JP2012073603A - Photosensitive resin composition - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a photosensitive resin composition enabling formation of a pattern with excellent heat resistance.SOLUTION: The photosensitive resin composition contains the following components (A), (B), (C), (D), and (E). They are: (A) a copolymer containing a structural unit derived from at least one kind selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic acid anhydrides and a structural unit derived from an unsaturated compound having a cyclic ether structure having 2 to 4 carbon atoms (but not containing a structural unit derived from an unsaturated compound having a perfluoroalkyl group having 4 to 6 carbon atoms); (B) a polymer having a structural unit derived from an unsaturated compound having a perfluoroalkyl group having 4 to 6 carbon atoms; (C) a polymerizable compound; (D) a polymerization initiator; and (E) a solvent.

Description

  The present invention relates to a photosensitive resin composition.

In recent display devices and the like, a color filter, an ITO electrode of a liquid crystal display element, an organic EL display element, a circuit wiring board, and the like are manufactured by an inkjet method. Moreover, in the inkjet method, the partition formed using the photosensitive resin composition is utilized.
As such a photosensitive resin composition, for example, a photosensitive resin composition containing a polymer obtained by polymerizing an α-substituted acrylate having a fluoroalkyl group having 4 to 6 carbon atoms is known (patent). Reference 1).

JP 2008-287251 A

  However, conventionally proposed photosensitive resin compositions may not always be sufficiently satisfied with respect to the heat resistance of the resulting pattern.

The present invention provides the following [1] to [6].
[1] A photosensitive resin composition comprising (A), (B), (C), (D) and (E).
(A) a structural unit derived from at least one selected from the group consisting of an unsaturated carboxylic acid and an unsaturated carboxylic acid anhydride, and a structural unit derived from an unsaturated compound having a C2-C4 cyclic ether structure; (However, there is no structural unit derived from an unsaturated compound having a C 4-6 perfluoroalkyl group.)
(B) a polymer containing a structural unit derived from an unsaturated compound having a C 4-6 perfluoroalkyl group (C) a polymerizable compound (D) a polymerization initiator (E) solvent

[2] The photosensitive resin composition according to [1], wherein (B) is a copolymer further comprising a structural unit derived from at least one selected from the group consisting of an unsaturated carboxylic acid and an unsaturated carboxylic anhydride. object.
[3] The photosensitive resin composition according to [1] or [2], wherein (C) is a polymerization initiator containing an oxime compound.
[4] A pattern formed from the photosensitive resin composition according to any one of [1] to [3].
[5] An inkjet partition formed by the photosensitive resin composition according to any one of [1] to [3].
[6] A display device comprising at least one selected from the group consisting of the pattern according to [4] and the partition for inkjet according to [5].

  According to the photosensitive resin composition of the present invention, a pattern having excellent heat resistance can be obtained.

2 is a cross-sectional view schematically showing a part of the display device 1 in an enlarged manner. FIG. 1 is an enlarged plan view schematically showing a part of a display device 1 according to an embodiment of the present invention.

The photosensitive resin composition of the present invention is a photosensitive resin composition containing (A), (B), (C), (D) and (E).
(A) a structural unit derived from at least one selected from the group consisting of an unsaturated carboxylic acid and an unsaturated carboxylic acid anhydride, and a structural unit derived from an unsaturated compound having a C2-C4 cyclic ether structure; (However, there is no structural unit derived from an unsaturated compound having a C 4-6 perfluoroalkyl group.) (Hereinafter sometimes referred to as “resin (A)”)
(B) a polymer containing a structural unit derived from an unsaturated compound having a C 4-6 perfluoroalkyl group (hereinafter sometimes referred to as “resin (B)”)
(C) Polymerizable compound (D) Polymerization initiator (E) solvent Furthermore, the photosensitive resin composition of this invention is resin (henceforth "resin (A1)" different from resin (A) and resin (B). In some cases), at least one selected from the group consisting of a polymerization initiation assistant (D1), a polyfunctional thiol compound (T) and a surfactant (F) may be included.
In addition, in this specification, the compound illustrated as each component can be used individually or in combination unless there is particular notice.

The photosensitive resin composition of this invention contains resin (A). As resin (A),
Resin (A-1): At least one selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic anhydrides (a) (hereinafter sometimes referred to as “(a)”) and cyclic having 2 to 4 carbon atoms A copolymer obtained by polymerizing an unsaturated compound (b) having an ether structure (hereinafter sometimes referred to as “(b)”);
Resin (A-2): Monomer (c) copolymerizable with (a) and (b) (however, it does not have a C2-C4 cyclic ether structure) (hereinafter "(c)" And a copolymer obtained by polymerizing (a) and (b). However, (a), (b) and (c) do not have a C 4-6 perfluoroalkyl group.
As resin (A), resin (A-1) is preferable.

Specific examples of (a) include unsaturated monocarboxylic acids such as acrylic acid, methacrylic acid, crotonic acid, o-vinylbenzoic acid, m-vinylbenzoic acid, and p-vinylbenzoic acid;
Maleic acid, fumaric acid, citraconic acid, mesaconic acid, itaconic acid, 3-vinylphthalic acid, 4-vinylphthalic acid, 3,4,5,6-tetrahydrophthalic acid, 1,2,3,6-tetrahydrophthalic acid, dimethyl Unsaturated dicarboxylic acids such as tetrahydrophthalic acid and 1,4-cyclohexene dicarboxylic acid;
Methyl-5-norbornene-2,3-dicarboxylic acid, 5-carboxybicyclo [2.2.1] hept-2-ene, 5,6-dicarboxybicyclo [2.2.1] hept-2-ene, 5-carboxy-5-methylbicyclo [2.2.1] hept-2-ene, 5-carboxy-5-ethylbicyclo [2.2.1] hept-2-ene, 5-carboxy-6-methylbicyclo Bicyclounsaturated compounds containing a carboxy group such as [2.2.1] hept-2-ene, 5-carboxy-6-ethylbicyclo [2.2.1] hept-2-ene;
Maleic anhydride, citraconic anhydride, itaconic anhydride, 3-vinylphthalic anhydride, 4-vinylphthalic anhydride, 3,4,5,6-tetrahydrophthalic anhydride, 1,2,3,6- Unsaturated dicarboxylic acid anhydrides such as tetrahydrophthalic anhydride, dimethyltetrahydrophthalic anhydride, 5,6-dicarboxybicyclo [2.2.1] hept-2-ene anhydride (hymic acid anhydride);

Unsaturated mono [(meth) acryloyloxyalkyl] esters of polyvalent carboxylic acids such as succinic acid mono [2- (meth) acryloyloxyethyl] and phthalic acid mono [2- (meth) acryloyloxyethyl] Kind;
Examples thereof include unsaturated acrylates containing a hydroxy group and a carboxy group in the same molecule, such as α- (hydroxymethyl) acrylic acid.
Of these, acrylic acid, methacrylic acid, maleic anhydride and the like are preferably used from the viewpoint of copolymerization reactivity and alkali solubility.
In this specification, “(meth) acrylic acid” represents at least one selected from the group consisting of acrylic acid and methacrylic acid. Notations such as “(meth) acryloyl” and “(meth) acrylate” have the same meaning.

  (B) is an unsaturated compound having a cyclic ether structure having 2 to 4 carbon atoms (for example, at least one selected from the group consisting of an oxirane ring, an oxetane ring and a tetrahydrofuran ring). A monomer having an ether structure and an ethylenically unsaturated double bond is preferred, and a monomer having a cyclic ether structure having 2 to 4 carbon atoms and a (meth) acryloyloxy group is more preferred.

  Examples of (b) include an unsaturated compound (b1) having an oxiranyl group (hereinafter sometimes referred to as “(b1)”) and an unsaturated compound (b2) having an oxetanyl group (hereinafter referred to as “(b2)”). And an unsaturated compound (b3) having a tetrahydrofuryl group (hereinafter sometimes referred to as “(b3)”).

(B1) is an unsaturated compound (b1-1) having a structure in which a linear or branched unsaturated aliphatic hydrocarbon group is epoxidized (hereinafter referred to as “(b1-1)”). And an unsaturated compound (b1-2) having a structure in which an unsaturated alicyclic hydrocarbon is epoxidized (hereinafter sometimes referred to as “(b1-2)”).
As (b1), a monomer having an oxiranyl group and a (meth) acryloyloxy group is preferable, and a monomer having a structure in which an unsaturated alicyclic hydrocarbon is epoxidized and a (meth) acryloyloxy group Is more preferable. These monomers are excellent in the storage stability of the photosensitive resin composition.

  Specific examples of (b1-1) include glycidyl (meth) acrylate, β-methylglycidyl (meth) acrylate, β-ethylglycidyl (meth) acrylate, glycidyl vinyl ether, o-vinylbenzyl glycidyl ether, m-vinyl. Benzyl glycidyl ether, p-vinylbenzyl glycidyl ether, α-methyl-o-vinylbenzyl glycidyl ether, α-methyl-m-vinylbenzyl glycidyl ether, α-methyl-p-vinylbenzyl glycidyl ether, 2,3-bis ( Glycidyloxymethyl) styrene, 2,4-bis (glycidyloxymethyl) styrene, 2,5-bis (glycidyloxymethyl) styrene, 2,6-bis (glycidyloxymethyl) styrene, 2,3,4-tris ( Glycidyl oxime Chill) styrene, 2,3,5-tris (glycidyloxymethyl) styrene, 2,3,6-tris (glycidyloxymethyl) styrene, 3,4,5-tris (glycidyloxymethyl) styrene, 2,4, Examples thereof include 6-tris (glycidyloxymethyl) styrene and compounds described in JP-A-7-248625.

  Examples of (b1-2) include vinylcyclohexene monooxide, 1,2-epoxy-4-vinylcyclohexane (for example, Celoxide 2000; manufactured by Daicel Chemical Industries, Ltd.), 3,4-epoxycyclohexylmethyl acrylate (for example, cyclone). Mer A400; manufactured by Daicel Chemical Industries, Ltd.), 3,4-epoxycyclohexylmethyl methacrylate (for example, Cyclomer M100; manufactured by Daicel Chemical Industries, Ltd.), a compound represented by formula (I), formula (II) ) And the like.

[In Formula (I) and Formula (II), R ¹ and R ² represent a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and the hydrogen atom contained in the alkyl group is substituted with a hydroxy group. Also good.
X ¹ and X ^{2 each} represents a single bond, —R ³ —, * —R ³ —O—, * —R ³ —S—, or * —R ³ —NH—.
R ³ represents an alkanediyl group having 1 to 6 carbon atoms.
* Represents a bond with O. ]

Specific examples of the alkyl group having 1 to 4 carbon atoms include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, and a tert-butyl group.
Examples of the alkyl group substituted with a hydroxy group include a hydroxymethyl group, 1-hydroxyethyl group, 2-hydroxyethyl group, 1-hydroxypropyl group, 2-hydroxypropyl group, 3-hydroxypropyl group, 1-hydroxy- Examples include 1-methylethyl group, 2-hydroxy-1-methylethyl group, 1-hydroxybutyl group, 2-hydroxybutyl group, 3-hydroxybutyl group, 4-hydroxybutyl group and the like.
R ¹ and R ² are preferably a hydrogen atom, a methyl group, a hydroxymethyl group, a 1-hydroxyethyl group, and a 2-hydroxyethyl group, and more preferably a hydrogen atom and a methyl group.

Examples of the alkanediyl group include methylene group, ethylene group, propane-1,2-diyl group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane- Examples include 1,6-diyl group.
X ¹ and X ² are preferably a single bond, a methylene group, an ethylene group, * —CH ₂ —O— (* represents a bond to O), or * —CH ₂ CH ₂ —O— group. More preferably, a single bond and a * —CH ₂ CH ₂ —O— group are mentioned.

  Examples of the compound represented by the formula (I) include compounds represented by any one of the formulas (I-1) to (I-15). Preferably Formula (I-1), Formula (I-3), Formula (I-5), Formula (I-7), Formula (I-9) and Formula (I-11) to Formula (I-15) The compound represented by either of these is mentioned. More preferably, a compound represented by any one of formula (I-1), formula (I-7), formula (I-9) and formula (I-15) can be mentioned.

  Examples of the compound represented by the formula (II) include compounds represented by any one of the formulas (II-1) to (II-15). Preferably Formula (II-1), Formula (II-3), Formula (II-5), Formula (II-7), Formula (II-9) and Formula (II-11) to Formula (II-15) The compound represented by either of these is mentioned. More preferably, a compound represented by any one of formula (II-1), formula (II-7), formula (II-9) and formula (II-15) can be mentioned.

  The compound represented by the formula (I) and the compound represented by the formula (II) can be used alone. They can also be mixed in any ratio. In the case of mixing, the mixing ratio is a molar ratio, preferably 5:95 to 95: 5, more preferably 10:90 to 90:10, particularly preferably 20:80 in the formula (I): formula (II). ~ 80: 20.

  (B2) is preferably a monomer having an oxetanyl group and a (meth) acryloyloxy group. Examples of (b2) include 3-methyl-3- (meth) acryloyloxymethyl oxetane, 3-ethyl-3- (meth) acryloyloxymethyl oxetane, 3-methyl-3- (meth) acryloyloxyethyl oxetane, Examples include 3-ethyl-3- (meth) acryloyloxyethyl oxetane.

