JP2012072027A - Piezoelectric ceramic and piezoelectric element - Google Patents

Piezoelectric ceramic and piezoelectric element Download PDF

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JP2012072027A
JP2012072027A JP2010218725A JP2010218725A JP2012072027A JP 2012072027 A JP2012072027 A JP 2012072027A JP 2010218725 A JP2010218725 A JP 2010218725A JP 2010218725 A JP2010218725 A JP 2010218725A JP 2012072027 A JP2012072027 A JP 2012072027A
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JP5462759B2 (en
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Ryoichi Fukunaga
了一 福永
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Taiheiyo Cement Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a piezoelectric ceramic which is a non-lead system and capable of being fired at a low temperature, has high piezoelectric characteristics and can be variously applicable as a piezoelectric component, and a piezoelectric element using this.SOLUTION: The piezoelectric ceramic includes a perovskite type compound which is represented by Bi(NaK)TiOand has a molar ratio x filling 0.15<x<0.35 as a principal component, and 0.1 wt.% or more and 2.5 wt.% or less of an additive which consists of oxide of each element of manganese, bismuth and zinc relative to the amount of principal component. Thus, by making the so-called bismuth titanate sodium potassium (BNKT) into the principal component, when it is used for an electronic component, it can make its load to the natural environment small since lead is not included. Moreover, since it can be fired with the additive at below 1,100°C, firing integrally with internal electrode becomes possible. Moreover, since piezoelectric characteristics can be made high by the components, it is variously applicable as a piezoelectric component.

Description

本発明は、鉛化合物を含まない、いわゆるチタン酸ビスマスナトリウムカリウム(BNKT)系の圧電セラミックスおよびこれを用いた圧電素子に関する。   The present invention relates to a so-called bismuth sodium potassium titanate (BNKT) type piezoelectric ceramic which does not contain a lead compound and a piezoelectric element using the same.

従来の圧電セラミックスはチタン酸ジルコン酸鉛(PZT)やそれに第3成分を固溶させた鉛系圧電セラミックスが使用されてきた。しかし、PZTに含まれる鉛元素は環境負荷となっているとの認識からこのような鉛系圧電セラミックスは環境規制の対象になりつつある。現在各方面で環境に優しい無鉛圧電材料としてPZTに代替可能な非鉛圧電材料の探索が続けられており、BNKTを主組成とする非鉛圧電セラミックスも開発されている。   As conventional piezoelectric ceramics, lead zirconate titanate (PZT) and lead-based piezoelectric ceramics in which a third component is dissolved are used. However, from the recognition that the lead element contained in PZT is an environmental burden, such lead-based piezoelectric ceramics are becoming subject to environmental regulations. At present, the search for lead-free piezoelectric materials that can replace PZT as environmentally-friendly lead-free piezoelectric materials in various fields is continuing, and lead-free piezoelectric ceramics mainly composed of BNKT have also been developed.

たとえば、特許文献1記載の圧電体セラミックスは、BNT(チタン酸ビスマスナトリウム(Bi0.5Na0.5)TiO)と、BT(チタン酸バリウムBaTiO)と、BKT(チタン酸ビスマスカリウム(Bi0.50.5)TiO)の三成分を含むことで、ノックセンサ素子として好適な非鉛系の圧電体セラミックスを提供しようとしている。特許文献2記載の圧電素子は、(Bi0.5Na0.5)TiOと(Bi0.50.5)TiOとBaTiOの三成分を主成分とし、温度特性の良い非共振型ノッキングセンサを提供しようとしている。また、特許文献3記載の圧電/電歪セラミックスは、一般式xBNT−yBKT−zBT(x+y+z=1)で表される材料で構成され、大きな電界誘起歪を得ようとしている。それぞれの文献には、BiやMn等の添加物が例示されている。 For example, the piezoelectric ceramic described in Patent Document 1 includes BNT (bismuth sodium titanate (Bi 0.5 Na 0.5 ) TiO 3 ), BT (barium titanate BaTiO 3 ), and BKT (bismuth potassium titanate ( By including the three components of Bi 0.5 K 0.5 ) TiO 3 ), it is intended to provide lead-free piezoelectric ceramics suitable as a knock sensor element. The piezoelectric element described in Patent Document 2 has three components of (Bi 0.5 Na 0.5 ) TiO 3 , (Bi 0.5 K 0.5 ) TiO 3 and BaTiO 3 as main components, and has a good temperature characteristic. A resonance type knocking sensor is to be provided. The piezoelectric / electrostrictive ceramic described in Patent Document 3 is made of a material represented by the general formula xBNT-yBKT-zBT (x + y + z = 1), and is attempting to obtain a large electric field induced strain. Each document exemplifies additives such as Bi 2 O 3 and Mn 2 O 3 .

