JP2012040869A - 液体吐出ヘッドの製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
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- 238000000034 method Methods 0.000 claims description 31
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- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- LPEKGGXMPWTOCB-UHFFFAOYSA-N 8beta-(2,3-epoxy-2-methylbutyryloxy)-14-acetoxytithifolin Natural products COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 1
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000010538 cationic polymerization reaction Methods 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
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- ODQWQRRAPPTVAG-GZTJUZNOSA-N doxepin Chemical compound C1OC2=CC=CC=C2C(=C/CCN(C)C)/C2=CC=CC=C21 ODQWQRRAPPTVAG-GZTJUZNOSA-N 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
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- 229940057867 methyl lactate Drugs 0.000 description 1
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/1404—Geometrical characteristics
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
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- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
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Abstract
【解決手段】流路形成部材4となるネガ型有機樹脂層のうち吐出口5及び流体抵抗部8を形成する領域を除いて露光し、かつネガ型有機樹脂層及び前記流路パターン7を加熱して、ネガ型有機樹脂層の流体抵抗部8に対応する部分を基板1に向かって移動させ、ネガ型有機樹脂層のうち流体抵抗部8を形成する領域を露光し、現像する工程と、を含む液体吐出ヘッドの製造方法である。
【選択図】図2
Description
液滴を吐出させるためのエネルギーを発生する吐出エネルギー発生素子を第1の面側に有する基板と、
前記第1の面の上に形成され、かつ前記液滴を吐出するための吐出口と該吐出口に液体を供給するための液体流路とを構成する流路形成部材と、
を含み、
前記液体流路の壁面であって前記基板に対向する面側に流体抵抗部を有する液体吐出ヘッドの製造方法であって、
(1)前記基板の第1の面の上に、前記液体流路の型材となる流路パターンを形成する工程と、
(2)前記流路パターンの上に、前記流路形成部材となるネガ型有機樹脂層を形成する工程と、
(3)前記吐出口及び前記流体抵抗部を形成する領域を除いて前記ネガ型有機樹脂層を露光し、かつ前記ネガ型有機樹脂層及び前記流路パターンを加熱し、前記ネガ型感光性樹脂層の前記流体抵抗部に対応する部分を前記基板に向かって移動させる工程と、
(4)前記ネガ型有機樹脂層のうち前記流体抵抗部を形成する領域を露光し、現像することにより、前記吐出口を形成する工程と、
(5)前記流路パターンを除去する工程と、
を含むことを特徴とする液体吐出ヘッドの製造方法である。
本実施例では、図2に示す工程を用いて液体吐出ヘッドを作製し、図6に示した構成の液体吐出ヘッドを作製した。
本実施例では、図3の模式図に示した液体吐出ヘッドを作製した。図3(a)は液体吐出ヘッドの模式的な平面図であり、図3(b)は図3(a)における点線B−B´における模式的な垂直断面図である。
本実施例では、図5に記載の製造方法によって液体吐出ヘッドを作製した。また、図5は、図1の点線A−A´の断面における液体吐出ヘッドの製造工程を示す断面工程図である。
2 吐出エネルギー発生素子
3 液体流路
4 流路形成部材
5 吐出口
5' 吐出口形成領域
6 供給口
7 流路パターン
8 流体抵抗部
10 流体抵抗形成領域
11 流路形成部材
12 吐出口プレート
13 液体流路壁(インク流路壁)
Claims (3)
- 液滴を吐出させるためのエネルギーを発生する吐出エネルギー発生素子を第1の面側に有する基板と、
前記第1の面の上に形成され、かつ前記液滴を吐出するための吐出口と該吐出口に液体を供給するための液体流路とを構成する流路形成部材と、
を含み、
前記液体流路の壁面であって前記基板に対向する面側に流体抵抗部を有する液体吐出ヘッドの製造方法であって、
(1)前記基板の第1の面の上に、前記液体流路の型材となる流路パターンを形成する工程と、
(2)前記流路パターンの上に、前記流路形成部材となるネガ型有機樹脂層を形成する工程と、
(3)前記吐出口及び前記流体抵抗部を形成する領域を除いて前記ネガ型有機樹脂層を露光し、かつ前記ネガ型有機樹脂層及び前記流路パターンを加熱し、前記ネガ型感光性樹脂層の前記流体抵抗部に対応する部分を前記基板に向かって移動させる工程と、