(B3) is preferably a monomer having a tetrahydrofuryl group and a (meth) acryloyloxy group.
Specific examples of (b3) include tetrahydrofurfuryl acrylate (for example, Biscoat V # 150, manufactured by Osaka Organic Chemical Industry Co., Ltd.), tetrahydrofurfuryl methacrylate, and the like.

Examples of (c) include (meth) acrylic acid esters, N-substituted maleimides, unsaturated dicarboxylic acid diesters, alicyclic unsaturated compounds, styrenes, and other vinyl compounds.
Examples of (meth) acrylic acid esters include alkyl esters such as methyl (meth) acrylate, ethyl (meth) acrylate, n-butyl (meth) acrylate, sec-butyl (meth) acrylate, and tert-butyl (meth) acrylate. ;
Cyclohexyl (meth) acrylate, 2-methylcyclohexyl (meth) acrylate, tricyclo [5.2.1.0 ^2,6 ] decan-8-yl (meth) acrylate (in this technical field, dicyclopenta Nyl (meth) acrylate), dicyclopentanyloxyethyl (meth) acrylate, tricyclo [5.2.1.0 ^2,6 ] decen-8-yl (meth) acrylate (in the art) , Which is commonly referred to as "dicyclopentenyl (meth) acrylate"), cycloalkyl esters such as isobornyl (meth) acrylate;
Hydroxyalkyl esters such as 2-hydroxyethyl (meth) acrylate and 2-hydroxypropyl (meth) acrylate;
Examples include aryl and aralkyl esters such as phenyl (meth) acrylate and benzyl (meth) acrylate.

Examples of unsaturated dicarboxylic acid diesters include diethyl maleate, diethyl fumarate, diethyl itaconate and the like.
Examples of N-substituted maleimides include N-phenylmaleimide, N-cyclohexylmaleimide, N-benzylmaleimide, N-succinimidyl-3-maleimidobenzoate, N-succinimidyl-4-maleimidobutyrate, N-succinimidyl-6-maleimidoca Examples include proate, N-succinimidyl-3-maleimide propionate, and N- (9-acridinyl) maleimide.

  Examples of the alicyclic unsaturated compounds include bicyclo [2.2.1] hept-2-ene, 5-methylbicyclo [2.2.1] hept-2-ene, and 5-ethylbicyclo [2.2. 1] hept-2-ene, 5-hydroxybicyclo [2.2.1] hept-2-ene, 5-hydroxymethylbicyclo [2.2.1] hept-2-ene, 5- (2′-hydroxy) Ethyl) bicyclo [2.2.1] hept-2-ene, 5-methoxybicyclo [2.2.1] hept-2-ene, 5-ethoxybicyclo [2.2.1] hept-2-ene, 5,6-dihydroxybicyclo [2.2.1] hept-2-ene, 5,6-di (hydroxymethyl) bicyclo [2.2.1] hept-2-ene, 5,6-di (2 ′ -Hydroxyethyl) bicyclo [2.2.1] hept-2-ene, 5 6-dimethoxybicyclo [2.2.1] hept-2-ene, 5,6-diethoxybicyclo [2.2.1] hept-2-ene, 5-hydroxy-5-methylbicyclo [2.2. 1] Hept-2-ene, 5-hydroxy-5-ethylbicyclo [2.2.1] hept-2-ene, 5-hydroxymethyl-5-methylbicyclo [2.2.1] hept-2-ene , 5-tert-butoxycarbonylbicyclo [2.2.1] hept-2-ene, 5-cyclohexyloxycarbonylbicyclo [2.2.1] hept-2-ene, 5-phenoxycarbonylbicyclo [2.2. 1] Hept-2-ene, 5,6-bis (tert-butoxycarbonyl) bicyclo [2.2.1] hept-2-ene, 5,6-bis (cyclohexyloxycarbonyl) bicyclo 2.2.1] hept-2-ene bicyclo unsaturated compounds such as and the like.

Examples of styrenes include styrene, α-methyl styrene, m-methyl styrene, p-methyl styrene, vinyl toluene, and p-methoxy styrene.
Examples of other vinyl compounds include (meth) acrylonitrile, vinyl chloride, vinylidene chloride, (meth) acrylamide, vinyl acetate, 1,3-butadiene, isoprene, and 2,3-dimethyl-1,3-butadiene.
Examples of (c) include styrene, N-phenylmaleimide, N-cyclohexylmaleimide, N-benzylmaleimide, and bicyclo [2.2.1] hept-2-ene from the viewpoint of copolymerization reactivity and alkali solubility. preferable.

In resin (A-1), it is preferable that the ratio of the structural unit derived from each monomer exists in the following ranges with respect to the total number of moles of the structural unit constituting the resin (A-1).
Structural unit derived from (a); 5 to 60 mol% (more preferably 10 to 50 mol%)
Structural unit derived from (b); 40 to 95 mol% (more preferably 50 to 90 mol%)
When the ratio of the structural unit of the resin (A-1) is in the above range, the storage stability of the photosensitive resin composition, the developability when forming a pattern from the photosensitive resin composition, and the coating obtained There exists a tendency for the solvent resistance of a film | membrane and a pattern, heat resistance, and mechanical strength to become favorable.
As the resin (A-1), a resin (A-1) in which (b) is (b1) is preferable, and a resin (A-1) in which (b) is (b1-2) is more preferable.

  Resin (A-1) is, for example, a method described in the document “Experimental Method for Polymer Synthesis” (Takayuki Otsu, published by Kagaku Dojin Co., Ltd., First Edition, First Edition, issued March 1, 1972) and It can manufacture with reference to the cited reference described in the said literature.

  Specifically, a predetermined amount of (a) and (b), a polymerization initiator, a solvent, and the like are placed in a reaction vessel, and, for example, oxygen in the atmosphere is replaced with nitrogen to obtain a deoxygenated atmosphere and stirring. The method of heating and keeping warm is exemplified. In addition, the polymerization initiator, the solvent, and the like used here are not particularly limited, and any of those usually used in the field can be used. For example, as polymerization initiators, azo compounds (2,2′-azobisisobutyronitrile, 2,2′-azobis (2,4-dimethylvaleronitrile), etc.) and organic peroxides (benzoyl peroxide, etc.) Any solvent may be used as long as it dissolves each monomer, and a solvent described later can be used as the solvent (E) of the photosensitive resin composition. In order to adjust the molecular weight of the resin obtained, a chain transfer agent may be added during the polymerization reaction. Examples of chain transfer agents include n-butanethiol, tert-butanethiol, n-dodecanethiol, 2-sulfanylethanol, thioglycolic acid, ethyl thioglycolate, 2-ethylhexyl thioglycolate, methoxybutyl thioglycolate, 3- Thiols such as sulfanylpropionic acid and sulfanyl group-containing silicone (KF-2001: manufactured by Shin-Etsu Chemical); halogenated alkyls such as chloroform, carbon tetrachloride, carbon tetrabromide, and the like.

  In addition, the obtained copolymer may use the solution after reaction as it is, a concentrated or diluted solution may be used, and it took out as solid (powder) by methods, such as reprecipitation. Things may be used. In particular, by using the same solvent as the solvent (E) described later as the solvent during the polymerization, the solution after the reaction can be used as it is, and the production process can be simplified.

In resin (A-2), it is preferable that the ratio of the structural unit derived from each monomer exists in the following ranges with respect to the total number of moles of all structural units constituting the resin (A-2).
Structural unit derived from (a); 2 to 40 mol% (more preferably 5 to 35 mol%)
Structural unit derived from (c): 1 to 65 mol% (more preferably 1 to 60 mol%)
Structural unit derived from (b); 2-95 mol% (more preferably 5-80 mol%)
When the ratio of the structural unit of the resin (A-2) is in the above range, the storage stability of the photosensitive resin composition, the developability when forming a pattern from the photosensitive resin composition, and the coating obtained There exists a tendency for the solvent resistance of a film | membrane and a pattern, heat resistance, and mechanical strength to become favorable.
As the resin (A-2), a resin (A-2) in which (b) is (b1) is preferable, and a resin (A-2) in which (b) is (b1-2) is more preferable.
Resin (A-2) can be manufactured by the same method as resin (A-1).

  The weight average molecular weight in terms of polystyrene of the resin (A) is preferably 3,000 to 100,000, more preferably 5,000 to 50,000. When the weight average molecular weight of the resin (A) is in the above range, the coating property tends to be excellent, the film thickness of the exposed portion is hardly generated during development, and the non-exposed portion is easily removed by development.

  The molecular weight distribution [weight average molecular weight (Mw) / number average molecular weight (Mn)] of the resin (A) is preferably 1.1 to 6.0, and more preferably 1.2 to 4.0. When the molecular weight distribution is in the above range, the developability tends to be excellent.

  The acid value of the resin (A) is 20 to 150 mgKOH / g, preferably 40 to 135 mgKOH / g, more preferably 50 to 135 mgKOH / g. Here, the acid value is a value measured as the amount (mg) of potassium hydroxide necessary to neutralize 1 g of the resin, and can be determined by titration using an aqueous potassium hydroxide solution.

  The content of the resin (A) is preferably 5 to 95% by mass, more preferably 20 to 80% by mass with respect to the total amount of the resin (A), the resin (A1) and the polymerizable compound (C). Especially preferably, it is 40-60 mass%. If the content of the resin (A) is in the above range, the developability of the photosensitive resin composition, the adhesion of the resulting pattern, the solvent resistance and the mechanical properties tend to be good.

  The photosensitive resin composition of this invention contains resin (B). The resin (B) is a polymer containing a structural unit derived from an unsaturated compound (d) having a C 4-6 perfluoroalkyl group (hereinafter sometimes referred to as “(d)”).

(D) includes a compound represented by the formula (d-0).

[In formula (d-0), R ^f represents a C 4-6 perfluoroalkyl group.
R ^d represents a hydrogen atom, a halogen atom, a cyano group, a phenyl group, a benzyl group or an alkyl group having 1 to 21 carbon atoms, and the hydrogen atom contained in the alkyl group is substituted with a halogen atom or a hydroxy group. Also good.
^Xd is a single bond, a divalent aliphatic hydrocarbon group having 1 to 10 carbon atoms, a divalent alicyclic hydrocarbon group having 3 to 10 carbon atoms, or a divalent aromatic carbon group having 6 to 12 carbon atoms. Represents a hydrogen group, and —CH ₂ — contained in the aliphatic hydrocarbon group and the alicyclic hydrocarbon group is —O—, —CO—, —NR ^e —, —S— or —SO ₂ —. It may be replaced. ]

R ^f is a C 4-6 perfluoroalkyl group, preferably a perfluorobutyl group or a perfluorohexyl group.

Examples of the alkyl group having 1 to 21 carbon atoms in R ^d include a methyl group, an ethyl group, an n-propyl group, an n-butyl group, an n-pentyl group, an n-hexyl group, an n-heptyl group, an n-octyl group, a linear alkyl group such as an n-nonyl group and an n-decyl group;
Isopropyl group, isobutyl group, sec-butyl group, isopentyl group, 1-methylpentyl group, 2-methylpentyl group, 3-methylpentyl group, 4-methylpentyl group, 1-ethylbutyl group, 2-ethylbutyl group, 1- Methylhexyl group, 2-methylhexyl group, 3-methylhexyl group, 4-methylhexyl group, 5-methylhexyl group, 1-ethylpentyl group, 2-ethylpentyl group, 3-ethylpentyl group, 1-propylbutyl Group, 1-methylheptyl group, 2-methylheptyl group, 3-methylheptyl group, 4-methylheptyl group, 5-methylheptyl group, 6-methylheptyl group, 1-ethylhexyl group, 2-ethylhexyl group, 3- Ethylhexyl group, 4-ethylhexyl group, 2-propylpentyl group, 1-butylbutyl group, 1-butyl- -Methylbutyl group, 1-butyl-3-methylbutyl group, tert-butyl group, 1,1-dimethylpropyl group, 1,1-dimethylbutyl group, 1,2-dimethylbutyl group, 1,3-dimethylbutyl group, 2,3-dimethylbutyl group, 1-ethyl-2-methylpropyl group, 1,1-dimethylpentyl group, 1,2-dimethylpentyl group, 1,3-dimethylpentyl group, 1,4-dimethylpentyl group, 2,2-dimethylpentyl group, 2,3-dimethylpentyl group, 2,4-dimethylpentyl group, 3,3-dimethylpentyl group, 3,4-dimethylpentyl group, 1-ethyl-1-methylbutyl group, 2 -Branched alkyl groups such as -ethyl-3-methylbutyl group.
R ^d is preferably a hydrogen atom, a halogen atom or a methyl group.

Examples of the divalent aliphatic hydrocarbon group having 1 to 10 carbon atoms in ^Xd include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, and a butane-1,4- Diyl group, butane-1,3-diyl group, butane-1,2-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane- Examples include alkanediyl groups such as 1,8-diyl group.

Examples of the divalent alicyclic hydrocarbon group having 3 to 10 carbon atoms in ^Xd include a cyclopropanediyl group, a cyclobutanediyl group, a cyclopentanediyl group, a cyclohexanediyl group, a cycloheptanediyl group, and a cyclodecanediyl group. Can be mentioned.
Examples of the divalent aromatic hydrocarbon group having 6 to 12 carbon atoms in ^Xd include a phenylene group and a naphthalenediyl group.

