JP2012089720A - Profiling mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technique capable of uplifting a stage from a base to securely obtain a profiling operation for the stage with a simple structure and capable of increasing pressing force applicable to the stage.SOLUTION: In a simple structure in which a plurality of rollers 230 are protruded from housing holes 223 by energizing means 250, a stage 210 can be uplifted from a base 220 and the base profiling operation can be securely performed because there is no possibility that fictional resistance is generated between a first convex curve surface part 211 and a first concave curve surface part 221. Even when a strong pressing force is applied on the stage 210, the rollers 230 are housed in the housing holes 223, the base 220 can securely support the first convex curve surface part 211 by the surface of the first concave curve surface part 221 from below to securely support the stage 210, and the pressing force applicable to the stage 210 can be increased.

Description

  The present invention relates to a technique for adjusting the tilt of the upper surface of a stage.

  Conventionally, by adjusting the inclination of the upper surface of the stage, a technique for adjusting the parallelism between the circuit pattern surface of the substrate placed on the upper surface of the stage and the bonding surface of an electronic component such as a chip bonded thereto with high accuracy It has been known. For example, Patent Document 1 includes a stage having a convex curved surface portion on the lower surface side, and a stage mounting base having a concave curved surface portion provided on the upper surface side so as to be slidable with the convex curved surface portion of the stage. In a state where the stage is placed on the base, compressed air is discharged between the convex curved surface portion of the stage and the concave curved surface portion of the base, thereby creating a slight gap between both curved surface portions. A copying mechanism in which the stage freely swings along the concave curved surface portion of the base is described.

  That is, since an air layer is formed by discharge of compressed air between the convex curved surface portion of the stage and the concave curved surface portion of the base, the frictional force generated between both curved surface portions is suppressed. The part can move freely along the concave curved surface part of the base. Therefore, when the substrate placed on the upper surface of the stage and a chip or the like bonded to the substrate come into contact with each other, the stage's convex curved surface moves along the concave curved surface of the base. By performing the copying operation, the inclination of the substrate on the stage can be adjusted, and the parallelism between the substrate and the chip can be matched.

  In addition, if the parallelism between the substrate and the chip is matched by the copying operation of the stage, both curved surfaces contact each other by stopping the discharge of compressed air between the convex curved surface portion of the stage and the concave curved surface portion of the base. The stage is fixed to the base by the static friction force generated on the contact surfaces of both curved surface portions, and the tilt of the stage is maintained. At this time, even if a high pressure is applied to the stage while maintaining the tilt of the stage, the base supports the convex curved surface portion of the stage from below with the concave curved surface portion. Is surely supported.

Japanese Patent Laid-Open No. 2001-230277 (paragraphs 0025, 0026, FIG. 4, etc.)

  In the conventional copying mechanism described above, the friction force generated between the convex curved surface portion of the stage and the concave curved surface portion of the base is suppressed using compressed air, but compression is performed over the entire contact surface of both curved surface portions. In order to allow air to spread, both curved surface portions must be formed of a very expensive sintered metal containing many open pores so that air tends to remain on the surfaces of both curved surface portions. Further, in order to supply compressed air to the contact surfaces of both curved surface portions, both the curved surface portions must be subjected to complicated processing, which causes an increase in cost.

  The copying operation in the copying mechanism is executed, for example, when the stage is passively swung by a moment generated when the reference surface for copying is pressed against the upper surface of the stage in a so-called one-sided state. When the stage is passively swung so that the inclination of the upper surface of the stage and the reference surface for copying coincide with each other, and the contact state between the upper surface of the stage and the reference surface for copying is eliminated, the copying operation is completed. To do.

  At this time, in the conventional copying mechanism, high-pressure compressed air must be supplied in order to distribute air between the convex curved surface portion of the stage and the concave curved surface portion of the base, but it is pressed against the upper surface of the stage. If the size of the reference surface for copying is small, the moment generated is also small, so that high-pressure compressed air may act on the stage and the copying operation of the stage may not be executed properly.

  Further, in the conventional copying mechanism, when the upper surface of the stage is pressurized while the inclination of the stage is maintained at the same inclination as that of the reference surface for copying, the center of the pressure applied to the stage starts from above the stage. When the center of gravity of the convex curved surface portion is deviated, a moment for swinging the stage is generated, and the tilt of the stage may fluctuate. It is necessary to improve the usability of the copying mechanism and there is a need for improvement.

  The present invention has been made in view of the above-described problems, and makes it possible to reliably perform the copying operation of the stage by allowing the stage to float from the base with a simple configuration and to apply the pressure to the stage. It is a first object to provide a technique capable of increasing the number of times.

  It is a second object of the present invention to provide a technique capable of improving the usability of the copying mechanism by firmly fixing the stage to the base.

  In order to achieve the first object described above, a copying mechanism according to the present invention includes a stage having a first convex curved surface portion on a lower surface side, and a support that supports the first convex curved surface portion in a slidable manner at a plurality of locations. And when the reference surface to be imprinted is pressed against the upper surface of the stage, the stage is swung while the first convex curved surface portion is in sliding contact with the support means, thereby the upper surface of the stage and the In a copying mechanism in which a copying operation for matching the inclination of the reference surface of copying is executed, a first concave curved surface portion provided on the upper surface side so as to be slidable with the first convex curved surface portion, and the first concave curved surface portion A plurality of receiving holes, a base for placing the stage in which the plurality of supporting means are accommodated in each of the accommodating holes, and each of the supporting means provided in each of the accommodating holes. Multiple biasing means for biasing The copying operation is executed in a state where the first convex curved surface portion and the first concave curved surface portion are separated from each other by urging each of the supporting means by the urging means, and the upper surface of the stage. Is pressed by a force larger than the urging force of each of the urging means, and each of the supporting means is urged by the pressing of the first convex curved surface portion against the urging force of each of the urging means. The first convex curved surface portion is received in the hole and abuts on the first concave curved surface portion (Claim 1).

  Further, each of the support means includes a roller that is provided so as to be able to protrude and retract in each of the storage holes so as to be in sliding contact with the first convex curved surface portion, and the first convex curved surface portion and the first concave curved surface portion. Are formed in a circular arc shape, and the copying operation is performed in a state where the rollers projecting from the receiving holes by the biasing means are in contact with the first convex curved surface portion. It may be executed by swinging in the arc direction of the arc surface.