(4)前記ネガ型有機樹脂層のうち前記流体抵抗部を形成する領域を露光し、現像することにより、前記吐出口を形成する工程と、
(5)前記流路パターンを除去する工程と、
を含むことを特徴とする液体吐出ヘッドの製造方法。 - 前記流路パターンがポジ型有機樹脂から形成される請求項1に記載の液体吐出ヘッドの製造方法。
- 前記流体抵抗部は前記液体流路の壁面であって前記基板に対向する面側に凸形状を形成するものである請求項1又は2に記載の液体吐出ヘッドの製造方法。
Priority Applications (1)
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JP2011155732A JP5744653B2 (ja) | 2010-07-23 | 2011-07-14 | 液体吐出ヘッドの製造方法 |
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JP2010166001 | 2010-07-23 | ||
JP2010166001 | 2010-07-23 | ||
JP2011155732A JP5744653B2 (ja) | 2010-07-23 | 2011-07-14 | 液体吐出ヘッドの製造方法 |
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JP2012040869A true JP2012040869A (ja) | 2012-03-01 |
JP5744653B2 JP5744653B2 (ja) | 2015-07-08 |
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JP (1) | JP5744653B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013230594A (ja) * | 2012-04-27 | 2013-11-14 | Canon Inc | 液体吐出ヘッドの製造方法 |
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JP5901149B2 (ja) | 2011-06-01 | 2016-04-06 | キヤノン株式会社 | 液体吐出ヘッドおよびその製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000255072A (ja) * | 1999-03-10 | 2000-09-19 | Canon Inc | インクジェット記録ヘッドの製造方法およびインクジェット記録ヘッド |
JP2004042389A (ja) * | 2002-07-10 | 2004-02-12 | Canon Inc | 微細構造体の製造方法、液体吐出ヘッドの製造方法および液体吐出ヘッド |
JP2006150900A (ja) * | 2004-12-01 | 2006-06-15 | Canon Inc | 液体吐出ヘッドおよびその製造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH05124208A (ja) | 1991-11-07 | 1993-05-21 | Canon Inc | 液体噴射記録ヘツドの製造方法および液体噴射記録ヘツド |
JP3143307B2 (ja) * | 1993-02-03 | 2001-03-07 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
JP3862625B2 (ja) | 2002-07-10 | 2006-12-27 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
KR100517515B1 (ko) * | 2004-01-20 | 2005-09-28 | 삼성전자주식회사 | 모놀리틱 잉크젯 프린트헤드의 제조방법 |
US8037603B2 (en) | 2006-04-27 | 2011-10-18 | Canon Kabushiki Kaisha | Ink jet head and producing method therefor |
-
2011
- 2011-07-07 US US13/177,765 patent/US8268539B2/en not_active Expired - Fee Related
- 2011-07-14 JP JP2011155732A patent/JP5744653B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000255072A (ja) * | 1999-03-10 | 2000-09-19 | Canon Inc | インクジェット記録ヘッドの製造方法およびインクジェット記録ヘッド |
JP2004042389A (ja) * | 2002-07-10 | 2004-02-12 | Canon Inc | 微細構造体の製造方法、液体吐出ヘッドの製造方法および液体吐出ヘッド |
JP2006150900A (ja) * | 2004-12-01 | 2006-06-15 | Canon Inc | 液体吐出ヘッドおよびその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013230594A (ja) * | 2012-04-27 | 2013-11-14 | Canon Inc | 液体吐出ヘッドの製造方法 |
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US8268539B2 (en) | 2012-09-18 |
US20120021360A1 (en) | 2012-01-26 |
JP5744653B2 (ja) | 2015-07-08 |
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