Examples of X ^d in which —CH ₂ — is replaced by —O—, —CO—, —NR ^e —, —S—, or —SO ₂ — include, for example, formulas (xd-1) to (xd-10) And the group represented.

X ^d is preferably an alkanediyl group having 1 to 6 carbon atoms, and more preferably an ethylene group.

［式（ｄ−１）中、Ｒ^ｈは、炭素数４〜６のペルフルオロアルキル基を表す。
Ｒ^ｇは、水素原子、ハロゲン原子又はメチル基を表す。］ (D) is preferably a compound represented by the formula (d-1).

[In the formula (d-1), R ^h represents a C 4-6 perfluoroalkyl group.
R ^g represents a hydrogen atom, a halogen atom or a methyl group. ]

Examples of the compound represented by the formula (d-0) include compound (d-1) to compound (d-94). In the table, the formula number shown in the ^Xd column represents the formula number of the group exemplified above. Further, for example, the compound (d-1) is a compound represented by the following formula (d-1).

  The resin (B) is preferably a resin including the structural unit derived from (d) and the structural unit derived from (a), and the structural unit derived from (d) and the structure derived from (a) A resin containing a unit and a structural unit derived from (b) is more preferable. When the resin (B) contains the structural unit derived from (a), the developability is excellent, and thus unevenness resulting from residue and development tends to be suppressed. When the resin (B) contains a structural unit derived from (b), the solvent resistance tends to be excellent. Resin (B) may contain a structural unit derived from (c). Examples of (a), (b), and (c) include the same as described above.

When the resin (B) is a copolymer of (a) and (d), the ratio of the structural units derived from each monomer is relative to the total number of moles of the structural units constituting the resin (B). The following range is preferable.
Structural unit derived from (a); 5 to 40% by mass (more preferably 10 to 30% by mass)
Structural unit derived from (d); 60 to 95% by mass (more preferably 70 to 90% by mass)

When the resin (B) is a copolymer of (a), (b) and (d), the ratio of the structural units derived from each monomer is the total moles of structural units constituting the resin (B). It is preferable to be in the following range with respect to the number.
Structural unit derived from (a); 5 to 40% by mass (more preferably 10 to 30% by mass)
Structural unit derived from (b); 5 to 80% by mass (more preferably 10 to 70% by mass)
Structural unit derived from (d); 10 to 80% by mass (more preferably 20 to 70% by mass)

When the resin (B) is a copolymer of (a), (b), (c) and (d), the ratio of the structural units derived from each monomer constitutes the resin (B) The total number of moles of units is preferably in the following range.
Structural unit derived from (a); 5 to 40% by mass (more preferably 10 to 30% by mass)
Structural unit derived from (b); 5 to 70% by mass (more preferably 10 to 60% by mass)
Structural unit derived from (c); 10-50% by mass (more preferably 20-40% by mass)
Structural unit derived from (d); 10 to 80% by mass (more preferably 20 to 70% by mass)

  When the ratio of each structural unit is in the above range, the liquid repellency and developability tend to be excellent.

The polystyrene equivalent weight average molecular weight of the resin (B) is preferably 3,000 to 20,000, more preferably 5,000 to 15,000. When the weight average molecular weight of the resin (A) is in the above range, the coating property tends to be excellent, the film thickness of the exposed portion is hardly generated during development, and the non-exposed portion is easily removed by development.
The acid value of the resin (B) is 20 to 200 mgKOH / g, preferably 40 to 150 mgKOH / g.

  The content of the resin (B) is preferably 0.001 to 10 parts by mass, more preferably 0.001 parts by mass with respect to 100 parts by mass of the total amount of the resin (A), the resin (A1) and the polymerizable compound (C). 01 to 5 parts by mass. When the content of the resin (B) is in the above range, the developability during pattern formation and the resulting pattern tend to be excellent in liquid repellency.

The photosensitive resin composition of the present invention may contain a resin (A1). As the resin (A1),
Resin (A1-1): a copolymer obtained by polymerizing (a) and (c),
Resin (A1-2): a resin obtained by reacting (b) with a copolymer obtained by polymerizing (a) and (c),
Resin (A1-3): Resin obtained by reacting (a) with a copolymer obtained by polymerizing (b) and (c).

In resin (A1-1), it is preferable that the ratio of the structural unit derived from each monomer exists in the following ranges with respect to the total number of moles of all structural units constituting the resin (A1-1).
Structural unit derived from (a); 2 to 40 mol% (more preferably 5 to 35 mol%)
Structural unit derived from (c); 60 to 98 mol% (more preferably 65 to 95 mol%)
When the ratio of the structural unit of the resin (A1-1) is in the above range, the storage stability of the photosensitive resin composition, the developability when forming a pattern from the photosensitive resin composition, and the coating obtained There exists a tendency for the solvent resistance of a film | membrane and a pattern to become favorable.
Resin (A1-1) can be manufactured by the same method as resin (A-1).

Resin (A1-2) is a resin obtained by reacting (b) with a copolymer of (a) and (c).
Resin (A1-2) can be manufactured through a two-step process, for example. In this case as well, the method described in the above-mentioned document “Experimental Methods for Polymer Synthesis” (Takayuki Otsu Publishing Co., Ltd., Chemical Dojin Co., Ltd., 1st edition, 1st edition, published on March 1, 1972), JP-A-2001-2001 It can be produced with reference to the method described in JP 89533.

First, as a first step, a copolymer of (a) and (c) is obtained in the same manner as in the method for producing the resin (A-1) described above.
In this case, in the same manner as described above, the obtained copolymer may be used as it is as the solution after the reaction, or may be a concentrated or diluted solution, or a solid ( You may use what was taken out as a powder. Moreover, it is preferable to set it as the polystyrene conversion weight average molecular weight and molecular weight distribution [weight average molecular weight (Mw) / number average molecular weight (Mn)] similar to the above.
However, it is preferable that the ratio of the structural units derived from (a) and (c) is in the following range with respect to the total number of moles of all structural units constituting the copolymer.
Structural unit derived from (a); 5-50 mol% (more preferably 10-45 mol%)
Structural unit derived from (c); 50 to 95 mol% (more preferably 55 to 90 mol%)

Next, as a second stage, the carboxylic acid (a) and a part of the carboxylic anhydride derived from the obtained copolymer are reacted with the cyclic ether (b) described above. Since (b) used in the resin (A1-2) is preferably (b1) or (b2) because the reactivity of the cyclic ether is high and unreacted (b) hardly remains, (b1-1) Is more preferable.
Specifically, following the above, the atmosphere in the flask was replaced from nitrogen to air, and 5 to 80 mol% (b) of a reaction catalyst of a carboxy group and a cyclic ether with respect to the number of moles of (a) ( For example, tris (dimethylaminomethyl) phenol) is 0.001 to 5% by mass with respect to the total amount of (a), (b) and (c), and a polymerization inhibitor (such as hydroquinone) is (a), 0.001-5 mass% is put in a flask with respect to the total amount of (b) and (c), and it is made to react at 60-130 degreeC for 1 to 10 hours, and resin (A1-2) is obtained. it can. In addition, like the polymerization conditions, the charging method and the reaction temperature can be appropriately adjusted in consideration of the production equipment, the amount of heat generated by the polymerization, and the like.
In this case, the number of moles of (b) is preferably 10 to 75 mole%, more preferably 15 to 70 mole%, with respect to the number of moles of (a). By setting this range, the storage stability of the photosensitive resin composition, the developability when forming a pattern from the photosensitive resin composition, and the solvent resistance, heat resistance, and mechanical strength of the resulting coating film and pattern are obtained. And the balance of sensitivity tends to be good.

Resin (A1-3) obtains a copolymer of (b) and (c) in the same manner as in the production method of resin (A-1) described above as the first step.
In this case, in the same manner as described above, the obtained copolymer may be used as it is as the solution after the reaction, or may be a concentrated or diluted solution, or a solid ( You may use what was taken out as a powder.
The ratio of the structural units derived from (b) and (c) is preferably in the following range with respect to the total number of moles of all the structural units constituting the copolymer.
Structural unit derived from (b); 5-95 mol% (more preferably 10-90 mol%)
Structural unit derived from (c); 5-95 mol% (more preferably 10-90 mol%)

Furthermore, in the same manner as in the production method of the resin (A1-2), the cyclic ether derived from (b) in the copolymer of (b) and (c) is added to the carboxylic acid or carboxylic acid that (a) has. It can be obtained by reacting an anhydride. A carboxylic acid anhydride may be further reacted with a hydroxy group generated by the reaction of a cyclic ether with a carboxylic acid or a carboxylic acid anhydride.
The amount of (a) used to react with the copolymer is preferably 5 to 80 mol% with respect to the number of moles of (b). Since the reactivity of the cyclic ether is high and unreacted (b) hardly remains, (b1) is preferable as (b), and (b1-1) is more preferable.

  The polystyrene equivalent weight average molecular weight of the resin (A1) is preferably 3,000 to 100,000, more preferably 5,000 to 50,000. When the weight average molecular weight of the resin (A) is in the above range, the coating property tends to be excellent, the film thickness of the exposed portion is hardly generated during development, and the non-exposed portion is easily removed by development.

  The molecular weight distribution [weight average molecular weight (Mw) / number average molecular weight (Mn)] of the resin (A1) is preferably 1.1 to 6.0, and more preferably 1.2 to 4.0. When the molecular weight distribution is in the above range, the developability tends to be excellent.

  The acid value of the resin (A1) is 20 to 150 mgKOH / g, preferably 40 to 135 mgKOH / g, more preferably 50 to 135 mgKOH / g.

  Content of resin (A1) becomes like this. Preferably it is 0-80 mass% with respect to the total amount of resin (A) and resin (A1), More preferably, it is 0-50 mass%. When content of resin (A1) exists in the said range, a pattern can be formed with high sensitivity and it is excellent in developability.

The photosensitive resin composition of the present invention contains a polymerizable compound (C).
The polymerizable compound (C) is a compound that can be polymerized by active radicals generated from the polymerization initiator (D), and is, for example, a compound having an ethylenically unsaturated bond, preferably a (meth) acrylic ester. A compound.

  Examples of the polymerizable compound (C) having one ethylenically unsaturated bond include the same compounds as those described above as (a), (b) and (c), and among them, (meth) acrylic acid esters Is preferred.

  Examples of the polymerizable compound (C) having two ethylenically unsaturated bonds include 1,3-butanediol di (meth) acrylate, 1,3-butanediol (meth) acrylate, and 1,6-hexanediol di (meta). ) Acrylate, ethylene glycol di (meth) acrylate, diethylene glycol di (meth) acrylate, neopentyl glycol di (meth) acrylate, triethylene glycol di (meth) acrylate, tetraethylene glycol di (meth) acrylate, polyethylene glycol diacrylate, Bis (acryloyloxyethyl) ether of bisphenol A, ethoxylated bisphenol A di (meth) acrylate, propoxylated neopentyl glycol di (meth) acrylate, ethoxylated neopentyl glycol di (me ) Acrylate, 3-methyl-pentanediol di (meth) acrylate.

  Examples of the polymerizable compound (C) having three or more ethylenically unsaturated bonds include trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, and tris (2-hydroxyethyl) isocyanurate tri (meth) acrylate. , Ethoxylated trimethylolpropane tri (meth) acrylate, propoxylated trimethylolpropane tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, tri Pentaerythritol tetra (meth) acrylate, tripentaerythritol penta (meth) acrylate, tripentaerythritol hexa (meth) acrylate, tripentaery Ritol hepta (meth) acrylate, tripentaerythritol octa (meth) acrylate, reaction product of pentaerythritol tri (meth) acrylate and acid anhydride, reaction product of dipentaerythritol penta (meth) acrylate and acid anhydride, tripenta Erythritol hepta (meth) acrylate and acid anhydride caprolactone modified trimethylolpropane tri (meth) acrylate, caprolactone modified pentaerythritol tri (meth) acrylate, caprolactone modified tris (2-hydroxyethyl) isocyanurate tri (meth) acrylate, caprolactone modified Pentaerythritol tetra (meth) acrylate, caprolactone-modified dipentaerythritol penta (meth) acrylate, caprolactone-modified dipenta Lithritol hexa (meth) acrylate, caprolactone modified tripentaerythritol tetra (meth) acrylate, caprolactone modified tripentaerythritol penta (meth) acrylate, caprolactone modified tripentaerythritol hexa (meth) acrylate, caprolactone modified tripentaerythritol hepta (meth) Acrylate, caprolactone-modified tripentaerythritol octa (meth) acrylate, reaction product of caprolactone-modified pentaerythritol tri (meth) acrylate and acid anhydride, reaction product of caprolactone-modified dipentaerythritol penta (meth) acrylate and acid anhydride, Examples include caprolactone-modified tripentaerythritol hepta (meth) acrylate and acid anhydrides. Among these, a tri- or higher functional photopolymerizable compound (C) is preferable, and dipentaerythritol hexa (meth) acrylate is more preferable.

  The content of the polymerizable compound (C) is preferably 5 to 95% by mass, more preferably 20 to 80% by mass, based on the total amount of the resin (A), the resin (A1) and the polymerizable compound (C). It is. When the content of the polymerizable compound (C) is in the above range, the sensitivity, the strength of the pattern obtained, smoothness, and reliability tend to be good.