  Each of the urging means may be a pair of magnets that repel each other, and the support means may be attached to one magnet of each of the urging means.

In order to achieve the first object described above, the copying mechanism according to the present invention supports a stage having a first convex curved surface portion on the lower surface side and the first convex curved surface portion so as to be slidable at a plurality of locations. And when the reference surface to be imprinted is pressed against the upper surface of the stage, the first convex curved surface portion is slidably in contact with the supporting means, so that the stage swings, whereby the upper surface of the stage And a copying mechanism in which a copying operation for matching the inclination of the reference surface for copying is executed, the first concave curved surface portion provided on the upper surface side so as to be slidable with the first convex curved surface portion, and the first concave curved surface A base for mounting the stage having a plurality of first magnets embedded in the part, and a first convex so that the same magnetic pole faces each of the first magnets to form a plurality of magnet pairs. A plurality of second magnets embedded in the curved surface portion are further provided. The copying operation is first of each magnet pair, by the repulsive force of the second magnet, said first convex surface portion is executed while emerging spaced from the first concave surface,
The first against the repulsive force of the first and second magnets of each magnet pair when the upper surface of the stage is pressed with a force greater than the repulsive force of the first and second magnets of each of the magnet pairs. The first convex curved surface portion abuts on the first concave curved surface portion by pressing the convex curved surface portion (claim 4).

  In order to achieve the second object described above, the copying mechanism according to the present invention includes a second convex curved surface portion provided on the lower surface side of the base, and an opening formed in the first concave curved surface portion. A through hole formed in the base by communicating with an opening formed in the second convex curved surface portion, and a bolt member having one end connected to the first convex curved surface portion of the stage and inserted into the through hole A nut member screwed into the other end portion of the bolt member led out from the base through the through hole, and a second convex surface portion provided on the upper surface side so as to be slidable. A second concave curved surface portion, and an insertion member interposed between the second convex curved surface portion and the nut member, and when the nut member is tightened, the first convex curved surface portion is the first concave The stage in the mounted state is brought into contact with the curved surface portion and the second convex curved surface portion is in contact with the second concave curved surface portion. It is characterized by further comprising a fixing means for fixing the Kimoto base (claim 5).

  According to the first aspect of the present invention, each of the plurality of support means accommodated in the plurality of accommodation holes formed in the first concave curved surface portion provided on the upper surface side of the base is urged by the urging means. With a simple configuration, the stage on which the first convex curved surface portion provided on the lower surface side is supported by the support means so as to be slidable at a plurality of locations can be levitated from the base, and the reference surface following the upper surface of the stage is When pressed, the first convex curved surface portion on the lower surface side of the stage and the first concave curved surface portion on the upper surface side of the base are in a separated state, so there is no risk of friction resistance between both curved surface portions, Since the stage swings while the first convex curved surface portion on the lower surface side is in sliding contact with the support means, the copying operation for matching the inclinations of the upper surface of the stage and the reference surface for copying is executed reliably.

  Even if a high pressure is applied to the stage, when the upper surface of the stage is pressed with a force larger than the urging force of each urging means, the stage lower surface side that resists the urging force of each urging means is used. Each support means is accommodated in the accommodation hole by the pressing of the first convex curved surface portion, and the first convex curved surface portion is provided in the first concave on the upper side of the base provided to be slidable with the first convex curved surface portion. Since the surface comes into contact with the curved surface portion, the base can reliably support the stage by supporting the first convex curved surface portion of the stage from below with the first concave curved surface portion, and can be added to the stage. It is possible to increase the pressure.

  Further, during the copying operation of the stage, the first convex curved surface portion on the lower surface side of the stage is separated from the first concave curved surface portion on the upper surface side of the base by the urging force of the urging means for urging the supporting means for supporting the stage. Since it is not necessary to supply high-pressure compressed air or the like to the contact surface between the first convex curved surface portion of the stage and the first concave curved surface portion of the base as in the prior art, the stage or the like is made of sintered metal. The manufacturing cost of the copying mechanism can be greatly reduced because there is no need to form the stage with a special material such as an air supply path. Further, since compressed air is not used during the copying operation of the stage, there is no possibility of disturbance due to the supplied compressed air acting on the stage, and the copying operation of the upper surface of the stage can be executed with high accuracy.

  According to the second aspect of the present invention, each support means has a roller provided so as to be able to protrude and retract in each of the accommodation holes and slidably contacting the first convex curved surface portion, and the first convex curved surface portion on the lower surface side of the stage The first concave curved surface portion on the upper surface side of the base is formed in an arcuate surface shape, so that each roller protruding from each accommodating hole by each urging means is on the lower surface side of the stage formed in the arcuate surface shape. In a state where the first convex curved surface portion is in contact with the first convex curved surface portion, the first convex curved surface portion on the lower surface side of the stage can be slidably contacted with each roller, and the copying operation can be executed by the stage swinging in the arc direction of the arc surface. .

  According to the invention of claim 3, the biasing means stage is formed by a pair of repulsive magnets, and the support means is attached to one magnet of each biasing means, thereby biasing the support means in a non-contact manner. be able to.

  According to the fourth aspect of the present invention, the first and second magnets are arranged so that the same magnetic pole faces the first convex curved surface portion on the lower surface side of the stage and the first concave curved surface portion on the upper surface side of the base. The stage can be levitated from the base by the repulsive force of the first and second magnets of each magnet pair, and a reference surface that follows the upper surface of the stage. Since the first convex curved surface portion on the lower surface side of the stage and the first concave curved surface portion on the upper surface side of the base are separated from each other when the is pressed, there is no risk of frictional resistance between the two curved surface portions. By oscillating the stage, the copying operation for matching the inclinations of the upper surface of the stage and the reference surface for copying is performed reliably.

