constant is added, 1 is added to the value of the device constant CN stored in the data storage area 46 by the device constant addition program 52.

  (Step 15) After adding the device constant CN, the determination program 49 compares the added device constant CN with the transmission interval upper limit CN_MAX stored in the data storage area 46, and the device constant CN is set to the transmission interval upper limit. It is determined whether or not CN_MAX is exceeded. When it is determined that the device constant CN is not equal to or greater than the transmission interval upper limit CN_MAX, that is, the device constant CN has not reached the transmission interval upper limit CN_MAX, the primary message to the management device 29 is again used using the added device constant CN. Transmission of (S6F11) is performed.

  STEP: 16 If it is determined in STEP: 15 that the device constant CN is equal to or greater than the transmission interval upper limit CN_MAX, that is, the device constant CN has reached the transmission interval upper limit CN_MAX, the value of the device constant CN is set to the value of the transmission interval upper limit CN_MAX. The automatic adjustment processing of the device constant CN is terminated while maintaining the same value as in FIG.

  When the transmission of the primary message (S6F11) is successful in STEP: 12 and STEP: 13 and the automatic adjustment processing of the device constant CN is completed, the transmission is performed every time the primary message (S6F11) is transmitted thereafter. When success or failure is determined and transmission fails, automatic adjustment processing of the device constant CN is performed again. Also, when the automatic adjustment processing of the device constant CN is finished in a state where the value of the device constant CN has reached the value of the transmission interval upper limit CN_MAX at STEP: 16, transmission of the primary message (S6F11) has failed after that. However, the automatic adjustment processing of the device constant CN is not performed, and the processing is continued in a state where the value of the device constant CN is kept the same value as the value of the transmission interval upper limit CN_MAX.

  The processing from the transmission of the primary message (S6F1) set not to require the secondary response described in FIG. 5 to the execution of the Link Test and the automatic adjustment processing of the device constant CN described in FIG. Each is an independent process.

  As described above, in this embodiment, since the primary message (S6F1) set not to require the secondary response is transmitted a predetermined number of times, the link test is performed, that is, the execution interval of the link test can be adjusted. Even when the primary message (S6F1) is transmitted in a short cycle, the processing load on the management apparatus 29 can be reduced, and the management apparatus 29 sends LinkTest. TCP / IP disconnection due to failure to return Rsp can be prevented. Further, it is possible to prevent the trace data, event message, etc. transmitted from the substrate processing apparatus 1 from being lost until the TCP / IP is reconnected by cutting the TCP / IP.

  Further, a primary message to the management device 29 or LinkTest. When the transmission of Req fails, the value of the device constant CN is automatically increased and the execution interval of the Link Test is automatically expanded, so that the processing load on the management device 29 can be further reduced. TCP / IP disconnection can be prevented more effectively.

  In the present embodiment, the value of the device constant CN is automatically increased. However, the time limit used for determining whether the response is normal or abnormal is automatically increased. Is also possible.

  In addition, as a substrate processing apparatus applied to the substrate processing system of the present embodiment, not only a semiconductor manufacturing apparatus but also an apparatus for processing a glass substrate such as an LCD apparatus can be applied.

  The film forming process using the substrate processing apparatus applied to this embodiment includes, for example, a process for forming CVD, PVD, oxide film, nitride film, a process for forming a film containing metal, and the like. Needless to say.

(Appendix)
The present invention includes the following embodiments.

  (Additional remark 1) It is comprised with the at least 1 substrate processing apparatus which processes a substrate, and the management apparatus which manages this substrate processing apparatus via a communication means, A communication state is set between the said substrate processing apparatus and the said management apparatus. A substrate processing system connected online while checking, wherein a predetermined message is transmitted from the substrate processing apparatus to the management apparatus, and a message for confirming a communication state with the management apparatus is transmitted along with the predetermined message. A substrate processing system.

  (Supplementary note 2) The substrate processing system according to supplementary note 1, wherein a message for confirming the communication state is accompanied and transmitted after the number of transmissions of the predetermined message reaches a preset number of transmissions.

  (Supplementary note 3) When the transmission of the predetermined message and the message for confirming the communication state fails, the communication state is changed after the predetermined message is transmitted by a number obtained by adding 1 to the preset number of transmissions. The substrate processing system according to appendix 2, wherein a message for confirmation is attached and transmitted.

  (Additional remark 4) It has the process which a management apparatus controls the at least 1 substrate processing apparatus which processes a substrate via a communication means, and the process which confirms a communication state between the said substrate processing apparatus and the said management apparatus. In the step of confirming the communication state, a predetermined message is transmitted from the substrate processing apparatus to the management apparatus, and a message for confirming the communication state is transmitted along with the predetermined message. Control method.

1 Substrate Processing Device 27 Control Device 28 Substrate Processing System 29 Management Device 36 Main Control Unit 44 Storage Unit 46 Data Storage Area 49 Judgment Program 50 Counter Addition Program 51 Counter Initialization Program 52 Device Constant Addition Program

Claims (1)

  It is composed of at least one substrate processing apparatus for processing a substrate and a management apparatus for managing the substrate processing apparatus via communication means, and is online while checking a communication state between the substrate processing apparatus and the management apparatus. The substrate processing system is connected to the management apparatus, wherein a predetermined message is transmitted from the substrate processing apparatus to the management apparatus, and a message for confirming a communication state with the management apparatus is transmitted along with the predetermined message. Substrate processing system.

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