The photosensitive resin composition of the present invention contains a polymerization initiator (D). As a polymerization initiator (D), if it is a compound which can start superposition | polymerization by the effect | action of light or a heat | fever, it will not specifically limit, A well-known polymerization initiator can be used.
Examples of the polymerization initiator (D) include alkylphenone compounds, biimidazole compounds, triazine compounds, acylphosphine oxide compounds, and oxime compounds. Moreover, you may use the light and / or thermal cationic polymerization initiator (For example, what is comprised from the onium cation and the anion derived from a Lewis acid) described in Unexamined-Japanese-Patent No. 2008-181087. Especially, it is preferable that it is at least 1 sort (s) chosen from the group which consists of a biimidazole compound, an alkylphenone compound, and an oxime ester compound, and it is especially preferable that it is an oxime ester compound. A polymerization initiator containing these compounds is particularly preferred because it tends to be highly sensitive.

  Examples of the alkylphenone compound include diethoxyacetophenone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, benzyldimethyl ketal, 2-hydroxy-1- [4- (2-hydroxyethoxy) phenyl]. 2-methylpropan-1-one, 2-hydroxy-1- {4- [4- (2-hydroxy-2-methyl-propionyl) -benzyl] -phenyl} -2-methyl-propan-1-one, 1-hydroxycyclohexyl phenyl ketone, 2-morpholino-1- (4-methylsulfanylphenyl) -2-methylpropan-1-one, 2-dimethylamino-2-benzyl-1- (4-morpholinophenyl) butane-1 -One, 2-dimethylamino-2- (2-methylbenzyl) -1- (4-morpholinophenyl) Butan-1-one, 2-dimethylamino-2- (3-methylbenzyl) -1- (4-morpholinophenyl) butan-1-one, 2-dimethylamino-2- (4-methylbenzyl) -1- (4-morpholinophenyl) butan-1-one, 2-dimethylamino-2- (2-ethylbenzyl) -1- (4-morpholinophenyl) butan-1-one, 2-dimethylamino-2- (2- Propylbenzyl) -1- (4-morpholinophenyl) butan-1-one, 2-dimethylamino-2- (2-butylbenzyl) -1- (4-morpholinophenyl) butan-1-one, 2-dimethylamino -2- (2,3-dimethylbenzyl) -1- (4-morpholinophenyl) butan-1-one, 2-dimethylamino-2- (2,4-dimethylbenzyl) -1- (4 Morpholinophenyl) butan-1-one, 2-dimethylamino-2- (2-chlorobenzyl) -1- (4-morpholinophenyl) butan-1-one, 2-dimethylamino-2- (2-bromobenzyl) -1- (4-morpholinophenyl) butan-1-one, 2-dimethylamino-2- (3-chlorobenzyl) -1- (4-morpholinophenyl) butan-1-one, 2-dimethylamino-2- (4-chlorobenzyl) -1- (4-morpholinophenyl) butan-1-one, 2-dimethylamino-2- (3-bromobenzyl) -1- (4-morpholinophenyl) butan-1-one, 2 -Dimethylamino-2- (4-bromobenzyl) -1- (4-morpholinophenyl) butan-1-one, 2-dimethylamino-2- (2-methoxybenzyl) -1 -(4-morpholinophenyl) butan-1-one, 2-dimethylamino-2- (3-methoxybenzyl) -1- (4-morpholinophenyl) butan-1-one, 2-dimethylamino-2- (4 -Methoxybenzyl) -1- (4-morpholinophenyl) butan-1-one, 2-dimethylamino-2- (2-methyl-4-methoxybenzyl) -1- (4-morpholinophenyl) butan-1-one 2-dimethylamino-2- (2-methyl-4-bromobenzyl) -1- (4-morpholinophenyl) butan-1-one, 2-dimethylamino-2- (2-bromo-4-methoxybenzyl) Oligomers of -1- (4-morpholinophenyl) butan-1-one and 2-hydroxy-2-methyl-1- [4- (1-methylvinyl) phenyl] propan-1-one Etc. The.

  Examples of the biimidazole compound include 2,2′-bis (2-chlorophenyl) -4,4 ′, 5,5′-tetraphenylbiimidazole and 2,2′-bis (2,3-dichlorophenyl) -4. , 4 ′, 5,5′-tetraphenylbiimidazole (see, for example, JP-A-6-75372 and JP-A-6-75373), 2,2′-bis (2-chlorophenyl) -4, 4 ′, 5,5′-tetraphenylbiimidazole, 2,2′-bis (2-chlorophenyl) -4,4 ′, 5,5′-tetra (alkoxyphenyl) biimidazole, 2,2′-bis ( 2-chlorophenyl) -4,4 ′, 5,5′-tetra (dialkoxyphenyl) biimidazole, 2,2′-bis (2-chlorophenyl) -4,4 ′, 5,5′-tetra (trialkoxy) Phenyl) biimidazole (for example, see JP-B-48-38403, JP-A-62-174204, etc.), and the phenyl group at the 4,4′5,5′-position is substituted with a carboalkoxy group. Examples thereof include imidazole compounds (for example, see JP-A-7-10913). Preferably, 2,2′-bis (2-chlorophenyl) -4,4 ′, 5,5′-tetraphenylbiimidazole, 2,2′-bis (2,3-dichlorophenyl) -4,4 ′, 5 Examples include 5'-tetraphenylbiimidazole and 2,2'-bis (2,4-dichlorophenyl) -4,4 ', 5,5'-tetraphenylbiimidazole.

  Examples of the triazine compound include 2,4-bis (trichloromethyl) -6- (4-methoxyphenyl) -1,3,5-triazine, 2,4-bis (trichloromethyl) -6- (4-methoxy Naphthyl) -1,3,5-triazine, 2,4-bis (trichloromethyl) -6-piperonyl-1,3,5-triazine, 2,4-bis (trichloromethyl) -6- (4-methoxystyryl) ) -1,3,5-triazine, 2,4-bis (trichloromethyl) -6- [2- (5-methylfuran-2-yl) ethenyl] -1,3,5-triazine, 2,4- Bis (trichloromethyl) -6- [2- (furan-2-yl) ethenyl] -1,3,5-triazine, 2,4-bis (trichloromethyl) -6- [2- (4-diethylamino-2) -Methylphenyl) Sulfonyl] -1,3,5-triazine, 2,4-bis (trichloromethyl) -6- [2- (3,4-dimethoxyphenyl) ethenyl] -1,3,5-triazine.

  Examples of the acylphosphine oxide compound include 2,4,6-trimethylbenzoyldiphenylphosphine oxide.

  Examples of the oxime ester compound include N-benzoyloxy-1- (4-phenylsulfanylphenyl) butan-1-one-2-imine, N-ethoxycarbonyloxy-1-phenylpropane-1-one-2-imine N-benzoyloxy-1- (4-phenylsulfanylphenyl) octane-1-one-2-imine, N-acetoxy-1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazole-3 -Yl] ethane-1-imine, N-acetoxy-1- [9-ethyl-6- {2-methyl-4- (3,3-dimethyl-2,4-dioxacyclopentanylmethyloxy) benzoyl} -9H-carbazol-3-yl] ethane-1-imine and the like. Commercial products such as Irgacure (registered trademark) OXE-01, OXE-02 (manufactured by Ciba Japan), N-1919 (manufactured by ADEKA) may be used.

  Furthermore, as the polymerization initiator (D), benzoin compounds such as benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin isobutyl ether; benzophenone, methyl o-benzoylbenzoate, 4-phenylbenzophenone, 4-benzoyl Benzophenone compounds such as -4'-methyldiphenyl sulfide, 3,3 ', 4,4'-tetra (tert-butylperoxycarbonyl) benzophenone, 2,4,6-trimethylbenzophenone; 9,10-phenanthrene Examples include quinone compounds such as quinone, 2-ethylanthraquinone and camphorquinone; 10-butyl-2-chloroacridone, benzyl, methyl phenylglyoxylate, titanocene compounds and the like. These are preferably used in combination with a polymerization initiation assistant (D1) described later.

In addition, as a polymerization initiator having a group capable of causing chain transfer, a photopolymerization initiator described in JP-T-2002-544205 may be used.
Examples of the polymerization initiator having a group capable of causing the chain transfer include compounds represented by the following formulas (a) to (f).

  The polymerization initiator having a group capable of causing chain transfer can be used as the component (c) constituting the resin (A).

  In the photosensitive resin composition of the present invention, a polymerization initiation assistant (D1) can be used together with the polymerization initiator (D) described above. The polymerization initiation assistant (D1) is used in combination with the polymerization initiator (D), and is a compound or sensitizer used for accelerating the polymerization of a polymerizable compound whose polymerization has been initiated by the polymerization initiator. . Examples of the polymerization initiation aid (D1) include compounds represented by the following formulas (III) to (V), thioxanthone compounds, amine compounds, and carboxylic acid compounds.

［式（ＩＩＩ）中、環Ｗ^１で示される点線はハロゲン原子で置換されていてもよい炭素数６〜１２の芳香環を表す。
Ｙ^１は、−Ｏ−又は−Ｓ−を表す。
Ｒ^４は、炭素数１〜６の１価の飽和炭化水素基を表す。
Ｒ^５は、ハロゲン原子で置換されていてもよい炭素数１〜１２の１価の飽和炭化水素基またはハロゲン原子で置換されていてもよい炭素数６〜１２のアリール基を表す。］

[In the formula (III), the dashed line indicated by the ring W ¹ represents an aromatic ring having 6 to 12 carbon atoms which may be substituted with a halogen atom.
Y ¹ represents —O— or —S—.
R ⁴ represents a monovalent saturated hydrocarbon group having 1 to 6 carbon atoms.
R ⁵ represents a monovalent saturated hydrocarbon group having 1 to 12 carbon atoms which may be substituted with a halogen atom or an aryl group having 6 to 12 carbon atoms which may be substituted with a halogen atom. ]

Examples of the halogen atom include a fluorine atom, a chlorine atom, and a bromine atom.
Examples of the aromatic ring having 6 to 12 carbon atoms include a benzene ring and a naphthalene ring.

  Examples of the aromatic ring having 6 to 12 carbon atoms that may be substituted with a halogen atom include a benzene ring, a methylbenzene ring, a dimethylbenzene ring, an ethylbenzene ring, a propylbenzene ring, a butylbenzene ring, a pentylbenzene ring, and a hexylbenzene. Ring, cyclohexylbenzene ring, chlorobenzene ring, dichlorobenzene ring, bromobenzene ring, dibromobenzene ring, phenylbenzene ring, chlorophenylbenzene ring, bromophenylbenzene ring, naphthalene ring, chloronaphthalene ring, bromonaphthalene ring, and the like.

  Examples of the monovalent saturated hydrocarbon group having 1 to 6 carbon atoms include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, 1-methylpropyl group, 2-methylpropyl group, tert. -Butyl group, n-pentyl group, 1-methylbutyl group, 2-methylbutyl group, 3-methylbutyl group, 1,1-dimethylpropyl group, 1,2-dimethylpropyl group, 2,2-dimethylpropyl group, n- A hexyl group, a cyclohexyl group, etc. are mentioned.

Examples of the monovalent saturated hydrocarbon group having 1 to 12 carbon atoms which may be substituted with a halogen atom include, for example, a heptyl group and an octyl group in addition to the monovalent saturated hydrocarbon group having 1 to 6 carbon atoms. , Nonyl group, decyl group, undecyl group, dodecyl group, 1-chlorobutyl group, 2-chlorobutyl group, 3-chlorobutyl group and the like.

  Examples of the aryl group having 6 to 12 carbon atoms which may be substituted with a halogen atom include phenyl group, chlorophenyl group, dichlorophenyl group, bromophenyl group, dibromophenyl group, chlorobromophenyl group, biphenyl group, chlorobiphenyl group, dichloro Biphenyl group, bromophenyl group, dibromophenyl group, naphthyl group, chloronaphthyl group, dichloronaphthyl group, bromonaphthyl group, dibromonaphthyl group and the like can be mentioned.