  Further, even when a high pressure is applied to the stage, when the upper surface of the stage is pressed with a force larger than the repulsive force of the first and second magnets of each magnet pair, the first and second of each magnet pair Since the first convex curved surface portion comes into contact with the first concave curved surface portion on the upper surface side of the base that is slidably contacted with the first convex curved surface portion against the repulsive force of the two magnets, By supporting the first convex curved surface portion of the stage from below with the first concave curved surface portion, the stage can be reliably supported, and the applied pressure that can be applied to the stage can be increased.

  Further, during the copying operation of the stage, the stage is caused by the repulsive force of the first and second magnets of each magnet pair embedded in the first convex curved surface portion on the lower surface side of the stage and the first concave curved surface portion on the upper surface side of the base. The first convex curved surface portion on the lower surface side of the base plate and the first concave curved surface portion on the upper surface side of the base are separated from each other. Since there is no need to supply the contact surface with the first concave curved surface portion, it is not necessary to form the stage etc. with a special material such as sintered metal, and the stage etc. is specially processed such as an air supply path. Since it is not necessary to apply, the manufacturing cost of the copying mechanism can be greatly reduced. Further, since compressed air is not used during the copying operation of the stage, there is no possibility of disturbance due to the supplied compressed air acting on the stage, and the copying operation of the upper surface of the stage can be executed with high accuracy.

  According to the invention described in claim 5, the opening formed in the first concave curved surface portion provided on the upper surface side and the opening formed in the second convex curved surface portion provided on the lower surface side are communicated. A bolt member having one end connected to the first convex curved surface portion on the lower surface side of the stage is inserted into the through hole formed in the base, and the nut member is inserted into the other end of the bolt member led out below the base. Between the second convex curved surface portion on the lower surface side of the base and the nut member screwed to the other end portion of the bolt member, and the second convex curved surface portion of the base on the upper surface side. An insertion member having a second concave curved surface provided so as to be able to contact is inserted.

  When the nut member is tightened, the first convex curved surface portion on the lower surface side of the stage abuts on the first concave curved surface portion on the upper surface side of the base, and the second convex curved surface portion on the lower surface side of the base is the insertion member. Since the stage is fixed in a state of being placed on the base by contacting the second concave curved surface portion on the upper surface side, the base is formed by the first convex curved surface portion of the stage and the second concave curved surface portion of the insertion member. Is firmly clamped from above and below, and the stage is firmly fixed to the base by the static frictional force between the first convex curved surface portion on the lower surface side of the stage and the first concave curved surface portion on the upper surface side of the base that is generated when the nut member is tightened. Even if a moment that causes the stage to swing is generated by pressurizing the upper surface of the stage, the tilt of the stage is easy as long as the magnitude of the moment does not exceed the magnitude of the static friction force. Because there is no fear of fluctuation, Sea urchin, it is not necessary to consider the pressing center of pressure with respect to the stage, it is possible to improve the usability of the copying mechanism.

It is a figure which shows 1st Embodiment of a joining apparatus provided with the copying mechanism of this invention. It is a perspective view of a copying mechanism. FIG. 3 is an exploded perspective view of the copying mechanism viewed from a direction different from that in FIG. 2. It is a partially cut front view of a copying mechanism. It is a partially cut front view of a copying mechanism. It is a partially cut front view of a copying mechanism. It is a partially cut front view of a copying mechanism. It is a partially cut front view which shows 2nd Embodiment of the copying mechanism of this invention.

<First Embodiment>
A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a diagram showing a first embodiment of a joining apparatus 100 including a copying mechanism 200 according to the present invention. FIG. 2 is a perspective view of the copying mechanism 200. FIG. 3 is an exploded perspective view of the copying mechanism 200 viewed from a direction different from that in FIG. 4 to 7 are partially cut front views of the copying mechanism 200, showing different states.

(Configuration of joining device)
A joining apparatus 100 shown in FIG. 1 joins an object such as a chip 23 or an electronic component to a predetermined position of an object to be mounted such as a substrate 24 or a wafer by ultrasonic vibration. That is, the chip 23 having the metal bumps 23 a on the bonding surface of a semiconductor such as GaAs and the substrate 24 having the metal bumps 24 a are bonded by applying ultrasonic vibration, and the chip 23 is placed at a predetermined position on the substrate 24. Be joined. The chip 23 is held on the holding surface of the holding means 40 of the resonator 7 described later, and the substrate 24 is placed on the upper surface of the stage 210 described later.

  As shown in FIG. 1, the joining apparatus 100 includes a joining mechanism 27, a mounting mechanism 28 having a copying mechanism 200 and a stage table 12, a position recognition unit 29, a transport unit 30, and a control device 31. Yes.

  The joining mechanism 27 includes a vertical drive mechanism 25 and a head portion 26. The vertical drive mechanism 25 moves up and down while guiding the resonator support portion 6 with the vertical guide 3 by the vertical drive motor 1 and the bolt / nut mechanism 2. To do. The joining mechanism 27 is coupled to the frame 34, and the frame 34 is connected to the gantry 35 by the four support columns 13 disposed so as to surround the periphery of the pressure center of the head portion 26. A part of the support column 13 and the frame 34 is not shown.

  The resonator support 6 is guided in the vertical direction by the head escape guide 5 and is connected to the bolt / nut mechanism 2 while being pulled by the self-weight counter 4 for canceling the self-weight. A head portion 26 having a resonator 7 is coupled to the resonator support portion 6.

  The resonator support unit 6 is provided with a pressure sensor 32, and the pressure sensor 32 applies pressure to a bonding target such as the chip 23 and the substrate 24 sandwiched between the resonator 7 and the stage 210. Is detected. Then, the pressure applied to the joining object detected by the pressure sensor 32 is fed back to the control device 31, and the up / down driving mechanism 25 is controlled based on the feedback value, thereby controlling the pressure applied to both the joining objects. Is done. The resonator support section 6 includes resonator section height detection means 36 formed by a linear sensor or the like, whereby the height of the head section 26 is detected.

  The head unit 26 coupled to the resonator support unit 6 includes the resonator 7, the vibrator 8, the holding unit 40 that holds the chip 23 by suction, the base unit 20, the first clamping unit 21, and the second clamping unit 22. And resonator support means 44 having.