特開2001−151566号公報JP 2001-151666 A 特開2004−93197号公報JP 2004-93197 A 特開2010−150126号公報JP 2010-150126 A

しかしながら、圧電特性の大きな材料として比誘電率εr、電気機械結合係数kr、機械的品質係数Qmのいずれの特性も高いBNKTを主組成とした非鉛圧電材料は得られていない。本発明は、このような事情に鑑みてなされたものであり、非鉛系で低温焼成可能であって、高い圧電特性を有し圧電部品として様々に応用できる圧電セラミックスおよびこれを用いた圧電素子を提供することを目的とする。   However, as a material having a large piezoelectric characteristic, a lead-free piezoelectric material having a main composition of BNKT, which has high specific dielectric constant εr, electromechanical coupling coefficient kr, and mechanical quality coefficient Qm, has not been obtained. The present invention has been made in view of such circumstances, and is a lead-free piezoelectric ceramic that can be fired at low temperature, has high piezoelectric characteristics, and can be applied in various ways as a piezoelectric component, and a piezoelectric element using the same The purpose is to provide.

(1)上記の目的を達成するため、本発明の圧電セラミックスは、Bi0.5(Na1−x0.5TiOで表され、モル比xが0.15<x<0.35を満たすペロブスカイト型化合物を主成分とし、前記主成分に対して、マンガン、ビスマスおよび亜鉛の各元素の酸化物からなる添加物を0.1重量%以上2.5重量%以下含むことを特徴としている。 (1) In order to achieve the above object, the piezoelectric ceramic of the present invention is represented by Bi 0.5 (Na 1-x K x ) 0.5 TiO 3 and the molar ratio x is 0.15 <x <0. The main component is a perovskite compound satisfying .35, and the additive contains 0.1 wt% or more and 2.5 wt% or less of an oxide of each element of manganese, bismuth and zinc. It is a feature.

このように、いわゆるチタン酸ビスマスナトリウムカリウム(BNKT)を主成分とすることにより、鉛を含まないため電子部品に用いた場合に自然環境に対して負荷を小さくすることができる。また、添加物により1100℃以下で焼成できることから内部電極と一体焼成可能となる。また、上記の成分により圧電特性を高くすることができ、圧電部品として様々に応用できる。   Thus, by using so-called potassium potassium bismuth titanate (BNKT) as a main component, it does not contain lead, and therefore, when used in an electronic component, the load on the natural environment can be reduced. In addition, since it can be fired at 1100 ° C. or less with an additive, it can be fired integrally with the internal electrode. In addition, the above-described components can enhance the piezoelectric characteristics, and can be applied in various ways as piezoelectric parts.

(2)また、本発明の圧電セラミックスは、電気機械結合係数が0.14以上、機械的品質係数が185以上で、比誘電率が350以上であることを特徴としている。このように、電気機械結合係数krが比較的大きく、機械的品質係数Qm、比誘電率ε33 /εも大きいことから圧電ブザー、超音波モータ等の広い範囲の製品に応用できる。 (2) Further, the piezoelectric ceramic of the present invention is characterized in that the electromechanical coupling coefficient is 0.14 or more, the mechanical quality coefficient is 185 or more, and the relative dielectric constant is 350 or more. Thus, since the electromechanical coupling coefficient kr is relatively large, the mechanical quality coefficient Qm, and the relative dielectric constant ε 33 T / ε 0 are also large, it can be applied to a wide range of products such as a piezoelectric buzzer and an ultrasonic motor.