As the compound represented by the formula (III), specifically,
2- [2-oxo-2- (2-phenyl) ethylidene] -3-methylnaphtho [2,1-d] thiazoline, 2- [2-oxo-2- (2-phenyl) ethylidene] -3-methylnaphtho [ 1,2-d] thiazoline, 2- [2-oxo-2- (2-phenyl) ethylidene] -3-methylnaphtho [2,3-d] thiazoline, 2- [2-oxo-2- (2-naphthyl) ) Ethylidene] -3-methylbenzothiazoline, 2- [2-oxo-2- (1-naphthyl) ethylidene] -3-methylbenzothiazoline, 2- [2-oxo-2- (2-naphthyl) ethylidene]- 3-methyl-5-phenylbenzothiazoline, 2- [2-oxo-2- (1-naphthyl) ethylidene] -3-methyl-5-phenylbenzothiazoline, 2- [2-oxo-2- (2-naphthyl) Ethylidene] -3-methyl-5-fluorobenzothiazoline, 2- [2-oxo-2- (1-naphthyl) ethylidene] -3-methyl-5-fluorobenzothiazoline, 2- [2-oxo-2- ( 2-naphthyl) ethylidene] -3-methyl-5-chlorobenzothiazoline, 2- [2-oxo-2- (1-naphthyl) ethylidene] -3-methyl-5-chlorobenzothiazoline, 2- [2-oxo 2- (2-naphthyl) ethylidene] -3-methyl-5-bromobenzothiazoline, 2- [2-oxo-2- (1-naphthyl) ethylidene] -3-methyl-5-bromobenzothiazoline, 2- [2-oxo-2- (4-phenylphenyl) ethylidene] -3-methylbenzothiazoline, 2- [2-oxo-2- (4-phenylphenyl) ethylidene] 3-methyl-5-phenylbenzothiazoline, 2- [2-oxo-2- (2-naphthyl) ethylidene] -3-methylnaphtho [2,1-d] thiazoline, 2- [2-oxo-2- (2 -Naphthyl) ethylidene] -3-methylnaphtho [1,2-d] thiazoline, 2- [2-oxo-2- (4-phenylphenyl) ethylidene] -3-methylnaphtho [2,1-d] thiazoline, 2- [2-oxo-2- (4-phenylphenyl) ethylidene] -3-methylnaphtho [1,2-d] thiazoline, 2- [2-oxo-2- (4-fluorophenyl) ethylidene] -3-methylnaphtho [ 2,1-d] thiazoline, 2- [2-oxo-2- (4-fluorophenyl) ethylidene] -3-methylnaphtho [1,2-d] thiazoline, 2- [2-oxo-2- (2- Phenyl) ethylidene] -3-methylnaphtho [2,1-d] oxazoline, 2- [2-oxo-2- (2-phenyl) ethylidene] -3-methylnaphtho [1,2-d] oxazoline, 2- [2 -Oxo-2- (2-phenyl) ethylidene] -3-methylnaphtho [2,3-d] oxazoline, 2- [2-oxo-2- (2-naphthyl) ethylidene] -3-methylbenzoxazoline, 2- [2-oxo-2- (1-naphthyl) ethylidene] -3-methylbenzoxazoline, 2- [2-oxo-2- (2-naphthyl) ethylidene] -3-methyl-5-phenylbenzoxazoline, 2- [2-oxo-2- (1-naphthyl) ethylidene] -3-methyl-5-phenylbenzoxazoline, 2- [2-oxo-2- (2-naphthyl) ethylidene] 3-methyl-5-fluorobenzoxazoline, 2- [2-oxo-2- (1-naphthyl) ethylidene] -3-methyl-5-fluorobenzoxazoline, 2- [2-oxo-2- (2-naphthyl) ) Ethylidene] -3-methyl-5-chlorobenzoxazoline, 2- [2-oxo-2- (1-naphthyl) ethylidene] -3-methyl-5-chlorobenzoxazoline, 2- [2-oxo-2- (2-naphthyl) ethylidene] -3-methyl-5-bromobenzoxazoline, 2- [2-oxo-2- (1-naphthyl) ethylidene] -3-methyl-5-bromobenzoxazoline, 2- [2- Oxo-2- (4-phenylphenyl) ethylidene] -3-methylbenzoxazoline, 2- [2-oxo-2- (4-phenylphenyl) ethylidene] 3-methyl-5-phenylbenzoxazoline, 2- [2-oxo-2- (1-naphthyl) ethylidene] -3-methylnaphtho [2,1-d] oxazoline, 2- [2-oxo-2- (1) -Naphthyl) ethylidene] -3-methylnaphtho [1,2-d] oxazoline, 2- [2-oxo-2- (4-phenylphenyl) ethylidene] -3-methylnaphtho [2,1-d] oxazoline, 2- [2-oxo-2- (4-phenylphenyl) ethylidene] -3-methylnaphtho [1,2-d] oxazoline, 2- [2-oxo-2- (4-fluorophenyl) ethylidene] -3-methylnaphtho [ 2,1-d] oxazoline, 2- [2-oxo-2- (4-fluorophenyl) ethylidene] -3-methylnaphtho [1,2-d] oxazoline, and the like.

[In Formula (IV) and Formula (V), Rings W ² , W ³ and Ring W ⁴ each independently represent an aromatic ring having 6 to 12 carbon atoms or a heterocyclic ring having 2 to 10 carbon atoms, The hydrogen atom contained in the ring and the heterocyclic ring may be substituted with a halogen atom. Y ^{2 to} Y ⁵ each independently represent —O— or —S—. R ^{6 to} R ⁹ represent a monovalent saturated hydrocarbon group having 1 to 12 carbon atoms or an aryl group having 6 to 12 carbon atoms, and the hydrogen atom contained in the saturated hydrocarbon group and the aryl group is a halogen atom. , May be substituted with a hydroxy group or an alkoxy group having 1 to 6 carbon atoms. ]

Examples of the aromatic ring having 6 to 12 carbon atoms include the same aromatic rings as those mentioned in formula (III), and the hydrogen atom contained in the aromatic ring is optionally substituted with the halogen atoms mentioned above. May be.
Examples of the heterocyclic ring having 2 to 10 carbon atoms that may be substituted with a halogen atom include a pyridine ring, a pyrimidine ring, a pyridazine ring, a pyrazine ring, and a pyran ring.

Examples of the monovalent hydroxy group-substituted saturated hydrocarbon group include a hydroxymethyl group, a hydroxyethyl group, a hydroxypropyl group, and a hydroxybutyl group.
Examples of the hydroxy group-substituted aryl group include a hydroxyphenyl group and a hydroxynaphthyl group.
Examples of the monovalent alkoxy group-substituted saturated hydrocarbon group include a methoxymethyl group, a methoxyethyl group, a methoxypropyl group, a methoxybutyl group, a butoxymethyl group, an ethoxyethyl group, an ethoxypropyl group, and a propoxybutyl group.
Examples of the alkoxy group-substituted aryl group include a methoxyphenyl group and an ethoxynaphthyl group.

Specific examples of the compounds represented by formula (IV) and formula (V) include
Dialkoxynaphthalenes such as dimethoxynaphthalene, diethoxynaphthalene, dipropoxynaphthalene, diisopropoxynaphthalene, dibutoxynaphthalene;
9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene, 2-ethyl-9,10-diethoxyanthracene, dipropoxyanthracene, diisopropoxyanthracene, dibutoxyanthracene , Dipentyloxyanthracene, dihexyloxyanthracene, methoxyethoxyanthracene, methoxypropoxyanthracene, methoxyisopropoxyanthracene, methoxybutoxyanthracene, ethoxypropoxyanthracene, ethoxyisopropoxyanthracene, ethoxybutoxyanthracene, propoxyisopropoxyanthracene, propoxybutoxyanthracene, propoxybutoxyanthracene Dialkoxyanthracenes such as butoxyanthracene;
Dialkoxynaphthacenes such as dimethoxynaphthacene, diethoxynaphthacene, dipropoxynaphthacene, diisopropoxynaphthacene, dibutoxynaphthacene;
Etc.

  Examples of the thioxanthone compound include 2-isopropylthioxanthone, 4-isopropylthioxanthone, 2,4-diethylthioxanthone, 2,4-dichlorothioxanthone, 1-chloro-4-propoxythioxanthone, and the like.

  Examples of amine compounds include aliphatic amine compounds such as triethanolamine, methyldiethanolamine, triisopropanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, isoamyl 4-dimethylaminobenzoate, 4-dimethylamino. Of 2-ethylhexyl benzoate, 2-dimethylaminoethyl benzoate, N, N-dimethylparatoluidine, 4,4′-bis (dimethylamino) benzophenone (common name; Michler's ketone), 4,4′-bis (diethylamino) benzophenone Such aromatic amine compounds are mentioned.

  Carboxylic acid compounds include phenylsulfanyl acetic acid, methylphenylsulfanyl acetic acid, ethylphenylsulfanyl acetic acid, methylethylphenylsulfanyl acetic acid, dimethylphenylsulfanyl acetic acid, methoxyphenylsulfanyl acetic acid, dimethoxyphenylsulfanyl acetic acid, chlorophenylsulfanyl acetic acid, dichlorophenylsulfanyl acetic acid, N -Aromatic heteroacetic acids such as phenylglycine, phenoxyacetic acid, naphthylthioacetic acid, N-naphthylglycine and naphthoxyacetic acid.

  Examples of the combination of the polymerization initiator (D) and the polymerization initiation assistant (D1) include an acetophenone compound and a thioxanthone compound, and an acetophenone compound and an aromatic amine compound. Specifically, 2-morpholino-1- (4 -Methylsulfanylphenyl) -2-methylpropan-1-one and 2,4-diethylthioxanthone, 2-dimethylamino-2-benzyl-1- (4-morpholinophenyl) butan-1-one and 2,4-diethyl Thioxanthone, 2-dimethylamino-2- (4-methylbenzyl) -1- (4-morpholinophenyl) butan-1-one and 2,4-diethylthioxanthone, 2-morpholino-1- (4-methylsulfanylphenyl) 2-methylpropan-1-one, 2-isopropylthioxanthone and 4-isopropylthioxone N, 2-morpholino-1- (4-methylsulfanylphenyl) -2-methylpropan-1-one and 4,4′-bis (diethylamino) benzophenone, 2-dimethylamino-2-benzyl-1- (4- Morpholinophenyl) butan-1-one and 4,4′-bis (diethylamino) benzophenone, 2-dimethylamino-2- (4-methylbenzyl) -1- (4-morpholinophenyl) butan-1-one and 4, 4′-bis (diethylamino) benzophenone and the like can be mentioned.

  Among them, a combination of an acetophenone compound and a thioxanthone compound is preferable, and 2-morpholin-1- (4-methylsulfanylphenyl) -2-methylpropan-1-one, 2,4-diethylthioxanthone, 2-morpholino-1- ( 4-methylsulfanylphenyl) -2-methylpropan-1-one, 2-isopropylthioxanthone and 4-isopropylthioxanthone are more preferred. With these combinations, a pattern with high sensitivity and high visible light transmittance can be obtained.

  The content of the polymerization initiator (D) is preferably 0.5 to 30 parts by mass, more preferably 100 parts by mass of the total amount of the resin (A), the resin (A1) and the polymerizable compound (C). It is 1-20 mass parts, More preferably, it is 1-10 mass parts. When the content of the polymerization initiator (D) is in the above range, a pattern can be obtained with high sensitivity.

  The amount of the polymerization initiation assistant (D1) used is preferably 0.1 to 10 parts by mass, more preferably 100 parts by mass of the total amount of the resin (A), the resin (A1) and the polymerizable compound (C). Is 0.3 to 7 parts by mass. When the amount of the polymerization initiation assistant (D1) is in the above range, a pattern can be obtained with high sensitivity, and the resulting pattern has a good shape.

The photosensitive resin composition of the present invention contains a solvent (E).
Examples of the solvent that can be used in the present invention include an ester solvent (a solvent containing —COO— in the molecule and not containing —O—), an ether solvent (containing —O— in the molecule, and —COO—). Solvent), ether ester solvent (solvent containing -COO- and -O- in the molecule), ketone solvent (solvent containing -CO- in the molecule and not -COO-), alcohol solvent, aromatic It can be selected from hydrocarbon solvents, amide solvents, dimethyl sulfoxide and the like.

  As ester solvents, methyl lactate, ethyl lactate, butyl lactate, methyl 2-hydroxyisobutanoate, ethyl acetate, n-butyl acetate, isobutyl acetate, pentyl formate, isopentyl acetate, butyl propionate, isopropyl butyrate, ethyl butyrate, butyl butyrate Methyl pyruvate, ethyl pyruvate, propyl pyruvate, methyl acetoacetate, ethyl acetoacetate, cyclohexanol acetate, γ-butyrolactone and the like.

  Ether solvents include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether , Propylene glycol monopropyl ether, propylene glycol monobutyl ether, 3-methoxy-1-butanol, 3-methoxy-3-methylbutanol, tetrahydrofuran, tetrahydropyran, 1,4-dioxane, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethyl Glycol methyl ethyl ether, diethylene glycol dipropyl ether, diethylene glycol dibutyl ether, anisole, phenetole, and the like methyl anisole.

  Examples of ether ester solvents include methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, 3-ethoxy Ethyl propionate, methyl 2-methoxypropionate, ethyl 2-methoxypropionate, propyl 2-methoxypropionate, methyl 2-ethoxypropionate, ethyl 2-ethoxypropionate, methyl 2-methoxy-2-methylpropionate, Ethyl 2-ethoxy-2-methylpropionate, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether Acetate, propylene glycol monopropyl ether acetate, ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monoethyl ether acetate, and the like diethylene glycol monobutyl ether acetate.

  Examples of ketone solvents include 4-hydroxy-4-methyl-2-pentanone, acetone, 2-butanone, 2-heptanone, 3-heptanone, 4-heptanone, 4-methyl-2-pentanone, cyclopentanone, cyclohexanone, and isophorone. Etc.

  Examples of the alcohol solvent include methanol, ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol, propylene glycol, and glycerin.

  Examples of the aromatic hydrocarbon solvent include benzene, toluene, xylene, mesitylene and the like.

Examples of the amide solvent include N, N-dimethylformamide, N, N-dimethylacetamide, N-methylpyrrolidone and the like.
These solvents may be used alone or in combination of two or more.

  Among the above-mentioned solvents, an organic solvent having a boiling point at 1 atm of 120 ° C. or higher and 180 ° C. or lower is preferable from the viewpoints of coating properties and drying properties. Of these, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, ethyl 3-ethoxypropionate, diethylene glycol methyl ethyl ether, 3-methoxybutyl acetate, 3-methoxy-1-butanol and the like are preferable. When the solvent (E) is any of these solvents, unevenness during coating can be suppressed and the flatness of the coating film can be improved.