  The resonator 7 resonates with the ultrasonic vibration generated by the vibrator 8 and has a wavelength of one resonance frequency so that the center position of the resonator 7 and both end positions are the maximum amplitude points. It is formed with a length. If comprised in this way, each position 1/4 wavelength away from the maximum amplitude point will correspond to the minimum amplitude point (nodal point). The resonator 7 is formed in a cylindrical shape having a circular cross section.

  The vibrator 8 is connected to one end of the resonator 7 coaxially with the central axis of the resonator 7. In addition, the vibrator 8 is controlled by the control device 31 to generate ultrasonic vibrations, whereby the resonator 7 vibrates in the direction of the central axis.

  The holding means 40 is attached to the lower surface of the outer periphery at the substantially central position of the resonator 7 that is the maximum amplitude point by an adhesive such as a thermosetting resin, and holds a bonding target such as the chip 23 or an electronic component. Hold on. The holding means 40 includes a vacuum suction mechanism (not shown) so that a bonding target such as the chip 23 or an electronic component can be sucked and held on the holding surface. Further, the structure for holding the object such as the chip 23 is not limited to the vacuum suction mechanism, and any structure can be used as long as it can hold the object such as an electrostatic suction mechanism or a mechanical chuck mechanism. There may be. Alternatively, the joining object may be held by the holding means 40 by directly attaching the joining object to the holding means 40.

  Further, the holding means 40 may be formed of a member other than metal, such as cemented carbide tungsten carbide, ceramic, diamond, etc., and the holding means 40 configured in this way is composed of an epoxy adhesive, Ni, Cu, You may adhere | attach to the resonator 7 with metal brazing etc., such as Ag.

  Further, concave supported portions are respectively formed on the outer periphery of the minimum amplitude point of the resonator 7, and the first clamp means 21 and the first clamp means 21 included in the resonator support means 44 have the concave supported portions, respectively. The resonator 7 is supported by the resonator support means 44 by being clamped by the two clamp means.

  Further, the base 20 of the resonator support means 44 is fixed to the resonator support section 6, and the resonator support section 6 is supported by the resonator support means 44 by being driven up and down by the vertical drive mechanism 25. The resonator 7 moves up and down, and the objects to be joined such as the chip 23 and the substrate 24 are pressurized.

  In addition, if the holding means 40 is formed of glass, super hard tungsten carbide, ceramic, diamond, or the like having a relatively high hardness among the above materials, the resonator 7 is made of a material having excellent acoustic characteristics, such as a titanium alloy. It is good to form by. Further, if the holding means 40 is formed of a material having high hardness, the resonator 7 may be formed of an inexpensive material such as Al.

  The mounting mechanism 28 includes a copying mechanism 200 having a stage 210 on which a substrate 24 to be mounted is placed, and a stage table 12 that moves the copying mechanism 200 (stage 210) in a horizontal plane substantially perpendicular to the vertical direction. I have.

  The stage 210 included in the copying mechanism 200 includes a vacuum suction mechanism (not shown) for sucking and holding the substrate 24 on the upper surface of the stage 210. In addition, the structure for holding the mounted object such as the substrate 24 or the wafer is not limited to the vacuum suction mechanism, and any mechanism that can hold the mounted object, such as an electrostatic suction mechanism or a mechanical chuck mechanism. Any configuration may be used. Further, the object to be actualized may be simply placed on the stage 210. The configuration and operation of the copying mechanism 200 will be described in detail later.

  The stage table 12 includes a moving shaft that can be moved in parallel and rotationally, and the substrate 24 with respect to the chip 23 held by the holding means 40 by moving the copying mechanism 200 (stage 210) relative to the head unit 26. Adjust the relative position of. In this embodiment, the stage table 12 is controlled by the control device 31 based on the relative positional relationship between the chip 23 and the metal bumps 23a and 24a (alignment marks) of the substrate 24 read by the upper and lower mark recognition means 14 described later. The relative position adjustment between the chip 23 and the substrate 24 is performed under the control.

  The position recognition unit 29 is inserted between the chip 23 and the substrate 24 arranged to face each other, and optically reads position recognition alignment marks (metal bumps 23a and 24a) provided on the chip 23 and the substrate 24, respectively. Upper and lower mark recognizing means 14, an amplitude detector 33 for detecting the amplitudes of the chip 23, the substrate 24 and the resonator 7, and a recognition means for moving the upper and lower mark recognizing means recognizing means 14 and the amplitude detector 33 in the horizontal plane and in the vertical direction. And a moving table 15. The upper and lower mark recognizing means 14 takes an image of a well-known two-field optical system lens composed of a mirror and a prism, and a chip 23 and a substrate 24 that are separately disposed above and below the two-field optical system lens. CCD camera (not shown).

  The transport unit 30 includes a chip supply device 16 and a chip tray 17 that transport the chips 23, and a substrate transport device 18 and a substrate transport conveyor 19 that transport the substrate 24.

  The control device 31 adjusts the pressure applied to the chip 23 and the substrate 24 via the head unit 26 and the voltage and current applied to the vibrator 8 to adjust the ultrasonic vibration energy applied to the chip 23 and the substrate 24. Control the size. Further, the control device 31 controls the vertical drive mechanism 25 based on the detection signal of the height position of the head unit 26 by the resonator unit height detection means 36, and the height of the head unit 26 in the direction of arrow Z in FIG. Adjust the height. Further, the control device 31 includes an operation panel (not shown) for controlling the entire joining device 100.

(Joining operation)
Next, an example of a bonding operation for bonding the chip 23 to a predetermined position of the substrate 24 by ultrasonic vibration in the bonding apparatus 100 will be described.

  First, the chip 23 as the object and the substrate 24 as the mounted object are supplied. The chip 23 is supplied from the chip tray 17 to the holding means 40 attached to the resonator 7 by the chip supply device 16 and is sucked and held. The substrate 24 is supplied from the substrate transport conveyor 19 to the stage 210 by the substrate transport device 18 and is held by suction.