(3)また、本発明の圧電素子は、上記の圧電セラミックスからなる圧電層と内部電極とが一体焼成されていることを特徴としている。このような内部電極と一体焼成されている圧電素子は、1100℃以下で焼成でき、内部電極を融解させることなく製造することができる。   (3) Moreover, the piezoelectric element of the present invention is characterized in that the piezoelectric layer made of the piezoelectric ceramic and the internal electrode are integrally fired. Such a piezoelectric element integrally fired with the internal electrode can be fired at 1100 ° C. or less, and can be manufactured without melting the internal electrode.

本発明によれば、非鉛系で低温焼成可能であって、高い圧電特性を有し圧電部品として様々に応用できる圧電セラミックスを実現できる。   According to the present invention, it is possible to realize a piezoelectric ceramic that is non-leaded and can be fired at a low temperature and has high piezoelectric characteristics and can be applied in various ways as a piezoelectric component.

K元素の固溶比に対する圧電特性を示す表である。It is a table | surface which shows the piezoelectric characteristic with respect to the solid solution ratio of K element.

次に、本発明の実施の形態について、図面を参照しながら説明する。   Next, embodiments of the present invention will be described with reference to the drawings.

(母材の組成)
本発明の非鉛系圧電セラミックスは、Bi0.5(Na1−x0.5TiOで表され、モル比xが0.15<x<0.35を満たすペロブスカイト型化合物を主成分としており、いわゆるチタン酸ビスマスナトリウムカリウム(BNKT)系の圧電セラミックスである。このように、非鉛系材料を主成分とすることにより、電子部品に用いた場合に自然環境に対して負荷を小さくすることができる。
(Composition of base material)
The lead-free piezoelectric ceramic of the present invention is a perovskite type compound represented by Bi 0.5 (Na 1-x K x ) 0.5 TiO 3 and having a molar ratio x satisfying 0.15 <x <0.35. It is a so-called bismuth sodium potassium titanate (BNKT) type piezoelectric ceramic as a main component. In this way, by using a lead-free material as a main component, the load on the natural environment can be reduced when used for electronic components.

(添加物の組成)
BNKT系の圧電セラミックス等の母材の圧電特性を悪化させずに、セラミック部材の焼結温度を低下させるには、反応性が高く融点の低いZnOやBiを添加し、粒界相に液相を作り低温焼結を促進するのが効果的である。たとえば、4価のTiに対し、3価のBiなどの価数の異なるイオンを添加するとTiサイトで置換され、酸素イオンの空孔が生成され、この酸素空孔は焼結中のイオンの拡散を増加させる。この結果として焼結温度が効果的に低下する。
(Additive composition)
In order to lower the sintering temperature of the ceramic member without deteriorating the piezoelectric properties of the base material such as BNKT-based piezoelectric ceramics, ZnO or Bi 2 O 3 having a high reactivity and a low melting point is added, and the grain boundary phase is added. It is effective to promote low temperature sintering by forming a liquid phase. For example, when ions with different valences such as trivalent Bi are added to tetravalent Ti, they are replaced with Ti sites, and oxygen ion vacancies are generated. These oxygen vacancies diffuse ions during sintering. Increase. As a result, the sintering temperature is effectively reduced.

また、本発明の圧電セラミックスでは、さらにMnCOが添加されている。これらの添加物は、製造工程において合わせて0.1重量%以上2.5重量%以下の量を圧電セラミックスの材料に添加される。このような添加物が作用することで、1100℃以下の焼成温度で緻密化される。また、上記の成分により圧電特性を高くすることができ、圧電部品として様々に応用できる。 Further, MnCO 3 is further added to the piezoelectric ceramic of the present invention. These additives are added to the piezoelectric ceramic material in an amount of 0.1 wt% to 2.5 wt% in the manufacturing process. When such an additive acts, it is densified at a firing temperature of 1100 ° C. or lower. In addition, the above-described components can enhance the piezoelectric characteristics, and can be applied in various ways as piezoelectric parts.