  Content of the solvent (E) in the photosensitive resin composition of this invention becomes like this. Preferably it is 60-95 mass% with respect to the total amount of the photosensitive resin composition, More preferably, it is 70-90 mass%. In other words, the solid content of the photosensitive resin composition is preferably 5 to 40% by mass, and more preferably 10 to 30% by mass. When the content of the solvent (E) is in the above range, the flatness of the film coated with the photosensitive resin composition tends to be high. Here, solid content means the quantity remove | excluding the solvent (E) from the photosensitive resin composition.

  Moreover, the photosensitive resin composition of this invention may contain the polyfunctional thiol compound (T) further. The polyfunctional thiol compound (T) refers to a compound having two or more sulfanyl groups (—SH) in the molecule. In particular, when a compound having two or more sulfanyl groups bonded to a carbon atom derived from an aliphatic hydrocarbon group is used, the sensitivity of the photosensitive resin composition of the present invention tends to increase.

  Specific examples of the polyfunctional thiol compound (T) include hexanedithiol, decanedithiol, 1,4-bis (methylsulfanyl) benzene, butanediol bis (3-sulfanylpropionate), butanediol bis (3- Sulfanyl acetate), ethylene glycol bis (3-sulfanyl acetate), trimethylolpropane tris (3-sulfanyl acetate), butanediol bis (3-sulfanylpropionate), trimethylolpropane tris (3-sulfanylpropionate), Trimethylolpropane tris (3-sulfanyl acetate), pentaerythritol tetrakis (3-sulfanylpropionate), pentaerythritol tetrakis (3-sulfanyl acetate), trishydro Shiechirutorisu (3-sulfanyl propionate), pentaerythritol tetrakis (3-sulfanyl butyrate), 1,4-bis (3-sulfanyl-butyloxy) include butane and the like.

  The content of the polyfunctional thiol compound (T) is preferably 0.1 to 10 parts by mass, more preferably 0.5 to 7 parts by mass with respect to 100 parts by mass of the polymerization initiator (D). When the content of the polyfunctional thiol compound (T) is in the above range, the sensitivity of the photosensitive resin composition is increased and the developability tends to be favorable, which is preferable.

  The photosensitive resin composition of the present invention may contain a surfactant (F) (however, different from the resin (B)). Examples of the surfactant include a silicone surfactant, a fluorine surfactant, a silicone surfactant having a fluorine atom, and the like.

Examples of the silicone surfactant include surfactants having a siloxane bond.
Specifically, Torre Silicone DC3PA, SH7PA, DC11PA, SH21PA, SH28PA, SH29PA, SH29PA, SH30PA, polyether-modified silicone oil SH8400 (trade name: manufactured by Toray Dow Corning Co., Ltd.), KP321, KP322 , KP323, KP324, KP326, KP340, KP341 (manufactured by Shin-Etsu Chemical Co., Ltd.), TSF400, TSF401, TSF410, TSF4300, TSF4440, TSF4445, TSF-4446, TSF4452, TSF4460 (Momentive Performance Materials Japan GK) Manufactured) and the like.

Examples of the fluorosurfactant include surfactants having a fluorocarbon chain.
Specifically, Florinart (registered trademark) FC430, FC431 (manufactured by Sumitomo 3M Co., Ltd.), MegaFac (registered trademark) F142D, F171, F172, F173, F177, F183, R183 (DIC) ), Ftop (registered trademark) EF301, EF303, EF351, EF351, EF352 (manufactured by Mitsubishi Materials Denkasei), Surflon (registered trademark) S381, S382, SC101, SC105 (Asahi Glass) And E5844 (manufactured by Daikin Fine Chemical Laboratory Co., Ltd.).

  Examples of the silicone-based surfactant having a fluorine atom include surfactants having a siloxane bond and a fluorocarbon chain. Specifically, Megafac (registered trademark) R08, BL20, F475, F477, F443 (manufactured by DIC Corporation) and the like can be mentioned. Preferably, MegaFac (registered trademark) F475 is used.

  The content of the surfactant (F) is 0.001 to 0.2% by mass, preferably 0.002 to 0.1% by mass, based on the total amount of the photosensitive resin composition. Below, more preferably 0.01 mass% or more and 0.05 mass% or less. By containing the surfactant in this range, the flatness of the coating film can be improved.

  In the photosensitive resin composition of the present invention, various additives such as fillers, other polymer compounds, adhesion promoters, antioxidants, ultraviolet absorbers, light stabilizers, chain transfer agents, etc., are optionally added. May be included.

  The photosensitive resin composition of the present invention does not substantially contain colorants such as pigments and dyes. That is, in the photosensitive resin composition of the present invention, the content of the colorant relative to the entire composition is, for example, preferably less than 1% by mass, more preferably less than 0.5% by mass.

  The photosensitive resin composition of the present invention preferably has an average transmittance when filling a quartz cell having an optical path length of 1 cm and measuring the transmittance under a measurement wavelength of 400 to 700 nm using a spectrophotometer. Is 70% or more, more preferably 80% or more.

  When the photosensitive resin composition of the present invention is formed into a coating film, the average transmittance of the coating film is preferably 90% or more, and more preferably 95% or more. This average transmittance is measured at a wavelength of 400 to 700 nm using a spectrophotometer on a coating film having a thickness of 3 μm after heat curing (for example, curing at 100 to 250 ° C. for 5 minutes to 3 hours). It is an average value when measured under conditions. Thereby, the coating film excellent in transparency in the visible light region can be provided.

  The photosensitive resin composition of the present invention is applied onto a substrate made of glass, metal, plastic or the like, or a substrate having a color filter, various insulating or conductive films, a drive circuit, etc., and has a desired shape. Patterning can be performed to form a pattern. Further, this pattern may be formed and used as a part of a component such as a display device.

First, the photosensitive resin composition of the present invention is applied on a substrate.
As described above, the coating can be performed using various coating apparatuses such as a spin coater, a slit & spin coater, a slit coater, an ink jet, a roll coater, and a dip coater.

Next, it is preferable to dry or pre-bake to remove volatile components such as a solvent and dry. Thereby, a smooth uncured coating film can be obtained.
The film thickness of the coating film in this case is not particularly limited and can be appropriately adjusted depending on the material to be used, the use, etc.

Further, the obtained uncured coating film is irradiated with light, for example, ultraviolet rays generated from a mercury lamp or a light emitting diode through a photomask for forming a target pattern. The shape of the photomask at this time is not particularly limited, and the shape and size may be selected according to the application of the pattern.
In recent exposure machines, light of less than 350 nm is cut using a filter that cuts this wavelength range, or light near 436 nm, 408 nm, and 365 nm is used using a bandpass filter that extracts these wavelength ranges. It is possible to selectively take out and irradiate substantially parallel rays uniformly over the entire exposed surface. If an apparatus such as a mask aligner or a stepper is used, accurate alignment between the mask and the substrate can be performed at this time.

The exposed pattern is brought into contact with a developer to dissolve a predetermined portion, for example, a non-exposed portion (that is, a non-pixel portion), and development is performed, whereby a target pattern shape can be obtained.
The developing method may be any of a liquid piling method, a dipping method, a spray method, and the like. Further, the substrate may be inclined at an arbitrary angle during development.

The developer used for development is preferably an aqueous solution of a basic compound.
The basic compound may be either an inorganic or organic basic compound.
Specific examples of inorganic basic compounds include sodium hydroxide, potassium hydroxide, disodium hydrogen phosphate, sodium dihydrogen phosphate, diammonium hydrogen phosphate, ammonium dihydrogen phosphate, potassium dihydrogen phosphate, sodium silicate, silicic acid. Examples include potassium, sodium carbonate, potassium carbonate, sodium hydrogen carbonate, potassium hydrogen carbonate, sodium borate, potassium borate, and ammonia.

Examples of organic basic compounds include tetramethylammonium hydroxide, 2-hydroxyethyltrimethylammonium hydroxide, monomethylamine, dimethylamine, trimethylamine, monoethylamine, diethylamine, triethylamine, monoisopropylamine, diisopropylamine, and ethanolamine. Is mentioned.
The concentration of these inorganic and organic basic compounds in the aqueous solution is preferably 0.01 to 10% by mass, more preferably 0.03 to 5% by mass.

The developer may contain a surfactant.
The surfactant may be any of a nonionic surfactant, an anionic surfactant, or a cationic surfactant.
Nonionic surfactants include, for example, polyoxyethylene alkyl ether, polyoxyethylene aryl ether, polyoxyethylene alkyl aryl ether, other polyoxyethylene derivatives, oxyethylene / oxypropylene block copolymers, sorbitan fatty acid esters, polyoxyethylene Examples include ethylene sorbitan fatty acid ester, polyoxyethylene sorbitol fatty acid ester, glycerin fatty acid ester, polyoxyethylene fatty acid ester, and polyoxyethylene alkylamine.

  Examples of the anionic surfactant include higher alcohol sulfates such as sodium lauryl alcohol sulfate and sodium oleyl alcohol sulfate, alkyl sulfates such as sodium lauryl sulfate and ammonium lauryl sulfate, sodium dodecylbenzenesulfonate, and dodecyl sodium sulfate. And alkylaryl sulfonates such as sodium naphthalene sulfonate.

Examples of the cationic surfactant include amine salts or quaternary ammonium salts such as stearylamine hydrochloride and lauryltrimethylammonium chloride.
The concentration of the surfactant in the alkali developer is preferably in the range of 0.01 to 10% by mass, more preferably 0.05 to 8% by mass, and more preferably 0.1 to 5% by mass.

A pattern can be obtained by washing with water after development. Furthermore, you may post-bake as needed. The post-baking is preferably, for example, a temperature range of 150 to 240 ° C. and 10 to 180 minutes.
When exposing an uncured coating film, it is possible to obtain a coating film having no pattern by irradiating the entire surface with light and / or omitting development without using a photomask on which a pattern is formed. it can.

As an example of the display device of the present invention, an organic EL (electroluminescence) display device will be described below.
FIG. 1 is a cross-sectional view schematically showing an enlarged part of a display device 1 which is an example of the display device of the present invention. FIG. 2 is a plan view schematically showing an enlarged part of the display device 1 which is an example of the display device of the present invention. The display device 1 mainly includes a support substrate 2, partition walls 3 that define predetermined sections on the support substrate 2, and a plurality of organic EL elements 4 that are provided in the sections defined by the partition walls 3. Consists of including. The partition 3 corresponds to the inkjet partition of the present invention.

  The partition walls 3 are formed on the support substrate 2 in, for example, a lattice shape or a stripe shape. FIG. 2 shows a display device 1 provided with a grid-like partition wall 3 as one embodiment. In the figure, the area where the partition walls 3 are provided is hatched.

  On the support substrate 2, a plurality of recesses 5 defined by the partition walls 3 and the support substrate 2 are set. The concave portion 5 corresponds to a section defined by the partition wall 3.

  The partition walls 3 in the display device 1 are provided in a lattice shape. Therefore, when viewed from one side in the thickness direction Z of the support substrate 2 (hereinafter sometimes referred to as “in plan view”), the plurality of recesses 5 are arranged in a matrix. That is, the recesses 5 are provided with a predetermined interval in the row direction X and aligned in the column direction Y with a predetermined interval. The shape of each recess 5 in plan view is not particularly limited. For example, the recess 5 is formed in a shape such as a substantially rectangular shape, a substantially oval shape, or an oval shape in plan view. In the present embodiment, a substantially rectangular recess 5 is provided in plan view. In the present specification, the row direction X and the column direction Y mean directions perpendicular to the thickness direction Z of the support substrate and perpendicular to each other.

  In the case where a stripe-shaped partition is provided as another embodiment, the partition is configured by, for example, a plurality of partition members extending in the row direction X being arranged at predetermined intervals in the column direction Y. In this embodiment, a stripe-shaped recess is defined by the stripe-shaped partition wall and the support substrate.

  The partition wall is formed so that the width becomes narrower as the distance from the support substrate increases. For example, when the partition wall extending in the column direction Y is cut along a plane perpendicular to the extending direction (column direction Y), the cross-sectional shape is formed so that the width becomes narrower as the distance from the support substrate increases. . FIG. 1 shows an isosceles trapezoidal partition wall, and when the upper base and the lower base on the support substrate side are compared, the lower base is wider than the upper base. In addition, the cross section of the partition actually formed does not necessarily have a trapezoidal shape, and the straight part and corners of the trapezoidal shape may be rounded.

  It is preferable that the top surface of the partition wall 3 exhibits liquid repellency. Note that the top surface means a plane that is present at a position farthest from the support substrate 2 in the surface of the partition wall 3. Since the top surface of the partition wall 3 exhibits liquid repellency, the ink supplied to the region (recessed portion 5) surrounded by the partition wall 3 is prevented from overflowing to the adjacent region through the top surface of the partition wall 3. Can do.