  Next, the upper and lower mark recognition means 14 is inserted between the chip 23 and the substrate 24 held so that the respective bonding surfaces face each other by the recognition means moving table 15, and the chip 23 and the substrate 24 held opposite to each other are inserted. The positions of the alignment marks (metal bumps 23 a and 24 a) provided respectively are detected by the upper and lower mark recognition means 14. Then, based on the relative positional relationship between the chip 23 and the alignment mark of the substrate 24 read by the upper and lower mark recognizing means 14, the stage table 12 is moved in parallel and rotated with reference to the position of the chip 23, so that the position of the substrate 24 is changed. Is adjusted, and the relative position of the chip 23 and the substrate 24 is adjusted.

  Subsequently, the upper and lower mark recognizing means 14 is retracted by the recognizing means moving table 15 in a state where the relative positions of the chip 23 and the substrate 24 are aligned (the positions of the metal bumps 23a and 24a are aligned), The head unit 26 starts to descend by the vertical drive mechanism 25, and the chip 23 and the substrate 24 are brought close to each other. The chip 23 and the substrate 24 are sandwiched between the resonator 7 and the stage 210 based on the detection signal from the pressure sensor 32 when the metal bump 23a of the chip 23 and the metal bump 24a of the substrate 24 come into contact with each other. When it is detected that a predetermined pressure is applied to the chip 23 and the substrate 24, ultrasonic vibration is applied to join the metal bumps 23a and 24a.

  At this time, the control device 31 monitors and controls ultrasonic vibration energy derived from the current value and voltage value applied to the vibrator 8, the resonance amplitude of the resonator 7, and the pressure applied to the chip 23 and the substrate 24. Done. In addition, the timing to end the bonding process is determined when the pressure, ultrasonic vibration energy, and bonding time necessary for bonding with a target bonding area are obtained in advance, and the respective values obtained in advance are reached. The bonding process may be terminated.

  In this embodiment, as an example, the transmission frequency of the vibrator 8 is set to 40 kHz, and the voltage applied to the vibrator 8 is set within a range of 0V to 10V. In this embodiment, as an example, the relative vibration amplitude between the chip 23 and the substrate 24 is configured to be about 0.1 μm to 0.5 μm. What is necessary is just to change a magnitude | size suitably according to the kind (material, function, etc.) of a target object and a to-be-mounted object, a contact area, etc.

  When the bonding of the chip 23 and the substrate 24 is completed and the bonding process is completed, the adsorption of the chip 23 by the resonator 7 is released, and the head portion 26 is moved back upward. Finally, with the chip 23 mounted, the substrate 24 held on the stage 210 is discharged to the substrate transfer conveyor 19 by the substrate transfer device 18, and a series of joining processes is completed. Note that the number of chips 23 bonded to the substrate 24 is not limited to one, and a plurality of chips 23 may be continuously bonded to the substrate 24.

(Structure of copying mechanism)
Next, the configuration of the copying mechanism 200 will be described mainly with reference to FIGS. As shown in FIG. 3, the copying mechanism 200 includes a stage 210 having a first convex curved surface portion 211 on the lower surface side, and a first concave curved surface portion 221 provided in sliding contact with the first convex curved surface portion 211 on the upper surface side. A stage base 220 for mounting the stage 210, a roller 230 (support means) that slidably contacts the first convex curved surface portion 211 and supports the first convex curved surface portion 211 at a plurality of locations, and a base 220 and a support base 240 fixed by bolts 241, and the support base 240 is fixed to the stage table 12 by bolts 242 so that the copying mechanism 200 is attached to the stage table 12.

  As shown in FIG. 4, the first convex curved surface portion 211 on the lower surface side of the stage 210 and the first concave curved surface portion 221 on the upper surface side of the base 220 are arc surfaces so that the cross-sectional shape in a front view is an arc shape. It is formed in a shape. Further, the first convex curved surface portion 211 and the first concave curved surface portion 221 are formed with substantially the same curvature of the arc so that they can slide in the arc direction of the arc surface. A guide member 212 is attached to a predetermined position of the first convex curved surface portion 211 of the stage 210, and a guide hole 222 is formed at a position corresponding to the guide member 212 of the first concave curved surface portion 221 of the base 220. The stage 210 is mounted on the base 220 with the guide member 212 inserted through the guide hole 222.

  Further, the guide hole 222 is formed in the major axis in the arc direction of the first concave curved surface portion 221 with the same width as the diameter of the guide member 212, and restricts the movement of the guide member 212 in directions other than the arc direction. Therefore, when the stage 210 is placed on the base 220 by inserting the guide member 212 through the guide hole 222, the stage 210 moves in a direction substantially perpendicular to the arc direction, that is, from the base 220 of the stage 210. The slippage is prevented.

  In addition, a plurality of receiving holes 223 are formed in the first concave curved surface portion 221 of the base 220, and the rollers 230 and the rollers 230 are urged to protrude from the receiving holes 223 in the receiving holes 223. For example, an urging means 250 formed by a spring is disposed. In the roller 230, two rollers are connected to both ends of the rotation shaft 231, and the rotation direction of the roller 230 is the sliding contact direction (arc direction) of the first convex curved surface portion 211 and the first concave curved surface portion 221. It accommodates in each accommodation hole 223 so that it may correspond, so that it may correspond.

  The spring used for the urging means 250 may be a coil spring, a leaf spring, or other springs, and an elastic rubber material or the like other than the spring may be used for the urging means 250. Further, an air cylinder, a hydraulic cylinder, an air bag, or the like may be used for the urging means 250. Further, as the biasing means 250, a pair of magnets in which the same magnetic poles are arranged so as to repel each other may be used, and the roller 230 may be biased by the repulsive force of the magnets.

  Further, the biasing means 250 is disposed below the rotation shaft 231 of the accommodation hole 223 so as to bias the rotation shaft 231 of the roller 230 upward. In order to restrict excessive protrusion of the roller 230 from the accommodation hole 223 by the urging means 250, the pressing plate 232 is inserted into the recess 223 a formed at a predetermined position of the accommodation hole 223. It is attached so that it may be arranged above.

  Further, the base 220 is provided with a second convex curved surface portion 260 on the lower surface side, and a through hole 261 communicating the opening formed in the first concave curved surface portion 221 and the opening formed in the second convex curved surface portion. The through hole 241 is formed at a position corresponding to the through hole 261 of the support base 240. Further, one end of the bolt member 262 is fixed by a fixing bolt 262a at a position substantially in the center of the first convex curved surface portion 211 of the stage 210, and the bolt member 262 connected to the first convex curved surface portion 211 has a base. The stage 210 is placed on the base 220 through the through hole 261 of the base 220 and the through hole 241 of the support base 240.