(作製方法)
本発明の圧電セラミックスは以下の方法により作製できる。まず、Bi、NaCO、KCO、TiOの粉末を秤量し、溶媒とともにミルで混合する。そして、混合粉末を乾燥させ、メッシュパスにより造粒する。次いで、粉末を800℃で仮焼し、粉砕する。そして、バインダとともに所定量のBi、MnCO、ZnOを加え、乾燥、造粒する。このようにして得られた粉末を所望の形状に成形して1100℃で焼成すれば、低温焼成で、本発明の圧電セラミックスの緻密体が得られる。
(Production method)
The piezoelectric ceramic of the present invention can be produced by the following method. First, Bi 2 O 3 , Na 2 CO 3 , K 2 CO 3 , and TiO 2 powders are weighed and mixed together with a solvent in a mill. Then, the mixed powder is dried and granulated by a mesh pass. Subsequently, the powder is calcined at 800 ° C. and pulverized. Then, a predetermined amount of Bi 2 O 3 , MnCO 3 , and ZnO is added together with the binder, followed by drying and granulation. If the powder thus obtained is molded into a desired shape and fired at 1100 ° C., a dense body of the piezoelectric ceramic of the present invention can be obtained by low-temperature firing.

(実験)
主成分のBi0.5(Na1−x0.5TiOのK元素固溶比(モル比)xを0.15<x<0.35を満たす範囲で適宜選択し(x=0.10、0.25、0.30)、主成分に対してBiZn酸化物を1.5重量%、MnCOを0.5重量%添加し、1100℃で焼成することで圧電セラミックスの焼結体を得た。そして、焼結体ペレットの両主面に銀ペーストを印刷し、焼成することで電極を設けて分極し、各特性を測定した。なお、60〜150℃、5〜20分、2〜4kV/mmの条件で、焼結体を厚み方向に分極させた。そして、得られた焼結体の圧電特性を計測した。図1は、K元素の固溶比に対する圧電特性を示す表である。図1に示すように、x=0.10のときに、電気機械結合係数krおよび機械的品質係数Qmが、それぞれ0.23および742であり、これらについて最も高い特性が得られている。一方、比誘電率ε33 /εについては、x=0.30のとき837であり、最も高くなっている。
(Experiment)
The K element solid solution ratio (molar ratio) x of the main component Bi 0.5 (Na 1-x K x ) 0.5 TiO 3 is appropriately selected within a range satisfying 0.15 <x <0.35 (x = 0.10, 0.25, 0.30), 1.5% by weight of BiZn oxide and 0.5% by weight of MnCO 3 are added to the main components and fired at 1100 ° C. A sintered body was obtained. And the silver paste was printed on both the main surfaces of the sintered compact pellet, and the electrode was provided and polarized by baking, and each characteristic was measured. The sintered body was polarized in the thickness direction under the conditions of 60 to 150 ° C., 5 to 20 minutes, and 2 to 4 kV / mm. And the piezoelectric characteristic of the obtained sintered compact was measured. FIG. 1 is a table showing the piezoelectric characteristics with respect to the solid solution ratio of the K element. As shown in FIG. 1, when x = 0.10, the electromechanical coupling coefficient kr and the mechanical quality coefficient Qm are 0.23 and 742, respectively, and the highest characteristics are obtained. On the other hand, the relative dielectric constant ε 33 T / ε 0 is 837 when x = 0.30, which is the highest.

なお、圧電セラミックスについて、密度を測定した結果、いずれも問題なく焼結していることが確認できた。低温焼結性または機械的品質係数の大きさとの間に直接の関係はない。密度として、かさ密度を測定しており、測定にはアルキメデス法を用いている。   As a result of measuring the density of the piezoelectric ceramic, it was confirmed that all were sintered without any problem. There is no direct relationship between low temperature sinterability or mechanical quality factor magnitude. The bulk density is measured as the density, and the Archimedes method is used for the measurement.

(圧電素子)
なお、本発明の非鉛系圧電セラミックスは、電極と圧電体層が交互に積層された積層型の圧電素子に用いられることで、大きな効果が得られる。本発明の圧電セラミックスは、固相焼結が簡便と言う利点があり積層化に適している。積層型の圧電素子には、たとえば圧電トランスや圧電アクチュエータがある。マンガン、ビスマスおよび亜鉛の各元素の酸化物からなる添加物を用いてBNKT系圧電セラミックスを圧電体層とする積層型の圧電素子を作製することで、鉛を含まない積層型の圧電素子を得ることができる。
(Piezoelectric element)
In addition, the lead-free piezoelectric ceramic of the present invention provides a great effect when used in a laminated piezoelectric element in which electrodes and piezoelectric layers are alternately laminated. The piezoelectric ceramic of the present invention has an advantage that solid-phase sintering is simple and is suitable for lamination. Examples of the laminated piezoelectric element include a piezoelectric transformer and a piezoelectric actuator. By producing a laminated piezoelectric element using a BNKT piezoelectric ceramic as a piezoelectric layer using an additive composed of an oxide of each element of manganese, bismuth and zinc, a laminated piezoelectric element containing no lead is obtained. be able to.

