JP2012060166A5 - - Google Patents

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Publication number
JP2012060166A5
JP2012060166A5 JP2011275221A JP2011275221A JP2012060166A5 JP 2012060166 A5 JP2012060166 A5 JP 2012060166A5 JP 2011275221 A JP2011275221 A JP 2011275221A JP 2011275221 A JP2011275221 A JP 2011275221A JP 2012060166 A5 JP2012060166 A5 JP 2012060166A5
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JP
Japan
Prior art keywords
layer
type
photoelectric conversion
type layer
conversion device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2011275221A
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English (en)
Japanese (ja)
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JP2012060166A (ja
JP5373045B2 (ja
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Priority to JP2011275221A priority Critical patent/JP5373045B2/ja
Priority claimed from JP2011275221A external-priority patent/JP5373045B2/ja
Publication of JP2012060166A publication Critical patent/JP2012060166A/ja
Publication of JP2012060166A5 publication Critical patent/JP2012060166A5/ja
Application granted granted Critical
Publication of JP5373045B2 publication Critical patent/JP5373045B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011275221A 2011-12-16 2011-12-16 光電変換装置 Expired - Fee Related JP5373045B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011275221A JP5373045B2 (ja) 2011-12-16 2011-12-16 光電変換装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011275221A JP5373045B2 (ja) 2011-12-16 2011-12-16 光電変換装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2009283877A Division JP4940290B2 (ja) 2009-12-15 2009-12-15 光電変換装置及びその製造方法

Publications (3)

Publication Number Publication Date
JP2012060166A JP2012060166A (ja) 2012-03-22
JP2012060166A5 true JP2012060166A5 (enrdf_load_stackoverflow) 2012-12-13
JP5373045B2 JP5373045B2 (ja) 2013-12-18

Family

ID=46056800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011275221A Expired - Fee Related JP5373045B2 (ja) 2011-12-16 2011-12-16 光電変換装置

Country Status (1)

Country Link
JP (1) JP5373045B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6158153B2 (ja) 2014-09-19 2017-07-05 株式会社東芝 半導体装置及びその製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000077694A (ja) * 1998-06-16 2000-03-14 Canon Inc 光起電力素子および太陽電池モジュ―ル
JP2003158276A (ja) * 2001-11-21 2003-05-30 Mitsubishi Heavy Ind Ltd 微結晶シリコン太陽電池及びその製造方法
JP2003188400A (ja) * 2001-12-20 2003-07-04 Mitsubishi Heavy Ind Ltd 結晶性ＳｉＣ膜の製造方法、結晶性ＳｉＣ膜及び太陽電池
JP3978121B2 (ja) * 2002-11-27 2007-09-19 三菱重工業株式会社 薄膜太陽電池の製造方法
JP2004335823A (ja) * 2003-05-09 2004-11-25 Canon Inc 光起電力素子及び光起電力素子の形成方法
US7671271B2 (en) * 2006-03-08 2010-03-02 National Science And Technology Dev. Agency Thin film solar cell and its fabrication process
JP2008283075A (ja) * 2007-05-11 2008-11-20 Kaneka Corp 光電変換装置の製造方法

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