  Further, a nut member 263 is screwed to the other end portion of the bolt member 262 led out below the base 220 through the through hole 261 of the base 220, and the second of the base 220 of the bolt member 262. An insertion member 264 is interposed between the convex curved surface portion 260 and the nut member 263. Further, a second concave curved surface portion 265 is provided on the upper surface side of the insertion member 264 so as to be slidable in contact with the second convex curved surface portion 260. As shown in FIG. The convex curved surface portion 260 and the second concave curved surface portion 265 on the upper surface side of the insertion member 264 are each formed in an arc surface shape so that a cross-sectional shape in a front view is an arc shape. The second convex curved surface portion 260 and the second concave curved surface portion 265 have arc curvatures such that the arcs of the first convex curved surface portion 211 and the first concave curved surface portion 221 are slidable in the arc direction of the circular arc surface. The curvature is substantially the same.

  When configured in this manner, as shown in FIG. 4, when the nut member 263 is tightened, the first convex curved surface portion 211 on the lower surface side of the stage 210 abuts on the first concave curved surface portion 221 on the upper surface side of the base 220, The second convex curved surface portion 260 on the lower surface side of the base 220 abuts on the second concave curved surface portion 265 on the upper surface side of the insertion member 264, so that the stage 210 is mounted on the base 200. Fixed to. As described above, the second convex curved surface portion 260, the through hole 261, the bolt member 262, the nut member 263, the insertion member 264, and the second concave curved surface portion 265 function as the “fixing means” of the present invention.

  On the other hand, as shown in FIG. 5, when the nut member 263 is loosened, each roller 230 protrudes from each accommodation hole 223 by the biasing means 250 and is supported by contacting the roller 230 with the first convex curved surface portion 211. The stage 210 floats from the base 220, and the first convex curved surface portion 211 on the lower surface side of the stage 210 is separated from the first concave curved surface portion 221 on the upper surface side of the base 220. In this state, if the reference surface to be copied is pressed against the upper surface of the stage 210, the stage 210 is in contact with the roller 230 while the first convex curved surface portion 211 of the stage 210 is in sliding contact with the roller 230, as shown in FIG. By oscillating in the arc direction of the (arc surface), a copying operation for matching the upper surface of the stage 210 and the reference surface for copying is executed.

  Further, when the upper surface of the stage 210 is pressed with a force larger than the urging force of each urging means 250, the first convex curved surface portion 211 on the lower surface side of the stage 210 against the urging force of each urging means 250. By pressing, each roller 230 is accommodated in each accommodation hole 223, and the first convex curved surface portion 211 comes into contact with the first concave curved surface portion 221 on the upper surface side of the base 200.

(Example of copying operation)
Next, an example of a copying operation by the copying mechanism 200 will be described mainly with reference to FIGS. In this embodiment, before the bonding operation by the bonding apparatus 100 is performed, the inclination of the holding surface of the holding means 40 attached to the resonator 7 (the inclination of the reference surface for copying) and the upper surface of the stage 210 are inclined. In order to make them coincide with each other, a copying operation by the copying mechanism 200 is executed.

  First, the nut member 263 is loosened, and the stage 210 is lifted from the base 220 by the urging force of the urging means 250 and supported by the roller 230 as shown in FIG. In this state, when the head portion 26 of the bonding apparatus 100 is lowered and the holding surface of the holding means 40 comes into contact with the upper surface of the stage 210, the first convex curved surface portion 211 on the lower surface side of the stage 210 as shown in FIG. Slidably contacts the roller 230, and the stage 210 swings until the inclination of the holding surface of the holding means 40 and the inclination of the upper surface of the stage 210 coincide.

  Subsequently, after the inclination of the holding surface of the holding means 40 and the inclination of the upper surface of the stage 210 coincide with each other, the first convex curved surface portion 211 on the lower surface side of the stage 210 resists the urging force of the urging means 250. The heads 26 are lowered until the rollers 230 are received in the receiving holes 223 and the first convex curved surface portions 211 come into contact with the first concave curved surface portions 221 on the upper surface side of the base 200. When the first convex curved surface portion 211 on the lower surface side of the stage 210 comes into contact with the first concave curved surface portion 221 on the upper surface side of the base 200, the descent of the head portion 26 is stopped, and as shown in FIG. The stage 210 is fixed to the base 220 with the member 263 tightened and adjusted so that the inclination of the upper surface of the stage 210 matches the inclination of the reference surface to be copied. Finally, the head unit 26 is moved back to complete the copying operation.

  As described above, according to this embodiment, each of the plurality of rollers 230 that are housed in the housing holes 223 formed in the plurality of first concave curved surface portions 221 provided on the upper surface side of the base 220 can be The first convex curved surface portion 211 provided on the lower surface side is provided at a plurality of locations by a roller with a simple configuration in which the plurality of urging means 250 that urges in the direction of projecting from the housing hole 223 are projected from the respective housing holes 223. The stage 210 supported so as to be slidable can be lifted from the base 220, and when the copying reference surface is pressed against the upper surface of the stage 210, the first convex curved surface portion 211 on the lower surface side of the stage 210 and the base Since the first concave curved surface portion 221 on the upper surface side of the table 220 is in a separated state, there is no risk of friction resistance between both curved surface portions 211 and 221, and the first convex curved surface portion 2 on the lower surface side. 1 By stage 210 sliding contact with the roller is swung, the copying operation to match the inclination of the upper surface and the scanning of the reference plane of the stage 210 is reliably performed.

  Further, even when a high pressure is applied to the stage 210, when the upper surface of the stage 210 is pressed with a force larger than the urging force of each urging means 250, the urging force of each urging means 250 is resisted. Each roller 230 is accommodated in the accommodation hole 223 by the pressing of the first convex curved surface portion 211 on the lower surface side of the stage 210, and the first convex curved surface portion 211 is provided so as to be slidable with the first convex curved surface portion 211. The base 220 supports the first convex curved surface portion 211 of the stage 210 from below with the first concave curved surface portion 221 from below so that the first concave curved surface portion 221 on the upper surface side of the base 220 is in contact with the surface. Thus, the stage 210 can be reliably supported, and the applied pressure that can be applied to the stage 210 can be increased.