The organic EL element 4 is provided in a partition (that is, the recess 5) defined by the partition 3. When the grid-like partition 3 in the display device 1 is provided, each organic EL element 4 is provided in each recess 5. That is, the organic EL elements 4 are arranged in a matrix like the concave portions 5 and are arranged on the support substrate 2 with a predetermined interval in the row direction X and with a predetermined interval in the column direction Y. Is provided.
The shape and arrangement of the partition walls 3 are appropriately set according to the specifications of the display device such as the number of pixels and resolution, the ease of manufacturing, and the like. For example, the width of the partition wall 3 in the row direction X or the column direction Y is about 5 μm to 50 μm, the height of the partition wall 3 is about 0.5 μm to 5 μm, and the partition walls 3 adjacent to each other in the row direction X or the column direction Y , That is, the width of the recess 5 in the row direction X or the column direction Y is about 10 μm to 200 μm. The width of the first electrode 6 in the row direction X or the column direction Y is about 10 μm to 200 μm, respectively.
The partition wall 3 can be formed from the photosensitive resin composition of the present invention by the pattern forming method described above.

  In another embodiment, when stripe-shaped partition walls are provided, the organic EL elements 4 are arranged at predetermined intervals in the row direction X in the respective recesses extending in the row direction X.

  The display device 1 is provided with three types of organic EL elements 4. That is, (1) a red organic EL element 4R that emits red light, (2) a green organic EL element 4G that emits green light, and (3) a blue organic EL element 4B that emits blue light are provided.

  The organic EL element 4 is configured by laminating a first electrode, an organic EL layer, and a second electrode in this order from the support substrate side. In the present specification, one or a plurality of layers provided between the first electrode 6 and the second electrode 10 are each referred to as an organic EL layer. The organic EL element 4 includes at least one light emitting layer as an organic EL layer. In addition to the one light emitting layer, the organic EL element may further include an organic EL layer different from the light emitting layer as necessary. For example, a hole injection layer, a hole transport layer, an electron block layer, an electron transport layer, an electron injection layer, and the like are provided as an organic EL layer between the first electrode 6 and the second electrode 10. Two or more light emitting layers may be provided between the first electrode 6 and the second electrode 10.

  The organic EL element 4 includes a first electrode 6 and a second electrode 10 as a pair of electrodes including an anode and a cathode. One of the first electrode 6 and the second electrode 10 is provided as an anode, and the other electrode is provided as a cathode. In the display device 1, the first electrode 6 that functions as an anode, the first organic EL layer 7 that functions as a hole injection layer, the second organic EL layer 9 that functions as a light emitting layer, and the second electrode 10 that functions as a cathode. Are stacked on the support substrate 2 in this order.

  The first electrode 6 is provided for each organic EL element 4. That is, the same number of first electrodes 6 as the organic EL elements 4 are provided on the support substrate 2. The first electrodes 6 are provided corresponding to the arrangement of the organic EL elements 4 and are arranged in a matrix like the organic EL elements 4. In addition, although the partition 3 is formed in a lattice shape mainly in a region excluding the first electrode 6, it is further formed so as to cover the peripheral portion of the first electrode 6 (see FIG. 1).

The first organic EL layer 7 corresponding to the hole injection layer is provided on the first electrode 6 in the recess 5. The first organic EL layer 7 is provided with a different material or film thickness depending on the type of the organic EL element, if necessary. In addition, from a viewpoint of the simplicity of the formation process of the 1st organic EL layer 7, you may form all the 1st organic EL layers 7 with the same material and the same film thickness.
The first organic EL layer 7 supplies ink containing a material to be the first organic EL layer 7 to the region (recessed portion 5) surrounded by the partition walls 3 by an ink jet method, and then drying, heating, and / or light. It is formed by solidifying the ink by irradiation.

  The second organic EL layer 9 functioning as a light emitting layer is provided on the first organic EL layer 7 in the recess 5. As described above, the light emitting layer is provided according to the type of the organic EL element. Therefore, the red light emitting layer 9R is provided in the concave portion 5 where the red organic EL element 4R is provided, the green light emitting layer 9G is provided in the concave portion 5 where the green organic EL element 4G is provided, and the blue light emitting layer 9B is provided by the blue organic EL element 4B. It is provided in the provided recess 5.

  The second electrode 10 is formed on the entire surface in the display region where the organic EL element 4 is provided. That is, the second electrode 10 is formed not only on the second organic EL layer 9 but also on the partition 3 and continuously formed over a plurality of organic EL elements.

  As described above, an organic EL display device can be manufactured by covering a plurality of organic EL elements 4 formed on the support substrate 2 with a sealing layer and a sealing substrate (not shown).

  Since the pattern obtained from the photosensitive resin composition of the present invention has both high heat resistance and liquid repellency, in particular, a color filter, an ITO electrode of a liquid crystal display element, an organic EL display element, and a circuit wiring by an inkjet method. It is useful as a partition wall used for manufacturing a substrate or the like. Further, for example, a photo spacer that forms part of the color filter substrate and / or the array substrate, a patternable overcoat, an interlayer insulating film, a liquid crystal alignment control protrusion, a microlens, a coating layer for adjusting the film thickness, etc. The coating film which is useful as a member for a touch panel and does not have a pattern obtained as described above is useful as an overcoat constituting a part of the color filter substrate and / or the array substrate. The color filter substrate and the array substrate are suitably used for a liquid crystal display device, an organic EL display device, electronic paper, and the like.

  Hereinafter, the present invention will be described in more detail with reference to examples. Unless otherwise specified, “%” and “parts” in the examples are% by mass and parts by mass.

(Synthesis Example 1)
In a flask equipped with a reflux condenser, a dropping funnel and a stirrer, nitrogen was allowed to flow at 0.02 L / min to form a nitrogen atmosphere, and 200 parts by mass of 3-methoxy-1-butanol and 105 parts by mass of 3-methoxybutyl acetate were added. Heat to 70 ° C. with stirring. Next, 60 parts by mass of methacrylic acid, 3,4-epoxytricyclo [5.2.1.0 ^2.6 ] decyl acrylate (a compound represented by the formula (I-1) and a formula (II-1) The compound to be mixed is mixed at a molar ratio of 50:50.) A solution is prepared by dissolving in 240 parts by mass and 140 parts by mass of 3-methoxybutyl acetate, and the solution is added for 4 hours using a dropping funnel. And dropped in a flask kept at 70 ° C.

On the other hand, a solution in which 30 parts by mass of a polymerization initiator 2,2′-azobis (2,4-dimethylvaleronitrile) was dissolved in 225 parts by mass of 3-methoxybutyl acetate was added to a flask over another 4 hours using another dropping funnel. It was dripped in. After completion of the dropwise addition of the polymerization initiator solution, the mixture was kept at 70 ° C. for 4 hours, and then cooled to room temperature. A solution of the polymer (resin Aa) was obtained. The obtained resin Aa had a weight average molecular weight Mw of 1.3 × 10 ⁴ and a molecular weight distribution of 2.50. Resin Aa has the following structural units.

(Synthesis Example 2)
In a flask equipped with a reflux condenser, a dropping funnel and a stirrer, nitrogen was allowed to flow at 0.02 L / min to form a nitrogen atmosphere, and 59 parts by mass of 3-methoxy-1-butanol and 81 parts by mass of 3-methoxybutyl acetate were added. Heat to 70 ° C. with stirring.
Subsequently, 40 parts by mass of methacrylic acid, 3,4-epoxytricyclo [5.2.1.0 ^2.6 ] decyl acrylate (a compound represented by the formula (I-1) and a formula (II-1) 360 parts by weight of the compound to be mixed in a 50:50 molar ratio) was dissolved in 80 parts by weight of 3-methoxy-1-butanol and 110 parts by weight of 3-methoxybutyl acetate to prepare a solution. This solution was dropped into a flask kept at 70 ° C. over 4 hours using a dropping pump.

On the other hand, a solution prepared by dissolving 36 parts by mass of a polymerization initiator 2,2′-azobis (2,4-dimethylvaleronitrile) in 101 parts by mass of 3-methoxy-1-butanol and 139 parts by mass of 3-methoxybutyl acetate, Was dropped into the flask over 5 hours using a dropping pump. After completion of the dropwise addition of the polymerization initiator solution, the mixture was kept at 70 ° C. for 4 hours, and then cooled to room temperature, so that the solid content was 42.5% by mass and the acid value was 56 mg-KOH / g (solid content conversion). A polymer (resin Ab) solution was obtained. The obtained resin Ab had a weight average molecular weight (Mw) of 7.6 × 10 ³ and a molecular weight distribution of 2.01. Resin Ab has the following structural units.

(Synthesis Example 3)
In a four-necked flask equipped with a reflux condenser, a nitrogen inlet, a thermometer and a stirrer, 30 parts of methacrylic acid, 30 parts of 2-hydroxyethyl methacrylate, 40 parts of isobornyl methacrylate, 5.9 of 2-sulfanylethanol And 163 parts of propylene glycol monomethyl ether acetate were heated to 70 ° C. and stirred for 30 minutes under a nitrogen stream. To this, 1.3 parts of azobisisobutyronitrile was added and polymerized for 18 hours. Thereafter, 29.3 parts of 2-isocyanatoethyl acrylate (Karenz AOI; manufactured by Showa Denko KK) was added, 50 ppm of hydroquinone monomethyl ether was added to the total composition, and the mixture was reacted at 45 ° C. for 1 hour under a nitrogen stream. As a result, a solution of a copolymer (resin Ac) having a solid content of 34% by mass was obtained. The weight average molecular weight (Mw) of the obtained resin Ac was 4900. Resin Ac is a copolymer having the following structural units.

(Synthesis Example 4)
In a flask equipped with a reflux condenser, a dropping funnel and a stirrer, nitrogen was allowed to flow at 0.02 L / min to form a nitrogen atmosphere, and 200 parts by mass of 3-methoxy-1-butanol and 105 parts by mass of 3-methoxybutyl acetate were added. Heat to 70 ° C. with stirring. Subsequently, 55 parts by mass of methacrylic acid, 3,4-epoxytricyclo [5.2.1.0 ^2.6 ] decyl acrylate (a compound represented by the formula (I-1) and a formula (II-1) The compound to be prepared is a mixture of 50:50 in a molar ratio.) A solution is prepared by dissolving 175 parts by mass and 70 parts by mass of N-cyclohexylmaleimide in 140 parts by mass of 3-methoxybutyl acetate. It was dripped in the flask kept at 70 degreeC over 4 hours using the dripping pump. On the other hand, a solution obtained by dissolving 30 parts by mass of a polymerization initiator 2,2′-azobis (2,4-dimethylvaleronitrile) in 225 parts by mass of 3-methoxybutyl acetate was added to a flask over another 5 hours using another dropping pump. It was dripped in. After completion of the dropwise addition of the polymerization initiator solution, the mixture was kept at 70 ° C. for 4 hours, and then cooled to room temperature, and the solid content was 32.6% by mass and the acid value was 105 mg-KOH / g (solid content conversion). A polymer (resin Ad) solution was obtained. The obtained resin Ad had a weight average molecular weight (Mw) of 13,600, a number average molecular weight (Mn) of 5,400, and a molecular weight distribution of 2.5. Resin Ad has the following structural units.

(Synthesis Example 5)
Nitrogen was allowed to flow at 0.02 L / min in a flask equipped with a reflux condenser, a dropping funnel and a stirrer to form a nitrogen atmosphere, and 140 parts by mass of diethylene glycol ethyl methyl ether was added and heated to 70 ° C. with stirring. Subsequently, 40 parts by mass of methacrylic acid, 3,4-epoxytricyclo [5.2.1.0 ^2.6 ] decyl acrylate (a compound represented by the formula (I-1) and a formula (II-1) 340 parts by weight of a mixture of the compounds represented by formula (x1) and a mixture of the compounds represented by formula (x2), molar ratio = 50: 50 ) 20 parts by mass was dissolved in 190 parts by mass of diethylene glycol ethyl methyl ether to prepare a solution. The obtained solution was dropped into a flask kept at 70 ° C. for 4 hours using a dropping pump.

On the other hand, a solution prepared by dissolving 30 parts by mass of a polymerization initiator 2,2′-azobis (2,4-dimethylvaleronitrile) in 240 parts by mass of diethylene glycol ethyl methyl ether was added to a flask over another 5 hours using another dropping pump. It was dripped in. After dropping of the polymerization initiator solution was completed, the solution was kept at 70 ° C. for 4 hours and then cooled to room temperature to obtain a copolymer (resin Ae) solution having a solid content of 41.8%. The weight average molecular weight (Mw) of the obtained resin Ae was 9.6 × 10 ³ , the molecular weight distribution (Mw / Mn) was 2.02, and the acid value in terms of solid content was 60 mg-KOH / g. Resin Ae has the following structural units.

(Synthesis Example 6)
Nitrogen was flowed at 0.02 L / min into a 1 L flask equipped with a reflux condenser, a dropping funnel and a stirrer to form a nitrogen atmosphere, and 140 parts by mass of diethylene glycol ethyl methyl ether was added and heated to 70 ° C. with stirring. Subsequently, 40 parts by mass of methacrylic acid, 3,4-epoxytricyclo [5.2.1.0 ^2.6 ] decyl acrylate (a compound represented by the formula (I-1) and a formula (II-1) A mixture of the obtained compounds, molar ratio = 50: 50) 320 parts by mass and dicyclopentanyl acrylate 40 parts by mass were dissolved in 190 parts by mass of diethylene glycol ethyl methyl ether to prepare a solution. The obtained solution was dropped into a flask kept at 70 ° C. for 4 hours using a dropping pump.
On the other hand, a solution prepared by dissolving 30 parts by mass of a polymerization initiator 2,2′-azobis (2,4-dimethylvaleronitrile) in 240 parts by mass of diethylene glycol ethyl methyl ether was added to a flask over another 5 hours using another dropping pump. It was dripped in. After the dropping of the polymerization initiator solution was completed, the solution was kept at 70 ° C. for 4 hours and then cooled to room temperature to obtain a copolymer (resin Af) solution having a solid content of 41.8%. The weight average molecular weight (Mw) of the obtained resin Af was 7.9 × 10 ³ , the molecular weight distribution (Mw / Mn) was 1.82, and the acid value in terms of solid content was 60 mg-KOH / g. Resin Af has the following structural units.