本発明の圧電セラミックスを応用した積層型の圧電素子の製造方法の一例として、積層型圧電トランスの製造方法を以下に説明する。Bi、NaCO、KCO、TiOの粉末のそれぞれ適量を配合しボールミル等により均一に混合する。混合後のスラリは乾燥させ、800℃で仮焼を行なう。なお、仮焼温度は800℃以下とするのが好ましい。たとえば、800℃以下とすることにより焼結体の誘電損失が小さくなる。 As an example of a method for manufacturing a multilayer piezoelectric element to which the piezoelectric ceramic of the present invention is applied, a method for manufacturing a multilayer piezoelectric transformer will be described below. Appropriate amounts of Bi 2 O 3 , Na 2 CO 3 , K 2 CO 3 , and TiO 2 powders are blended and mixed uniformly by a ball mill or the like. The slurry after mixing is dried and calcined at 800 ° C. The calcining temperature is preferably 800 ° C. or lower. For example, the dielectric loss of a sintered compact becomes small by setting it as 800 degrees C or less.

次に、仮焼体を、ボールミル等で粉砕しスラリを乾燥させる。そして、マンガン、ビスマスおよび亜鉛の各元素の酸化物からなる添加物を0.1重量%以上2.5重量%以下の所定量それぞれ添加し、バインダを混合してグリーンシートを成形する。そして、1100℃以下で焼成することで、十分に焼結した本発明の圧電セラミックスを得ることができる。   Next, the calcined body is pulverized with a ball mill or the like to dry the slurry. Then, predetermined amounts of not less than 0.1 wt% and not more than 2.5 wt% of additives made of oxides of manganese, bismuth and zinc are added, and a binder is mixed to form a green sheet. And by sintering at 1100 degrees C or less, the piezoelectric ceramic of this invention fully sintered can be obtained.

グリーンシートの作製は、公知の方法、たとえば、ドクターブレード法や押出成形法、カレンダロール法等を用いることができる。グリーンシートの厚みは、たとえば、焼成後に所望の厚みとなるように調整する。こうして作製したグリーンシートを焼成収縮や加工しろを考慮して打ち抜き加工または切り取り加工等し、作製する圧電トランスの短冊状の形状に適合した所定の形状の印刷用シートを得る。印刷用シートにおける長手方向半分の領域に、AgおよびPdを含む内部電極ペーストをスクリーン印刷法等で印刷する。ここで、Ag−Pdの内部電極ペーストの印刷は、たとえば、焼成後に2μm〜5μm程度となるように印刷厚みを調節する。また、形成される内部電極をその後に一層おきに接続することが容易となるように、内部電極ペーストを印刷するパターンを定めておくことが望ましい。   The green sheet can be produced by a known method such as a doctor blade method, an extrusion method, a calendar roll method, or the like. The thickness of the green sheet is adjusted so as to have a desired thickness after firing, for example. The green sheet thus manufactured is punched or cut in consideration of firing shrinkage and processing margin, and a printing sheet having a predetermined shape suitable for the rectangular shape of the piezoelectric transformer to be manufactured is obtained. An internal electrode paste containing Ag and Pd is printed by a screen printing method or the like on a half region in the longitudinal direction of the printing sheet. Here, in the printing of the internal electrode paste of Ag—Pd, for example, the printing thickness is adjusted to be about 2 μm to 5 μm after firing. Further, it is desirable to determine a pattern for printing the internal electrode paste so that the internal electrodes to be formed can be easily connected every other layer thereafter.

次いで、内部電極ペーストが印刷された印刷用シートを位置合わせして所定枚数ほど積層し、こうして積層された印刷用シートどうしを熱プレス等で熱圧着し、一体化する。このように、シートを所定位置に合わせて圧着させたプレス体を型抜きし、成形体を作製する。   Next, the printing sheets on which the internal electrode paste is printed are aligned and laminated by a predetermined number, and the printing sheets thus laminated are thermocompression bonded by a hot press or the like to be integrated. In this way, the press body in which the sheet is press-fitted in accordance with a predetermined position is punched to produce a molded body.