  Further, the base 220 is formed by communicating the opening formed in the first concave curved surface portion 221 provided on the upper surface side and the opening formed in the second convex curved surface portion 260 provided on the lower surface side. A bolt member 262 having one end connected to the first convex curved surface portion 211 on the lower surface side of the stage 210 is inserted into the through hole 261, and a nut member is connected to the other end portion of the bolt member 262 led out below the base 220. 263 is screwed and between the second convex curved surface portion 260 on the lower surface side of the base 220 and the nut member 263 screwed to the other end portion of the bolt member 262, the second surface of the base 220 on the upper surface side. An insertion member 264 having a second concave curved surface portion 265 provided so as to be slidable in contact with the two convex curved surface portions 260 is inserted.

  When the nut member 264 is tightened, the first convex curved surface portion 211 on the lower surface side of the stage 210 abuts on the first concave curved surface portion 221 on the upper surface side of the base 220, and the second convex curved surface on the lower surface side of the base 210. Since the part 260 contacts the second concave curved surface part 265 on the upper surface side of the insertion member 264, the stage 210 is fixed in a state of being placed on the base 220, and thus the first convex curved surface part 211 of the stage 210. In addition, the base 220 is firmly clamped from above and below by the second concave curved surface portion 265 of the insertion member 264, and the first convex curved surface portion 211 and the base 220 on the lower surface side of the stage 210 that are generated when the nut member 263 is tightened. Since the stage 210 is firmly fixed to the base 220 by the static frictional force between the first concave curved surface portions 221 on the upper surface side, the upper surface of the stage 210 is pressurized and the stage 210 is swung. Even if a moment to be generated occurs, the inclination of the stage 210 is not likely to fluctuate as long as the magnitude of the moment does not exceed the magnitude of the static friction force. Therefore, the usability of the copying mechanism 200 can be improved.

  In addition, the first convex curved surface portion 211 on the lower surface side of the stage 210 and the first concave curved surface portion 221 on the upper surface side of the base 220 are each formed in an arcuate surface shape, so that each biasing means 250 can In a state where each protruding roller 230 is in slidable contact with the first convex curved surface portion 211 on the lower surface side of the stage 210 formed in an arcuate surface shape, the first convex curved surface portion 211 on the lower surface side of the stage 210 is It is possible to easily execute a copying operation by sliding the roller 210 in the arc direction of the arc surface in sliding contact with the roller 230.

<Second Embodiment>
A second embodiment of the present invention will be described with reference to FIG. FIG. 8 is a partially cut front view showing a second embodiment of the copying mechanism of the present invention. This embodiment differs from the first embodiment described above in that, as shown in FIG. 8, a plurality of first magnets 310 are formed so as to form a plurality of magnet pairs 300 instead of the rollers 230 and the biasing means 250. A plurality of second magnets 320 are embedded in the first convex curved surface portion 211 so as to be embedded in the first concave curved surface portion 221 with the same magnetic pole facing each of the first magnets 310. Since other configurations and operations are the same as those in the first embodiment, description of the configurations and operations is omitted by assigning the same reference numerals.

  If comprised in this way, the stage 210 will float from the base 220 with the repulsive force of the 1st, 2nd magnets 310 and 320 of each magnet pair 300 by loosening the nut member 263. As described above, the stage 210 swings while the first convex curved surface portion 211 is in slidable contact with the first magnet 310 in a state where the first convex curved surface portion 211 is separated from the first concave curved surface portion 221. The copying operation is executed.

  Therefore, the first and second magnets 310 and 320 are embedded so that the same magnetic pole faces the first convex curved surface portion 211 on the lower surface side of the stage 210 and the first concave curved surface portion 221 on the upper surface side of the base 220. The stage 210 can be levitated from the base by the repulsive force of the first and second magnets 310 and 320 of each magnet pair 300 with a simple configuration in which a plurality of magnet pairs 300 are formed. Since the first convex curved surface portion 211 on the lower surface side of the stage 210 and the first concave curved surface portion 221 on the upper surface side of the base 220 are separated when the reference surface for copying is pressed, the first convex surface There is no possibility that frictional resistance is generated between the curved surface portion 211 and the first concave curved surface portion 221, and a scanning operation for matching the inclinations of the upper surface of the stage 210 and the reference surface of the scanning is performed by the swinging of the stage 210. Indeed is executed.

  Further, when the upper surface of the stage 210 is pressed with a force larger than the repulsive force of the first and second magnets 310 and 320 of each magnet pair 300, the first and second magnets 310 and 320 of each magnet pair 300 are pressed. The first convex curved surface portion 211 comes into contact with the first concave curved surface portion 221 on the upper surface side of the base 220 by pressing the first convex curved surface portion 211 against the repulsive force.

  Therefore, even if a high pressure is applied to the stage 210, when the upper surface of the stage 210 is pressed with a force larger than the repulsive force of the first and second magnets 310 and 320 of each magnet pair 300, each magnet The first convex curved surface portion 211 is slidably contacted with the first convex curved surface portion 211 against the repulsive force of the first and second magnets 310, 320 of the pair 300. Since the surface comes into contact with the concave curved surface portion 221, the base 220 can support the stage 210 reliably by supporting the first convex curved surface portion 211 of the stage 210 from below with the first concave curved surface portion 221. Thus, it is possible to increase the pressurizing force that can be applied to the stage 210.

  Further, flange portions are formed on both sides of the stage 210, and a part of the upper surface of both sides of the base 220 protrudes from the peripheral portion of the first concave curved surface portion 221 and is disposed above the flange portion of the stage 210. As described above, the restricting plate 400 is fixed by a bolt or the like. Accordingly, the flange portion of the stage 210 comes into contact with a part of the regulation plate 400 protruding from the first concave curved surface portion 221 from below, and thus excessive lifting from the base 220 of the stage 210 is prevented.