(Synthesis Example 7)
78 parts α-chloroacrylic acid 3,3,4,4,5,5,6,6,6-nonafluorohexyl in a four-necked flask equipped with a reflux condenser, a nitrogen inlet tube, a thermometer and a stirrer , 19.5 parts of methacrylic acid, 19.5 parts of isobornyl methacrylate, 13 parts of glycidyl methacrylate, 12.7 parts of dodecanethiol, 266 parts of propylene glycol monomethyl ether acetate, heated to 70 ° C. and then under nitrogen flow for 30 minutes Stir with. 1 part of azobisisobutyronitrile was added to this and polymerized for 18 hours to obtain a solution of a copolymer (resin Ba) having a solid content of 33% by mass and an acid value of 68 mg-KOH / g (solid content conversion). It was. The obtained resin Ba had a weight average molecular weight of 7,500. Resin Ba has the following structural units.

(Synthesis Example 8)
Α-Chloroacrylic acid 3,3,4,4,5,5,6,6,7,7,8,8 in a four-necked flask equipped with a reflux condenser, nitrogen inlet, thermometer and stirrer , 8-tridecafluorooctyl, 78 parts of methacrylic acid, 19.5 parts of methacrylic acid, 19.5 parts of isobornyl methacrylate, 13 parts of glycidyl methacrylate, 12.7 parts of dodecanethiol, 266 parts of propylene glycol monomethyl ether acetate, 70 ° C. And then stirred for 30 minutes under a nitrogen stream. 1 part of azobisisobutyronitrile was added thereto and polymerized for 18 hours to obtain a solution of a copolymer (resin Bb) having a solid content of 33% by mass and an acid value of 65 mg-KOH / g (in terms of solid content). It was. The obtained resin Bb had a weight average molecular weight of 6,800. Resin Bb has the following structural units.

The weight average molecular weight (Mw) and the number average molecular weight (Mn) of the resins obtained in Synthesis Examples 1 to 8 were measured using the GPC method under the following conditions.
Apparatus; K2479 (manufactured by Shimadzu Corporation)
Column; SHIMADZU Shim-pack GPC-80M
Column temperature: 40 ° C
Solvent; THF (tetrahydrofuran)
Flow rate: 1.0 mL / min
Detector; RI
The polystyrene-converted weight average molecular weight and number average molecular weight ratio (Mw / Mn) obtained above was defined as molecular weight distribution.

(Examples 1-4 and Comparative Example 1)
<Adjustment of photosensitive resin composition>
The components in Table 3 were mixed to obtain photosensitive resin compositions 1-8.

Each component in Table 3 is as follows. The number of parts described in the column of resin (A) and resin (B) represents a mass part in terms of solid content.
Resin (A); Aa: Resin Aa obtained in Synthesis Example 1
Resin (A); Ab: Resin Ab obtained in Synthesis Example 2
Resin (A); Ac: Resin Ac obtained in Synthesis Example 3
Resin (A); Ad: Resin Ad obtained in Synthesis Example 4
Resin (A); Ae: Resin Ae obtained in Synthesis Example 5
Resin (A); Af: Resin Af obtained in Synthesis Example 6
Resin (B); Ba: Resin Ba obtained in Synthesis Example 7
Resin (B); Bb: Resin Bb obtained in Synthesis Example 8
Polymerizable compound (C); Ca: dipentaerythritol hexaacrylate (KAYARAD (registered trademark) DPHA; manufactured by Nippon Kayaku Co., Ltd.)
Polymerizable compound (C); Cb: pentaerythritol tetraacrylate (A-TMMT; manufactured by Shin-Nakamura Chemical Co., Ltd.)
Polymerization initiator (D); Da: N-acetoxy-1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazol-3-yl] ethane-1-imine (Irgacure® OXE02; BASF Japan Co., Ltd.)
Polymerization initiator (D); Db: 2-Hydroxy-1- {4- [4- (2-hydroxy-2-methylpropionyl) -benzyl] phenyl} -2-methylpropan-1-one (Irgacure (registered trademark)) 127; manufactured by BASF Japan Ltd.)
Solvent (E); Ea; Propylene glycol monomethyl ether acetate Solvent (E); Eb; Ethyl 3-ethoxypropionate Solvent (E); Ec; 3-methoxy 1-butanol Solvent (E); Ed; 3-methoxybutyl acetate Solvent (E); Ee; Diethylene glycol methyl ethyl ether The solvent (E) was mixed so that the solid content of the photosensitive resin composition was the “solid content (%)” in Table 3, and the solvent in the solvent (E) The value of component (Ea)-(Ee) represents the mass ratio in a solvent (E).
Other components: Za: Thermal crosslinking agent Cymel 300 (Mitsui Cytec Co., Ltd.)
Other components; Zb; tetrahydrophthalic anhydride (Licacid (registered trademark) TH; manufactured by Shin Nippon Rika Co., Ltd.)

<Average transmittance of composition>
About the photosensitive resin composition obtained above, 400 to 700 nm using an ultraviolet visible near infrared spectrophotometer (V-650; manufactured by JASCO Corporation) (quartz cell, optical path length: 1 cm), respectively. The average transmittance (%) was measured. The results are shown in Table 3.

<Preparation of coating film>
A 2-inch square glass substrate (Eagle XG; manufactured by Corning) was sequentially washed with a neutral detergent, water and alcohol and then dried. On this glass substrate, each of the photosensitive resin compositions 1 to 8 obtained above was spin-coated so that the film thickness after post-baking was 3.0 μm, and a vacuum dryer (manufactured by Microtech Co., Ltd.). ) Under reduced pressure until the degree of vacuum reached 66 kPa, and then prebaked at 80 ° C. for 2 minutes on a hot plate and dried. After cooling, using an exposure machine (TME-150RSK; manufactured by Topcon Corporation, light source: ultrahigh pressure mercury lamp), irradiation was performed with an exposure dose of 50 mJ / cm ² (based on 365 nm) in an air atmosphere. In addition, the irradiation to the photosensitive resin composition at this time used the ultra high pressure mercury lamp. After the light irradiation, the coating film was immersed and shaken for 60 seconds at 23 ° C. in an aqueous developer containing 0.12% nonionic surfactant and 0.04% potassium hydroxide, and then in an oven. The film was obtained by heating (post-baking) at 230 ° C. for 20 minutes.
About the photosensitive resin composition 5, the coating film was obtained by the method similar to the above except changing the exposure amount to 500 mJ / cm < ² > (365 nm reference | standard).

<Average transmittance of coating film>
About the obtained coating film, the average transmittance | permeability (%) in 400-700 nm was measured using the microspectrophotometer (OSP-SP200; OLYMPUS company make). Higher transmittance means less absorption. The results are shown in Table 3.

<Contact angle>
About the obtained coating film, the contact angle of anisole was measured using the contact angle meter (DGD Fast / 60; GBX company make).
A higher contact angle means higher liquid repellency. If the contact angle in a coating film is high, also in the pattern formed using the same photosensitive resin composition, a contact angle is high. When a partition is formed of a photosensitive resin composition having a high contact angle, and ink is printed by an ink jet apparatus inside the partition, the ink is easily repelled. Therefore, for example, when a color filter is manufactured by an inkjet method, ink color mixing between adjacent pixel regions hardly occurs.

<Solvent resistance evaluation>
The obtained coating film was immersed in N-methylpyrrolidone at 40 ° C. for 40 minutes, and the film thickness and transmittance were measured. From the film thickness before and after immersion and the transmittance at 400 nm, the rate of change was determined according to the following equation.
Film thickness change rate (%) = film thickness after immersion (μm) / film thickness before immersion (μm)
Transmittance change rate (%) = transmittance after immersion (%) / transmittance before immersion (%)

Moreover, the adhesiveness test was done about the coating film after immersion. Using a cutter and a super cutter guide (manufactured by Dazai Equipment Co., Ltd.), the coated film was dipped at 1 mm intervals to produce 100 1 mm × 1 mm squares. Next, cello tape (registered trademark) 24 mm width (manufactured by Nichiban Co., Ltd.) is applied to the cuts of the coating film, and the cello tape (registered trademark) is adhered to the coating film by rubbing with an eraser from above the cello tape (registered trademark). After 2 minutes, the edges of the cello tape (registered trademark) were held and peeled off at a stretch while keeping a right angle to the coating surface. Thereafter, the number of cells remaining on the substrate without peeling off the coating film was visually counted. The greater the number of cells remaining on the substrate, the better the adhesion.
If the solvent resistance in the coating film is good, the solvent resistance is good even in a pattern formed using the same photosensitive resin composition. The results are shown in Table 4.

<Heat resistance evaluation>
The obtained coating film was heated at 240 ° C. for 1 hour in a clean oven, and the film thickness and transmittance were measured. From the film thickness before and after heating and the transmittance at 400 nm, the rate of change was determined according to the following equation.
Film thickness change rate (%) = film thickness after heating (μm) / film thickness before heating (μm)
Transmittance change rate (%) = transmittance after heating (%) / transmittance before heating (%)
If the heat resistance in the coating film is good, the heat resistance is good even in a pattern formed using the same photosensitive resin composition. The results are shown in Table 4.

<Pattern formation>
A 2-inch square glass substrate (Eagle XG; manufactured by Corning) was sequentially washed with a neutral detergent, water and alcohol and then dried. On this glass substrate, each of the photosensitive resin compositions 1 to 8 was spin-coated so that the film thickness after post-baking was 3.5 μm, and the degree of vacuum was reduced with a vacuum dryer (manufactured by Microtech Co., Ltd.). After drying under reduced pressure until reaching 66 kPa, it was dried by prebaking at 80 ° C. for 2 minutes on a hot plate. After cooling, the distance between the substrate coated with the photosensitive resin composition and the quartz glass photomask was set to 10 μm, and the exposure apparatus (TME-150RSK; manufactured by Topcon Corporation, light source: ultrahigh pressure mercury lamp) Under an atmosphere, light having an exposure amount of 50 mJ / cm ² (365 nm standard) was irradiated. In addition, irradiation to the photosensitive resin composition at this time was performed by passing the radiated light from the ultra-high pressure mercury lamp through an optical filter (UV-33; manufactured by Asahi Spectroscopic Co., Ltd.). In addition, a photomask having a pattern (having a square light-transmitting portion with one side of 13 μm and a space between the squares of 100 μm) (that is, the light-transmitting portion) formed on the same plane was used as the photomask.
After light irradiation, the coating film is developed by immersing and shaking for 100 seconds at 25 ° C. in an aqueous developer containing 0.12% nonionic surfactant and 0.04% potassium hydroxide. Inside, post-baking was performed at 235 ° C. for 15 minutes to obtain a pattern.
About the photosensitive resin composition 5, the coating film was obtained by the method similar to the above except changing the exposure amount to 500 mJ / cm < ² > (365 nm reference | standard).

<Pattern shape observation>
The shape of the obtained pattern was observed using a scanning electron microscope (S-4000; manufactured by Hitachi, Ltd.). When using a pattern as a partition, it is preferable that it is a forward taper (shape shown by (p1)).

  From the result of an Example, it turns out that the coating film and pattern excellent in heat resistance can be obtained from the photosensitive resin composition of this invention, maintaining a high contact angle.

According to the photosensitive resin composition of the present invention, a pattern having excellent heat resistance can be obtained.

DESCRIPTION OF SYMBOLS 1 Display apparatus 2 Support substrate 3 Partition 4 Organic EL element 5 Recessed part 6 1st electrode 7 1st organic EL layer (hole injection layer)
9 Second organic EL layer (light emitting layer)
10 Second electrode

Claims (6)

A photosensitive resin composition comprising (A), (B), (C), (D) and (E).
(A) a structural unit derived from at least one selected from the group consisting of an unsaturated carboxylic acid and an unsaturated carboxylic acid anhydride, and a structural unit derived from an unsaturated compound having a C2-C4 cyclic ether structure; (However, there is no structural unit derived from an unsaturated compound having a C 4-6 perfluoroalkyl group.)
(B) a polymer containing a structural unit derived from an unsaturated compound having a C 4-6 perfluoroalkyl group (C) a polymerizable compound (D) a polymerization initiator (E) solvent   The photosensitive resin composition according to claim 1, wherein (B) is a copolymer further comprising a structural unit derived from at least one selected from the group consisting of an unsaturated carboxylic acid and an unsaturated carboxylic acid anhydride.   3. The photosensitive resin composition according to claim 1, wherein (C) is a polymerization initiator containing an oxime compound.   The pattern formed with the photosensitive resin composition in any one of Claims 1-3.   The partition for inkjet formed with the photosensitive resin composition in any one of Claims 1-3.   A display device comprising at least one selected from the group consisting of the pattern according to claim 4 and the partition for inkjet according to claim 5.

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