続いて、所定の温度パターンに従い1100℃以下で成形体を焼成する。得られた焼成体の側面や表面に必要に応じて、研削加工や研磨加工を施して形状を整える。次に、Ag−Pdペースト等を用いて、入力部の内部電極を一層おきに接続して1対の電極を形成し、また、出力部の端面に出力用電極を形成した後、所定の温度で処理してAg−Pdペースト等を焼き付ける。通常、このAg−Pdペースト等の焼き付け処理は焼成温度よりも低い温度で行なう。そして、必要に応じて形成された電極にリード線を取り付ける。得られた焼結体は、分極処理を行なう。入力部に設けられた1対の電極と、出力部の端面に設けられた電極との間に所定の電圧を印加して出力部の分極処理を行い、その後に入力部に設けられた1対の電極間に所定の電圧を印加して入力部の分極処理を行なうことで圧電トランスが作製される。   Subsequently, the molded body is fired at 1100 ° C. or less according to a predetermined temperature pattern. If necessary, the shape and the shape of the fired body are adjusted by grinding or polishing. Next, using an Ag-Pd paste or the like, the internal electrodes of the input part are connected every other layer to form a pair of electrodes, and the output electrode is formed on the end face of the output part, and then at a predetermined temperature. The Ag-Pd paste or the like is baked by processing. Usually, the baking treatment of the Ag—Pd paste or the like is performed at a temperature lower than the firing temperature. And a lead wire is attached to the electrode formed as needed. The obtained sintered body is subjected to polarization treatment. A predetermined voltage is applied between the pair of electrodes provided in the input unit and the electrode provided on the end face of the output unit to perform polarization processing of the output unit, and then the pair of electrodes provided in the input unit A piezoelectric transformer is manufactured by applying a predetermined voltage between the electrodes and performing polarization processing of the input portion.

なお、分極処理は、圧電セラミックスのキュリー点より低い所定の温度において、所定時間行われる。このようにして、非鉛のBNKT系積層型圧電トランスを製造することができる。このように、本発明の圧電セラミックスからなる圧電体層とAg−Pd等からなる内部電極層とが交互に積層されたプレス体を、一体焼成して非鉛の積層型圧電トランスを製造することができる。   The polarization process is performed for a predetermined time at a predetermined temperature lower than the Curie point of the piezoelectric ceramic. In this way, a lead-free BNKT laminated piezoelectric transformer can be manufactured. In this way, a press body in which piezoelectric layers made of the piezoelectric ceramic of the present invention and internal electrode layers made of Ag-Pd or the like are alternately laminated is integrally fired to produce a lead-free laminated piezoelectric transformer. Can do.

Claims (3)

Bi0.5(Na1−x0.5TiOで表され、モル比xが0.15<x<0.35を満たすペロブスカイト型化合物を主成分とし、
前記主成分に対して、マンガン、ビスマスおよび亜鉛の各元素の酸化物からなる添加物を0.1重量%以上2.5重量%以下含むことを特徴とする圧電セラミックス。
The main component is a perovskite compound represented by Bi 0.5 (Na 1-x K x ) 0.5 TiO 3 and having a molar ratio x satisfying 0.15 <x <0.35.
A piezoelectric ceramic comprising 0.1 to 2.5% by weight of an additive composed of oxides of manganese, bismuth and zinc with respect to the main component.
電気機械結合係数が0.14以上、機械的品質係数が185以上で、比誘電率が350以上であることを特徴とする請求項1記載の圧電セラミックス。   2. The piezoelectric ceramic according to claim 1, wherein an electromechanical coupling coefficient is 0.14 or more, a mechanical quality coefficient is 185 or more, and a relative dielectric constant is 350 or more. 請求項1または請求項2記載の圧電セラミックスからなる圧電層と内部電極とが一体焼成されていることを特徴とする圧電素子。   A piezoelectric element comprising a piezoelectric layer made of the piezoelectric ceramic according to claim 1 and an internal electrode and integrally fired.
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