  As described above, in this embodiment, the same effects as those of the first embodiment described above can be obtained. The magnet pair 300 functions as the “supporting means” of the present invention.

  Note that the present invention is not limited to the above-described embodiment, and various modifications other than those described above can be made without departing from the spirit thereof. For example, the first convex curved surface portion 211 and the first The first concave curved surface portion 221 is formed of a spherical surface having substantially the same curvature, and the second convex curved surface portion 260 and the second concave curved surface portion 265 are formed of a spherical surface having substantially the same curvature, so that the stage 210 can be swung in all directions. You may be able to move. In this case, the central angle formed by the first convex curved surface portion 211 and the first concave curved surface portion 221 may be matched with the central angle formed by the second convex curved surface portion 260 and the second concave curved surface portion 265.

  Further, the support means is not limited to the roller 230 described above, and any structure that can smoothly come into sliding contact with the first convex curved surface portion 211 of the stage 210 such as a ball bearing formed to be rotatable in all directions. The support means may be configured in any way.

  Further, two copying mechanisms 200 described above may be used in combination so that the swinging direction of the stage 210 is substantially orthogonal. Of course, the top and bottom of the copying mechanism 200 may be used interchangeably.

  In the above-described embodiment, the stage 10 side has a horizontal position adjustment function and the head portion 26 side has a vertical drive mechanism. However, the horizontal position adjustment function and the vertical drive mechanism have a stage 10 side and a head portion. 26 may be combined in any way, or may be configured to overlap.

  Furthermore, in the above-described embodiment, the head unit 26 and the stage 10 are arranged in the vertical direction (the direction of the arrow Z shown in FIG. 1), and the chip 23 as the object and the substrate 24 as the mounted object are overlapped in the vertical direction. However, the arrangement direction of the head portion 26 and the stage 10 is not limited to this, and the two objects are overlapped in the left-right direction by being arranged in the left-right direction substantially orthogonal to the up-down direction. It may be configured.

DESCRIPTION OF SYMBOLS 200 ... Copying mechanism 210 ... Stage 211 ... 1st convex curved surface part 220 ... Base 221 ... 1st concave curved surface part 223 ... Accommodating hole 230 ... Roller (support means)
250: biasing means 260: second convex curved surface portion 261: through hole 262 ... bolt member 263 ... nut member 264 ... insertion member 265 ... second concave curved surface portion 300 ... magnet pair (supporting means)
310 ... 1st magnet 320 ... 2nd magnet

Claims (5)

A stage having a first convex curved surface portion on the lower surface side;
Support means for supporting the first convex curved surface portion in a slidable manner at a plurality of locations,
When the reference surface for copying is pressed against the upper surface of the stage, the stage swings while the first convex curved surface portion is in sliding contact with the support means, so that the upper surface of the stage and the reference surface of the copying are In the copying mechanism in which the copying operation for matching the inclination is executed,
A first concave curved surface portion provided on the upper surface side so as to be slidable with the first convex curved surface portion; and a plurality of accommodating holes formed in the first concave curved surface portion; A base for placing the stage in which the supporting means is accommodated;
A plurality of biasing means provided in each of the accommodation holes and biasing each of the support means;
The copying operation is executed in a state in which the first convex curved surface portion and the first concave curved surface portion are separated from each other by urging each of the supporting means by the urging means.
When the upper surface of the stage is pressed with a force larger than the urging force of each of the urging means, each of the supporting means is pressed by the pressing of the first convex curved surface portion against the urging force of each of the urging means. Is accommodated in each of the accommodation holes, and the first convex curved surface portion abuts on the first concave curved surface portion. Each of the support means includes a roller that is provided so as to be able to appear and retract in each of the storage holes and is slidably contacted with the first convex curved surface portion,
The first convex curved surface portion and the first concave curved surface portion are each formed in a circular arc shape,
The copying operation is performed by the stage swinging in the arc direction of the arc surface in a state where the rollers protruding from the receiving holes by the biasing means are in contact with the first convex curved surface portion. The copying mechanism according to claim 1, wherein the copying mechanism is executed.   3. The copying mechanism according to claim 1, wherein each of the urging means is a pair of repulsive magnets, and the support means is attached to one magnet of each of the urging means. . A stage having a first convex curved surface portion on the lower surface side;
Support means for supporting the first convex curved surface portion in a slidable manner at a plurality of locations,
When the reference surface for copying is pressed against the upper surface of the stage, the stage swings while the first convex curved surface portion is in sliding contact with the support means, so that the upper surface of the stage and the reference surface of the copying are In the copying mechanism in which the copying operation for matching the inclination is executed,
For mounting the stage, the first concave curved surface portion slidably contacted with the first convex curved surface portion on the upper surface side, and a plurality of first magnets embedded in the first concave curved surface portion. The base,
A plurality of second magnets embedded in the first convex curved surface so as to form a plurality of magnet pairs with the same magnetic pole facing each of the first magnets;
The copying operation is performed in a state in which the first convex curved surface portion is lifted and separated from the first concave curved surface portion by the repulsive force of the first and second magnets of each magnet pair,
The first against the repulsive force of the first and second magnets of each magnet pair when the upper surface of the stage is pressed with a force greater than the repulsive force of the first and second magnets of each of the magnet pairs. A copying mechanism characterized in that the first convex curved surface portion comes into contact with the first concave curved surface portion by pressing of the convex curved surface portion. A second convex curved surface portion provided on the lower surface side of the base;
A through hole formed in the base by communicating an opening formed in the first concave curved surface portion and an opening formed in the second convex curved surface portion;
A bolt member having one end connected to the first convex curved surface portion of the stage and inserted through the through hole;
A nut member screwed into the other end portion of the bolt member led out below the base through the through hole;
It has a second concave curved surface portion provided on the upper surface side so as to be slidable with the second convex curved surface portion, and has an insertion member inserted between the second convex curved surface portion and the nut member,
When the nut member is tightened, the first convex curved surface portion abuts on the first concave curved surface portion, and the second convex curved surface portion abuts on the second concave curved surface portion, thereby placing the stage in the mounted state on the base. 5. The copying mechanism according to claim 1, further comprising fixing means for fixing to the table.

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